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JPH0347684B2 - - Google Patents

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Publication number
JPH0347684B2
JPH0347684B2 JP18782284A JP18782284A JPH0347684B2 JP H0347684 B2 JPH0347684 B2 JP H0347684B2 JP 18782284 A JP18782284 A JP 18782284A JP 18782284 A JP18782284 A JP 18782284A JP H0347684 B2 JPH0347684 B2 JP H0347684B2
Authority
JP
Japan
Prior art keywords
abnormality
voltage
analog detection
displacement
analog
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18782284A
Other languages
Japanese (ja)
Other versions
JPS6166113A (en
Inventor
Makoto Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP18782284A priority Critical patent/JPS6166113A/en
Publication of JPS6166113A publication Critical patent/JPS6166113A/en
Publication of JPH0347684B2 publication Critical patent/JPH0347684B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、変位検出装置の異常検出方法及び回
路に係り、特に、直線型変位測定機に用いるのに
好適な、信号発生源が等間隔に形成されたメイン
スケールと、該メインスケールを走査するため
の、該走査方向に所定間隔で並設された複数の信
号変調手段を有するインデツクススケールとを相
対移動せしめて、同一周期で相互に所定量だけ位
相がずれた、略同一波形・振幅の複数のアナログ
検出信号を発生させ、該アナログ検出信号をパル
ス化して、そのパルス数を計数することにより、
両スケール間の相対移動変位量を求めるようにし
た変位検出装置の異常検出方法及び回路の改良に
関する。
Detailed Description of the Invention [Industrial Application Field] The present invention relates to an abnormality detection method and circuit for a displacement detection device, and is particularly suitable for use in a linear displacement measuring device, in which signal generation sources are equidistantly spaced. A main scale formed on the main scale and an index scale having a plurality of signal modulation means arranged in parallel at predetermined intervals in the scanning direction for scanning the main scale are moved relative to each other at the same period. By generating a plurality of analog detection signals having substantially the same waveform and amplitude and whose phases are shifted by a predetermined amount, converting the analog detection signals into pulses, and counting the number of pulses,
The present invention relates to an abnormality detection method and circuit improvement for a displacement detection device that determines the amount of relative displacement between both scales.

〔従来の技術〕[Conventional technology]

一般に、物体の長さ等を測定する測長器、例え
ばノギスやマイクロメータにおいて、その本体に
対する測定子の移動量、コラムに対するスライダ
の移動量等のように、相対移動するものの移動量
を測定する場合、例えば、光源、光学格子を有す
るメインスケール、所定のピツチずれを持つた複
数の光学格子を有するインデツクススケール及び
受光素子からなるエンコーダを測長器本体に組込
み、前記メインスケールとインデツクススケール
とを相対移動せしめて、その光量変化に応じて、
相互に位相がずれた2つのアナログ検出信号を発
生させ、該アナログ検出信号をパルス化して、そ
のパルス数を計数することにより、メインスケー
ルとインデツクススケール間の相対移動変位量を
求めるようにした、いわゆる光学式変位検出装置
が知られている。この光学式変位検出装置は、高
精度の検出が可能であり、且つ、デジタル表示に
より読取りが容易であることから、広く採用され
ている。
In general, in a length measuring device that measures the length of an object, such as a caliper or a micrometer, it measures the amount of movement of something that moves relative to it, such as the amount of movement of a measuring point with respect to its main body, the amount of movement of a slider with respect to a column, etc. In this case, for example, an encoder consisting of a light source, a main scale having an optical grating, an index scale having a plurality of optical gratings with a predetermined pitch shift, and a light receiving element is built into the main body of the length measuring instrument, and the main scale and the index scale are connected to each other. and according to the change in light intensity,
The relative displacement between the main scale and the index scale is determined by generating two analog detection signals that are out of phase with each other, converting the analog detection signals into pulses, and counting the number of pulses. A so-called optical displacement detection device is known. This optical displacement detection device is widely used because it can perform highly accurate detection and is easy to read due to its digital display.

このような変位検出装置における異常検出は重
要であり、特に、機器の高精度化に伴つて、例え
ば工作機械のフイードバツク系に採用される等、
オンラインで使用される場合には、その製品保証
等から検出の是否は厳しく管理されなければなら
ない。
Abnormality detection in such displacement detection devices is important, especially as devices become more precise, such as in the feedback systems of machine tools.
When used online, the propriety of detection must be strictly controlled based on product warranties, etc.

一般に、前記のような変位検出装置、例えば光
学式変位検出装置の異常としては、光源の故障、
断線、レンズや光学格子の汚れ、位置ずれ、電源
電圧変動等の検出器自体に起因するもの、断線、
分割ミス、ノイズの混入、電子部品破損等のエン
コーダに起因するもの、及びその他カウンタ、表
示器等に起因するもの等が考えられる。
In general, malfunctions of the above-mentioned displacement detection device, for example, an optical displacement detection device, include failure of the light source,
Disconnections, dirt on the lens or optical grid, misalignment, power supply voltage fluctuations, etc. caused by the detector itself, disconnections,
Possible causes include division errors, noise intrusion, damage to electronic components, etc. caused by the encoder, and other factors caused by the counter, display, etc.

このうち、エンコーダ以降の電気信号を監視す
るものとしては、従来から、アナログ検出信号を
計数のためのパルス信号に変換した後に基準クロ
ツクパルスと対比させ、その異常パルスを発見す
る方法や、アナログ検出信号のレベル低下を監視
する方法が提案されている。
Among these methods, conventional methods for monitoring electrical signals after the encoder include a method of converting an analog detection signal into a pulse signal for counting and then comparing it with a reference clock pulse to discover abnormal pulses, and a method of detecting abnormal pulses by converting the analog detection signal into a pulse signal for counting A method has been proposed to monitor the decrease in the level of

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、前者は、検出装置の運転状態が
まちまちであることから確実性に欠け、後者も不
充分であるという問題点を有していた。
However, the former method lacks reliability because the operating conditions of the detection device vary, and the latter method is also insufficient.

又、従来の方法は、いずれも、エンコーダ以後
の電気信号を監視するものであり、使用者側の取
付け直し、分解組立て等の作業も伴つて、実際に
発生することが多い検出器側に起因する異常を検
出することができないという問題点を有してい
た。
In addition, all conventional methods monitor electrical signals after the encoder, and they require work such as reinstallation and disassembly and assembly on the user's side. However, there was a problem in that it was not possible to detect abnormalities that occurred.

このような問題点を解消するべく、各相アナロ
グ信号を計数用のパルス信号とは別に処理して、
アナログ検出信号の位相や振幅の異常を検出する
ことが考えられるが、この場合には、アナログ検
出信号に手を加えてしまうため、構成が複雑とな
るだけでなく、アナログ検出信号に手を加える際
に異常を発生する恐れがあつた。
In order to solve this problem, each phase analog signal is processed separately from the counting pulse signal.
It is possible to detect abnormalities in the phase or amplitude of the analog detection signal, but in this case, the analog detection signal is modified, which not only complicates the configuration, but also requires modification of the analog detection signal. There was a risk that an abnormality would occur.

〔発明の目的〕[Purpose of the invention]

本発明は、前記従来の問題点を解消するべくな
されたもので、アナログ検出信号に手を加えた
り、計数用パルス化後のパルス信号に手を加える
ことなく、多くの故障原因による異常を一括して
監視することができる変位検出装置の異常検出方
法を提供することを第1の目的とする。
The present invention was made in order to solve the above-mentioned conventional problems, and it is possible to simultaneously detect abnormalities caused by many causes of failure without modifying the analog detection signal or modifying the pulse signal after it has been converted into pulses for counting. A first object of the present invention is to provide a method for detecting an abnormality in a displacement detecting device that can be monitored.

本発明は、又、前記本発明に係る異常検出方法
が採用された変位検出装置の異常検出回路を提供
することを第2の目的とする。
A second object of the present invention is to provide an abnormality detection circuit for a displacement detection device in which the abnormality detection method according to the present invention is adopted.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、信号発生源が等間隔に形成されたメ
インスケールと、該メインスケールを走査するた
めの、該走査方向に所定間隔で並設された複数の
信号変調手段を有するインデツクススケールとを
相対移動せしめて、同一周期で相互に所定量だけ
位相がずれた、略同一波形・振幅の複数のアナロ
グ検出信号を発生させ、該アナログ検出信号をパ
ルス化して、そのパルス数を計数することによ
り、両スケール間の相対移動変位量を求めるよう
にした変位検出装置の異常検出方法において、第
1図にその要旨を示す如く、全てのアナログ検出
信号の共通基準レベルを挾み、且つ、複数のアナ
ログ検出信号が正常時に交わる全てのレベルを含
まないように設定された高レベルと低レベルの間
を異常検出領域とし、各相のアナログ検出信号の
実際のレベルが、前記異常検出領域内にあるか否
かを、各相毎に監視して、全てのアナログ検出信
号の実際のレベルが、前記異常検出領域内にある
時に、異常有りと判定するようにして、前記第1
の目的を達成したものである。
The present invention includes a main scale in which signal generation sources are formed at equal intervals, and an index scale having a plurality of signal modulation means arranged in parallel at predetermined intervals in the scanning direction for scanning the main scale. By causing relative movement, generating multiple analog detection signals having substantially the same waveform and amplitude, which are phase-shifted by a predetermined amount in the same period, converting the analog detection signals into pulses, and counting the number of pulses. , an abnormality detection method for a displacement detection device that calculates the amount of relative displacement between both scales, as shown in Figure 1, a common reference level of all analog detection signals is interposed, and An abnormality detection area is set between a high level and a low level that are set so as not to include all levels that the analog detection signal crosses during normal times, and the actual level of the analog detection signal of each phase is within the abnormality detection area. It is determined that there is an abnormality when the actual levels of all analog detection signals are within the abnormality detection area, and the first
This goal has been achieved.

又、本発明の実施態様は、前記高レベルと低レ
ベルの差、即ち異常検出領域を、アナログ検出信
号の相数が多い程、小さく設定するようにして、
アナログ検出信号の相数が多い場合でも、感度良
く異常を検出できるようにしたものである。
Further, in an embodiment of the present invention, the difference between the high level and the low level, that is, the abnormality detection area, is set to be smaller as the number of phases of the analog detection signal increases,
This allows abnormalities to be detected with high sensitivity even when the number of phases of the analog detection signal is large.

又、本発明は、信号発生源が等間隔に形成され
たメインスケールと、該メインスケールを走査す
るための、該走査方向に所定間隔で並設された複
数の信号変調手段を有するインデツクススケール
とを相対移動せしめて、同一周期で相互に所定量
だけ位相がずれた、略同一波形・振幅の複数のア
ナログ検出信号をエンコーダに発生させ、該アナ
ログ検出信号を波形成形回路でパルス化して、そ
のパルス数を可逆カウンタで計数することによ
り、両スケール間の相対移動変位量を求めるよう
にした変位検出装置の異常検出回路において、全
てのアナログ検出信号の共通基準レベルを挾み、
且つ、複数のアナログ検出信号が正常時に交わる
全てのレベルを含まないように設定された高レベ
ル電圧及び低レベル電圧を出力する電圧設定器
と、該電圧設定器出力と前記アナログ検出信号の
レベルを比較して、アナログ検出信号のレベルが
前記高レベル電圧と低レベル電圧の間の異常検出
領域内にある時に出力を発生する、各相のアナロ
グ検出信号毎に設けられた複数の電圧比較器と、
全ての電圧比較器が出力を発生した時に、異常有
りと判定する異常判定回路とを備えることによ
り、前記第2の目的を達成したものである。
The present invention also provides an index scale having a main scale in which signal generation sources are formed at equal intervals, and a plurality of signal modulation means arranged in parallel at predetermined intervals in the scanning direction for scanning the main scale. The encoder generates a plurality of analog detection signals having substantially the same waveform and amplitude, which are mutually shifted in phase by a predetermined amount in the same cycle, by moving the signals relatively to each other, and converting the analog detection signals into pulses by a waveform shaping circuit, In the abnormality detection circuit of the displacement detection device, which calculates the amount of relative displacement between both scales by counting the number of pulses with a reversible counter, the common reference level of all analog detection signals is determined.
and a voltage setter that outputs a high level voltage and a low level voltage that are set so as not to include all levels that the plurality of analog detection signals intersect during normal operation; In comparison, a plurality of voltage comparators provided for each analog detection signal of each phase generate an output when the level of the analog detection signal is within the abnormality detection region between the high level voltage and the low level voltage. ,
The second object is achieved by including an abnormality determination circuit that determines that an abnormality exists when all the voltage comparators generate outputs.

又、本発明の実施態様は、前記電圧設定器出力
の高レベル電圧及び低レベル電圧を可変として、
機種や使用態様等の変化に容易に対応できるよう
にしたものである。
Further, in an embodiment of the present invention, the high level voltage and the low level voltage of the output of the voltage setting device are variable,
This allows for easy adaptation to changes in model types, usage patterns, etc.

又、本発明の他の実施態様は、前記電圧比較器
を、スイツチング作用を有するコンパレータで構
成して、本発明による処理が簡単な構成で適確に
行われるようにしたものである。
In another embodiment of the present invention, the voltage comparator is constructed of a comparator having a switching function, so that the processing according to the present invention can be performed accurately with a simple configuration.

〔作用〕[Effect]

本発明においては、信号発生源が等間隔に形成
されたメインスケールと、該メインスケールを走
査するための、該走査方向に所定間隔で並設され
た複数の信号変調手段を有するインデツクススケ
ールとを相対移動せしめて、同一周期で相互に所
定量だけ位相がずれた、略同一波形・振幅の複数
のアナログ検出信号を発生させ、該アナログ検出
信号をパルス化して、そのパルス数を計数するこ
とにより、両スケール間の相対移動変位量を求め
るに際して、各相のアナログ検出信号の実際のレ
ベルが、全てのアナログ検出信号の共通基準レベ
ルを挾み、且つ、複数のアナログ検出信号が正常
時に交わる全てのレベルを含まないように設定さ
れた高レベルと低レベルの間の異常検出領域内に
ある時に、異常有りと判定するようにしたので、
アナログ検出信号に手を加えたり、計数用パルス
化後のパルス信号に手を加えることなく、多くの
故障原因による異常を一括して監視することがで
きる。
The present invention includes a main scale in which signal generation sources are formed at equal intervals, and an index scale having a plurality of signal modulation means arranged in parallel at predetermined intervals in the scanning direction for scanning the main scale. to generate a plurality of analog detection signals having substantially the same waveform and amplitude with the same cycle and a predetermined phase shift, converting the analog detection signals into pulses, and counting the number of pulses. Therefore, when calculating the amount of relative displacement between both scales, the actual level of the analog detection signal of each phase should be between the common reference level of all analog detection signals, and the multiple analog detection signals should intersect under normal conditions. Since it is determined that there is an abnormality when it is within the abnormality detection area between the high level and the low level, which is set so as not to include all levels,
Abnormalities caused by many causes of failure can be monitored all at once without modifying the analog detection signal or modifying the pulse signal after it has been converted into pulses for counting.

〔実施例〕〔Example〕

以下、図面を参照して、本発明が採用された光
学式変位検出装置を備えた直線型変位測定機の実
施例を詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a linear displacement measuring machine equipped with an optical displacement detection device employing the present invention will be described in detail with reference to the drawings.

本実施例は、第2図に示す如く、スピンドル等
の測定子(図示省略)に連結された、その変位を
検出するための、光源、メインスケール、インデ
ツクススケール及び受光素子からなるエンコーダ
12と、必要に応じて方向弁別回路や分割回路を
含む波形成形回路14と、該波形成形回路14出
力の計数用パルス信号を可逆計数するカウンタ1
6と、該カウンタ16の計数値をデジタル表示に
適した信号に変換する表示器駆動装置18と、該
表示器駆動装置18によつて駆動され、前記カウ
ンタ16の計数値を測定値として表示するデジタ
ル表示器20と、前記カウンタ16の計数値やデ
ジタル表示器20の表示値をホールドしたり、ク
リアしたり、インチ−ミリ単位の切換えを行つた
りするための制御部22とを備えたデジタル表示
式の直線型変位測定機10において、計数用パル
スを発生するための回路(波形成形回路14等)
とは別個に、前記エンコーダ12から出力され
る、位相が90゜ずれた2つのアナログ検出信号Sa,
Sbの共通基準レベルを挾み、且つ、該2つのア
ナログ検出信号Sa,Sbが正常時に交わる全ての
レベルを含まないように設定された高レベル電圧
La及び低レベル電圧Lbを出力する電圧設定器3
0と、該電圧設定器30出力と前記アナログ検出
信号Sa,Sbのレベルを比較して、アナログ検出
信号のレベルが前記高レベル電圧Laと低レベル
電圧Lbの間の異常検出領域S内にある時に出力
を発生する、各相のアナログ検出信号毎に設けら
れた2つの電圧比較器32,33と、全ての電圧
比較器32,33が出力を発生した時に異常有り
と判定して、警報を出力する異常判定回路34
と、を設けたものである。
As shown in FIG. 2, this embodiment includes an encoder 12 which is connected to a measuring element such as a spindle (not shown) and is composed of a light source, a main scale, an index scale, and a light receiving element for detecting the displacement of the measuring element (not shown). , a waveform shaping circuit 14 including a direction discrimination circuit and a dividing circuit as necessary, and a counter 1 for reversibly counting counting pulse signals output from the waveform shaping circuit 14.
6, a display driving device 18 that converts the counted value of the counter 16 into a signal suitable for digital display, and a display driving device 18 that is driven by the display driving device 18 and displays the counted value of the counter 16 as a measured value. A digital display device comprising a digital display device 20 and a control section 22 for holding and clearing the count value of the counter 16 and the display value of the digital display device 20, and switching between inch and millimeter units. In the display type linear displacement measuring device 10, a circuit for generating counting pulses (waveform shaping circuit 14, etc.)
Separately, two analog detection signals Sa, which are output from the encoder 12 and whose phases are shifted by 90 degrees, are output from the encoder 12.
A high level voltage that is set to sandwich the common reference level of Sb and not include all levels that the two analog detection signals Sa and Sb intersect during normal operation.
Voltage setting device 3 that outputs La and low level voltage Lb
0, the output of the voltage setter 30 and the levels of the analog detection signals Sa and Sb are compared, and the level of the analog detection signal is within the abnormality detection region S between the high level voltage La and the low level voltage Lb. When the two voltage comparators 32 and 33 provided for each analog detection signal of each phase generate an output, and when all the voltage comparators 32 and 33 generate an output, it is determined that there is an abnormality and an alarm is issued. Abnormality judgment circuit 34 to output
.

前記エンコーダ12は、例えば第3図に詳細に
示す如く、測定子と共に移動するようにされた、
その長手方向に明暗の目盛縞(信号発生源)12
Bが等間隔に形成されたメインスケール12A
と、直線型変位測定機10の本体に固定された、
前記メインスケール12Aを走査して、同一同期
で位相が90゜ずれた、略同一波形・振幅の2つの
アナログ検出信号を発生させるための、走査方向
に所定間隔をおいて位相が90゜ずれるように並設
された2つの明暗の目盛縞(信号変調手段)12
D,12Eを有するインデツクススケール12C
と、前記メインスケール12A及びインデツクス
スケール12Cの目盛縞に光を照射するための光
源12F,12Gと、前記メインスケール12A
及びインデツクススケール12Cを透過した光を
検出して2つのアナログ検出信号Sa,Sbとする
ため受光素子12H,12Jとから構成されてい
る。
The encoder 12 is configured to move together with the probe, as shown in detail in FIG. 3, for example.
Light and dark scale stripes (signal generation source) 12 in the longitudinal direction
Main scale 12A with B formed at equal intervals
and fixed to the main body of the linear displacement measuring device 10,
The main scale 12A is scanned to generate two analog detection signals having substantially the same waveform and amplitude, which are synchronized with each other and whose phases are shifted by 90 degrees at a predetermined interval in the scanning direction. Two bright and dark scale stripes (signal modulation means) arranged in parallel 12
Index scale 12C with D, 12E
, light sources 12F and 12G for irradiating light to the graduation stripes of the main scale 12A and the index scale 12C, and the main scale 12A.
and light receiving elements 12H and 12J for detecting the light transmitted through the index scale 12C and generating two analog detection signals Sa and Sb.

従つて、この受光素子12H,12Jは、メイ
ンスケール12Aとインデツクススケール12C
の相対移動に伴つて、第4図に示す如く、同一周
期で互いに位相が90゜ずれた、略同一波形・振幅
の2つのアナログ検出信号Sa,Sbを発生する。
Therefore, the light receiving elements 12H and 12J are connected to the main scale 12A and the index scale 12C.
As shown in FIG. 4, as shown in FIG. 4, two analog detection signals Sa and Sb having substantially the same waveform and amplitude are generated with the same period and a phase shift of 90 degrees.

前記電圧設定器30は、第5図に詳細に示す如
く、電源電圧Vbを分圧して、それぞれ高レベル
電圧La及び低レベル電圧Lbとするための、可変
抵抗器30A,30B,30Cからなる。
As shown in detail in FIG. 5, the voltage setting device 30 includes variable resistors 30A, 30B, and 30C for dividing the power supply voltage Vb into a high level voltage La and a low level voltage Lb, respectively.

前記電圧比較器32,33は、同じく第5図に
詳細に示す如く、前記第1の受光素子12Hから
入力される第1のアナログ検出信号Saと前記高
レベル電圧La又は低レベル電圧Lbをそれぞれ比
較し、前記アナログ検出信号Saが高レベル電圧
La以下であり、且つ、低レベル電圧Lb以上であ
る時に高レベル信号を出力する、スイツチング作
用を有する2つのコンパレータ32A,32B
と、前記第2の受光素子12Jから入力される第
2のアナログ検出信号Sbと前記高レベル電圧La
又は低レベル電圧Lbをそれぞれ比較し、前記ア
ナログ検出信号Sbが高レベル電圧La以下であり、
且つ、低レベル電圧Lb以上である時に高レベル
信号を出力する、同じくスイツチング作用を有す
る2つのコンパレータ33A,33Bとから構成
されている。
As shown in detail in FIG. 5, the voltage comparators 32 and 33 respectively detect the first analog detection signal Sa input from the first light receiving element 12H and the high level voltage La or low level voltage Lb. Comparing, the analog detection signal Sa is a high level voltage.
Two comparators 32A and 32B that have a switching function and output a high level signal when the voltage is below La and above the low level voltage Lb.
, the second analog detection signal Sb input from the second light receiving element 12J, and the high level voltage La.
or by comparing the low level voltages Lb, and determining that the analog detection signal Sb is equal to or lower than the high level voltage La;
It also includes two comparators 33A and 33B which also have a switching function and output a high level signal when the voltage is higher than the low level voltage Lb.

前記異常判定回路34は、同じく第5図に詳細
に示す如く、前記4個のコンパレータ32A,3
2B,33A,33Bの出力を相互に接続した上
で、抵抗34Aを介して電源電圧Vbと接続する
ように構成されている。従つて、この異常判定回
路34の出力は、前記4個のコンパレータ32
A,32B,33A,33Bの出力が全て高レベ
ルとなつた時、即ち、アナログ検出信号Sa,Sb
が共に高レベル電圧Laと低レベル電圧Lbの間の
異常検出領域S内に存在する時に高レベルとなつ
て警報を出力する。
The abnormality determination circuit 34 includes the four comparators 32A, 3, as shown in detail in FIG.
The outputs of 2B, 33A, and 33B are connected to each other and then connected to the power supply voltage Vb via a resistor 34A. Therefore, the output of this abnormality determination circuit 34 is transmitted to the four comparators 32.
When the outputs of A, 32B, 33A, and 33B all become high level, that is, the analog detection signals Sa and Sb
When both exist within the abnormality detection region S between the high level voltage La and the low level voltage Lb, the level becomes high and an alarm is output.

以下、実施例の作用を説明する。 The effects of the embodiment will be explained below.

まず、正常な状態では、適切な高レベル電圧
Laと低レベル電圧Lbが設定されていれば、コン
パレータ32A,32Bの出力aとコンパレータ
33A,33Bの出力bが同時に高レベルになる
ことはない。従つて、警報は出力されない。
First, under normal conditions, appropriate high level voltage
If La and the low level voltage Lb are set, the output a of the comparators 32A and 32B and the output b of the comparators 33A and 33B will not become high level at the same time. Therefore, no alarm is output.

一方、スケール目盛の異常や、機械的不具合等
により、両相間に位相ずれが生じると、異常検出
領域S内のタイミングが遅れ又は進むため、両信
号Sa,Sbが同期的となり、前記出力a,bが同
時に高レベルとなつて、警報が出力される。又、
スケールの汚れや、光学系、電気系統の異常等に
より、アナログ検出信号の振幅が小さくなると、
異常検出領域S内の滞在期間が長くなるため、や
はり前記出力a,bが同時に高レベルとなつて、
警報が出力される。
On the other hand, if a phase shift occurs between the two phases due to an abnormality in the scale graduation or a mechanical malfunction, the timing within the abnormality detection area S will be delayed or advanced, so that both signals Sa and Sb will become synchronous, and the output a, b becomes high at the same time, and an alarm is output. or,
If the amplitude of the analog detection signal becomes small due to dirt on the scale, abnormality in the optical system, electrical system, etc.
Since the stay period in the abnormality detection area S becomes longer, the outputs a and b become high level at the same time,
An alarm is output.

本実施例における異常発生時の各部信号波形の
例を第6図に示す。図から明らかな如く、何らか
の原因によりアナログ検出信号Sbに異常が生じ
た場合には、異常判定回路34の出力a×bが高
レベルとなるため、アナログ検出信号Sa,Sbの
位相角、振幅の異常の他、光源12F,12Gの
断線、メインスケール12Aやインデツクススケ
ール12Cの汚れ、受光素子12H,12Jの破
損等によるアナログ検出信号の消滅等、あらゆる
故障を発見することができる。
FIG. 6 shows an example of signal waveforms of various parts when an abnormality occurs in this embodiment. As is clear from the figure, when an abnormality occurs in the analog detection signal Sb for some reason, the output a×b of the abnormality determination circuit 34 becomes a high level, so that the phase angle and amplitude of the analog detection signals Sa and Sb change. In addition to abnormalities, all kinds of failures can be discovered, such as disconnection of the light sources 12F and 12G, dirt on the main scale 12A and index scale 12C, and disappearance of analog detection signals due to damage to the light receiving elements 12H and 12J.

故障検出の感度は、高レベル電圧Laと低レベ
ル電圧Lbの差bを可変抵抗器30A,30B,
30Cにより適宜設定することで、任意に選ぶこ
とができる。
The sensitivity of failure detection is determined by applying the difference b between the high level voltage La and the low level voltage Lb to the variable resistors 30A, 30B,
It can be arbitrarily selected by appropriately setting 30C.

本実施例においては、電圧設定器30における
高レベル電圧La及び低レベル電圧Lbが変更可能
とされているので、機種や使用態様等の変化に容
易に対応することが可能である。
In this embodiment, since the high level voltage La and low level voltage Lb in the voltage setting device 30 can be changed, it is possible to easily respond to changes in the model, usage mode, etc.

なお、各相共通の基準電圧や各相波高値をも合
わせて監視できるようにすれば、更に元電源低下
等をも同時に監視することが可能となる。
Note that if the reference voltage common to each phase and the peak value of each phase can also be monitored, it becomes possible to simultaneously monitor a drop in the main power source, etc.

前記実施例においては、異常判定回路34の出
力により警報を発生するようにしていたが、異常
判定回路34の出力の利用方法はこれに限定され
ず、例えば直線型変位測定機10の出力に応じて
フイードバツク制御されている工作機械へ停止命
令を与えることも可能である。
In the embodiment described above, an alarm is generated based on the output of the abnormality determination circuit 34, but the method of using the output of the abnormality determination circuit 34 is not limited to this. It is also possible to give a stop command to a machine tool that is under feedback control.

なお、前記実施例においては、本発明が、90゜
の位相差を有する2つのアナログ検出信号Sa,
Sbを発生する光学式の変位検出装置を備えた直
線型変位測定機10に適用されていたが、本発明
の適用範囲はこれに限定されない。例えば、3相
以上である場合には、その相数に比例して前記異
常検出領域Sを狭くすれば、より感度の高い監視
を行うことができ、多相になつても感度が落ちる
ことがない。又、光学式の変位検出装置を備えた
直線型変位測定機だけでなく、他の方式の変位検
出装置を備えた直線型変位測定機やロータリ型の
変位測定機にも同様に適用することができる。
Note that in the above embodiment, the present invention uses two analog detection signals Sa, Sa and Sa having a phase difference of 90°.
Although the present invention has been applied to a linear displacement measuring device 10 equipped with an optical displacement detection device that generates Sb, the scope of application of the present invention is not limited thereto. For example, in the case of three or more phases, if the abnormality detection area S is narrowed in proportion to the number of phases, more sensitive monitoring can be performed, and even if there are multiple phases, the sensitivity will not decrease. do not have. In addition, it can be applied not only to linear displacement measuring machines equipped with optical displacement detection devices, but also to linear displacement measuring machines and rotary displacement measuring machines equipped with other types of displacement detection devices. can.

〔発明の効果〕〔Effect of the invention〕

以上説明した通り、本発明によれば、アナログ
検出信号に手を加えたり、計数用パルス化後のパ
ルス信号に手を加えることなく、多くの故障原因
による異常を一括して監視することが可能となる
という優れた効果を有する。
As explained above, according to the present invention, it is possible to simultaneously monitor abnormalities due to many causes of failure without modifying the analog detection signal or modifying the pulse signal after it has been converted into pulses for counting. This has an excellent effect.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明に係る変位検出装置の異常検
出方法の要旨を示す流れ図、第2図は、本発明が
採用された光学式変位検出装置を備えた直線型変
位測定機の実施例の回路構成を示すブロツク線
図、第3図は、前記実施例で用いられているエン
コーダの構成を示す分解斜視図、第4図は、前記
実施例における受光素子出力、即ちアナログ検出
信号の関係の例を示す線図、第5図は、前記実施
例で用いられている、本発明に係る電圧設定器、
電圧比較器及び異常判定回路の構成を示す回路
図、第6図は、前記実施例における各部信号波形
の例を示す線図である。 10…直線型変位測定機、12…エンコーダ、
12A…メインスケール、12C…インデツクス
スケール、14…波形成形回路、16…カウン
タ、30…電圧設定器、30A,30B,30C
…可変抵抗器、La…高レベル電圧、Lb…低レベ
ル電圧、S…異常検出領域、32,33…電圧比
較器、32A,32B,33A,33B…コンパ
レータ、34…異常判定回路。
FIG. 1 is a flowchart showing the outline of an abnormality detection method for a displacement detection device according to the present invention, and FIG. 2 is a flowchart showing an example of a linear displacement measuring machine equipped with an optical displacement detection device to which the present invention is adopted. FIG. 3 is an exploded perspective view showing the configuration of the encoder used in the embodiment, and FIG. 4 shows the relationship between the light receiving element output, that is, the analog detection signal, in the embodiment. A diagram showing an example, FIG. 5 shows a voltage setting device according to the present invention used in the above embodiment,
FIG. 6 is a circuit diagram showing the configuration of the voltage comparator and the abnormality determination circuit, and is a diagram showing examples of signal waveforms of each part in the embodiment. 10...Linear displacement measuring machine, 12...Encoder,
12A...Main scale, 12C...Index scale, 14...Waveform shaping circuit, 16...Counter, 30...Voltage setting device, 30A, 30B, 30C
... Variable resistor, La... High level voltage, Lb... Low level voltage, S... Abnormality detection area, 32, 33... Voltage comparator, 32A, 32B, 33A, 33B... Comparator, 34... Abnormality determination circuit.

Claims (1)

【特許請求の範囲】 1 信号発生源が等間隔に形成されたメインスケ
ールと、 該メインスケールを走査するための、該走査方
向に所定間隔で並設された複数の信号変調手段を
有するインデツクススケールとを相対移動せしめ
て、 同一周期で相互に所定量だけ位相がずれた、略
同一波形・振幅の複数のアナログ検出信号を発生
させ、 該アナログ検出信号をパルス化して、 そのパルス数を計数することにより、 両スケール間の相対移動変位量を求めるように
した変位検出装置の異常検出方法において、 全てのアナログ検出信号の共通基準レベルを挾
み、且つ、複数のアナログ検出信号が正常時に交
わる全てのレベルを含まないように設定された高
レベルと低レベルの間を異常検出領域とし、 各相のアナログ検出信号の実際のレベルが、前
記異常検出領域内にあるか否かを、各相毎に監視
して、 全てのアナログ検出信号の実際のレベルが、前
記異常検出領域内にある時に、異常有りと判定す
ることを特徴とする変位検出装置の異常検出方
法。 2 前記高レベルと低レベルの差、即ち異常検出
領域を、アナログ検出信号の相数が多い程、小さ
く設定するようにした特許請求の範囲第1項記載
の変位検出装置の異常検出方法。 3 信号発生源が等間隔に形成されたメインスケ
ールと、 該メインスケールを走査するための、該走査方
向に所定間隔で並設された複数の信号変調手段を
有するインデツクススケールとを相対移動せしめ
て、 同一周期で相互に所定量だけ位相がずれた、略
同一波形・振幅の複数のアナログ検出信号をエン
コーダに発生させ、 該アナログ検出信号を波形成形回路でパルス化
して、 そのパルス数を可逆カウンタで計数することに
より、 両スケール間の相対移動変位量を求めるように
した変位検出装置の異常検出回路において、 全てのアナログ検出信号の共通基準レベルを挾
み、且つ、複数のアナログ検出信号が正常時に交
わる全てのレベルを含まないように設定された高
レベル電圧及び低レベル電圧を出力する電圧設定
器と、 該電圧設定器出力と前記アナログ検出信号のレ
ベルを比較して、アナログ検出信号のレベルが前
記高レベル電圧と低レベル電圧の間の異常検出領
域内にある時に出力を発生する、各相のアナログ
検出信号毎に設けられた複数の電圧比較器と、 全ての電圧比較器が出力を発生した時に、異常
有りと判定する異常判定回路と、 を備えたことを特徴とする変位検出装置の異常
検出回路。 4 前記電圧設定器出力の高レベル電圧及び低レ
ベル電圧が可変とされている特許請求の範囲第3
項記載の変位検出装置の異常検出回路。 5 前記電圧比較器が、スイツチング作用を有す
るコンパレータで構成されている特許請求の範囲
第3項記載の変位検出装置の異常検出回路。
[Scope of Claims] 1. An index having a main scale in which signal generation sources are formed at equal intervals, and a plurality of signal modulation means arranged in parallel at predetermined intervals in the scanning direction for scanning the main scale. The scale is moved relative to the scale to generate multiple analog detection signals with substantially the same waveform and amplitude, which are phase-shifted by a predetermined amount in the same period, convert the analog detection signals into pulses, and count the number of pulses. By doing this, in the abnormality detection method of a displacement detection device that calculates the amount of relative displacement between both scales, a common reference level of all analog detection signals is sandwiched, and multiple analog detection signals intersect in normal conditions. The area between the high level and the low level that is set so as not to include all levels is defined as the abnormality detection area, and whether or not the actual level of the analog detection signal of each phase is within the abnormality detection area is determined for each phase. 1. A method for detecting an abnormality in a displacement detecting device, characterized in that when the actual levels of all analog detection signals are within the abnormality detection area, it is determined that there is an abnormality. 2. An abnormality detection method for a displacement detection device according to claim 1, wherein the difference between the high level and the low level, that is, the abnormality detection area, is set to be smaller as the number of phases of the analog detection signal increases. 3. A main scale in which signal generation sources are formed at equal intervals, and an index scale having a plurality of signal modulation means arranged in parallel at predetermined intervals in the scanning direction for scanning the main scale are relatively moved. Then, the encoder generates multiple analog detection signals with substantially the same waveform and amplitude, which have the same period and are out of phase with each other by a predetermined amount.The waveform shaping circuit converts the analog detection signals into pulses, and the number of pulses is reversibly changed. In the abnormality detection circuit of the displacement detection device, which calculates the amount of relative displacement between both scales by counting with a counter, a common reference level of all analog detection signals is interposed, and multiple analog detection signals are A voltage setting device outputs a high level voltage and a low level voltage that are set so as not to include all levels that intersect during normal operation, and the output of the voltage setting device is compared with the level of the analog detection signal to determine the level of the analog detection signal. A plurality of voltage comparators provided for each analog detection signal of each phase generate an output when the level is within the abnormality detection area between the high level voltage and the low level voltage, and all voltage comparators output. An abnormality detection circuit for a displacement detection device, comprising: an abnormality determination circuit that determines that an abnormality exists when . 4. Claim 3, wherein the high level voltage and low level voltage of the voltage setting device output are variable.
Abnormality detection circuit of the displacement detection device described in . 5. An abnormality detection circuit for a displacement detection device according to claim 3, wherein the voltage comparator is constituted by a comparator having a switching action.
JP18782284A 1984-09-07 1984-09-07 Method and circuit for detecting abnormality of displacement detector Granted JPS6166113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18782284A JPS6166113A (en) 1984-09-07 1984-09-07 Method and circuit for detecting abnormality of displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18782284A JPS6166113A (en) 1984-09-07 1984-09-07 Method and circuit for detecting abnormality of displacement detector

Publications (2)

Publication Number Publication Date
JPS6166113A JPS6166113A (en) 1986-04-04
JPH0347684B2 true JPH0347684B2 (en) 1991-07-22

Family

ID=16212839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18782284A Granted JPS6166113A (en) 1984-09-07 1984-09-07 Method and circuit for detecting abnormality of displacement detector

Country Status (1)

Country Link
JP (1) JPS6166113A (en)

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US9013681B2 (en) 2007-11-06 2015-04-21 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US9256140B2 (en) 2007-11-07 2016-02-09 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction
US8665455B2 (en) 2007-11-08 2014-03-04 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
US8422015B2 (en) 2007-11-09 2013-04-16 Nikon Corporation Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method
JP5641746B2 (en) * 2010-02-12 2014-12-17 株式会社ミツトヨ Photoelectric encoder
JP2013190327A (en) * 2012-03-14 2013-09-26 Omron Corp Monitoring device and method for rotary encoder

Also Published As

Publication number Publication date
JPS6166113A (en) 1986-04-04

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