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JPH03291011A - Short-side crystal resonator - Google Patents

Short-side crystal resonator

Info

Publication number
JPH03291011A
JPH03291011A JP9287690A JP9287690A JPH03291011A JP H03291011 A JPH03291011 A JP H03291011A JP 9287690 A JP9287690 A JP 9287690A JP 9287690 A JP9287690 A JP 9287690A JP H03291011 A JPH03291011 A JP H03291011A
Authority
JP
Japan
Prior art keywords
frame
short
support
crystal resonator
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9287690A
Other languages
Japanese (ja)
Inventor
Hirofumi Kawashima
宏文 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Electronic Components Ltd
Original Assignee
Seiko Electronic Components Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Electronic Components Ltd filed Critical Seiko Electronic Components Ltd
Priority to JP9287690A priority Critical patent/JPH03291011A/en
Publication of JPH03291011A publication Critical patent/JPH03291011A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To confine the resonance energy within a resonant part and a bent part, to reduce the equivalent series resistance of the vibrator and to improve the shock resistance by integrating the resonant part, a bridge, the bent part, a frame and a support with etching and adopting a new shape. CONSTITUTION:A resonator 1 consists of a resonant part 2, a bent part 3, a bridge 4, a frame 5 and a support 6. Many resonators are formed simultaneously by etching one thin plate crystal plate and exciting electrodes 9, 10 are arranged to upper and lower faces of the part 2. In such a case, the electrodes 9, 10 are formed on the upper and lower faces of the part 2 opposed to each other as different poles and they are prolonged up to a mount 7 of the support 6. Thus, a short-side resonance is caused by applying an alternate voltage between the electrodes 9, 10 and the resonance is displaced in also long side direction. Moreover, since the frame 5 is connected to the support 6 with a hole 8 made thereto, no leakage resonance is caused.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は振動部、ブリフジ部、屈曲部、フレームと支持
部を化学的エツチング法によって一体に形成された短辺
水晶振動子の形状と励振電極配置に関するもので、超薄
型、小型の要求の強いICカードやポケットベル等の携
帯機器の基準信号源として最適な短辺水晶振動子に関す
る。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to the shape and excitation of a short-side crystal resonator in which a vibrating part, a bridging part, a bent part, a frame, and a support part are integrally formed by chemical etching. This invention relates to electrode arrangement, and relates to a short-sided crystal resonator that is optimal as a reference signal source for portable devices such as IC cards and pagers, which are required to be ultra-thin and compact.

〔発明の概要〕[Summary of the invention]

本発明は振動漏れが非常に小さく、且つ、等個直列抵抗
R1の小さい、高いQ値を有する短辺水晶振動子を提供
することにある0本発明の目的を達成するために、振動
部と支持部をプリフジ部属曲部とフレームを介して、化
学的エツチング法によって一体に形成し、振動部は屈曲
部とフレームによって囲むように形成されている。更に
、支持部はフレームの大略中央部に接続されていて、振
動部の上下大略全面に励振電極が配置されている短辺水
晶振動子で、支持部のマウント部で台座等に支持固定さ
れている。このように振動子を形成することにより、本
発明の目的を達成している。
The purpose of the present invention is to provide a short-side crystal resonator having very low vibration leakage, low equal series resistance R1, and a high Q value. The support part is formed integrally with the pre-fuji part bending part and the frame by a chemical etching method, and the vibrating part is formed so as to be surrounded by the bending part and the frame. Furthermore, the support part is connected to the approximate center of the frame, and is a short-side crystal oscillator with excitation electrodes arranged on almost the entire top and bottom of the vibrating part, and is supported and fixed to a pedestal etc. by the mount part of the support part. There is. By forming the vibrator in this manner, the object of the present invention is achieved.

〔従来の技術〕[Conventional technology]

従来の短辺水晶振動子は特開昭53−132988号公
報、及び特願昭53−160737号公報で示されるご
とく、振動部と支持部をエツチング法によって、一体に
形成されていて、ブリフジ部と同方向の支持部の両端部
で台座等に支持固定する方法が採られていた。
As shown in Japanese Patent Application Laid-open No. 53-132988 and Japanese Patent Application No. 53-160737, in conventional short-side crystal resonators, the vibrating part and the supporting part are integrally formed by etching, and the bridging part A method of supporting and fixing to a pedestal or the like was adopted at both ends of the support part in the same direction.

C発明が解決しようとする!11!題〕上述したように
従来の短辺水晶振動子はマウント部がブリッジ部方向と
等しいため、小型化すると台座の影響を直接受けるので
、電気的特性の劣化を招くとともに、振動部内部へのエ
ネルギー閉じ込めが不十分となり、その結果、振動漏れ
が多(なるなど、小型化には大きな問題点が残っていた
C invention tries to solve the problem! 11! [Problem] As mentioned above, in conventional short-sided crystal resonators, the mounting part is in the same direction as the bridge part, so when it is miniaturized, it is directly affected by the pedestal, which leads to deterioration of electrical characteristics and reduces the amount of energy inside the vibrating part. There remained major problems with miniaturization, such as insufficient confinement and, as a result, vibration leakage.

(41題を解決するための手段〕 それ故、本発明は以下の方法で従来の問題点を解決する
ものである。すなわち、短辺方向に大きく変位する振動
部とブリッジ部、屈曲部、フレームと支持部から成る短
辺水晶振動子で、前記振動部はブリッジ部を介して屈曲
部と接続され、振動部を囲むようにフレームが屈曲部と
接続され、フレームの大略中央部に振動を減衰させる穴
を設けた支持部から構成されるように振動子を形成して
、本発明の目的を達成している。
(Means for Solving 41 Problems) Therefore, the present invention solves the conventional problems by the following method.That is, the vibration part, the bridge part, the bending part, and the frame which are largely displaced in the short side direction. A short-side crystal oscillator consisting of a supporting part, the vibrating part is connected to a bending part via a bridge part, a frame is connected to the bending part so as to surround the vibrating part, and the vibration is damped approximately at the center of the frame. The object of the present invention is achieved by forming the vibrator to include a support portion provided with a hole for allowing the vibration to occur.

〔作 用〕 このように本発明の短辺水晶振動子は、振動部ブリフジ
部・屈曲部、フレームと支持部から構成されている。こ
れにより、小型化した場合でも支持台座の影響を受けず
、エネルギー閉し込めが十分になされるので、等個直列
抵抗R1の小さい、高いQ値を有する、小型で、耐衝撃
性に優れた短辺水晶振動子が得られる。
[Function] As described above, the short-side crystal resonator of the present invention is composed of a vibrating portion, a bridging portion, a bent portion, a frame, and a supporting portion. As a result, even when downsized, it is not affected by the support pedestal and energy is sufficiently trapped, so it is possible to create a compact, compact, shock-resistant product with a low equal series resistance R1, a high Q value, and A short side crystal resonator is obtained.

〔実施例〕〔Example〕

次に、本発明の実施例を図面に基づいて具体的に述べる
Next, embodiments of the present invention will be specifically described based on the drawings.

第1図(A)、  (B)は本発明の短辺水晶振動子の
形状と励振電極の配置の実施例の平面図(A)と側面図
(B)を示す、振動子1は振動部2゜屈曲部3.プリフ
ジ部4.フレーム5と支持部6から構成されている。こ
の形状は1枚の薄板水晶板からエツチング法によって多
数個、同時に形成されている。また、振動部2の上下面
には励振電極9,10が配置されている(但し、平面図
(A)には図示されていない)、即ち、振動部2の上下
面に対向して異極となるように形成され、互いに一方の
支持部6のマウント部7まで延びて配置されている。こ
れにより、励振電極9.10間に交番電圧を印加するこ
とによって、短辺振動を引き起こすことができる0次に
、振動漏れについて述べる。短辺振動によって、長辺方
向にも変位する。
FIGS. 1(A) and 1(B) show a plan view (A) and a side view (B) of an embodiment of the shape of the short-side crystal oscillator and the arrangement of the excitation electrodes of the present invention. 2° bent part 3. Purifuji part 4. It is composed of a frame 5 and a support section 6. A large number of these shapes are simultaneously formed from a single thin crystal plate by etching. In addition, excitation electrodes 9 and 10 are arranged on the upper and lower surfaces of the vibrating section 2 (however, not shown in the plan view (A)). They are formed so as to extend to the mount portion 7 of one of the support portions 6. This will describe zero-order vibration leakage that can cause short-side vibration by applying an alternating voltage between the excitation electrodes 9 and 10. The short side vibration also causes displacement in the long side direction.

この変位はブリッジ部4を介して屈曲部3の伝わり、屈
曲モードに変換される。このとき、振動はフレーム5ま
で若干伝わるが、更に、フレーム5には六8を設けた支
持部6が接続されているので、フレーム5の振動は特に
支持部6のマウント部7までは全く伝わらず、マウント
部6で台座等に支持固定しても振動漏れの全くない短辺
水晶振動子が得られることになる。換言するならば、振
動部2の振動エネルギーは振動部2と屈曲部3内にほと
んど閉じ込められるので、その結果、等個直列抵抗R1
の小さい、Q値の高い短辺水晶振動子が得られる。
This displacement is transmitted to the bending section 3 via the bridge section 4 and converted into a bending mode. At this time, the vibrations are slightly transmitted to the frame 5, but since the support part 6 provided with the six 8 is connected to the frame 5, the vibrations of the frame 5 are not transmitted at all, especially to the mount part 7 of the support part 6. First, a short-side crystal resonator with no vibration leakage can be obtained even when it is supported and fixed on a pedestal or the like by the mount portion 6. In other words, most of the vibration energy of the vibrating part 2 is confined within the vibrating part 2 and the bending part 3, and as a result, an equal number of series resistors R1
A short-side crystal resonator with a small Q value and a high Q value can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明は振動部、プリフジ部、屈曲
部、フレームと支持部をエツチング法によって一体に形
成する新形状の短辺水晶振動子を提案することにより、
次の著しい効果を有する。
As described above, the present invention proposes a short-side crystal resonator with a new shape in which the vibrating part, pre-fugitive part, bending part, frame and support part are integrally formed by etching.
It has the following remarkable effects.

■ 振動子形状を選択することにより、振動エネルギー
を振動部と屈曲部内に閉じ込めることができるので、等
個直列抵抗R2の小さなものが得られる。
(2) By selecting the shape of the vibrator, it is possible to confine the vibration energy within the vibrating part and the bending part, so it is possible to obtain a small equal series resistance R2.

■ 化学的エツチング法によって、振動部1ブリッジ部
、屈曲部、フレームと支持部を一体に成形するので小型
化ができる。
■ The vibrating part 1 bridge part, bending part, frame and support part are integrally molded by chemical etching method, so it can be miniaturized.

■ 同時に、耐衝撃性に優れる。■ At the same time, it has excellent impact resistance.

■ 支持部がフレームに接続されているので、振動漏れ
が小さく、等個直列抵抗R,が小さく、且つ、Q値の高
い短辺水晶振動子が得られる。
(2) Since the support portion is connected to the frame, a short-side crystal resonator with low vibration leakage, low equal series resistance R, and high Q value can be obtained.

■ マウント部で支持固定しても振動漏れがないので、
エージング特性に優れる。
■ There is no vibration leakage even when the mount is supported and fixed.
Excellent aging properties.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(A)、  (B)は本発明の短辺水晶振動子形
状と励振電極配置の実施例で、それぞれ平面図と側面図
を示す。 1・・・振動子 2・・・振動部 3・・・屈曲部 4・・・ブリッジ部 5・・・フレーム 6・・・支持部 7・・・マウント部 8・・・穴 9.10・・・励振電極
FIGS. 1A and 1B show examples of the short-side crystal resonator shape and excitation electrode arrangement of the present invention, and show a plan view and a side view, respectively. 1... Vibrator 2... Vibrating part 3... Bent part 4... Bridge part 5... Frame 6... Support part 7... Mount part 8... Hole 9.10.・・Excitation electrode

Claims (1)

【特許請求の範囲】[Claims]  短辺方向に大きく変位する振動部とブリッジ部,屈曲
部,フレームと支持部から成る短辺水晶振動子で、前記
振動部はブリッジ部を介して屈曲部と接続され、振動部
を囲むようにフレームが屈曲部と接続され、フレームの
大略中央部に振動を減衰させる穴を設けた支持部から構
成されていることを特徴とする短辺水晶振動子。
A short-side crystal resonator consisting of a vibrating part that is largely displaced in the short side direction, a bridge part, a bent part, a frame, and a support part, the vibrating part being connected to the bending part via the bridge part, and arranged so as to surround the vibrating part. 1. A short-side crystal resonator, characterized in that the frame is connected to a bending part and comprises a support part having a hole for damping vibrations in the approximate center of the frame.
JP9287690A 1990-04-06 1990-04-06 Short-side crystal resonator Pending JPH03291011A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9287690A JPH03291011A (en) 1990-04-06 1990-04-06 Short-side crystal resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9287690A JPH03291011A (en) 1990-04-06 1990-04-06 Short-side crystal resonator

Publications (1)

Publication Number Publication Date
JPH03291011A true JPH03291011A (en) 1991-12-20

Family

ID=14066650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9287690A Pending JPH03291011A (en) 1990-04-06 1990-04-06 Short-side crystal resonator

Country Status (1)

Country Link
JP (1) JPH03291011A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100691089B1 (en) * 2003-05-16 2007-03-12 세이코 엡슨 가부시키가이샤 Tuning fork piezoelectric vibrator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210518B2 (en) * 1980-12-12 1987-03-06 Nippon Shinyaku Co Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210518B2 (en) * 1980-12-12 1987-03-06 Nippon Shinyaku Co Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100691089B1 (en) * 2003-05-16 2007-03-12 세이코 엡슨 가부시키가이샤 Tuning fork piezoelectric vibrator

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