JPH03187200A - Synchrotron - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Utilization WfJ] The present invention relates to a synchrotron used in an SOR device, etc., and particularly relates to a synchrotron that can be used for multiple purposes on a stand.

[Prior Art] A synchrotron is a type of accelerator that brings electrons in a vacuum chamber to an ultra-high energy state. Specifically, an electron beam that enters a vacuum chamber is deflected by a deflector to orbit a predetermined orbit, a focusing electromagnet narrows down the beam size of the electron beam, and a high-frequency acceleration cavity imparts energy to the electron beam. This increases the energy of the electron beam inside the vacuum chamber.

In recent years, there has been a growing trend to utilize SOR light (synchrotron radiation light) obtained from this synchrotron as a light source for semiconductor lithography. In order to make the above-mentioned SOR light practical, it is necessary to increase the energy of the electron beam to a predetermined level and to circulate and accumulate the electron beam in a vacuum chamber.

Therefore, in order to obtain a practical SOR light, an input synchrotron that accelerates electrons incident into a vacuum chamber and an accumulation storage ring that accumulates the accelerated electrons are used. It has been common practice to circulate an electron beam of a predetermined amount and energy within a storage ring.

However, since using a synchrotron and a storage ring increases the size of the device, attempts have been made to extract SOR light by accelerating and storing electrons using two synchrotrons.

Therefore, the applicant used one synchrotron to first inject a low-energy electron beam into the vacuum chamber of the synchrotron, accelerate it, lower the electron beam to the energy at the time of incidence, and then re-inject a low-energy electron beam into the vacuum chamber of the synchrotron. A synchrotron mode operation is performed in which this operation is repeated to accumulate a predetermined amount of electron beam in the vacuum chamber, and then the electron beam is increased to an energy level that allows SOR light of a predetermined wavelength to be extracted. By continuously switching to storage ring operation, we have invented that a small SOR device with low energy injection can be constructed without having to separate it into an input synchrotron and a storage tracing as in the past.

In the invention of this prior application, the power supply supplied to the bending electromagnet and the focusing electromagnet must have a waveform pattern as shown in FIG. That is, as shown in FIG. 4, by repeating pattern 17 in which an electron beam is introduced into the vacuum chamber, the 1WIi current value in the vacuum chamber is increased (this is called synchrotron mode), and then pattern 1
9, the electron beam in the vacuum chamber is increased to a predetermined energy and stored (this is called storage ring mode) to obtain a practically usable SOR light.

[Problem to be solved by the invention] By the way, switching the power supplied to the deflecting electromagnet and the focusing electromagnet from the synchrotron mode to the storage ring mode as shown in Fig. 4 has the problem of difficult power control. .

Furthermore, in order to increase the versatility of the device, it has been desired to have a synchrotron dedicated to the synchrotron mode that repeats pattern 17 shown in FIG. 4, or a storage ring dedicated to the storage ring mode consisting of pattern 19.

In particular, experiments are currently being conducted on various operation modes for SOR devices in order to put them into practical use, and it is desired that the power supply control described above can be easily switched between various operation modes.

An object of the present invention, which was created in consideration of the above circumstances, is to provide a synchrotron that can be used for multiple purposes.

[Means for solving the problem] A vacuum chamber in which an electron beam circulates, a deflection electromagnet provided outside the vacuum chamber to deflect the electron beam in the chamber, and a focusing electromagnet to narrow down the beam size of the electron beam. In the synchrotron, a reference signal storage device stores power waveform patterns to be supplied to each of the electromagnets during operation in a synchrotron mode for accelerating an incident electron beam and a storage ring mode for accumulating electron beams, and a reference signal storage device for storing a power waveform pattern to be supplied to each of the electromagnets in the synchrotron mode. , a mode switching command device that selects a storage ring mode or a mode that is a combination thereof; and a mode switching command device that receives the power waveform from the storage device based on the mode commanded by the mode switching command device, and transmits the current according to the waveform pattern. It is comprised of a power supply device that supplies the electromagnet.

[Operation] According to the synchrotron with the above configuration, when the synchrotron mode, storage ring mode, or a combination of these modes is selected by the mode switching command device,
A power supply/waveform pattern corresponding to each mode is read from the reference signal storage device, and a current corresponding to the waveform pattern is supplied to the deflecting electromagnet and the focusing electromagnet.

Therefore, the synchrotron can be operated in synchrotron mode 2 storage ring mode or a combination of these modes.
A multi-purpose operation mode is possible with just one unit.

[Example] An example of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 1, deflection electromagnets 2 for deflecting the electron beam inside the chamber 1 are provided in squares of a hollow rectangular vacuum chamber 1 in which the electron beam circulates, and the vacuum chamber 1 is sandwiched between these deflection electromagnets 2. A converging electromagnet 3 for narrowing down the beam size of the electron beam is provided at each straight line portion of the electron beam. Further, one of the linear sections of the vacuum chamber 1 is provided with a high frequency acceleration cavity 4 that supplies energy to the electron beam.

When an electron beam accelerated by a linear accelerator (not shown) is incident into the vacuum chamber 1 from the entrance part , and circulates within the vacuum chamber 1 while being supplied with energy by the high frequency acceleration cavity 4. The focusing electromagnet 3 is composed of two systems of electromagnets: a horizontal focusing electromagnet 3a that focuses the electron beam in the horizontal direction, and a vertical focusing electromagnet 3b that focuses the electron beam in the vertical direction, and four electromagnets are used in each system.

On the other hand, such a synchrotron uses a reference signal in which a power waveform pattern is stored, which is supplied to the deflection electromagnet 2 and the convergence electromagnets 3a and 3b, during each of its synchrotron mode operation and storage ring mode operation. A storage device 5 is provided.

This reference signal storage device 5 is connected online to a reference signal generation device 6 that generates a waveform pattern corresponding to the power supply waveform pattern stored in the device 5.

This reference signal generator 6 is connected online to a mode switching command device Wt7 that selects the synchrotron mode, storage ring mode, and a combination of these modes. Further, the reference signal generating device 6
is connected online to the timing generator 8, which synchronizes the timing of the electron beam accelerated by the linear accelerator and entered into the chamber 1 with the operation of each mode, and also generates a clock for synchronizing the digital computer. The clock generator 9 is also connected online.

The reference signal obtained from the reference signal generator 6 is transmitted to a data transmission device 10 as shown in FIG. , a horizontal focusing electromagnet power source 13 and a vertical focusing electromagnet power source 14.

In the figure, the mode switching command device 7, the reference signal storage device 5. Reference signal generator 6°Incidence timing generator 8. Clock generator 9 and data transmission device IO
is built into the digital calculation l115.

Next, power waveform patterns stored in the reference signal storage device 5 are shown in FIGS. 2 to 4.

The sawtooth waveform shown in Fig. 2 is the power supply waveform during synchrotron mode operation. This is the timing of the incident electron beam. Further, the waveform shown in FIG. 3 is the power supply waveform during storage ring mode operation. Moreover, the waveform shown in FIG. 4 is a power supply waveform when the synchrotron and storage ring are operated in combination.

The power supply waveforms shown in FIGS. 2 to 4 are not entirely stored in the storage device, but unit patterns 17, 18, and 19 are the minimum units that constitute the repetitive waveform.
Only the unit patterns 17, 18, and 19 are stored in the reference signal storage device f5, and the respective operations are achieved by repeatedly outputting the unit patterns 17, 18, and 19.

The operation of this embodiment having the above configuration will be described.

The output flowchart of the power waveform pattern performed in the reference signal generator 6 shown in FIG. 1 is shown in FIG. 5, and as shown in FIG. The reference signal pattern 17 shown is read out from the reference signal storage device 5 and output in synchronization with the timing of the electron beam entering the vacuum chamber 1. Mode switching command device while in synchrotron mode operation! When switching to the storage ring mode operation by step 7, one reference signal pattern of the storage ring mode shown in Fig. 3 is output again in synchronization with the incident timing of the electron beam, and as shown in Fig. 4, the storage ring mode operation is switched to the synchrotron mode. Mode switching operation becomes possible.

By switching operation from the synchrotron mode to the storage ring mode in this way, a large number of electron beams are incident into the vacuum chamber 1 during the synchrotron mode, and the Vi product current in the chamber 1 increases, causing the vacuum A predetermined amount of electron beams will circulate within the chamber l. Therefore, after this, if the electron beam in the vacuum chamber 1 is switched to the storage mode operation in which the electron beam is increased to a predetermined energy, a practical S0 of a predetermined amount and a predetermined energy is generated.
R light can be obtained.

Of course, such switching is also possible from pattern 18 of storage ring mode operation to pattern 19 in FIG. 3, and operation in storage ring mode alone is also possible. Furthermore, it goes without saying that by repeatedly outputting the synchrotron mode operation pattern 17 in FIG. 2, operation in the synchrotron mode alone becomes possible.

Next, the pattern output subroutines of the respective patterns 17, 18, and 19 are shown in FIG. Bending electromagnet 2. Horizontal focusing electromagnet 3a and vertical focusing electromagnet 3
Synchronized output to b. This output is output according to the 0th to N-1st waveforms of the digitally stored reference signal pattern 17, 18, or 19.
The output is held when it exceeds the limit.

As explained above, the synchrotron shown in FIG. These can be used together.

[Effects of the Invention 1 As explained above, according to the present invention, the following effects can be achieved.

Synchrotron mode operation with one synchrotron,
It is possible to perform storage ring mode operation and synchrotron/storage ring mode operation that combines these modes, allowing the synchrotron to be used for multiple purposes.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a synchrotron showing an embodiment of the present invention, and FIG. 2 is a power waveform during synchrotron mode operation.
Figure 3 is the power waveform during storage ring mode operation, Figure 4 is the power waveform during synchrotron storage ring mode operation, Figure 5 is a flowchart for outputting the power waveform pattern, and Figure 6 is the power waveform pattern output subroutine. It is a flowchart which shows. In the figure, 1 is a vacuum chamber, 2 is a bending electromagnet, 3a is a horizontal focusing electromagnet, 3b is a vertical focusing electromagnet, 5 is a reference signal storage device, 7 is a mode switching command device, and 6 is a part of the power supply device. This is a reference signal generator.

Claims (1)

[Claims] 1. A vacuum chamber in which an electron beam circulates, a deflection electromagnet provided outside the vacuum chamber to deflect the electron beam in the chamber, and a convergence electromagnet to narrow down the beam size of the electron beam. In the synchrotron, a reference signal storage device stores power waveform patterns supplied to each of the electromagnets during operation of a synchrotron mode for accelerating an incident electron beam and a storage ring mode for accumulating an electron beam, and the synchrotron mode; a mode switching command device that selects a storage ring mode or a mode that is a combination of these modes; A synchrotron characterized by comprising a power supply device that supplies an electromagnet.