JPH03129837A - Mounter - Google Patents
MounterInfo
- Publication number
- JPH03129837A JPH03129837A JP1269610A JP26961089A JPH03129837A JP H03129837 A JPH03129837 A JP H03129837A JP 1269610 A JP1269610 A JP 1269610A JP 26961089 A JP26961089 A JP 26961089A JP H03129837 A JPH03129837 A JP H03129837A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- amount
- mounter
- case
- image processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10W72/0113—
Landscapes
- Die Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はマウンタに関し、特に樹脂を用いて半導体素子
をリードフレーム又はケースに接合するマウンタに関す
る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a mounter, and particularly to a mounter that uses resin to bond a semiconductor element to a lead frame or case.
従来、この種のマウンタは、接着樹脂をディスペンサを
用いて、あらかじめ設定された樹脂吐出圧、吐出時間、
滴下位置で、第2図の部分平面図に示すように、ケース
8のキャビティ9内の複数箇所に滴下し、滴下樹脂10
を均等に分布させてその上に半導体素子をマウントする
ようになっていた。Conventionally, this type of mounter uses a dispenser to apply adhesive resin to a preset resin discharge pressure, discharge time, and
At the dripping position, as shown in the partial plan view of FIG.
The semiconductor device was then mounted on top of the evenly distributed wafer.
上述した従来のマウンタは、前以て設定された滴下位置
及び吐出圧力、吐出時間で樹脂を滴下するため、マウン
タの送り精度のばらつきによるケ−スの位置ずれ、ディ
スペンスノズルの詰りゃ変形、樹脂の残量の違いによる
滴下量のばらつき等が発生した場合に、半導体素子がマ
ウントされたICが不良となってしまうという欠点があ
る。The above-mentioned conventional mounter drips resin at a preset dropping position, discharge pressure, and discharge time, so it may cause misalignment of the case due to variations in the feed accuracy of the mounter, deformation if the dispense nozzle is clogged, or resin. There is a drawback that if variations in the amount of dripping occur due to differences in the amount remaining, the IC on which the semiconductor element is mounted will become defective.
上述した従来のマウンタに対し、本発明は、滴下された
樹脂の位置及び量を画像処理により検出し、自動的に位
置及び量の補正を行い、異常滴下時(例えば滴下なし)
にはマウンタを停止させるという相違点を有する。In contrast to the conventional mounter described above, the present invention detects the position and amount of dropped resin through image processing, automatically corrects the position and amount, and corrects the position and amount when there is an abnormal drop (for example, no drip).
The difference is that the mounter is stopped.
本発明のマウンタは、リードフレーム又はケースに樹脂
を滴下するディスペンスノズルの樹脂の吐出圧力、吐出
時間等を制御するディスペンサの制御部と、ディスペン
スノズルを駆動する駆動ユニット及びこの駆動ユニット
を制御する駆動制御部と、滴下された樹脂の位置、量、
形状を認識するカメラ及び画像処理部とを有し、樹脂の
滴下位置、吐出圧力、吐出時間の補正を行うように構成
されている。The mounter of the present invention includes a dispenser control unit that controls the resin discharge pressure, discharge time, etc. of a dispense nozzle that drips resin onto a lead frame or a case, a drive unit that drives the dispense nozzle, and a drive that controls this drive unit. Control unit, position and amount of resin dropped,
It has a camera that recognizes the shape and an image processing unit, and is configured to correct the resin dropping position, ejection pressure, and ejection time.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の一実施例を説明するためのマウンタの
ブロック構成図である。FIG. 1 is a block diagram of a mounter for explaining an embodiment of the present invention.
第1図に示すように、本実施例のマウンタは、樹脂を用
いて半導体素子をケース8に接合する装置であり、レー
ル7と、レール7上を移動するケース8が各々停止する
レール7上の各ステーション上に設置されたディスペン
スノズル3と、ディスペンスノズル3を駆動するディス
ペンス駆動ユニット6と、これを制御する駆動制御部5
と、ケース8のキャビティに滴下された樹脂をカメラ2
を通して画像処理する画像処理部1とを含んで構成され
る。As shown in FIG. 1, the mounter of the present embodiment is a device that uses resin to bond a semiconductor element to a case 8, and a rail 7 and a case 8 moving on the rail 7 are placed on the rail 7 where they are stopped. Dispense nozzle 3 installed on each station, a dispense drive unit 6 that drives the dispense nozzle 3, and a drive control unit 5 that controls the dispense nozzle 3.
Then, the resin dripped into the cavity of case 8 is exposed to camera 2.
The image processing unit 1 is configured to include an image processing unit 1 that processes images through the image processing unit 1.
かかるマウンタは、マウントステーションにケース8を
移送する前に、ディスペンスステーションにて滴下され
た樹脂を、画像処理ステーションにおいてカメラ2を通
して画像処理部1でその位置、量、形状を検出し、位置
ずれがある場合にはずれ量を駆動制御部5へ伝達し、デ
ィスペンス駆動ユニット6を駆動して位置を補正すると
共に、滴下量が少ない場合は、吐出圧力、時間を大きく
し、滴下量が多い場合は、吐出圧力、時間を小さくする
ようにディスペンサ4へ伝達し、滴下量を最適とするこ
とができる。In this mounter, before transferring the case 8 to the mounting station, the position, amount, and shape of the resin dropped at the dispensing station are detected by the image processing unit 1 through the camera 2 at the image processing station, and the position, amount, and shape are detected. In some cases, the amount of deviation is transmitted to the drive control unit 5, and the dispense drive unit 6 is driven to correct the position, and if the amount of drops is small, the discharge pressure and time are increased, and if the amount of drops is large, It is possible to transmit the discharge pressure and time to the dispenser 4 so as to reduce them, thereby optimizing the amount of dripping.
更に滴下量が零に近い場合や多すぎる場合は、マウンタ
本体に指令を出し、マウンタの動作を停止させることも
可能である。Furthermore, if the amount of dripping is close to zero or too large, it is also possible to issue a command to the mounter body to stop the operation of the mounter.
以上説明したように本発明は、ディスペンサによって滴
下された樹脂の位置ずれや量及び形状を自動的に検出し
、ディスペンサの吐出条件及び位置を最適なものとする
ことによって、マウントの不良をなくすことができる効
果がある。As explained above, the present invention automatically detects the positional deviation, amount, and shape of the resin dropped by the dispenser, and optimizes the discharging conditions and position of the dispenser, thereby eliminating mounting defects. There is an effect that can be done.
6・・・ディスペンス駆動ユニット、7・・・レール、
8・・・ケース、9・・・キャビティ、10・・・滴下
樹脂。6... Dispense drive unit, 7... Rail,
8...Case, 9...Cavity, 10...Dropped resin.
Claims (3)
脂を用いて接合するマウンタにおいて、リードフレーム
又はケースに滴下した接着樹脂の量、形状、位置ずれを
検出する画像処理装置と、その検出信号に基づきディス
ペンサ及びディスペンスノズルを制御する制御部とを有
することを特徴とするマウンタ。(1) In a mounter that uses adhesive resin to bond a semiconductor element to a lead frame or case, an image processing device that detects the amount, shape, and positional deviation of the adhesive resin dropped on the lead frame or case, and based on the detection signal A mounter comprising a dispenser and a control unit that controls a dispense nozzle.
ディスペンスステーションと、半導体素子をリードフレ
ーム又はケースに接合するマウントステーションとの間
に、接着樹脂の量、形状、位置ずれを検出する画像処理
ステーションを設けた前項(1)記載のマウンタ。(2) An image processing station that detects the amount, shape, and positional deviation of the adhesive resin is installed between the dispensing station that drips adhesive resin onto the lead frame or case and the mounting station that joins the semiconductor element to the lead frame or case. The mounter described in the preceding paragraph (1) is provided.
マウンタの動作を停止する機能を有する前項(1)記載
のマウンタ。(3) If the amount of adhesive resin dripped is detected as abnormal,
The mounter according to the preceding item (1), which has a function of stopping the operation of the mounter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1269610A JPH03129837A (en) | 1989-10-16 | 1989-10-16 | Mounter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1269610A JPH03129837A (en) | 1989-10-16 | 1989-10-16 | Mounter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03129837A true JPH03129837A (en) | 1991-06-03 |
Family
ID=17474754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1269610A Pending JPH03129837A (en) | 1989-10-16 | 1989-10-16 | Mounter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03129837A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010118468A (en) * | 2008-11-12 | 2010-05-27 | Toshiba Corp | Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
| DE112008002576T5 (en) | 2007-09-25 | 2010-08-26 | Toyota Jidosha Kabushiki Kaisha, Toyota-shi | Anti-rust treated metallic base material and method for anti-rust treatment of the surface of a metallic base material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5645036A (en) * | 1979-09-20 | 1981-04-24 | Toshiba Corp | Mounting method and apparatus for semiconductor pellet |
-
1989
- 1989-10-16 JP JP1269610A patent/JPH03129837A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5645036A (en) * | 1979-09-20 | 1981-04-24 | Toshiba Corp | Mounting method and apparatus for semiconductor pellet |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112008002576T5 (en) | 2007-09-25 | 2010-08-26 | Toyota Jidosha Kabushiki Kaisha, Toyota-shi | Anti-rust treated metallic base material and method for anti-rust treatment of the surface of a metallic base material |
| JP2010118468A (en) * | 2008-11-12 | 2010-05-27 | Toshiba Corp | Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
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