JPH03128836A - Receiving and delivering device of different diameter work - Google Patents

Abstract

PURPOSE:To receive and deliver a work with different diameter without replacing a work holder and a work transfer holder by forming a different diameter work table in the work holder and the work transfer holder, and installing a slide mechanism of the work transfer holder and a vertical driving mechanism. CONSTITUTION:When a small the diameter work 11 is received and delivered, a work holder 2 where the small diameter work is placed on the second table 4 is slide-driven to a receiving position. Next, a transfer holder 6 which is orthogonally disposed with regard to the work holder 2 is slide-driven to a receiving position, whereas an opening part made in the work transfer holder 6 is inserted so as to bind the second table 4. The work transfer holder 6 is moved upward by a vertical driving mechanism to deliver the work placed on the second table 4 of the work holder 2 to work table formed on the right and left of the opening part of the work transfer holder 6.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for receiving and delivering workpieces of different diameters, such as a semiconductor manufacturing device and a thin film production device.

[Summary of the invention]

The present invention provides a device for receiving and delivering workpieces of different diameters, such as semiconductor manufacturing equipment and thin film production equipment, which includes a first mounting table on which a workpiece with a large diameter is placed, and a second mounting table on which a workpiece with a small diameter is placed. a work boulder having a second mounting base formed below the surface of the first mounting base, and a mounting base for receiving a second work placed on the work holder, are inserted so as to sandwich the second mounting base. The i31 device is formed on the left and right sides of the opening formed to perform the work and below the surface of the second mounting table, and is arranged below the surface of the first mounting table to receive the workpiece placed on the first mounting table. and a workpiece transfer holder formed above the second mounting table surface and disposed orthogonally to the workpiece holder, and a slide and vertical drive mechanism for the workpiece transfer holder to form one workpiece holder. This makes it possible to transport, deliver, and receive workpieces with different diameters, eliminating the need to replace workpiece holders each time a workpiece with a different diameter is handled, making it possible to achieve economical benefits and improve equipment efficiency and reliability. be.

[Conventional technology]

Conventionally, structures shown in FIGS. 8 to 11 have been common as workpiece delivery structures.

That is, when transferring the workpiece 1 dropped into the groove 3 of the workpiece holder 2 to the workpiece transfer holder 4, the workpiece transfer holder 4 is slid and driven from the standby position A shown in FIG. 8 to the transfer position WB. , the workpiece holder 2 is moved downward, and the workpiece 1 is placed on the mounting table 5 formed on the workpiece transfer holder 4 and transferred. Note that FIG. 9 is a diagram showing the height-related positions of the work holder 2 and the work transfer holder 4. In addition, at the delivery position mentioned above,
As a method for transferring a workpiece transferred to a workpiece transfer holder to a second workpiece transfer holder arranged orthogonally at another position, the structures shown in FIGS. 1O and 11 are known.

At the orthogonal point between the workpiece transfer holder 4 on which the workpiece 1 is placed and the second workpiece transfer holder 6 disposed orthogonally to the workpiece transfer boulder, that is, at the workpiece transfer position,
4, which is located at a position where the aforementioned workpiece transfer holder 4 and the second workpiece transfer holder 6 pass through, and which is located below the workpiece placed on the workpiece transfer holder 4.
An intermediate station 8 is provided which is driven up and down and forms a workpiece mounting table 9 at two locations.

Workpiece transfer holder 4 receives workpiece 1 at another position
is slid to the delivery position of the intermediate station 8. The intermediate station moves upward and transfers the workpiece 1 to four workpiece mounting tables 9. Next, the second workpiece mounting table 6 slides to the delivery position, the intermediate station 8 moves downward,
The workpiece 1 placed on the intermediate station 8 is transferred to the second
This structure is such that the workpiece 1 is transferred to the mounting table 7 of the workpiece transfer holder 6, and the workpiece 1 is transferred from the workpiece transfer holder 4 to the second workpiece transfer holder 6.

[Problem to be solved by the invention]

However, in the conventional example shown in FIGS. 8 to 11, there is only one type of workpiece diameter, and when workpieces with different diameters are required,
It is necessary to replace the work holder and the work transfer holder, and in the conventional example shown in FIGS. 10 and 11, it is also essential to replace the intermediate station. Therefore, it is possible to transfer workpieces with different diameters.

Replacement work holders, work transfer holders, and intermediate stations that can be received must be prepared in advance. In addition, the operating rate of the equipment decreases due to lost time due to the work associated with the exchange and adjustment of work delivery after exchange, and furthermore, particles enter the equipment due to opening and closing of the equipment due to exchange, and contamination of the equipment with impurity molecules due to the inflow of air. There were other drawbacks that impaired reliability.

Therefore, in order to solve the conventional drawbacks, this invention forms a work holder and a work transfer holder ↓ with a work placement table of different diameters, thereby making it necessary to replace the work holder and work transfer holder even when working with different diameters. The aim is to improve the efficiency of equipment operation and reliability of the equipment.

[Means to solve the problem]

In order to solve the above problems, in the present invention, a first mounting table on which a workpiece with a large diameter is placed and a second mounting table on which a workpiece with a small diameter is placed are placed below the surface of the first mounting table. The formed work holder and the workpiece placed on the second mounting table of the work holder are placed on the left and right sides of an opening formed for inserting the workpiece placed on the second mounting table so as to sandwich the second mounting table therebetween. a mounting table formed below the second mounting table surface and on which the workpiece placed on the first mounting table is placed is formed below the first mounting table surface and above the second mounting table surface; The workpiece transfer holder is arranged perpendicularly to the workpiece holder, and the workpiece transfer holder is structured to include a sliding and vertical drive mechanism, and one workpiece holder, the workpiece transfer holder, can transport and transfer workpieces of different diameters. , made it possible to receive.

C action] When receiving and delivering a workpiece with a small diameter using the receiving and delivering mechanism for workpieces having different diameters configured as described above, the workpiece holder with the workpiece having a small diameter placed on the second mounting table is moved to the delivery position. Drive the slide up to. Next, a work transfer holder arranged orthogonally to the work holder is slid to a delivery position. At this time, the opening provided in the work transfer holder is inserted so as to sandwich the second mounting table. The workpiece transfer holder is moved upward by the vertical drive mechanism, and the workpiece placed on the second mounting table of the workpiece holder is transferred to the workpiece placement tables formed on the left and right sides of the opening of the workpiece transfer holder. When transferring the workpiece placed on the workpiece transfer holder to the workpiece holder, the workpiece transfer holder may be moved downward.

- When receiving and delivering a large-diameter workpiece, slide the workpiece holder with the large-diameter workpiece placed on the first mounting table to the delivery position.

Slide the workpiece transfer holder to the delivery position,
The workpiece transfer holder is moved upward, and the large-diameter workpiece placed on the 1i12 mounting table is placed and delivered to the upper i3i device formed on the workpiece transfer holder.

In this way, it is possible to transfer and receive workpieces of different diameters using one workpiece holder and a workpiece transfer holder.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

FIG. 1 shows a workpiece transfer holder 6 waiting for the workpiece holder 2. As shown in FIG.

FIG. 2 is a diagram showing the workpiece transfer and receiving position where the workpiece transfer holder 6 moves forward and intersects the workpiece holder 2 at right angles.

FIG. 3 is a cross-sectional view taken along the line AA in FIG. 2.

In the work holder 2, a first mounting table 3 on which a work IO with a large diameter is placed and a second mounting table 4 on which a work 11 with a small diameter is placed are formed below the first mounting table 3. . Further, an escape groove 5 into which the workpiece transfer holder 6 enters is formed.

The workpiece transfer holder 6 is the second i1 of the workpiece holder 2.
i An opening 7 for inserting the placing table 4 into the relief guide 5 so as to sandwich it therein, a fourth placing table 8 for receiving and placing a workpiece 11 with a small diameter on the left and right sides of the opening 7, and this fourth placing table 8. A third mounting table 9 is formed above the third mounting table 9 for receiving and mounting a work 10 having a large diameter.

The positional relationship of each mounting table when the work holder 2 and the work transfer holder 6 are perpendicular to each other is not shown in FIG.

That is, the third mounting table 9 and the fourth mounting table of the workpiece transfer holder 6
The mounting table 8 is connected to the first mounting table 3 of the work holder 2 and the second mounting table 8.
They are each arranged below the mounting table 4.

FIG. 6 is a plan view showing an embodiment of the drive mechanism for the work transfer holder 6, and FIG. 7 is a side view of FIG. 6.

A workpiece transfer holder 6 is fixed to the tip of the rod 12,
A hair ring holder A13 that holds a bearing that guides the rod 12 and a magnet holder 15 that holds a magnet 14 are fixed to the other end.

16 is a flange that is integrated with the pipe 16a, and a bearing holder B17 that holds a bearing that guides one of the rods 12 is attached thereto.

By sliding the magnet 1B holding the magnet 15 inserted into the pipe in the axial direction of the rod 12 manually or by a drive mechanism, the rod 12 is slid and driven. 1
It slides in the axial direction of the work holder 2, that is, in the direction of the work holder 2.

19 is a bellows that can be displaced at right angles, flanges 20 are integrally attached to both ends thereof, and one side is attached to the outer wall 21 of the vacuum container.
The other end is connected to a flange 16 formed integrally with the pipe and vacuum-sealed.

22 is a plate on which the LM trail 3 is attached, and is fixed to the outer wall 21 of the vacuum container.

Reference numeral 24 denotes a plate on which the LM guide block 25 inserted into the LM rail 23 is attached, and is fixed to the flange 20 having the bellows 19. Therefore, rod 1
A flange 16 integrally formed with the pipe holding 2
is movable up and down (back and forth in the plane of the drawing) by the LM rail 23 and LM guide block 25.

In FIG. 7, 26 is a pole screw, both end shafts of which are guided by bearings. The ball screw 2
A plate 28 is attached to the inserted pole screw nut 27, and a rod 29 is attached to the plate 28, the tip of which is in contact with the plate 24 to which the LM Guide Pro 7 rod 25 is fixed, and the rod 29 is attached to the lower part of the flange 20. Displacement is regulated. A handle 30 rotates the pole screw 26 and raises and lowers the pole screw nut 27.

Next, the work receiving and delivering operations will be explained.

The workpiece transfer holder 6 shown in FIG. 1 is advanced to the receiving and delivery position shown in FIG. 2 by sliding the magnetic cup 18 shown in FIG.

Next, the handle 30 shown in FIG. 7 is operated to rotate the ball screw 26, displacing the rod 29 attached to the pole screw nut 27 upward, and pushing up the flange 16 integrally formed with the pipe. The workpiece transfer holder 6 fixed to the tip of the rod 12 moves upward.

FIG. 4 is a view in which the workpiece transfer holder 6 is moved upward and a workpiece 11 with a small diameter is received from the workpiece holder 2, and FIG. 5 is a view in which a workpiece 10 with a large diameter is removed.

After further transferring the workpiece, the magnetic cup 18 shown in FIG. 6 is slid, the workpiece transfer boulder is driven to another position, and the workpiece is conveyed.

When transferring the workpiece placed on the workpiece transfer holder 6 to the workpiece holder 2, the workpiece transfer holder 6 may be displaced downward.

The vertical drive mechanism shown in FIG. 7 can also be implemented using a cam or a lever.

〔Effect of the invention〕

As explained above, this invention is capable of receiving workpieces of different diameters by forming a workpiece mounting table of different diameters on a workpiece holder and a workpiece transfer holder, and providing a slide mechanism and a vertical drive mechanism for the workpiece transfer holder. , delivery can be made without replacing the work holder or work transfer holder, which has the effect of making it possible to efficiently operate the device and improve reliability.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing a work transfer holder waiting for the work holder according to the present invention, and Fig. 2 is a plan view showing the work holder and the work transfer holder perpendicular to each other and the work transfer and receiving positions. , Figure 3 is A of Figure 2 above.
- A cross-sectional view showing the A cross section, Figure 4 is a cross-sectional view when a workpiece with a small diameter is transferred from the workpiece holder to the workpiece transfer holder, and Figure 5 is a cross-sectional view when a workpiece with a large diameter is transferred to the workpiece transfer holder. 6 is a plan view showing the drive mechanism of the workpiece transfer holder, FIG. 7 is a side view of FIG. 6, and FIGS. 8 to 11 illustrate the conventional transfer structure. This is a diagram.・Work holder, 1st mounting table, 2nd mounting table, work transfer holder, opening, 4th mounting table, 3rd mounting table, large diameter workpiece, small diameter workpiece

Claims (2)

[Claims] (1) A first mounting table on which a workpiece with a large diameter is placed and a second mounting table on which a workpiece with a small diameter is placed are attached to a work holder formed below the surface of the first mounting table and the work holder. The openings are arranged perpendicularly to each other and are inserted so as to sandwich the second mounting table, and the mounting table for receiving the workpiece placed on the second mounting table is placed below the surface of the second mounting table. A workpiece transfer holder having a mounting table for receiving a workpiece placed on the mounting table formed below the first mounting table surface and above the second mounting table surface, and the workpiece transfer holder is placed in a standby position. A device for receiving and delivering workpieces of different diameters, comprising: a slide mechanism for moving workpieces to a workpiece receiving/delivery position and a transfer position; and a workpiece transfer mechanism having a mechanism for vertically driving the workpieces at the workpiece receiving/delivery position. (2) A slide mechanism consisting of a magnetic means that slides a rod, which is provided with a workpiece transfer holder at the tip end thereof, in the axial direction of the rod for placing and transferring the workpiece; A device for receiving and delivering workpieces of different diameters, characterized by comprising a vertical drive mechanism that moves up and down in the direction of a workpiece placement surface.