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JPH0281305A - Production of magnetic head - Google Patents

Production of magnetic head

Info

Publication number
JPH0281305A
JPH0281305A JP23400488A JP23400488A JPH0281305A JP H0281305 A JPH0281305 A JP H0281305A JP 23400488 A JP23400488 A JP 23400488A JP 23400488 A JP23400488 A JP 23400488A JP H0281305 A JPH0281305 A JP H0281305A
Authority
JP
Japan
Prior art keywords
magnetic
head
magnetic pole
excitation coil
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23400488A
Other languages
Japanese (ja)
Inventor
Mitsuaki Atobe
光朗 跡部
Kaname Miyazawa
宮澤 要
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP23400488A priority Critical patent/JPH0281305A/en
Publication of JPH0281305A publication Critical patent/JPH0281305A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/17Construction or disposition of windings
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野J 本発明は磁気記録用の磁気ヘッドの製造方法に関する。[Detailed description of the invention] [Industrial Application Field J The present invention relates to a method of manufacturing a magnetic head for magnetic recording.

〔従来の技術〕[Conventional technology]

従来の磁気ヘッドは一般に機械的加工により作られるバ
ルクヘッドと薄膜形成加工による薄膜ヘッドがある。
Conventional magnetic heads generally include bulk heads made by mechanical processing and thin film heads made by thin film forming processing.

バルクヘッド、IIIIIヘッドはそれぞれ性能的利点
を多く有するが、加工工程が複雑で自動化が難しいため
、製造コストがかかる。
Although the bulk head and the III head each have many performance advantages, the manufacturing process is complicated and difficult to automate, resulting in high manufacturing costs.

最近、情報高度化に伴いコンピユークーの出力機器であ
るプリンターに対する要求が高度化してきた0例えば、
高速印字、高速マルチコピー性、高品質印字、印字の安
定性等があげられる。
Recently, with the advancement of information, the requirements for printers, which are computer output devices, have become more sophisticated.0For example,
Features include high-speed printing, high-speed multi-copying, high-quality printing, and printing stability.

その状況の中注目を集めているのが磁気プリンターであ
る。磁気プリンターを高速化するためには磁気ヘッドを
複数用いることが考えられる。
In this situation, magnetic printers are attracting attention. In order to increase the speed of a magnetic printer, it is conceivable to use multiple magnetic heads.

しかしそれは磁気ヘッドの複数化により磁気プリンター
の大巾なコストアップにつながり市場に受は入られる商
品とはなりにくかった。
However, the use of multiple magnetic heads significantly increased the cost of magnetic printers, making it difficult for the product to gain acceptance in the market.

そこで、従来の磁気ブリンク−は磁気ヘッドの個数を極
力減らして磁気ドラムの回転数を上昇させることにより
高速化に対応してきた。
Therefore, conventional magnetic blinkers have responded to higher speeds by reducing the number of magnetic heads as much as possible and increasing the number of rotations of the magnetic drum.

[発明が解決しようとする課題) しかし、上記のような磁気プリンターにおいては、フレ
ーム、シャーシ、モーター、電気等に負荷がかかるため
全体的にコスト、サイズ面でマイナス要因が上回り現在
、市場において成功はしていない、又、薄膜ヘッドにお
いてマルチヘッド化を試みてもギャップデプス等のギャ
ップ周辺部の寸法、位置精度出しが難しい。
[Problem to be solved by the invention] However, in the magnetic printer as described above, the load is placed on the frame, chassis, motor, electricity, etc., so overall the negative factors in terms of cost and size are outweighed, and it is currently not successful in the market. In addition, even if a multi-head configuration is attempted with a thin film head, it is difficult to obtain dimension and positional accuracy around the gap such as the gap depth.

そこで本発明はこのような間屈点を解決するためのもの
で、その目的とするところは、複数の磁気ヘッドを安価
に精度よく製造することを行なわせるものである。
SUMMARY OF THE INVENTION The present invention is intended to solve this problem, and its purpose is to manufacture a plurality of magnetic heads at low cost and with high precision.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の磁気ヘッドの製造方法は、記録媒体と垂直磁気
記録ヘッドの主磁極とを接触させて相対移動させること
により記録再生を行なう垂直磁気記録装置において、高
透磁率のバルク磁性体からなる主磁極に、主磁極とほぼ
同寸法に穴あけされた非磁性基板上の六回りに平面コイ
ルを形成して貼り合せたことを特徴とする。
The method for manufacturing a magnetic head of the present invention is used in a perpendicular magnetic recording device that performs recording and reproduction by bringing a recording medium and a main pole of a perpendicular magnetic recording head into contact and moving them relative to each other. The magnetic pole is characterized by forming six planar coils on a non-magnetic substrate with holes of approximately the same dimensions as the main magnetic pole and bonding them together.

本発明の磁気ヘッドの製造方法は図−1〜図−3に示す
ように、磁性材料をダイシングによりカットして凹凸を
設ける。その凸部分を本ヘッドの垂直磁極部と呼ぶ。
As shown in FIGS. 1 to 3, the method for manufacturing a magnetic head of the present invention involves cutting a magnetic material by dicing to provide unevenness. The convex portion is called the perpendicular magnetic pole portion of this head.

ここで用いられる磁性材料はアモルファス金属鉄、フェ
ライト等があげられる。
Magnetic materials used here include amorphous metal iron, ferrite, and the like.

次に励磁コイルと絶縁体の形成を図−4〜図−5に示す
、これは、非磁性板(例λばフレキシブルフィルム)上
に所定の径(垂直磁極部の径より若干大きめの径)をプ
レスで穴あけし、その穴の回りに平面コイルを形成する
Next, the formation of the excitation coil and insulator is shown in Figures 4 and 5. This is done by placing the excitation coil and insulator on a non-magnetic plate (for example, a flexible film) with a predetermined diameter (slightly larger diameter than the diameter of the vertical magnetic pole part). A hole is made using a press, and a planar coil is formed around the hole.

このコイル部とコイル支持体(磁性体と励磁コイルとの
絶縁体)を図−6のようにm性体と重ねた後、保護偵を
形成し、ヘッドを完成させる。
After this coil part and the coil support (insulator between the magnetic material and the excitation coil) are overlapped with the magnetic material as shown in Figure 6, a protective layer is formed and the head is completed.

上記のような方法によれば、バルク加工では負荷が大き
い励磁コイル部の組み上げが容易になりさらに、lff
!平面コイルを用いるためヘッドの小型化が可能となっ
た。さらにコイル支持体が絶縁体なのであらためて絶縁
層の形成を行なう必要がなく、低コストヘッドの製造が
可能となる利点を有する。
According to the above method, it is easy to assemble the excitation coil section, which is subjected to a large load in bulk processing, and furthermore, the lff
! The use of a planar coil made it possible to downsize the head. Furthermore, since the coil support is an insulator, there is no need to form an insulating layer again, which has the advantage that a low-cost head can be manufactured.

〔実施例11 以下、本発明について実施例に基づいて詳細に説明する
[Example 11] Hereinafter, the present invention will be described in detail based on Examples.

フェライト材をダイシングにより所定の大きさ(厚み5
0um)にした後、同装置で図−3に示すような形状に
カットして磁極形成をした。この時の磁極幅は50μm
とした。
The ferrite material is diced to a predetermined size (thickness 5
0 um), and then cut into the shape shown in Figure 3 using the same machine to form a magnetic pole. The magnetic pole width at this time is 50μm
And so.

又、励磁コイル部の形成については、はじめに25μm
厚のポリイミドフィルムに直径60μmの穴を、先に示
した磁極のピッチと同じにしてプレス打抜きした。そし
て、洗浄処理した後、Cu膿をスパッタ法で1500A
施し導電化膿とした。
Also, regarding the formation of the excitation coil part, first
Holes with a diameter of 60 μm were press punched into a thick polyimide film at the same pitch as the magnetic poles shown above. After cleaning, Cu pus was removed by sputtering at 1500A.
It was treated as conductive suppuration.

次に図−6に示したようにフォトレジストを塗布し、仮
焼成後、選択露光、エツチング、本焼成しパターニング
した。そこに銅メツキを約5μm施し、逆スパツタによ
り導電化層をエツチングし励磁コイルを形成した。
Next, as shown in FIG. 6, a photoresist was applied, and after preliminary baking, selective exposure, etching, main baking, and patterning were performed. Copper plating was applied thereto to a thickness of approximately 5 μm, and the conductive layer was etched by reverse sputtering to form an excitation coil.

次に、図−6の通りフェライト磁極部と励磁コイルフィ
ルムを重ね、磁極をフィルムの穴に通し接着剤を流し込
みフェライトに励磁コイルフィルムを固定し、磁気ヘッ
ドを完成させた。
Next, as shown in Figure 6, the ferrite magnetic pole part and the excitation coil film were stacked, the magnetic pole was passed through the hole in the film, and adhesive was poured to fix the excitation coil film to the ferrite, completing the magnetic head.

次に純鉄に非磁性ニッケルリンメツキを30μm施した
後、Hc350エルステッド、Br6000ガウス、膜
厚5umのCo、Ni、P強磁性体膜を形成した磁気記
録媒体により、上記磁気ヘッド書き込み評価を行なった
。書き込み評価については図−8参照、マグネットピュ
アーで潜像形成を確認した後、磁気トナーを磁気付着さ
せたところ、十分な密着性と選択性が得られることを確
認した。
Next, after applying 30 μm of non-magnetic nickel phosphor plating to pure iron, the above magnetic head writing evaluation was performed using a magnetic recording medium on which a Co, Ni, and P ferromagnetic film of 350 Oersted Hc, 6000 Gauss of Br, and a 5 μm thick Co, Ni, and P ferromagnetic film was formed. Ta. For writing evaluation, see Figure 8. After confirming latent image formation with Magnet Pure, magnetic toner was attached magnetically, and it was confirmed that sufficient adhesion and selectivity could be obtained.

【実施例2] フェライト材をダイシングにより所定の大きさ(厚み5
0μm)にした後、同装置で図−3に示すような形状に
カットして磁極形成をした。この時の磁極幅は50μm
とした。
[Example 2] Ferrite material is diced to a predetermined size (thickness 5
0 μm) and then cut into the shape shown in Figure 3 using the same machine to form a magnetic pole. The magnetic pole width at this time is 50μm
And so.

又、励磁コイル部の形成については、はじめに12.5
μm厚のポリイミドフィルムに10um厚の銅箔をラミ
ネートし、先に示した磁極のピッチと同じにしてプレス
打抜きした。
Also, regarding the formation of the excitation coil section, see 12.5 in the beginning.
A 10 um thick copper foil was laminated onto a 10 um thick polyimide film, and press punched at the same pitch as the magnetic poles shown above.

次に洗浄を十分行なった後、フォトレジストを塗布し、
仮焼成後、選択露光、エツチング、本焼成しバターニン
グした。
Next, after thorough cleaning, apply photoresist.
After pre-baking, selective exposure, etching, final firing and buttering were carried out.

次に塩化第二鉄溶液に浸漬して余分な銅箔をエツチング
して励磁コイルを形成した。
Next, the excitation coil was formed by immersing it in a ferric chloride solution and etching away the excess copper foil.

次に、図−6の通りフェライト磁極部と励磁コイルフィ
ルムを重ね、磁極をフィルムの穴に通し接着剤を流し込
みフェライトに励磁コイルフィルムを固定し、磁気ヘッ
ドを完成させた。
Next, as shown in Figure 6, the ferrite magnetic pole part and the excitation coil film were stacked, the magnetic pole was passed through the hole in the film, and adhesive was poured to fix the excitation coil film to the ferrite, completing the magnetic head.

次に純鉄に非磁性ニッケルリンメツキを30μm施した
後、Hc350エルステッド、Br6000ガウス、膜
厚5umのCo、Ni、P強m性体膜を形成した磁気記
録媒体により、上記磁気ヘッド書き込み評価を行なった
。書き込み評価については図−8参照、マグネットピュ
アーで潜像形成を確認した後、磁気トナーを磁気付着さ
せたところ、十分な密着性と選択性が得られることを確
認した。
Next, after applying 30 μm of non-magnetic nickel plating to pure iron, the above magnetic head writing evaluation was performed using a magnetic recording medium on which a 5 μm thick Co, Ni, and P ferromagnetic film was formed with Hc350 Oersted, Br6000 Gauss, and 5 μm thick. I did it. For writing evaluation, see Figure 8. After confirming latent image formation with Magnet Pure, magnetic toner was attached magnetically, and it was confirmed that sufficient adhesion and selectivity could be obtained.

[発明の効果] 以上述べたように、本発明の磁気ヘッドの製造方法によ
り、捲線工程が不要となり、低コスト化が精度よく、安
価に製造できることも大きな特徴である。
[Effects of the Invention] As described above, the method for manufacturing a magnetic head of the present invention is characterized by eliminating the need for a winding process, allowing for cost reduction, accurate manufacturing at low cost, and the like.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、高透磁率のバルク磁性体の斜視図。 第2図はバルク磁性体を所定の厚みにカッティングした
概念図。 第3図は主磁極とリターン磁極を形成した概念図。 第4図は絶縁性基板に前記、主磁極が挿入できる大きさ
に穴明けを施した概念図。 第5図は穴の回りに励mコイルを形成した概念図。 第6図はバルク磁性体と励磁コイルを設けた基板を貼り
合せた概念図。 第7図は本発明の応用例でマルチヘッドの概念図。 ■・・・高透磁率のバルク6n性体 2・・・主磁極 ・リターン磁極 ・絶縁性基板 ・励磁コイル ・励磁コイル 以  上 出願人 セイコーエプソン株式会社 代理人 弁理士 鈴 木 喜三部(他1名)第4図 第7図
FIG. 1 is a perspective view of a bulk magnetic material with high magnetic permeability. Figure 2 is a conceptual diagram of cutting bulk magnetic material to a predetermined thickness. Figure 3 is a conceptual diagram showing the formation of the main magnetic pole and return magnetic pole. FIG. 4 is a conceptual diagram in which a hole is drilled in an insulating substrate to a size that allows the main magnetic pole to be inserted therein. FIG. 5 is a conceptual diagram of an excitation coil formed around a hole. FIG. 6 is a conceptual diagram in which a bulk magnetic material and a substrate provided with an excitation coil are bonded together. FIG. 7 is a conceptual diagram of a multi-head application example of the present invention. ■... Bulk 6n magnetic body with high magnetic permeability 2... Main magnetic pole, return magnetic pole, insulating substrate, excitation coil, excitation coil and above Applicant Seiko Epson Co., Ltd. Agent Patent attorney Kizobe Suzuki (and others) 1 person) Figure 4 Figure 7

Claims (1)

【特許請求の範囲】[Claims] 記録媒体と垂直磁気記録ヘッドの主磁極とを接触させて
相対移動させることにより記録再生を行なう垂直磁気記
録装置において、高透磁率のバルク磁性体からなる主磁
極に、主磁極とほぼ同寸法に穴あけされた非磁性基板上
の穴回りに平面コイルを形成して貼り合せたことを特徴
とする磁気ヘッドの製造方法。
In a perpendicular magnetic recording device that performs recording and reproduction by bringing the recording medium and the main magnetic pole of a perpendicular magnetic recording head into contact and moving them relative to each other, the main magnetic pole is made of a bulk magnetic material with high magnetic permeability, and the main magnetic pole has approximately the same dimensions as the main magnetic pole. A method for manufacturing a magnetic head, characterized in that a planar coil is formed around a hole on a non-magnetic substrate and bonded to the hole.
JP23400488A 1988-09-19 1988-09-19 Production of magnetic head Pending JPH0281305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23400488A JPH0281305A (en) 1988-09-19 1988-09-19 Production of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23400488A JPH0281305A (en) 1988-09-19 1988-09-19 Production of magnetic head

Publications (1)

Publication Number Publication Date
JPH0281305A true JPH0281305A (en) 1990-03-22

Family

ID=16964048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23400488A Pending JPH0281305A (en) 1988-09-19 1988-09-19 Production of magnetic head

Country Status (1)

Country Link
JP (1) JPH0281305A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9298280B2 (en) 2001-03-29 2016-03-29 Xylon Llc Method and apparatus for controlling a computing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9298280B2 (en) 2001-03-29 2016-03-29 Xylon Llc Method and apparatus for controlling a computing system

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