JPH0256305B2 - - Google Patents
Info
- Publication number
- JPH0256305B2 JPH0256305B2 JP61125274A JP12527486A JPH0256305B2 JP H0256305 B2 JPH0256305 B2 JP H0256305B2 JP 61125274 A JP61125274 A JP 61125274A JP 12527486 A JP12527486 A JP 12527486A JP H0256305 B2 JPH0256305 B2 JP H0256305B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- temperature coefficient
- microwave
- titanate
- mgtio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 claims description 15
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000011777 magnesium Substances 0.000 claims description 7
- 239000011787 zinc oxide Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- PEFIIJCLFMFTEP-UHFFFAOYSA-N [Nd].[Mg] Chemical compound [Nd].[Mg] PEFIIJCLFMFTEP-UHFFFAOYSA-N 0.000 claims description 2
- WEUCVIBPSSMHJG-UHFFFAOYSA-N calcium titanate Chemical compound [O-2].[O-2].[O-2].[Ca+2].[Ti+4] WEUCVIBPSSMHJG-UHFFFAOYSA-N 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 description 9
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 229910052573 porcelain Inorganic materials 0.000 description 6
- 239000000843 powder Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
(産業上の利用分野)
本発明はマイクロ波用回路素子、マイクロ波回
路基盤などに用いられる誘電体材料に係り、金属
酸化物を焼成して得られる高誘電率で誘電損失が
小さく、誘電率の温度係数の小さい誘電体磁器組
成物に関する。
(従来の技術)
近年、マイクロ波回路技術の進歩に伴い、回路
の小型化が図られている。
従来から、このマイクロ波周波数帯(300MHz
〜30GHz)の回路には、空胴共振器、アンテナな
どが用いられてきたが、これらはマイクロ波の波
長と同程度の大きさになるため回路の小型化には
不向きであつた。これに対し、近年、マイクロ波
周波数帯で使用される誘電体共振器を用いたマイ
クロ波フイルタ、発振器の周波数安定化を計るた
めの小型誘電体共振器、マイクロ波IC用のコン
デンサや基盤等に用いられる誘電体磁器等、マイ
クロ波回路に誘電体磁器を用いて回路の小型化を
図る応用がなされている。これらの磁器に要求さ
れる特性は、マイクロ波周波数帯での誘電損失が
小さく、使用周波帯に適した高い誘電率をもち、
誘電率の温度係数が小さい事である。
従来からこれらの特性を満足する磁器材料とし
て、TiO2系のものがよく使用されており、特に
BaO−TiO2系磁器、およびその一部を他の元素
で置換した磁器、更に誘電率の温度係数を調整す
るために、負の温度係数をもつているTiO2と正
の温度係数をもつている誘電体磁器やガラスと組
合わせたものが多数考案され応用されて来た。
(発明が解決しようとする問題点)
従来のTiO2系、特にBaO−TiO2系磁器材料で
は誘電率が十分に高くなかつたり、誘電損失が十
分に小さくなかつたり、所望の温度係数が得られ
ないなど、すべての特性を満足する材料を安定に
得る事は困難であり、実用上の問題点が多かつ
た。
(問題点を解決するための手段)
発明者らは、これらの欠点を鑑み種々の組成系
について検討した結果、主成分組成が、チタン酸
カルシウム〔CaTiO3〕とチタン酸ランタン
〔La2Ti2O7〕とマグネシウムチタン酸ネオジウム
〔Nd(Mg1/2Ti1/2)O3)とチタン酸マグネシウム
と酸化亜鉛の混合物〔MgTiO3・1/2ZnO〕から
なり、その主成分組成をx〔CaTiO3〕・y
〔La2Ti2O7〕・z〔Nd(Mg1/2Ti1/2)O3〕+w
〔MgTiO3・1/2ZnO〕、x+y+z+w=100(た
だしx、y、z、wはモル比)と表わしたとき、
x、y、z、wが10≦x≦75、0<y≦25、15≦
z≦75、5≦w≦40である誘電体磁器組成物が、
誘電体共振器、マイクロ波用コンデンサ、基盤等
に用いる誘電体磁器として優れた特性をもち、実
用に供するに適した材料である事を見出した。
(実施例)
以下本発明を実施例に従つて説明する。
試料を作成するための出発原料は、99.9%以上
の高純度のMgO、CaCO3、TiO2、Nd2O3、
La2O3およびZnOの粉末を用い、CaTiO3と
La2TiO7とNd(Mg1/2Ti1/2)O3とMgTiO3・1/2
ZnOの各組成になる様に各々秤量し、ボールミル
に純水とともに投入し湿式混合を行つた。この混
合物を乾燥させた後、800〜1100℃で4時間仮焼
して得られた仮焼粉末を所定の各組成になる様に
調合して、再びボールミルに純水とともに投入
し、湿式粉砕を行なつた。この様にして得られた
粉砕物を乾燥させた後、バインダ水溶液を添加混
練して得た造粒粉末を1.5ton/cm2の圧力を加えて
得られた成形体を1200℃〜1500℃で2時間空気中
で焼成を行なつて焼成体を得た。その後、得られ
た磁器を用いて誘電体共振器を構成し、誘電体共
振器のの共振周波数と無負荷Qを測定して誘電率
を求めた。得られた誘電体共振器の共振周波数は
4〜8GHzであつた。共振周波数の温度依存性は
誘電体共振器の共振周波数の温度変化を+25℃〜
+85℃の間で測定して求めた。尚、共振周波数の
温度係数τfは、誘電率の温度係数τεと近似的に次
式によつて結ばれる。
τf=−1/2τε−α
ただし、
τf:共振周波数の温度係数
τε:誘電率の温度係数
α:磁器の熱膨張係数
得られた試料での測定結果を第1表に示す。こ
の表中で*印を付した試料は本発明の範囲外の比
較例であり、これ以外の試料が本発明の範囲内の
実施例である。
第1表に示される様に本発明の誘電体磁器組成
物は比誘電率としては、30以上の値をもち、しか
も誘電率の温度係数は広い温度範囲にわたり±
100ppm/℃の範囲におさえてなおかつ、誘電体
の損失を表わすQ値は、マイクロ波帯の周波数で
2000以上の大きな値を得ることができる材料であ
ることがわかる。
また、本発明において、成分範囲の限定理由
は、以下による。〔CaTiO3〕については、10モ
ルより少ないQが低くなり、75モルより多いと温
度係数が大きくなり、〔La2Ti2O7〕については、
これを含まないとτfがマイナス側に大きく、25モ
ルよりも多いとQが低くなり、〔Nd(Mg1/2Ti1/2)
O3〕については、15モルより少ないと温度係数
が大きくなり、75モルより多いとQが小さくな
り、〔MgTiO3・1/2ZnO〕については、5モルよ
り少ないと高い焼結温度が必要であり、40モルよ
り多いとεが低くなりかつ温度係数が大きくなる
からである。
(Industrial Application Field) The present invention relates to dielectric materials used in microwave circuit elements, microwave circuit boards, etc. The present invention relates to a dielectric ceramic composition having a small temperature coefficient. (Prior Art) In recent years, with advances in microwave circuit technology, circuits have been made smaller. Traditionally, this microwave frequency band (300MHz
Cavity resonators, antennas, etc. have been used in circuits of up to 30 GHz), but these are not suitable for miniaturizing circuits because their size is about the same as the wavelength of microwaves. In contrast, in recent years, microwave filters using dielectric resonators used in the microwave frequency band, small dielectric resonators for stabilizing the frequency of oscillators, capacitors and boards for microwave ICs, etc. Applications have been made to miniaturize circuits by using dielectric ceramics in microwave circuits. The characteristics required of these porcelains are low dielectric loss in the microwave frequency band, high dielectric constant suitable for the frequency band used,
The temperature coefficient of dielectric constant is small. Traditionally, TiO2 - based materials have been commonly used as porcelain materials that satisfy these characteristics, especially
BaO−TiO 2 -based porcelain, porcelain in which part of it has been replaced with other elements, and TiO 2 with a negative temperature coefficient and TiO 2 with a positive temperature coefficient in order to adjust the temperature coefficient of dielectric constant. Many combinations of dielectric materials such as porcelain and glass have been devised and applied. (Problems to be solved by the invention) Conventional TiO 2 -based, especially BaO-TiO 2 -based porcelain materials have problems such as not having a sufficiently high dielectric constant, not having a sufficiently small dielectric loss, or not being able to obtain a desired temperature coefficient. It is difficult to stably obtain a material that satisfies all of the properties, such as the absence of carbon dioxide, and there are many practical problems. (Means for Solving the Problems) In view of these drawbacks, the inventors studied various composition systems and found that the main component composition was calcium titanate [CaTiO 3 ] and lanthanum titanate [La 2 Ti 2 O 7 ], magnesium neodymium titanate [Nd (Mg 1/2 Ti 1/2 ) O 3 ), and a mixture of magnesium titanate and zinc oxide [MgTiO 3 1/2 ZnO], whose main component composition is x [ CaTiO 3 ]・y
[La 2 Ti 2 O 7 ]・z [Nd (Mg 1/2 Ti 1/2 ) O 3 ] +w
[MgTiO 3 1/2ZnO], when expressed as x + y + z + w = 100 (x, y, z, w are molar ratios),
x, y, z, w are 10≦x≦75, 0<y≦25, 15≦
A dielectric ceramic composition in which z≦75, 5≦w≦40,
It was discovered that this material has excellent properties as a dielectric ceramic for use in dielectric resonators, microwave capacitors, substrates, etc., and is suitable for practical use. (Example) The present invention will be described below with reference to Examples. The starting materials for making the samples are MgO, CaCO 3 , TiO 2 , Nd 2 O 3 , with a purity of 99.9% or more.
Using La 2 O 3 and ZnO powder, CaTiO 3 and
La 2 TiO 7 and Nd (Mg 1/2 Ti 1/2 ) O 3 and MgTiO 3・1/2
Each ZnO composition was weighed and put into a ball mill together with pure water for wet mixing. After drying this mixture, the resulting calcined powder was calcined at 800 to 1100℃ for 4 hours, and the resulting calcined powder was mixed to have each predetermined composition, and then put into the ball mill together with pure water again and wet-pulverized. I did it. After drying the pulverized product obtained in this way, a pressure of 1.5 ton/cm 2 was applied to the granulated powder obtained by adding and kneading an aqueous binder solution. Firing was performed in air for 2 hours to obtain a fired body. Thereafter, a dielectric resonator was constructed using the obtained ceramic, and the resonant frequency and no-load Q of the dielectric resonator were measured to determine the dielectric constant. The resonant frequency of the obtained dielectric resonator was 4 to 8 GHz. The temperature dependence of the resonant frequency is the temperature change of the resonant frequency of the dielectric resonator from +25℃.
It was determined by measuring between +85°C. Note that the temperature coefficient τf of the resonance frequency is approximately connected to the temperature coefficient τε of the dielectric constant by the following equation. τf=−1/2τε−α Where, τf: Temperature coefficient of resonance frequency τε: Temperature coefficient of dielectric constant α: Coefficient of thermal expansion of porcelain The measurement results for the obtained samples are shown in Table 1. The samples marked with * in this table are comparative examples outside the scope of the present invention, and the other samples are examples within the scope of the present invention. As shown in Table 1, the dielectric ceramic composition of the present invention has a relative dielectric constant of 30 or more, and the temperature coefficient of the dielectric constant is ± over a wide temperature range.
In addition, the Q value, which represents the loss of the dielectric, is kept within the range of 100 ppm/°C at frequencies in the microwave band.
It can be seen that this is a material that can obtain large values of 2000 or more. Further, in the present invention, the reason for limiting the component range is as follows. For [CaTiO 3 ], Q less than 10 moles becomes low, and more than 75 moles increases the temperature coefficient, and for [La 2 Ti 2 O 7 ],
If it is not included, τf will be large on the negative side, and if it is more than 25 mol, Q will be low .
For [O 3 ], if it is less than 15 moles, the temperature coefficient becomes large, and if it is more than 75 moles, Q becomes small, and for [MgTiO 3 1/2ZnO], if it is less than 5 moles, a high sintering temperature is required. This is because if the amount exceeds 40 moles, ε becomes low and the temperature coefficient becomes large.
【表】
(発明の効果)
以上のように、本発明にかかる誘電体磁器組成
物は、マイクロ波周波数において誘電率が50程度
と大きく、かつ誘電体損失が小さいと同時に、誘
電率の温度係数が小さい材料であることがわか
る。これらはマイクロ波周波数帯で使用される回
路素子、基盤として極めて有用な誘電体磁器材料
であることは明白である。なお本材料は低周波領
域でも誘電損失が小さく、Q値の高いコンデンサ
材料としても優れた材料であることを確認した。[Table] (Effects of the Invention) As described above, the dielectric ceramic composition according to the present invention has a large dielectric constant of about 50 at microwave frequencies, a small dielectric loss, and a temperature coefficient of the dielectric constant. It can be seen that this is a small material. It is clear that these dielectric ceramic materials are extremely useful as circuit elements and substrates used in the microwave frequency band. It was confirmed that this material has low dielectric loss even in the low frequency range and is an excellent material for capacitors with a high Q value.
Claims (1)
〔CaTiO3〕とチタン酸ランタン〔La2Ti2O7〕と
マグネシウムチタン酸ネオジウム〔Nd(Mg1/2
Ti1/2)O3)とチタン酸マグネシウムと酸化亜鉛
の混合物〔MgTiO3・1/2ZnO〕からなり、その
主成分組成をx〔CaTiO3〕・y〔La2Ti2O7〕・z
〔Nd(Mg1/2Ti1/2)O3〕+w〔MgTiO3・1/2ZnO〕、
x+y+z+w=100(ただしx、y、z、wはモ
ル比)と表わしたとき、x、y、z、wが10≦x
≦75、0<y≦25、15≦z≦75、5≦w≦40であ
ることを特徴とするマイクロ波用誘電体磁器組成
物。[Claims] 1. The main component composition is calcium titanate [CaTiO 3 ], lanthanum titanate [La 2 Ti 2 O 7 ], and magnesium neodymium titanate [Nd (Mg 1/2
It consists of a mixture of Ti 1/2 ) O 3 ), magnesium titanate, and zinc oxide [MgTiO 3 1/2ZnO], whose main component composition is x[CaTiO 3 ]・y[La 2 Ti 2 O 7 ]・z
[Nd (Mg 1/2 Ti 1/2 ) O 3 ] + w [MgTiO 3・1/2ZnO],
When expressed as x+y+z+w=100 (x, y, z, w are molar ratios), x, y, z, w are 10≦x
A dielectric ceramic composition for microwave use, characterized in that ≦75, 0<y≦25, 15≦z≦75, and 5≦w≦40.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61125274A JPS62283862A (en) | 1986-05-29 | 1986-05-29 | Dielectric ceramic composition for microwave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61125274A JPS62283862A (en) | 1986-05-29 | 1986-05-29 | Dielectric ceramic composition for microwave |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62283862A JPS62283862A (en) | 1987-12-09 |
| JPH0256305B2 true JPH0256305B2 (en) | 1990-11-29 |
Family
ID=14906016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61125274A Granted JPS62283862A (en) | 1986-05-29 | 1986-05-29 | Dielectric ceramic composition for microwave |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62283862A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6306594B1 (en) | 1988-11-14 | 2001-10-23 | I-Stat Corporation | Methods for microdispensing patterened layers |
| US5200051A (en) * | 1988-11-14 | 1993-04-06 | I-Stat Corporation | Wholly microfabricated biosensors and process for the manufacture and use thereof |
| DE4115949A1 (en) * | 1991-05-16 | 1992-11-19 | Philips Patentverwaltung | PYROELECTRIC CERAMIC MATERIAL AND ITS USE |
-
1986
- 1986-05-29 JP JP61125274A patent/JPS62283862A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62283862A (en) | 1987-12-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |