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JPH0233934B2 - KUTAINETSUBAIFUKUSHAREIBOSOCHI - Google Patents

KUTAINETSUBAIFUKUSHAREIBOSOCHI

Info

Publication number
JPH0233934B2
JPH0233934B2 JP19042586A JP19042586A JPH0233934B2 JP H0233934 B2 JPH0233934 B2 JP H0233934B2 JP 19042586 A JP19042586 A JP 19042586A JP 19042586 A JP19042586 A JP 19042586A JP H0233934 B2 JPH0233934 B2 JP H0233934B2
Authority
JP
Japan
Prior art keywords
air
heat
cooling
dehumidifier
aftercooler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19042586A
Other languages
Japanese (ja)
Other versions
JPS6349648A (en
Inventor
Seizo Hayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON SAAMARU KANPANII RIMITETSUDO JUGEN
TEETENSU JIMUSHO JUGEN
Original Assignee
NIPPON SAAMARU KANPANII RIMITETSUDO JUGEN
TEETENSU JIMUSHO JUGEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON SAAMARU KANPANII RIMITETSUDO JUGEN, TEETENSU JIMUSHO JUGEN filed Critical NIPPON SAAMARU KANPANII RIMITETSUDO JUGEN
Priority to JP19042586A priority Critical patent/JPH0233934B2/en
Publication of JPS6349648A publication Critical patent/JPS6349648A/en
Publication of JPH0233934B2 publication Critical patent/JPH0233934B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Central Air Conditioning (AREA)

Description

【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) この発明は、建物の冷房及び除湿の機能を有す
る躯体熱媒輻射冷房装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Field of Application) The present invention relates to a framework heat transfer medium radiation cooling device having functions of cooling and dehumidifying a building.

(従来の技術) 従来から建物の空気調和については多くの提案
がある。
(Prior Art) There have been many proposals regarding air conditioning in buildings.

しかし、これらの空気調和装置の多くは空気を
熱媒として冷却、加熱を行ない、室内を循環さ
せ、対流効果により空気調和を行なうため、空気
の比重差により、暖気が天井面に、冷気は床面に
溜る。夏、冬共に頭寒足熱の逆の状態が生じて人
体に悪い結果となつている。
However, many of these air conditioners use air as a heat medium to cool and heat, circulate the room, and achieve air conditioning through convection effects.Due to the difference in specific gravity of the air, warm air flows to the ceiling and cold air flows to the floor. Collects on the surface. In both summer and winter, the opposite situation of cold head and warm feet occurs, which has negative consequences for the human body.

空気熱媒の空調方式による室内の除湿方法は、
冷気を供給して室内の湿気を吸収させ、空調器に
戻して室内空気の水分を凝縮させる。そのために
は冷房熱源水の温度を8℃以下とし、室内へ13〜
15℃前後の多量の冷気を循環させることにより室
内は除湿されていた。
The indoor dehumidification method using air heating medium air conditioning method is as follows:
It supplies cold air to absorb indoor moisture, returns it to the air conditioner, and condenses the moisture in the indoor air. In order to do this, the temperature of the cooling heat source water should be kept below 8℃, and the temperature should be kept indoors.
The room was dehumidified by circulating large amounts of cold air around 15 degrees Celsius.

したがつて、室内環境は除湿効果を得るために
ややもすると過冷却ぎみとなり冷房病の発生につ
ながる。
Therefore, the indoor environment tends to become overcooled in order to obtain a dehumidifying effect, leading to the occurrence of air conditioning disease.

(発明が解決しようとする問題点) この発明は上記のような問題点すなわち空気調
和装置における暖気が上方に、冷気が下方に溜る
という状態及び除湿効果を得るための過冷却ぎみ
となる好ましくない状態を新たな提案により解決
しようとするものである。
(Problems to be Solved by the Invention) This invention solves the above-mentioned problems, namely, the undesirable situation in which warm air accumulates in the upper part and cold air accumulates in the lower part in an air conditioner, and the undesirable state of overcooling that occurs when obtaining a dehumidifying effect. This is an attempt to resolve the situation with a new proposal.

〔発明の構成〕[Structure of the invention]

(問題点を解決するための手段) この発明における新な提案は、建物の躯体であ
るコンクリートスラブやシンダーコンクリート部
分に樹脂系パイプなどの冷却コイルを埋設し、こ
の冷却コイルに冷水を循環せしめ、天井冷房吸・
放熱面を冷却し、室内及び人体からの発熱を吸熱
して室内を冷房する部分と室内からの潜熱を除去
する単独の除湿を行なう部分とからなる躯体熱媒
輻射冷房装置を提供するものである。
(Means for Solving Problems) A new proposal in this invention is to bury a cooling coil such as a resin pipe in the concrete slab or cinder concrete part of the building frame, and to circulate cold water through this cooling coil. Ceiling cooling suction
The present invention provides a building frame heat medium radiation cooling device comprising a part that cools the heat radiation surface and cools the room by absorbing heat generated from the room and the human body, and a part that performs independent dehumidification to remove latent heat from the room. .

さらに詳しくは、建物の躯体1に冷却コイル2
を埋設し、この冷却コイル2に冷水を循環せし
め、天井冷房吸・放熱面を冷却し、室内の熱環境
7に輻射冷房効果を与えるとともに室内の湿つた
空気を除湿器8を経由させて乾いた空気6を作成
せしめ、この空気6をアフタークーラー12によ
り室内への放熱を除去して室温以下にして送り出
すようにしてある躯体熱媒輻射冷房装置を提供す
ることにより良好な熱環境を保持するものであ
る。
In more detail, the cooling coil 2 is attached to the building frame 1.
is buried, and cold water is circulated through this cooling coil 2 to cool the ceiling cooling air intake/radiation surface, giving a radiant cooling effect to the indoor thermal environment 7, and drying the humid indoor air by passing it through the dehumidifier 8. A good thermal environment is maintained by providing a framework heat transfer radiation cooling device in which air 6 is created, and this air 6 is sent out at room temperature or below by removing heat radiation into the room by an aftercooler 12. It is something.

(作用) この発明は空気を直接の熱媒とはせず、建物の
構造体であるコンクリートスラブやシンダーコン
クリートの躯体を熱媒とすることにより冷房時の
吸・放熱体となるので、天井面が涼しいため頭寒
足熱の良好な熱環境をつくれる。また除湿器から
の室内への放熱を除去するためにアフタークーラ
ーを用いているので送り出される空気は放熱が除
去されて良好な室内環境を作り出す。
(Function) This invention does not use air as a direct heat medium, but instead uses the concrete slab or cinder concrete frame of the building structure as a heat medium, which acts as a heat absorber and radiator during cooling. Because it is cool, it creates a good thermal environment that keeps your head cold and your feet warm. Furthermore, since an aftercooler is used to remove the heat radiated into the room from the dehumidifier, the heat radiated from the air sent out is removed, creating a good indoor environment.

(実施例) つぎに本発明の実施例を図面に基いて説明す
る。
(Example) Next, an example of the present invention will be described based on the drawings.

1は建築物の躯体、2は冷却コイルで、この実
施例では躯体1はコンクリートスラブ又はシンダ
ーコンクリートからなり、冷却コイル2は樹脂系
架橋ポリエチレンパイプ、内径16m/m、外径20
m/mからなつている。冷却コイル2は躯体1に
埋設されて、冷水を循環せしめるようにしてあ
る。躯体2の下面3は冷房時の天井冷房吸・放熱
面であり、上面4は暖房時の床暖房放熱面であ
る。
Reference numeral 1 indicates the building frame, and 2 indicates a cooling coil. In this embodiment, the frame 1 is made of a concrete slab or cinder concrete, and the cooling coil 2 is a resin-based cross-linked polyethylene pipe, with an inner diameter of 16 m/m and an outer diameter of 20 m/m.
It consists of m/m. The cooling coil 2 is embedded in the frame 1 to circulate cold water. The lower surface 3 of the frame 2 is a ceiling cooling heat absorption/radiation surface during cooling, and the upper surface 4 is a floor heating heat radiation surface during heating.

8は室内に設置された電動式除湿器で、蒸発器
9、凝縮器10、圧縮器11を備えている。
8 is an electric dehumidifier installed indoors, and is equipped with an evaporator 9, a condenser 10, and a compressor 11.

12は除湿器8に新に取り付けたアフタークー
ラーで、従来の除湿器には全く含まれていない新
しい機能を有する。アフタークーラーの機能はつ
ぎのようになつている。除湿器が運転されると圧
縮器の圧縮熱が室内へ放熱される。したがつて、
室内は除湿器によつて温度は上昇する。天井冷房
中の室内に圧縮器からの放熱を除去する目的で圧
縮器のそばに冷却コイルを設ける。これがアフタ
ークーラーである。尚アフタークーラーの冷熱源
は天井の冷却コイルとアフタークーラーの冷却コ
イルを結んで天井の冷却コイルの還水を循環させ
て利用する。
12 is an aftercooler newly attached to the dehumidifier 8, and has a new function not included in conventional dehumidifiers. The functions of the aftercooler are as follows. When the dehumidifier is operated, the compression heat of the compressor is radiated into the room. Therefore,
The temperature inside the room increases due to the dehumidifier. A cooling coil is installed near the compressor in order to remove the heat radiated from the compressor in a room that is being ceiling-cooled. This is the aftercooler. The heat source for the aftercooler is used by connecting the ceiling cooling coil to the aftercooler cooling coil and circulating the return water from the ceiling cooling coil.

しかして室内を冷房するにはつぎのようにして
行う。
However, to cool the room, proceed as follows.

まず、躯体1に埋設された冷却コイル2に冷水
を循環させる。冷水が循環すると躯体1が冷却さ
れて室内及び人体からの発熱を天井冷房吸・放熱
面3が吸熱して室内を冷房するとともに冷気を放
熱する。
First, cold water is circulated through the cooling coil 2 embedded in the frame 1. When the cold water circulates, the frame 1 is cooled, and the ceiling cooling absorption/radiation surface 3 absorbs heat generated from the room and the human body, thereby cooling the room and radiating the cold air.

ついで室内からの潜熱を除去する除湿器8によ
る除湿を行なう。室内で発生した潜熱を含んだ湿
つた空気5は除湿器8の蒸発器9に入り、室内空
気が冷却され水分を凝縮し、ガス熱媒が凝縮され
るとともに圧縮器11により圧縮される。そし
て、圧縮器11の放熱部分に取り付けられたアフ
タークーラー12により圧縮器11からの放熱を
除去する。
Next, dehumidification is performed using a dehumidifier 8 that removes latent heat from the room. Humid air 5 containing latent heat generated indoors enters the evaporator 9 of the dehumidifier 8, the indoor air is cooled and moisture is condensed, and the gas heat medium is condensed and compressed by the compressor 11. Then, the heat radiated from the compressor 11 is removed by the aftercooler 12 attached to the heat radiating portion of the compressor 11.

これを具体的に説明するとつぎのようになる。 A concrete explanation of this is as follows.

まず、夏期の日中、たとえば午前9時より午後
5時までの除湿器8を運転せずに冷却コイル2に
18℃の冷水(ヒートポンプ熱源の場合13−A、井
戸水熱源の場合13、還水は20℃ぐらい…14、14−
A)を循環させると天井冷房吸・放熱面3は22℃
前後となり、天井面からの放熱された空気と除湿
器から送り出された乾いた空気の混合した室内空
気7は次第に26℃前後となるものの湿度はやがて
80%以上となり、遂には天井冷房吸・放熱面3に
水滴が付着して冷房は不可能となる。つぎにアフ
タークーラー12を使用せずに除湿器8のみを運
転すると室内空気7の湿度は蒸発器9の作動によ
り除湿器8より出てくる空気6の湿度が30%前後
の乾いた空気を送り出すため、室内空気7の湿度
はやがて60%以下となるが、温度の方は凝縮器1
0、圧縮器11の作動のため出てくる空気6の温
度が35℃以上となる。したがつて、室内空気7の
温度もやがて30℃前後となつて冷房効果は失われ
る。そこで、アフタークーラー12を運転させて
20℃程度の冷水を循環させると出てくる空気6の
湿度は40%程度となるが、温度は25℃程度となる
ため、室内空気7の室内環境は温度26℃前後、湿
度60%前後の快適な熱環境となる。
First, during the daytime in summer, for example, from 9 a.m. to 5 p.m., the dehumidifier 8 is not operated and the cooling coil 2 is turned on.
Cold water at 18℃ (13-A for heat pump heat source, 13 for well water heat source, return water is about 20℃...14, 14-
When A) is circulated, the temperature of the ceiling cooling absorption/radiation surface 3 is 22℃.
The indoor air 7, which is a mixture of heat radiated from the ceiling and dry air sent out from the dehumidifier, gradually becomes around 26℃, but the humidity eventually decreases.
When it reaches 80% or more, water droplets will eventually adhere to the ceiling cooling air absorption/radiation surface 3, making cooling impossible. Next, if only the dehumidifier 8 is operated without using the aftercooler 12, the humidity of the indoor air 7 will be reduced by the operation of the evaporator 9, and the air 6 coming out of the dehumidifier 8 will be dry air with a humidity of around 30%. As a result, the humidity of the indoor air 7 will eventually fall below 60%, but the temperature will change due to the condenser 1.
0. Due to the operation of the compressor 11, the temperature of the air 6 coming out becomes 35°C or higher. Therefore, the temperature of the indoor air 7 will eventually reach around 30°C, and the cooling effect will be lost. Therefore, I operated aftercooler 12.
When cold water of about 20°C is circulated, the humidity of the air 6 that comes out is about 40%, but the temperature is about 25°C, so the indoor environment of the indoor air 7 is around 26°C and 60% humidity. Creates a comfortable thermal environment.

従来の空気熱媒の空調方式(再熱器を具備して
いない一般的なもの)では室温を24℃以下に保つ
ても湿度を65%以下にすることは困難である。
With conventional air conditioning systems that use air as a heat medium (typical ones that do not have a reheater), it is difficult to keep the humidity below 65% even if the room temperature is kept below 24°C.

入梅時に外気の温度が22℃程度で湿度が90%以
上のような低温、高湿の環境でも、本発明によれ
ば冷却コイル2に冷水を循環させずに単に除湿器
8及びアフタークーラー12を運転するだけでも
室内空気は、室内熱発生にもよるが温度を26℃、
湿度を60%程度に保持することができる。
According to the present invention, even in a low-temperature, high-humidity environment where the outside air temperature is around 22°C and the humidity is over 90% during the season, the dehumidifier 8 and the aftercooler 12 can be simply operated without circulating cold water through the cooling coil 2. Just by driving, the temperature of the indoor air can reach 26℃, depending on indoor heat generation.
Humidity can be maintained at around 60%.

〔発明の効果〕〔Effect of the invention〕

本発明は上述のようにしてなるので、つぎの効
果を有する。
Since the present invention is constructed as described above, it has the following effects.

まず第一には建物の躯体であるコンクリートス
ラブが単に構造体、耐火、耐震、防音材等である
だけでなく、空気に代る熱媒として冬は床輻射暖
房の放熱材であり、夏は天井スラブが冷房の吸・
放熱材となるので、エアーダクトやフアンコイル
が不要となり、そのスペースが節約できる。吸・
放熱面に保温材を用いなくてもよいのでその効果
は格別である。また、外壁面、室側のペリメータ
ーゾーンに対する別個の空調器も不要となる。
First of all, concrete slabs, which are the building blocks of buildings, are not only structural, fireproof, earthquake-resistant, and soundproofing materials, but also act as a heat medium in place of air, serving as a heat dissipation material for floor radiant heating in the winter, and as a heat dissipation material in the summer. Ceiling slab absorbs cooling air.
Since it acts as a heat dissipation material, air ducts and fan coils are no longer required, saving space. Suction/
Since there is no need to use heat insulating material on the heat dissipation surface, the effect is exceptional. In addition, separate air conditioners for the outer wall surface and the perimeter zone on the room side become unnecessary.

第二には従来の空気熱媒の空調方式では建物及
び人体からの発熱(顕熱及び潜熱)のすべてを空
気熱媒で空調するが、本発明の躯体熱媒輻射冷房
では、建物及び人体の顕熱については躯体冷却で
行ない、潜熱については「アフタークーラー付き
除湿器」で行なう。このため、空気熱媒の空調の
ごとく比重差による冷気が床面に溜ることもな
く、また、外気が高湿度で低温の入梅時等は躯体
を冷却して冷房を行なわずに単にアフタークーラ
ー付き除湿器を運転するのみで快適な室内熱環境
を作ることが可能となり運転経費の節約ともな
る。
Second, in the conventional air heating medium air conditioning system, all of the heat generated from buildings and human bodies (sensible heat and latent heat) is air-conditioned using air heating medium, but with the framework heat medium radiant cooling of the present invention, all of the heat generated from buildings and human bodies is Sensible heat is handled by body cooling, and latent heat is handled by a dehumidifier with an aftercooler. For this reason, cold air does not accumulate on the floor due to the difference in specific gravity like in air conditioning using an air heat medium, and when the outside air is high humidity and low temperature, such as during the spring season, the aftercooler is simply installed without cooling the frame. It is possible to create a comfortable indoor thermal environment just by operating the dehumidifier, which also saves operating costs.

第三には空気熱媒ではないのでコールドドラフ
トが生じないので、老人、婦人、子供、病人等の
冷房弱者や長時間連続して空調を行う図書館等の
冷房には冷房病(冷気にあたると人体からの過度
の蒸発を防ぐため、肌の毛穴が収縮する。そのた
め体内の血圧が上昇し、高血圧その他の症状を呈
する)の発生を防ぐのに役立つ。
Third, since it is not an air heating medium, cold drafts do not occur, so it is useful for people who are vulnerable to air conditioning, such as the elderly, women, children, and the sick, as well as for libraries that use air conditioning continuously for long periods of time. To prevent excessive evaporation from water, the pores of the skin contract, which increases blood pressure in the body and helps prevent the development of high blood pressure and other symptoms.

本発明の「エクセルギー理論」に基く躯体熱媒
輻射冷房は、暖房時と同様に冷熱源の温度が従来
の空気熱媒における冷熱源6〜8℃から16〜18℃
へと10℃も上昇し、そのために井戸水の利用も可
能となり、また冷凍機を使用する場合でも所要電
力が冷凍効率の上昇により低下し、エントロピー
の増大を防ぐこととなつた。
In the framework heating medium radiant cooling based on the "exergy theory" of the present invention, the temperature of the cold source is 16 to 18 degrees Celsius, compared to the 6 to 8 degrees Celsius of the conventional air heating medium.
This has made it possible to use well water, and even when using refrigerators, the power required has decreased due to the increase in refrigeration efficiency, preventing entropy from increasing.

第四には小、中規模の建物で、もし16〜18℃の
井戸水が利用可能な場所では冷凍機が不要となり
アフタークーラー付き除湿器と井戸水で本発明シ
ステムの十分な冷熱源となる。大規模の建物でも
16〜18℃の冷熱源の採用により、冷凍機効率は上
昇し、従来の75%(水冷)、90%(空冷)の電力
消費量で運転できる。
Fourth, in small to medium-sized buildings, if well water at 16 to 18 degrees Celsius is available, a refrigerator will not be necessary, and a dehumidifier with an aftercooler and well water will be a sufficient cooling source for the system of the present invention. Even in large buildings
By adopting a cold heat source of 16 to 18 degrees Celsius, the efficiency of the refrigerator has increased, allowing it to operate at 75% (water cooling) and 90% (air cooling) of conventional power consumption.

ここでエクセルギー(EXERGY)とは、一言
でいえばエネルギーの量と質を表わす言葉で、た
とえば50℃の水1000リツトルと25℃の水2000リツ
トルでは同じエネルギー熱量である。50℃の方は
風呂にも床暖房にも使えるが、25℃の方は使えな
い。「質のちがい」を含めた考え方がエクセルギ
ー(有効エネルギー)である。また熱をいつぺん
に下げて使うのは損なやり方でエクセルギーでは
段階的に利用する。長さ、重さ、容量、時間など
の物理量では1+1=の加法が成り立つのに比べ
て温度に関する限り25+25=50にはならない。
Here, exergy (EXERGY) is a word that expresses the quantity and quality of energy.For example, 1000 liters of water at 50℃ and 2000 liters of water at 25℃ have the same amount of energy and heat. The temperature at 50℃ can be used for baths and floor heating, but the temperature at 25℃ cannot. Exergy (effective energy) is a concept that includes "differences in quality." Also, lowering the heat all at once is a wasteful method, so exergy uses it in stages. While the addition of 1+1 holds true for physical quantities such as length, weight, capacity, and time, as far as temperature is concerned, 25+25=50 does not hold.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の各部の配置概略図、第2図は
アフタークーラーの空気線図で冷却量を示す、第
3図は系統図である。 図面において、1は躯体、2は冷却コイル、3
は天井冷房吸・放熱面、8は電動式除湿器、9は
蒸発器、10は凝縮器、11は圧縮器、12はア
フタークーラーである。
Fig. 1 is a schematic diagram of the arrangement of various parts of the present invention, Fig. 2 is an air diagram of the aftercooler showing the amount of cooling, and Fig. 3 is a system diagram. In the drawings, 1 is the main body, 2 is the cooling coil, and 3 is the main body.
8 is an electric dehumidifier, 9 is an evaporator, 10 is a condenser, 11 is a compressor, and 12 is an aftercooler.

Claims (1)

【特許請求の範囲】[Claims] 1 建物の躯体に冷却コイルを埋設し、この冷却
コイルに冷水を循環せしめ、天井冷房吸・放熱面
を冷却し、室内の熱環境に輻射冷房効果を与える
とともに室内の湿つた空気を除湿器を経由させて
乾いた空気を作成せしめ、この空気をアフターク
ーラーにより、室内への放熱を除去して室温以下
にして送り出すことにより良好な熱環境を保持す
ることを特徴とする躯体熱媒輻射冷房装置。
1. A cooling coil is embedded in the building frame, and chilled water is circulated through this cooling coil to cool the ceiling cooling and heat-radiating surfaces, providing a radiant cooling effect to the indoor thermal environment, and using a dehumidifier to cool the indoor humid air. A building frame heat transfer radiation cooling system characterized by maintaining a good thermal environment by creating dry air through the air and sending this air to an aftercooler to remove heat radiated into the room and keep it below room temperature. .
JP19042586A 1986-08-15 1986-08-15 KUTAINETSUBAIFUKUSHAREIBOSOCHI Expired - Lifetime JPH0233934B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19042586A JPH0233934B2 (en) 1986-08-15 1986-08-15 KUTAINETSUBAIFUKUSHAREIBOSOCHI

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19042586A JPH0233934B2 (en) 1986-08-15 1986-08-15 KUTAINETSUBAIFUKUSHAREIBOSOCHI

Publications (2)

Publication Number Publication Date
JPS6349648A JPS6349648A (en) 1988-03-02
JPH0233934B2 true JPH0233934B2 (en) 1990-07-31

Family

ID=16257915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19042586A Expired - Lifetime JPH0233934B2 (en) 1986-08-15 1986-08-15 KUTAINETSUBAIFUKUSHAREIBOSOCHI

Country Status (1)

Country Link
JP (1) JPH0233934B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7238558B2 (en) 1993-06-30 2007-07-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same
US7622335B2 (en) 1992-12-04 2009-11-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a thin film transistor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7622335B2 (en) 1992-12-04 2009-11-24 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a thin film transistor device
US7238558B2 (en) 1993-06-30 2007-07-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating the same

Also Published As

Publication number Publication date
JPS6349648A (en) 1988-03-02

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