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JPH022005A - Ink jet head - Google Patents

Ink jet head

Info

Publication number
JPH022005A
JPH022005A JP14405288A JP14405288A JPH022005A JP H022005 A JPH022005 A JP H022005A JP 14405288 A JP14405288 A JP 14405288A JP 14405288 A JP14405288 A JP 14405288A JP H022005 A JPH022005 A JP H022005A
Authority
JP
Japan
Prior art keywords
vibrator
base layer
piezoelectric element
ink
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14405288A
Other languages
Japanese (ja)
Inventor
Yoshinori Miyazawa
芳典 宮澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP14405288A priority Critical patent/JPH022005A/en
Publication of JPH022005A publication Critical patent/JPH022005A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/1614Production of print heads with piezoelectric elements of cantilever type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To obtain an ink jet head having stable characteristics and high manufacturing yield by constituting a piezoelectric converter of a beam-shape vibrator which is constituted by laminating a control layer changing in length on a base layer to bond both of them at a plurality of places. CONSTITUTION:Each of piezoelectric converters 22 is constituted by a vibrator formed by bonding a piezoelectric element chip 42 constituting a shrinkage controllable control layer, wherein an electrode layer 41 is applied to the single surface of a piezoelectric element 40, to a base layer 43 at two points 44, 45 by laser beam welding and the vibrators are arranged so as to be opposed to the respective corresponding nozzles 27 in the vicinity of the leading end parts thereof through a fine gap (a). After ink is supplied to the region close to the nozzles from an ink reservoir 29 to fill the same, voltage is applied between the base layer 43 and the pattern electrode 41 of each vibrator. Whereupon the piezoelectric element chip 42 is contracted to generate warpage in the base layer and the leading end of each of the vibrators is displaced in the direction increasing the gap with the nozzle. When the application of voltage to the desired vibrator is stopped in this state, the piezoelectric element chip returns to the original state to emit the ink in the vicinity of the leading end of the vibrator from the nozzle 27.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はインク滴を飛翔させ記録紙等の媒体上にインク
像を形成するプリンタ等インクジェット方式の記録装置
に用いられるインクジェットヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an inkjet head used in an inkjet type recording apparatus such as a printer that flies ink droplets to form an ink image on a medium such as recording paper.

〔従来の技術〕[Conventional technology]

従来のインクジェットヘッドの構造としては複数のノズ
ル開口を有するノズル板とこの背後にインクと直接接触
する圧電変換器を有する構造が知られている。(特公昭
60−8953等)この構造ではインク滴吐出効率およ
び安定性が高くインク中に気泡、ゴミ等の異物が混入し
た場合でもこの影響を受けずに正常動作が可能であると
いう特徴を有する。振動子としては片持ち梁状振動子ま
たは両持ち梁状振動子が用いられている。さらに振動子
とノズル板との間の間隙はインク滴吐出特性に影響する
ため微小な間隙を保つように構成されている。
A known structure of a conventional inkjet head includes a nozzle plate having a plurality of nozzle openings and a piezoelectric transducer behind the nozzle plate that is in direct contact with ink. (Japanese Patent Publication No. 60-8953, etc.) This structure has high ink droplet ejection efficiency and stability, and even if foreign matter such as air bubbles or dust gets mixed into the ink, normal operation is possible without being affected by this. . As the vibrator, a cantilever beam vibrator or a double beam vibrator is used. Further, since the gap between the vibrator and the nozzle plate affects the ink droplet ejection characteristics, the structure is such that a minute gap is maintained.

梁状振動子は金属層と圧電材層とを全面接合した二層構
造(バイモルフ構造)の圧電変換器によって構成されて
いる。
The beam-shaped vibrator is constituted by a piezoelectric transducer having a two-layer structure (bimorph structure) in which a metal layer and a piezoelectric material layer are bonded over the entire surface.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記従来技術のインクジェットヘッドの構造では場合金
属層と圧電材層の接合工程における条件のバラツキ等で
振動子に反りが発生し振動子とノズル形成部材との間の
空隙の寸法がばらつき特性が安定せずさらに製造の歩留
まりが低いという問題点を有していた。特に片持ち梁状
振動子の場合上記空隙寸法管理が困難であった。
In the structure of the conventional inkjet head described above, the vibrator may warp due to variations in conditions during the bonding process between the metal layer and the piezoelectric material layer, and the dimensions of the gap between the vibrator and the nozzle forming member may vary, resulting in stable characteristics. Furthermore, the manufacturing yield was low. Particularly in the case of a cantilever-like vibrator, it is difficult to manage the above-mentioned gap size.

本発明の目的はこれらの問題点を解決して梁状振動子を
用いたインクジェットヘッドにおいて、特性の安定した
製造歩留まりの高いインクジェットヘッドを実現するこ
とにある。
An object of the present invention is to solve these problems and realize an inkjet head using a beam-shaped vibrator with stable characteristics and high manufacturing yield.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のインクジェットヘッドは複数のノズル開口を有
するノズル形成部材と、圧電変換器を有し、 前記ノズル形成部材と前記圧電変換器の間にインクが充
たされたインクジェットヘッドにおいて、上記圧電変換
器は梁状振動子からなり該梁状振動子は基層上に長さが
変化する制御層を積層して複数個所で両者を接合して構
成されることを特徴とする。
An inkjet head of the present invention includes a nozzle forming member having a plurality of nozzle openings and a piezoelectric transducer, and in the inkjet head in which ink is filled between the nozzle forming member and the piezoelectric transducer, the piezoelectric transducer is a beam-shaped vibrator, and the beam-shaped vibrator is characterized by being constructed by laminating a control layer of varying length on a base layer and joining the two at a plurality of locations.

〔作用〕[Effect]

本発明の上記構成では振動子の基層の剛性のため反りが
生じにくくまた制御層を少なくとも2点で接合するため
制御層が予め有する反りの影響を受けず振動子先端空隙
を高精度に確保できる。
In the above configuration of the present invention, warping is less likely to occur due to the rigidity of the base layer of the vibrator, and since the control layer is joined at at least two points, the cavity at the tip of the vibrator can be secured with high precision without being affected by the warpage that the control layer has in advance. .

〔実施例〕〔Example〕

次に実施例に基づいて本発明を説明する。第1図は本発
明の一実施例を示すプ1ノン夕の斜視図である。同図に
おいて記録紙10はプラテン11に捲き回され送りロー
ラ軸12,13によって駆動される。ガイド軸14.1
7に案内されプラテン軸に平行な方向に移動可能なキャ
リッジ15上にインクジェットヘッド16が搭載されて
構成される。インクジェットベツド16は独立にインク
滴を吐出制御可能な複数のノズルを有しプラテン軸方向
に走査され上記ノズルから選択的にインク滴を吐出し記
録紙10上にインク像を形成する。記録紙10はプラテ
ン11、送りローラの回転により走査方向と直交する副
走査方向に搬送され記録紙面上への印字が行われる。
Next, the present invention will be explained based on examples. FIG. 1 is a perspective view of a printer showing an embodiment of the present invention. In the figure, recording paper 10 is wound around a platen 11 and driven by feed roller shafts 12 and 13. Guide shaft 14.1
The inkjet head 16 is mounted on a carriage 15 that is guided by a carriage 7 and movable in a direction parallel to the platen axis. The inkjet bed 16 has a plurality of nozzles that can independently control the ejection of ink droplets, and is scanned in the platen axis direction to selectively eject ink droplets from the nozzles to form an ink image on the recording paper 10. The recording paper 10 is conveyed in a sub-scanning direction perpendicular to the scanning direction by rotation of a platen 11 and a feed roller, and printing is performed on the surface of the recording paper.

第2図にインクジェットヘッドの断面図を示す。FIG. 2 shows a cross-sectional view of the inkjet head.

フレーム21に圧電変換器22がノズル板23と弾性シ
ート24を介して積層され固定ねじ25.26を用いて
固定される。ノズル板23は複数のノズル27を有する
金属薄板から構成される。第3図に圧電変換器22の斜
視図を示す。PZTよりなる圧電素子40の片面にAu
薄層よりなる電極層41を施した収縮制御可能な制御層
を構成する圧電素子チップ42をNi板よりなる基層4
3に2点44.45で光ビーム爆接によって接合して振
動子が構成される。基層43は切り込みによって複数の
櫛歯状の分枝が形成されそれぞれ圧電素子チップを接合
して多数個の振動子を有する圧電変換器22が構成され
る。電極層41はボンディングにより基板46上の対応
するパターンに結線される。一方基層43は一体金属板
で導電性であるため各振動子について共通の電位に保た
れる如く結線される。これらはスペーサ47を介してノ
ズル板に対向して取付けられる。再び第2図において圧
電変換器は振動子先端部近傍が微小な空隙aを介してそ
れぞれに対応するノズル27が対向するごとく配置され
る。パターンには個別に配線28が接続され選択的電圧
印加が行われる。
A piezoelectric transducer 22 is laminated on a frame 21 via a nozzle plate 23 and an elastic sheet 24, and fixed using fixing screws 25 and 26. The nozzle plate 23 is composed of a thin metal plate having a plurality of nozzles 27. FIG. 3 shows a perspective view of the piezoelectric transducer 22. Au on one side of the piezoelectric element 40 made of PZT.
A piezoelectric element chip 42 constituting a control layer capable of controlling shrinkage on which an electrode layer 41 made of a thin layer is applied is attached to a base layer 4 made of a Ni plate.
3 and two points 44.45 by optical beam blast contact to form a vibrator. The base layer 43 is cut into a plurality of comb-like branches, and piezoelectric element chips are joined to each branch to form a piezoelectric transducer 22 having a large number of vibrators. The electrode layer 41 is connected to a corresponding pattern on the substrate 46 by bonding. On the other hand, since the base layer 43 is an integral metal plate and is conductive, it is wired to maintain a common potential for each vibrator. These are mounted opposite to the nozzle plate via spacers 47. Again in FIG. 2, the piezoelectric transducers are arranged so that the corresponding nozzles 27 face each other with a small gap a in the vicinity of the tip of the vibrator. Wiring lines 28 are individually connected to the patterns, and selective voltage application is performed.

次に動作について説明する。インクリザーバ29からイ
ンク(図示せず)がノズル近傍に供給され充たされる。
Next, the operation will be explained. Ink (not shown) is supplied from the ink reservoir 29 to the vicinity of the nozzle to fill it.

基層43とパターン電極41の間に電圧を印加すること
により圧電効果により圧電素子チップ42は収縮する。
By applying a voltage between the base layer 43 and the patterned electrode 41, the piezoelectric element chip 42 contracts due to the piezoelectric effect.

基層43は元寸法を維持するため基礎層に反りを生じノ
ズルとの空隙を増加する方向に先端が変位する。この状
態で所望の振動子の電圧印加を停止することによって振
動子は基層の弾性によって元の状態に復帰する。
In order to maintain the original dimensions of the base layer 43, the base layer is warped and the tip thereof is displaced in a direction that increases the gap with the nozzle. By stopping the voltage application to the desired vibrator in this state, the vibrator returns to its original state due to the elasticity of the base layer.

この結果振動子先端近傍のインクをノズル23から吐出
させる。
As a result, ink near the tip of the vibrator is ejected from the nozzle 23.

次に別の実施例を第4図に示す。本実施例では先の実施
例と同様Niよりなる基層53に形成される分枝51に
2点54.55で圧電素子チップ52を接合して振動子
が構成される。分枝の接合点54.55の周囲が開口し
ている点が先の例と異なる。振動子の屈曲状態を第5図
に示すように基層が開口で分離された部分で曲がるため
圧電素子チップに曲げ変形を生じることがない。圧電素
子は一般に脆いため上記構造によって変形による応力を
低減し耐久性の向上が図れる。また本実施例では点56
でノズルとの対向位置を示すように2方向から分枝し延
びるように構成されているため機械特性確保に必要な幅
を保ちながら高密度にノズルを形成し振動子を実装でき
る。
Next, another embodiment is shown in FIG. In this embodiment, a vibrator is constructed by bonding piezoelectric element chips 52 at two points 54 and 55 to branches 51 formed on a base layer 53 made of Ni, as in the previous embodiment. This example differs from the previous example in that the area around the junction points 54 and 55 of the branches is open. As the bent state of the vibrator is shown in FIG. 5, since the base layer is bent at the portion separated by the opening, no bending deformation occurs in the piezoelectric element chip. Since piezoelectric elements are generally fragile, the above structure reduces stress caused by deformation and improves durability. Also, in this example, point 56
Since it is configured to branch and extend from two directions so as to indicate the position facing the nozzle, it is possible to form nozzles at high density and mount the vibrator while maintaining the width necessary to ensure mechanical properties.

第3の実施例を第6図に示す。図は振動子の動作状態を
示す。本実施例の振動子は圧電素子チップ62が二点で
接合された基N61が両端支持され最大振幅点に対向し
てノズルが配される。本構造では振動子の一端がストッ
パー63で位置決めされるため先の実施例の場合よりノ
ズルとの空隙が高精度に確保できる。
A third embodiment is shown in FIG. The figure shows the operating state of the vibrator. In the vibrator of this embodiment, a base N61 in which piezoelectric element chips 62 are joined at two points is supported at both ends, and a nozzle is arranged opposite the maximum amplitude point. In this structure, one end of the vibrator is positioned by the stopper 63, so that a gap with the nozzle can be secured with higher precision than in the previous embodiment.

なお上記実施例では圧電素子チップの基層への接合は二
点を溶接によって行っているがリベット状のピンを用い
て接合することもできる。
In the above embodiment, the piezoelectric element chip is joined to the base layer at two points by welding, but the piezoelectric element chip can also be joined using rivet-like pins.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明の上記構成によれば従来構造の
ようにバイモルフ型の圧電変換素子を用いないため異種
層の全面接合の工程に依存する曲がりが生じにくい。さ
らに2点で基層と接合されるため予め変形している圧電
素子チップでも基層に曲がりを生じさせることなく固定
することができる。従って基層に反りを生ずることがな
いためノズル板との間の空隙を高精度に保つことができ
特性の安定し、製造歩留まりの高いインクジェットヘッ
ドを実現することができる。さらに従来の構造では圧電
素子が脆いため加工方法に制限があり振動子の形状は比
較的簡単な形状以外製造上不可能であったが本発明の構
造では基層は金属板であるためプレス加工、エツチング
加工等によって複雑な形状でも構成することができるた
め振動子をインク吐出特性確保、高密度実装等の点から
最適形状とすることができ高性能のインクジェットヘッ
ドが実現できるという効果も有する。さらに圧電素子が
小さい寸法であるため加工法の制約が小さいため低価格
で製造できる等の利点も有する。
As described above, according to the above structure of the present invention, unlike the conventional structure, a bimorph type piezoelectric transducer is not used, so that bending due to the process of bonding different layers across the entire surface is less likely to occur. Furthermore, since the piezoelectric element chip is joined to the base layer at two points, even a piezoelectric element chip that has been deformed in advance can be fixed without causing any bending in the base layer. Therefore, since the base layer does not warp, the gap between the nozzle plate and the nozzle plate can be maintained with high accuracy, and an inkjet head with stable characteristics and high manufacturing yield can be realized. Furthermore, in the conventional structure, the piezoelectric element is fragile, so there are restrictions on processing methods, and it was impossible to manufacture the vibrator in any shape other than a relatively simple shape.However, in the structure of the present invention, since the base layer is a metal plate, press processing, Since even complicated shapes can be formed by etching, etc., the vibrator can be made into an optimal shape from the viewpoint of ensuring ink ejection characteristics, high-density packaging, etc., and has the effect of realizing a high-performance inkjet head. Furthermore, since the piezoelectric element is small in size, there are fewer restrictions on processing methods, so it has the advantage that it can be manufactured at a low cost.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による一実施例を示すインクジェットヘ
ッドを具備したプリンタの斜視図。 第2図は本発明による一実施例を示すインクジェットヘ
ッドの断面図。 第3図は本発明による一実施例を示すインクジェットヘ
ッドの圧電変換器の斜視図。 第4図は本発明による別の実施例を示すインクジェット
ヘッドの圧電変換器の斜視図。 第5図は本発明の圧電変換器の動作状態を示す図。 第6図は本発明の別の実施例の圧電変換器の動作状態を
示す図。 16 インクジェットヘッド 23 ノズル板 27 ノズル 40 圧電素子 42.52.62  圧電素子チップ 22  振動子 4353.61  基層 4445.54.55  接合部 以上 10、°詠識媒久 16、′インク5;71−ヘッに゛ 第1図 40ル覧當チ 41ノぐフーン電柚 42圧電集チナワプ 43暮層
FIG. 1 is a perspective view of a printer equipped with an inkjet head showing one embodiment of the present invention. FIG. 2 is a sectional view of an inkjet head showing an embodiment of the present invention. FIG. 3 is a perspective view of a piezoelectric transducer of an inkjet head showing one embodiment of the present invention. FIG. 4 is a perspective view of a piezoelectric transducer of an inkjet head showing another embodiment of the present invention. FIG. 5 is a diagram showing the operating state of the piezoelectric transducer of the present invention. FIG. 6 is a diagram showing the operating state of a piezoelectric transducer according to another embodiment of the present invention. 16 Inkjet head 23 Nozzle plate 27 Nozzle 40 Piezoelectric element 42.52.62 Piezoelectric element chip 22 Vibrator 4353.61 Base layer 4445.54.55 Above the joint 10, 16, 'ink 5; 71-head Figure 1: 40 pages: 41: piezoelectric collection: 42: piezoelectric collection: 43:

Claims (1)

【特許請求の範囲】 少なくとも1つ以上のノズル開口を有するノズル形成部
材と、前記ノズル開口に対向して配置され独立に駆動可
能な圧電変換器を有し、前記ノズル形成部材と前記圧電
変換器の間にインクが充たされたインクジェットヘッド
において、 前記圧電変換器は梁状振動子からなり、該振動子は基層
上に収縮制御可能な制御層を積層し複数個所で両者を接
合し構成されることを特徴とするインクジェットヘッド
Scope of Claims: A nozzle forming member having at least one or more nozzle openings, and a piezoelectric transducer arranged opposite to the nozzle opening and capable of being driven independently, the nozzle forming member and the piezoelectric transducer In the inkjet head, the piezoelectric transducer is composed of a beam-like vibrator, and the vibrator is constructed by laminating a control layer capable of controlling contraction on a base layer and bonding the two at a plurality of points. An inkjet head characterized by:
JP14405288A 1988-06-10 1988-06-10 Ink jet head Pending JPH022005A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14405288A JPH022005A (en) 1988-06-10 1988-06-10 Ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14405288A JPH022005A (en) 1988-06-10 1988-06-10 Ink jet head

Publications (1)

Publication Number Publication Date
JPH022005A true JPH022005A (en) 1990-01-08

Family

ID=15353196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14405288A Pending JPH022005A (en) 1988-06-10 1988-06-10 Ink jet head

Country Status (1)

Country Link
JP (1) JPH022005A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102407664A (en) * 2010-09-20 2012-04-11 研能科技股份有限公司 Fabrication method of cantilever piezoelectric head structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102407664A (en) * 2010-09-20 2012-04-11 研能科技股份有限公司 Fabrication method of cantilever piezoelectric head structure

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