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JPH02166270A - Surface treatment for blade - Google Patents

Surface treatment for blade

Info

Publication number
JPH02166270A
JPH02166270A JP32084088A JP32084088A JPH02166270A JP H02166270 A JPH02166270 A JP H02166270A JP 32084088 A JP32084088 A JP 32084088A JP 32084088 A JP32084088 A JP 32084088A JP H02166270 A JPH02166270 A JP H02166270A
Authority
JP
Japan
Prior art keywords
blade
film
ion
ion beam
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32084088A
Other languages
Japanese (ja)
Other versions
JPH0759744B2 (en
Inventor
Keimei Kitamura
啓明 北村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP63320840A priority Critical patent/JPH0759744B2/en
Publication of JPH02166270A publication Critical patent/JPH02166270A/en
Publication of JPH0759744B2 publication Critical patent/JPH0759744B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To form a homogeneous hard film excellent in corrosion resistance by irradiating a blade with the ion beams of hydrocarbon and nitrogen gases, simultaneously subjecting titanium to electron beam evaporation, and controlling ion beam density. CONSTITUTION:A blade 9 is set up in the prescribed position in a vacuum chamber 10. The ion beams of hydrocarbon gas and nitrogen gas irradiate the surface of the blade 9 by actuating ion guns 5, 6. Simultaneously, Ti is subjected to electron beam evaporation from an evaporation source 4. By the above procedure, both ions mentioned above are allowed to react with Ti on the surface of the blade 9, by which a TiCN film is formed. At this time, ion beam density in the surface position of the blade 9 is regulated to about 10-500muA/cm<3> and Ti-forming velocity is controlled to about 1-20Angstrom /s via a crystal sensor 11 by means of a film forming velocity control section 13. By this method, the TiCN film having the prescribed film composition structure can be obtained with superior reproducibility.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は刃の表面処理方法、特に電気カミソリ等の刃の
表面に硬質被膜を形成する場合の表面処理方法に関する
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a method for surface treatment of a blade, and particularly to a surface treatment method for forming a hard coating on the surface of a blade of an electric razor or the like.

(従来の技術) 真空中において母材の表面に金属あるいはセラミックス
等の被膜を形成する手段として、例えば物理蒸着法(以
下rPVD法Jという)が知られている。とりわけ、母
材の表面に金属の炭化物や窒化物の膜を形成するPVD
法として、イオンブレーティング・スパッタリングが一
般的である。
(Prior Art) For example, a physical vapor deposition method (hereinafter referred to as rPVD method J) is known as a means for forming a film of metal, ceramic, or the like on the surface of a base material in a vacuum. In particular, PVD forms a film of metal carbide or nitride on the surface of the base material.
Ion blasting and sputtering are common methods.

従来、このようなPV、D法により母材の表面にTiC
N膜を形成する場合、例えば特開昭60−92465号
公報に記載されているように、メタン等の炭化水素ガス
及び窒素ガスを槽内に導入させたプラズマ雰囲気中にて
チタンを蒸着あるいはスパッタリングを行うことにより
被膜が形成されていた。
Conventionally, TiC was deposited on the surface of the base material using such PV and D methods.
When forming the N film, titanium is deposited or sputtered in a plasma atmosphere in which a hydrocarbon gas such as methane and nitrogen gas are introduced into a tank, for example, as described in JP-A No. 60-92465. A film was formed by doing this.

(発明が解決しようとする課題) しかしながら、前述した従来の方法によって母材の表面
にTjCN膜を形成する場合、工業レベルにて膜組成や
膜構造を制御するのは必ずしも容易なことではなく、こ
のため品質にバラツキが生しるという問題があった。
(Problems to be Solved by the Invention) However, when forming a TjCN film on the surface of a base material using the conventional method described above, it is not necessarily easy to control the film composition and film structure at an industrial level. For this reason, there was a problem of variations in quality.

また、従来の方法をカミソリ刃等に応用した場合、その
耐食性が問題となる場合があり、水分や塩分等の存在す
る腐食雰囲気下にて長時間使用するとサビが発生し易い
という問題があった。
In addition, when conventional methods are applied to razor blades, etc., their corrosion resistance may become a problem, and rust is likely to occur if used for a long time in a corrosive atmosphere containing moisture, salt, etc. .

これは、通常のPVD法により被膜を形成した場合、第
2図に示されるように、刃lの表面に形成されたTiC
N膜2の内部にはボイドやピンホール等が多数発生し、
これらの欠陥が核となって腐食反応が促進されサビ3が
発生するためと考えられている。
When a film is formed by the normal PVD method, the TiC formed on the surface of the blade l is as shown in Fig. 2.
Many voids, pinholes, etc. occur inside the N film 2,
It is thought that these defects act as cores that accelerate corrosion reactions and generate rust 3.

従って、従来の手段によりTiCN膜処理を行ったカミ
ソリ刃等が使用されるときは、人間の体質や雰囲気によ
って問題が発生する場合もあり、これを解決する必要が
あった。
Therefore, when a razor blade or the like treated with a TiCN film by conventional means is used, problems may occur depending on the human constitution and atmosphere, and it is necessary to solve these problems.

この発明は斯る課題を解決するためになされたもので、
その目的とするところは、母材となる刃の表面に耐食性
に優れたTiCN膜を形成することのできる刃の表面処
理方法を提供することにある。
This invention was made to solve this problem.
The purpose is to provide a method for surface treatment of a blade that can form a TiCN film with excellent corrosion resistance on the surface of the blade, which is a base material.

(課題を解決するための手段) 前記目的を達成するために、本発明方法においては、表
面に被膜を形成すべき刃を真空槽内に配置し、この刃に
対し炭化水素ガスおよび窒素ガスのイオンビームをそれ
ぞれ照射すると共に、このイオンビーム照射と同時に蒸
発源からチタンを電子ビーム蒸発させ、チタンの形成速
度に対する各イオンビーム密度を制御しながら刃の表面
QこTiCN膜を形成するようにしたことを特徴とする
(Means for Solving the Problems) In order to achieve the above object, in the method of the present invention, a blade on which a film is to be formed is placed in a vacuum chamber, and a hydrocarbon gas and nitrogen gas are supplied to the blade. At the same time as each ion beam was irradiated, titanium was evaporated from an evaporation source with an electron beam at the same time as the ion beam irradiation, and a TiCN film was formed on the surface of the blade while controlling the ion beam density with respect to the titanium formation rate. It is characterized by

(作用) 前記構成により、本発明方法は、いわゆるイオンビーム
アシスト蒸着手段により刃の表面にTiCN膜を形成す
るものであるが、チタンの形成速度に対して炭化水素ガ
スと窒素ガスのイオンビーム密度とを制御することによ
り、所定の膜組成構造を備えた被膜を得ることができる
(Function) With the above configuration, the method of the present invention forms a TiCN film on the surface of the blade by so-called ion beam assisted vapor deposition, but the ion beam density of hydrocarbon gas and nitrogen gas is lower than the formation rate of titanium. By controlling this, a film having a predetermined film composition structure can be obtained.

このとき、前記炭化水素ガスと窒素ガスとのイオンビー
ム比を制御することで、工業レベルにて膜組成や膜構造
を容易に制御することができ、このため、耐食性に優れ
、かつバラツキの少ない均質なTiCN膜を形成するこ
とが可能となる。
At this time, by controlling the ion beam ratio of the hydrocarbon gas and nitrogen gas, the film composition and film structure can be easily controlled at an industrial level, resulting in excellent corrosion resistance and less variation. It becomes possible to form a homogeneous TiCN film.

(実施例) 以下、図面に基づき本発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail based on the drawings.

第1図は本発明方法を使用するための装置の概略構成が
示されている。
FIG. 1 shows a schematic configuration of an apparatus for using the method of the present invention.

ここで本発明の特徴的なことは、表面に被膜を形成すべ
き刃を真空槽内に配置し、この刃に対し炭化水素ガスお
よび窒素ガスのイオンビームをそれぞれ照射すると共に
、このイオンビーム照射と同時に蒸発源からチタンを電
子ビーム蒸発させ、チタンの形成速度に対する各イオン
ビーム密度を制御しながら刃の表面にTiCN膜を形成
するようにしたことである。
Here, the characteristic feature of the present invention is that the blade on which a film is to be formed is placed in a vacuum chamber, and the blade is irradiated with ion beams of hydrocarbon gas and nitrogen gas, respectively, and the ion beam irradiation is performed on the blade. At the same time, titanium was evaporated with an electron beam from an evaporation source, and a TiCN film was formed on the surface of the blade while controlling the density of each ion beam with respect to the rate of formation of titanium.

すなわち、本発明はイオンビームアシスト蒸着手段によ
り刃の表面処理を行うものであり、本実施例において、
表面に被膜を形成すべき刃9が真空チャンバ10内の上
方に配置されている。また、この真空チャンバ10内の
下方には、電子ビーム等の蒸発源4およびその周囲に2
台のイオン銃56が設けられている。
That is, the present invention performs the surface treatment of the blade by ion beam assisted vapor deposition means, and in this example,
A blade 9 whose surface is to be coated is placed above the vacuum chamber 10 . Further, in the lower part of the vacuum chamber 10, there is an evaporation source 4 such as an electron beam, and two evaporation sources around it.
A base ion gun 56 is provided.

これらのイオン銃5,6のうち、一方のイオン銃5は窒
素ガスボンへ7に接続され、他方のイオン銃6はメタン
やアセチレン等の炭化水素ガスポンへ8に接続されてい
る。
Of these ion guns 5 and 6, one ion gun 5 is connected to a nitrogen gas bomb 7, and the other ion gun 6 is connected to a hydrocarbon gas pump 8 such as methane or acetylene.

更に、前記刃9の近傍かつ側方でイオンビームの照射さ
れない領域には、チタン(Ti)の形成速度を検出する
ための水晶センサIfが設けられており、この水晶セン
サ11の前面には、検出精度を向上させるための中空円
筒状のカバー12が設けられている。
Furthermore, a crystal sensor If for detecting the formation rate of titanium (Ti) is provided in a region near and to the side of the blade 9 that is not irradiated with the ion beam. A hollow cylindrical cover 12 is provided to improve detection accuracy.

前記電子ビーム蒸発源4および膜の形成速度を検出する
ための水晶センサ11は、膜形成速度制御部13に接続
されている。
The electron beam evaporation source 4 and a crystal sensor 11 for detecting the film formation speed are connected to a film formation speed control section 13.

次に本実施例の作用を説明する。まず、真空チャンバI
O内の上方の所定位置に刃9が設定された後、チャンバ
10内が2 Xl0−’Pa以下に真空排気され、続い
て1台又は2台のイオン銃5.6が動作されてクリーニ
ングが行われる。このとき、アルゴン又は窒素等のイオ
ンビームが刃9の表面に照射され、加速電圧として50
0〜2000 V、かつ2〜数10 lIA/cm”程
度のイオンビームが数分間照射される。
Next, the operation of this embodiment will be explained. First, vacuum chamber I
After the blade 9 is set at a predetermined position above the chamber 10, the inside of the chamber 10 is evacuated to 2 Xl0-'Pa or less, and then one or two ion guns 5.6 are operated to perform cleaning. It will be done. At this time, an ion beam of argon or nitrogen or the like is irradiated onto the surface of the blade 9, and the acceleration voltage is 50
An ion beam of 0 to 2000 V and about 2 to several tens of lIA/cm" is irradiated for several minutes.

このようにしてクリーニング作業が行われた後、2台の
イオン銃5.6が動作され、炭化水素ガス及び窒素ガス
のイオンビームがそれぞれ刃9の表面に向は照射される
。また、これらのイオンビーム照射と同時に、蒸発源4
からチタン(Ti)が刃9の表面に向は電子ビーム蒸発
される。この結果、炭化水素イオン、窒素イオン、チタ
ンが刃9の表面にて反応しTiCN膜が形成される。
After the cleaning work is performed in this manner, the two ion guns 5.6 are operated, and the surface of the blade 9 is irradiated with ion beams of hydrocarbon gas and nitrogen gas, respectively. Also, at the same time as these ion beam irradiations, the evaporation source 4
Then, titanium (Ti) is evaporated onto the surface of the blade 9 using an electron beam. As a result, hydrocarbon ions, nitrogen ions, and titanium react on the surface of the blade 9 to form a TiCN film.

本実施例において、刃9の表面位置における炭化水素及
び窒素イオンビーム密度は10〜500μA/cm2の
範囲で行われ、又チタン(Ti)の形成速度は、水晶セ
ンサ11を介して膜形成速度制御部13により1〜20
人/Sの範囲で制御される。この場合、所定のチタン形
成速度に対して、窒素イオンビーム密度が増加すると赤
味がかった膜が形成され、反対に、炭化水素ガスイオン
ビーム密度が増加すると黒味がかった膜が形成されるこ
とが判明した。
In this example, the hydrocarbon and nitrogen ion beam density at the surface position of the blade 9 is carried out in the range of 10 to 500 μA/cm2, and the film formation rate is controlled via the quartz sensor 11. 1-20 by part 13
Controlled within the range of person/S. In this case, for a given titanium formation rate, an increase in the nitrogen ion beam density results in the formation of a reddish film, and conversely, an increase in the hydrocarbon gas ion beam density results in the formation of a blackish film. There was found.

このように、チタン(Ti)の形成速度に対する炭化水
素ガスと窒素ガスとのイオンビーム比を制御することで
、所定の膜組成構造を備えたTiCN膜が再現性良く得
られた。
In this way, by controlling the ion beam ratio of hydrocarbon gas and nitrogen gas to the formation rate of titanium (Ti), a TiCN film having a predetermined film composition structure was obtained with good reproducibility.

以上の条件にてTiCN膜をカミソリ刃の表面に形成さ
せたところ、ビッカース硬度1500〜3000HV程
度の高硬度膜が得られ、刃の寿命改善を図ることができ
た。又、膜の色が黒色〜赤紫色〜銅色〜金色の領域にお
ける色調の制御も容易に行うことができた。更に、刃の
表面に形成されたTiCN膜の耐食性を塩水噴霧テスト
によって評価したところ、下表−1で明らかなように、
従来のイオンブレーティングあるいはスパッタリングに
よる膜サンプルによれば、2〜3サイクル終了後に多量
のサビが発生したのに対し、本実施例のイオンビームア
シスト蒸着手段によれば、膜サンプルにはサビがほとん
ど発生しないことが確認された。
When a TiCN film was formed on the surface of a razor blade under the above conditions, a highly hard film with a Vickers hardness of about 1,500 to 3,000 HV was obtained, and the life of the blade could be improved. Furthermore, the color tone of the film could be easily controlled in the range of black to reddish purple to coppery to gold. Furthermore, the corrosion resistance of the TiCN film formed on the surface of the blade was evaluated by a salt spray test, as shown in Table 1 below.
According to the film sample obtained by conventional ion blasting or sputtering, a large amount of rust occurred after 2 to 3 cycles, but according to the ion beam assisted vapor deposition method of this embodiment, there was almost no rust on the film sample. It has been confirmed that this does not occur.

(発明の効果) 以上説明した通り、本発明は、表面に被膜を形成すべき
刃を真空槽内に配置し、この刃に対し炭化水素ガスおよ
び窒素ガスのイオンビームをそれぞれ照射すると共に、
このイオンビーム照射と同時に蒸発源からチタンを電子
ビーム蒸発させ、チタンの形成速度に対する各イオンビ
ーム密度を制御しながら刃の表面にTiCN膜を形成す
るようにしたことにより、耐食性に優れた硬質被膜を形
成することができる。
(Effects of the Invention) As explained above, in the present invention, a blade on which a film is to be formed is placed in a vacuum chamber, the blade is irradiated with ion beams of hydrocarbon gas and nitrogen gas, and
At the same time as this ion beam irradiation, titanium is evaporated with an electron beam from an evaporation source, and a TiCN film is formed on the surface of the blade while controlling the ion beam density with respect to the titanium formation rate, resulting in a hard coating with excellent corrosion resistance. can be formed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明方法を使用するための装置の概略構成を
示す図、第2図は従来の方法により刃の表面に被膜を形
成した場合の拡大断面図である。 4・・・電子ビーム蒸発源 5.6・イオン銃9 ・・
刃        10・・・真空チャンバ11・・・
水晶センナ    13・・・膜形成速度制御部第 図 2 TiCN膜 1刃(ステンしス葛したj青λ豪十)
FIG. 1 is a diagram showing a schematic configuration of an apparatus for using the method of the present invention, and FIG. 2 is an enlarged sectional view of a case where a coating is formed on the surface of a blade by a conventional method. 4...Electron beam evaporation source 5.6.Ion gun 9...
Blade 10...Vacuum chamber 11...
Crystal senna 13...Film formation speed control section Fig. 2 TiCN film 1 blade (stainless steel)

Claims (1)

【特許請求の範囲】[Claims] 表面に被膜を形成すべき刃を真空槽内に配置し、この刃
に対し炭化水素ガスおよび窒素ガスのイオンビームをそ
れぞれ照射すると共に、このイオンビーム照射と同時に
蒸発源からチタンを電子ビーム蒸発させ、チタンの形成
速度に対する各イオンビーム密度を制御しながら刃の表
面にTiCN膜を形成するようにしたことを特徴とする
刃の表面処理方法。
The blade on which a film is to be formed is placed in a vacuum chamber, and the blade is irradiated with ion beams of hydrocarbon gas and nitrogen gas, and titanium is evaporated from an evaporation source with an electron beam at the same time as the ion beam irradiation. A method for surface treatment of a blade, characterized in that a TiCN film is formed on the surface of the blade while controlling each ion beam density with respect to the titanium formation rate.
JP63320840A 1988-12-20 1988-12-20 Blade surface treatment method Expired - Lifetime JPH0759744B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63320840A JPH0759744B2 (en) 1988-12-20 1988-12-20 Blade surface treatment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63320840A JPH0759744B2 (en) 1988-12-20 1988-12-20 Blade surface treatment method

Publications (2)

Publication Number Publication Date
JPH02166270A true JPH02166270A (en) 1990-06-26
JPH0759744B2 JPH0759744B2 (en) 1995-06-28

Family

ID=18125828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63320840A Expired - Lifetime JPH0759744B2 (en) 1988-12-20 1988-12-20 Blade surface treatment method

Country Status (1)

Country Link
JP (1) JPH0759744B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1577416A1 (en) * 2004-03-16 2005-09-21 Seiko Epson Corporation Decorative article and timepiece

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62146255A (en) * 1985-12-20 1987-06-30 Citizen Watch Co Ltd Ion planted black film
JPS63251129A (en) * 1987-04-01 1988-10-18 Daijietsuto Kogyo Kk Coated cutting edge for cutting tools
JPS63250454A (en) * 1987-04-06 1988-10-18 Hitachi Ltd Ion mixing method and device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62146255A (en) * 1985-12-20 1987-06-30 Citizen Watch Co Ltd Ion planted black film
JPS63251129A (en) * 1987-04-01 1988-10-18 Daijietsuto Kogyo Kk Coated cutting edge for cutting tools
JPS63250454A (en) * 1987-04-06 1988-10-18 Hitachi Ltd Ion mixing method and device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1577416A1 (en) * 2004-03-16 2005-09-21 Seiko Epson Corporation Decorative article and timepiece
US7261956B2 (en) 2004-03-16 2007-08-28 Seiko Epson Corporation Decorative article and timepiece

Also Published As

Publication number Publication date
JPH0759744B2 (en) 1995-06-28

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