JPH0215112A - High energy density beam heating device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention is directed to heating and modifying the surface of a heated object by irradiating the surface of the heated object with a high energy density beam, such as an electronic beam heating device. The present invention relates to a high energy density beam heating device.

[Prior Art] Fig. 3 is a block diagram showing a conventional electron beam heating device disclosed in, for example, Japanese Unexamined Patent Publication No. 60-238489. In the figure, (1) is a vacuum chamber, and (2) is a heated This is a steel plate that is installed so that it can move in the direction of the arrow in the figure within the vacuum chamber ( ).

(3) is attached to the top of the vacuum chamber (1).
) is an electron gun that irradiates the steel plate (2) with a high-energy density beam (4), and (5) is an electron gun (3) that irradiates the steel plate (2) in
The cathode provided in the second part of ), (6) is the electron gun (3)
An anode (7) is provided below the anode (5) in the electron gun (3) and an anode (7) is provided below the cathode (5) in the electron beam (3).
(8) is a deflection lens that is installed below the focusing lens (7) in the electron gun (3) and generates an alternating magnetic field to vibrate the electron beam (4). and (10) are a constant current amplifier and a frequency oscillator, respectively, which are connected to the deflection lens (8) and generate an alternating magnetic field in the deflection lens (8).

In the conventional electronic heat heating device configured as described above, when modifying the surface portion of the steel plate (2),
) is advanced along the vacuum chamber (]), and an electron beam (4) is fired from the electron gun (3) to irradiate the surface of the steel plate (2). At this time, the electron beam (4) is focused by the focusing lens (7), and
The energy density is as high as att/cIn2, and the beam is irradiated onto the steel plate (2) by the deflection lens (8) while vibrating between the broken line and the solid line in the figure. By this, the steel plate (2
) irradiated with the electron beam (4) is rapidly heated.

Here, FIG. 4 is a relationship diagram showing the relationship between time and temperature of a heated steel plate using distance (depth) from the surface as a parameter. As shown in this figure, when heat is input to a steel plate, the heat is conducted from the surface to the inside. Therefore, the temperature of the heated steel plate increases most at the surface, and the temperature increase becomes smaller as the distance from the surface increases.

Similarly, the temperature of the heated steel plate (2) increases the most at the surface, and the temperature increase decreases as the distance from the surface increases. The surface portion of the steel plate (2) melts to a depth where this temperature rise exceeds the melting point.

After passing through the irradiation position of the electron beam (4), the heated and melted portion of the steel plate (2) is cooled by natural cooling due to heat conduction and radiation from the surface of the steel plate (2) inside the steel plate (2). Re-solidify. Steel plate melted and resolidified in this way (2)
The surface portion of is modified and its structure is refined. This modified layer on the surface portion is an extremely thin film with a thickness of about several plus plfl.

[Problems to be Solved by the Invention] In the conventional electron beam heating device configured as described above, it is desired to make the modified layer as thick as possible, and for this purpose it is necessary to melt the steel plate (2) more deeply. It is necessary to do so. To achieve this, it is necessary to increase the amount of heat input from the surface of the steel plate (2), but since the temperature of the steel plate (2) increases the most at the surface, increasing the surface heat input will increase the amount of heat input from the surface of the steel plate (2).
There is a problem that excessive heat input occurs on the surface of the steel plate (2), and therefore, it is impossible to increase the thickness of the modified layer of the steel plate (2).

The present invention was made to solve the above-mentioned problems, and an object of the present invention is to obtain a high-energy-density beam heating device that can modify the surface portion of a heated object more deeply.

[Means for Solving the Problems] A high energy density beam heating device according to the present invention includes a cooler provided downstream of the irradiation position of the high energy density beam on the object to be heated.

[Operations] In this invention, the heated portion of the object to be heated is forcibly cooled by the cooler.

[Example] Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of an electron beam heating apparatus showing an embodiment of the present invention, and the same or equivalent parts as in FIG. 3 are given the same reference numerals, and the explanation thereof will be omitted.

In the figure, (11) is a drive roll that is rotatably installed in the vacuum chamber (1) and pinches and advances the steel plate (2) from above and below, and (12) is the irradiation position of the electron beam (4) on the steel plate (2). A cylindrical cooling roll is rotatably provided downstream of the steel plate (2) and forcibly cools the heated portion of the steel plate (2) in contact with the steel plate (2). , (14) is a steel plate (
2) It is a support roll that pushes the

FIG. 2 is a block diagram of a cooler having the cooling roll (12) shown in FIG.
), (16) and (1
7) is a condenser and a compressor that are connected to the cooling roll (12) via piping to condense and compress the fluorocarbon gas (13), and (18) is a compressor (17) and a cooling roll (1).
2) is an expansion valve installed in the middle of the piping that connects the The above cooling machine includes a cooling roll (12), a fluorocarbon gas (
13), a bearing (15), a condenser (16), a compressor (17), and an expansion valve (18).

In the electron beam heating device configured as described above, as in the conventional example, the surface portion of the steel plate (2) is heated by the electron beam (
4) is heated by the irradiation. After that, the electron beam (4
), the heated part of the steel plate (2) naturally cools down due to heat diffusion inside itself, and
The surface is forcedly cooled by contact with the cooling roll (I2). For this reason, the steel plate (2) can be cooled almost uniformly in the thickness direction, and even when the surface heats up, there is no excessive heat input to the surface, and therefore the thickness of the modified layer can be increased. I can do something.

Also, from the irradiation position of the electron beam (4) to the cooling roll (1)
By setting in advance the distance to the contact position in 2) and the advancing speed of the steel plate (2), the time for heat conduction after heating can be adjusted. The thickness of the modified layer can be adjusted based on the thermal conductivity in the thickness direction of the steel plate as shown in FIG.

In the above embodiments, an electron beam heating device is shown as the high energy density beam heating device, but the present invention can also be applied to other devices such as a laser beam heating device or a plasma heating device.

Moreover, although the steel plate (2) is shown as the object to be heated in the above embodiment, other metal plates may be used, and the object to be heated is not limited to this.

Furthermore, in the two-legged embodiment, a cooling roll (one
2) It shows something that consists of a Froncus (+3), a hair link (15), a condenser (16), a compressor (17), and an expansion valve (18), for example, something that blows cooling air onto a heated object. Other coolers may also be provided. Further, the refrigerant of the cooler of the two-legged embodiment is not limited to the freon gas (13), and may be other gases such as hydrogen gas or liquids such as water.

[Effects of the Invention] As explained above, in the high energy density beam heating device of the present invention, the cooler that forcibly cools the heated portion of the heated object is positioned at the irradiation position of the high energy density beam on the heated object. When installed downstream, even if the amount of heating to the heated object is increased, the surface heat input will not be excessive, and the surface of the heated object can be heated deeper and reformed. be.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of an electron beam heating device, not showing an embodiment of the present invention, Fig. 2 is a block diagram of a cooler having the cooling roll of Fig. 1, and Fig. 3 is a diagram of a high energy density beam heating device. As an example, FIG. 4 is a configuration diagram showing a conventional electron beam heating device. FIG. 4 is a relationship diagram showing the relationship between time and temperature of a heated steel plate using distance (depth) from the surface as a parameter. In the figure, (2) is a steel plate, (4) is an electronic steel plate 18, (
12) is a cooling roll, (13) is a front caster, (15)
is a bearing, (16) is a condenser, (17) i, J compressor, and (18) is an expansion valve. In each figure, the same reference numerals indicate the same or corresponding parts. Dato Kari t': 5-Ko-Hehe D-IL Fuo Shikasu 15: He7 Rinik 16 Ko, Ryo Dai 17, Counter-Interrogation 1B'! l! ? *Tsu procedural amendment December 1988 1511

Claims (1)

[Claims] In a high energy density beam heating device that heats the surface portion of the heated object by irradiating the surface of the moving object with a high energy density beam, the irradiation position of the high energy density beam on the object to be heated is installed downstream,
A high energy density beam heating device characterized by comprising a cooler that forcibly cools the heated portion of the object to be heated.