JPH02134373U - - Google Patents
Info
- Publication number
- JPH02134373U JPH02134373U JP4292289U JP4292289U JPH02134373U JP H02134373 U JPH02134373 U JP H02134373U JP 4292289 U JP4292289 U JP 4292289U JP 4292289 U JP4292289 U JP 4292289U JP H02134373 U JPH02134373 U JP H02134373U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- vacuum
- fluid passage
- vacuum chamber
- variable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 3
- 230000002401 inhibitory effect Effects 0.000 claims 1
Landscapes
- Details Of Valves (AREA)
Description
第１図は本考案による可変コンダクタンス真空
弁装置の実施例を示す縦断側面図、第２図はその
正面図、第３図は要部の拡大断面図、第４図は従
来の装置の縦断側面図、第５図は弁開口度とコン
ダクタンスとの関係を示すグラフである。
１……可変コンダクタンス真空弁装置、２……
ハウジング、３……弁体、４……軸、５，６……
じやま板。
Fig. 1 is a vertical side view showing an embodiment of the variable conductance vacuum valve device according to the present invention, Fig. 2 is a front view thereof, Fig. 3 is an enlarged sectional view of the main part, and Fig. 4 is a longitudinal side view of the conventional device. FIG. 5 is a graph showing the relationship between the valve opening degree and conductance. 1... Variable conductance vacuum valve device, 2...
Housing, 3... Valve body, 4... Shaft, 5, 6...
Jiyama board.
Claims (1)
れた弁の開口度に基づきコンダクタンスを変化さ
せ、これにより上記真空槽内圧力を制御するよう
に構成された可変コンダクタンス真空弁装置にお
いて、 上記弁の閉位置近傍の流体通路壁に上記流体の
流れを阻害する部材を設けたことを特徴とする可
変コンダクタンス真空弁装置。[Claims for Utility Model Registration] A variable device configured to change conductance based on the degree of opening of a valve provided in a fluid passage between a vacuum chamber and a vacuum pump, thereby controlling the pressure inside the vacuum chamber. A variable conductance vacuum valve device, characterized in that a member for inhibiting the flow of the fluid is provided on a fluid passage wall near the closed position of the valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4292289U JPH02134373U (en) | 1989-04-14 | 1989-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4292289U JPH02134373U (en) | 1989-04-14 | 1989-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02134373U true JPH02134373U (en) | 1990-11-07 |
Family
ID=31554890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4292289U Pending JPH02134373U (en) | 1989-04-14 | 1989-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02134373U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007327515A (en) * | 2006-06-06 | 2007-12-20 | Megatorr Corp | Throttle valve |
| JP2010139073A (en) * | 2008-12-12 | 2010-06-24 | Inficon Gmbh | Valve structure |
| CN108895181A (en) * | 2018-08-31 | 2018-11-27 | 杭州全威科技有限公司 | A kind of nonreturn valve core |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311433U (en) * | 1986-07-07 | 1988-01-25 |
-
1989
- 1989-04-14 JP JP4292289U patent/JPH02134373U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6311433U (en) * | 1986-07-07 | 1988-01-25 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007327515A (en) * | 2006-06-06 | 2007-12-20 | Megatorr Corp | Throttle valve |
| JP2010139073A (en) * | 2008-12-12 | 2010-06-24 | Inficon Gmbh | Valve structure |
| CN108895181A (en) * | 2018-08-31 | 2018-11-27 | 杭州全威科技有限公司 | A kind of nonreturn valve core |
| CN108895181B (en) * | 2018-08-31 | 2023-12-01 | 杭州全威科技有限公司 | A one-way valve core |