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JPH02134009A - Structure of piezoelectric device package - Google Patents

Structure of piezoelectric device package

Info

Publication number
JPH02134009A
JPH02134009A JP28736288A JP28736288A JPH02134009A JP H02134009 A JPH02134009 A JP H02134009A JP 28736288 A JP28736288 A JP 28736288A JP 28736288 A JP28736288 A JP 28736288A JP H02134009 A JPH02134009 A JP H02134009A
Authority
JP
Japan
Prior art keywords
piezoelectric device
package
electrode lead
piezoelectric
land
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28736288A
Other languages
Japanese (ja)
Inventor
Tamiji Kuroda
黒田 民士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to JP28736288A priority Critical patent/JPH02134009A/en
Publication of JPH02134009A publication Critical patent/JPH02134009A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To attain superminiature structure for a piezoelectric device and to prevent leakage of a thickness vibration energy by limiting number of rigid fixed points of a piezoelectric substrate and applying wire bonding to the connection between an electrode lead of the piezoelectric device and a lead terminal penetrated through a package containing the lead air-tightly. CONSTITUTION:The circumferential ridge of a piezoelectric device (crystal resonator) is fixed at as a few points as possible, desirably at one point as a cunti-lever in a package 7. That is, the end of an electrode lead 2 of the crystal resonator 1 and a conductor pad are adhered by a conductive adhesives, the resonator 1 is fixed as cunti-lever in the package 7 to apply electric connection. On the other hand, other electrode lead 2' of the resonator 1 is connected electrically to a conductor pad 13 and a wire 14 exposed to the surface of a land 12 provided to other corner of the package 7. Thus, when the resonator 1 is formed in superminiature, since part of the electric connection is subject to wire bonding, the leakage of the vibration energy is prevented, while miniaturization and thin profile of the piezoelectric device are implemented.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は圧電デバイス、殊に超小型の圧電共振子を収納
するパンケージの構造に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to the structure of a pancage that houses a piezoelectric device, particularly a micro-sized piezoelectric resonator.

(従来技術) 圧電デバイス、殊に厚み振動を利用する圧電デバイスは
従来第3図(a)に示す如く例えば水晶振動子1の電極
リード部2.2を水晶基板の端縁近傍に於いてベース3
を気密貫通したリード部材4.4先端の導体クリップ5
.5にて挾持すると共に導電性接着剤6.6で接着し水
晶基板の機械的固定と前記電極リード部2.2と導体ク
リップ5.5との電気的接続を同時に行なうか或は同図
(blに示す如く圧電振動子1をフラット型パッケージ
7中にその主面を水平に配置し、該共娠子1の電ffl
 ’J−ド部2.2?:前記パッケージ7の壁を気密貫
通しその内部適所に露出したリード端子8,8に導電性
接着剤6.6にて接着固定するのが一般的であった。
(Prior Art) A piezoelectric device, particularly a piezoelectric device that utilizes thickness vibration, is conventionally manufactured by attaching, for example, an electrode lead portion 2.2 of a crystal resonator 1 to a base near an edge of a crystal substrate, as shown in FIG. 3(a). 3
Lead member 4. Conductor clip 5 at the tip of 4.
.. At the same time, mechanically fixing the crystal substrate and electrically connecting the electrode lead portion 2.2 and the conductor clip 5.5 by holding the crystal substrate with conductive adhesive 6.6 or attaching it with a conductive adhesive 6.6, or As shown in bl, the piezoelectric vibrator 1 is placed in a flat package 7 with its main surface horizontally,
'J-de part 2.2? : It has been common practice to hermetically penetrate the wall of the package 7 and bond and fix the lead terminals 8, 8 exposed at appropriate positions inside the package 7 with a conductive adhesive 6.6.

しかしながら各種電子機器の小型化、薄型化の要求が厳
しくなった昨今に於いてはこれらに用いる電子部品の−
たる圧電デバイスも超小型化が要求されるようになった
為、圧電基板も小サイズ化せざるを得す、その結果殊に
厚み振動を利用する圧電デバイスを上述した従来の手法
の如く基板外周縁各所で比較的リジッドに固定すれば振
動エネルギが上記固定部から漏洩し共振のQが低下する
という欠陥があった。
However, as the demands for smaller and thinner electronic devices have become stricter, the electronic components used in these devices are becoming more and more compact.
As piezoelectric devices, which are the mainstay of piezoelectric devices, are now required to be ultra-miniaturized, the size of piezoelectric substrates must also be reduced. If it is relatively rigidly fixed at various locations around the periphery, vibration energy leaks from the fixed portion, resulting in a reduction in the Q of resonance.

(発明の目的) 本発明は上述した如き従来の圧電デバイス保持構造の欠
陥を除去すべくなされたものであって、圧電基板のリジ
ッドな固定点を極限した上で圧電デバイスの電極リード
部とこれを収納するパッケージを気密貫通するリード端
子との接続をワイヤポンデイグにて行うに適した構造を
有する圧電テバイスバノケージを賃供することを目的と
する。
(Object of the Invention) The present invention has been made in order to eliminate the defects of the conventional piezoelectric device holding structure as described above. The purpose of the present invention is to provide a piezoelectric device vanocage having a structure suitable for connection with a lead terminal that hermetically passes through a package containing a piezoelectric device by wire bonding.

(発明の概要) 上述の目的を達成する為2本発明に係る圧電デバイスパ
ッケージは以下の如き構成をとる。
(Summary of the Invention) In order to achieve the above-mentioned objects, a piezoelectric device package according to the second invention has the following configuration.

即ち、圧電デバイス周縁をパッケージ内に於いて極力少
数の点、望ましくは一点で片持固定する為のランドと圧
電デバイスのXfUIJ−ド部とワイヤボンディングで
接続する為パッケージ壁な気密貫通し内に露出したリー
ド端子パッドと前記圧電デバイスの電極リード部背面に
圧電デバイス土面と微細な間隙を与えろ圧電基板支持ラ
ンドとな配置したものである。
That is, in order to connect the periphery of the piezoelectric device in a cantilevered manner at as few points as possible, preferably at one point, in the package and to the XfUIJ-domain of the piezoelectric device by wire bonding, the land is passed through the package wall in an airtight manner. A fine gap is provided between the exposed lead terminal pad and the back surface of the electrode lead portion of the piezoelectric device to form a piezoelectric substrate support land.

(実施例) 以下1本発明を図面に示した実施例に基づいて詳細に説
明する。
(Example) The present invention will be described in detail below based on an example shown in the drawings.

第1図(a)及び(b)は夫々本発明に係る圧電デバイ
スパックーンの一実施例を示す平面図及びAA断面図で
あって、フラット型バック−;′7の一隅に水晶振動子
1の一電極す−ド部2端部な固定するランド9を設ける
と共に該ランド9表面には導体パッド10を露出せしめ
、該パッド10はその延長部11をパッケージ壁を気密
貫通せしめてパッケージ外壁適所に露出せしめリードを
構成する。
FIGS. 1(a) and 1(b) are a plan view and an AA cross-sectional view showing an embodiment of the piezoelectric device package according to the present invention, respectively, in which a crystal resonator is placed in one corner of the flat back; A land 9 is provided at the end of the one-electrode board portion 2 to fix it, and a conductor pad 10 is exposed on the surface of the land 9. The pad 10 has an extended portion 11 that passes through the package wall in an airtight manner, and is attached to an appropriate location on the outer wall of the package. Configure the leads to expose them to the

而して前記水晶振動子1の電極リード2端部と前記導体
パッド10とを導電性接着剤6にて接着することによっ
て水晶振動子1をパノケジ7内に片持固定すると共に電
気的接続を行う。
By bonding the ends of the electrode leads 2 of the crystal resonator 1 and the conductive pads 10 with a conductive adhesive 6, the crystal resonator 1 is cantilevered and fixed in the pano cage 7, and an electrical connection is established. conduct.

一方前記水晶振動子1の他の電極リード部2′は前記・
ぐソケージ7の他の一隅に設けたランド12表面に露出
した導体パッド13とワイヤ14に電気的に接続するが
、この際前記水晶振動子1の電(タリード部2′ の端
部な押圧する必要がある放談電極リード部2′ の背面
にこれを一時的に支持する為の圧電デバイス支持ランド
15を設ける。
On the other hand, the other electrode lead portion 2' of the crystal resonator 1 is
The conductor pad 13 exposed on the surface of the land 12 provided at the other corner of the crystal cage 7 is electrically connected to the wire 14. A piezoelectric device support land 15 is provided on the back surface of the necessary electrode lead portion 2' to temporarily support it.

同、該支持ランド150表面レベルは片持支持した水晶
振動子1の背面より少しく低く設定しワイヤボンディン
グ工程終了后は相互に接触しないようにすべきこと自明
であろう。
Similarly, it is obvious that the surface level of the support lands 150 should be set slightly lower than the back surface of the crystal resonator 1 supported in a cantilever manner so that they do not come into contact with each other after the wire bonding process is completed.

ヌ、前記うンド12表面に露出したパッド13はその延
長部がパッケージ壁中な気密貫通し他のり一部16を構
成すること格別の説明を渋しないであろう。
The extended portion of the pad 13 exposed on the surface of the mold 12 passes through the package wall in a hermetic manner and constitutes another wall portion 16, which requires no particular explanation.

斯くすることによって水晶振動子が超小型のものである
場合電気的接続の一部はワイヤポンディングによるから
振動エネルギの漏洩は少なく共振のQの低下を防止する
ことができろ。
By doing so, if the crystal resonator is ultra-small, some of the electrical connections are made by wire bonding, so that the leakage of vibration energy is small and a reduction in the Q of resonance can be prevented.

第2図(a)及び(bl夫々は本発明な二重モード圧電
フィルタに適用した実施例を示す平面図及びB−B断面
図である。
FIGS. 2(a) and 2(bl) are a plan view and a sectional view taken along the line B-B, respectively, showing an embodiment applied to the dual-mode piezoelectric filter of the present invention.

二重モード圧電フィルタは周知の如く圧電基板17千面
に分割電極18.18を、その背面に接地用電極19を
設けこれを励振した際発生する対称及び反対称の異なる
モードの振動を利用してバンドパスフィルタ乞構成する
ものである。
As is well known, the dual-mode piezoelectric filter has divided electrodes 18 and 18 on 17,000 planes of a piezoelectric substrate, and a grounding electrode 19 on the back of the piezoelectric substrate, and utilizes vibrations in different symmetric and anti-symmetric modes that occur when excited. It consists of a bandpass filter.

このような圧電フィルタを超小型化した場合3個の電極
から夫々延びる電極リード部をその端部に於いてリジッ
ドに固定すれば該固定点から前記2つのモードの振動エ
ネルギが漏洩する結果フィルタの挿入損失が増大するの
みならずカットオフ特性も劣化する。
When such a piezoelectric filter is miniaturized, if the electrode lead parts extending from the three electrodes are rigidly fixed at their ends, the vibration energy of the two modes will leak from the fixed points, resulting in the filter's Not only does the insertion loss increase, but the cutoff characteristics also deteriorate.

この問題を解決する為にはパッケージ7中に前記分割電
極18.18の電極リード部20.20と夫々ワイヤボ
ンディングにて接続する為のランド12.12及びその
表面に露出した導体パッド13.13 、圧電基板1の
前記電極リード部20.20の背面を支持する為のラン
ド15”、15及び前記接地電極19の電極リード部2
1を機械的に固定すると共に電気的に接続するランド9
及びその表面に露出した導体パッド10を設け、当該圧
電フィルタ17をその接地電極19のリード21の端部
で片持固定すると共に他の2個の電極リード20.20
部は夫々ワイヤボンディングにて導体パッド13.13
と電気的に接続すればよい。
In order to solve this problem, lands 12.12 and conductor pads 13.13 exposed on the surface of the lands 12.12 for connecting with the electrode lead parts 20.20 of the divided electrodes 18.18 by wire bonding, respectively, are provided in the package 7. , lands 15'', 15 for supporting the back surface of the electrode lead portion 20.20 of the piezoelectric substrate 1, and the electrode lead portion 2 of the ground electrode 19.
Land 9 for mechanically fixing 1 and electrically connecting
The piezoelectric filter 17 is cantilevered by the end of the lead 21 of the ground electrode 19, and the other two electrode leads 20, 20 are provided.
The conductor pads 13 and 13 are connected by wire bonding respectively.
You just have to connect it electrically.

伺、水晶基板等の機械的固定は振動の伝搬方向からはず
れた基板軸方向端部にて行うのが振動エネルギの漏洩を
防止する上では好都合であろう。
However, in order to prevent leakage of vibration energy, it would be convenient to mechanically fix the crystal substrate or the like at the end of the substrate in the axial direction away from the vibration propagation direction.

このような観点から一般には振動の伝搬軸方向をZ′力
方向、支持力向4X軸方向に選ぶことが多い。
From this point of view, the vibration propagation axis direction is generally often selected to be the Z' force direction and the supporting force direction to be the 4X axis direction.

以上1本発明を典型的な圧電振動子及びフィルタの一点
固定片持支持の場合を例に挙げて説明したが本発明は必
ずしもこれのみに限定されるものではなく、異形の圧電
デバイスの場合には固定点が複数個所であってもよいこ
とは云うまでもあるまい。
The present invention has been described above using the case where a typical piezoelectric vibrator and filter are fixed at one point and cantilevered as an example, but the present invention is not necessarily limited to this, and can also be applied to irregularly shaped piezoelectric devices. It goes without saying that there may be multiple fixed points.

(発明の効果) 本発明は以上説明した如く構成するものであるから圧電
デバイスに対する小型化、薄型化への要求に応えつつ当
該デバイスの諸行性、殊に厚み振動エネルギの漏洩を防
止する上で著しい効果を発揮する。
(Effects of the Invention) Since the present invention is constructed as described above, it can meet the demands for smaller and thinner piezoelectric devices, and improve the performance of the device, especially preventing the leakage of thickness vibration energy. It has a remarkable effect.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(al及び(b)は夫々本発明の一実施例を示す
平面図及びA−A断面図、第2図(a)及び(b)は夫
々本発明の他の実施例を示す平面図及びB−B断面図、
第3図(a)及び(b)は夫々従来の圧電デバイスの支
持構造を示す異った例を示す断面図である。 1.17・・・・・・・・圧電デバイス、   7・・
・・・・・・・フラット型パッケージ、   9・・・
・・・・・・圧電デバイス固定用ランド、    2.
20及び21・・・・・・・電極リード部、    1
3・・・・・・・ ワイヤボンド用端子パッド、   
15・・・・・・・・・圧電デバイス電極リード部背面
支持ランド。
Figures 1 (al and b) are a plan view and an A-A sectional view showing one embodiment of the present invention, and Figures 2 (a) and (b) are plane views showing other embodiments of the present invention, respectively. Figure and BB sectional view,
FIGS. 3(a) and 3(b) are cross-sectional views showing different examples of conventional piezoelectric device support structures. 1.17...Piezoelectric device, 7...
...Flat package, 9...
...Piezoelectric device fixing land, 2.
20 and 21... Electrode lead part, 1
3...Terminal pad for wire bonding,
15・・・・・・Piezoelectric device electrode lead part back support land.

Claims (3)

【特許請求の範囲】[Claims] (1) 圧電デバイスをその主面がほゞ水平に保持され
る如く収納するフラット型パッケージに於いて,パッケ
ージ内部適所に圧電デバイスの外周縁部を固定する為の
ランドと,該パッケージの壁を気密貫通して前記圧電デ
バイスの電極リード部とワイヤボンディングにて電気的
に接続するリードのパッケージ内端子パッドと前記圧電
デバイスの電極リード部背面に位置する圧電デバイス支
持ランドとを備えたことを特徴とする圧電デバイスパッ
ケージの構造。
(1) In a flat package in which a piezoelectric device is housed so that its main surface is held almost horizontally, a land for fixing the outer periphery of the piezoelectric device in a proper position inside the package and a wall of the package are provided. It is characterized by comprising an in-package terminal pad of a lead that passes through the piezoelectric device in an airtight manner and is electrically connected to the electrode lead portion of the piezoelectric device by wire bonding, and a piezoelectric device support land located on the back side of the electrode lead portion of the piezoelectric device. Structure of piezoelectric device package.
(2) 前記圧電デバイスがその外周縁を固定するラン
ドに固定された際,前記圧電デバイス支持ランド表面が
これと圧電デバイスの電極リード部背面との間に微細な
間隙を有するようにしたことを特徴とする特許請求の範
囲(1)記載の圧電デバイスパッケージの構造。
(2) When the piezoelectric device is fixed to the land that fixes its outer periphery, the surface of the piezoelectric device supporting land has a minute gap between it and the back surface of the electrode lead portion of the piezoelectric device. A structure of a piezoelectric device package according to claim (1).
(3)前記圧電デバイスの外周縁部固定用ランドが圧電
デバイス電極リード部とパッケージ外部との電気的接続
部を兼ねることを特徴とする特許請求の範囲(1)又は
(2)記載の圧電デバイスパッケージの構造。
(3) The piezoelectric device according to claim (1) or (2), wherein the land for fixing the outer peripheral edge of the piezoelectric device also serves as an electrical connection between the piezoelectric device electrode lead and the outside of the package. Package structure.
JP28736288A 1988-11-14 1988-11-14 Structure of piezoelectric device package Pending JPH02134009A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28736288A JPH02134009A (en) 1988-11-14 1988-11-14 Structure of piezoelectric device package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28736288A JPH02134009A (en) 1988-11-14 1988-11-14 Structure of piezoelectric device package

Publications (1)

Publication Number Publication Date
JPH02134009A true JPH02134009A (en) 1990-05-23

Family

ID=17716381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28736288A Pending JPH02134009A (en) 1988-11-14 1988-11-14 Structure of piezoelectric device package

Country Status (1)

Country Link
JP (1) JPH02134009A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0923131A (en) * 1995-07-07 1997-01-21 Murata Mfg Co Ltd Piezoelectric resonance components

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160191A (en) * 1974-11-21 1976-05-25 Suwa Seikosha Kk at katsutosuishoshindoshi
JPS599623B2 (en) * 1978-10-23 1984-03-03 ゼネラル インスツルメント コ−ポレ−シヨン Method for cooling induction heated vapor deposition equipment and cooling device therefor
JPS6014523B2 (en) * 1979-10-11 1985-04-13 テクトロニツクス・インコ−ポレイテツド cascode amplifier circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160191A (en) * 1974-11-21 1976-05-25 Suwa Seikosha Kk at katsutosuishoshindoshi
JPS599623B2 (en) * 1978-10-23 1984-03-03 ゼネラル インスツルメント コ−ポレ−シヨン Method for cooling induction heated vapor deposition equipment and cooling device therefor
JPS6014523B2 (en) * 1979-10-11 1985-04-13 テクトロニツクス・インコ−ポレイテツド cascode amplifier circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0923131A (en) * 1995-07-07 1997-01-21 Murata Mfg Co Ltd Piezoelectric resonance components

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