JPH01301038A - Method for preventing vibration - Google Patents

Abstract

PURPOSE:To prevent vibration and to improve a working accuracy by reciprocating a counter weight in the reverse direction to the following direction by synchronizing with the reciprocating movement of the work means and/or work holding means of a working machine in a grinder, etc. CONSTITUTION:When the piston of hydraulic cylinder 3 is moved to the right, a table(work holding means) 4 is also moved to the right part, and interlocking gear 8 is rotated to the right by the rack 9 of the table 4 accordingly and both guide rods S and the counter weight 6 firmly held thereon are moved to the left part via a rack 7. When the table 4 is located at the right end, the table 4 is moved to the left part and the counter weight 6 to the right part with the operating direction of the hydraulic cylinder 3 being reversed and this reciprocating movement is repeated thereafter. The reaction force caused by the movement of the table is offset by the reverse directional movement of the counter weight, the vibration generation is prevented and the working accuracy can be improved.

Description

Detailed Description of the Invention [Industrial Field of Application] The present invention provides a vibration prevention device for preventing vibrations caused by reciprocating motion of processing means and workpiece holding means, and an attachment equipped with the vibration prevention device. The present invention also relates to a processing machine equipped with a vibration prevention device and a counterweight thereof.

[Conventional technology 1] Conventionally, processing machines that process workpieces using abrasive grains (hereinafter referred to as
Processing machines) are required to have high precision. The above-mentioned processing machines require relative movement between the processing means such as the grinding wheel of the grinder or the wire of the loose abrasive cutting machine, and the workpiece. Specifically, the processing means must be reciprocated, or the workpiece such as a table must be moved relative to the workpiece. A workpiece fixed to the holding means is reciprocated with the workpiece holding means.

However, since the above-mentioned processing means and workpiece holding means are heavy objects, the reaction force generated when changing the direction of reciprocating motion or accelerating/decelerating them causes vibrations in the processing machine, which causes a reduction in processing accuracy. There is.

As a countermeasure, the moving speed of the processing means and workpiece holding means should be slowed down, and the processing means and workpiece holding means should be started and stopped slowly, thereby reducing the reaction force in the direction switching mechanism. ing.

[Problems to be Solved by the Invention] However, although the above measures are effective to some extent, they do not fundamentally eliminate the reaction force. Therefore, vibrations caused by the reaction force still occur, resulting in a decrease in machining accuracy.

Further, when the moving speed of the processing means and the workpiece holding means is slowed down, there arises the problem of reduced processing efficiency.

The above problems occur not only in processing machines equipped with the processing means described above, but also in attachments equipped with feeding means that are placed on the table of the processing machine.

The first purpose of this defense is to provide a vibration prevention device that can prevent vibrations of the processing machine caused by the reciprocating motion of the processing means and workpiece holding means and improve the accuracy of the processing machine. A second purpose is to provide an attachment that can replace the workpiece feeding device of a processing machine and reciprocate the workpiece without generating vibration, thereby increasing the accuracy of the processing machine.

The third purpose is to provide a high-precision processing machine that is equipped with the attachment for the second purpose, and the fourth purpose is to provide a high-precision processing machine that has a vibration prevention device built into its own feed mechanism. Our goal is to provide processing machines.

Furthermore, a fifth object is to provide an inexpensive processing machine that shares the driving source with the processing machine of the fourth object, and a sixth object is to provide an inexpensive processing machine that uses the same driving source as the processing machine of the fourth object.
The seventh objective is to provide a processing machine that does not cause a decrease in viscosity due to the heat of the drive source. To provide a counterweight that can change its own weight according to zero suspension.

On the other hand, the eighth purpose is to provide a vibration prevention device that can reliably grasp the vibration state, the ninth purpose is to provide an attachment that can reliably grasp the shooting state, and the tenth purpose is to provide a vibration prevention device that can reliably grasp the vibration state. It is an object of the present invention to provide a processing machine that can accurately grasp the vibration state.

The eleventh object is to provide a method for changing the reaction force that can change the anti-horn when the counter weight is moved without changing lff1 of the counter weight.
The twelfth purpose is to provide a vibration prevention device; d that can obtain a vibration prevention effect even when the weight of the workpiece changes, and the thirteenth purpose is to provide a vibration prevention device;
A fourteenth object of the present invention is to provide an attachment 1- equipped with a vibration prevention device capable of obtaining a vibration prevention effect even when the weight of a workpiece changes. The aim is to provide attachments that

[Means for Solving the Problem] In other words, the vibration prevention device of claim 1 is installed on a processing machine equipped with a processing means such as a grindstone that performs reciprocating motion and/or a workpiece holding means that performs reciprocating motion. The vibration prevention device according to claim 2 is provided with a counterweight that reciprocates in a direction opposite to the moving direction in synchronization with the reciprocating movement of the processing means and/or workpiece holding means of the processing machine. The attachment equipped with the device can fit into a processing machine equipped with processing means such as a grindstone.

A workpiece holding means that holds a workpiece and reciprocates the workpiece relative to the processing means of the processing machine, and a counterweight that reciprocates in a direction opposite to the movement direction in synchronization with the reciprocating movement of the workpiece holding means. It is equipped with the following.

Further, the processing machine according to claim 3 is one in which the strain prevention device according to claim 2 is attached to its own workpiece holding means,
A processing machine according to a fourth aspect of the invention includes a processing means such as a grindstone that reciprocates and/or a workpiece holding means that reciprocates, and a processing device that moves in a direction opposite to the movement direction of the processing means and/or workpiece holding means in synchronization with the reciprocation of the processing means and/or workpiece holding means. It is combined with a counterweight that reciprocates in the direction.

In general, the processing machine according to claim 5 utilizes the driving means of the processing means or the workpiece holding means as the means for driving the counterweight, and the processing machine according to claim 6 uses the driving means of the processing means and/or the workpiece holding means as the means for driving the counterweight. A driving means for reciprocating the counterweight is provided on the counterweight side.
It has a removable auxiliary weight for adjustment.

On the other hand, the photographing prevention device according to claim 8 is provided with an apparatus for detecting the unbalance of the reaction force generated between the processing means and/or workpiece holding means and the counterway i, in addition to the photographing prevention device according to claim 1. In addition to providing a balance detection means, a display means for displaying the detection result is also provided, and the attachment equipped with a vibration prevention device according to claim 9 includes, in addition to the attachment according to claim 2, a workpiece holding means and a counterweight. In addition to the processing machine according to claim 3, the processing machine according to claim 10 is provided with an unbalance detection means for detecting the unbalance of the reaction force generated by the process, and a display means for displaying the detection result. In addition to providing an imbalance detection means for detecting an imbalance between the reaction force generated between the processing means and/or the workpiece holding means and the counterweight, a display means for displaying the detection result is also provided.

Further, the method for changing the reaction force according to claim 11 is to change the reaction force generated by the counterweight by changing the acceleration when the counterweight moves. In addition to the vibration prevention device, it is equipped with an unbalance detection means that detects the imbalance of reaction force generated between the processing means and/or workpiece holding means and the counterweight, and a reaction force that changes the acceleration when the counterweight moves. The attachment equipped with the photographing prevention device according to claim 13 is provided with a force changing means and a control means for controlling the reaction force changing means according to the detection result of the imbalance detecting means. In addition to the attachment, it is provided with an unbalance detection means for detecting the unbalance of the reaction force generated between the workpiece holding means and the counterweight, and a reaction force changing means for changing the acceleration when the counterweight is moved. Claim 14 further comprises a control means for controlling the reaction force changing means in accordance with the detection result of the balance check means 1j.
In addition to the processing machine according to claim 4, the processing machine further comprises processing means and/or
Alternatively, the imbalance detection means described in 6i+ is provided, including an imbalance detection means for detecting an imbalance of reaction force generated between the work holding means and the counterweight, and a reaction force change means for changing the acceleration when the counterweight is moved. A control means is provided for controlling the reaction force changing means according to the detection result.

[For 1/1E] The reaction force generated by the reciprocating movement of the processing means and the workpiece holding means is reduced or offset by the reaction force generated by the reciprocating movement of the counterweight of the photographing prevention device.

Further, since the drive source for the counterweight is shared with the drive source for the processing means and the workpiece holding means, there is no need to provide a new drive source for the counterweight.

Furthermore, since the shared drive source is provided on the counterweight side, it is separated from the processing means and workpiece holding means. Therefore, heat from the drive source is not transferred to these.

On the other hand, <m of the counterweight can be changed by attaching and detaching the auxiliary weight, thereby making it possible to always equalize the reaction force generated between the workpiece and the workpiece holding means and the counterweight.

In addition, in vibration prevention devices, attachments, and processing machines, processing means, workpiece holding means, counterway
The imbalance detection means detects the vibration caused by the unbalance of the reaction force generated between the two, and the display means displays the detection result.

Furthermore, if the acceleration during movement toward the counterway 1 is changed, the reaction force generated by the same weight will also change accordingly.

Vibrations caused by the unbalance of the reaction force generated by the processing means, workpiece holding means, etc. with the counterweight are detected by the imbalance detection means, and the control means adjusts the counterweight to the reaction force changing means according to the detection. Change the acceleration when moving.

[Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to Fig. 1.2, in which the present invention is embodied in a plane ljl grinding machine having a built-in vibration prevention device.

As shown in FIG. 1, a saddle 2 is provided on a frame 1 of a surface grinding machine so as to be movable in the front and rear directions. A table 4 as a workpiece holding means is mounted on the saddle 2 so as to be movable in the left and right direction by a guide means (not shown).
is provided. Both left and right ends of the table 4 are fixed to rods 3a of a double-ended rad hydraulic cylinder 3, which serves as a driving means and is attached to the saddle 28F so as to extend in the left-right direction l\.

As shown in FIGS. 1 and 2, the saddle 2 is provided with two guide rods 5 that can move 188 times in the left and right directions, and both ends of both rods 5 are connected by block-shaped counterweights 6. .

As a result, the pair of guide rods 5 and the pair of counterways 1-6 are integrated.

A rack 7 is formed on one upper side of the guide rod 5, and a rack 9 is also formed on the lower side of the table 4. Both racks 7.9 mesh with an interlock gear 8 rotatably supported between them.

The weight of the guide rod 5 and counterweight 6 which are integrated together is about the same as the weight of the table 4.

A3, the guide rod 5, the counterweight 6, the rack 7.9, and the interlocking gear 8 constitute a vibration prevention device.

Next, the operation of the surface grinder configured as described above will be explained.

As shown in FIG. 1, when the piston of the hydraulic cylinder 3 is located on the left side, the table 4 is located at the left end of its reciprocating path, and the guide rod 5 is located at the right end of its reciprocating path. ni(hi) ``I'm doing 1.

From the above state, when the oil F and the screws 1 to 1 of the cylinder 3 move in the six directions, the table 4b moves to the right as indicated by the arrow 11. Then, the interlocking gear 8 is rotated around the clock 81 by the rack 9 of the table 4, and the gear 8 is connected to both guide rods t) and the counterweight 6 via the rack 7.
Avoid moving and to the left. Then, at the same time as the table 4 is located at the right end of its lt ib movement path as shown in the phantom line, the force r Kuntawait 6 is located at the left end of its reciprocating light path as shown in the phantom line, and with it The operating direction of the hydraulic cylinder 3 is reversed. As a result, the moving directions of the table 4, counterweight 6, etc. are reversed.

The grinder repeats the above operation, and the table 4 and counterweight 6 synchronize and reciprocate at a constant speed in the opposite direction.
Do J. As mentioned above, both 4 and 6 have the same fJi M, so the reaction force generated by the movement of the daple 4 is canceled out by the reaction force generated by the movement of the counterweight 6. That is, the surface grinder of this embodiment does not generate vibration when the table 4 is moved #J.

Therefore, there is no risk that the machining accuracy of the surface grinder will deteriorate due to this vibration, and furthermore, the feed rate of the table 4 can be increased to improve the machining efficiency. however,
In order not to halve the accuracy achieved by the vibration prevention device, it is necessary to use a hydrostatic guide as a guide means for the grinding wheel in the flat till grinding machine.
It is desirable to have high precision and no risk of stick-slip.

In addition, since the above-mentioned grinding machine uses the hydraulic cylinder 3 as a common driving means for the table 4 and the counterweight 6, an IC normal surface grinding machine equipped with the hydraulic cylinder 3 has a counterweight 6, which is interlocked with the hydraulic cylinder 3. It can be constructed at low cost by simply adding the 1a structures 5, 7, 8.9.

As mentioned above, the surface grinding machine of this embodiment corresponds to claim 4 in that it has a built-in vibration prevention device,
Furthermore, the processing machine corresponds to the processing machine of claim 5 in that both the double 4 and the counterweight 6 are moved back and forth by the same hydraulic cylinder 3.

Next, a second embodiment of the present invention will be described with reference to FIG. 3, in which the present invention is embodied in a surface grinder using a servo motor as a driving means.

As shown in FIG. 3, a recess 11a is formed on the saddle 11 of the surface grinder, and a drive shaft 12 extending in the left-right direction is rotatably supported in the recess 11a. The drive shaft 12 is rotated by a servo motor 13 as a drive means attached to the side of the treadle 11 via a speed reduction mechanism consisting of a large gear 14 and a small gear 15. A stopper 12a is formed in the middle of the shafts 1 to 12, a ball screw portion S1 is formed on the right side of the stopper 12a, and a ball screw portion S1 is formed on the left side with half the lead of the ball screw portion S1 and the opposite side. A ball screw portion S2 in the direction is formed.

A table 16 as a work holding means is provided on the saddle 11 so as to be movable in the left-right direction by a guide means (not shown), and a support portion 17 formed on the lower surface of the table 16 is attached to the right side. It is screwed together with the ball screw part S1. On the other hand, the block-shaped counterweights 1 to 18 are screwed into the left ball screw portion S2, and the counterweight 18 is rotated on the driving shirt 12 by a locking means (not shown). is being prevented.

The weight of the counterweight 18 is twice the weight of the table 16 including the support portion 17.

Note that the ball screw portion S2 of the drive shaft 12 and the counterweight 18 constitute a vibration prevention device.

Next, the operation of the surface grinder configured as described above will be explained.

As shown in FIG. 3, when the table 16 is located at the left end of its reciprocating eaves path, the support portion 17 of the table 16 is located at the left end of the ball screw portion S1 on the drive shaft 12, and The counterweight 18 is located at the right end of the ball screw portion S2.

When the servo motor 13 operates in the above state, the drive series 1r
The foot 12 rotates. Then, the support portion 17 of the table 16 moves to the right as shown by the arrow, and the counterweight 18 moves to the left as shown by the arrow at half the speed of movement of the support portion 17. Then, the support portion 17 is connected to the ball screw portion S1 as shown by the imaginary line.
At the same time as reaching the right end of the ball screw portion S2, the counterweight 18 reaches the left end of the ball screw portion S2 as shown by the imaginary line, and at the same time, the direction of rotation of the servo motor 13 is reversed. As a result, the table 16 and the counterweight 18
The direction of movement is reversed.

The grinding machine repeats the above operation, and the counterweight 18 reciprocates in the opposite direction at half the speed in synchronization with the reciprocation vJ of the table 16. As mentioned above, the weight of the counterweights 1 to 18 is set to twice the weight of the table 16, so the reaction force generated by the movement of the table 16 is offset by the reaction force generated by the movement of the counterweight 18. . That is, like the grinding machine of the first embodiment described above, the surface grinding machine of the second embodiment does not generate vibrations when the table 16 is moved, so that the same effect can be obtained. Furthermore, since the servo motor 13 is used as a common driving means, this grinding machine can be constructed at low cost.

As mentioned above, the surface grinder of this embodiment also corresponds to the processing machine of claims 4 and 5, like the first embodiment.

In the surface grinding machine of this second embodiment, one drive shaft 12 is rotated by one servo motor 13, thereby rotating the table 16 and the counterweight 1.
8 are reciprocated, but the present invention is not limited to this. For example, a pair of servo motors whose rotations are synchronized may be used to rotate separate drive shirts 1, respectively. - The screwed together table 16 and counterweight 18 may be moved back and forth.

In addition, in the first and second embodiments described above, a surface grinding machine with a built-in vibration prevention device was used to prevent vibrations caused by the reciprocating motion of the tables 4 and 16 holding the workpieces, but the present invention The present invention is not limited to this, but any type of processing machine may be used as long as it processes a workpiece using abrasive grains while reciprocating and requires high precision.

Therefore, as shown in FIG. 20, the table 4.1G
Instead, it may be embodied as a grinding machine that grinds the workpiece W by reciprocating the grindstone unit 96 as a processing means. To explain this grinder,
A table 100 is mounted on a saddle 99 that can move up and down on the frame 98 and is movable forward.
It is guided on the upper guide rail 98a and reciprocates left and right.
It is now being deleted. At the side of the grinding wheel unit 96, there is an identical wheel that moves in the opposite direction in synchronization with the reciprocating movement of the grinding wheel unit 1-96.
- A counterweight 97 that reciprocates with a roller is provided to prevent vibrations caused by the reciprocating movement of the grindstone unit 96.

In addition, similar to the above-mentioned grinding machine, the wire unit, which is the cutting blade as a processing means, moves reciprocatingly like the M@abrasive cutting machine, and in synchronization with the reciprocating movement of this wire unit, it moves in the opposite direction. Vibration caused by the reciprocating movement of the wire unit may be prevented by providing a counterweight that reciprocates with the same stroke.

Next, a third embodiment in which the present invention is embodied in an attachment equipped with a vibration prevention device will be described with reference to FIG. 4.5.

A motor 22 is attached to the top side of the main body 21 of the attachment, and a small pulley 23 attached to its output shaft is connected by a belt 26 to a large pulley 25 of a crankshaft 24 attached to the motor 22. There is. The crankshaft 24 is supported on both sides of the pulley 25, and has a crank arm 24a and an upwardly facing crank pin 24b formed at its upper end.

One end of a connecting rod 27 is supported by the crank bin 24b, and the other end of the connecting rod 27 is connected to the attachment body 21. The table 28 is attached to one side of a table 28 as a workpiece holding means that is linearly guided by a guide means (U not shown).

As a result, a crank mechanism is constructed between the motor 22 and the table 28. Further, on the guide means, a counterweight 29 consisting of a block-shaped #4 and having the same weight as the table 28 can be guided in a straight line like the table 28.

As shown in FIG. 4, a threaded portion 30 projects from the counterwit 29, and a plurality of auxiliary weights 31 are removably attached to the threaded portion 30 with nuts 30a.

As shown in FIG. 4, inside the attachment body 21, a chain belt 32 is passed between a pair of pulleys 33 so as to extend in the same direction as the guide means. Both ends of the interlocking belt 32 are connected to a pair of protrusions 28 formed on the lower side of the table 28 above the pulley 33.
Each is fixed to a. Further, a protrusion 29a that protrudes from the lower side of the counterweight 29 is fixed to a portion of the interlocking belt 32 located below the pulley 33.

Note that the counterweight 29, interlocking belt 32, and pulley 33 constitute a vibration prevention device.

Next, the operation of the attachment provided with the vibration prevention device configured as described above will be explained.

First, the attachment is fixed on the table of a normal processing machine that is not equipped with a vibration prevention device. Next, the workpiece W is fixed on the table 28 of this attachment, and a plurality of auxiliary weights 31 are attached to the counterweight 29 so as to have the same weight as the workpiece W.

When the attachment is operated without operating the table of the adder 1' and the motor 22 rotates the crankshaft 24 via the bell 26, the crank mechanism causes the daple 28 to move on the guide means as shown in FIG. It reciprocates in the direction of the arrow shown. Along with this reciprocating movement, the upper and lower sides of the interlocking belt 32 are also moved in opposite directions. Therefore, the counterweight 29 and the table 28 synchronize and reciprocate in opposite directions with the same stroke.

As mentioned above, the weights of the table 28 and the counterweight 29 are the same, and the weights of the work W on the table 28 and the counterweight 31, which is a complement to the counterweight 29, are also the same. Therefore, the reaction force generated by the movement of the table 28 on which the workpiece W is placed is offset by the reaction force generated by the movement of the counterweight 29, which is removed by the auxiliary weight 31.

In this way, the attachment equipped with the vibration prevention device of this embodiment is attached to the Jz Rework W on the wooden table 28.
can be made to reciprocate, and vibrations are not generated due to this reciprocating movement.

Therefore, by simply attaching the attachment of this third embodiment to an ordinary processing machine, it is possible to obtain 1q of effects equivalent to those of the processing machine incorporating the vibration prevention device shown in the above-mentioned first and second embodiments.

In addition, the table 28 in the attachment of this embodiment
The reciprocating stroke of the table is set to be very short compared to the reciprocating stroke of the table of the general processing machine itself. Therefore, when machining a small workpiece W, if the table of the processing machine itself is used, most of the stroke will be wasted, but if this attachment is used, the table 28 The stroke can be effectively doubled by one.

Furthermore, counterway 1 is added by auxiliary ways 1 to 31.
Since the effort of ~29 can be adjusted, the vibration prevention effect can be increased to 11 for workpieces W of any weight.

As described above, the attachment of this embodiment corresponds to the attachment of claim 2, and when this attachment is attached to the workpiece holding means of a processing machine, the processing machine becomes the processing machine of claim 3. Further, the counterweight 29 to the attachment member 1 of this embodiment corresponds to the counterweight of claim 7 in that its weight can be changed.

a3, as shown in FIG. 6, when the layerer 1~ of the attachment 1- of this third embodiment is implemented in a processing machine and the relationship between the table 28 and the counterweight 29 is reversed, that is, the above-mentioned When the processing machine is configured such that the counterweight 29 is driven by a crank mechanism and the reciprocating movement of the counterweight 29 drives the table 28 via the interlocking belt 32, the motor 2
2, the table 28 can be set at a remote position. Therefore, the heat generated by the motor 22 is transmitted to the processing means such as the table 28 and the grindstone, and the processing precision (1 The machine corresponds to a processing machine according to claim 6.

Next, a fourth embodiment of the invention will be described with reference to FIG. 7, in which the invention is embodied in an attachment in which both a table and a counterweight are directly driven by a crank mechanism.

A crankshaft 37 is horizontally and rotatably supported by a pair of support members 36 on the upper surface of the attachment 1 main body (not shown).

At one end of the crankshaft 37 is a motor ("Z" shown in the figure).
A pulley 39 connected by a belt 38 is keyed to the crankshaft 37, and a pair of crank pins 37a having the same eccentricity and 180 degrees out of phase with each other are provided on the crankshaft 37.

On the other hand, as shown in FIG.
On the left side, a table 40 as a work holding means and a counterway 41 are provided so as to be able to reciprocate in the left-right direction on the same guide means (not shown).

These are connected to the pair of crank pins 37a by a table-side connecting rod 42 and a weight-side connecting rod 43, respectively.

The counter weight 41 and the weight side feed rod 4
3 is the same as the total weight of the table 40 and the table side connecting rod 42.

Note that the weight-side connecting rod 43 and the counterweight 41 constitute a vibration prevention device.

Next, the operation of the attachment I configured as described above will be explained.

As shown in FIG. 7, when the crankshaft 37 starts rotating by the motor, the table 40 and the counterweight 41 reciprocate toward and away from each other at the same stroke, that is, at the same speed. Furthermore, along with these reciprocating movements, the connecting rods 42 and 43 also perform reciprocating movements. As mentioned above, since the table 40 including the connecting rods 42 and 43 and the counterweight 41 have the same weight, the reaction force generated by the movement of the table 40 is due to the reaction force generated by the movement of the counterweights 1 to 41. canceled out.

That is, the attachment of this fourth embodiment is similar to the attachment 1- of the third embodiment described above, and the table 16 is
Since no vibration is generated during movement, the same effect can be obtained. Further, the attachments of this fourth embodiment are similar to the third embodiment, and the attachments 1 to 1 of claim 2 are similar to the third embodiment.
If the attachment h is attached to the workpiece holding means of a processing machine, the processing machine corresponds to the processing machine of claim 3.

In addition, in the attachment of the fourth embodiment, since the table side and way 1 to side connecting rods 42 and 43 synchronize and reciprocate in opposite directions at a predetermined interval of 8,
Instead of the linear four-arm reaction force that accompanies the reciprocating movement of the table 40 described above, a thorny couple is generated that causes the attachment to reciprocate as shown by the solid arrow in FIG. 7. Therefore, it is desirable that the gap between both connecting rods 42 and 43 be narrow. For example, as shown in FIGS.
It is also possible to attach the base ends of both connecting rods 42 and 43 to the respective flanges 46 via needle bearings 48 by attaching them to the foot 47. With this configuration, no gap is formed between the connecting rods 42 and 43, and generation of a couple can be prevented.

Next, a fifth embodiment of the present invention will be described with reference to FIG. 10, in which the present invention is embodied in a vibration prevention device d that prevents vibrations of an ordinary surface grinder by being attached to the same. In addition,
The target grinding machine S is one in which a data blue is reciprocated by a ball screw rotated by 4 novo motors.

As shown in FIG. 10, the frame 5 of the vibration prevention device 51
2 has a U-shaped cross section with an opening opening downward, and a servo motor 53 is attached to the left side of the opening in the frame 52. The output shaft of the servo motor 53 protrudes from the side surface of the frame 52, and a motor side gear 54 is fixed thereto. A ball screw 55 is rotatably supported in the horizontal direction on the upper side of the tube nervomotor 53 in the frame 52, and a shaft-side gear 56 is mounted on the left end of the rotary seat 71-55 that protrudes from the frame 52. It is fixed so as to mesh with the width 54.

A block-shaped counterweight 57 made of steel is screwed onto the ball screw 55, and the counterweight 57 is prevented from rotating on the ball screw 55 by a locking means (not shown).

The frame 52 is covered with a cover 58 for protecting each device inside the frame 52 and a pair of gears 54, 56 on the sides thereof.

The ball screw 55 is formed with the same lead as the ball screw going into the target grinding machine S and in the opposite direction, and has a gear ratio G, t of the motor side and shaft side gears 54.56. , the gear ratio is the same as that of the grinder S. Further, the servo motor 53 is configured to rotate in synchronization with the servo motor of the grinding machine S in the same direction. Furthermore, the weight of the counterweight 57 is the same as the weight of the table T of the grinding machine S.

Next, the operation of the vibration prevention device configured as described in section 2 will be explained.

When the vibration prevention device 51 is attached to the target surface grinding machine S, the ball screw (not shown) of the grinding MS and the ball screw 55 of the vibration prevention device 51 are positioned in the same way, extending in the left and right direction. Ru. When the grinding machine S is operated, the rotations of the servo motors 53 of the grinding machine S and the vibration-proofing device 51 are synchronized, so that both S, 51
The ball screw 55 always rotates in the same direction at the same rotation speed η
Ru.

Therefore, the table T of the grinding machine S and the force I weight 57 of the vibration prevention device 51 always reciprocate in opposite directions at the same speed. As mentioned above, since the table of the ω1 grinding machine S and the weight of the counterweight 57 of the vibration prevention device 51 are the same, the reaction force generated by the movement of the table 1 of the grinding machine S is due to the weight of the vibration prevention device 51. This is offset by the reaction force generated by the movement of the counterweight 57. In other words,
The rtll milling machine S generates vibrations when moving below the demolding machine.

Therefore, by simply attaching the vibration prevention device N 51 to the target grinding machine S and synchronizing its servo motor 53 with the servo motor of the grinding W (S), the vibration prevention device shown in the above-mentioned first and second embodiments can be applied. It has a built-in device and can achieve the same effect as a two-way processing machine.

As mentioned above, the anti-vibration device 51 of this embodiment corresponds to the vibration-preventing device of claim 1: i.The anti-vibration device 51 of this embodiment corresponds to i. Then, it becomes the attachment of claim 2, and
If this vibration prevention device 51 is incorporated into the feed mechanism of a processing machine, a processing machine according to claim 4 will be obtained.

In this embodiment, the vibration prevention device 51 is applied to a plane ω1 grinding machine S, but the present invention is not limited thereto, and may be applied to other processing machines, such as a free abrasive cutting machine or an internal grinding machine. It may be embodied in a anti-vibration device as an anti-vibration device.

On the other hand, in all the embodiments from the first to the fifth, the center of gravity of the counterweight 6.18.29.41.57 and the tables 4, 16.28.40. If the axis of movement between the T and the center of gravity of the processing means is misaligned, the processing machine and the attachment will reciprocate as the two move back and forth, similar to the couple generated in the attachment in the fourth embodiment described above. A couple occurs that tries to make this happen. Therefore, it is desirable that the centers of gravity of both be configured to move on the same axis. The above also applies to the auxiliary weight 31 of the third embodiment, and it is desirable that the center of gravity of the auxiliary weight 31 is configured to move on the same axis as the center of the work W.

In addition, in the first to fourth embodiments, the workpiece protection
Although the four means are embodied as daples 4.16 and 28.40, the present invention is not limited thereto, and may be embodied, for example, in a chuck for gripping a workpiece. In addition, in all the first to fifth rows, due to the reaction force generated by counterways 1 to 6.18, 29°41.57, tables 4, 16, 28, 40. Although the reaction force generated by T is completely canceled out, depending on the application, it is not necessarily necessary to completely cancel it out. For example, in the case of kneeling that does not require high precision, it is sufficient to simply reduce the reaction force generated.

By the way, in the attachment of the third embodiment described above, the auxiliary weight 3 attached to the counterweight 29 is
To determine the number of 1s, it is necessary to measure ff1ft of the work W by δ1. This is not limited to attachments, but also applies to cases where the auxiliary weight 31 is provided in the (σ) grinding machine or vibration-proof equipment described above.

Therefore, how many auxiliary weights 3 should workers use in these devices?
It is conceivable to add a function to instruct whether or not 1 should be attached. Hereinafter, the attachment of the sixth embodiment, which has this function added to the attachment of the third embodiment, will be described as the first embodiment.
This will be explained according to Figures 1 to 13. In addition, the same parts as the attachment of the third embodiment are given the same numbers, and
omit the explanation.

As shown in FIG. 11.12, a rotation detection plate 61 is fixed to the crankshaft 24 of the attachment.
A through hole 61a is formed at a position 180° out of phase with the crank arm. A photocoupler 62 is provided on the rotation detection plate 61 at a position farthest from the table 28.

Further, a vibration detection sensor 63 is attached to the side surface of the main body 1 as an imbalance detection means.

On the other hand, as shown in FIG. 11, a display 64 is connected to the attachment configured as described above.
4 from 7 segment LED! A display unit 64atfi is provided as a display means for
Inside the photocoupler 62 and the photographing detection sensor 6 are installed.
A control section for operating the display section 64a based on the detection connection of No. 3 is installed inside.

Next, the electrical configuration of the control section will be described with reference to FIG. 13. The vibration detection sensor 63 of the attachment is connected to the CP
Connected to the input side of U66, and also connected to the photocoupler 6
2 is also connected to the input side of this CPU 66. The band pass filter 65 is also connected to the output side of the CP LJ 66, and a display unit driving means 67 is connected to the output side.
It is connected to the display section 64 via. CPtJ6
ROM68 and RAM69 are connected to ROM6.
8' stores a series of operating programs for this attachment.

Next, the operation of the attachment configured as described above will be explained.

First, as shown in Fig. 11, the attachment is fixed on the table of the processing machine, the workpiece W is fixed on the table 28 of this attachment, and an appropriate number of auxiliaries that are thought to have the same weight as the workpiece W are attached. Attach the weight 31 to the counterweight 29 and operate the attachment 1-.

If the auxiliary weight 31 is adjusted to the same W (fi) as the workpiece W, the reaction force generated by the movement of the table 28 on which the workpiece W is placed is generated by the movement of the counterweight 29 to which the auxiliary weight 31 is attached. It is canceled out by the reaction force.Therefore, no vibration occurs.

On the other hand, if the number of auxiliary ways 1-31 is not appropriate and the table 28 and the counterweight 29 do not have the same weight, vibrations occur with the same period as the reciprocating period. In addition, as described above, the table 28 and the counterweight 29
Since the respective reaction forces of 28 and 29 cancel each other out, when both 28 and 29 are not balanced like this, both 28 and 29
．． 29 ir! )'d minus mm can be assumed to be reciprocating at the same timing as either of the heavier sides.

On the other hand, if the number of auxiliary weights 31 is not appropriate and the table 28 and counterweight 29 do not have the same fil, vibrations occur with the same period as the reciprocating period. In addition, this state can be considered to be reciprocating at the same timing as the weight of the heavier side after subtracting the labor of both.

On the other hand, the vibration detection sensor 63 constantly detects vibrations in all frequency bands occurring throughout the attachment.
The detection signal is input to a bandpass filter 65. Further, the photocoupler 62 inputs a detection signal accompanying the rotation of the crankshaft 24 to the CPU 66.

Based on the detection signal from the photocoupler 62, the CPU 66 sends a control signal to the bandpass filter 65 so as to selectively pass only the frequency band that is the same as the rotation period of the crankshaft 4, that is, the reciprocating period of the daple 28 and the counterweight 29. Output.

Then, the band pass filter 65 passes only the detection signal of this frequency band, and the CPLJ 66 inputs this signal. The vibration indicated by this detection signal can be considered to be caused by an imbalance between the reaction forces of the table 28 and the counterweight 29, respectively.

On the other hand, the CPU 66 determines the force of the attachment and the movement of the Kunta weight 29 based on the detection signals from the pair of photocouplers 62. That is, when the photocoupler 62b outputs the detection signal, the CPU 66 determines that the counterweight 29, which had been moving to the right in FIG. 11, has turned back to the left.

The CPU 66 determines whether the direction of vibration that is expected to occur when the counterweight 29 turns back in the above-mentioned direction matches the actual direction of vibration based on the detection signal from the bandpass filter 65. . If the directions match, it is determined that the counterweight 29 is heavy, and if they do not match, it is determined that the counterweight 29 is light. - On the other hand, the CPU 66 determines how much the effect of the counterweight 29 should be changed in order to cancel this photographing based on the magnitude of the vibration generated in the attachment.

Its il'i east, CP (J 66 is counterway i
Determine how many auxiliary weights 31 attached to the counter weights 29 should be removed or how many auxiliary weights 31 should be attached to the counter weight 29, and assign positive and negative signs to the numbers. and display it on the display section.

In this way, the attachment of this embodiment has the display device 64.
The display section 64a can specifically display how many auxiliary weights 31 need to be removed or removed in order to demonstrate the imaging occurring in the attachment. Therefore, the operator can attach and detach the auxiliary first quay 1-31 in accordance with this display (P) to prevent the attachment from sliding and perform the grinding operation successfully.

In addition, since the display section 64a is always in the display state even during grinding work, even if the mold opening of the workpiece W becomes easier due to processing and the balance of reaction forces between the table 28 and the counterway 29 is lost, The worker can accurately manage the situation and deal with it.

Furthermore, the auxiliary way 1-3 displayed on the display section 64a
1 of 1 (!I number indirectly indicates the state of vibration 4T
Therefore, the operator can know whether the product has been machined under such vibration conditions, and based on this, the quality of the product, such as the machining accuracy, can be guaranteed.

-1 series, the attachment of this embodiment corresponds to the attachment 1 of claim 9, and the auxiliary weight 31 of the attachment, the imbalance detection means 63° 65 and the display means 64a of the first embodiment are If the machine is provided with 1 on the board, it corresponds to the processing machine of claim 10, and if these are provided in the swing J prevention device of the fifth embodiment, it corresponds to the jolting prevention 1F equipment of claim ε3.

In addition, in the attachments 1 to 1 of this sixth embodiment,
Although the specific number of auxiliary weights 31 to be attached and detached is displayed on the display section 64a, the weight of the auxiliary weights 31 to be attached or detached may be displayed instead, or the weight of the auxiliary weights 31 to be attached or detached may be displayed. The signal may display the amount of vibration, or may display vibrations in all frequency bands occurring in the attachment.

The present invention also applies to attachments that are not equipped with auxiliary ways 1 to 31, ω1 grinding machines, vibration prevention devices, etc. In this case, although it is not possible to reduce the amount of photographing, the product is You can tell whether the machine was machined in a vibrating state such as a rattle.

Further, in the attachment of the sixth embodiment, the display means is embodied as a digital display section 64a, but the display may be displayed in the following manner, for example, it may be embodied as an analog meter. In the attachment of this embodiment, the table 28 and the counterweight 29
The number of rotations of the crankshaft 24 was detected by the photocoupler 62 in order to detect the reciprocating period with
- The reciprocating motion of the table 28 or the counterways 1 to 29 may be directly detected by a switch.

Furthermore, although the attachment of this embodiment displays the unbalanced state using the display section 64a, a printer is connected in place of the display section 64a and the unbalanced state is recorded thereon.
It may also be possible to check the state after processing.

On the other hand, as explained in the surface grinding machine of the second embodiment, the amount of force "sinter weight 6.18.29.41.57 does not necessarily depend on the weight of tables 4, 16, 28, 40, T and processing means. It is not necessary to make them the same weight.The condition where the reaction forces generated by the reciprocating motion of both are balanced is m1 × α1 = m2 × α2 “nl: Weight of counterweight α1: Acceleration of counterweight rn2: Table or processing Weight α2 of the means: This is the acceleration of the table or processing means.

Therefore, while satisfying the above formula, the table 4°16.2
8,40. Counterweight for T6.18.29
．． 41.57 can be made much heavier and its acceleration during movement can be reduced. In this case, since the reciprocating stroke of the counterweight 6.18°29.41.57 is shortened, the space for providing it can be minimized. Also, on the contrary, tables 4.16, 28.40. The weight of the counterweight 6.18.29.41.57 is reduced relative to the T and processing means.
It goes without saying that the movement speed may be increased.

Further, by embodying the above idea, it is possible to obtain the same effect as when the weight of the auxiliary weight 31° in the third embodiment described in 0a is changed. In other words, the auxiliary weight 31 used to change the reaction force generated by the counterweight 29 by changing the amount of the counterweight 29 itself, but now it is possible to change the acceleration of the counterweight 29, that is, the stroke. If configured as follows, the generated reaction force can be changed in the same way. Below, the attachments of the 1st embodiment that embody this are shown in the 14th to 19th embodiments.
This will be explained according to the diagram.

As shown in Figure 14.15, the body 7 of the attachment
A small pulley 73 is attached to the output shaft of a drive motor 72 attached to the upper side of the drive motor 72, and the pulley 73 is attached to a large pulley 7 of a first crankshaft 74 attached to the drive motor 72.
5 and is connected by a belt 76. A rotation detection plate 77 is fixed to the first crankshaft 74.
A through hole 77a is formed at a position 180° out of phase with the crank arm. A photocoupler 78 is provided on the rotation detection plate 77 so as to be located on the right side in FIG.

A crank arm 7 is attached to the upper end of the first crankshaft 74.
48 and a crank bin 74b facing upward is formed, and one end of a connecting rod 79 is supported by the crank bin 74t). The other end of the connecting rod 79 is attached to one side of a daple 80 as a work holding means, which is linearly guided by a guide means (not shown) on the attachment body 71. Further, the counterway 1-81 can be linearly guided on the guide means in the same way as the table 80.

As shown in FIG. 83 is the first crankshaft 74
The large pulley 75 rotates in synchronization with the large pulley 75.
5 and a timing bell 1-84. The diameters of both pulleys 75 and 83 are the same, and the second crankshaft 82
The fixed arm 85 fixedly fixed to the crank arm 74a of the first crankshaft 74 is always positioned at a phase angle shifted by 180 degrees.

As shown in FIG. 17, a cylinder chamber 85a is formed in the fixed arm 85, and a movable arm 8G is slidably inserted into the cylinder seedling 5a. Movable arm 86
A crank pin 86a is formed at the tip of the crank pin 86a so as to face in the -F direction, and the crank pin 86a is connected to the aforementioned guide means 81 and the counterway 1 of L by a connecting rod 87.

A beam motor 88 is installed near the side of the second crankshaft 82 on the main body 71, and the output shaft 88a of the motor 88 facing downward is connected to a sliding hole 88 that opens on the upper surface of the main body 71.
Located within. A cylindrical piston 90 with a bottom is disposed in the sliding hole 89, and a female thread formed in the piston 90 is threadedly engaged with a male thread formed in the output shaft 88a of the servo motor 88.

A communication hole 91 is formed below the piston 90 in the sliding hole 89, and the communication hole 91 is connected to the second crankshaft 82.
It communicates with a groove 92 formed in an annular shape around the lower part of the holder. A communication hole 93 is formed in the second crankshaft 82 along its axial direction, and one end of the communication hole 93 communicates with the groove 92, and the other end communicates with the cylinder chamber 85a of the fixed arm 85. It's communicating. In addition, below the sliding hole 89 and the groove 90, both speed through holes 91 and 93, and a concave groove 9°
2 and the cylinder chamber 85a are filled with hydraulic oil in advance.

Therefore, as shown in FIGS. 17 and 18, when the output shaft 88a rotates with the operation of the servo motor 88,
The screw 90 is moved up and down by the screw engagement between the male thread of the output shaft 88a and the female thread of the piston 90. moreover,
The hydraulic oil moving in the dual-speed passage holes 91 and 93 in accordance with this vertical movement causes the movable arm 86 in the cylinder chamber 85a to move out and away from the fixed arm 85, and the second crankshaft 82 is substantially Change the crank arm arrangement.

The servo motor 88, the piston 90, the fixed arm 85, and the movable arm 86 constitute a reaction force changing means. In addition, in the attachment of this example, this reaction force changing means and the counterweight 81 constitute a vibration damping device 1F.

On the other hand, a rotational motion detection sensor 94 is attached to the side surface of the attachment body 71, and the sensor detects only the magnitude of vibrations in all frequency bands occurring throughout the attachment.

J3, the electrical configuration of the attachment of this embodiment is as shown in FIG. and a motor drive circuit 95 are added, and the same numbers are given to the parts. However, the action of the CPU 66 as a control means is different as will be described later.

Next, the operation of the attachment configured as described above will be explained with reference to FIG. 19.

2, when the drive morph 2 of the attachment with the workpiece W fixed on the table 80'2 is operated, the same motor 7
2 rotates the first crankshaft 74 and also rotates the second crankshaft 82 via the timing belt 84. As mentioned above, the crank arm 74a of the first crank@74 and the fixed arm 85 of the second crankshaft 82
Since the phase between the two crankshafts 74 and
．． Reference numeral 82 causes the daple 80 and the counterweight 81 to reciprocate in opposite directions in synchronization with each other.

On the other hand, the CP LJ 66 always selects and passes only the frequency band that is the same as the reciprocating period between the table 80 and the counterways l to 81.
A control signal is output to 5. As a result, the detection signal inputted from the vibration detection sensor 63 to the CPU 66 is only one caused by the unbalance between the reaction forces of the table 80 and the counterweight 81.

Then, in step 1, the CPU 66 operates the servo motor 88 via the motor drive circuit 95 to change the crank arm of the second crankshaft 82 to a predetermined quality. Next, in step 2, the CPU 66 receives the detection signal from the bandpass filter 65 when the first coupler 78 outputs a detection signal, that is, when the counterweight 81 is at the turning point of its reciprocating path. Based on this, the size of the image taken at that moment is detected and stored.

Next, in step 3, the CPU 66 operates the servo motor 88 to cause the movable arm 86 to protrude from the circumferential arm 85 of the second crankshaft 82.
Lengthen the crank arm of step 2 by the specified amount. As a result, the counterweight 8 can be moved without changing the reciprocating period.
This means that the stroke of 1 can be made longer, in other words, the acceleration during movement can be increased, and the reaction force generated as the counterweight 81 moves has become larger. Furthermore, in step 4, the CPIJ 66 detects and stores the vibration in this state using the same procedure as in step 2 described above.

Then, in step 5, the CPLJ 66 compares both images 110 to determine an increase or decrease in the unbalance of the reaction force between the table 80 and the counterweight 81, and uses the counter to eliminate the vibration detected in step 4. weight 81
Should the reaction force generated by the servo motor 88 be increased or decreased?
Determine in which direction the should be rotated. In other words, if the second vibration value is smaller than the first vibration value, it is determined that the capture can be resolved by roughly extending the crank arm; If it is large, it is determined that the vibration can be eliminated by shortening the crank arm.

Furthermore, in this step 5, the CPLJ 66 determines how much the flow of the counterweight 81 should be changed in order to eliminate the vibration detected in step 6 based on the difference between the two vibration values. Well, I have changed the crank arm length of this second crank 1IiIl182.
It is determined how far the servo motor 88 should be rotated in order to Then, in step 6, the CPU
66 changes the crank arm configuration of the second crankshaft 82 by rotating the servo motor 88 in a predetermined direction by a predetermined amount via the Tanabata drive circuit 95 in accordance with the calculation result of step 5. As a result, the counterweight 8
1 is the reciprocating motion] ~ loke, that is, the acceleration during movement 1. As α changes, the reaction force generated by the weight 81 also changes accordingly.

Roughly speaking, in step 7, the CPU 66 detects and stores the vibration in this state using the same procedure as in steps 4 and 6 described above, and in step 8, if the vibration value is less than a predetermined value, it performs a series of correction operations. is completed, and if the value is equal to or greater than the predetermined value m, the process returns to step 3, and the steps described above are not repeated.

Note that the stroke change of the counterweight in step 5 described above is made as small as possible in order to avoid an increase in vibration during machining of the workpiece W.

In this way, according to the attachment of this embodiment, even if the reaction force generated by the table 80 changes due to l[ of the workpiece W, the movement stroke of the counterweight 81 is changed to change the reaction force generated by the weight 81. By balancing the forces, vibrations can be prevented from occurring.

Further, the attachment of the third embodiment described above can only change the reaction force generated by the counterweight 29 in stages according to the number of auxiliary weights 31, but the attachment of the seventh embodiment can change the reaction force generated by the counterweight 29 in stages. Since the movement stroke of the counterweight 81 can be changed steplessly, the reaction force generated by the counterweight 81 can also be changed steplessly. Therefore, a more reliable 1F vibration damping effect can be obtained.

Furthermore, the attachment of the seventh embodiment can change the reaction force generated by the counterweight 81 even during processing operations. Therefore, unlike the attachment in the third embodiment, the operator does not have to attach or detach the auxiliary weight 31 every time the workpiece ~■ is changed, and the operator can lift the workpiece W by 4T during the machining operation. Even in the case of a decrease, vibration can be prevented by changing the reciprocating movement of the counterweight 81 according to the change.

Above) As shown above, the attachment of this example is
It corresponds to the attachment of l113, and further claims 11
This is a concrete embodiment of the method. Then, add TyJ with the same configuration as the attachment of this embodiment.

If it is embodied, it corresponds to the addition of claim 14, and if it has the same structure, it corresponds to the vibration prevention device of claim 12.

13. Although the attachment of this seventh embodiment uses a crank mechanism as the drive source for the counterweight 81,
For example, as in the vibration prevention device of the fifth embodiment, 1 Nervo -9 is set as the drive lh'& of the counterways 1 to 81, and when changing the reaction force of the weight 81, the rotation speed of the servo motor is changed. Accordingly, the reciprocating stroke of the counter hand 1-81 may be changed in synchronization with the reciprocating movement of the table 80.

In addition, the vibration detection function by the vibration detection spring 163 is omitted from the attachment of the seventh embodiment, and the piston 90 is manually moved up and down to cause the fixed arm 85 or the movable arm 86 to emerge and retract. The length of the crank arm of the crankshaft 82 can be changed, and the mechanism for changing the crank arm arrangement using hydraulic pressure can be omitted, and instead, a turnbuckle can be inserted in the crank arm, and the length of the crank arm can be changed by adjusting the turnbuckle. It may be modified to change the reciprocating stroke of the counterway 1-81. In these cases as well, since the reaction force generated by the counterweight 81 can be changed, the same effects as in the attachment of the third embodiment can be obtained.

On the other hand, the same auxiliary weight 31 as the attachment of the second embodiment is added to the counterweight 81 of the attachment of the seventh embodiment, and after roughly adjusting J3 using this auxiliary weight 31, the second crankshaft 82 is adjusted. The reaction force between the table 80 and the force I Kunter weight 81 may be completely balanced by changing the crank arm length. With this configuration, it is possible to accommodate a wider range of weights of the work W.

In addition, the symbol 'a64' of the sixth embodiment is added to the attachment of the seventh embodiment, and the reaction force changing means is 85°86.88.
．． 90 is operating normally and the reaction forces of the table 80 and counterweight 81 are balanced.

[Effects of the Invention] Since the present invention is configured as described above, it has the following advantages for industrial use.

In the vibration prevention device according to the first aspect, vibration of the processing machine caused by reciprocating motion of the processing means and the workpiece holding means can be prevented, and the accuracy of the processing machine can be improved.

In the attachment equipped with the vibration prevention device according to claim 2, a vibration generating V is provided instead of the workpiece feeding device of the processing machine.
The workpiece can be reciprocated without any movement, thereby increasing the accuracy of the processing machine.

In the processing machine according to the third aspect, the attachment J according to the second aspect can perform highly accurate machining.

The processing machine of claim rJ'i 4 has a vibration prevention device built into its own feed mechanism, so that highly accurate processing can be performed.

In the processing machine according to claim 5, since the driving source is shared,
It would be possible to provide this processed gravel at a low price.

In the processing machine according to the sixth aspect of the invention, there is no risk of deterioration of processing accuracy due to heat of the drive source.

In the counterweight according to claim 7, it is possible to provide a counterweight that can change its own weight according to the amount of workpieces.

In the vibration prevention device according to claim 3, the attachment member l- according to claim 9, and the processing machine according to claim 10, the vibration state (j-yield) can be reliably grasped.

In the method for changing the reaction force according to claim 11, the reaction force when moving to the same way 1 can be changed without changing the weight of the counterweight.

In the vibration prevention device according to claim 12, the attachment provided with the vibration prevention device according to claim 13, and the attachment provided with the vibration prevention device according to claim 14, even if the weight of the workpiece changes, it is possible to obtain the effect of preventing one jolt.

[Brief explanation of the drawing]

1.2 shows a first embodiment in which the present invention is embodied in a plane ω1 grinder 18 driven by a hydraulic cylinder, FIG. 1 is a cross-sectional view of the grinding machine, FIG. 2 is a side cross-sectional view, and FIG. 4 is a cross-sectional view of a second embodiment in which the present invention is embodied in a planar 1111m board driven by a ribo motor, FIG. 4 is a cross-sectional view of a third embodiment in which the present invention is embodied in an attachment equipped with a vibration prevention device, and FIG.
The figures are also a plan view, (Figure 5 is an explanatory diagram showing the outline of the modification of the layer 1- of the attachment l- of the third embodiment, and Figure 7 is an illustration of the present invention equipped with an anti-slip device. FIG. 8 is a plan view of the fourth embodiment resting on another attachment;
The figure is a plan view showing another example of the drive special that is applied to the attachment of the fourth embodiment, and FIG. 9 is a plan view showing another example.
The top view and FIG. 10 show the state in which the fifth embodiment of the present invention is attached to a processing machine, which embodies the invention as a vibration-proof IJ device. 11 is a sectional view, FIG. 12 is a plan view,
Figure 13 shows the electrical configuration, Figures 14-19.
The figures show the attachment 1 of the seventh embodiment that can change the stroke of the counterweight, Fig. 14 is a sectional view, Fig. 15 is a plan view, Fig. 16 is a block diagram showing the electrical configuration, and Fig. 17 is Fig. 18 is a partially enlarged sectional view when the stroke is long, Fig. 19 is a partial enlarged sectional view when the stroke is short, Fig. 19 is the flowchart 1 to Fig. 20 is the reciprocation of the grindstone 1 to FIG. 3 is a perspective view of a moving grinder. Hydraulic cylinder 3 (driving means), tables 4, 16, 28
．． 40,80. T (work holding means), counterweight 6.18.29.41, 57°81.97, servo [--913 (driving means), motor 22 (driving means),
Auxiliary weight 31, swing/extraction sensor 63 (imbalance detection means), display 64a (display means), bandpass filter 65 (imbalance detection means), CPU 66 (control means), fixed arm 85 (reaction force change means) , Possible IJJ arm 86 (reaction force changing means), servo motor 88 (reaction force changing means)
, piston 90 (reaction force changing means), vibration detection sensor 91
(Unbalance detector stage), grindstone unit 1 to 96 (processing means)
Grinding machine S0 Patent applicant Nagase 1st Co., Ltd. T representative
Person Patent Attorney On Fn Hironobu II Figure 19

Claims (1)

[Claims] 1. It can be attached to a processing machine (S) equipped with a processing means such as a grindstone that performs reciprocating motion and/or a work holding means (T) that performs reciprocating motion; A vibration prevention device including a counterweight (57) that reciprocates in a direction opposite to the moving direction of the processing means and/or work holding means (T) of the machine (S) in synchronization with the reciprocating movement of the processing means and/or workpiece holding means (T). 2. Work holding means (28, 40
), and a counterweight (
Attachment equipped with a vibration prevention device consisting of 29, 41). 3. A processing machine in which the attachment according to claim 2 is attached to its own workpiece holding means. 4. Processing means (96) such as a grindstone that reciprocates and/or workpiece holding means (4, 16) that reciprocates, synchronized with the reciprocating movement of the processing means and/or workpiece holding means (4, 16). A processing machine consisting of a counterweight (6, 18, 97) that reciprocates in the opposite direction to the direction of movement of the counterweight. 5. Drive means (3) of the processing means or work holding means (4, 16) as the drive means of the counterweights (6, 18)
, 13). 6. Claim 5, wherein the counterweight (29) is provided with a drive means (22) for reciprocating the processing means and/or work holding means (28) and the counterweight (29).
Processing machine described. 7. Detachable auxiliary weight for weight adjustment (
31) Any one of claims 1 to 5 is attached.
Counterweight as described in section. 8. Imbalance detection means (63, 65) for detecting the imbalance of the reaction force generated between the processing means and/or workpiece holding means (T) and the counterweight (57) are provided, and the detection results are displayed. 2. The vibration prevention device according to claim 1, further comprising display means (64a) for displaying. 9. Imbalance detecting means (63, 65) for detecting the unbalance of the reaction force generated between the work holding means (28, 40) and the counterweight (29, 41) is provided, and a display for displaying the detection results. 3. An attachment with a vibration damping device according to claim 2, further comprising means (64a). 10. Processing means and/or work holding means (4, 16)
Imbalance detection means (63, 65) for detecting the unbalance of the reaction force generated by the counterweight (6, 18) and the counterweight (6, 18) are provided, as well as display means (64) for displaying the detection result.
4. The processing machine according to claim 3, further comprising: a). 11. A reaction force changing method of changing the reaction force generated by the counter weight (81) by changing the acceleration when the counter weight (81) moves. 12. Imbalance detection means (94, 65) for detecting the unbalance of the reaction force generated between the processing means and/or workpiece holding means (T) and the counterweight (57), and Reaction force changing means (85, 86, 88, 90) for changing acceleration during movement are provided, and reaction force changing means (85, 86, 88, The vibration prevention device according to claim 1, further comprising control means (66) for controlling the vibration damping device (90). 13. Work holding means (80) and counterweight (8
1), and a reaction force changing means (94, 65) for detecting the unbalance of the reaction force generated with the counterweight (81).
85, 86, 88, 90), and a reaction force changing means (85) according to the detection result of the imbalance detecting means (94, 65).
, 86, 88, 90). 3. The attachment according to claim 2, further comprising control means (66) for controlling the vibration damping device. 14. Processing means and/or work holding means (4, 16)
and a counterweight (6, 18), and includes an imbalance detection means (94, 65) for detecting an imbalance of reaction force generated between the counterweight (6, 18) and a reaction force changing means for changing the acceleration when the counterweight (81) moves. (85, 86, 88, 90)
The processing machine according to claim 4, further comprising a control means (66) for controlling the reaction force changing means (85, 86, 88, 90) according to the detection result of the imbalance detecting means (94, 65). .