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JPH01253713A - Production of liquid crystal display element - Google Patents

Production of liquid crystal display element

Info

Publication number
JPH01253713A
JPH01253713A JP63081558A JP8155888A JPH01253713A JP H01253713 A JPH01253713 A JP H01253713A JP 63081558 A JP63081558 A JP 63081558A JP 8155888 A JP8155888 A JP 8155888A JP H01253713 A JPH01253713 A JP H01253713A
Authority
JP
Japan
Prior art keywords
substrate
liquid crystal
spacer particles
crystal display
soln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63081558A
Other languages
Japanese (ja)
Inventor
Yoshio Iwai
義夫 岩井
Hisahide Wakita
尚英 脇田
Tsuyoshi Kamimura
強 上村
Hiroyuki Onishi
博之 大西
Kazuhiro Jiyouten
一浩 上天
Satoru Kimura
哲 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63081558A priority Critical patent/JPH01253713A/en
Publication of JPH01253713A publication Critical patent/JPH01253713A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PURPOSE:To prevent the flocculation of spacer particles so as to maintain the specified inter-substrate distance and to improve display grade by dispersing the particles into an org. soln. and coating the soln. on a substrate. CONSTITUTION:A thin film 2 consisting of indium tin oxide is formed by an EB vapor deposition method on the glass substrate 1. A photoresist 3 is then coated thereon and is subjected to patterning and dry etching to form transparent electrodes 4. The spacer particle 6 consisting of glass beads are dispersed into the org. soln. essentially consisting of ethanol contg. a silicon compd. and while the rotating speed is controlled by a spinner, the soln. is coated on the substrate and is sintered, by which the thin insulating film 5 consisting of SiO2 is formed thereon; in addition, the particles 6 are uniformly dispersed and stuck thereto to a desired thickness. Polyimide is then coated thereon to form the oriented film 7 and after the film is rubbed, the substrate is stuck to another substrate subjected to the similar treatments. by which the above-mentioned element is completed.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、基板間距離を均一に制御できる液晶表示素子
の製造法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a liquid crystal display element that can uniformly control the distance between substrates.

従来の技術 近年、ニューメディア機器、OA機器への適用をめざし
て、液晶表示パネルの大面積化、大容量表示化が盛んに
進められている。大面積化、大容量化に伴って、従来以
上に大面積にわたって精度よく液晶表示パネルの基板間
距離(ギャップ)を均一に制御する必要が生じてきた。
BACKGROUND OF THE INVENTION In recent years, efforts have been made to increase the area and capacity of liquid crystal display panels for application to new media equipment and OA equipment. With the increase in area and capacity, it has become necessary to uniformly control the distance (gap) between substrates of a liquid crystal display panel over a larger area with greater accuracy than ever before.

従来より、液晶表示パネルのギャップ制御の方法として
、ガラスピーズ、樹脂ビーズ等のスペーサ粒子を空気中
に散布し、それを基板上に沈下。
Traditionally, the gap control method for LCD panels involves scattering spacer particles such as glass beads or resin beads into the air and allowing them to settle onto the substrate.

分散させるという乾式分散工法が広(用いられている。The dry dispersion method is widely used.

発明が解決しようとする課題 乾式分散工法では、基板の帯電、スペーサ粒子の帯電、
吸湿等によりスペーサ粒子が凝集して、基板上への分散
が均一にならないことがしばしば生じる。凝集した部分
では、基板貼合わせ時にギャップが厚くなるため、ギャ
ップの不均一性を生じたり、液晶の配向膜れを引き起し
、その結果表示品位の低下を招くという課題があった。
Problems to be Solved by the Invention In the dry dispersion method, charging of the substrate, charging of spacer particles,
Spacer particles often aggregate due to moisture absorption, etc., and are not uniformly dispersed on the substrate. In the agglomerated areas, the gap becomes thicker when the substrates are bonded together, resulting in non-uniformity of the gap and failure of the alignment film of the liquid crystal, resulting in a reduction in display quality.

本発明は上記課題に鑑み、ギャップを均一に制御できる
液晶表示素子の製造法を提供するものである。
In view of the above problems, the present invention provides a method for manufacturing a liquid crystal display element that can uniformly control the gap.

課題を解決するための手段 上記課題を解決するために、本発明の液晶表示素子の製
造法は、基板間距離を一定に保つ作用を存するスペーサ
粒子を有機溶液中に分散せしめ、前記有機溶液を基板上
に塗布し、前記スペーサ粒子を基板上に分散するもので
ある。
Means for Solving the Problems In order to solve the above problems, the method for manufacturing a liquid crystal display element of the present invention involves dispersing spacer particles, which have the function of keeping the distance between substrates constant, in an organic solution. The spacer particles are applied onto a substrate and the spacer particles are dispersed onto the substrate.

作用 上記製造法によれば、スペーサ粒子を有機溶液中に分散
させているので、スペーサ粒子の帯電。
Effect: According to the above manufacturing method, since the spacer particles are dispersed in the organic solution, the spacer particles are not electrically charged.

吸湿等による凝集を防止でき、スピンコード法等を用い
て塗布して、スペーサ粒子を均一に分散させることによ
って、基板間距離を均一に制御できる。
It is possible to prevent agglomeration due to moisture absorption, etc., and by uniformly dispersing spacer particles by coating using a spin code method or the like, it is possible to uniformly control the distance between the substrates.

実施例 以下に本発明の一実施例ついて図面を参照しながら説明
する。
EXAMPLE An example of the present invention will be described below with reference to the drawings.

第1図(al〜+d)は、本発明の液晶表示素子の製造
法の一例を示す工程図である。
FIG. 1 (al to +d) is a process diagram showing an example of the method for manufacturing a liquid crystal display element of the present invention.

各図の順序に従って工程を説明すると、第1図fa+に
示される様に、ガラス基板1上にEB蒸着法により酸化
インジュウム錫(I To)の薄膜2を形成する。IT
Oの表面抵抗値は1007口である。
To explain the steps according to the order of each figure, as shown in FIG. 1 fa+, a thin film 2 of indium tin oxide (I 2 To) is formed on a glass substrate 1 by EB evaporation. IT
The surface resistance value of O is 1007 points.

その後、フォトレジスト3をスピンナーにより塗布する
。第1図(b)に示す様に、所定の方法によりパターニ
ングを行い、ドライエツチングを行うことにより透明電
極4を形成する。
Thereafter, photoresist 3 is applied using a spinner. As shown in FIG. 1(b), patterning is performed by a predetermined method and dry etching is performed to form a transparent electrode 4.

次にケイ素化合物を含有するエタノールを主成分とする
有機溶液中に、2μmφのガラスピーズからなるスペー
サ粒子6を分散させる。
Next, spacer particles 6 made of glass beads with a diameter of 2 μm are dispersed in an organic solution containing a silicon compound and mainly composed of ethanol.

第1図(C)に示す様に、上記ガラス基板上に上記有機
溶液をスピンナーによって塗布した後焼結すると、Si
O□の絶縁薄膜5が形成され、その上にスペーサ粒子6
が凝集することなく均一に分散される。
As shown in FIG. 1(C), when the organic solution is applied onto the glass substrate using a spinner and then sintered, Si
An insulating thin film 5 of O□ is formed, and spacer particles 6 are formed thereon.
are uniformly dispersed without agglomeration.

次に第1図[dlに示す様に、ポリイミドを塗布して配
向膜7を形成し、ラビングを施した後、上述と同様の処
理を行った他のガラス基板と貼合せる。
Next, as shown in FIG. 1[dl], polyimide is applied to form an alignment film 7, rubbed, and then bonded to another glass substrate that has been treated in the same manner as described above.

第2図は、スペーサ粒子6を分散させた有機溶液をスピ
ンナーによって塗布した時の基板回転数とギャップとの
関係を示したものである。基板回転数を制御することに
より、ギャップを1.9μmから2.4μmまで均一に
制御することができる。
FIG. 2 shows the relationship between the substrate rotation speed and the gap when an organic solution in which spacer particles 6 are dispersed is applied by a spinner. By controlling the substrate rotation speed, the gap can be uniformly controlled from 1.9 μm to 2.4 μm.

上述の製造法により作製した液晶表示素子は、パネル全
体にわたってギャップが均一であるため表示ムラが見ら
れず、従来の乾式分散法と比較すると、優れた表示品位
を得ることができ、工法的にも極めて容易である。
The liquid crystal display element manufactured by the above manufacturing method has a uniform gap over the entire panel, so there is no display unevenness, and compared to the conventional dry dispersion method, it is possible to obtain excellent display quality, and the manufacturing method is It is also extremely easy.

次に本発明の他の実施例について説明する。Next, other embodiments of the present invention will be described.

第1図(C1において、有機溶液中に分散させるスペー
サ粒子の密度をQ、l w t%、Q、2wt%。
FIG. 1 (In C1, the density of spacer particles dispersed in the organic solution is Q, l wt%, Q, 2wt%.

Q、3wt%と変化させて、スピンナーにより塗布する
。第3図は、有機溶液中でのスペーサ粒子密度とギャッ
プとの関係を示したものである。スペーサ粒子密度をパ
ラメータとすることによりギャップを均一に制御でき、
上述の実施例同様、優れた表示品位が得られる。
Q: Change the amount to 3wt% and apply with a spinner. FIG. 3 shows the relationship between spacer particle density and gap in an organic solution. The gap can be controlled uniformly by using the spacer particle density as a parameter.
Similar to the embodiments described above, excellent display quality can be obtained.

本実施例では、スペーサ粒子径を2μmとしたが、スペ
ーサ粒子の大きさを適宜選択することによって、任意の
ギャップにすることができる。またスペーサ粒子を配向
材を含む有機溶液中に分散し、これを塗布しても上述と
同様、均一なギャップ制御が行える。
In this example, the spacer particle diameter was 2 μm, but any gap can be formed by appropriately selecting the size of the spacer particles. Further, even if spacer particles are dispersed in an organic solution containing an alignment material and applied, uniform gap control can be achieved in the same way as described above.

発明の効果 本発明の液晶表示素子の製造法は、スペーサ粒子を有機
溶液中に分散させて塗布するので、スペーサ粒子の凝集
を防止でき、均一なギャップとなるので、容易に表示品
位の向上を図れ、非常に大きな効果がある。
Effects of the Invention In the method for manufacturing a liquid crystal display element of the present invention, spacer particles are dispersed in an organic solution and applied, which prevents agglomeration of spacer particles and creates a uniform gap, making it easy to improve display quality. It has a huge effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の液晶表示素子の製造法の工程図、第2
図は基板回転数とギャップとの関係を示したグラフ、第
3図はスペーサ粒子密度とギャップとの関係を示したグ
ラフである。 5・・・・・・絶縁薄膜、6・・・・・・スペーサ粒子
、7・・・・・・配向膜。 代理人の氏名 弁理士 中尾敏男 はか1名l−−カバ
ラスX板 8− フオへレンヌb 4− 透η危し翫 、1−−一肥縁簿臘 6−一−ス ヘ’−46子 7− 配旬項 第1図 、q 第2図 差種0敦数 第3図 ズX−ブ道了、*)icWt7−ン
FIG. 1 is a process diagram of the method for manufacturing a liquid crystal display element of the present invention, and FIG.
The figure is a graph showing the relationship between the substrate rotation speed and the gap, and FIG. 3 is a graph showing the relationship between the spacer particle density and the gap. 5...Insulating thin film, 6...Spacer particles, 7...Alignment film. Name of agent: Patent attorney Toshio Nakao 1 name - Cabarrus 7- Distribution term Figure 1, q Figure 2 Difference type 0 Atsushi number Figure 3 Zu-Budoryo, *)icWt7-n

Claims (5)

【特許請求の範囲】[Claims] (1)基板間距離を一定に保つ作用を有するスペーサ粒
子を有機溶液中に分散せしめ、前記有機溶液を基板上に
塗布し、前記スペーサ粒子を基板上に分散させることに
より基板間距離を均一に保つことを特徴とする液晶表示
素子の製造法。
(1) Spacer particles that have the effect of keeping the distance between the substrates constant are dispersed in an organic solution, the organic solution is applied onto the substrate, and the distance between the substrates is made uniform by dispersing the spacer particles on the substrate. A method for manufacturing a liquid crystal display element characterized by maintaining
(2)有機溶液中に分散させるスペーサ粒子の濃度を変
化させ、基板上に分散させるスペーサ粒子の密度を制御
することにより基板間距離を制御することを特徴とする
請求項(1)記載の液晶表示素子の製造法。
(2) The liquid crystal according to claim (1), wherein the distance between the substrates is controlled by changing the concentration of spacer particles dispersed in the organic solution and controlling the density of the spacer particles dispersed on the substrates. Manufacturing method for display elements.
(3)スペーサ粒子を分散させた有機溶液をスピンナー
を用いて塗布し、塗布時の基板回転数を変化させること
により基板間距離を制御することを特徴とする請求項(
1)または請求項(2)記載の液晶表示素子の製造法。
(3) An organic solution in which spacer particles are dispersed is applied using a spinner, and the distance between the substrates is controlled by changing the number of rotations of the substrates during application.
1) or the method for manufacturing a liquid crystal display element according to claim (2).
(4)有機溶液が液晶配向材を含有することを特徴とす
る請求項(1)記載の液晶表示素子の製造法。
(4) The method for manufacturing a liquid crystal display element according to claim (1), wherein the organic solution contains a liquid crystal aligning material.
(5)有機溶液が絶縁材を含有し、前記絶縁材が基板上
で絶縁薄膜を形成することを特徴とする請求項(1)記
載の液晶表示素子の製造法。
(5) The method for manufacturing a liquid crystal display element according to claim (1), wherein the organic solution contains an insulating material, and the insulating material forms an insulating thin film on the substrate.
JP63081558A 1988-04-01 1988-04-01 Production of liquid crystal display element Pending JPH01253713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63081558A JPH01253713A (en) 1988-04-01 1988-04-01 Production of liquid crystal display element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63081558A JPH01253713A (en) 1988-04-01 1988-04-01 Production of liquid crystal display element

Publications (1)

Publication Number Publication Date
JPH01253713A true JPH01253713A (en) 1989-10-11

Family

ID=13749618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63081558A Pending JPH01253713A (en) 1988-04-01 1988-04-01 Production of liquid crystal display element

Country Status (1)

Country Link
JP (1) JPH01253713A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6208391B1 (en) 1997-12-03 2001-03-27 Nec Corporation LCD device with a built-in electroluminescent body and method of producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6208391B1 (en) 1997-12-03 2001-03-27 Nec Corporation LCD device with a built-in electroluminescent body and method of producing the same

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