JPH01161026A - Plasma polymerization membrane and formation thereof - Google Patents
Plasma polymerization membrane and formation thereofInfo
- Publication number
- JPH01161026A JPH01161026A JP31835087A JP31835087A JPH01161026A JP H01161026 A JPH01161026 A JP H01161026A JP 31835087 A JP31835087 A JP 31835087A JP 31835087 A JP31835087 A JP 31835087A JP H01161026 A JPH01161026 A JP H01161026A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- low
- gas
- treated
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 6
- 238000006116 polymerization reaction Methods 0.000 title description 7
- 230000015572 biosynthetic process Effects 0.000 title 1
- 239000007789 gas Substances 0.000 claims abstract description 17
- 238000009832 plasma treatment Methods 0.000 claims abstract description 16
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims abstract description 11
- -1 polyethylene Polymers 0.000 claims abstract description 9
- 125000003368 amide group Chemical group 0.000 claims abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims abstract description 4
- 150000001335 aliphatic alkanes Chemical class 0.000 claims abstract description 4
- 150000001336 alkenes Chemical class 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004698 Polyethylene Substances 0.000 abstract description 4
- 229920000728 polyester Polymers 0.000 abstract description 4
- 229920000573 polyethylene Polymers 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 3
- 239000002861 polymer material Substances 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 239000004677 Nylon Substances 0.000 abstract description 2
- 239000004743 Polypropylene Substances 0.000 abstract description 2
- 229920002978 Vinylon Polymers 0.000 abstract description 2
- 125000002947 alkylene group Chemical group 0.000 abstract description 2
- 239000000835 fiber Substances 0.000 abstract description 2
- 229920005615 natural polymer Polymers 0.000 abstract description 2
- 229920001778 nylon Polymers 0.000 abstract description 2
- 239000004033 plastic Substances 0.000 abstract description 2
- 229920003023 plastic Polymers 0.000 abstract description 2
- 229920001155 polypropylene Polymers 0.000 abstract description 2
- 229920001059 synthetic polymer Polymers 0.000 abstract description 2
- 210000002268 wool Anatomy 0.000 abstract description 2
- 229920001477 hydrophilic polymer Polymers 0.000 abstract 1
- 229920002239 polyacrylonitrile Polymers 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 17
- 150000001875 compounds Chemical class 0.000 description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- 229930195733 hydrocarbon Natural products 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 239000003599 detergent Substances 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N Propene Chemical compound CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- KDKYADYSIPSCCQ-UHFFFAOYSA-N but-1-yne Chemical group CCC#C KDKYADYSIPSCCQ-UHFFFAOYSA-N 0.000 description 2
- IAQRGUVFOMOMEM-UHFFFAOYSA-N but-2-ene Chemical compound CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001600 hydrophobic polymer Polymers 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229920000271 Kevlar® Polymers 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- QNRMTGGDHLBXQZ-UHFFFAOYSA-N buta-1,2-diene Chemical compound CC=C=C QNRMTGGDHLBXQZ-UHFFFAOYSA-N 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- XNMQEEKYCVKGBD-UHFFFAOYSA-N dimethylacetylene Natural products CC#CC XNMQEEKYCVKGBD-UHFFFAOYSA-N 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 125000005677 ethinylene group Chemical group [*:2]C#C[*:1] 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- 239000004761 kevlar Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- MWWATHDPGQKSAR-UHFFFAOYSA-N propyne Chemical group CC#C MWWATHDPGQKSAR-UHFFFAOYSA-N 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野 〕
本発明は、プラズマ重合膜及びその生成方法に関するも
ので、この生成された重合膜によりコートされた疎水性
高分子材料の親水性化などの表面改質に利用されるもの
である。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a plasma polymerized film and a method for producing the same, and the present invention relates to a plasma polymerized film and a method for producing the same. It is used for surface modification.
低温プラズマ処理による疎水性高分子材料の表面親水化
なとの人面改ｒ１方法としては、アルゴン＜Ａ ｒ）、
窒Ｆ （Ｎ ２ ）、酸素（０２）、アンモニア（ＮＨ
ｌ）などの各種カス笠による表面１■化（プラズマエツ
チング）や、カルボキシル基、水酸基、アミン基などの
基をに面導入するｆヒ学（１３飾法（インコーポレーシ
ョン）なとが知られている。The surface modification r1 method of making the surface of a hydrophobic polymer material hydrophilic by low-temperature plasma treatment includes argon <A r),
Nitrogen F (N 2 ), oxygen (02), ammonia (NH
It is known that the surface is made into a single layer (plasma etching) using various types of shavings such as 1), and 1. There is.
しかし、上記処理法では、表面にできた親水性成分は、
経時的に固体内部に入り込み、効果か弱くなってしまう
欠点がある。However, in the above treatment method, the hydrophilic components formed on the surface are
It has the disadvantage that it penetrates into the solid body over time, weakening its effectiveness.
又、低温プラズマ処理として、有機物の気体で低温プラ
ズマを発生させ、有機物の１今薄膜を生成するプラズマ
ｆｆｉ合法がある。Further, as a low-temperature plasma treatment, there is a plasma ffi method in which a low-temperature plasma is generated using an organic gas to form a thin film of the organic material.
このプラズマ重音法では、コーディング速度や生成ポリ
マーで構造が、モノマ゛−構造から推定できないこと、
及び親水性を期待できない欠点笠があるが、基板Ｉ＼の
素首性が良好で、表面形状に関係なく均一な重きコーテ
イング膜が得られる利点がある。In this plasma overtone method, the structure cannot be estimated from the monomer structure due to the coding speed and the generated polymer.
Although it has the disadvantage that hydrophilicity cannot be expected, it has the advantage that the bare head of the substrate I\ is good and a uniform heavy coating film can be obtained regardless of the surface shape.
従って、親水性のプラズマ重き膜を疎水性高分子表面に
生成すれば、耐久性のある親水性、防７り性、防曇性な
どの性能が期待されるのである。Therefore, if a hydrophilic plasma-heavy film is formed on the surface of a hydrophobic polymer, durable hydrophilic properties, anti-scratch properties, anti-fogging properties, etc. are expected.
第１の発明は、アミド基を含んだプラズマ重合膜であり
、第２の方法の発明は、分子中の総炭素数が１から４ま
でのアルカン、アルケン、アルキレン化合物を少なくと
も一つ以上含むガス中で、低温プラズマ処理し、生成し
たプラズマ重き膜を更に二酸化窒素のガスで低温プラズ
マ処理してプラズマ重合膜を得るものである。The first invention is a plasma polymerized membrane containing an amide group, and the second method invention is a gas containing at least one alkane, alkene, or alkylene compound having a total number of carbon atoms of 1 to 4 in the molecule. In this method, a plasma-polymerized film is obtained by performing a low-temperature plasma treatment and further performing a low-temperature plasma treatment on the generated plasma-heavy film with nitrogen dioxide gas.
第２の発明の低温プラズマ処理に用いるアルカンとして
は、メタン、エタン、プロパン、ｎ−ブタン、イソブタ
ンなどをいう。Examples of alkanes used in the low-temperature plasma treatment of the second invention include methane, ethane, propane, n-butane, and isobutane.
又、アルケンとしては、エチレン、プロペン、１−ブテ
ン、２−ブテン、インブチレン、１，２−ブタジェン、
１．３−ブタジェンなどをいう。In addition, examples of alkenes include ethylene, propene, 1-butene, 2-butene, inbutylene, 1,2-butadiene,
1.3-butadiene, etc.
更に、アルキレンとしては、アセチレン、メヂルアセチ
レン、エチルアセチレンなどをいう。Furthermore, alkylene includes acetylene, methylacetylene, ethylacetylene, and the like.
これ等の化合物は、炭素数１がら４の化合物であって、
好ましくは枝分かれのない直鎖状の化合物である。These compounds are compounds having 1 to 4 carbon atoms,
Preferably, it is a linear compound without branching.
上記化合物を低気圧下でガス状にしてグロー放電して得
られるプラズマにて重合を行い、膜を生成するのである
。The above-mentioned compound is made into a gas under low pressure and polymerized using plasma obtained by glow discharge to form a film.
プラズマ重合は、単に二重結合の開裂のみで重合するの
ではなく、プラズマ中に吹き込まれた分子がグロー状態
に分裂（フラグメンテーション）されてから、再配列し
てポリマーが生成すると考えられる。In plasma polymerization, polymerization does not occur simply by the cleavage of double bonds, but rather it is thought that molecules blown into plasma are fragmented into a glow state and then rearranged to produce polymers.
従って、モノマーは一旦フラグメントに分裂されるので
、ポリマー生成はモノマーの化学構造の影響が少ないと
考えられるが、炭素数が多い炭化水素化合物や、枝分か
れの多い化合物では、フラグメンテーションの種類が多
く、再配列の組み自わせが複雑になり、生成ポリマーの
構造が一定とならないため、化合物の総炭素数を１乃至
４とするものである。Therefore, since the monomer is once split into fragments, it is thought that the chemical structure of the monomer has little effect on polymer production, but in hydrocarbon compounds with a large number of carbon atoms or compounds with many branches, there are many types of fragmentation and The total number of carbon atoms in the compound is set to 1 to 4, since the combination of sequences becomes complicated and the structure of the resulting polymer is not constant.
上記化合物で生成したプラズマ重合膜を、更に二酸化窒
素のガス中で低温プラズマ処理することにより、アミド
基を含んだプラズマ重合膜が生成されるのである。By further subjecting the plasma-polymerized film produced from the above compound to low-temperature plasma treatment in nitrogen dioxide gas, a plasma-polymerized film containing amide groups is produced.
炭素数が１〜４の炭化水素のプラズマ重合膜は、生成し
たポリマーの炭素−炭素間で架橋が起こり、三次元構造
となり、炭素の分子内回転が少なくなる。In a plasma-polymerized film of a hydrocarbon having 1 to 4 carbon atoms, crosslinking occurs between carbons of the generated polymer, resulting in a three-dimensional structure and less intramolecular rotation of carbon.
炭素の分子内回転が少なくなることにより、Ｎ○２ガス
低温プラズマ処理にて生成したアミド基の内部へのもぐ
り込みが押さえられ、耐久性のある親水性膜が得られる
。By reducing the intramolecular rotation of carbon, the amide groups generated by the N○2 gas low temperature plasma treatment are prevented from penetrating into the interior, and a durable hydrophilic film can be obtained.
炭化水素のプラズマ重合する前に、Ａｒ、Ｏ，、Ｎ２ガ
スなど非重キ性ガスにて被処理物をプラズマ処理を行っ
てもよい。Before the plasma polymerization of hydrocarbons, the object to be treated may be subjected to plasma treatment using a non-heavy gas such as Ar, O, or N2 gas.
この前処理により、処理物表面へのプラズマポリマーの
密着性を高めることができる。This pretreatment can improve the adhesion of the plasma polymer to the surface of the object to be treated.
被処理物としては、形態に関係なく、プラスチック成形
品、フィルム、繊維等どの形態でもよい。The object to be processed may be in any form, such as a plastic molded product, film, or fiber, regardless of its form.
又、素材的には、ポリエステル、ナイロン、アクリルニ
トリル、ビニロン、ポリエチレン、ポリプロピレン、ケ
ブラーなどの合成高分子、及び羊毛、絹などの天然高分
子から、ガラスのような無代物まで種類を選ばず処理が
可能である。In addition, we can process any type of material, from synthetic polymers such as polyester, nylon, acrylonitrile, vinylon, polyethylene, polypropylene, and Kevlar, and natural polymers such as wool and silk to non-woven materials such as glass. is possible.
炭化水素のみの７ラズマ重合膜では、親水性は期待され
ない、一方、Ｎ０２ガスのみの低温プラズマ処理では、
初期の親水性は得られるが、経時的に効果が低下する。Hydrophilicity is not expected in a plasma-polymerized membrane containing only hydrocarbons, while low-temperature plasma treatment using only N02 gas
Although initial hydrophilicity is obtained, the effectiveness decreases over time.
炭化水素のプラズマ重き膜にＮ Ｏ２ガス低温プラズマ
処理することで、１ラズマｆｆ１６膜にアミド基が導入
され、親水性の１ラズマ重合膜が得られるのである。By subjecting a hydrocarbon plasma-heavy film to N2O2 gas low-temperature plasma treatment, amide groups are introduced into the 1-razma ff16 film, resulting in a hydrophilic 1-razma polymerized film.
分子中の総炭素数を１から４：Ｊ、での炭化水素を用い
て低温プラズマ処理を行うことで、生成ポリマーは炭素
−炭素間で架橋が起こり、三次元構造となり、炭素の分
子内回転が少なくなる。By performing low-temperature plasma treatment using hydrocarbons with a total number of carbon atoms in the molecule ranging from 1 to 4:J, the resulting polymer undergoes carbon-carbon crosslinking, becomes a three-dimensional structure, and undergoes intramolecular rotation of carbon. becomes less.
更に、Ｎ Ｏｘガス低温プラズマ処理により、生成した
アミド基の内部へのもぐり込みが押さえられ、耐久性の
ある親水性膜が得られる。Furthermore, the N 2 Ox gas low temperature plasma treatment prevents the generated amide groups from penetrating into the interior, resulting in a durable hydrophilic film.
〔実施例１ 〕
プラズマｆｆｌ自装置として、無電誘導式反応管（内径
１００１、長さ６０５ｖ＋＋、パイレックスガラス製）
を用いた。[Example 1] As a plasma ffl own device, a non-induction reaction tube (inner diameter 1001, length 605V++, made of Pyrex glass)
was used.
モノマーとして、メタン（ＣＨ４）を用いて、真空度０
．１３パスカル（Ｐａ）、高周波数（ｒｆ＞ １３−５
６ ＭＨｚ、出力２５Ｗ、モノマーガス流量速度４ＣＣ
／ｎｉｎ、重合時間５分にて、ポリエチレンフィルムに
プラズマ重合な行った。Using methane (CH4) as a monomer, the degree of vacuum is 0.
．． 13 Pascals (Pa), high frequency (rf > 13-5
6 MHz, output 25W, monomer gas flow rate 4CC
Polyethylene film was subjected to plasma polymerization at /nin and polymerization time of 5 minutes.
その後、ＮＯ２ガスを４ＣＣ／ｌｌｌ１ｎの流量速度に
て、１０秒から１分間のプラズマ照射を行った。Thereafter, plasma irradiation was performed using NO2 gas at a flow rate of 4 CC/llln for 10 seconds to 1 minute.
表１にプラズマ処理ポリエチレンの水のぬれ性を接触角
で示した。Table 1 shows the water wettability of plasma-treated polyethylene in terms of contact angle.
表 １
ＮＯ７単独処理は、メタンのプラズマ重きしてからＮＯ
２処理したものが接触角が小さく、水の塗れ性に効果が
ある。Table 1 In NO7 treatment, methane plasma is added and then NO7
2-treated products have a small contact angle and are effective in reducing water applicability.
〔実施例２ 〕
実施例１と同様の条件にて、ポリエステルタフタ上にＣ
１１、プラズマ重合、続いてＮＯ２プラズマ処理（１０
秒）を行った。[Example 2] C was applied on polyester taffeta under the same conditions as in Example 1.
11. Plasma polymerization followed by NO2 plasma treatment (10
seconds) was carried out.
このプラズマ処理布のＳ ＩＩ性、吸水性を表２に示し
た。Table 2 shows the S II properties and water absorption properties of this plasma-treated cloth.
（・１ 洗濯回数・・・洗濯条件
洗剤にュービーズ） ２ ｙ／ １、 浴比１：５０．
４０°Ｃ×１５分〜水洗〜莞燥
※；２ ＳＲＭ（汚れ除去性）・・・Ｉ３重油法（Ｂ
ｊｌｉ油分試料布に１＋ｎｌピペツトにて一滴滴下して
、−昼夜放置後、洗剤にュービーズ）２ｇ／ｌ、浴比１
：５０．４０’ＣＸ１５分の洗濯を行い、汚れの除去性
をみる）５段階評価
、衰３ 吸水性（ウィッキング性）・・・水滴滴下消失
法Ｃａ１．、Ｎ０２２段処理のポリエステルタフタ布は
、洗濯１０回後でも、吸水性は殆ど変わらない吸水性が
得られた。(・1 Number of washes...Washing conditions Detergent and Beads) 2 y/1, Bath ratio 1:50.
40°C x 15 minutes ~ washing with water ~ drying*; 2 SRM (stain removability)... I3 heavy oil method (B
Add one drop to the jli oil sample cloth with a 1+nl pipette, leave it for day and night, then add 2 g/l of detergent (Beads) to the detergent, bath ratio 1.
: 50.40'CX Wash for 15 minutes and check dirt removability) 5-level evaluation, Decay 3 Water absorbency (wicking property)...Water drop disappearance method Ca1. The polyester taffeta cloth subjected to the .
ＮＯ２＠独は、洗濯口数が増えるにしたがい、吸水性は
低下してきた。The water absorption of NO2@Germany decreased as the number of washes increased.
Claims (2)
重合膜。(1) A plasma polymerized membrane characterized by containing an amide group.
ルケン、アルキレン化合物を少なくとも一つ以上含むガ
ス中で、低温プラズマ処理し、生成したプラズマ重合膜
を更に二酸化窒素のガスで低温プラズマ処理することを
特徴とするプラズマ重合膜の生成方法。(2) Low-temperature plasma treatment is performed in a gas containing at least one alkane, alkene, or alkylene compound with a total carbon number of 1 to 4 in the molecule, and the resulting plasma polymerized film is further subjected to low-temperature plasma treatment with nitrogen dioxide gas. 1. A method for producing a plasma polymerized film, the method comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31835087A JPH01161026A (en) | 1987-12-16 | 1987-12-16 | Plasma polymerization membrane and formation thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31835087A JPH01161026A (en) | 1987-12-16 | 1987-12-16 | Plasma polymerization membrane and formation thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161026A true JPH01161026A (en) | 1989-06-23 |
Family
ID=18098175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31835087A Pending JPH01161026A (en) | 1987-12-16 | 1987-12-16 | Plasma polymerization membrane and formation thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161026A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000016913A1 (en) * | 1998-09-21 | 2000-03-30 | The Procter & Gamble Company | Durably wettable, liquid pervious webs |
-
1987
- 1987-12-16 JP JP31835087A patent/JPH01161026A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000016913A1 (en) * | 1998-09-21 | 2000-03-30 | The Procter & Gamble Company | Durably wettable, liquid pervious webs |
| JP2002526219A (en) * | 1998-09-21 | 2002-08-20 | ザ、プロクター、エンド、ギャンブル、カンパニー | Liquid permeable web that is durably wettable |
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