JPH01168946U - - Google Patents
Info
- Publication number
- JPH01168946U JPH01168946U JP6639688U JP6639688U JPH01168946U JP H01168946 U JPH01168946 U JP H01168946U JP 6639688 U JP6639688 U JP 6639688U JP 6639688 U JP6639688 U JP 6639688U JP H01168946 U JPH01168946 U JP H01168946U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- metal member
- disposed
- induced plasma
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 3
- 230000006698 induction Effects 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
添附図面は、本考案の一実施例を示す断面図で
ある。
１……上部フランジ、２……下部フランジ、３
……ガスノズル、４……孔、５……内管、６……
外管、７……Ｏリングシール、８……冷却水導入
孔、９……冷却水排出孔、１０……ＲＦコイル、
１１……高電圧発生装置。
The accompanying drawings are cross-sectional views showing one embodiment of the present invention. 1... Upper flange, 2... Lower flange, 3
...Gas nozzle, 4...hole, 5...inner pipe, 6...
Outer pipe, 7... O-ring seal, 8... Cooling water introduction hole, 9... Cooling water discharge hole, 10... RF coil,
11...High voltage generator.
Claims (1)
ＲＦコイルに励磁電流を流して該管内部に誘導プ
ラズマを発生させる誘導プラズマ発生装置におい
て、該管の一方の端部に配置された金属製部材と
、該管の他方の端部に配置された金属製部材との
間に高圧発生手段を接続したことを特徴とする誘
導プラズマ発生装置。 In an induction plasma generator that generates induced plasma inside a tube by passing an exciting current through an RF coil wound around a tube made of an insulating material, a metal disposed at one end of the tube. An induced plasma generation device characterized in that a high pressure generation means is connected between a metal member and a metal member disposed at the other end of the tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639688U JPH01168946U (en) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639688U JPH01168946U (en) | 1988-05-20 | 1988-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168946U true JPH01168946U (en) | 1989-11-29 |
Family
ID=31291802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6639688U Pending JPH01168946U (en) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168946U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6269454A (en) * | 1985-09-17 | 1987-03-30 | ユナイテッド キングドム アトミック エナ↓−ヂイ オ↓−ソリテイ | Ion source |
-
1988
- 1988-05-20 JP JP6639688U patent/JPH01168946U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6269454A (en) * | 1985-09-17 | 1987-03-30 | ユナイテッド キングドム アトミック エナ↓−ヂイ オ↓−ソリテイ | Ion source |