JPH01166292U - - Google Patents
Info
- Publication number
- JPH01166292U JPH01166292U JP6112888U JP6112888U JPH01166292U JP H01166292 U JPH01166292 U JP H01166292U JP 6112888 U JP6112888 U JP 6112888U JP 6112888 U JP6112888 U JP 6112888U JP H01166292 U JPH01166292 U JP H01166292U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- rotor
- permanent magnet
- attached
- electromagnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図は他の実施例を
示す縦断側面図、第３図は従来のターボ分子ポン
プを示す縦断側面図である。
１…ケーシング、４…静翼、５…動翼、６…ロ
ータ、６ａ…回転軸、６ｂ…磁気デイスク、７ａ
，８ａ…半径方向磁気軸受、７ｂ，８ｂ…ダンパ
部材、９ａ，９ａ′…軸方向磁気軸受、９ｂ，９
ｂ′…ダンパ部材。
FIG. 1 is a longitudinal side view showing one embodiment of a turbomolecular pump according to the present invention, FIG. 2 is a longitudinal side view showing another embodiment, and FIG. 3 is a longitudinal side view showing a conventional turbomolecular pump. be. DESCRIPTION OF SYMBOLS 1... Casing, 4... Stationary blade, 5... Moving blade, 6... Rotor, 6a... Rotating shaft, 6b... Magnetic disk, 7a
, 8a... Radial magnetic bearing, 7b, 8b... Damper member, 9a, 9a'... Axial magnetic bearing, 9b, 9
b'...damper member.
Claims (1)
ロータを回転可能に支持し、上記半径方向磁気軸
受を上記ロータに取付けた回転側永久磁石とケー
シング側の部材に取付けた静止側永久磁石とによ
り構成し、上記軸方向磁気軸受を上記ロータに設
けた磁気デイスクとケーシング側の部材に取付け
た電磁石とにより構成し、上記静止側永久磁石と
上記電磁石との周りにダンパ部材を取付けたこと
を特徴とするターボ分子ポンプ。 A rotor is rotatably supported by a radial magnetic bearing and an axial magnetic bearing, and the radial magnetic bearing is composed of a rotating side permanent magnet attached to the rotor and a stationary side permanent magnet attached to a member on the casing side. The axial magnetic bearing is configured by a magnetic disk provided on the rotor and an electromagnet attached to a member on the casing side, and a damper member is attached around the stationary side permanent magnet and the electromagnet. turbo molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6112888U JPH01166292U (en) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6112888U JPH01166292U (en) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01166292U true JPH01166292U (en) | 1989-11-21 |
Family
ID=31286805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6112888U Pending JPH01166292U (en) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01166292U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841295A (en) * | 1981-09-04 | 1983-03-10 | Seiko Instr & Electronics Ltd | Axial-flow molecular pump applying magnetic bearing suitable for high-speed rotation |
| JPS5993995A (en) * | 1982-10-23 | 1984-05-30 | アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− | Pump |
| JPS61207892A (en) * | 1985-03-11 | 1986-09-16 | Hitachi Ltd | Turbomolecule pump |
| JPS62282191A (en) * | 1986-05-30 | 1987-12-08 | Hitachi Ltd | turbo molecular pump |
-
1988
- 1988-05-11 JP JP6112888U patent/JPH01166292U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841295A (en) * | 1981-09-04 | 1983-03-10 | Seiko Instr & Electronics Ltd | Axial-flow molecular pump applying magnetic bearing suitable for high-speed rotation |
| JPS5993995A (en) * | 1982-10-23 | 1984-05-30 | アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− | Pump |
| JPS61207892A (en) * | 1985-03-11 | 1986-09-16 | Hitachi Ltd | Turbomolecule pump |
| JPS62282191A (en) * | 1986-05-30 | 1987-12-08 | Hitachi Ltd | turbo molecular pump |