JPH01133906A - Production of oxide superconductor - Google Patents
Production of oxide superconductorInfo
- Publication number
- JPH01133906A JPH01133906A JP62290724A JP29072487A JPH01133906A JP H01133906 A JPH01133906 A JP H01133906A JP 62290724 A JP62290724 A JP 62290724A JP 29072487 A JP29072487 A JP 29072487A JP H01133906 A JPH01133906 A JP H01133906A
- Authority
- JP
- Japan
- Prior art keywords
- oxide superconductor
- oxygen
- superconductor
- oxide
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Superconductors And Manufacturing Methods Therefor (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は、電力搬送、磁気浮上、ジョセフンン素子に
使用して好適な酸化物超電導体の製造方法に関するもの
で、特に臨界温度1j+cの改善を図ったものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a method for manufacturing an oxide superconductor suitable for use in power transmission, magnetic levitation, and Josephine elements, and particularly relates to an improvement in the critical temperature 1j+c. It was planned.
〈従来の技術〉
この種の製造方法として■超電導体構成元素であるBa
、 Y 、 Cu等の酸化物の粒子を混合し、これを
酸素雰囲気で溶融徐冷する方法。■■と同様の酸化物粒
子の粉末をンンターしたものをターゲットとして反応性
スパッタリングにて基板上にエピタキシャル成長させる
方法。■Ba 、 Y 、 Cu等の有機金属化合物を
出発原料としてCVD法により超電導薄膜としてエピタ
キシャル成長させる等の方法がある。<Prior art> As a manufacturing method of this type, ■Ba is a superconductor constituent element.
A method in which particles of oxides such as , Y, and Cu are mixed and then melted and slowly cooled in an oxygen atmosphere. A method of epitaxial growth on a substrate using reactive sputtering using the same oxide particle powder as described in ■■ as a target. (2) There is a method of epitaxially growing a superconducting thin film using a CVD method using an organometallic compound such as Ba, Y, or Cu as a starting material.
〈発明が解決しようとする問題点〉
しかしこれらの方法で得られた超電導体の特性はバラツ
キが大きく安定したTcのものが得られないという問題
があった。その理由は超電導現象は、Ba−Y−Cu−
0等の酸化物超電導体においてはやや酸素不足の状態で
生じるものであるため、このl!!2素不足の状態を制
御するのが非常に難しく超電導の特性であるTcを再現
性よく、かつ大きな値にすることが困難であった。<Problems to be Solved by the Invention> However, there is a problem in that the properties of the superconductors obtained by these methods vary widely and a stable Tc cannot be obtained. The reason is that the superconducting phenomenon is based on Ba-Y-Cu-
This l! ! It is very difficult to control the state of 2-element deficiency, and it has been difficult to increase Tc, which is a characteristic of superconductivity, to a large value with good reproducibility.
く問題点を解決するための手段〉
この発明は、以上の観点から酸化物超電導体の先駆体よ
シー旦酸素雰囲気中で処理して超電導体を得、これを水
素によって還元して酸素濃度を制御し、以って最善の酸
素濃度とすることによりTcの改善を図ったものである
。なおHlによる還元は、その処理の時間、温度を適宜
選択することで02の濃度を自在とすることが可能であ
る。Means for Solving the Problems> From the above points of view, the present invention is based on the method of first treating a precursor of an oxide superconductor in an oxygen atmosphere to obtain a superconductor, and then reducing the superconductor with hydrogen to reduce the oxygen concentration. This is an attempt to improve Tc by controlling the oxygen concentration and thereby achieving the optimum oxygen concentration. Note that in the reduction with Hl, the concentration of 02 can be adjusted freely by appropriately selecting the treatment time and temperature.
又酸化物超電体を得る手段は、従来と同様に焼成法、ス
パッタリング蒸着法、CVD法、ゾルゲル法等を採用す
ることができる。Further, as a means for obtaining the oxide superelectric material, a firing method, a sputtering deposition method, a CVD method, a sol-gel method, etc. can be employed as in the conventional method.
例えばCVD法を用いる場合の出発原料としての有機金
属化合物としては、アセチルアセトンバリウム(BaC
Ct Hy O* )x )、シクロペンタジェニルイ
ツトリウムCY(CsHs )s) 、ヘキサフルオロ
アセチル等の組合せが考えられる。For example, when using the CVD method, barium acetylacetonate (BaC
Possible combinations include CtHyO*)x), cyclopentagenyl yttrium CY(CsHs)s), and hexafluoroacetyl.
〈実施例〉
くノ
Y 、 Ba 、 Cuの酸化物なモル比1:2:3の
割合で混合し、酸素雰囲気で800℃で溶融し、その後
1時間当り50℃づつ下げて500℃まで徐冷し、この
温度に2時間保持し、更に1時間当り30℃づつ温度を
下げて300℃まで徐冷した。<Example> KunoY, Ba, and Cu oxides were mixed at a molar ratio of 1:2:3, melted at 800°C in an oxygen atmosphere, and then gradually lowered by 50°C per hour to 500°C. The mixture was cooled, maintained at this temperature for 2 hours, and then slowly cooled down to 300°C by decreasing the temperature by 30°C per hour.
かくして得られたYl・Ba、・Cu、・0.−x
の酸化物結晶体のTcは606にであった。この試料を
石英炉心管内に入れて、HeとH3の割合が95:5の
混合ガスを6時間内部に送シ込んだ。The thus obtained Yl.Ba,.Cu,.0. -x
The Tc of the oxide crystal was 606. This sample was placed in a quartz furnace tube, and a mixed gas containing He and H3 at a ratio of 95:5 was pumped into the interior for 6 hours.
次に炉内を200℃まで1時間当り50℃づつ昇温させ
、引続いて300℃まで1時間当り30℃づつ昇温させ
、この温度で2時間処理した。その後1時間当950℃
づつ下げて室温まで徐冷した。かぐして得られた試料の
Tcは100 @にであシH8による還元前と比較する
と特性の向上が図れた。Next, the temperature inside the furnace was raised to 200°C at a rate of 50°C per hour, and then to 300°C at a rate of 30°C per hour, and the treatment was carried out at this temperature for 2 hours. After that, 950℃ per hour
The temperature was gradually lowered to room temperature. The Tc of the sample obtained by smelting was 100 @, and the characteristics were improved when compared with that before reduction with H8.
〈発明の効果〉
この発明は以上のように、酸化物超電導体の酸素(0)
の量を還元によシ減少させることができるので酸素(0
)の量が過剰であれば一度得られた超電導体に対して最
適値(:合わすことができ、これによってTcの制御が
可能となる。<Effects of the Invention> As described above, the present invention provides oxygen (0) in an oxide superconductor.
The amount of oxygen (0
) is excessive, it can be adjusted to the optimum value (:) for the superconductor once obtained, thereby making it possible to control Tc.
またどのような超電導体(一対しても酸化と還元すなわ
ち酸素処理と水素処理を必要に応じて施すことができる
ので不良品の発生を抑え歩留シの向上を図ることができ
る。Further, since oxidation and reduction, that is, oxygen treatment and hydrogen treatment can be applied to any superconductor (or any pair) as necessary, it is possible to suppress the occurrence of defective products and improve the yield.
特許出願人 藤倉電線株式会社 代理人 弁理士 竹 内 守Patent applicant: Fujikura Electric Wire Co., Ltd. Agent Patent Attorney Mamoru Takeuchi
Claims (3)
囲気で処理して超電導体となし、これをH_2雰囲気で
還元処理することを特徴とする酸化物超電導体の製造方
法。(1) A method for producing an oxide superconductor, which comprises treating a precursor of a constituent element that will become an oxide superconductor in an oxygen atmosphere to form a superconductor, and then reducing the superconductor in an H_2 atmosphere.
化物であることを特徴とする特許請求の範囲第1項記載
の酸化物超電導体の製造方法。(2) The method for producing an oxide superconductor according to claim 1, wherein the precursor is an oxide of a constituent element that will become the oxide superconductor.
物であることを特徴とする特許請求の範囲第1項記載の
酸化物超電導体の製造方法。(3) The method for producing an oxide superconductor according to claim 1, wherein the precursor is an organic substance that is a constituent element of the oxide superconductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62290724A JPH01133906A (en) | 1987-11-19 | 1987-11-19 | Production of oxide superconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62290724A JPH01133906A (en) | 1987-11-19 | 1987-11-19 | Production of oxide superconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133906A true JPH01133906A (en) | 1989-05-26 |
Family
ID=17759703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62290724A Pending JPH01133906A (en) | 1987-11-19 | 1987-11-19 | Production of oxide superconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133906A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0617473A1 (en) * | 1993-03-26 | 1994-09-28 | Matsushita Electric Industrial Co., Ltd. | Oxide superconductor and method and apparatus for fabricating the same |
-
1987
- 1987-11-19 JP JP62290724A patent/JPH01133906A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0617473A1 (en) * | 1993-03-26 | 1994-09-28 | Matsushita Electric Industrial Co., Ltd. | Oxide superconductor and method and apparatus for fabricating the same |
| US5731270A (en) * | 1993-03-26 | 1998-03-24 | Matsushita Electric Industrial Co., Ltd. | Oxide superconductor and method and apparatus for fabricating the same |
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