JPH09303699A - Leakage gas cylinder storage bag and leakage gas recovery device using the cylinder storage bag - Google Patents

Abstract

(57) 【Abstract】 PROBLEM TO BE SOLVED: To easily store and transport a leaked gas from a gas cylinder together with the gas cylinder while maintaining high airtightness and safety without releasing it to the atmosphere. The leaked gas can be guided to the abatement device easily and smoothly. SOLUTION: A cylinder storage bag 3 and first and second gas recovery bags 5 and 5 are each formed of an airtight material. An airtight fastener 8 is attached to the opening for inserting and removing the gas cylinder 2 of the cylinder storage bag 3. A diluted gas cylinder 13 is attached to each of the cylinder storage bag 3 and the gas recovery bag 5. Gas inlet 3 for dilution and pumping in cylinder storage bag 3
a and the leakage gas discharge port 3b are provided. Each gas recovery bag 5 is provided with a leak gas inlet 5a and a leak gas outlet 5b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a leakage gas cylinder storage bag for recovering high-pressure leakage gas leaking from a gas cylinder as a gas cylinder, and a leakage gas recovery device for guiding the leakage gas inside the cylinder storage bag to an abatement device. .

[0002]

2. Description of the Related Art When a high-pressure gas that is harmful to the human body and the natural environment, such as semiconductor material gases used in the manufacture of semiconductors, is released into the atmosphere and leaks from the gas cylinder, the gas cylinder is incorporated into a cylinder cabinet or a breaker. In this case, the leaked gas is automatically guided to the detoxification device for ventilation and treatment, but the gas cylinders of the gas filling station and the transportation truck are not incorporated in these devices, and the gas cylinder is stored as a single unit. And will be transported.

Leakage gas from a gas cylinder that does not have such a treatment facility should not be leaked to the atmosphere as much as possible by wrapping the entire gas cylinder in a vinyl ground sheet as an emergency measure. Since leakage often occurs in the valve part, measures such as wrapping the valve in a bag-shaped rubber and squeezing the neck of the valve are taken, and further, it is made of steel that can store the leaking gas cylinder itself. Pressure chambers are also known.

[0004]

However, the measures against the ground sheet and the rubber bag do not completely prevent the leakage, and there is a possibility that the ground sheet and the rubber bag may come off from the cylinder and be blown out during transportation or strong wind. In addition, it is necessary to promptly discharge the leakage gas inside the gland sheet or inside the rubber bag to another container or the abatement device, but the volume of the leakage gas stored in the ground sheet or in the rubber bag is slightly small. However, there is a drawback in that there is little time margin before the leaked gas cylinder is transported to another container or the abatement device. As described above, the ground sheet and the rubber bag are convenient as an emergency measure, but are not very practical due to the above-mentioned restrictions. Further, the pressure chamber made of steel is not easy to transport due to its size and weight, and it has not been possible to bring it to the site of the leaking gas cylinder and use it easily.

The present invention has been made in view of such circumstances, and an object of the present invention is to easily store and convey leak gas together with a gas cylinder while maintaining high airtightness and safety. It is an object of the present invention to provide a leaked gas cylinder storage bag capable of performing the above, and a leaked gas recovery device capable of guiding the leaked gas inside the cylinder storage bag to the abatement device.

[0006]

A leak gas cylinder storage bag according to claim 1 is a cylinder storage bag for storing the leak gas together with the gas cylinder when the high-pressure gas filled in the gas cylinder leaks. The cylinder storage bag is formed in a bag shape with an airtight material, an airtight fastener is attached to the opening for inserting and removing the gas cylinder, and a dilution gas cylinder for diluting leak gas inside the recovery bag is attached to the cylinder storage bag, An inert gas inlet for introducing an inert gas from the outside into the cylinder storage bag, and a leak gas outlet for discharging the leak gas diluted with the inert gas and the diluted gas to a separate recovery means. The feature is that it can be opened and closed.

Further, the leaked gas recovery apparatus according to the second aspect is a leaked gas recovery apparatus which, when the high-pressure gas filled in the gas cylinder leaks, recovers the leaked gas and guides it to a separate abatement device. There is provided a cylinder storage bag for storing the leaked gas together with the gas cylinder, and a gas collection bag for collecting the leaked gas inside the cylinder storage bag and sending it to the abatement device. These cylinder storage bag and gas collection bag Each of them is formed of an airtight material, and an airtight fastener is attached to the opening of the cylinder storage bag for taking in and out the gas cylinder, and a dilution gas cylinder for diluting the leaked gas inside each is attached to the cylinder storage bag and the gas recovery bag. At the same time, a dilution and pressure feeding gas inlet for introducing an inert gas from a separate dilution and pressure feeding gas cylinder into the cylinder storage bag, and the dilution The diluted been cylinder storage bag inside the leak gas in an inert gas dilution gas cylinder pumping gas cylinder and cylinder storage bag, and a leakage gas discharge port for discharging to the gas collection bag provided to the gas collection bag,
A leak gas inlet for introducing leak gas from the cylinder storage bag and a leak gas outlet for discharging the leak gas inside the recovery bag diluted with the inert gas in the recovery bag to the abatement device. The feature is that it is provided.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. The leaked gas recovery device 1 includes a cylinder storage bag 3 for storing high-pressure gas leaking from the gas cylinder 2 together with the gas cylinder 2, a guide rail 4 used when the gas cylinder 2 is stored in the cylinder storage bag 3, and a cylinder storage bag 3. First and second to temporarily store the leaked gas
It has gas recovery bags 5 and 5. The cylinder storage bag 3 is connected with a dilution and pressure-feeding gas cylinder 6 filled with an inert gas, and the second gas recovery bag 5 is connected with a detoxifying device 7, respectively, so as to prevent leakage gas in the cylinder storage bag 3.
While being diluted with the inert gas in the dilution and pressure-feeding gas cylinder 6, the gas is fed under pressure to the gas collection bags 5 and 5 and further collected into the abatement device 7.

The cylinder storage bag 3 is a gas cylinder 2
It is formed in a gussetless bag body composed of two sheets, which are longer than the front and back sides, and an airtight fastener 8 is attached to an opening portion for taking in and out the gas cylinder 2 at one end side of the front surface sheet of the cylinder storage bag 3, An arc-shaped opening guard 9 is detachably provided inside. The surface sheet of the cylinder storage bag 3 is provided with a small-hole dilution and pressure-feeding gas inlet 3a and a leakage gas outlet 3b at diagonal positions, and the opening handle 1 is provided at a position near the airtight fastener of the surface sheet.
No. 0, and four carrying handles 11 are attached to both side edges of the cylinder storage bag 3.

Surface fasteners 12a, 12b, 12b for binding the airtight fastener 8 are provided on both sides of the airtight fastener 8. One surface fastener 12a is the other surface fastener 12 that is provided to project from one end of the cylinder storage bag 3.
It is provided on the surface sheet farther from the airtight fastener 8 than the b and 12b, and when the space between the one surface fastener 12a and one end of the cylinder storage bag 3 is folded in three by folding lines C1 and C2, The airtight fastener 8 is designed to be joined to the hook-and-loop fasteners 12b and 12b, and even if the airtight fastener 8 may be damaged, the airtight fastener 8 is folded inside in such a manner that the airtightness of the cylinder storage bag 3 is improved. I try to maintain my sex.

Each of the first and second gas recovery bags 5 and 5 is formed in an expandable and contractible box shape having a bellows portion on its outer peripheral surface. On the upper surface of each gas recovery bag 5, there are a leak gas introduction port 5a and a leak gas discharge port 5b using the same small holes as the dilution and pumping gas introduction port 3a and the leak gas discharge port 3b of the cylinder storage bag 3. The diluting and pressure-feeding gas introducing port 3a, the leaking gas introducing port 5a, and the leaking gas discharging ports 3b, 5b are usually closed by a stopper such as a grommet.

As the material of the cylinder storage bag 3 and the airtight fastener 8 and the gas recovery bag 5 of the storage bag 3, various synthetic resins and synthetic rubbers excellent in corrosion resistance and pressure resistance in addition to airtightness are used. Of these, the cylinder storage bag 3
Vinyl chloride resin sheet or nylon cloth reinforced vinyl chloride resin sheet as the material for the gas recovery bag 5 has excellent corrosion resistance to semiconductor gas, and is cheaper and easier to process than other corrosion resistant materials. There is.

Further, if the inner surface of nylon or Nomex base cloth used as a reinforcing material is coated with a corrosion-resistant material such as fluorine rubber, and the outer surface is coated with a material having high workability and airtightness such as butyl rubber, it is even more effective. A safe cylinder storage bag 3 having excellent performance can be obtained. Further, as the airtight fastener 8 of the soft cylinder storage bag 3, it is preferable to use butyl rubber for the main part from the viewpoint of airtightness and corrosion resistance.

A diluted gas cylinder 13 is attached to each of the surface of the cylinder storage bag 3 and the upper surfaces of the first and second gas recovery bags 5 and 5. This diluted gas cylinder 13
It is a mini cylinder filled with an inert gas as a diluting gas, and it is housed in the cylinder storage bag 3 and the gas recovery bag 5 by being integrally provided in the cylinder storage bag 3 and the first and second gas recovery bags 5 and 5. The leaked gas from the gas cylinder 2 can be simply and quickly diluted with the diluted gas from the diluted gas cylinder 13.

The diluting gas cylinder 13 is equipped with an opening device at the nozzle port for gas discharge, and this opening device punches a sealing plate that closes the nozzle port in a normal unused state at the time of use. Then, an opening mechanism for opening the nozzle opening and a check valve mechanism for preventing the leakage of the diluted gas are provided. The nozzle port of the diluted gas cylinder 13 may be previously inserted into the cylinder storage bag 3 and the gas recovery bags 5 and 5 via the opening device, and the opening port may be opened by operating the opening device when storing the gas cylinder 2. Alternatively, a dedicated dilution gas inlet can be opened and closed in the cylinder storage bag 3 and the gas recovery bag 5, and the dilution gas cylinder 1 can be stored when the gas cylinder 2 is stored.
It is also possible to connect the nozzle port of No. 3 to the diluted gas introduction port.

When the leaked gas from the gas cylinder 2 stored in the cylinder storage bag 3 is to be recovered by the detoxification device 7, the dilution / pressure supply gas inlet 3a of the cylinder storage bag 3 is connected to the dilution / pressure supply gas cylinder 6. Connected by tube 14,
The leak gas outlet 3b of the cylinder storage bag 3 and the leak gas inlet 5a of the first gas recovery bag 5 are connected to each other by the connecting tube 1
Connected at 5. Further, the leak gas outlet 5b of the first gas recovery bag 5 and the leak gas inlet 5a of the second gas recovery bag 5 are connected by a connecting tube 16, and the leak gas outlet 5b of the second gas recovery bag 5 is further connected. And the abatement device 7 are connected by a connection tube 17 (see FIG. 1).

The guide rail 4 is formed by connecting a pair of parallel pipes 4a, 4a bent back from an arcuate end with a plurality of sleepers 4b, and providing a hinge in the middle of the pipes 4a, 4a to fold it in two. This is made possible, and the dimension when extended is formed to be longer than that of the cylinder storage bag 3. Pipe 4a
Is made of, for example, stainless steel, and the sleeper 4b is made of, for example, a steel plate. Rubber is attached to the lower surface of the sleeper 4b or a slip prevention means is provided.

The present embodiment is configured as described above,
At a place of use or a storage place of the gas cylinder 2 which does not have a treatment equipment such as a cylinder cabinet or a shut-off device, the cylinder storage bag 3 and at least one gas recovery bag 5 are flatly crushed to discharge the internal air. Prepare as it is.
Further, it is also possible to prepare a plurality of diluted gas cylinders 13 in advance and sequentially replace them according to the internal volumes of the gas cylinders 2 and the cylinder storage bag 3 for use. In this case, a check valve is provided in the diluted gas inlet for the diluted gas cylinder so that the leaked gas does not flow backward from the cylinder storage bag 3.

When it is confirmed that the high pressure gas leaks from the gas cylinder 2, the gas container bag 3 is kept airtight with the gas inlet 3a for dilution and pressure feeding and the gas leak outlet 3b being closed by stoppers. Open 8 and guard the opening 9
And the guide rail 4 extending from the airtight fastener 8 while ensuring a large opening area of the airtight fastener 8.
To the bottom of the cylinder storage bag 3.

Next, the pipes 4a, 4 of the guide rail 4 projecting from the end portion of the cylinder storage bag 3 on the side of the airtight fastener.
After placing the gas cylinder 2 on a, sliding the gas cylinder 2 and inserting the gas cylinder 2 into the airtight fastener 8 and the opening guard 9 from the bottom side, and after accommodating the entire gas cylinder 2 in the cylinder storage bag 3, Roll the gas cylinder 2 in the cylinder storage bag 3 and remove it from the guide rail 4,
The guide rail 4 is pulled out. And the opening guard 9
To close the airtight fastener 8 and fold the one end side of the cylinder storage bag 3 in three to obtain the surface fasteners 12a, 12
b and 12b are joined.

After that, the opener of the diluted gas cylinder 13 of the cylinder storage bag 3 is opened, the inert gas of the diluted gas cylinder 13 is filled into the cylinder storage bag 3, and the storage bag 3 is inflated by itself to dilute the leaked gas. To do. The leak gas in the cylinder storage bag 3 is diluted to a desired concentration by the amount of inert gas from the diluted gas cylinder 13, but when the bulge of the cylinder storage bag 3 is insufficient to dilute the leak gas to a desired concentration. Is replaced with a spare diluted gas cylinder 13 to supplement the inert gas.

Next, the first and second gas recovery bags 5 and 5 in a flat state are connected to the above-mentioned cylinder storage bag 3 by connecting tubes 15 and 16, and the cylinder storage bag 3 and the first and second gases are connected. It forms a closed circuit with the recovery bags 5 and 5, and each gas recovery bag 5 is filled with an inert gas from each diluted gas cylinder 13. The leaked gas in the cylinder storage bag 3 is dispersed in the inner volumes of the first and second gas recovery bags 5 and 5, and at the same time diluted to a lower concentration by the inert gas of the dilution gas cylinder 13 attached to these. Be stored. If the amount of leaked gas from the gas cylinder 2 is large,
It is also possible to properly connect the third and fourth gas recovery bags after the second gas recovery bag 5.

The cylinder storage bag 3 filled with the inert gas of each diluted gas cylinder 13 and the gas recovery bags 5 and 5 are
It is transported to the place where the gas cylinder 6 for dilution and pressure feeding and the abatement device 7 are located. A heavy cylinder storage bag 3 accommodating the gas cylinder 2 is carried by holding four carrying handles 11. Cylinder storage bag 3 and gas recovery bag 5,
In the transportation place of No. 5, the dilution and pressure-feeding gas cylinder 6 is connected to the dilution and pressure-feeding gas introduction port 3a of the cylinder storage bag 3 by the connecting tube 14, and the leakage gas discharge port 5b of the second gas recovery bag 5 is removed. The device 7 is connected by a connecting tube 17. The internal leak gas of the cylinder storage bag 3 and the first and second gas recovery bags 5 is further diluted by the inert gas from the dilution and pressure-feeding gas cylinder 6, and these are sequentially pumped through the second gas recovery bag 5. Harmful device 7
Will be recovered to.

Next, a simulation performed based on the configuration of this embodiment will be described. A vinyl chloride sheet reinforced with nylon cloth is used for the cylinder storage bag 3 and the gas recovery bag 5, and for a gas cylinder 2 having an internal volume of 47 liters, which is set to a filling pressure of 150 kg / cm 2 G,
The internal volume of the cylinder storage bag 3 was 580 liters, and the volume of the gas recovery bag 5 was 2 m3.

For the diluting and pressure-feeding gas cylinder 6 and each diluting gas cylinder 13, for example, nitrogen gas or carbon dioxide gas is used as an inert gas. As the dilution gas cylinder 13, a mini gas cylinder with an internal volume of about 100 cc is used in consideration of portability of the gas cylinder 2 and the cylinder storage bag 3, and liquefied gas is desirable as the inert gas due to its gas capacity, but leakage gas It is necessary to fully consider the properties of.

Under these conditions, the cylinder storage bag 3
After the gas cylinder 2 is stored in the cylinder storage bag 3 before the leakage gas is filled in the cylinder storage bag 3,
The gas recovery bag 5 was connected and the leaked gas from the cylinder storage bag 3 was guided to the first gas recovery bag 5. Similarly, when the second gas recovery bag 5 was connected to the first gas recovery bag 5 and the above operation was repeated, three gas recovery bags were required in this simulation.

After the gas leakage from the gas cylinder 2 is completed, the dilution and pressure feeding gas cylinder 6 is connected to the cylinder storage bag 3 and the abatement device 7 is connected to the third gas recovery bag.
The inert gas from the dilution and pressure-feeding gas cylinder 6 allowed the leakage gas of the gas cylinder 2 to be treated by the abatement device 7.

According to the above simulation, the leaked gas can be collected and treated easily and smoothly. Further, since the amount of leaked gas can be visually recognized as the bulging of the cylinder storage bag 3 and the gas recovery bag 5, it is possible to perform an appropriate processing operation with confidence.
Furthermore, when the airtightness of the cylinder storage bag 3, the airtight fastener 8 and the gas recovery bag 5 was confirmed, it was about 0.1 kg /
It was found that the pressure of cm2 was sufficiently maintained. The amount of leaked gas from the gas cylinder is usually a small amount and does not cause the internal pressure of the bags 3 and 5 to rise rapidly, so this value can be said to be a sufficient airtight pressure.

When the guide rail 4 is used, the gas cylinder 2 slides on the guide rail 4, so that the gas cylinder 2 can be easily stored in the cylinder storage bag 3 with a slight force. Further, the gas cylinder 2 does not scratch and damage the inner surface of the cylinder storage bag 3, and the sleeper 4
b, the pipes 4a, 4a are hermetically sealed fasteners 8 having openings.
Since it crosses over, the airtight fastener 8 does not have to be damaged.

In the present invention, the dilution / pressure feeding gas cylinder, the guide rail, and the opening guard described in the above-described embodiment and simulation can be omitted. When the diluting and pressure-feeding gas cylinder is omitted, the leaked gas can be recovered by the abatement device by directly crushing the cylinder storage bag and the gas recovery bag.

[0031]

As described above, according to the leakage gas cylinder storage bag of the present invention and the leakage gas recovery apparatus using the storage bag, when the gas leaks from the high pressure gas cylinder, the leakage gas is recovered and the gas cylinder It is possible to quickly and smoothly carry out safety measures from transportation to harm removal.

Further, by adopting a lightweight and foldable cylinder storage bag and a gas recovery bag, the storage and transportation of the gas cylinder can be performed easily, and the amount of gas leakage can be easily seen by the swelling of the bag. Since it is possible to confirm, it is possible to perform an appropriate processing operation according to the amount of leaked gas without anxiety. In addition, these cylinder storage bags and gas recovery bags can be manufactured at low cost and can be folded compactly and stored in a small space when not in use.

Furthermore, since a plurality of gas recovery bags can be connected, it is possible to cope with fluctuations in the amount of leaked gas, and the leaked gas can be stored in the cylinder storage bag and the internal volume of the gas recovery bag and the diluted gas cylinders attached to these. Since it is diluted to a low pressure with the inert gas of, the safety is further enhanced.

[Brief description of drawings]

FIG. 1 is a connection diagram of a leakage gas recovery device, a dilution and pressure feeding gas cylinder, and an abatement device showing an embodiment of the present invention.

FIG. 2 is a plan view of a cylinder storage bag showing an example of the present invention.

FIG. 3 is a cross-sectional view of a cylinder storage bag showing an embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view of a cylinder storage bag showing an example of the present invention.

[Explanation of symbols]

 1 ... Leakage gas recovery device 2 ... Gas cylinder 3 ... Cylinder storage bag 3a ... Diluting and pressure-feeding gas inlet 3b ... Leakage gas outlet 4 ... Guide rail 5 ... First and second gas recovery bag 5a ... Leakage gas inlet 5b ... Leakage gas discharge port 6 ... Diluting and pressure-feeding gas cylinder 7 ... Harmful remover 8 ... Airtight fastener 9 ... Opening guard 10 ... Opening handle 11 ... Conveying handle 12a, 12b ... Face fastener 13 ... Diluting gas cylinder C1, C2 ... Fold line

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsukazu Inada 4-320 Tsukakoshi, Sachi-ku, Kawasaki-shi, Kanagawa Japan Oxygen Co., Ltd. (72) Inventor Yoshikazu Shirane 1-15-1 Yamu, Tsurumi-ku, Yokohama-shi, Kanagawa No. Nihon Oxygen Co., Ltd. (72) Inventor Mitsuo Kojima 1-15-1 Yamu, Tsurumi-ku, Yokohama-shi, Kanagawa Nihon Oxygen Co. (72) Inventor Hitoshi Takahashi 3-32-26 Aoi, Adachi-ku, Tokyo Japan Carbon dioxide Co., Ltd.

Claims (2)

[Claims] 1. A cylinder storage bag for storing the leaked gas together with the gas cylinder when the high-pressure gas filled in the gas cylinder leaks, and the cylinder storage bag is formed of an airtight material into a bag shape. An airtight fastener is attached to the opening for taking in and out the gas cylinder, a dilution gas cylinder for diluting leak gas inside the recovery bag is attached to the cylinder storage bag, and an inert gas from the outside is introduced into the cylinder storage bag. A leak gas cylinder storage bag, wherein an active gas inlet and a leak gas outlet for discharging the leak gas diluted with the inert gas and the diluted gas to a separate collecting means are openable and closable. 2. A leak gas recovery device for recovering the leak gas when a high-pressure gas filled in the gas cylinder leaks and guiding the leak gas to a separate abatement device, the cylinder storing the leak gas together with the gas cylinder. A storage bag and a gas recovery bag for collecting the leaked gas inside the cylinder storage bag and sending it to the abatement device. The cylinder storage bag and the gas recovery bag are each formed of an airtight material. An airtight fastener is attached to the opening for taking in and out the gas cylinder, and a dilution gas cylinder for diluting the leaked gas inside each of the cylinder storage bag and the gas recovery bag is attached, and the cylinder storage bag also has a separate dilution function. Diluting and pressure-feeding gas inlet for introducing an inert gas from the pressure-feeding gas cylinder, and rare dilution of the dilution-and-pressure feeding gas cylinder and the cylinder storage bag. A leak gas outlet for discharging the leak gas inside the cylinder storage bag diluted with the inert gas of the release gas cylinder to the gas recovery bag is provided, and the leak gas from the cylinder storage bag is introduced into the gas recovery bag. Leakage gas recovery characterized by having a leak gas inlet and a leak gas outlet for discharging the leak gas inside the recovery bag diluted with the inert gas of the dilution gas cylinder to the abatement device. apparatus.