JPH09297083A - Catheter with sensor function, semiconductor physical amount sensor chip - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a catheter with a sensor function which is relatively simple in structure of a sensor part and can be made compact. SOLUTION: A semiconductor pressure sensor chip 6 and a pressure transmission medium 9 are accommodated in a catheter tube 2 having a pressure- receiving face 8a at a front end thereof. A pressure acting to the pressure- receiving face 8a is transmitted via the pressure transmission medium 9 to the sensor ship 6, thereby to detect the presence/absence of an obstacle. The sensor chip 6 has two diaphragms 12, 13 as a pressure-sensing part capable of sensing a pressure change. One of the diaphragms is assigned to detect the obstacle and the remaining one is assigned to detect a blood pressure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a catheter having a sensor function and a semiconductor type physical quantity sensor chip used in such a catheter.

[0002]

2. Description of the Related Art A catheter for measuring blood pressure and the like by inserting it into various tubes such as blood vessels in the human body is known. Conventionally, this type of catheter has no means for detecting the situation in the forward direction of the catheter tube, and the operator is forced to rely on his intuition to operate the tube. Therefore, it takes skill to guide the tip of the catheter tube to a desired portion.

Therefore, it has been conventionally proposed that not only the blood pressure sensor but also a sensor mechanism for sensing an obstacle be provided at the tip of the catheter tube and the catheter tube is operated based on the sensing result. The configuration example will be shown below.

The tip portion of the catheter tube is divided into two chambers, a first chamber and a second chamber, by a pressure partition wall. The semiconductor type pressure sensor chip is housed in the first chamber located on the distal end side with the semiconductor pressure sensor chip facing the distal end of the tube. And the first
A chamber is filled with a pressure transmission medium such as silicone gel, and the inlet is sealed with a piston. On the other hand, the second chamber located on the base end side accommodates a semiconductor type pressure sensor chip mounted on a pedestal and fills the pressure transmission medium. The sensor chip is directed toward the pressure introduction port on the outer circumference of the tube. Both sensor chips are provided with bonding pads, and signal cables are bonded to them.

With the above arrangement, the first chamber side functions as an obstacle sensor, and the second chamber side functions as a blood pressure sensor. Each sensor signal is separately output to the outside via each signal cable.

[0006]

However, when an attempt is made to install a sensor chip for detecting an obstacle separately from a sensor chip for measuring blood pressure, as in the conventional catheter described above,
The following problems arise.

Since the signal cable must be bonded to each sensor chip, a large mounting space is required and two signal cables are required. Therefore,
It becomes difficult to reduce the diameter of the sensor portion at the tip of the catheter tube. In addition, if the sensor chips are separately assembled, the structure naturally becomes complicated and the assembling work becomes troublesome.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a catheter having a sensor function, which has a relatively simple structure of the sensor portion and can be downsized. It is in.

Another object of the present invention is to provide a semiconductor type physical quantity sensor chip suitable for embodying the above excellent catheter and the like.

[0010]

In order to solve the above-mentioned problems, in the invention described in claims 1 to 5, a semiconductor type pressure sensor chip and a pressure transmission medium are provided in a catheter tube having a pressure receiving surface at its tip. In a catheter configured to transmit the pressure acting on the pressure receiving surface to the semiconductor pressure sensor chip via the pressure transmission medium, the sensor chip is provided with a pressure sensitive portion capable of sensing pressure fluctuations. A catheter having a sensor function, characterized in that a plurality of the catheters are provided for the detection of pressure acting on the pressure receiving surface, and another of them is assigned for another purpose. To do.

According to a second aspect of the present invention, in the first aspect, the sensor chip has a vertically long shape, and is arranged such that its longitudinal direction and the tube axial direction are parallel to each other.

According to a third aspect of the present invention, in the first or second aspect, the plurality of pressure sensitive portions are arranged side by side in the longitudinal direction of the chip. According to a fourth aspect of the present invention, in any one of the first to third aspects, all of the plurality of pressure sensitive portions are diaphragms including strain gauges.

According to a fifth aspect of the present invention, in the fourth aspect, the first diaphragm is arranged in the tube tip side region of the sensor chip, and the second diaphragm is arranged in the tube base end side region of the sensor chip. The sensor chip is mounted on the upper surface of a vertically long pedestal with a back pressure hole,
By penetrating a pressure introducing port in the outer peripheral portion of the catheter tube, the pressure in the tube outer region can be transmitted to the surface side of both diaphragms through the pressure introducing port, and the second pressure can be obtained through the back pressure hole. A pressure partition wall is provided in the gap between the lower surface of the pedestal and the inner wall surface of the catheter tube so that the pressure in the tube inner region can be transmitted only to the back surface side of the diaphragm.

According to a sixth aspect of the present invention, there is provided a semiconductor type physical quantity sensor chip used in a state of being housed in an elongated container, wherein a vertically long substrate is provided with a sensing section capable of sensing a change in a predetermined physical quantity. A gist of a semiconductor-type physical quantity sensor chip is characterized in that a plurality of the physical quantity sensor chips are provided and external connection terminals are arranged at one end of the substrate.

According to a seventh aspect of the invention, in the sixth aspect, at least one of the plurality of sensing units is a pressure sensing unit capable of sensing pressure fluctuation. According to the invention described in claim 8, in claim 6 or 7, the plurality of sensing portions are arranged side by side in the chip longitudinal direction.

According to a ninth aspect of the present invention, in the eighth aspect, each of the plurality of sensing units is a diaphragm including a strain gauge. Hereinafter, the "action" of the present invention
Will be explained.

First, the operation of the invention described in claim 1 will be described. In the present invention, when there is an obstacle or a stenosis site inside the tube into which the catheter tube is inserted, the insertion resistance of the tube increases and the pressure acting on the pressure receiving surface also increases accordingly. Such pressure fluctuations first spread to the pressure transmission medium, and finally to a part of the plurality of pressure sensitive parts. That is, the change in pressure is transmitted to the specific pressure sensitive portion via the pressure transmission medium. The sensor chip converts the pressure fluctuation into an electric signal and outputs the electric signal to the outside via a wiring such as a signal cable. Therefore,
The operator uses the output result as a criterion
It is possible to reliably detect the situation ahead of the traveling direction. Therefore, it is possible to reliably guide the tip of the catheter tube to a desired portion inside the tube.

The remaining one of the plurality of pressure sensitive parts in the sensor chip is assigned to another application such as for blood pressure measurement. The sensor chip converts the pressure fluctuation into an electric signal and outputs the electric signal to the outside through the wiring as well.

Therefore, according to this sensor chip, plural kinds of sensing are possible, and further, external connection terminals and a part of wirings to be provided on the sensor chip can be made common. As a result, the mounting space can be reduced by the amount of the omitted structure. Of course, if only one sensor chip is required, the complication of the structure can be avoided and the assembling work becomes relatively easy.

According to the second aspect of the present invention, even a sensor chip having an area larger than the sectional area of the catheter tube can be reliably accommodated in the catheter tube. Therefore, it is possible to sufficiently cope with the reduction of the diameter of the sensor portion at the tip of the catheter tube.

According to the third aspect of the present invention, the sensor chip width can be reduced by arranging a plurality of pressure sensitive portions side by side in the chip longitudinal direction. Therefore, it is convenient for reducing the diameter of the sensor portion.

According to the fourth aspect of the present invention, since the pressure sensitive portion is the diaphragm having the strain gauge, it is possible to surely and finely process them by the conventionally known semiconductor process.

According to the fifth aspect of the present invention, the pressure acting on the pressure receiving surface is transmitted to the back side of the first diaphragm, and the pressure in the tube outer region is provided with the pressure introducing port on the front side of the diaphragm. Communicate through. Therefore, the fluctuation component due to the pulsation is removed from the sensor signal output from the first diaphragm, and a corrected and more accurate obstacle detection signal can be obtained. Further, the pressure of the tube outer region is transmitted to the front surface side of the second diaphragm via the pressure introducing port, and the back pressure of the tube inner region is transmitted to the back surface side of the second diaphragm via the back pressure hole. Therefore,
The sensor signal output from the second diaphragm becomes a corrected and more accurate pipe pressure detection signal. Further, by providing the pressure barrier, the pressures of the obstacle detection region and the pipe pressure detection region do not buffer each other. That is, with this configuration, the sensing accuracy is surely increased.

According to the sixth to ninth aspects of the invention, since the substrate constituting the sensor chip is vertically long, it can be accommodated in an elongated container having a cross-sectional area smaller than its own. It is possible to Further, when there are a plurality of such sensing units, it becomes possible to allocate different sensing units to sense different physical quantities.
It is of course possible to assign the same physical quantity to a plurality of sensing units. Furthermore, by disposing the external connection terminal at one end of the substrate, connection is facilitated and space saving is achieved.

According to the invention described in claim 7, it is possible to detect one or more kinds of fluctuations of physical quantity including pressure fluctuations by using one sensor chip. According to the invention described in claim 8, by arranging the plurality of sensing portions side by side in the chip longitudinal direction, it is possible to avoid widening of the sensor chip.

According to the ninth aspect of the invention, since the sensing portion is a diaphragm having a strain gauge, it is possible to reliably and finely process them by a conventionally known semiconductor process.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment in which the present invention is embodied in a blood vessel catheter 1 will be described in detail below with reference to FIGS.

The blood vessel catheter 1 is composed of a catheter tube 2 to be inserted into a blood vessel and an operating means provided at the proximal end of the tube 2 for operating the catheter tube 2 outside the body. The operating means includes, for example, a plurality of wires inserted into the tube 2 and a wire operating unit for operating the wires. Also, tube 2
At the base end of the tube 2, an air compressor or the like for sending air under pressure to an expansion balloon provided near the tip of the tube 2 is provided. An air pipe is connected to the compressor. This air pipe is inserted into the tube 2,
A balloon is connected to its tip. Then, when air is supplied to the balloon, the narrowed blood vessel is expanded from the inner surface side by the action of the expanded balloon.

In the catheter 1 of this embodiment, a sensor assembly having an obstacle sensor section 3 and a blood pressure sensor section 4 is formed at the tip of the catheter tube 2. Hereinafter, the sensor assembly will be described in detail.

The sensor assembly comprises a pedestal 5, a semiconductor type pressure sensor chip 6, a signal cable 7, a piston 8, a pressure transmitting medium 9, pressure partitions 10 and 11, and the like.
FIG. 2 shows a semiconductor type pressure sensor chip 6 as a semiconductor type physical quantity sensor chip used in this embodiment. The sensor chip 6 has a vertically long rectangular shape, and is housed in the catheter tube 2 while being mounted on a pedestal 5 having the same vertically long rectangular shape.

On the silicon substrate 15 constituting the sensor chip 6, a first diaphragm 16 and a second diaphragm 17 are formed by etching as a plurality of pressure sensitive parts for sensing pressure fluctuations. A diffusion strain gauge 18 is formed on the front surface (that is, the surface not etched) of the silicon substrate 15 at each diaphragm 16, 17 portion.
Are formed one by one. Silicon substrate 1 on the side with the short side
When defined as the end portion of 5, the bonding pads 19 as external connection terminals are arranged in a straight line at one end portion thereof. Each bonding pad 19 and the diffusion strain gauge 18 are connected via a wiring pattern (not shown). The state of the connection is schematically shown in FIG.

Here, the size of the short side of the silicon substrate 15 and the pedestal 5 is smaller than the inner diameter of the tube 2, and the size of the long side is at least larger than the inner diameter of the tube 2. Therefore, the pedestal 5 on which the silicon substrate 15 is mounted can be inserted into the elongated tube 2. At that time, the end portion of the silicon substrate 15 on which the bonding pad 19 is formed is arranged on the base end side of the tube 2, and the end portion on the other side is arranged on the tip end side of the tube 2. That is, the longitudinal direction of the sensor chip 6 and the tube axis direction are parallel to each other. Therefore, the sensor chip 6 faces the direction orthogonal to the tube axis direction, that is, the tube outer peripheral direction. At this time, the first diaphragm 1
6 is on the tube tip side, and the second diaphragm 17 is on the tube base side.

As shown in FIGS. 1 and 2, the pedestal 5 in this embodiment is made of silicon, and a chip mounting recess 20 to which the sensor chip 6 is to be bonded is formed in the center of the upper surface of the pedestal 5. . In the chip mounting recess 20,
The first through hole 21 and the second through hole 22 are provided so as to be transparent. The first through hole 21 is located directly below the back surface of the first diaphragm 16, and the second through hole 22 is located directly below the back surface of the second diaphragm 17. In the present embodiment, the second
Through hole 22 functions as a so-called back pressure hole.

As shown in FIG. 2, a wiring pattern 23 is formed on the base end portion of the upper surface of the pedestal 5, and a bonding pad 24 is formed on one end thereof. And
The bonding pad 24 on the pedestal 5 side and the bonding pad 19 on the sensor chip 6 side are electrically connected via a bonding wire 25. Further, each lead wire of the signal cable 7 as wiring is soldered to the other end side of the wiring pattern 23. In this embodiment, there is only one signal cable 7, and the signal cable 7 passes through the tube 2 and reaches the base end portion thereof.

A pressure barrier 10 having a substantially semicircular shape is provided on the tip side of the sensor chip 6. A substantially semicircular pressure partition wall 11 is also provided in the center of the back surface of the pedestal 5.
These pressure barriers 10 and 11 close the gap between the pedestal 5 and the sensor chip 6 and the inner wall surface of the tube 2,
Thereby, the inside of the tube 2 is divided into two.

As shown in FIG. 1, at the outer peripheral portion of the catheter tube 2, pressure introducing ports 26 for introducing the pressure of the tube outer region to the inner region thereof are provided at two places. These pressure introducing ports 26 are located directly above the surfaces of the diaphragms 16 and 17.

In the piston sliding space 27 defined on the tip side of the tube 2 by the pressure barriers 10 and 11,
Silicone gel 9 as a pressure transmission medium is filled. The silicone gel 9 extends to the back surface side of the first diaphragm 16 via the first through hole 21. The opening 2a of the catheter tube 2 is sealed by a piston 8 as a closing member. Therefore, in this embodiment, the outer surface of the piston 8 serves as the pressure receiving surface 8a. A biocompatible resin material such as PTFE (polytetrafluoroethylene) or vinyl chloride is used as a material for forming the piston 8.

Further, the silicone gel 9 is also filled in the portion where the pressure inlet 26 is provided. The silicone gel 9 not only entirely covers the surface sides of the first and second diaphragms 16 and 17, but also
It extends to the connection portion between the signal cable 7 and the pedestal 5.

The space on the back surface side of the second diaphragm 17 communicates with the cavity region located on the proximal end side of the sensor assembly via the second through hole 22 which is a back pressure hole.
However, the silicone gel 9 does not exist in these spaces, but air exists instead. The pressure of this air is basically equal to the external air pressure.

Next, sensing by the catheter 1 of this embodiment having the above-mentioned sensor assembly will be described. When there is an obstacle (thrombosis, tumor, etc.) or a stenosis inside the blood vessel into which the catheter tube 2 is inserted, the insertion resistance of the tube 2 increases, and the pressure acting on the pressure receiving surface 8a of the piston 8 is also accompanied with it. To increase. When such a change occurs, the pressure of the silicone gel 9 filled in the piston sliding space 27 increases, and as a result, the pressure applied to the back surface side of the first diaphragm 16 also increases. In other words, the change in pressure that has occurred outside the tip end side of the sensor assembly is first transmitted through the silicone gel 9.
Will be indirectly transmitted to the diaphragm 16.
Then, the strain of the first diaphragm 16 increases,
A change occurs in the resistance value of the strain gauge 18 on it.
At this time, the sensor chip 6 converts the change in pressure into an electric signal, and outputs the electric signal to the pedestal 5 side via the bonding wire 25.

By the way, the pressure in the outer region of the tube is transmitted to the surface side of the first diaphragm 16 through the pressure introducing port 26 and the silicone gel 9. Therefore, from the obstacle detection signal output from the first diaphragm 16, the fluctuation due to the pulsation of blood pressure is removed.

The obstacle detection signal output to the pedestal 5 side is
Further, it is input / processed to the electric circuit at the proximal end of the tube 2 via the signal cable 7 and visualized. Therefore,
The operator can reliably detect the situation in front of the traveling direction, that is, the presence or absence of an obstacle or stenosis, using the visualized data as a criterion. That is, the operator
By manipulating the wire in the above case, the head of the sensor assembly should be oriented in a direction that reduces the pressure.

Only the pressure in the outer region of the tube is transmitted to the surface side of the second diaphragm 17 through the pressure introducing port 26 and the silicone gel 9. Back pressure acts on the back surface side of the diaphragm 17 via the second through hole 22. Therefore, the fluctuation of the air pressure in the cavity region is removed from the second diaphragm 17. The blood pressure detection signal thus corrected is also output to the outside through the signal cable 7 and visualized.

The characteristic effects of this embodiment will be listed below. (A) In the catheter 1, one of the two diaphragms 16 and 17 in the sensor chip 6 is assigned for obstacle detection and the other is assigned for blood pressure detection. Therefore, it is possible to perform a plurality of types of sensing using one sensor chip 6. In this case, a part of the bonding pad 19 and the signal cable 7 to be provided on the sensor chip 6 can be shared. Specifically, in the past, eight bonding pads 19 were required in total (see FIG. 3 (a)), but in the present embodiment, six bonding pads 19 are sufficient (see FIG. 3 (b)). . That is, two bonding pads 19 are omitted. Therefore, the sensor chip 6 can be downsized accordingly, and the mounting space can be reduced. In addition, the fact that only one signal cable 7 is required has a positive effect on saving space.
Therefore, it is possible to sufficiently cope with the reduction of the diameter of the sensor assembly at the distal end of the catheter tube 2. Of course, when such a sensor chip 6 is used, complication of the configuration can be avoided and the assembling work becomes relatively easy.

(B) In this catheter 1, the sensor chip 6 has a vertically long shape and is arranged so that its longitudinal direction and the tube axial direction are parallel to each other. Therefore, even the sensor chip 6 having an area larger than the cross-sectional area of the catheter tube 2 can be reliably accommodated in the tube 2. Further, by arranging the first and second diaphragms 16 and 17 side by side in the chip longitudinal direction, the width of the sensor chip 6 can be reduced. The above also contributes to the downsizing of the sensor assembly.

(C) In the catheter 1, the pressure sensitive portions are the diaphragms 16 and 17 having the diffusion strain gauge 18. Therefore, it is possible to reliably and finely process them by the conventionally known semiconductor process. Therefore, the technical difficulty in manufacturing the sensor chip 6 is also small.

(D) With this catheter 1, it is possible to obtain accurate obstacle detection signals and blood pressure detection signals from which the fluctuations have been removed as described above. In addition, the presence of the pressure barriers 10 and 11 prevents the buffering of the mutual pressures in the region for detecting the obstacle and the region for detecting the blood pressure. Therefore, with this configuration, the sensing accuracy for both the obstacle and the blood pressure is surely increased.

(E) In this catheter 1, the bonding pads 19 are arranged centrally on one end of the silicon substrate 15. Therefore, the connection with the pedestal 5 side is facilitated and the space is saved.

The present invention is not limited to the above embodiment, and can be modified as follows, for example. (1) The number of pressure-sensitive parts in the sensor chip 6 is not limited to two, and may be three or more. For example, in another example of the sensor chip 31 shown in FIG.
6, 17, and 32 are aligned in a straight line along the length of the chip.
One is provided. With this configuration, not only can it be housed in the elongated catheter tube 2, but also the third diaphragm 32 can be assigned to the sensing of physical quantities other than obstacle detection and blood pressure detection. That is, different physical quantities can be sensed for each of the diaphragms 16, 17, 32. However, the third diaphragm 32 may be used as a backup for the first diaphragm 16 or the second diaphragm 17.

(2) The pressure sensitive portions of the sensor chips 6 and 31 are the diaphragm 16 having the diffusion strain gauge 18,
The present invention is not limited to 17, 32 and may be, for example, a cantilever provided with the diffusion strain gauge 18. Further, the sensing unit in the sensor chips 6 and 31 is not limited to the pressure sensing unit capable of sensing the pressure variation, and may be a sensing unit capable of sensing the variation of other physical quantity (for example, acceleration, temperature, magnetic force, etc.). Good. The sensing units formed in one sensor chip 6, 31 may be of the same type as in the above-described embodiment or another example, or may be of different types.

(3) The external connection terminal is not limited to the bonding pad 19 and may be another structure such as a pin. (4) The pressure barriers 10 and 11 may be separate from the sensor chips 6 and 31 and the pedestal 5 as in the embodiment, or may be formed by convexly forming a part of them (that is, integrated). Good. Further, the pressure barrier may be replaced by projecting the inner wall surface side of the catheter tube 2.

(5) It is possible to omit the pedestal 5. In this case, the catheter tube 2 can be downsized by the amount corresponding to the volume reduction of the pedestal 5. (6) The container in which the sensor chips 6 and 31 are to be housed is
It is not limited to the catheter tube 2 and may be another elongated container.

Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiment will be listed below together with their effects. (1) In a catheter in which a semiconductor-type physical quantity sensor chip is housed in a catheter tube, a plurality of sensing units capable of sensing a change in a specific physical quantity are provided in the sensor chip, and a part of them is detected as an obstacle. A catheter with a sensor function, characterized in that it is allocated for use in the other and another for the other purpose. With this configuration,
The structure of the sensor portion can be made relatively simple and can be made compact.

The technical terms used in the present specification are defined as follows. “Biocompatible: It has low reactivity with blood, body fluids, lymph, and other substances in the body.”

[0055]

As described in detail above, according to the inventions described in claims 1 to 5, a catheter having a sensor function, which has a relatively simple structure of the sensor portion and can be made compact, is provided. Can be provided.

According to the second aspect of the invention, the size can be further reduced. According to the invention described in claim 3, further miniaturization can be achieved. Claim 4
According to the invention described in (1), it is possible to surely and finely process them by a conventionally known semiconductor process, so that it is possible to further reduce the size and facilitate the manufacturing.

According to the fifth aspect of the present invention, since there is no pressure buffer between the regions for detecting different physical quantities, it is possible to surely improve the sensing accuracy. According to the invention described in claims 6 to 9, it is possible to provide a semiconductor type physical quantity sensor chip suitable for embodying the above excellent catheter and the like.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a sensor assembly provided at a catheter tip according to an embodiment.

FIG. 2 is a partially cutaway exploded perspective view of the sensor chip, pedestal, pressure barrier and catheter tube of the same.

3A is a connection diagram of a diffusion strain gauge in a conventional sensor chip, and FIG. 3B is a connection diagram of a diffusion strain gauge in the sensor chip of the present embodiment.

FIG. 4 is a perspective view of a sensor chip according to another example 1.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Catheter, 2 ... Catheter tube as an elongated container, 5 ... Pedestal, 6,31 ... Semiconductor type pressure sensor chip as semiconductor type physical quantity sensor chip, 8a ... Pressure receiving surface, 9 ... Silicone gel as pressure transmission medium, 10 ，
11 ... Pressure partition wall, 15 ... Silicon substrate, 16 ... First diaphragm as pressure sensitive portion, 17 ... Second diaphragm as pressure sensitive portion
, 18 ... Diffusion strain gauge, 22 ... Second through hole as back pressure hole, 24 ... Bonding pad as external connection terminal, 26 ... Pressure introducing port, 32 ... Third diaphragm as pressure sensitive portion.

Claims (9)

[Claims] 1. A semiconductor type pressure sensor chip and a pressure transmitting medium are housed in a catheter tube having a pressure receiving surface at its tip, and the pressure acting on the pressure receiving surface is transferred to the semiconductor type pressure sensor chip via the pressure transmitting medium. A plurality of pressure-sensitive parts capable of sensing pressure fluctuations are provided in the sensor chip, and some of them are assigned to detect pressure acting on the pressure-receiving surface. , A catheter with a sensor function, characterized in that another is assigned to another application. 2. The sensor function according to claim 1, wherein the sensor chip has a vertically long shape, and is arranged so that its longitudinal direction and the tube axis direction are parallel to each other. catheter. 3. The pressure-sensitive parts are arranged side by side in a chip longitudinal direction.
A catheter equipped with the sensor function described in 1. 4. The pressure-sensitive portion is a diaphragm including a strain gauge.
4. A catheter having the sensor function according to any one of 3 to 3. 5. A vertically long pedestal in which a first diaphragm is arranged in a tube front end side area of the sensor chip and a second diaphragm is arranged in a tube base end side area of the sensor chip, and the sensor chip has a back pressure hole. Mounted on the upper surface of the catheter tube, and by penetrating the pressure introducing port in the outer peripheral portion of the catheter tube, the pressure of the tube outer region can be transmitted to the surface side of both diaphragms through the pressure introducing port, and the back pressure hole is formed. 5. A pressure partition wall is provided in the gap between the lower surface of the pedestal and the inner wall surface of the catheter tube so that the pressure in the tube inner region can be transmitted only to the back surface side of the second diaphragm via the pressure diaphragm. A catheter equipped with the sensor function described in 1. 6. A semiconductor-type physical quantity sensor chip used in a state of being housed in an elongated container, wherein a vertically long substrate is provided with a plurality of sensing parts capable of sensing a change in a predetermined physical quantity, and the substrate. A semiconductor-type physical quantity sensor chip, characterized in that an external connection terminal is arranged at one end of the. 7. The semiconductor physical quantity sensor chip according to claim 6, wherein at least one of the plurality of sensing units is a pressure sensing unit capable of sensing pressure fluctuation. 8. The sensor according to claim 6, wherein the plurality of sensing parts are arranged side by side in the longitudinal direction of the chip.
The semiconductor-type physical quantity sensor chip described in 1. 9. The plurality of sensing parts are diaphragms each having a strain gauge.
The semiconductor-type physical quantity sensor chip described in 1.