JPH09188600A - Carbon whisker and method of manufacturing the same - Google Patents
Carbon whisker and method of manufacturing the sameInfo
- Publication number
- JPH09188600A JPH09188600A JP8000994A JP99496A JPH09188600A JP H09188600 A JPH09188600 A JP H09188600A JP 8000994 A JP8000994 A JP 8000994A JP 99496 A JP99496 A JP 99496A JP H09188600 A JPH09188600 A JP H09188600A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- whisker
- diameter
- whiskers
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 12
- 239000010439 graphite Substances 0.000 claims abstract description 12
- 238000010891 electric arc Methods 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000011261 inert gas Substances 0.000 claims abstract description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- 239000002041 carbon nanotube Substances 0.000 description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- -1 platinum group metals Chemical class 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はカーボンウイスカー
及びその製造方法に関するものである。TECHNICAL FIELD The present invention relates to a carbon whisker and a method for producing the same.
【０００２】[0002]
【従来の技術】２つの黒鉛電極間にアーク放電を行うと
きに、その陰極堆積物中にカーボンウイスカーが生成す
ることは知られている。このようにして得られるカーボ
ンウイスカーは、その直径が０．１μｍより小さいもの
であり、通常、カーボンナノチューブと呼ばれている。
しかしながら、このようなカーボンナノチューブは、超
微粒子であることから、工業製品としては取扱い性の悪
いものであった。2. Description of the Prior Art It is known that carbon whiskers are formed in a cathode deposit when an arc discharge is generated between two graphite electrodes. The carbon whiskers thus obtained have a diameter smaller than 0.1 μm and are usually called carbon nanotubes.
However, since such carbon nanotubes are ultrafine particles, they are not easy to handle as industrial products.
【０００３】[0003]
【発明が解決しようとする課題】本発明は、その直径が
マイクロメートルオーダの工業製品として取扱いの容易
なカーボンウイスカー及びその製造方法を提供すること
をその課題とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a carbon whisker which is easy to handle as an industrial product having a diameter on the order of micrometers and a method for producing the carbon whisker.
【０００４】[0004]
【課題を解決するための手段】本発明者らは、前記課題
を解決すべく鋭意研究を重ねた結果、パラジウムに代表
される水素吸蔵性金属と黒鉛からなる陽極と、耐熱性の
任意の陰極との間に、ヘリウムに代表される不活性ガス
中でアーク放電をさせるときには、陰極上にその直径が
マイクロメートルオーダのカーボンウイスカーを含む堆
積物が生成することを見出し、本発明を完成するに至っ
た。即ち、本発明によれば、カーボンウイスカーからな
り、該ウイスカーの直径が０．１〜１０μｍであること
を特徴とするカーボンウイスカーが提供される。また、
本発明によれば、黒鉛と水素吸蔵性金属からなる陽極と
耐熱性の任意の陰極との間に、不活性ガス中でアーク放
電をさせて陰極上にカーボンウイスカーを含む炭素堆積
物を生成させることを特徴とする前記カーボンウイスカ
ーの製造方法が提供される。Means for Solving the Problems As a result of intensive studies to solve the above-mentioned problems, the present inventors have found that an anode made of a hydrogen storage metal represented by palladium and graphite, and an arbitrary heat-resistant cathode. In the meantime, when an arc discharge is carried out in an inert gas represented by helium, it is found that a deposit containing carbon whiskers having a diameter of the order of micrometers is formed on the cathode, and the present invention was completed. I arrived. That is, according to the present invention, there is provided a carbon whisker comprising a carbon whisker, wherein the whisker has a diameter of 0.1 to 10 μm. Also,
According to the present invention, an anode made of graphite and a hydrogen storage metal and an arbitrary heat-resistant cathode are subjected to arc discharge in an inert gas to generate a carbon deposit containing carbon whiskers on the cathode. A method for manufacturing the carbon whiskers is provided.
【０００５】[0005]
【発明の実施の形態】本発明のカーボンウイスカーは、
従来のカーボンナノチューブの場合と同様に、アーク放
電装置を用いて製造される。陽極としては、黒鉛と水素
吸蔵性金属からなるものが用いられる。この場合、水素
吸蔵性金属は、黒鉛中に挿入又は混入してもよく、ま
た、黒鉛に併置してもよい。陰極としては、耐熱性加電
導性の任意の材質の棒またはブロックが用いられる。陽
極棒の横断面における、黒鉛が占める断面積Ｓ1に対す
る水素吸蔵性金属が占める断面積Ｓ2の比Ｓ2／Ｓ1は
０．０１〜０．９、好ましくは０．１〜０．２である。
黒鉛棒の直径は特に制限されないが、通常、１〜５０ｍ
ｍ、好ましくは１０〜２０ｍｍである。また、両電極間
の距離は、０．５〜５０ｍｍ、好ましくは１〜５ｍｍで
ある。水素吸蔵性金属としては、パラジウムの他、白
金、イリジウム等の従来公知のもの、特に、白金族金属
が用いられる。本発明のカーボンウイスカーの作製条件
を示すと、放電電流密度（直流）：１０〜１０００Ａ／
ｃｍ2、好ましくは１００〜２００Ａ／ｃｍ2、放電電
圧：１０〜１００Ｖ、好ましくは１５〜２５Ｖ、不活性
ガス雰囲気圧：１〜１０００Ｔｏｒｒ、好ましくは１０
〜１００Ｔｏｒｒである。前記のようなアーク放電によ
り、陰極上にカーボンウイスカーを含む炭素堆積物が形
成されるが、カーボンウイスカーはその炭素堆積物の表
面層から空間に斜めに直線的に突出するように生成す
る。このカーボンウイスカーは、炭素を主成分とするも
ので、外見的には細長い直線的な形状を示し、その直径
は０．１〜１０μｍであり、その平均直径は約１μｍ程
度である。また、その長さは１０〜１０００μｍ、特
に、２０〜２００μｍであり、その平均長さは約８０〜
１００μｍ程度である。BEST MODE FOR CARRYING OUT THE INVENTION The carbon whiskers of the present invention are
As with conventional carbon nanotubes, it is manufactured using an arc discharge device. As the anode, one made of graphite and a hydrogen storage metal is used. In this case, the hydrogen occluding metal may be inserted or mixed in the graphite, or may be placed in parallel with the graphite. As the cathode, a rod or block made of any heat-resistant and electrically conductive material is used. The ratio S 2 / S 1 of the cross-sectional area S 2 occupied by the hydrogen-absorbing metal to the cross-sectional area S 1 occupied by graphite in the cross section of the anode rod is 0.01 to 0.9, preferably 0.1 to 0.2. Is.
The diameter of the graphite rod is not particularly limited, but is usually 1 to 50 m.
m, preferably 10 to 20 mm. The distance between both electrodes is 0.5 to 50 mm, preferably 1 to 5 mm. As the hydrogen occluding metal, in addition to palladium, conventionally known ones such as platinum and iridium, and particularly platinum group metals are used. The conditions for producing the carbon whiskers of the present invention are as follows: discharge current density (DC): 10 to 1000 A /
cm 2 , preferably 100 to 200 A / cm 2 , discharge voltage: 10 to 100 V, preferably 15 to 25 V, inert gas atmosphere pressure: 1 to 1000 Torr, preferably 10
~ 100 Torr. By the arc discharge as described above, a carbon deposit containing carbon whiskers is formed on the cathode, and the carbon whiskers are generated so as to obliquely and linearly protrude from the surface layer of the carbon deposit into the space. This carbon whisker, which contains carbon as a main component, has a slender linear shape in appearance, its diameter is 0.1 to 10 μm, and its average diameter is about 1 μm. The length is 10 to 1000 μm, especially 20 to 200 μm, and the average length is about 80 to
It is about 100 μm.
【０００６】本発明で製造されるカーボンウイスカー
は、多数のコーン（中空円錘体形状）が円柱状に積層し
た構造を持っている。コーンの頂点は閉じておらず、こ
のカーボンウイスカー内部には空隙もしくは陽極に使用
した金属の粒子が存在する。頂角が小さなコーンから構
成されるカーボンウイスカーでは、空隙が連続し中空構
造、即ち、パイプ形状になっている。そして、大部分の
カーボンウイスカーは、円柱状積層構造体の外周表面を
別のカーボン層が外層として被覆している。この外層の
厚さは個々のカーボンウイスカーでほぼ一定で、０．１
〜４μｍ程度である。この外層の表面はなめらかであ
る。The carbon whiskers produced by the present invention have a structure in which a large number of cones (hollow conical shapes) are laminated in a columnar shape. The apex of the cone is not closed, and there are voids or particles of the metal used for the anode inside this carbon whisker. In a carbon whisker composed of a cone with a small apex angle, voids are continuous and have a hollow structure, that is, a pipe shape. In most of the carbon whiskers, the outer peripheral surface of the cylindrical laminated structure is covered with another carbon layer as an outer layer. The thickness of this outer layer is almost constant for each carbon whisker and is 0.1
It is about 4 μm. The surface of this outer layer is smooth.
【０００７】[0007]
【実施例】次に本発明を実施例により詳述する。 実施例 アーク放電炉としては、電極が水平載置の真空冶金
（株）製のＡＣ−３型を用いた。また、その陽極として
は、直径１５ｍｍの黒鉛棒の中心部に、直径５ｍｍの純
パラジウム金属棒を挿入した構造の円柱状炭素電極を用
い、陰極としては、放電部が平面の黒鉛ブロック（縦：
４０ｍｍ、横：８０ｍｍ、高さ：８５ｍｍ）を用いた。
また、アーク放電は、ヘリウムガスの流通下で行い、そ
の具体的条件を示すと以下の通りである。 （１）放電電流（直流）：３００Ａ （２）放電電圧 ：１９Ｖ （３）Ｈｅ圧力 ：５０Ｔｏｒｒ （４）Ｈｅ流量 ：５．０ＳＬＭ 前記条件で２５分間アーク放電を行ったところ、陰極上
にカーボンウイスカーを含む炭素堆積物が形成された。
カーボンウイスカーは、その炭素堆積物の表面層から空
間に直線的に斜め方向に突出し、それらウイスカーの間
には介在物がなく、容易に回収することができた。ま
た、その大きさによる機械的ふるい分けも容易であっ
た。このように得られたカーボンウイスカーは、外見的
には直線状の円柱形状を示し、内部構造的には、積層コ
ーン構造単独のものと積層コーン構造をカーボン外層が
被覆した二重構造の２種類の構造が認められた。積層コ
ーン構造は、多数の中空コーンの積層構造、即ち、第１
のコーンのその中空内に第２のコーンをその先端から挿
入した構造を有し、全体が円柱状に形成されたものであ
る。多くのコーンの頂点は開いていて、このカーボンウ
イスカー内部には空隙もしくはパラジウムの粒子が存在
した。コーン頂角の小さなカーボンウイスカーでは、空
隙が連続し中空構造、即ち、パイプ形状になっていた。
一方、２重構造のものは、前記積層コーン構造の円柱体
の外周表面に、別のカーボン層が外層として形成された
ものである。このものは、その外層の形成により、非常
に滑らかな表面を有するものである。前記カーボンウイ
スカーの直径は、約０．３〜２μｍの範囲に分布し、そ
の平均直径は約１μｍであった。また、カーボンウイス
カーの大半は３０〜１００μｍの長さを有し、その平均
長さは約８０μｍであった。前記２重構造のカーボンウ
イスカーの生成割合は、全カーボンウイスカーに対し、
約９５重量％であった。Next, the present invention will be described in detail with reference to examples. Example As an arc discharge furnace, AC-3 type manufactured by Vacuum Metallurgical Co., Ltd. in which the electrodes were horizontally placed was used. A cylindrical carbon electrode having a structure in which a pure palladium metal rod having a diameter of 5 mm is inserted into the center of a graphite rod having a diameter of 15 mm is used as the anode, and a graphite block having a flat discharge portion (vertical:
40 mm, width: 80 mm, height: 85 mm) were used.
The arc discharge is performed under the flow of helium gas, and the specific conditions thereof are as follows. (1) Discharge current (DC): 300 A (2) Discharge voltage: 19 V (3) He pressure: 50 Torr (4) He flow rate: 5.0 SLM When arc discharge was performed for 25 minutes under the above conditions, carbon whiskers were formed on the cathode. A carbon deposit containing was formed.
The carbon whiskers were linearly and obliquely projected into the space from the surface layer of the carbon deposit, and there were no inclusions between the whiskers, and they could be easily recovered. Also, mechanical sieving according to the size was easy. The thus-obtained carbon whiskers have an outwardly linear columnar shape, and in terms of the internal structure, there are two types: a laminated cone structure alone and a double structure in which the laminated cone structure is covered with a carbon outer layer. The structure of The laminated cone structure is a laminated structure of a large number of hollow cones, that is, the first cone.
The cone has a structure in which the second cone is inserted from the tip into the hollow of the cone, and the whole cone is formed in a cylindrical shape. Many cones had open vertices, with voids or palladium particles inside the carbon whiskers. In the carbon whiskers with a small cone apex, the voids were continuous and had a hollow structure, that is, a pipe shape.
On the other hand, in the double structure, another carbon layer is formed as an outer layer on the outer peripheral surface of the cylindrical body having the laminated cone structure. This one has a very smooth surface due to the formation of its outer layer. The diameter of the carbon whiskers was distributed in the range of about 0.3 to 2 μm, and the average diameter was about 1 μm. Most of the carbon whiskers had a length of 30 to 100 μm, and their average length was about 80 μm. The formation ratio of the carbon whiskers having the double structure is
It was about 95% by weight.
【０００８】[0008]
【発明の効果】本発明によれば、従来のカーボンナノチ
ューブよりも大きな直径を有するカーボンウイスカーを
容易に得ることができる。本発明のカーボンウイスカー
は、その直径がマイクロメートルのオーダであることか
ら、工業製品として容易に取扱うことができ、各種の用
途、例えば、マイクロマシンの滑り軸や回転軸として有
利に用いることができる。According to the present invention, carbon whiskers having a diameter larger than that of conventional carbon nanotubes can be easily obtained. Since the carbon whiskers of the present invention have a diameter on the order of micrometers, they can be easily handled as industrial products and can be advantageously used for various purposes, for example, as a sliding shaft or a rotating shaft of a micromachine.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 湯村 守雄 茨城県つくば市東１丁目１番 工業技術院 物質工学工業技術研究所内 (72)発明者 内田 邦夫 茨城県つくば市東１丁目１番 工業技術院 物質工学工業技術研究所内 (72)発明者 栗木 安則 茨城県つくば市東１丁目１番 工業技術院 物質工学工業技術研究所内 (72)発明者 伊ヶ崎 文和 茨城県つくば市東１丁目１番 工業技術院 物質工学工業技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Morio Yumura 1-1, Higashi Tsukuba-shi, Ibaraki Institute of Industrial Science and Technology, Institute of Materials Engineering (72) Inventor Kunio Uchida 1-1-chome, Tsukuba-shi, Ibaraki Institute of Industrial Materials Institute of Engineering and Technology (72) Inventor Yasunori Kuriki, 1-1, Higashi, Tsukuba-shi, Ibaraki Institute of Industrial Science and Technology, Institute of Materials Engineering (72) Inventor, Fumika Igasaki, 1-1, East, Tsukuba, Ibaraki Institute of Materials Engineering AIST
Claims (3)
カーの直径が０．１〜１０μｍであることを特徴とする
カーボンウイスカー。1. A carbon whisker comprising a carbon whisker, wherein the whisker has a diameter of 0.1 to 10 μm.
イスカー。2. The carbon whisker according to claim 1, which has a hollow structure.
意の陰極との間に、不活性ガス中でアーク放電をさせて
陰極上にカーボンウイスカーを含む炭素堆積物を生成さ
せることを特徴とする請求項１のカーボンウイスカーの
製造方法。3. A carbon deposit containing carbon whiskers is formed on the cathode by performing arc discharge in an inert gas between an anode made of graphite and a hydrogen storage metal and an arbitrary cathode. The method for producing a carbon whisker according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8000994A JP2863828B2 (en) | 1996-01-08 | 1996-01-08 | Carbon whisker and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8000994A JP2863828B2 (en) | 1996-01-08 | 1996-01-08 | Carbon whisker and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09188600A true JPH09188600A (en) | 1997-07-22 |
| JP2863828B2 JP2863828B2 (en) | 1999-03-03 |
Family
ID=11489159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8000994A Expired - Lifetime JP2863828B2 (en) | 1996-01-08 | 1996-01-08 | Carbon whisker and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2863828B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6624589B2 (en) | 2000-05-30 | 2003-09-23 | Canon Kabushiki Kaisha | Electron emitting device, electron source, and image forming apparatus |
| US6848962B2 (en) | 2000-09-01 | 2005-02-01 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image-forming apparatus, and method for producing electron-emitting device and electron-emitting apparatus |
| US6853126B2 (en) | 2000-09-22 | 2005-02-08 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image forming apparatus, and electron-emitting apparatus |
| US6858990B2 (en) | 2001-09-07 | 2005-02-22 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image forming apparatus, and method of manufacturing electron-emitting device and electron source |
| US6948995B2 (en) | 2001-09-10 | 2005-09-27 | Canon Kabushiki Kaisha | Manufacture method for electron-emitting device, electron source, light-emitting apparatus, and image forming apparatus |
| US7012362B2 (en) | 2000-09-01 | 2006-03-14 | Canon Kabushiki Kaisha | Electron-emitting devices, electron sources, and image-forming apparatus |
| US7034444B2 (en) | 2000-09-01 | 2006-04-25 | Canon Kabushiki Kaisha | Electron-emitting device, electron source and image-forming apparatus, and method for manufacturing electron emitting device |
| US7074105B2 (en) | 2001-03-27 | 2006-07-11 | Canon Kabushiki Kaisha | Catalyst used to form carbon fiber, method of making the same and electron emitting device, electron source, image forming apparatus, secondary battery and body for storing hydrogen |
| US7186160B2 (en) | 2000-09-01 | 2007-03-06 | Canon Kabushiki Kaisha | Electron-emitting device, electron-emitting apparatus, image display apparatus, and light-emitting apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01101373A (en) * | 1987-10-13 | 1989-04-19 | Daiso Co Ltd | Electrically conductive composition |
| JPH07197325A (en) * | 1993-12-28 | 1995-08-01 | Nec Corp | Production of single-layer carbon nanotube |
-
1996
- 1996-01-08 JP JP8000994A patent/JP2863828B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01101373A (en) * | 1987-10-13 | 1989-04-19 | Daiso Co Ltd | Electrically conductive composition |
| JPH07197325A (en) * | 1993-12-28 | 1995-08-01 | Nec Corp | Production of single-layer carbon nanotube |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6933664B2 (en) | 2000-05-30 | 2005-08-23 | Canon Kabushiki Kaisha | Electron emitting device, electron source, and image forming apparatus |
| US6624589B2 (en) | 2000-05-30 | 2003-09-23 | Canon Kabushiki Kaisha | Electron emitting device, electron source, and image forming apparatus |
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| US7459844B2 (en) | 2000-09-01 | 2008-12-02 | Canon Kabushiki Kaisha | Electron-emitting device, electron-emitting apparatus, image display apparatus, and light-emitting apparatus |
| US7198966B2 (en) | 2000-09-01 | 2007-04-03 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image-forming apparatus, and method for producing electron-emitting device and electron-emitting apparatus |
| US7227311B2 (en) | 2000-09-01 | 2007-06-05 | Canon Kabushiki Kaisha | Electron-emitting device, electron-emitting apparatus, image display apparatus, and light-emitting apparatus |
| US6848962B2 (en) | 2000-09-01 | 2005-02-01 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image-forming apparatus, and method for producing electron-emitting device and electron-emitting apparatus |
| US6853126B2 (en) | 2000-09-22 | 2005-02-08 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image forming apparatus, and electron-emitting apparatus |
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| US7399215B2 (en) | 2001-09-07 | 2008-07-15 | Canon Kabushiki Kaisha | Method of manufacturing electron-emitting device and electron source |
| US6858990B2 (en) | 2001-09-07 | 2005-02-22 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, image forming apparatus, and method of manufacturing electron-emitting device and electron source |
| US6948995B2 (en) | 2001-09-10 | 2005-09-27 | Canon Kabushiki Kaisha | Manufacture method for electron-emitting device, electron source, light-emitting apparatus, and image forming apparatus |
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| JP2863828B2 (en) | 1999-03-03 |
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