JPH09173911A - Very small metering amount discharge device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a very small metering amt. discharge device capable of desired high speed response and mist ejection by installing a check valve to be closed by magnetic attractive force of a permanent magnet in a suction flow passage and a discharge flow passage in a pump room of a diaphragm type pump set using a piezoelectric element as a driving source and having a glass made diaphragm. SOLUTION: A low viscosity material is forcibly fed to the suction flow passage 4a of a pump case 4 through a suction pipe 22 with a valve plate 21b brought into closed contact with the seat face of a vent valve seat 21a the time of impressing internal pressure to a supply vessel 20. The low viscosity material is discharged from a discharge nozzle 7 by applying voltage to the piezoelectric element 1 and making the glass made diaphragm 2 bent toward a pump room 3 side. Next, when the voltage is shut off, the piezoelectric element 1 is contracted, negative pressure is generated in the pump room 3 by the restoring force of the diaphragm 2 and the low viscosity material is sucked to be replenished. A check valve set 5 is installed in the suction flow passage 4a and is constituted so as to attach the permanent magnetic 5e to the valve seat 2a to guarantee highly reliable operation.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to application of adhesives, application of lubricants, application of paints, etc., or application of reagent products for assembling small parts, dispensing liquids, etc. in the fields of production and research. The present invention relates to an apparatus for intermittently discharging a small amount of a low-viscosity liquid in a non-contact manner with an object to be coated.

[0002]

2. Description of the Related Art Conventionally, various low-viscosity liquids such as instant adhesives, lubricating oils, fluxes, anaerobic adhesives, magnetic fluids,
A squeeze-shaped tube pump that pumps the liquid while squeezing the elastic tube by rotating the rotating roller to make a dispenser device that discharges ink, low-viscosity paint, etc. intermittently or continuously, or a transparent cylinder called a syringe. A pulse type that encloses the liquid material in a container and directly pressurizes the liquid with precisely controlled pulse air to discharge quantitatively, or eliminates the check valve mechanism like a general cylinder type pump, and uses two Is performed by a pump or the like called a plunger type syringe pump that sucks, measures, and discharges the liquid by the relative movement of the piston.

The squeeze type tube pump type dispenser does not have a valve mechanism and is suitable for continuous pressure feeding at a low pressure, but it does not have the high-speed responsiveness required in a mass production plant or the like, and an elastic tube for pumping is not used. It has a short life, has problems in stability of performance and precision quantitativeness, and has the drawback that the elastic tube must be replaced in a short period of time. In addition, since pressure is fed while squeezing with a roller, liquid pooling at the discharge nozzle is likely to occur, and in order to prevent this, an operation of pulling back the liquid fed by reverse rotation of the rotating roller is required.

Further, in the method of pressurizing the transparent cylindrical container with pulsed air, pressure control with pulsed air, which is a compressed gas to be pressurized, is delicate and it is difficult to maintain and adjust the discharge accuracy, and a liquid pool at the tip of the discharge nozzle. Has a problem that is likely to occur.

Further, the plunger type syringe pump type requires complicated delicate control for ensuring quantitativeness of the low-viscosity liquid by relative driving of two pistons, and negative pressure during liquid suction. The pressure causes a difference in suction amount due to the difference in the head of the liquid to be supplied, and therefore the discharge amount changes, which causes a problem that the control of the supply pressure becomes complicated. Further, in the case of a low-viscosity liquid, similarly to the tube pump type, a liquid pool is likely to occur at the tip of the discharge nozzle, and it is necessary to pull back the pressurized liquid by adjusting the piston operation after discharge. In addition, this method has difficulty in discharging a very small amount. Further, since it is difficult for any of the above-mentioned ejection devices to make droplets fly, it is necessary to make contact with an object to be coated or to apply it in close proximity except for dropping from above.

The present invention is used for substantially the same purpose as the ultra-small amount liquid ejecting apparatus of the patent application No. 1995-31640 filed by the present applicant, but a new ejecting apparatus separate from the apparatus is used. It is the one we are trying to provide. The diaphragm pump having a piezoelectric element as a drive source of the ultra-trace amount liquid discharge device does not have a check valve in the pump chamber and has an automatic water level for strictly maintaining the supply pressure of the low-viscosity material supplied to the pump chamber. A supply device having a holding mechanism is provided.

Since the above-mentioned ultra-trace amount liquid discharge device has no check valve, the position of the discharge nozzle tip of the diaphragm type pump must be in the same horizontal plane as the water level position of the supply device, so that the discharge nozzle position moves up and down. The adjustment of [2] has a difficulty in moving up and down the entire device including the feeding device. On the other hand, since there is no check valve, the number of shots for minute intermittent discharge can be made very fast, and low viscosity material can be automatically replenished, so the device can be set to a fixed position,
Although it can be effectively used in a factory for mass production at high speed, it has a drawback that the structure and control of the supply device are slightly complicated.

[0008]

As described above,
In the above discharging device, when discharging a very small amount of low-viscosity liquid such as adhesive, the conventional machine has the drawback of not being able to provide high-speed response when used in a mass production plant, liquid pool at the discharge nozzle tip, discharge during coating The nozzles have to be in contact with each other or to be very close to each other, and it is difficult to secure the precision of ultra-micro quantitative discharge, or complicated control is required.

In addition, in the mechanism of the applicant's prior application, the diaphragm pump does not have a check valve mechanism, so that the height position of the discharge nozzle is required to be adjusted, and it is difficult to handle. It has the drawback that the structure is rather complicated.

An object of the present invention is to enable a high-speed response by pumping with a diaphragm type pump using a piezoelectric element, and at the same time, by ejecting liquid droplets ejected from an ejection nozzle, the liquid at the tip of the ejection nozzle. Provide a minute fixed-quantity dispensing device which eliminates puddles and enables coating even when the discharge nozzle is away from the object to be coated so that it can be easily applied to the upright portion, concave portion, etc. of the object to be coated. It is what

Another object is to simplify the low-viscosity material supply device and to easily adjust the position of the discharge nozzle by attaching a check valve mechanism to a diaphragm type pump having a piezoelectric element as a drive source. It is intended to provide a new minute fixed-quantity dispensing device which can be used by being attached to an automatic coating machine such as a coating robot, in which the direction angle can be inclined.

[0012]

The present invention relates to a diaphragm type pump set using a glass diaphragm driven by a piezoelectric element as a driving source, comprising a supply container for supplying a low-viscosity material. A check valve that is closed by the magnetic attraction of a permanent magnet is attached to the suction passage and the discharge passage of the pump chamber, and the check is performed by the suction force and the discharge pressure generated by the displacement of the glass diaphragm driven by the piezoelectric element. It is a micro-dispensing device with a valve that opens and closes.

Further, the check valve set attached to the suction flow path and the discharge flow path of the pump chamber of the diaphragm type pump set using the piezoelectric element as a drive source has a flow path hole in the center of the valve seat. Made of permanent magnet or magnetic material,
The valve that seats the flow passage hole is formed by using a permanent magnet or a magnetic material as in the valve seat, and the valve is closed by a magnetic attractive force. Is a combination of permanent magnets and permanent magnets, or a combination of permanent magnets and magnetic bodies, respectively.

When a diaphragm type pump set using a piezoelectric element as a driving source is provided with a supply container for supplying a low viscosity material, the supply container is a synthetic resin container having chemical resistance and flexibility, and has a low viscosity. At the time of start-up to fill the pump chamber and its flow path, or at the time of cleaning, pressurize and pressurize the supply container by hand to flow a large amount of water, so that the air in the liquid flow path and the pump chamber can be removed early or easy to clean. In order to make it possible, the supply container is provided with a ventilation check valve that is closed by the pressurizing pressure only when the pressure is applied by hand. When using a moisture-curable liquid, by placing a dehumidifying agent at the atmosphere-side inlet of the ventilation check valve set, moisture in the atmosphere does not come into contact with the moisture-curable material in the supply container. Therefore, the penetrating power of the low viscosity material into the pump chamber is increased,
Since no air remains in the pump chamber, it can be used for a long period of time.

Further, in the pump chamber, there is provided a minute fixed amount discharge device in which the distance between the lower surface of the glass diaphragm and the upper surface of the pump chamber is in the range of 0.3 to 0.8 mm.

Further, when the low viscosity material is supplied from the supply container to the diaphragm type pump, when the flow path is communicated with the suction tube made of a flexible tube, the suction tube is
This is a minute fixed-quantity discharge device having a suction pipe which is inserted into a supply container to suck up the low-viscosity material and whose suction port opening surface at the end portion of the suction pipe is open upward.

Further, the contact portion between the valve seat and the valve is a micro-dispensing device made of a non-adhesive material to which an adhesive does not adhere.

[0018]

The operation and operation of the micro-quantitative dispensing device will be described with reference to FIG. A cylindrical laminated piezoelectric element (1) is attached in close contact with a glass diaphragm (2), and a pump chamber (3) is formed under the glass diaphragm (2) in a pump case (4). . When a pulse voltage from a DC power source is applied to the piezoelectric element (1), the piezoelectric element (1) is distorted and the glass diaphragm (2) bends toward the pump chamber side, so that the low-viscosity material can be easily treated. Liquid pressure is applied and the material is discharged from the discharge nozzle. When the voltage is cut off,
The piezoelectric element (1) contracts originally, and a negative pressure is generated in the pump chamber (3) by the restoring force of the glass diaphragm (2) that follows the contraction, and the low-viscosity material is sucked and replenished.

A check valve set (5) is attached to the suction passage (4a) of the pump chamber (3). The check valve set (5) on the suction side is a valve seat (5) made of resin or a non-magnetic material.
A permanent magnet (5e) formed in a cylindrical shape is attached to a), and the valve rod (5) is placed at a position facing the valve seat (5a).
A valve (5) made of a cylindrical permanent magnet (5c) is provided on the outer periphery of b), and a rubber O-ring (5d) is provided in the outer peripheral groove of the valve rod (5b) protruding from the end of the permanent magnet (5c). They are mounted and configured, and both are always closed by magnetic attraction of the N and S poles. When a negative pressure is generated in the pump chamber (3), the valve (5b) opens from the valve seat (5a) against the magnetic attraction, and the low-viscosity material is supplied to the pump chamber (3). Further, a check valve set (6) on the discharge side is attached to the tip of the discharge flow path (4b). Similar to the suction valve side, the check valve set (6) has a valve seat (6a) made of resin or a non-magnetic material and a cylindrical permanent magnet (6e) attached to the valve seat (6a). At a position facing each other, a valve (6) composed of a cylindrical permanent magnet (6c) is formed on the outer periphery of the cylindrical valve (6b), and is closed by magnetic attraction. Then, by pressurizing the pump chamber (3), the valve (6) is opened against the magnetic attractive force, the low-viscosity material is discharged from the nozzle (7), and the droplets fly by the instantaneous high-pressure discharge.

The above is the permanent magnet (5e) built in the valve seat (5a) (6a) of the check valve set (5) (6),
(6e) and the valves (5c) and (6c) are constructed by using permanent magnets using a rare earth-based ferromagnetic material having a high magnetic force. This is the same as the check valve sets (5) and (6). It is used for downsizing, and even if either the valve seat or the valve is subjected to surface treatment such as plating on the surface of a magnetic material such as iron, magnetic attractive force works, so the gist of the present invention The effect that matches is obtained. Therefore, both the valve seat and the valve are not limited to permanent magnets.

The low-viscosity material supply container (20) is a flexible container having high chemical resistance, such as polyethylene or polypropylene, and is a commercially available bottle whose outer periphery can be crushed by hand. In the supply container (20), a container support (18) is attached to the pump body (10) by an arm, and the ventilation check valve set (2) is attached to the container support (18).
1) is screwed. A suction tube (22) made of a flexible tube that extends through the center of the container support (18) to the bottom of the supply container (20) is inserted. One end of the suction pipe (22) communicates with the suction port (18) of the pump case (4) via the joint (23).

In the construction related to the supply container (20), first, at the beginning of work, the low viscosity material must be completely filled so that no air remains in the pump chamber (3) and its associated flow path. I won't. If a small amount of air remains, not only the quantitativeness of the material discharge is lost, but also there is a risk that the discharge may be stopped. In order to fill the material in a short time, the present invention closes the ventilation check valve (21) attached to the container support (18) by manually and rapidly pressing the side surface of the supply container (20). The inside of the supply container (20) is shut off from the atmosphere. Therefore, the internal pressure of the supply container (20) is increased, and a large amount of low-viscosity material is discharged through the suction pipe (22) through the flow path, the pump chamber (3) and the discharge nozzle (7). By repeating the pressing of the supply container (20) several times, the air in the supply and discharge channels and the pump chamber (3) is completely discharged, and the work preparation is completed. Further, at the time of washing, washing can be performed in a short time by putting a detergent into the supply container (20) and performing the same operation as described above.

When a low viscosity material is supplied to the supply container (20), the supply container (2) screwed to the container lid (23).
When (0) is removed, the suction pipe (22) is exposed to the atmosphere, and when the suction pipe (22) is straight, the material in the suction pipe flows out due to the low viscosity of the material, There is a problem that air enters the straight portion and remains in the flow path when the container is mounted again. In order to solve this problem, if the opening surface (22a) of the suction port of the suction pipe (22) is directed upward, the check valve set (5) is provided on the suction side of the pump chamber (3). The low-viscosity material in the pipe does not flow out by gravity, and when the low-viscosity material is replenished and mounted in the supply container (20), air does not enter the supply passage,
The effect is that work can be started immediately.

Further, the apparatus of the present invention can be mounted on an automatic coating machine such as a coating robot so as to perform coating while the micro-quantitative dispensing apparatus of the present invention is in operation. Further, when the droplets are applied to the surface to be coated, such as the inclined surface, the concave surface, or the vertical surface, the discharge nozzle (7) of the diaphragm type pump is inclined, and when the continuous work is performed, the connecting body (16) is used. ) Makes it possible to make only the supply container (20) vertical.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a cross-sectional view showing the overall structure of the micro-quantitative dispensing device of the present invention, FIG. 2 is a top view of FIG. 1, and FIG. FIG. The arrangement and the like of the components described in the present apparatus are not intended to limit the present invention, but are described as an example.

In FIG. 1, reference numeral 1 is a cylindrical laminated piezoelectric element, and the piezoelectric element 1 is set in a mounting lid 11 surrounding the piezoelectric element 1, and an electrode terminal 13 is attached thereto. The electrode terminals 13 are connected by a cable connection joint 14, and a pulse voltage is applied from a DC power supply (not shown). The pulse voltage can be adjusted by a control panel (not shown) to properly adjust the printing voltage and the printing cycle number to adjust the jetting amount of about 0.1 to 1 mg and the shot number of several tens of cycles per second. ing. Mounting lid 11 on which the piezoelectric element 1 is set
Is screwed to the pump body 10 of a cylindrical tube with a flange, and is screwed so that the tip of the piezoelectric element 1 is appropriately pressed and brought into close contact with the glass diaphragm 2. A screw hole 1 formed in the pump body 10 at a position where the piezoelectric element 1 is properly in close contact.
The piezoelectric element 1 is completely fixed by a fixing screw at 5. The pump body 10 is bolted to the pump case 4 at a flange portion.

The glass diaphragm 2 used as an ideal elastic body has a recess 4c formed in the pump case 4.
The pump body 10 is hermetically sandwiched via an O-ring. A pump chamber 3 is formed in the recess 4c of the pump case 4 below the glass diaphragm 2, and the pump chamber 3 has a sufficient depth so that the diaphragm does not come into contact with the bottom due to the deflection of the diaphragm 2 of 10 to 20 μm. The distance between the lower surface of the glass diaphragm 2 and the upper surface of the pump chamber 3 is set to 0.3 to 0.8 mm so that the low-viscosity material supplied from the supply container 20 can quickly push out the air in the pump chamber by the osmotic force. It is set up. A discharge channel 4b is perforated from the center of the pump chamber 3 and communicates with a discharge nozzle 7 via a discharge-side check valve set 6 described later. On the other hand, the suction flow passage 4a is formed in an elbow shape from the end of the circular recess of the pump chamber 3, and communicates with the flow passage of the suction pipe 22 via the check valve set 5 on the suction side.

As shown in FIG. 2, the check valve set 6 on the discharge side provided at the tip of the discharge flow path 4b comprises a cylindrical valve seat 6a with a flange and a cylindrical valve 6b. 6a is fitted in the recessed portion of the pump case 4, and the flange portion of the valve seat 6a is sandwiched by four screws by the plate 9. The columnar valve (6e) built in the valve seat 6a and the columnar valve (6e) attached to the outer periphery of the columnar valve 6b are both formed in a small size by a rare earth permanent magnet and have a strong magnetic attraction. The rubber O-ring 6d attached to the outer periphery of the tip of the valve 6b is seated on the valve seat 6a. On the other hand, the valve set 5 on the suction side is similar,
The cylindrical valve seat 5a is fitted in the recessed portion of the pump case 4 of the suction passage 4a and is airtightly fixed by the valve retainer 19. A cylindrical valve 5b is inserted so as to face the valve seat 5a. A cylindrical permanent magnet 5C is attached to the outer circumference of the valve 5b, and a rubber O-ring is fitted in the outer circumferential groove of the tip of the cylindrical valve 5b. The magnetic attraction of the N and S poles of both permanent magnets causes the valve body to move. The O-ring 5d at the tip of is seated on the valve seat 5a. As described in the operation section, the valve sets 5 and 6 do not limit both the valve seat and the valve to permanent magnets, and either the valve seat or the valve is made of a magnetic material such as iron. However, since the magnetic attractive force works, the object of the present invention can be achieved. The shape of the valve set is not limited to the present invention, and the same effect can be obtained even if the cylindrical valves 5b and 6b are spherical. When an adhesive is used as the low-viscosity material, a non-adhesive material to which the adhesive does not adhere is preferably used for the contact portion between the valve seat and the valve.

A discharge nozzle 7 is attached to the tip of the discharge side check valve set 6. The discharge nozzle 7 is detachably screwed to the valve seat 6a by a cap nut 8. Various types of discharge nozzles are prepared to adapt to different coating patterns or coating locations depending on the nozzle diameter, nozzle length, or nozzle shape of the nozzles. Depending on the situation, it can be selected and exchanged easily.

Bolts 12 attached to the pump case 4
Is for mounting on an automatic coating machine such as a coating robot, and is an object to be coated or fixed on the coating machine.
The application is performed by the X, Y axis movement or the Z axis movement of the apparatus in synchronization with the horizontally moving object to be coated. In addition, the angle of the discharge nozzle is adjusted so that it can be easily fixed with the bolt 12 when applying to the inclined surface of the article to be coated or the concave portion.

The supply container 20 is a bottle of synthetic resin having chemical resistance and flexibility, and internal pressure is applied to the container by manually pressing the outer surface of the bottle to discharge a low-viscosity material. A lid 23 of the supply container 20 is surrounded by a cylindrical body 24, and a container support 18 is screwed through an O-ring 25,
The lid 23 is airtightly fixed. The upper surface of the lid 23 is perforated so that the screw of the lid 23 can be used. The supply container 20 is attached and detached using a screw of the lid 23.

The container support 18 has a suction tube 22 at the center thereof.
In order to keep the supply container 20 airtight at the time of pressing and pressurizing, the suction pipe 2 is inserted through an O-ring.
2 is inserted. Further, a vent check valve set 21 is screwed to the container support 18. The ventilation check valve set 21 is composed of a ventilation valve seat 21a having a central through hole and a valve plate 21b, and the valve plate 21b is normally the weight of the valve plate, and the ventilation flow provided to the container support 18 is set. Road 18b
It is placed on. And it is open to the atmosphere by communicating with the inside of the supply container 20. Supply container 2 with this mechanism
When 0 is pressed to apply the internal pressure, the valve plate 21b is pushed up by the air pressure and closely adhered to the seat surface of the ventilation valve seat 21a to be seated, the internal pressure in the supply container rises, and the low-viscosity material is pumped. . During the operation of operating the piezoelectric element 1, the valve plate 21b is dropped, and the ventilation check valve set 21 is ventilated in the supply container 20. As a result, the low-viscosity material is sucked up in minute amounts.

The container support 18 is supported by the support arm 17 with two screws, and the support arm 17 and the pump body 1
0 is connected and supported by the connection body set 16. And
The connection body set 16 is equipped with a rotation adjusting mechanism for vertically supporting the supply container 20, which will be described in detail with reference to FIG.

A suction tube 22 made of a flexible tube such as nylon or Teflon having chemical resistance penetrates the container support 18 and has an appropriate length with a margin from the bottom of the supply container. , Is connected to a connection joint 26 screwed to the valve retainer 19. The suction port of the suction pipe 22, which is inserted into the bottom portion of the supply container 20, removes the low-viscosity material in the suction pipe 22 when the supply container 20 is removed to replenish the low-viscosity material. In order to prevent this, the suction opening surface 22a is directed upward. This is because the valve is normally closed in the suction side check valve set 5, so the opening surface 22a faces upward, so that even if there is a head difference, the suction pipe 2
The material in 2 does not flow out, and when the supply container 20 is attached or detached, there is an effect that the work can be continued without the inclusion of air. However, the means for making the opening surface 22a of the suction pipe 22 face upward is not limited to the means for bending the suction pipe 22 to make it face upward as shown in FIG. 1. For example, a separate small container is sucked up. It is also possible to fix the pipe at the end of the pipe 22 and to make the liquid surface of the suction port opening face upward, and the same effect can be obtained.

FIG. 3 is a top view of FIG. In the figure, a connecting body 16 that connects the pump body 10 and a support arm 17 that supports the supply container 20 is fixed to the support arm 17, and a connection shaft 16a is screwed and fixed to the pump body 10. The connection body 16 is rotatably fitted in the connection shaft 16a. When the discharge nozzle 7 is tilted to discharge, the pump body 10 also tilts, but if the supply container 20 tilts, the amount of low-viscosity material in the container is limited, so keep the supply container 20 vertical. Is desirable.
Therefore, the supply container 20 is made vertical by adjusting the rotation with the connection body 16. A sphere 16b is additionally provided so that the sphere 16b can be smoothly rotated during the rotation adjustment. When the sphere 16b is adjusted to the vertical position, the sphere 16b is pressed and fixed by the set screw 16c. The connection body 16, the support arm 17, and the container support body are fixed by screws.

FIG. 4 is a view showing that the discharge nozzle 7 described in FIG. 1 is tilted and the supply container 20 is made vertical. The suction tube 22 made of a flexible tube, which is schematically shown, is a discharge tube. The nozzles are arranged with a length with a sufficient margin necessary when the nozzles are tilted.

[0037]

Since the present invention is constructed as described above, it has the following effects.

By attaching a check valve utilizing magnetic attraction to a glass diaphragm type pump using a piezoelectric element as a drive source, there is no influence on the method of supplying low viscosity material.
A simple supply container enables a required high-speed response, jetting of droplets, and a minute fixed-quantity dispensing device that can be mounted on an automatic coating machine.

A check valve using a permanent magnet is attached to each of the suction-side and discharge-side flow paths of the pump chamber of the glass diaphragm type pump having a piezoelectric element as a drive source, so that a flow path such as a spring can be formed. It is a diaphragm pump that has no obstacles, has a quick response, and is a small check valve, and can obtain highly accurate quantitative performance. Further, in the above check valve, since the valve and the valve seat are non-adhesive materials, respectively, even when an adhesive is used as a low-viscosity material, it is possible to prevent the valve and the valve seat from sticking to each other at the contact portion.

Further, by making the distance between the lower surface of the glass diaphragm and the upper surface of the pump chamber as narrow as 0.3 to 0.8 mm, the penetrating force when the low-viscosity material enters the pump chamber is increased, and the pump chamber By making it possible to exhaust all of the air, it is possible to press and press the flexible container,
The pump chamber and the liquid passage can be filled with a low-viscosity material at an early stage, and the air in the pump chamber and the liquid passage can be eliminated in a short time, and the work preparation time can be greatly shortened. In addition, the cleaning time can be significantly shortened by utilizing the pressure discharge of the supply container during the cleaning.

Since the suction port opening surface of the suction pipe of the supply container is directed upward, even when the low-viscosity material is removably attached to and detached from the supply container, air is not mixed and the material can be supplied in a short time. It becomes a device.

By using a glass diaphragm for the diaphragm of the diaphragm pump, the discharge amount becomes precise and the device becomes highly durable, and the low-viscosity material is ejected from the discharge nozzle to drop the object to be coated. The discharge device has good workability and can be easily applied to the vertical surface, concave portion, and the like.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of the entire structure of a micro-dispensing device of the present invention.

FIG. 2 is an enlarged cross-sectional view of the check valve of the present invention.

FIG. 3 is a top view of FIG. 1;

FIG. 4 is an explanatory diagram in which a discharge nozzle is inclined and a supply container is made vertical.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Piezoelectric element 2 Glass diaphragm 3 Pump chamber 4 Pump case 5,6 Check valve set 5a, 6a Valve seat 5b, 6b Valve 7 Discharge nozzle 10 Pump body 16 Connection body 18 Container support 20 Supply container 21 Vent check valve Set 21a Vent valve seat 21b Valve plate 22 Suction pipe 22a Suction opening surface

Claims (7)

[Claims] 1. A diaphragm pump set of a glass diaphragm driven by a piezoelectric element, comprising a supply container for supplying a low-viscosity material, and a suction passage and a discharge flow of a pump chamber of the diaphragm pump set. A non-return valve that is closed by the magnetic attraction of the permanent magnet is attached to the path.
A minute fixed amount discharge device in which the check valve is opened and closed by a suction force and a discharge pressure generated by a displacement amount of a glass diaphragm driven by a piezoelectric element. 2. A check valve set attached to a suction flow passage and a discharge flow passage of a diaphragm type pump set using a piezoelectric element as a drive source has a valve seat and a flow passage hole at the center of the valve seat. A valve which is made of a permanent magnet or a magnetic material and which has a seat for the flow passage hole, is formed by using a permanent magnet or a magnetic material like the valve seat, and the valve is closed by a magnetic attractive force. 1. The micro quantitative discharge device according to 1. 3. A diaphragm type pump set using the piezoelectric element as a driving source is provided with a supply container for supplying a low-viscosity material, and the supply container is a synthetic resin container having chemical resistance and flexibility. At the start of filling the viscous material in the pump chamber and its flow path, or at the time of cleaning, pressurize and pressurize the supply container with a large flow rate to eliminate air in the liquid flow path early or facilitate cleaning. The micro-quantitative dispensing device according to claim 1, which is enabled. 4. The micro-quantitative dispensing device according to claim 1, wherein the supply container is provided with a ventilation check valve which is closed by the pressurizing pressure only when the pressurizing and pressing by hand. 5. The micro-dispensing device according to claim 2, wherein a contact portion between the valve seat and the valve is made of a non-adhesive material to which an adhesive does not adhere. 6. When supplying a low-viscosity material from the supply container to a diaphragm type pump, the suction pipe is inserted into the supply container when the flow passage is connected by a suction pipe made of a flexible tube. The minute fixed amount discharge device according to claim 1, wherein the suction port opening surface at the end of the suction pipe for sucking the low-viscosity material is a suction pipe that is open upward. 7. The micro quantitative discharge device according to claim 1, wherein in the pump chamber, the distance between the lower surface of the glass diaphragm and the upper surface of the pump chamber is in the range of 0.3 to 0.8 mm.