JPH09160076A5 - - Google Patents
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- Publication number
- JPH09160076A5 JPH09160076A5 JP1996260572A JP26057296A JPH09160076A5 JP H09160076 A5 JPH09160076 A5 JP H09160076A5 JP 1996260572 A JP1996260572 A JP 1996260572A JP 26057296 A JP26057296 A JP 26057296A JP H09160076 A5 JPH09160076 A5 JP H09160076A5
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- Japan
- Prior art keywords
- electrically connected
- semiconductor film
- display device
- insulating film
- same material
- Prior art date
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Description
請求項1に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置される第1絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される第2絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えた表示装置用アレイ基板において、前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする表示装置用アレイ基板である。The invention of claim 1 is an array substrate for a display device comprising: a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region; a first insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; a thin film transistor including a source electrode and a drain electrode electrically connected to the semiconductor film; a second insulating film arranged on the thin film transistor; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode, the array substrate for a display device comprising: a bundling wiring routed via the first insulating film in a direction approximately perpendicular to the auxiliary capacitance lines; and an auxiliary capacitance line connecting portion electrically connecting the auxiliary capacitance lines and the bundling wiring via a conductive layer.
請求項5に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置されるゲート絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される層間絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えた表示装置用アレイ基板において、前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする表示装置用アレイ基板である。The invention of claim 5 is an array substrate for a display device comprising: a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region; a gate insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; an interlayer insulating film arranged on the thin film transistor; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode, the array substrate for a display device comprising: a bundling wiring routed via the gate insulating film in a direction approximately perpendicular to the auxiliary capacitance lines; and an auxiliary capacitance line connecting portion electrically connecting the auxiliary capacitance lines and the bundling wiring via a conductive layer.
請求項7に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置される第1絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される第2絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えたアレイ基板を有した液晶表示装置において、前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする液晶表示装置である。The invention of claim 7 is a liquid crystal display device having an array substrate including a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region, and each substantially parallel to the scanning lines, a first insulating film arranged thereon, a semiconductor film arranged at least on the gate electrode region, thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film, a second insulating film arranged on the thin film transistor, a signal line electrically connected to the drain electrode and substantially perpendicular to the scanning lines, and a pixel electrode electrically connected to the source electrode, the liquid crystal display device including a bundling wiring routed via the first insulating film in a direction substantially perpendicular to the auxiliary capacitance lines, and a bundling wiring connecting electrically the auxiliary capacitance lines and the bundling wiring via a conductive layer.
請求項11に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置されるゲート絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される層間絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えたアレイ基板を有した液晶表示装置において、前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする液晶表示装置である。The invention of claim 11 is a liquid crystal display device having an array substrate including: a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region; a gate insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; an interlayer insulating film arranged on the thin film transistor; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode, the liquid crystal display device including a bundled wiring routed via the gate insulating film in a direction approximately perpendicular to the auxiliary capacitance lines, and an auxiliary capacitance line connecting portion electrically connecting the auxiliary capacitance lines and the bundled wiring via a conductive layer.
Claims (12)
前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含む
ことを特徴とする表示装置用アレイ基板。 an array substrate for a display device, comprising: a plurality of scanning lines arranged on a substrate, each including a gate electrode region; auxiliary capacitance lines substantially parallel to the scanning lines; a first insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; a second insulating film arranged on the thin film transistors; signal lines electrically connected to the drain electrodes and substantially perpendicular to the scanning lines; and pixel electrodes electrically connected to the source electrodes;
a bundling wiring wired in a direction substantially perpendicular to the storage capacitance line via the first insulating film;
an auxiliary capacitance line connecting portion that electrically connects the auxiliary capacitance line and the bundled wiring via a conductive layer;
前記導電層は前記画素電極と同一材料からなる
ことを特徴とする請求項1記載の表示装置用アレイ基板。 the bundled wiring is made of the same material as the signal lines,
2. The array substrate for a display device according to claim 1 , wherein the conductive layer is made of the same material as the pixel electrodes.
ことを特徴とする請求項1記載の表示装置用アレイ基板。 2. The array substrate for a display device according to claim 1, wherein a low-resistance semiconductor film is interposed between the semiconductor film and the source electrode and the drain electrode, and a low-resistance semiconductor layer made of the same material as the low-resistance semiconductor film is interposed between the signal line and the semiconductor layer in the intersection region.
ことを特徴とする請求項1記載の表示装置用アレイ基板。 2. The display array substrate according to claim 1 , wherein the semiconductor film is mainly made of amorphous silicon.
前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、a bundled wiring wired in a direction substantially perpendicular to the auxiliary capacitance line via the gate insulating film;
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むa storage capacitance line connecting portion that electrically connects the storage capacitance line and the bundling wiring via a conductive layer;
ことを特徴とする表示装置用アレイ基板。1. An array substrate for a display device comprising:
前記導電層は前記画素電極と同一材料からなるThe conductive layer is made of the same material as the pixel electrode.
ことを特徴とする請求項5記載の表示装置用アレイ基板。6. The array substrate for a display device according to claim 5.
前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、a bundling wiring wired in a direction substantially perpendicular to the storage capacitance line via the first insulating film;
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むa storage capacitance line connecting portion that electrically connects the storage capacitance line and the bundling wiring via a conductive layer;
ことを特徴とする液晶表示装置。A liquid crystal display device characterized by:
前記導電層は前記画素電極と同一材料からなるThe conductive layer is made of the same material as the pixel electrode.
ことを特徴とする請求項7記載の液晶表示装置。8. The liquid crystal display device according to claim 7.
ことを特徴とする請求項7記載の液晶表示装置。8. The liquid crystal display device according to claim 7.
ことを特徴とする請求項7記載の液晶表示装置。8. The liquid crystal display device according to claim 7.
前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、a bundled wiring wired in a direction substantially perpendicular to the auxiliary capacitance line via the gate insulating film;
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むa storage capacitance line connecting portion that electrically connects the storage capacitance line and the bundling wiring via a conductive layer;
ことを特徴とする液晶表示装置。A liquid crystal display device characterized by:
前記導電層は前記画素電極と同一材料からなるThe conductive layer is made of the same material as the pixel electrode.
ことを特徴とする請求項11記載の液晶表示装置。12. The liquid crystal display device according to claim 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26057296A JP3663261B2 (en) | 1995-10-05 | 1996-10-01 | Array substrate for display device and manufacturing method thereof |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7-258619 | 1995-10-05 | ||
| JP25861595 | 1995-10-05 | ||
| JP25861995 | 1995-10-05 | ||
| JP7-258629 | 1995-10-05 | ||
| JP7-258615 | 1995-10-05 | ||
| JP25862995 | 1995-10-05 | ||
| JP26057296A JP3663261B2 (en) | 1995-10-05 | 1996-10-01 | Array substrate for display device and manufacturing method thereof |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004356839A Division JP3998681B2 (en) | 1995-10-05 | 2004-12-09 | Array substrate for display device and manufacturing method thereof |
| JP2005024048A Division JP4095990B2 (en) | 1995-10-05 | 2005-01-31 | Array substrate for display device and manufacturing method thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH09160076A JPH09160076A (en) | 1997-06-20 |
| JP3663261B2 JP3663261B2 (en) | 2005-06-22 |
| JPH09160076A5 true JPH09160076A5 (en) | 2005-07-28 |
Family
ID=27478481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26057296A Expired - Lifetime JP3663261B2 (en) | 1995-10-05 | 1996-10-01 | Array substrate for display device and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3663261B2 (en) |
Families Citing this family (40)
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|---|---|---|---|---|
| JPH10198292A (en) | 1996-12-30 | 1998-07-31 | Semiconductor Energy Lab Co Ltd | Semiconductor device and manufacturing method thereof |
| JPH1184426A (en) * | 1997-09-12 | 1999-03-26 | Semiconductor Energy Lab Co Ltd | Liquid crystal display device with built-in image sensor |
| JP3907804B2 (en) | 1997-10-06 | 2007-04-18 | 株式会社半導体エネルギー研究所 | Liquid crystal display |
| KR100276442B1 (en) * | 1998-02-20 | 2000-12-15 | 구본준 | Liquid crystal display device and its fabrication method |
| JPH11258633A (en) * | 1998-03-13 | 1999-09-24 | Toshiba Corp | Production of array substrate for display device |
| JPH11258632A (en) * | 1998-03-13 | 1999-09-24 | Toshiba Corp | Array substrate for display device |
| KR100280889B1 (en) * | 1998-06-30 | 2001-02-01 | 구본준, 론 위라하디락사 | Pad part manufacturing method of liquid crystal display device and liquid crystal display device by the method |
| JP4017754B2 (en) * | 1998-07-07 | 2007-12-05 | シャープ株式会社 | Liquid crystal display device and manufacturing method thereof |
| US7411211B1 (en) * | 1999-07-22 | 2008-08-12 | Semiconductor Energy Laboratory Co., Ltd. | Contact structure and semiconductor device |
| JP2001053283A (en) * | 1999-08-12 | 2001-02-23 | Semiconductor Energy Lab Co Ltd | Semiconductor device and manufacturing method thereof |
| JP4777500B2 (en) * | 2000-06-19 | 2011-09-21 | 三菱電機株式会社 | Array substrate, display device using the same, and method of manufacturing array substrate |
| JP2002341383A (en) * | 2001-05-21 | 2002-11-27 | Matsushita Electric Ind Co Ltd | Active matrix liquid crystal display |
| TW594156B (en) | 2002-01-04 | 2004-06-21 | Fujitsu Display Tech | Substrate for display device and display device equipped therewith |
| KR100987723B1 (en) * | 2003-11-06 | 2010-10-13 | 삼성전자주식회사 | Manufacturing method of lower substrate |
| KR100987714B1 (en) * | 2003-10-20 | 2010-10-13 | 삼성전자주식회사 | Lower substrate, display device having same and manufacturing method thereof |
| US7309922B2 (en) | 2003-10-20 | 2007-12-18 | Samsun Electronics Co., Ltd. | Lower substrate, display apparatus having the same and method of manufacturing the same |
| KR100987713B1 (en) * | 2003-11-03 | 2010-10-13 | 삼성전자주식회사 | Lower substrate, display device having same and manufacturing method thereof |
| KR101006438B1 (en) * | 2003-11-12 | 2011-01-06 | 삼성전자주식회사 | Liquid crystal display |
| JP4462981B2 (en) | 2004-03-29 | 2010-05-12 | Nec液晶テクノロジー株式会社 | Active matrix substrate and liquid crystal display device including the substrate |
| KR100731733B1 (en) * | 2004-11-24 | 2007-06-22 | 삼성에스디아이 주식회사 | LCD and its manufacturing method |
| JP2006227649A (en) * | 2006-05-17 | 2006-08-31 | Advanced Display Inc | Liquid crystal display and manufacturing method therefor |
| JP4188980B2 (en) * | 2006-05-17 | 2008-12-03 | 三菱電機株式会社 | Liquid crystal display device and manufacturing method thereof |
| JP2007027773A (en) * | 2006-08-28 | 2007-02-01 | Semiconductor Energy Lab Co Ltd | Semiconductor device and method for manufacturing same |
| US8101442B2 (en) * | 2008-03-05 | 2012-01-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing EL display device |
| WO2010032629A1 (en) | 2008-09-19 | 2010-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| KR102246123B1 (en) * | 2008-09-19 | 2021-04-30 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Display device |
| EP2180518B1 (en) * | 2008-10-24 | 2018-04-25 | Semiconductor Energy Laboratory Co, Ltd. | Method for manufacturing semiconductor device |
| JP5587591B2 (en) * | 2008-11-07 | 2014-09-10 | 株式会社半導体エネルギー研究所 | Semiconductor device |
| JP2009111412A (en) * | 2008-11-28 | 2009-05-21 | Sakae Tanaka | Thin film transistor element and display device |
| US8841661B2 (en) * | 2009-02-25 | 2014-09-23 | Semiconductor Energy Laboratory Co., Ltd. | Staggered oxide semiconductor TFT semiconductor device and manufacturing method thereof |
| KR101681884B1 (en) * | 2009-03-27 | 2016-12-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Semiconductor device, display device, and electronic appliance |
| KR101422362B1 (en) | 2009-07-10 | 2014-07-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Display device, display panel and electronic appliance |
| KR101740943B1 (en) * | 2009-09-24 | 2017-06-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Display device |
| JP5604087B2 (en) * | 2009-11-27 | 2014-10-08 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
| US20130009160A1 (en) * | 2010-03-19 | 2013-01-10 | Sharp Kabushiki Kaisha | Active matrix substrate |
| JP5638403B2 (en) * | 2011-01-26 | 2014-12-10 | 株式会社ジャパンディスプレイ | Display device |
| CN103235458B (en) * | 2013-04-27 | 2015-10-21 | 南京中电熊猫液晶显示科技有限公司 | TFT-LCD array substrate and manufacture method thereof |
| US9293480B2 (en) * | 2013-07-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
| JP6518117B2 (en) * | 2015-04-20 | 2019-05-22 | 株式会社ジャパンディスプレイ | Display device |
| WO2023115553A1 (en) * | 2021-12-24 | 2023-06-29 | Boe Technology Group Co., Ltd. | Array substrate and display apparatus |
-
1996
- 1996-10-01 JP JP26057296A patent/JP3663261B2/en not_active Expired - Lifetime
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