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JPH09160076A5 - - Google Patents

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Publication number
JPH09160076A5
JPH09160076A5 JP1996260572A JP26057296A JPH09160076A5 JP H09160076 A5 JPH09160076 A5 JP H09160076A5 JP 1996260572 A JP1996260572 A JP 1996260572A JP 26057296 A JP26057296 A JP 26057296A JP H09160076 A5 JPH09160076 A5 JP H09160076A5
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Japan
Prior art keywords
electrically connected
semiconductor film
display device
insulating film
same material
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Granted
Application number
JP1996260572A
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Japanese (ja)
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JP3663261B2 (en
JPH09160076A (en
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Priority to JP26057296A priority Critical patent/JP3663261B2/en
Priority claimed from JP26057296A external-priority patent/JP3663261B2/en
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Application granted granted Critical
Publication of JP3663261B2 publication Critical patent/JP3663261B2/en
Publication of JPH09160076A5 publication Critical patent/JPH09160076A5/ja
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Description

請求項1に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置される第1絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される第2絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えた表示装置用アレイ基板において、前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする表示装置用アレイ基板である。The invention of claim 1 is an array substrate for a display device comprising: a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region; a first insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; a thin film transistor including a source electrode and a drain electrode electrically connected to the semiconductor film; a second insulating film arranged on the thin film transistor; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode, the array substrate for a display device comprising: a bundling wiring routed via the first insulating film in a direction approximately perpendicular to the auxiliary capacitance lines; and an auxiliary capacitance line connecting portion electrically connecting the auxiliary capacitance lines and the bundling wiring via a conductive layer.

請求項5に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置されるゲート絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される層間絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えた表示装置用アレイ基板において、前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする表示装置用アレイ基板である。The invention of claim 5 is an array substrate for a display device comprising: a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region; a gate insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; an interlayer insulating film arranged on the thin film transistor; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode, the array substrate for a display device comprising: a bundling wiring routed via the gate insulating film in a direction approximately perpendicular to the auxiliary capacitance lines; and an auxiliary capacitance line connecting portion electrically connecting the auxiliary capacitance lines and the bundling wiring via a conductive layer.

請求項7に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置される第1絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される第2絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えたアレイ基板を有した液晶表示装置において、前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする液晶表示装置である。The invention of claim 7 is a liquid crystal display device having an array substrate including a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region, and each substantially parallel to the scanning lines, a first insulating film arranged thereon, a semiconductor film arranged at least on the gate electrode region, thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film, a second insulating film arranged on the thin film transistor, a signal line electrically connected to the drain electrode and substantially perpendicular to the scanning lines, and a pixel electrode electrically connected to the source electrode, the liquid crystal display device including a bundling wiring routed via the first insulating film in a direction substantially perpendicular to the auxiliary capacitance lines, and a bundling wiring connecting electrically the auxiliary capacitance lines and the bundling wiring via a conductive layer.

請求項11に係る発明は、基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置されるゲート絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される層間絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えたアレイ基板を有した液晶表示装置において、前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むことを特徴とする液晶表示装置である。The invention of claim 11 is a liquid crystal display device having an array substrate including: a plurality of scanning lines and auxiliary capacitance lines arranged on a substrate, each including a gate electrode region; a gate insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; an interlayer insulating film arranged on the thin film transistor; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode, the liquid crystal display device including a bundled wiring routed via the gate insulating film in a direction approximately perpendicular to the auxiliary capacitance lines, and an auxiliary capacitance line connecting portion electrically connecting the auxiliary capacitance lines and the bundled wiring via a conductive layer.

Claims (12)

基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置される第1絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される第2絶縁膜と、前記ドレイン電極電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極電気的に接続される画素電極とを備えた表示装置用アレイ基板において、
前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、
前記補助容量線と前記束ね配線と導電層を介して電気的に接続する補助容量線連結部を含む
ことを特徴とする表示装置用アレイ基板。
an array substrate for a display device, comprising: a plurality of scanning lines arranged on a substrate, each including a gate electrode region; auxiliary capacitance lines substantially parallel to the scanning lines; a first insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; a second insulating film arranged on the thin film transistors; signal lines electrically connected to the drain electrodes and substantially perpendicular to the scanning lines; and pixel electrodes electrically connected to the source electrodes;
a bundling wiring wired in a direction substantially perpendicular to the storage capacitance line via the first insulating film;
an auxiliary capacitance line connecting portion that electrically connects the auxiliary capacitance line and the bundled wiring via a conductive layer;
前記束ね配線は前記信号線と同一材料からなり、
前記導電層は前記画素電極と同一材料からなる
ことを特徴とする請求項記載の表示装置用アレイ基板。
the bundled wiring is made of the same material as the signal lines,
2. The array substrate for a display device according to claim 1 , wherein the conductive layer is made of the same material as the pixel electrodes.
前記半導体膜と前記ソース電極及びドレイン電極との間には低抵抗半導体膜が介挿され、前記交差領域における前記信号線と前記半導体層との間には前記低抵抗半導体膜と同一材料からなる低抵抗半導体層が介在されている
ことを特徴とする請求項記載の表示装置用アレイ基板。
2. The array substrate for a display device according to claim 1, wherein a low-resistance semiconductor film is interposed between the semiconductor film and the source electrode and the drain electrode, and a low-resistance semiconductor layer made of the same material as the low-resistance semiconductor film is interposed between the signal line and the semiconductor layer in the intersection region.
前記半導体膜がアモルファスシリコンを主体とした
ことを特徴とする請求項記載の表示装置用アレイ基板。
2. The display array substrate according to claim 1 , wherein the semiconductor film is mainly made of amorphous silicon.
基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置されるゲート絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される層間絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えた表示装置用アレイ基板において、an array substrate for a display device, comprising: a plurality of scanning lines arranged on a substrate, each including a gate electrode region; auxiliary capacitance lines substantially parallel to the scanning lines; a gate insulating film arranged thereon; a semiconductor film arranged at least on the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; an interlayer insulating film arranged on the thin film transistor; signal lines electrically connected to the drain electrodes and substantially perpendicular to the scanning lines; and pixel electrodes electrically connected to the source electrodes;
前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、a bundled wiring wired in a direction substantially perpendicular to the auxiliary capacitance line via the gate insulating film;
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むa storage capacitance line connecting portion that electrically connects the storage capacitance line and the bundling wiring via a conductive layer;
ことを特徴とする表示装置用アレイ基板。1. An array substrate for a display device comprising:
前記束ね配線は前記信号線と同一材料からなり、the bundled wiring is made of the same material as the signal lines,
前記導電層は前記画素電極と同一材料からなるThe conductive layer is made of the same material as the pixel electrode.
ことを特徴とする請求項5記載の表示装置用アレイ基板。6. The array substrate for a display device according to claim 5.
基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置される第1絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される第2絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えたアレイ基板を有した液晶表示装置において、a first insulating film disposed on the thin film transistors, a semiconductor film disposed at least on the gate electrode region, a thin film transistor including a source electrode and a drain electrode electrically connected to the semiconductor film; a second insulating film disposed on the thin film transistors; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode.
前記第1絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、a bundling wiring wired in a direction substantially perpendicular to the storage capacitance line via the first insulating film;
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むa storage capacitance line connecting portion that electrically connects the storage capacitance line and the bundling wiring via a conductive layer;
ことを特徴とする液晶表示装置。A liquid crystal display device characterized by:
前記束ね配線は前記信号線と同一材料からなり、the bundled wiring is made of the same material as the signal lines,
前記導電層は前記画素電極と同一材料からなるThe conductive layer is made of the same material as the pixel electrode.
ことを特徴とする請求項7記載の液晶表示装置。8. The liquid crystal display device according to claim 7.
前記半導体膜と前記ソース電極及びドレイン電極との間には低抵抗半導体膜が介挿され、前記交差領域における前記信号線と前記半導体層との間には前記低抵抗半導体膜と同一材料からなる低抵抗半導体層が介在されているA low-resistance semiconductor film is interposed between the semiconductor film and the source electrode and the drain electrode, and a low-resistance semiconductor layer made of the same material as the low-resistance semiconductor film is interposed between the signal line and the semiconductor layer in the intersection region.
ことを特徴とする請求項7記載の液晶表示装置。8. The liquid crystal display device according to claim 7.
前記半導体膜がアモルファスシリコンを主体としたThe semiconductor film is mainly made of amorphous silicon.
ことを特徴とする請求項7記載の液晶表示装置。8. The liquid crystal display device according to claim 7.
基板上に配置されゲート電極領域を含む複数本の走査線及び前記走査線と略平行な補助容量線と、この上に配置されるゲート絶縁膜、少なくとも前記ゲート電極領域上に配置される半導体膜、前記半導体膜に電気的に接続されるソース電極及びドレイン電極とを含む薄膜トランジスタと、前記薄膜トランジスタ上に配置される層間絶縁膜と、前記ドレイン電極に電気的に接続されると共に前記走査線と略直交する信号線と、前記ソース電極と電気的に接続される画素電極とを備えたアレイ基板を有した液晶表示装置において、a semiconductor film disposed on at least the gate electrode region; thin film transistors each including a source electrode and a drain electrode electrically connected to the semiconductor film; an interlayer insulating film disposed on the thin film transistors; a signal line electrically connected to the drain electrode and approximately perpendicular to the scanning lines; and a pixel electrode electrically connected to the source electrode.
前記ゲート絶縁膜を介して前記補助容量線と略直交する方向に配線された束ね配線を含み、a bundled wiring wired in a direction substantially perpendicular to the auxiliary capacitance line via the gate insulating film;
前記補助容量線と前記束ね配線とを導電層を介して電気的に接続する補助容量線連結部を含むa storage capacitance line connecting portion that electrically connects the storage capacitance line and the bundling wiring via a conductive layer;
ことを特徴とする液晶表示装置。A liquid crystal display device characterized by:
前記束ね配線は前記信号線と同一材料からなり、the bundled wiring is made of the same material as the signal lines,
前記導電層は前記画素電極と同一材料からなるThe conductive layer is made of the same material as the pixel electrode.
ことを特徴とする請求項11記載の液晶表示装置。12. The liquid crystal display device according to claim 11.
JP26057296A 1995-10-05 1996-10-01 Array substrate for display device and manufacturing method thereof Expired - Lifetime JP3663261B2 (en)

Priority Applications (1)

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JP26057296A JP3663261B2 (en) 1995-10-05 1996-10-01 Array substrate for display device and manufacturing method thereof

Applications Claiming Priority (7)

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JP7-258619 1995-10-05
JP25861595 1995-10-05
JP25861995 1995-10-05
JP7-258629 1995-10-05
JP7-258615 1995-10-05
JP25862995 1995-10-05
JP26057296A JP3663261B2 (en) 1995-10-05 1996-10-01 Array substrate for display device and manufacturing method thereof

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JP2004356839A Division JP3998681B2 (en) 1995-10-05 2004-12-09 Array substrate for display device and manufacturing method thereof
JP2005024048A Division JP4095990B2 (en) 1995-10-05 2005-01-31 Array substrate for display device and manufacturing method thereof

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JPH09160076A JPH09160076A (en) 1997-06-20
JP3663261B2 JP3663261B2 (en) 2005-06-22
JPH09160076A5 true JPH09160076A5 (en) 2005-07-28

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