JPH09105838A - Optical waveguide device - Google Patents

Abstract

(57) An object of the present invention is to provide an optical waveguide device which can be easily and accurately assembled and manufactured. SOLUTION: A waveguide is formed by a fitting recess 16 on the connection end faces 25a, 25b of a waveguide chip 1 in which a core portion 6 and a clad portion 5 are formed on a substrate 4, with the connection end faces 25a, 25b exposed. The optical waveguide device is formed by fitting and mounting the connecting end members 2 and 3 which surround and fit both side surfaces of the chip 1 and the upper surface 10. V-shaped grooves 8a, 8b on both sides of the upper surface 10 of the waveguide chip 1
Are formed over the entire length in the longitudinal direction of the waveguide chip 1, and the inverted V-shaped grooves 14 and 15 are formed in the fitting recesses 16 of the connection end members 2 and 3 at positions corresponding to the V-shaped grooves 8a and 8b. V-shaped groove 8a,
An optical fiber 9 for positioning is provided over the entire length in the longitudinal direction of 8b, and both end sides of the optical fiber 9 are V-shaped grooves 8a, 8b.
Then, the waveguide chip 1 and the connecting end members 2 and 3 are positioned by being sandwiched by the inverted V-shaped grooves 14 and 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide device used, for example, for optical communication and connected to a multi-fiber optical fiber connector or the like.

[0002]

2. Description of the Related Art An optical waveguide device (also referred to as an optical waveguide module) for forming an optical waveguide on a substrate and performing, for example, optical demultiplexing and multiplexing is widely known. When connecting the optical waveguide of this optical waveguide device to the optical fiber of an optical array formed by aligning and fixing a single-core optical fiber or a multi-core optical fiber, it is generally used to perform alignment and connection by welding or welding. However, this work is very time-consuming and poor in workability, and recently, a connection method for connecting the optical waveguide and the optical fiber in a non-aligned state has been studied.

FIG. 4B shows an optical waveguide device previously proposed by the present applicant (not yet published), and FIG. 4A shows this optical waveguide device. The optical waveguide device is shown in an exploded state. As shown in these figures, the proposed device is embedded in a clad part 5 and a clad part 5 formed by, for example, a flame deposition method on a substrate 4 formed of silicon (Si) or quartz glass. The waveguide chip 1 has a plurality of waveguide core portions (core portions functioning as optical waveguides) 6, and the end face of the core portion 6 of the waveguide chip 1 is a connection end face 25a of the waveguide chip 1. , 25b, and arranged at a predetermined pitch.

The connection end faces 25a and 25b of the waveguide chip 1 are provided with connection end members 2 and 3, respectively. The connecting end members 2 and 3 are connected to the connecting end face 25 of the waveguide chip 1.
A fitting recess 16 having a substantially U-shaped cross section, which is fitted with both side surfaces of the waveguide chip 1 and the upper surface 10 of the waveguide core portion 6 forming the optical waveguide in a state where a and 25b are exposed. Is formed, and the waveguide chip 1 is fitted and mounted in the fitting concave portion 16 and fixed by adhesion with a thermosetting adhesive or the like.
Each of the connection end members 2 and 3 is an integrally molded product manufactured by transfer molding of a filler-containing epoxy resin or the like, for example, and guide pins for connection are inserted on both sides sandwiching the fitting recess 16. Penetrating guide pin fitting hole 12,
13 are formed respectively. Guide pin fitting hole 12, 13
Are formed at a position where the pin core of the multi-fiber optical fiber connector connected to the optical waveguide device is aligned with the axial center, for example, at a pitch of 4.6 mm.

On both sides of the upper surface 10 of the waveguide chip 1,
V-shaped grooves 8a and 8b as chip-side positioning guide grooves are formed at positions avoiding the waveguide core portion 6 so as to extend over the entire length in the longitudinal direction of the waveguide chip 1, as shown in FIGS. On the side of the facing surface 11 of the fitting recess 16 of the connection end members 2 and 3 facing the upper surface 10 of the waveguide chip 1,
Reverse V-shaped grooves 14 and 15 as end member side positioning guide grooves extending in the extending direction of the V-shaped grooves 8a and 8b are formed at positions corresponding to the V-shaped grooves 8a and 8b, respectively. The V-shaped grooves 8a and 8b are formed by, for example, machining or etching.

As shown in FIG. 4A, each V-shaped groove 8
a and 8b respectively have a connection end face 25 of the waveguide chip 1.
Two optical fibers 9, two in total, are inserted and fixed on the a and 25b sides. The lengths of the optical fibers 9 are, for example, substantially the same as the lengths of the connection end members 2 and 3, or the lengths such that one end side of the optical fiber 9 slightly protrudes from the connection end members 2 and 3. , These optical fibers 9
Are fitted into the inverted V-shaped grooves 14 and 15 of the connection end members 2 and 3, so that the waveguide chip 1 and the connection end members 2 and 3 are positioned, and in this state, the waveguide chip 1 and the connection end member are positioned. A few
And are bonded and fixed to form an optical waveguide device.

In the above-mentioned device, instead of providing the inverted V-shaped grooves 14 and 15 in the connection end members 2 and 3, they are fitted in the V-shaped grooves 8a and 8b of the waveguide chip 1, for example, a mountain shape. Is also provided, and the mountain-shaped projection is directly fitted to the V-shaped grooves 8a and 8b without providing the optical fiber 9 to position the waveguide chip 1 and the connection end members 2 and 3. It is considered.

[0008]

However, in the above-mentioned proposed apparatus, four optical fibers 9 are arranged at each end of each of the V-shaped grooves 8a and 8b, so that the waveguide chip 1 and the connection end are connected. Positioning with the members 2 and 3 is performed,
Prepare four very thin optical fibers 9 with a diameter of 0.125 mm,
The operation of disposing and positioning the waveguide chip 1 on the connection end surfaces 25a and 25b side, respectively, is very time-consuming.

Further, in a device for fitting the V-shaped grooves 8a, 8b of the waveguide chip 1 and the mountain-shaped projections formed on the connection end members 2, 3 without using the optical fiber 9, the mountain-shaped structure is used. Since the projecting part of is easily damaged, the projecting part is damaged when fitting into the V-shaped grooves 8a and 8b, and the connecting end member 2,
There was a problem that the positioning between the waveguide 3 and the waveguide chip 1 could not be performed.

Further, in the above-mentioned optical waveguide device, it is desired to grasp the positional relationship between the core portion 6 and the V-shaped grooves 8a and 8b to improve the forming accuracy of the V-shaped grooves 8a and 8b. . This is because when the proposed optical waveguide device is connected to a multi-fiber optical connector or the like, the connection end members 2, 3
A common guide pin is inserted into the guide pin fitting holes 12 and 13 formed in and the pin hole formed in the multi-fiber optical connector on the other side of the connection, and the optical waveguide device and the multi-core device are inserted through the guide pin. In order to perform optical connection with the optical fiber connector without alignment, V-shaped grooves 8a and 8b, which are grooves for positioning the connection end members 2 and 3 and the waveguide chip 1, and an inverted V-shaped groove 14 are provided. ， 15
This is because it is very important to improve the positional accuracy of the core part 6 with respect to the core part 6.

Therefore, in order to grasp the positional relationship between the V-shaped grooves 8a and 8b with respect to the core portion 6, for example, light is allowed to pass through the core portion 6 and the formation positions of the V-shaped grooves 8a and 8b, respectively. By receiving and analyzing those lights, the core unit 6
It is considered to grasp the positional relationship between the V-shaped grooves 8a and 8b with respect to the V-shaped groove 8a.
The optical fibers 9 arranged at a and 8b are connected end members 2, 3
Since the light is transmitted through the optical fiber 9, the light transmitted through the optical fiber 9 cannot be received. Of course, in the case where the optical fiber 9 is not used, the V-shaped groove 8a is naturally formed by the above method. , 8b with respect to the core portion 6 could not be grasped.

The present invention has been made to solve the above problems, and an object thereof is to easily position the waveguide chip and the connection end member and assemble the device, and
(EN) Provided is an optical waveguide device which can be accurately performed, and hopefully can accurately and easily grasp the positional accuracy of a positioning groove of a waveguide chip and a positioning groove of a connection end member with respect to a core portion. Especially.

[0013]

Means for Solving the Problems To achieve the above object, the present invention provides means for solving the problems by the following constitution. That is, the present invention has a waveguide chip in which a waveguide core portion and a clad portion for burying the waveguide core portion are formed on a substrate, and the waveguide chip is provided on both sides of the connection end face of the waveguide chip. A connection end member having a fitting recess that fits around at least both side surfaces of the waveguide chip and an upper surface formed by forming the waveguide core portion with the connection end surface exposed is fitted and mounted, Chip-side positioning guide grooves are formed on both sides of the upper surface of the waveguide chip at positions avoiding the waveguide core portion so as to extend over the entire length in the longitudinal direction of the waveguide chip and face the upper surface of the waveguide chip. An end member side positioning guide groove extending in the extension direction of the chip side positioning guide groove is formed at a position corresponding to the chip side positioning guide groove on the opposite surface side of the fitting recess, and the end member side position. The guide rod and the chip-side positioning guide groove are sandwiched between both ends of the waveguide chip, and the positioning rod is arranged over the entire length of the chip-side positioning guide groove in the longitudinal direction. .

Further, the positioning rod is a glass member, the glass member is an optical fiber, the optical fiber is a carbon coated fiber, and the arrangement pitch of the optical fibers is the waveguide core portion. The fact that the pitch is an integral multiple of the array pitch is also a characteristic configuration of the present invention.

In the present invention having the above-described structure, the chip-side positioning guide grooves formed on both sides of the upper surface of the waveguide chip so as to extend over the entire length in the longitudinal direction of the waveguide chip are formed by, for example, an optical fiber or the like. Positioning rods are provided, and the waveguide chip and the connection end member are provided one by one in each of the chip-side positioning guide grooves, and a total of two positioning rods are used for positioning. Therefore, when the positioning rods are provided only on the connection end face side of the waveguide chip and a total of four positioning rods are arranged in the longitudinal direction of the chip-side positioning guide groove, two in total. Compared with the above, the number of positioning rods is small, the positioning of the waveguide chip and the connecting end member is easily performed, and the assembling and manufacturing of the waveguide chip and the connecting end member is also easily performed.

Further, if the positioning rod is formed of an optical fiber, the optical fiber and the waveguide core portion of the waveguide chip are made to transmit light respectively, and the transmitted light is received and analyzed. By grasping the position of the optical fiber with respect to the waveguide core portion, the positional accuracy of the chip side positioning guide groove and the connection end member side positioning guide groove with respect to the waveguide core portion can be grasped. Therefore, this position accuracy value is fed back to the forming conditions when forming the chip side positioning guide groove in the waveguide chip, the molding conditions of the connecting end member, etc., and the optical waveguide in which each positioning guide groove is formed with extremely high accuracy. The device can be manufactured.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. In the description of the present embodiment, the same reference numerals are given to the same parts as those in the conventional example, and the overlapping description will be omitted. FIG. 1 shows a configuration of an embodiment of an optical waveguide device according to the present invention, and FIG.
Each is shown in an assembled state in (b). As shown in these figures, the example of the present embodiment is configured almost similarly to the proposed apparatus shown in FIG. 4, and the characteristic of the example of the present embodiment different from the apparatus shown in FIG. An optical fiber 9 for positioning the waveguide chip 1 and the connection end members 2 and 3 is sandwiched between the V-shaped grooves 8a and 8b and the inverted V-shaped groove 14 on both ends of the waveguide chip 1 to form the V-shaped groove 8a. , 8b over the entire length in the longitudinal direction.

The optical fiber 9 is a carbon-coated fiber accurately manufactured to have a diameter of 0.125 mm, and is more brittle than an ordinary non-coated fiber which is not coated with carbon, and is very easy to handle.

In this embodiment, the waveguide chip 1 has a width of about 3.2 mm and a thickness of 1.05 mm.
Are arranged on the connection end face side of the waveguide chip 1, for example, eight are arranged at a pitch of 0.25 mm and exposed on the connection end face 25a, 25b side. The arrangement pitch of the V-shaped grooves 8a and 8b is 2.75 mm which is an integral multiple of 0.25 mm which is the arrangement pitch of the core portion 6.
Are formed at an array pitch of, for example, by machining or etching. Each V-shaped groove 8a, 8b has an apex angle of 90 ° and a depth of about 0.2 mm.

Further, in this embodiment, the connection end members 2,
Each fitting recess 16 of 3 has a lateral dimension (width of the facing surface 11) of about 3.4.
mm, the vertical dimension (depth) is about 1.3 mm, the inverted V-shaped grooves formed on the facing surface 11 have a vertical angle of 90 ° and a height of about 0.2 mm, and the arrangement pitch is V-shaped. 2.75 mm same as grooves 8a and 8b
It has become.

The present embodiment is configured as described above, and as shown in FIGS. 1 and 5, the optical fibers arranged in the V-shaped grooves 8a and 8b of the waveguide chip 1 as in the conventional example. 9 is fitted into the inverted V-shaped grooves 14 and 15 of the connection end members 2 and 3 respectively for positioning, and the connection end members 2 and 3 are bonded and fixed to the waveguide chip 1. In the form example, since the optical fibers 9 are arranged over the entire length in the longitudinal direction of the V-shaped grooves 8a and 8b, the number of the optical fibers 9 may be two. By using these two optical fibers 9, it is possible to easily Moreover, the waveguide chip 1 and the connection end members 2 and 3 can be accurately positioned. Therefore, the optical waveguide device can be manufactured easily, accurately, and in a short time.

Further, according to the present embodiment, the optical fiber 9 is a carbon-coated fiber and is more brittle than a normal optical fiber, so that the optical fiber 9 can be handled more easily and the device can be assembled easily. At that time, the optical fiber 9 is hardly damaged, and the yield of manufacturing the optical waveguide device can be improved.

Further, according to the present embodiment, since the optical fiber 9 is arranged over the entire length in the longitudinal direction of the V-shaped grooves 8a and 8b, the optical fiber 9 and the waveguide core portion 6 are exposed to light. By transmitting light and receiving and analyzing the transmitted light, the positional relationship between the core portion 6 and the optical fiber 9 can be easily grasped, and the V-shaped groove 8 relative to the core portion 6 can be obtained.
The positional accuracy of the a, 8b and the inverted V-shaped grooves 14, 15 can be detected easily and accurately. Therefore, based on this detection result, the V-shaped grooves 8a, 8b for the core portion 6,
It is possible to feed back the positional accuracy of the inverted V-shaped grooves 14 and 15 to the forming conditions of the V-shaped grooves 8a and 8b and the forming conditions of the connecting end members 2 and 3, thereby adjusting the manufacturing conditions of the optical waveguide device. The optical waveguide device can be manufactured with extremely high accuracy.

Further, in this embodiment, the V-shaped groove 8a,
Since the arrangement pitch of 8b is formed to be an integral multiple of the arrangement pitch of the core portions 6, for example, it is a 12-core MT connector type generally used for optical communication, and the arrangement of each optical fiber is A so-called master connector (the arrangement pitch of each optical fiber is 250 μm) in which the pitch is accurately positioned is opposed to the connection end face 25a side of the optical waveguide device, and light is emitted from each optical fiber. And the core portion 6 can be made incident respectively. Specifically, light emitted from the optical fibers at both ends (first and twelfth cores) is made to enter each optical fiber 9 and M
Light emitted from the third to tenth optical fibers of the T connector is incident on each of the eight core portions 6. Therefore, according to the present embodiment, it is possible to easily and accurately measure the positional accuracy of the V-shaped grooves 8a and 8b with respect to the core portion 6 by using a generally used MT connector. Position accuracy can be grasped very easily.

Further, ferrules having an optical fiber embedded in the axial center are inserted into the guide pin fitting holes 12 and 13 of the connection end members 2 and 3 and the guide pin fitting hole of the MT connector (master connector) described above, respectively. After that, if light is transmitted to the optical fiber embedded in the ferrule in a state where the master connector and the ferrules of the optical waveguide device of the present invention oppose each other so that the optical axes of the optical fibers in the ferrule match, In the same procedure as described above, the guide pin fitting holes 12 and 13 of the connecting end members 2 and 3, the core portion 6 and the V-shaped groove 8 are formed.
It is also possible to easily and accurately measure the positional accuracy of each of a and 8b.

Further, according to this embodiment, since the connecting end members 2 and 3 are made of a plastic material such as a filler-containing epoxy resin, the connecting end members 2 and 3 are formed.
3 and the waveguide chip 1 can be improved in adhesive strength, and the connection end members 2 and 3 and the waveguide chip 1 are less likely to be peeled off even when an external impact or the like is applied, The reliability with respect to environmental characteristics can also be improved.

FIG. 3 shows a method of connecting the optical waveguide device of this embodiment to the multi-core (8-core) optical fiber connector 23. As shown in FIG. 2, the optical waveguide device is provided with a protective member 18 for protecting the cladding portion 5 of the waveguide chip 1, and the protective member 18 is provided at each of the connection end portions 2, 2.
It is provided by engaging with the step portion 27 of 3, and the protection member 18 is
It also functions as a positioning means for the connection end members 2 and 3 in the longitudinal direction.

As shown in FIGS. 2 and 3, when the optical waveguide device of this embodiment and the optical fiber connector 23 are connected, they are connected to the guide pin fitting holes 12 and 13 of the connection end members 2 and 3, respectively. The guide pins 19 and 20 are inserted and projected from the end surfaces 28 and 29 of the respective connection end members 2 and 3. A multi-core optical fiber connector in which the optical fibers of the optical fiber tape 21 are arranged and fixed at equal intervals on the protruding sides of the guide pins 19 and 20.
The connecting end faces 30 of 23 are opposed to each other, and the guide pins 19 and 20 are inserted into the penetrating pin holes 22 formed in the optical fiber connector 23 at a predetermined pitch of, for example, 4.6 mm to connect the connecting end members 2 and 3. The end faces 28, 29 and the connecting end face 30 of the optical fiber connector 23 are brought into contact with each other via a refractive index matching agent. And
Finally, a spring clamp 24 is laid over and fitted to the rear end side of the optical fiber connector 23 and the stepped portion 31 of the protection member 18, and the optical fiber connector 23 and the optical waveguide device are fixed by pressure contact in the longitudinal direction. To do.

Then, the optical waveguide device and the optical fiber connector 23 are connected, and by this connection, the optical axes of the core portion 6 of the optical waveguide device of the present embodiment and the optical fiber of the optical fiber connector 23 coincide, The optical waveguide device and the optical fiber connector 23 are optically connected without alignment.

The present invention is not limited to the above-mentioned embodiments, but can take various modes. For example,
In the embodiment described above, the fitting recess 16 is a recess having a substantially U-shaped cross section with an opening on the lower side, but the fitting recess 16 may be a rectangular through hole.

Further, in the above embodiment, the connection end faces 25a and 25b of the waveguide chip 1 and the end faces 28 and 29 of the connection end members 2 and 3 are formed substantially perpendicular to the optical axis of the core portion 6. However, the connection end faces 25a and 25b of the waveguide chip and the end faces 28 and 29 of the connection end members may be formed as inclined end faces inclined by, for example, about 8 ° from the plane perpendicular to the core portion 6. In this way, if each end face 25a, 25b, 28, 29 is formed obliquely and the connecting end face of the optical waveguide device is an oblique end face, this optical waveguide device and the optical component such as the optical fiber connector 23 are connected to each other, and When the transmitted light is reflected by the end face of the core portion 6 when transmitted, the reflected light is reflected in the direction away from the core portion 6, so that the adverse effect of the reflected light returning to the transmitting side is suppressed, and the reflected light is reflected. The loss due to light can be suppressed.

Further, in the above embodiment, the eight core portions 6 are arranged in the waveguide chip 1 at a pitch of 0.25 mm.
The number, pitch, size, shape, etc., of the core portions 6 are not particularly limited and may be set appropriately.

Further, in the above embodiment, the arrangement pitch of the V-shaped grooves 8a and 8b of the waveguide chip 1 and the inverted V-shaped grooves 14 and 15 of the connecting end members 2 and 3 is 2.75 mm, and the top of each groove is set. Corner
Although the angle is 90 ° and the depth is about 0.2 mm, the pitch of each groove, the size of the apex angle, the depth, etc. are not particularly limited and may be appropriately set. Also, these grooves are not always V
The groove is not necessarily a V-shaped groove or an inverted V-shaped groove. For example, a U-shaped groove is formed on the waveguide chip 1 side and an inverted U-shaped groove is formed on the connection end members 2 and 3.
It is also possible to form a V-shaped groove and fit both ends of the optical fiber 9 into the circular hole formed by the U-shaped groove and the inverted U-shaped groove.

Further, although the optical fiber 9 is a carbon-coated fiber in the above embodiment, the optical fiber 9 may be a normal non-coated optical fiber. However,
When the carbon fiber is used as the optical fiber 9, the brittleness of the optical fiber 9 is excellent, so that the optical fiber 9 can be easily handled and the yield when manufacturing the optical waveguide device can be improved.

Further, although the optical fiber 9 is used as the positioning rod in the above-described embodiment, the positioning rod may be a glass member other than the optical fiber 9 or a rod other than the glass member, for example, a ceramic rod. Good.

Further, in the above embodiment, the connection end members 2 and 3 are molded products made of epoxy resin or the like, but the connection end members 2 and 3 may be made of, for example, quartz or Pyrex glass. . In this way, the connection end members 2, 3
When the substrate is made of quartz or Pyrex glass, the bonding between the connection end members 2 and 3 and the waveguide chip 1 is UV.
The adhesive is fixed by an (ultraviolet) curing adhesive.

Further, the waveguide chip 1 and the connecting end member 2,
The size of 3 is not particularly limited and may be set appropriately. For example, the core portion 6 is arranged at the same pitch as the optical fiber in correspondence with the optical component of the connection partner such as the MT connector. Or the guide pin fitting holes of the connection end members 2 and 3
The numbers 12 and 13 are appropriately set so as to correspond to the pin holes 22 of the optical fiber connector 23.

[0038]

According to the present invention, the positioning rod is provided over the entire length of the chip-side positioning guide groove extending in the longitudinal direction of the waveguide chip.
By sandwiching this positioning rod at both ends of the waveguide chip by the chip side positioning guide groove and the end member side positioning guide groove formed on the connecting end member side, the waveguide chip and the connecting end member are positioned and fixed. Therefore, the waveguide chip and the connecting end member can be easily and accurately positioned by using the two positioning rods. Further, according to the present invention, for example, four positioning members having a part of the length of the chip side positioning guide groove in the longitudinal direction are prepared, and the positioning members are provided on both ends of the waveguide chip, respectively. The positioning member (positioning rod) is easier to handle than the side positioning guide groove and the end member side positioning guide groove, and the positioning member (positioning rod) is easily handled, and the positioning of the waveguide chip and the connection end member is easy, and It becomes possible to carry out accurately, and the device can be easily and accurately assembled and manufactured.

Further, since the waveguide core portion and the clad portion are generally made of a glass member, when the positioning rod is made of a glass member, the positioning rod is made of a metal material or the like. In comparison, the difference in linear expansion coefficient between the positioning rod and the waveguide chip can be made extremely small, and deformation of the optical waveguide device due to stress or the like caused by the difference in linear expansion coefficient can be suppressed. The fixed state between the connection end member and the connection end member can be accurately maintained.

Further, according to the present invention in which the positioning glass member is an optical fiber, the optical fiber is manufactured with a very high degree of accuracy even though it has a small diameter, so that the waveguide The chip and the connection end member can be positioned more accurately, and the cost of the optical fiber is low, so that the cost of the optical waveguide device can be reduced.

Further, if the optical fiber is a carbon-coated fiber, this carbon-coated fiber is more brittle than a normal non-coated fiber,
The workability of the optical fiber can be improved, and the production yield of the optical waveguide device can be improved.

Further, by using an optical fiber as the positioning rod, light is transmitted through the optical fiber and the waveguide core portion respectively, and if the light is received and analyzed, the optical fiber with respect to the waveguide core portion can be analyzed. It is possible to accurately obtain the positional accuracy, and thereby the positional accuracy of the chip side positioning guide groove and the end member side positioning guide groove with respect to the waveguide core portion can be detected. Then, based on the detection result, by feeding back to the formation condition of the chip side positioning guide groove in the waveguide chip and the formation condition of the end member side positioning guide groove in the connection end member, the optical waveguide device is manufactured very accurately. can do.

Further, according to the present invention, in which the arrangement pitch of the optical fibers is an integer multiple of the arrangement pitch of the waveguide core portions, for example, the arrangement pitch of the waveguide core portions is generally used for optical communication. If they are formed at the same pitch as the optical fiber array pitch of the optical connector and the light is emitted from the optical fibers, each emitted light can be made incident on the waveguide core portion and the positioning optical fiber of the optical waveguide device. It will be possible. Therefore, it becomes possible to easily and accurately detect the positional accuracy of the optical fiber of the optical waveguide device with respect to the waveguide core portion by using the optical connector, which leads to the positioning guide groove guide on the chip side and the end member side. Position accuracy with respect to the waveguide core is easily and accurately obtained,
By feeding back to the optical waveguide device manufacturing conditions, a highly accurate optical waveguide device can be manufactured very easily.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of an optical waveguide device according to the present invention.

FIG. 2 is an explanatory diagram showing a state in which a protection member 18 and guide pins 19 and 20 for connection are provided in the optical waveguide device of the above embodiment.

FIG. 3 is an explanatory diagram showing a method of connecting the optical waveguide device and the optical connector of the above-described embodiment.

FIG. 4 is an explanatory diagram showing a configuration of an optical waveguide device previously proposed by the applicant.

5 is an explanatory view showing a front view of the optical waveguide device shown in FIG. 4 in an exploded state.

[Explanation of symbols]

 1 Waveguide Chip 2, 3 Connection End Member 6 Core 8a, 8b V-shaped Groove 14, 15 Reverse V-shaped Groove 16 Fitting Recess

Front Page Continuation (72) Inventor Takashi Shigematsu 2-6-1, Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd. (72) Inventor Takeo Shimizu 2-6-1, Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Industrial Co., Ltd. (72) Inventor Shiro Nakamura 2-6-1, Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd. (72) Inventor Shinji Nagasawa 1-6, Uchiyuki-cho, Chiyoda-ku, Tokyo Nihon Telegraph Telephone Co., Ltd. (72) Inventor Mitsuru Kihara 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nihon Telegraph and Telephone Corporation

Claims (5)

[Claims] 1. A waveguide chip having a waveguide core portion and a clad portion for burying the waveguide core portion formed on a substrate,
Fitting on both sides of the connection end face of the waveguide chip while surrounding the connection end face of the waveguide chip, at least both side faces of the waveguide chip and an upper surface formed by forming the waveguide core portion are fitted. Connection end members having fitting recesses are fitted and mounted, and chip-side positioning guide grooves are provided on both sides of the upper surface of the waveguide chip at positions avoiding the waveguide core portion. An end extending in the extending direction of the chip-side positioning guide groove at a position corresponding to the chip-side positioning guide groove on the side of the mating recess facing the upper surface of the waveguide chip. A member side positioning guide groove is formed, and the chip side positioning guide groove is sandwiched between the end member side positioning guide groove and the chip side positioning guide groove on both ends of the waveguide chip. Optical waveguide device characterized by positioning bars are provided over the entire longitudinal length. 2. The optical waveguide device according to claim 1, wherein the positioning rod is a glass member. 3. The optical waveguide device according to claim 2, wherein the glass member is an optical fiber. 4. The optical waveguide device according to claim 3, wherein the optical fiber is a carbon-coated fiber. 5. The arrangement pitch of the optical fibers is an integer multiple of the arrangement pitch of the waveguide core portions.
Alternatively, the optical waveguide device according to claim 4.