JPH0833334B2 - Differential pressure transmitter - Google Patents
Differential pressure transmitterInfo
- Publication number
- JPH0833334B2 JPH0833334B2 JP5989886A JP5989886A JPH0833334B2 JP H0833334 B2 JPH0833334 B2 JP H0833334B2 JP 5989886 A JP5989886 A JP 5989886A JP 5989886 A JP5989886 A JP 5989886A JP H0833334 B2 JPH0833334 B2 JP H0833334B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- pressure
- detection
- static pressure
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】 （イ）産業上の利用分野 この発明は、プロセス制御系等における差圧を検出し
て伝送する差圧伝送器に関し、特に、片圧保護機構に係
るものである。TECHNICAL FIELD The present invention relates to a differential pressure transmitter for detecting and transmitting a differential pressure in a process control system or the like, and particularly to a single pressure protection mechanism.
（ロ）従来の技術 一般に、この種の差圧伝送器においては静圧誤差を無
くすることが重要である。従来、この差圧伝送器には、
第２図に示すように、ハウジングａに検出室ｂが形成さ
れ、この検出室ｂに断面コ字状の検出ダイアフラムｃが
設けられて検出室ｂが左右の入力側に区画され、この検
出室ｂに通路ｄ、ｅを介して高圧PHと低圧PLとが印加さ
れるように構成されているものがある。従って、検出ダ
イアフラムｃは両側より高圧PHと低圧PLとが作用し、そ
の差圧（PH−PL）により歪み、この歪みを電気的に検出
し、リード線ｆを介して導出し、差圧を検出している。(B) Conventional Technology Generally, it is important to eliminate static pressure error in this type of differential pressure transmitter. Conventionally, this differential pressure transmitter has
As shown in FIG. 2, a detection chamber b is formed in the housing a, and a detection diaphragm c having a U-shaped cross section is provided in the detection chamber b to divide the detection chamber b into left and right input sides. There is a structure in which a high pressure P H and a low pressure P L are applied to b via passages d and e. Therefore, the detection diaphragm c is acted by the high pressure P H and the low pressure P L from both sides, is distorted by the pressure difference (P H −P L ), and this strain is electrically detected and led out via the lead wire f. , The differential pressure is detected.
（ハ）発明が解決しょうとする問題点 上述した差圧伝送器においては、検出ダイアフラムｃ
等の警鐘が左右非対称であるため、静圧誤差が生じる虞
れがあった。また、高圧PH或いは低圧PLが過大圧（片
圧）となって検出ダイアフラムｃに作用すると、破損す
るという問題があった。この破損を防止するためには片
圧保護機構が必要となるが、構造が複雑となり、構成が
難しいという問題がある。(C) Problems to be solved by the invention In the differential pressure transmitter described above, the detection diaphragm c
Since the alarm bells such as “A” are asymmetrical to the left and right, there is a possibility that static pressure error may occur. Further, when the high pressure P H or the low pressure P L becomes an excessive pressure (one pressure) and acts on the detection diaphragm c, there is a problem that the diaphragm is damaged. A one-pressure protection mechanism is required to prevent this damage, but there is a problem that the structure is complicated and the configuration is difficult.
この発明は、斯かる為に鑑み、左右対称構造の圧力セ
ンサを静圧下に保持すると共に２つの補助室を設けて圧
力センサのき外側より導入圧の高い方が作用するように
した差圧伝送器を提供するものである。In view of the above, the present invention is directed to a differential pressure transmission in which a pressure sensor having a bilaterally symmetrical structure is held under static pressure and two auxiliary chambers are provided so that the one having a higher introduction pressure acts than the outside of the pressure sensor. To provide a container.
（ニ）問題点を解決するための手段及び作用 この発明は、ボディに圧力の第１導入室と第２導入室
とが両側に形成されると共に、１つの静圧室と静圧の第
１補助室及び第２補助室とが形成され、前記各導入室に
隔壁が設けられて各導入室が圧力の導入側と検出側とに
区画され、前記静圧室に圧力センサが設けられ、この圧
力センサの本体内に検出室が形成され、この検出室に検
出ダイアフラムが壁面離接自在に設けられて検出室が左
右の入力側に区画され、この圧力センサ本体とボディ間
に２本の導管が連接されて圧力センサが浮遊状態に支持
される一方、前記各補助室にシールダイアフラムが設け
られて各補助室が加圧側と静圧側とに区画され、この加
圧側壁面が静圧側壁面よりシールダイアフラムに近接形
成され、シールダイアフラムが加圧側壁面に離接自在に
且つ前記検出ダイアフラムより大なる弾性を備えて形成
され、前記第１及び第２の導入室の検出側が第１及び第
２補助室の加圧側を経て検出室の各入力側に導管を介し
て連通され、他方、両補助室の静圧側が静圧室に連通さ
れ、各導入室から検出室に亘って封入液が充填されると
共に、静圧室から両補助室の静圧側に亘って封入液が充
填されて構成されている。(D) Means and Actions for Solving the Problems In the present invention, the body has the first introduction chamber and the second introduction chamber for pressure formed on both sides, and one static pressure chamber and the first static pressure chamber. An auxiliary chamber and a second auxiliary chamber are formed, a partition is provided in each of the introduction chambers, each introduction chamber is divided into a pressure introduction side and a pressure detection side, and a pressure sensor is provided in the static pressure chamber. A detection chamber is formed in the main body of the pressure sensor, and a detection diaphragm is provided in the detection chamber so that the wall can be separated from and attached to the detection chamber, and the detection chamber is divided into left and right input sides. Two conduits are provided between the pressure sensor main body and the body. , And the pressure sensor is supported in a floating state, while each auxiliary chamber is provided with a seal diaphragm to divide each auxiliary chamber into a pressurizing side and a static pressure side, and the pressurizing side wall surface is sealed from the static pressure side wall surface. The seal diaphragm is formed close to the diaphragm. The detection side of the first and second introduction chambers is formed so as to be freely attached to and detached from the pressurizing side wall surface and has elasticity larger than that of the detection diaphragm, and each of the detection chambers passes through the pressurizing side of the first and second auxiliary chambers. On the other hand, it is connected to the input side via a conduit, while the static pressure sides of both auxiliary chambers are connected to the static pressure chambers, filled with filled liquid from each introduction chamber to the detection chamber, and from the static pressure chambers to both auxiliary chambers. Is filled with the enclosed liquid over the static pressure side.
従って、両導入室に導入された圧力は隔壁を介して封
入液に伝達され、検出ダイアフラムに両側より作用する
一方、シールダイアフラムを介して静圧室にも伝達さ
れ、圧力センサに外側より作用し、差圧が生じると検出
ダイアフラムが変位してその差圧を検出し、過大な片圧
が作用すると、シールダイアフラムが変位し、低圧側シ
ールダイアフラムが壁面に当接し、静圧室が片圧とほぼ
等しい圧力となって圧力センサに作用し破損が防止され
るように成っている。Therefore, the pressure introduced into both introduction chambers is transmitted to the enclosed liquid via the partition wall and acts on the detection diaphragm from both sides, while it is also transmitted to the static pressure chamber via the seal diaphragm and acts on the pressure sensor from the outside. When a differential pressure is generated, the detection diaphragm is displaced and detects the differential pressure.When an excessive one-side pressure acts, the seal diaphragm is displaced, the low-pressure side seal diaphragm contacts the wall surface, and the static pressure chamber becomes one-side pressure. The pressures are almost equal and act on the pressure sensor to prevent damage.
（ホ）実施例 以下、この発明の一実施例を図面に基づいて説明す
る。(E) Embodiment An embodiment of the present invention will be described below with reference to the drawings.
第１図に示すように、１は差圧伝送器であって、プロ
セス制御系などにおいて差圧を検出して伝送するもので
ある。As shown in FIG. 1, 1 is a differential pressure transmitter, which detects and transmits the differential pressure in a process control system or the like.
この差圧伝送器１のボディ２の両側にはフランジ３、
３が設けられ、このボディ２とフランジ３、３間に第１
導入室4aと第２導入室4bとが形成されている。この両導
入室4a、4bは、隔壁5a、5bが設けられて外側の圧力導入
側と圧力検出側とに区画され、第１導入室4aに高圧P
Hが、第２導入室4bに低圧PLが導入されている。A flange 3 is provided on both sides of the body 2 of the differential pressure transmitter 1,
3 is provided between the body 2 and the flanges 3, 3.
An introduction chamber 4a and a second introduction chamber 4b are formed. The both introducing chambers 4a, 4b are provided with partition walls 5a, 5b and are divided into an outer pressure introducing side and a pressure detecting side, and a high pressure P is provided in the first introducing chamber 4a.
H is a low-pressure P L is introduced into the second introduction chamber 4b.
前記ボディ２には、上部に静圧室６が、下部に第１補
助室7a、7bがそれぞれ形成されている。この静圧室６に
は圧力センサ８が設けられており、この圧力センサは静
電容量式で左右対称に構成され、差圧伝送器１自体も左
右対称に構成されている。この圧力センサ８は本体8aに
検出室8bが形成され、この検出室8bに検出ダイアフラム
8cが設けられ、この検出室8bが左右の入力側に区画され
て構成されている。この検出ダイアフラム8cはSiウエハ
など弾性特性に優れた単結晶で形成され、ガラス等によ
って左右の本体8aに挟持接着されている。また、検出室
8bの壁面は検出ダイアフラム8cの変位形状に倣って成形
され、検出ダイアフラム8cが接離自在に構成され、図示
しないが、検出ダイアフラム8cに可動電極が、検出室8b
壁面に固定電極が設けられている。更に、圧力センサ本
体8aとボディ２との間には２本の導管9a、9bが両側に設
けられ、圧力センサ８が静圧室６内に浮遊状態に保持さ
れている。The body 2 has a static pressure chamber 6 formed in an upper portion thereof and first auxiliary chambers 7a and 7b formed in a lower portion thereof. The static pressure chamber 6 is provided with a pressure sensor 8. The pressure sensor is a capacitance type and is symmetrically configured, and the differential pressure transmitter 1 itself is also symmetrically configured. The pressure sensor 8 has a detection chamber 8b formed in a main body 8a, and a detection diaphragm is provided in the detection chamber 8b.
8c is provided, and the detection chamber 8b is divided into left and right input sides. The sensing diaphragm 8c is formed of a single crystal with excellent elastic properties, such as S i wafer is sandwiched adhered to the left and right of the main body 8a by glass. Also, the detection room
The wall surface of 8b is formed according to the displacement shape of the detection diaphragm 8c, and the detection diaphragm 8c is configured to be freely contactable and separable, and although not shown, a movable electrode is provided in the detection diaphragm 8c and a detection chamber 8b.
Fixed electrodes are provided on the wall surface. Further, two conduits 9a and 9b are provided on both sides between the pressure sensor main body 8a and the body 2, and the pressure sensor 8 is held in a floating state in the static pressure chamber 6.
前記両補助室7a、7bはそれぞれシールダイアフラム10
a、10bが設けられて加圧側と静圧側とに区画され、この
シールダイアフラム10a、10bの曲げ剛さ（弾性）は検出
ダイアフラム8bに比して10倍乃至数十倍に設定されてい
る。また、加圧側壁面11a、11b及び静圧側壁面12a、12b
はシールダイアフラム10a、10bの変位形状に倣って成形
され、しかも、静圧側が加圧側より大容量に形成され、
加圧側壁面11a、11bが静圧側壁面12a、12bよりシールダ
イアフラム10a、10bに近接成形されてシールダイアフラ
ム10a、10bが離接自在に構成されている。Each of the auxiliary chambers 7a and 7b has a seal diaphragm 10
The seal diaphragms 10a and 10b are set to have a bending stiffness (elasticity) 10 times to several tens of times higher than that of the detection diaphragm 8b by providing a and 10b, which are divided into a pressure side and a static pressure side. Further, the pressure side wall surfaces 11a, 11b and the static pressure side wall surfaces 12a, 12b.
Is molded according to the displacement shape of the seal diaphragms 10a and 10b, and the static pressure side is formed to have a larger capacity than the pressurization side.
The pressure side wall surfaces 11a, 11b are formed closer to the seal diaphragms 10a, 10b than the static pressure side wall surfaces 12a, 12b, so that the seal diaphragms 10a, 10b can be separated and contacted.
この各補助室7a、7bの静圧側は静圧室６に通路13を介
して連通され、加圧側は各導入室4a、4bの検出側に通路
14a、14bを介して、更に検出室8aの各入力側に通路15
a、15b及び導管9a、9bを介してそれぞれ連通されてい
る。そして、この導入室4a、4bの検出側から各補助室7
a、7bの加圧側を介して検出室8bに亘って封入液16が充
填されると共に、静圧室６から各補助室7a、7bの静圧側
に亘って封入液17が充填され、圧力センサ８がフローテ
ィング（Floating）状態に支持されている。The static pressure side of each of the auxiliary chambers 7a and 7b is communicated with the static pressure chamber 6 via a passage 13, and the pressurization side is connected to the detection side of each of the introduction chambers 4a and 4b.
A passage 15 is further provided to each input side of the detection chamber 8a through 14a and 14b.
They are communicated with each other via a, 15b and conduits 9a, 9b. Then, from the detection side of the introduction chambers 4a and 4b, each auxiliary chamber 7
The filled liquid 16 is filled through the pressurizing sides of a and 7b to the detection chamber 8b, and the filled liquid 17 is filled from the static pressure chamber 6 to the static pressure sides of the auxiliary chambers 7a and 7b. 8 is supported in a floating state.
この差圧伝送器１の仕様として静圧は最大500kgf/cm2
程度に、測定差圧は０〜40000mmH2Oである。As the specification of this differential pressure transmitter 1, the static pressure is up to 500 kgf / cm 2
To a degree, the measured differential pressure is 0-40,000 mmH 2 O.
尚、18は各電極に接続されたリード線で、ハーメチッ
クシール19でシールされている。Reference numeral 18 is a lead wire connected to each electrode and is sealed with a hermetic seal 19.
次に、この差圧伝送器１の検出動作について説明す
る。Next, the detection operation of the differential pressure transmitter 1 will be described.
先ず、プロセス圧等の高圧PH及び低圧PLは、各導入室
4a、4bの導入側に導かれ、隔壁5a、5bを介して封入液16
に伝達され、圧力センサ８の検出ダイアフラム8cに両側
より作用すると同時に、補助室7a、7bのシールダイアフ
ラム10a、10bを介して封入液17に伝達され、静圧室６に
導かれて圧力センサ８に外側より作用している。この高
圧PHと低圧PLとの差（PH−PL）により検出ダイアフラム
8cが低圧側に変位し、可動電極と固定電極間の静電容量
が変化し、この容量変化をリード線18を介して導出し、
差圧を検出して伝送する。First, the high pressure P H and low pressure P L such as process pressure are
It is guided to the introduction side of 4a, 4b and is filled with the filling liquid 16 through the partition walls 5a, 5b.
To act on the detection diaphragm 8c of the pressure sensor 8 from both sides, and at the same time, it is transmitted to the enclosed liquid 17 via the seal diaphragms 10a and 10b of the auxiliary chambers 7a and 7b, and is guided to the static pressure chamber 6 to be guided to the pressure sensor 8 Acting from outside. The detection diaphragm based on the difference between this high pressure P H and the low pressure P L (P H −P L ).
8c is displaced to the low voltage side, the capacitance between the movable electrode and the fixed electrode changes, and this capacitance change is derived via the lead wire 18,
Differential pressure is detected and transmitted.
この差圧が測定レンジ内である場合、シールダイアフ
ラム10a、10bは検出ダイアフラム8cに比して剛性が大き
いのでほとんど変位せず、封入液16の移動はほとんどな
く、検出ダイアフラム8cの変位による移動は無視できる
程度で誤差の発生は生じない。When this differential pressure is within the measurement range, the seal diaphragms 10a and 10b are substantially rigid as compared with the detection diaphragm 8c, and therefore are hardly displaced, the enclosed liquid 16 hardly moves, and the detection diaphragm 8c does not move due to displacement. The error is negligible and does not occur.
この差圧が測定レンジを越えると、検出ダイアフラム
8cは検出室8b壁面に当接し破損が防止される。When this differential pressure exceeds the measurement range, the detection diaphragm
8c comes into contact with the wall surface of the detection chamber 8b to prevent damage.
更に過大な差圧、例えば、高圧PHのみ作用したような
場合、検出ダイアフラム8cは壁面に当接しており、第１
補助室7aのシールダイアフラム10aは静圧側（第１図に
おいて左側）に、第２補助室7bのシールダイアフラム10
bは加圧側（第１図において右側）にそれぞれ変位し、
更に、第２補助室7bのシールダイアフラム10bは加圧側
壁面11bに当接する。一方、第１補助室7aのシールダイ
アフラム10aは静圧側壁面12aが加圧側壁面11aより離れ
ているので当接せず、高圧PHが静圧室６に伝達される。
この静圧室６の圧力は高圧PH（片圧）よりシールダイア
フラム10aの曲げ剛さ分（変位による圧力吸収分）低い
値となっており、この圧力でもって圧力センサ８が外側
より押圧されている。従って、圧力センサ８の検出室8b
内では高圧PHが左右の本体8aを剥がす方向（外側方向）
に作用する一方、圧力センサ８の外側では静圧室６の圧
力が左右の本体8aを合わせる方向（内側方向）に作用し
ている。この高圧PHと静圧室６の圧力との差が圧力セン
サ８における左右の本体8aの接合力より小さく設定され
ているので、圧力センサ８が片圧より保護される。When an excessively large differential pressure, for example, only high pressure P H is applied, the detection diaphragm 8c is in contact with the wall surface,
The seal diaphragm 10a of the auxiliary chamber 7a is located on the static pressure side (left side in FIG. 1), and the seal diaphragm 10a of the second auxiliary chamber 7b is located on the static pressure side.
b is displaced to the pressurizing side (right side in FIG. 1),
Further, the seal diaphragm 10b of the second auxiliary chamber 7b contacts the pressure side wall surface 11b. On the other hand, the seal diaphragm 10a of the first auxiliary chamber 7a does not come into contact with the static pressure side wall surface 12a apart from the pressurizing side wall surface 11a, and the high pressure P H is transmitted to the static pressure chamber 6.
The pressure of the static pressure chamber 6 is lower than the high pressure P H (one side pressure) by the bending rigidity of the seal diaphragm 10a (the amount of pressure absorbed by the displacement), and this pressure causes the pressure sensor 8 to be pressed from the outside. ing. Therefore, the detection chamber 8b of the pressure sensor 8
Inside is the direction in which the high pressure P H separates the left and right main bodies 8a (outward direction)
On the other hand, outside the pressure sensor 8, the pressure of the static pressure chamber 6 acts in the direction (inward direction) where the left and right main bodies 8a are aligned. Since the difference between the high pressure P H and the pressure in the static pressure chamber 6 is set to be smaller than the joining force between the left and right main bodies 8a of the pressure sensor 8, the pressure sensor 8 is protected from one pressure.
尚、低圧PLのみが作用した片圧の場合も同様に保護さ
れる。Incidentally, it protected Similarly for single pressure only low pressure P L is applied.
また、圧力センサ８は静電容量式に限られず、検出ダ
イアフラム8cの変位を電気的に検出できるものであれば
よい。Further, the pressure sensor 8 is not limited to the capacitance type, and may be any one that can electrically detect the displacement of the detection diaphragm 8c.
（ヘ）発明の効果 以上のように、この発明の差圧伝送器によれば、左右
対称構造の圧力センサを静圧室の封入液中に浮遊状態で
支持し、２つの補助室からこの封入液に導入圧の高い方
を作用させるようにしたために、圧力センサが導入圧の
高い方の圧力にほぼ等しい静圧で外側より均一に押圧さ
れるので、圧力センサの破損を確実に防止することがで
きる。(F) Effects of the Invention As described above, according to the differential pressure transmitter of the present invention, the pressure sensor having the bilaterally symmetrical structure is supported in a floating state in the filling liquid of the static pressure chamber, and the filling is performed from the two auxiliary chambers. Since the higher introduced pressure acts on the liquid, the pressure sensor is pressed uniformly from the outside with a static pressure that is almost equal to the higher introduced pressure, so be sure to prevent damage to the pressure sensor. You can
また、片圧が作用した場合、小さい領域においては検
出ダイアフラムが壁面に当接し、大きい領域においては
シールダイアフラムが移動して圧力センサが保護される
ことになる。Further, when one-sided pressure is applied, the detection diaphragm comes into contact with the wall surface in a small area, and the seal diaphragm moves in a large area to protect the pressure sensor.
また、差圧が少なくとも測定レンジ内の場合、シール
ダイアフラムの変位がほとんどなく、封入液がほとんど
移動しないので、リニアリティ特性が良好なものとな
る。更に、左右対称構造とすることができるので、静圧
誤差や片圧誤差等を非常に小さくすることができる。Further, when the differential pressure is at least within the measurement range, the seal diaphragm is hardly displaced and the enclosed liquid hardly moves, so that the linearity characteristic becomes good. Furthermore, since the structure can be left-right symmetrical, static pressure error, one-sided pressure error, etc. can be made very small.
第１図は、この発明の一実施例を示す差圧伝送器の中央
縦断面図、第２図は、従来の差圧伝送器を示す要部の断
面図である。 1:差圧伝送器、2:ボディ、 4a・4b:導入室、5a・5b:隔壁、 6:静圧室、7a・7b:補助室、 8:圧力センサ、8a:本体、 8b:検出室、8c:検出ダイアフラム、 9:導管、 10a・10b:シールダイアフラム、 11a・11b・12a・12b:壁面、 16・17:封入液。FIG. 1 is a central longitudinal sectional view of a differential pressure transmitter showing an embodiment of the present invention, and FIG. 2 is a sectional view of essential parts showing a conventional differential pressure transmitter. 1: Differential pressure transmitter, 2: Body, 4a ・ 4b: Introduction chamber, 5a ・ 5b: Partition wall, 6: Static pressure chamber, 7a ・ 7b: Auxiliary chamber, 8: Pressure sensor, 8a: Main body, 8b: Detection chamber , 8c: Detection diaphragm, 9: Conduit, 10a / 10b: Seal diaphragm, 11a / 11b / 12a / 12b: Wall surface, 16/17: Filled liquid.
Claims (1)
が両側に形成されると共に、１つの静圧室と静圧の第１
補助室及び第２補助室とが形成され、前記各導入室に隔
壁が設けられて各導入室が圧力の導入側と検出側とに区
画され、前記静圧室に圧力センサが設けられ、この圧力
センサの本体内に検出室が形成され、この検出室に検出
ダイアフラムが壁面離接自在に設けられて検出室が左右
の入力側に区画され、この圧力センサ本体とボディ間に
２本の導管が連接されて圧力センサが浮遊状態に支持さ
れる一方、前記各補助室にシールダイアフラムが設けら
れて各補助室が加圧側と静圧側とに区画され、この加圧
側壁面が静圧側壁面よりシールダイアフラムに近接形成
され、シールダイアフラムが加圧側壁面に離接自在に且
つ前記検出ダイアフラムより大なる弾性を備えて形成さ
れ、前記第１及び第２導入室の検出側が第１及び第２補
助室の加圧側を経て検出室の各入力側に導管を介して連
通され、他方、両補助室の静圧側が静圧室に連通され、
各導入室から検出室に亘って封入液が充填されると共
に、静圧室から両補助室の静圧側に亘って封入液が充填
されて成り、前記圧力センサが静圧下に保持されている
ことを特徴とする差圧伝送器。1. A body is provided with a first introduction chamber and a second introduction chamber for pressure on both sides, and one static pressure chamber and a first static pressure chamber.
An auxiliary chamber and a second auxiliary chamber are formed, a partition is provided in each of the introduction chambers, each introduction chamber is divided into a pressure introduction side and a pressure detection side, and a pressure sensor is provided in the static pressure chamber. A detection chamber is formed in the main body of the pressure sensor, and a detection diaphragm is provided in the detection chamber so that the wall can be separated from and attached to the detection chamber, and the detection chamber is divided into left and right input sides. Two conduits are provided between the pressure sensor main body and the body. , And the pressure sensor is supported in a floating state, while each auxiliary chamber is provided with a seal diaphragm to divide each auxiliary chamber into a pressure side and a static pressure side, and the pressure side wall surface is sealed from the static pressure side wall surface. The seal diaphragm is formed in the vicinity of the diaphragm, and the seal diaphragm is formed so as to be separable from and in contact with the pressurizing side wall surface and has elasticity larger than that of the detection diaphragm, and the detection side of the first and second introduction chambers is the first and second auxiliary chambers. Via pressure side Communicates via a conduit to the input side of the detection chamber, on the other hand, the static pressure side of the subsidiary chamber is communicated to the static pressure chamber,
Filling liquid is filled from each introduction chamber to the detection chamber, and filling liquid is filled from the static pressure chamber to the static pressure side of both auxiliary chambers, and the pressure sensor is held under static pressure. Differential pressure transmitter characterized by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5989886A JPH0833334B2 (en) | 1986-03-17 | 1986-03-17 | Differential pressure transmitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5989886A JPH0833334B2 (en) | 1986-03-17 | 1986-03-17 | Differential pressure transmitter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62214329A JPS62214329A (en) | 1987-09-21 |
| JPH0833334B2 true JPH0833334B2 (en) | 1996-03-29 |
Family
ID=13126397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5989886A Expired - Fee Related JPH0833334B2 (en) | 1986-03-17 | 1986-03-17 | Differential pressure transmitter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0833334B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629739A (en) * | 2020-12-29 | 2021-04-09 | 重庆市伟岸测器制造股份有限公司 | Differential pressure transmitter |
| CN112665771A (en) * | 2020-12-29 | 2021-04-16 | 重庆市伟岸测器制造股份有限公司 | Isolated pressure sensor |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6469930A (en) * | 1987-09-11 | 1989-03-15 | Yokogawa Electric Corp | Capacitance type differential pressure measuring apparatus |
| JPH0198937A (en) * | 1987-10-12 | 1989-04-17 | Yokogawa Electric Corp | Electrostatic capacity type differential pressure measuring instrument |
| US4841777A (en) * | 1988-03-22 | 1989-06-27 | Honeywell Inc. | Pressure transmitter assembly |
| JPH03223639A (en) * | 1989-10-14 | 1991-10-02 | Fuji Electric Co Ltd | Differential-pressure detecting device |
| JP4784963B2 (en) * | 2004-09-07 | 2011-10-05 | 株式会社山武 | Steam flow meter |
| CN112595450B (en) * | 2020-12-29 | 2025-06-27 | 重庆市伟岸测器制造股份有限公司 | A sealed pressure stabilizing structure for pressure sensor |
-
1986
- 1986-03-17 JP JP5989886A patent/JPH0833334B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629739A (en) * | 2020-12-29 | 2021-04-09 | 重庆市伟岸测器制造股份有限公司 | Differential pressure transmitter |
| CN112665771A (en) * | 2020-12-29 | 2021-04-16 | 重庆市伟岸测器制造股份有限公司 | Isolated pressure sensor |
| CN112629739B (en) * | 2020-12-29 | 2025-06-27 | 重庆市伟岸测器制造股份有限公司 | Differential pressure transmitter |
| CN112665771B (en) * | 2020-12-29 | 2025-06-27 | 重庆市伟岸测器制造股份有限公司 | Isolated Pressure Sensors |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62214329A (en) | 1987-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |