JPH08253758A - Photoelectric device and manufacturing method thereof - Google Patents
Photoelectric device and manufacturing method thereofInfo
- Publication number
- JPH08253758A JPH08253758A JP5924095A JP5924095A JPH08253758A JP H08253758 A JPH08253758 A JP H08253758A JP 5924095 A JP5924095 A JP 5924095A JP 5924095 A JP5924095 A JP 5924095A JP H08253758 A JPH08253758 A JP H08253758A
- Authority
- JP
- Japan
- Prior art keywords
- conjugated polymer
- polymer film
- organic conjugated
- vapor deposition
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Electroluminescent Light Sources (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Photovoltaic Devices (AREA)
- Led Devices (AREA)
Abstract
(57)【要約】
【目的】 有機ポリマを用いて十分に実用性のある光電
素子を実現する。
【構成】 蒸着重合により下地上に堆積された有機共役
ポリマ膜を少なくとも１つの機能層として含むことを特
徴とする光電素子および蒸着重合により下地上に有機共
役ポリマ膜を堆積させ、この有機共役ポリマ膜を少なく
とも１つの機能層として組み込むことを特徴とする光電
素子の製造方法。
(57) [Abstract] [Purpose] To realize a sufficiently practical photoelectric device using an organic polymer. A photoelectric device comprising an organic conjugated polymer film deposited on an underlayer by vapor deposition polymerization as at least one functional layer, and an organic conjugated polymer film deposited on the underlayer by vapor deposition polymerization. A method for manufacturing a photoelectric device, comprising incorporating a film as at least one functional layer.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光電素子およびその製
造方法に関する。さらに詳しく述べるならば、本発明
は、特に、蒸着重合により形成される有機共役ポリマ膜
を光電素子の機能層として用いるものである。かかる光
電素子としては、発光ディスプレイ、レーザー、室内照
明などに有用な発光デバイス、フォトダイオードなどの
受光デバイス、太陽電池などが例示される。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photoelectric device and a method for manufacturing the same. More specifically, the present invention particularly uses an organic conjugated polymer film formed by vapor deposition polymerization as a functional layer of a photoelectric device. Examples of such photoelectric elements include light emitting displays, lasers, light emitting devices useful for interior lighting, light receiving devices such as photodiodes, and solar cells.
【０００２】[0002]
【従来の技術】従来、発光デバイスとしては、無機材料
を用いたＥＬ素子が知られている。かかる素子は、Ｚｎ
ＳやＺｎＳｅにＭｎやＴｂ等を添加して、赤〜青の発光
をさせるものであるが、駆動電圧２０Ｖ以上で発光効率
は最大でも１％程度にとどまるので、ディスプレイのよ
うな大面積のデバイスを得ることは困難である。2. Description of the Related Art Conventionally, as a light emitting device, an EL element using an inorganic material has been known. Such an element is Zn
Mn, Tb, etc. are added to S and ZnSe to emit red to blue light. However, since the luminous efficiency is only about 1% at a driving voltage of 20 V or more, a device with a large area such as a display is used. Is hard to get.
【０００３】有機材料を用いたＬＥＤなどの素子として
は、蒸着により有機モノマ膜を形成することにより高輝
度発光素子を製造し得ることが知られている。しかし、
モノマ膜は結晶化のために発光効率が低下したり、膜強
度が不十分であり、耐久性に欠けるという問題がある。
また、スピンコートやディップコートにより有機ポリマ
膜を形成することにより赤〜青の発光が可能な素子を製
造し得ることも知られている。しかし、この場合、コー
トに際して有機ポリマを溶剤に溶解させなければなら
ず、従って得られる膜中に溶剤が残留するという問題が
ある。また、ポリマの可溶化のためにポリマに可溶化部
分を付与しなければならないこともあり、発光効率が低
下してしまうという問題がある。As an element such as an LED using an organic material, it is known that a high-brightness light emitting element can be manufactured by forming an organic monomer film by vapor deposition. But,
The monomer film has a problem that the luminous efficiency is lowered due to crystallization and the film strength is insufficient, resulting in lack of durability.
It is also known that an element capable of emitting red to blue light can be manufactured by forming an organic polymer film by spin coating or dip coating. However, in this case, there is a problem that the organic polymer must be dissolved in the solvent at the time of coating, so that the solvent remains in the obtained film. In addition, a solubilized portion may have to be added to the polymer in order to solubilize the polymer, which causes a problem that luminous efficiency is reduced.
【０００４】一方、レーザーやフォトダイオード、太陽
電池などにおいては、有機ポリマを用いてそのような素
子を実用レベルで製造することは未だ困難であった。On the other hand, in lasers, photodiodes, solar cells, etc., it has been difficult to manufacture such an element using an organic polymer at a practical level.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、上記の如き
従来技術の問題点を解消し、有機ポリマを用いて十分に
実用性のある光電素子を実現することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems of the prior art and to realize a sufficiently practical photoelectric element using an organic polymer.
【０００６】[0006]
【課題を解決するための手段】本発明によれば、上記課
題を解決するため、蒸着重合により下地上に堆積された
有機共役ポリマ膜を少なくとも１つの機能層として含む
ことを特徴とする光電素子が提供される。本発明により
得られる光電素子としては、発光ディスプレイ、レーザ
ー、室内照明などに有用な発光デバイス、フォトダイオ
ードなどの受光デバイス、太陽電池などが例示される。According to the present invention, in order to solve the above-mentioned problems, a photoelectric device comprising an organic conjugated polymer film deposited on an underlayer by vapor deposition polymerization as at least one functional layer. Will be provided. Examples of the photoelectric element obtained by the present invention include a light emitting display, a laser, a light emitting device useful for interior lighting, a light receiving device such as a photodiode, and a solar cell.
【０００７】本発明に係る光電素子が発光ダイオード
（ＬＥＤ）である場合、蒸着重合により下地上に堆積さ
れて形成された有機共役ポリマからなる機能層は、この
ＬＥＤの発光層、ホール輸送層および電子輸送層のうち
の１層または２層以上の層であってよい。また、光電素
子が太陽電池である場合には有機共役ポリマ膜からなる
機能層はこの太陽電池のフォトコンダクター層であって
よく、光電素子が受光デバイスである場合には有機共役
ポリマ膜からなる機能層はこの受光デバイスの受光層で
あってよい。しかるに、従来においては、蒸着重合によ
り有機共役ポリマ膜を形成し、これをそのような光電素
子の機能層として利用することは知られていなかったの
である。When the photoelectric device according to the present invention is a light emitting diode (LED), the functional layer made of an organic conjugated polymer deposited and formed on a substrate by vapor deposition polymerization includes a light emitting layer of the LED, a hole transport layer and It may be one layer or two or more layers of the electron transport layer. When the photoelectric element is a solar cell, the functional layer made of an organic conjugated polymer film may be the photoconductor layer of this solar cell, and when the photoelectric element is a light receiving device, a function made of an organic conjugated polymer film. The layer may be the light receiving layer of this light receiving device. However, conventionally, it was not known to form an organic conjugated polymer film by vapor deposition polymerization and use it as a functional layer of such a photoelectric device.
【０００８】かかる有機共役ポリマ膜の堆積は、蒸着装
置中で、例えば、２つの末端アミノ基（−ＮＨ2 ）を有
するジアミン化合物と２つの末端アルデヒド基（−ＣＨ
Ｏ）を有するジアルデヒド化合物とを蒸着重合させつ
つ、生成するアゾメチン結合Deposition of such an organic conjugated polymer film is carried out in a vapor deposition apparatus, for example, by using a diamine compound having two terminal amino groups (-NH 2 ) and two terminal aldehyde groups (-CH).
Azomethine bond generated while vapor-depositing polymerization with a dialdehyde compound having O)
【０００９】[0009]
【化１】 Embedded image
【００１０】を有する有機共役ポリマを下地上に堆積さ
せて、膜を形成せしめることにより行うことができる。
あるいは、２つの末端アセトニトリル基（−ＣＨ2 Ｃ
Ｎ）を有するジアセトニトリル化合物と２つの末端アル
デヒド基を有するジアルデヒド化合物とを蒸着重合させ
て下記式It can be carried out by depositing an organic conjugated polymer having ## STR1 ## on a substrate to form a film.
Alternatively, two terminal acetonitrile group (-CH 2 C
N) and a dialdehyde compound having two terminal aldehyde groups by vapor deposition polymerization
【００１１】[0011]
【化２】 Embedded image
【００１２】の結合を有する有機共役ポリマ膜とするこ
ともでき、また２つの末端アセチレン基It can also be an organic conjugated polymer film having a bond of 2 and also has two terminal acetylene groups.
【００１３】[0013]
【化３】 Embedded image
【００１４】を有するジアセチレン化合物と２つの末端
チオール基（−ＳＨ）を有するジチオール化合物とを蒸
着重合させ下記式A diacetylene compound having ## STR1 ## and a dithiol compound having two terminal thiol groups (--SH) are vapor-deposited and polymerized by the following formula.
【００１５】[0015]
【化４】 [Chemical 4]
【００１６】の結合を有する有機共役ポリマ膜とするこ
ともできる。例えば、図１に示す如き蒸着装置１を用
い、２個の分子蒸発用セル２、３からそれぞれジアミン
化合物として下記式、An organic conjugated polymer film having a bond of can also be used. For example, using a vapor deposition apparatus 1 as shown in FIG.
【００１７】[0017]
【化５】 Embedded image
【００１８】のジアミノアゾベンゼンの分子とジアルデ
ヒド化合物として下記式、As the diaminoazobenzene molecule and the dialdehyde compound of the following formula,
【００１９】[0019]
【化６】 [Chemical 6]
【００２０】のジフタルアルデヒドの分子とを蒸発さ
せ、この装置中で重合させながら、基板４上にアゾメチ
ン結合を有する下記式、The following formula having an azomethine bond on the substrate 4 is obtained by evaporating the diphthalaldehyde molecule and polymerizing in this apparatus.
【００２１】[0021]
【化７】 [Chemical 7]
【００２２】で示される有機共役ポリマの膜５として堆
積せしめるのである。このような蒸着重合の出発原料と
して用いることのできるジアミン化合物、ジアルデヒド
化合物、ジアセトニトリル化合物、ジアセチレン化合物
およびジチオール化合物としては、下記式で示される基
本骨格構造を有し、これに結合された２個の上記したア
ミノ、アルデヒド、アセトニトリル、アセチレンまたは
チオール末端基を有する化合物を例示することができ
る。It is deposited as a film 5 of an organic conjugated polymer represented by. The diamine compound, dialdehyde compound, diacetonitrile compound, diacetylene compound and dithiol compound that can be used as a starting material for such vapor deposition polymerization have a basic skeleton structure represented by the following formula and are bound to it. The compounds having two amino, aldehyde, acetonitrile, acetylene or thiol end groups mentioned above can be exemplified.
【００２３】[0023]
【化８】 Embedded image
【００２４】[0024]
【化９】 [Chemical 9]
【００２５】[0025]
【化１０】 [Chemical 10]
【００２６】[0026]
【化１１】 [Chemical 11]
【００２７】[0027]
【化１２】 [Chemical 12]
【００２８】[0028]
【化１３】 [Chemical 13]
【００２９】[0029]
【化１４】 Embedded image
【００３０】[0030]
【化１５】 [Chemical 15]
【００３１】[0031]
【化１６】 Embedded image
【００３２】[0032]
【化１７】 [Chemical 17]
【００３３】[0033]
【化１８】 Embedded image
【００３４】[0034]
【化１９】 [Chemical 19]
【００３５】[0035]
【化２０】 Embedded image
【００３６】[0036]
【化２１】 [Chemical 21]
【００３７】[0037]
【化２２】 [Chemical formula 22]
【００３８】[0038]
【化２３】 [Chemical formula 23]
【００３９】[0039]
【化２４】 [Chemical formula 24]
【００４０】[0040]
【化２５】 [Chemical 25]
【００４１】[0041]
【化２６】 [Chemical formula 26]
【００４２】[0042]
【化２７】 [Chemical 27]
【００４３】[0043]
【化２８】 [Chemical 28]
【００４４】[0044]
【化２９】 [Chemical 29]
【００４５】[0045]
【化３０】 Embedded image
【００４６】[0046]
【化３１】 [Chemical 31]
【００４７】[0047]
【化３２】 Embedded image
【００４８】[0048]
【化３３】 [Chemical 33]
【００４９】[0049]
【化３４】 Embedded image
【００５０】[0050]
【化３５】 Embedded image
【００５１】[0051]
【化３６】 Embedded image
【００５２】[0052]
【化３７】 Embedded image
【００５３】[0053]
【化３８】 [Chemical 38]
【００５４】[0054]
【化３９】 [Chemical Formula 39]
【００５５】[0055]
【化４０】 [Chemical 40]
【００５６】[0056]
【化４１】 Embedded image
【００５７】[0057]
【化４２】 Embedded image
【００５８】[0058]
【化４３】 [Chemical 43]
【００５９】[0059]
【化４４】 [Chemical 44]
【００６０】[0060]
【化４５】 Embedded image
【００６１】[0061]
【化４６】 Embedded image
【００６２】また、かかる蒸着重合による有機共役ポリ
マ膜の堆積に際して、ポリマ膜が堆積される下地基板の
表面をラビングするなどの手段により表面処理しておく
ことにより、有機共役ポリマの分子を所望に配向せしめ
ることができる。このような方法により得られる有機共
役ポリマ膜は、大面積化することが容易であるから、発
光ディスプレイの製造に用いるのに有利である。また、
このポリ膜は、その表面平坦性が高く、また膜厚の制御
も容易であるので、ポリマレーザーなどの製造に有利に
用いることもできる。When the organic conjugated polymer film is deposited by such vapor deposition polymerization, the surface of the underlying substrate on which the polymer film is deposited is subjected to a surface treatment such as rubbing so that the molecules of the organic conjugated polymer are desired. It can be oriented. The organic conjugated polymer film obtained by such a method is easy to have a large area, and thus is advantageous for use in manufacturing a light emitting display. Also,
Since this poly film has a high surface flatness and the film thickness can be easily controlled, it can be advantageously used for manufacturing a polymer laser or the like.
【００６３】さらに、この膜の形成に際しては、ポリマ
を溶剤に溶解させたり、可溶化部分を付与したりする必
要がなく、残留溶剤による問題や発光効率の低下を生じ
ることがなく、本発明の光電素子およびその製造方法は
かかる観点からも有利である。Further, when forming this film, it is not necessary to dissolve the polymer in a solvent or to add a solubilized portion, and there is no problem due to the residual solvent or reduction in luminous efficiency. The photoelectric device and the manufacturing method thereof are also advantageous from this point of view.
【００６４】[0064]
【実施例】以下、実施例により本発明をさらに説明す
る。図２に示す如き構造を有するＬＥＤ素子を次の手順
により作成した。すなわち、１０００Åの厚さのＩＴＯ
電極層７を有する、０．５〜１mmの厚さのガラス基板６
を用いた。このＩＴＯ電極層７上に、図１に示す如き蒸
着装置により、出発原料として下記式、EXAMPLES The present invention will be further described below with reference to examples. An LED element having a structure as shown in FIG. 2 was prepared by the following procedure. That is, 1000 Å thick ITO
Glass substrate 6 having an electrode layer 7 and a thickness of 0.5 to 1 mm
Was used. On the ITO electrode layer 7, as a starting material, the following formula was used by a vapor deposition device as shown in FIG.
【００６５】[0065]
【化４７】 [Chemical 47]
【００６６】のジアミノフルオレンと前述したテレフタ
ルアルデヒドとを用い、これらの分子を蒸発させ、重合
させながら、下記式、Using diaminofluorene of 1 and the above-mentioned terephthalaldehyde, while evaporating and polymerizing these molecules, the following formula:
【００６７】[0067]
【化４８】 Embedded image
【００６８】で示される有機共役ポリマの膜からなる発
光層８を堆積させた。このときの分子蒸発用セルの温度
は９０〜１２０℃であり、装置の真空度は１０-2〜１０
-3Torrであり、１０時間の製膜時間の間に２０００Åの
膜厚のポリマ膜が得られた。次いで、真空度１０-6〜１
０-7Torrおいて、１０Å／秒の製膜速度でＩｎの蒸着を
行い、３０００Åの膜厚の上部Ｉｎ電極層９を形成し
た。A light emitting layer 8 made of a film of an organic conjugated polymer represented by was deposited. At this time, the temperature of the cell for molecular evaporation is 90 to 120 ° C., and the degree of vacuum of the device is 10 −2 to 10
-3 Torr, and a polymer film having a film thickness of 2000Å was obtained during the film forming time of 10 hours. Then, the degree of vacuum 10 −6 to 1
At 0 −7 Torr, In was vapor-deposited at a film forming rate of 10 Å / sec to form an upper In electrode layer 9 having a film thickness of 3000 Å.
【００６９】得られたＬＥＤ素子は、約１２ボルトの電
圧の印加により青色の発光を開始し、その最大発光効率
は約０．５％であった。The obtained LED element started to emit blue light when a voltage of about 12 V was applied, and the maximum luminous efficiency was about 0.5%.
【００７０】[0070]
【発明の効果】本発明によれば、大面積化が容易であ
り、表面平坦性が高く、また膜厚の制御も容易な有機共
役ポリマ膜を機能層として有する光電素子が得られ、有
機ポリマを用いて十分に実用性のある光電素子を実現す
ることができる。According to the present invention, it is possible to obtain a photoelectric device having an organic conjugated polymer film as a functional layer, which can easily be made large in area, has high surface flatness, and can be easily controlled in film thickness. It is possible to realize a sufficiently practical photoelectric element by using.
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明の光電素子の製造の過程で用いることの
できる蒸着装置の一例を示す模式図である。FIG. 1 is a schematic view showing an example of a vapor deposition apparatus that can be used in the process of manufacturing a photoelectric device of the present invention.
【図２】本発明の光電素子の一例を示す模式図である。FIG. 2 is a schematic view showing an example of a photoelectric device of the present invention.
Claims (9)
共役ポリマ膜を少なくとも１つの機能層として含むこと
を特徴とする光電素子。1. A photoelectric device comprising an organic conjugated polymer film deposited on a substrate by vapor deposition polymerization as at least one functional layer.
あり、有機共役ポリマ膜からなる機能層がこのＬＥＤの
発光層、ホール輸送層および電子輸送層から選ばれる請
求項１記載の光電素子。2. The optoelectronic device according to claim 1, wherein the optoelectronic device is a light emitting diode (LED), and the functional layer formed of an organic conjugated polymer film is selected from a light emitting layer, a hole transporting layer and an electron transporting layer of the LED.
リマ膜からなる機能層がこの太陽電池のフォトコンダク
ター層である請求項１記載の光電素子。3. The photoelectric element according to claim 1, wherein the photoelectric element is a solar cell, and the functional layer made of an organic conjugated polymer film is a photoconductor layer of the solar cell.
役ポリマ膜からなる機能層がこの受光デバイスの受光層
である請求項１記載の光電素子。4. The photoelectric device according to claim 1, wherein the photoelectric device is a light receiving device, and the functional layer formed of an organic conjugated polymer film is a light receiving layer of the light receiving device.
膜を堆積させ、この有機共役ポリマ膜を少なくとも１つ
の機能層として組み込むことを特徴とする光電素子の製
造方法。5. A method of manufacturing a photoelectric device, comprising depositing an organic conjugated polymer film on a substrate by vapor deposition polymerization, and incorporating the organic conjugated polymer film as at least one functional layer.
の蒸着重合により有機共役ポリマ膜の堆積が行われる請
求項５記載の方法。6. The method of claim 5, wherein the organic conjugated polymer film is deposited by vapor deposition polymerization of a diamine compound and a dialdehyde compound.
化合物との蒸着重合により有機共役ポリマ膜の堆積が行
われる請求項５記載の方法。7. The method of claim 5, wherein the organic conjugated polymer film is deposited by vapor deposition polymerization of a diacetonitrile compound and a dialdehyde compound.
との蒸着重合により有機共役ポリマ膜の堆積が行われる
請求項５記載の方法。8. The method according to claim 5, wherein the organic conjugated polymer film is deposited by vapor deposition polymerization of a diacetylene compound and a dithiol compound.
により配向される請求項５〜８のいずれかに記載の方
法。9. The method according to claim 5, wherein the molecules of the organic conjugated polymer are oriented by the surface treatment of the underlayer.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5924095A JPH08253758A (en) | 1995-03-17 | 1995-03-17 | Photoelectric device and manufacturing method thereof |
| EP95109552A EP0689067A3 (en) | 1994-06-22 | 1995-06-20 | Method for producing an optical waveguide system, optical element and coupler using the same, optical network and optical circuit board |
| EP03003911A EP1315006A1 (en) | 1994-06-22 | 1995-06-20 | Method of producing optical waveguide system, optical device and optical coupler employing the same, optical network and optical circuit board |
| US08/694,705 US5854868A (en) | 1994-06-22 | 1996-08-09 | Optical device and light waveguide integrated circuit |
| US08/951,576 US6081632A (en) | 1994-06-22 | 1997-10-16 | Method of producing optical waveguide system, optical device and optical coupler employing the same, optical network and optical circuit board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5924095A JPH08253758A (en) | 1995-03-17 | 1995-03-17 | Photoelectric device and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08253758A true JPH08253758A (en) | 1996-10-01 |
Family
ID=13107675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5924095A Withdrawn JPH08253758A (en) | 1994-06-22 | 1995-03-17 | Photoelectric device and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08253758A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6343171B1 (en) | 1998-10-09 | 2002-01-29 | Fujitsu Limited | Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making |
| US6611635B1 (en) | 1998-10-09 | 2003-08-26 | Fujitsu Limited | Opto-electronic substrates with electrical and optical interconnections and methods for making |
| US6845184B1 (en) | 1998-10-09 | 2005-01-18 | Fujitsu Limited | Multi-layer opto-electronic substrates with electrical and optical interconnections and methods for making |
| JP2005259436A (en) * | 2004-03-10 | 2005-09-22 | Kyushu Univ | Solar cell and manufacturing method thereof |
-
1995
- 1995-03-17 JP JP5924095A patent/JPH08253758A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6343171B1 (en) | 1998-10-09 | 2002-01-29 | Fujitsu Limited | Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making |
| US6611635B1 (en) | 1998-10-09 | 2003-08-26 | Fujitsu Limited | Opto-electronic substrates with electrical and optical interconnections and methods for making |
| US6845184B1 (en) | 1998-10-09 | 2005-01-18 | Fujitsu Limited | Multi-layer opto-electronic substrates with electrical and optical interconnections and methods for making |
| JP2005259436A (en) * | 2004-03-10 | 2005-09-22 | Kyushu Univ | Solar cell and manufacturing method thereof |
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