JPH08136849A - Optical scanner - Google Patents
Optical scannerInfo
- Publication number
- JPH08136849A JPH08136849A JP6274047A JP27404794A JPH08136849A JP H08136849 A JPH08136849 A JP H08136849A JP 6274047 A JP6274047 A JP 6274047A JP 27404794 A JP27404794 A JP 27404794A JP H08136849 A JPH08136849 A JP H08136849A
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- axis
- optical scanning
- scanning device
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 51
- 230000002093 peripheral effect Effects 0.000 claims abstract description 24
- 238000005259 measurement Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 22
- 230000002159 abnormal effect Effects 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 11
- 238000009434 installation Methods 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 4
- 201000009310 astigmatism Diseases 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
Landscapes
- Exposure Or Original Feeding In Electrophotography (AREA)
- Control Or Security For Electrophotography (AREA)
- Facsimile Scanning Arrangements (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は光走査装置に関し、詳し
くは、モータによって偏向素子を回転させることで、光
ビームを前記回転軸の全周にわたって偏向させる構成の
光走査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning device, and more particularly to an optical scanning device having a structure in which a deflection beam is rotated by a motor to deflect a light beam over the entire circumference of the rotating shaft.
【0002】[0002]
【従来の技術】光ビームを回転軸の全周にわたって偏向
させる構成の光走査装置としては、従来、特開昭63−
158580号公報等に開示されるようなものがあっ
た。前記光走査装置は、例えば図1に示すように構成さ
れる。図1において、感光材料1は図示しない円筒状ド
ラムの内周面に形成され、該感光材料1の円筒軸と同軸
にモータ(スピンドルモータ)2を配置し、該モータ2
の回転軸端には偏向素子としてのペンタプリズム3と集
光レンズ(集光素子)4とを保持した回転体5を取り付
けてある。2. Description of the Related Art As an optical scanning device having a structure in which a light beam is deflected over the entire circumference of a rotary shaft, there is conventionally known an optical scanning device.
Some of them are disclosed in Japanese Patent No. 158580. The optical scanning device is configured, for example, as shown in FIG. In FIG. 1, a photosensitive material 1 is formed on the inner peripheral surface of a cylindrical drum (not shown), and a motor (spindle motor) 2 is arranged coaxially with the cylindrical axis of the photosensitive material 1.
A rotary body 5 holding a pentaprism 3 as a deflection element and a condenser lens (condenser element) 4 is attached to the end of the rotation axis of the.
【0003】一方、半導体レーザ6から発光されたレー
ザ光は、レンズ7を介して前記円筒軸に平行な光ビーム
として、前記回転体5内のペンタプリズム3に照射さ
れ、該ペンタプリズム3による偏向を受けた後、集光レ
ンズ4によって集光されて前記感光材料1の感光面上に
結像する。ここで、前記回転体5はモータ2によって回
転するので、前記レーザ光は、前記円筒軸回りに回転し
ながら感光面上に結像されることになり、レーザ光の回
転中心を円筒軸方向に移動させることで、感光材料1上
に2次元の画像記録が行われる。On the other hand, the laser light emitted from the semiconductor laser 6 is irradiated through a lens 7 as a light beam parallel to the cylindrical axis to a pentaprism 3 in the rotating body 5 and is deflected by the pentaprism 3. After being received, the light is condensed by the condenser lens 4 to form an image on the photosensitive surface of the photosensitive material 1. Here, since the rotating body 5 is rotated by the motor 2, the laser light is imaged on the photosensitive surface while rotating around the cylinder axis, and the rotation center of the laser light is in the cylinder axis direction. By moving, two-dimensional image recording is performed on the photosensitive material 1.
【0004】尚、図1において、8は前記レーザ光発光
手段6によるレーザ発光を制御する制御手段である。前
記回転体5は、図13に示すように、軸方向の一方端にレ
ーザ光を入射しペンタプリズム3に照射させるための入
射部11が開口されると共に、外周面にはペンタプリズム
3で偏向されて集光レンズ4で集光されるレーザ光を感
光材料1に向けて出射させるための出射部12が開口され
ている。In FIG. 1, reference numeral 8 is a control means for controlling laser light emission by the laser light emitting means 6. As shown in FIG. 13, the rotating body 5 has an entrance 11 for opening a laser beam to irradiate the pentaprism 3 at one end in the axial direction, and the outer surface is deflected by the pentaprism 3. An emission portion 12 for emitting the laser light focused by the condenser lens 4 toward the photosensitive material 1 is opened.
【0005】[0005]
【発明が解決しようとする課題】ところで、前記ペンタ
プリズムなどの偏向素子を回転体内に保持するに当たっ
て、従来では、偏向素子の材質とは異なる材質(一般に
は金属)の保持部材15(図1参照)に固着させていたた
め、固着時の雰囲気温度に対して温度変動が発生する
と、偏向素子と保持部材との熱膨張率の違いのために偏
向素子に熱応力が生じ、偏向素子に歪みが発生すること
があった。By the way, in holding a deflecting element such as the pentaprism in a rotating body, conventionally, a holding member 15 (generally a metal) different from the material of the deflecting element (see FIG. 1) is used. ), When temperature fluctuations occur with respect to the ambient temperature at the time of fixation, thermal stress is generated in the deflection element due to the difference in thermal expansion coefficient between the deflection element and the holding member, and distortion occurs in the deflection element. There was something to do.
【0006】偏向素子に歪みが生じると、レーザビーム
の非点収差が生じ、ビーム径が所期値からずれて画質を
悪化させることになってしまうという問題を生じる。ま
た、従来では、前記図13に示すように、回転体の外周面
に出射部が開口されており、かかる開口によって回転体
の肉厚分の段差が外周面に生じることになっていた。When the deflecting element is distorted, astigmatism of the laser beam is generated, and the beam diameter deviates from a desired value, resulting in deterioration of image quality. Further, conventionally, as shown in FIG. 13, the emitting portion is opened on the outer peripheral surface of the rotating body, and the opening causes a step corresponding to the thickness of the rotating body on the outer peripheral surface.
【0007】このため、回転体を回転させると、前記段
差部において風切りが発生し、これによって回転速度ジ
ッタが悪化し、感光材料に記録される画像の画質が低下
するという問題があった。例えば、直径70mmの円筒上に
5mmの段差が回転方向にあると、回転速度ジッタは略5
倍に悪化し、また、風切り音の発生によって商品価値を
著しく低下させる惧れもあった。For this reason, when the rotating body is rotated, there is a problem in that wind noise is generated at the step portion, which deteriorates the rotational speed jitter and deteriorates the image quality of the image recorded on the photosensitive material. For example, if there is a 5 mm step in the direction of rotation on a cylinder with a diameter of 70 mm, the rotation speed jitter will be about 5.
There was also the fear that the product value would deteriorate significantly due to the generation of wind noise.
【0008】また、従来では、前記回転体の不釣合い調
整を、図14又は図15に示すように回転体5の外周面又は
軸方向端面に穴(又はネジ穴)31或いは溝32を形成し、
これらに重りを設置することで行ったり、また、修正面
における削り加工によって回転バランスをとる構成とな
っており、これも前記出射部の段差と同様に回転時の風
切りの原因となり、回転速度のジッタを悪化させること
になっていた。Further, in the prior art, in order to adjust the unbalance of the rotating body, a hole (or a screw hole) 31 or a groove 32 is formed on the outer peripheral surface or the axial end surface of the rotating body 5 as shown in FIG. 14 or 15. ,
It is configured to balance the rotation by installing weights on these, or by shaving on the correction surface.This also causes wind cutting during rotation, like the stepped portion of the emitting portion, and the rotation speed It was supposed to worsen the jitter.
【0009】更に、回転体の回転ぶれを測定するに当た
って、回転体の歪みや細かい傷があると、これらによる
変化と回転体の回転ぶれとの判別が行えず、高い測定精
度を確保することが困難であった。同様に、回転体の回
転軸と感光材料面との距離を測定するに当たっても、前
記回転体の歪み,傷が測定精度を悪化させる惧れがあっ
た。Further, in measuring the rotational shake of the rotating body, if there is distortion or fine scratches on the rotating body, it is not possible to discriminate the change due to these and the rotational shake of the rotating body, so that high measurement accuracy can be ensured. It was difficult. Similarly, when measuring the distance between the rotation axis of the rotating body and the surface of the photosensitive material, the distortion and scratches of the rotating body may deteriorate the measurement accuracy.
【0010】また、回転体の不釣合い量が何らかの原因
で増大したり、モータのベアリングが摩耗することによ
って異常な振動が発生した場合に、従来では、かかる異
常振動を検知する手段を備えないために、異常振動を生
じた状態のまま記録動作が行われ、最悪の場合にはモー
タが破壊されるなどの不具合を招く惧れがあった。ま
た、従来では、ペンタプリズム等の偏向素子と集光レン
ズとを別々に回転体内に保持する構成であったため、両
者を平行に取り付けることが難しく、平行に取り付ける
ためには高い加工精度が要求されることになってコスト
高になるという問題があった。Further, in the case where an abnormal vibration occurs due to an increase in the unbalanced amount of the rotating body for some reason or wear of the bearing of the motor, conventionally there is no means for detecting the abnormal vibration. In addition, the recording operation is performed while the abnormal vibration is generated, and in the worst case, there is a possibility that the motor may be damaged or the like. Further, in the past, since the deflecting element such as a pentaprism and the condensing lens are separately held in the rotating body, it is difficult to mount them in parallel, and high machining accuracy is required for mounting them in parallel. However, there was a problem that the cost was high.
【0011】更に、それぞれに保持部が必要になるの
で、その分コストがかかると共に、これらを収容するた
めに回転体の直径も大きくなって回転体の重量が重くな
るため、回転体のぶれが大きくなると共に、モータとし
て大きく重いものを用いる必要性が生じる。従って、装
置全体の重量アップになり、装置コストが大幅に上昇す
るという問題があった。Further, since a holding portion is required for each of them, the cost is correspondingly increased, and the diameter of the rotating body is increased to accommodate them, and the weight of the rotating body becomes heavy. As the size increases, it becomes necessary to use a large and heavy motor. Therefore, there is a problem that the weight of the entire apparatus is increased and the apparatus cost is significantly increased.
【0012】更に、従来では、感光材料を保持させるド
ラムと回転体との間の距離を測定しながら、人手でモー
タの取り付け位置を調整しており、取り付け精度に数μ
m以下という高精度が要求される光走査装置において
は、調整に長い時間を要するという問題があった。本発
明は上記問題点に鑑みなされたものであり、温度変動に
よって偏向素子に熱応力が生じることを抑制できるよう
にすることを目的とする。Further, conventionally, the mounting position of the motor is manually adjusted while measuring the distance between the drum holding the photosensitive material and the rotating body, and the mounting accuracy is several μ.
In an optical scanning device that requires a high precision of m or less, there is a problem that adjustment takes a long time. The present invention has been made in view of the above problems, and an object of the present invention is to make it possible to suppress the occurrence of thermal stress in the deflection element due to temperature fluctuations.
【0013】また、風切りによる回転速度ジッタの悪化
を回避できるようにすることを目的とする。また、回転
体のぶれの測定や位置の測定が、回転体の歪みや傷に影
響されずに高精度に行えるようにすることを目的とす
る。また、異常振動の発生を検知できるようにして、異
常振動が発生したまま放置されることを回避できるよう
にすることを目的とする。It is another object of the present invention to prevent deterioration of rotation speed jitter due to wind cutting. Another object of the present invention is to make it possible to measure the shake of the rotating body and the position of the rotating body with high accuracy without being affected by distortion and scratches of the rotating body. Another object of the present invention is to make it possible to detect the occurrence of abnormal vibration and to avoid leaving the abnormal vibration as it is.
【0014】また、回転体内に収容される偏向素子と集
光レンズとの取り付けを容易とし、また、回転体のコン
パクト化を図ることを目的とする。更に、モータの取り
付け位置の調整が、効率的に行えるようにすることを目
的とする。It is another object of the present invention to facilitate the attachment of the deflecting element and the condenser lens housed in the rotating body and to make the rotating body compact. Further, another object of the present invention is to enable efficient adjustment of the mounting position of the motor.
【0015】[0015]
【課題を解決するための手段】そのため請求項1の発明
にかかる光走査装置は、円筒状の回転体内に偏向素子を
保持すると共に、前記回転体をモータによってその円筒
軸回りに回転させ、前記回転体の軸方向端面に開口させ
た入射部から入射される回転軸と平行な光ビームを前記
偏向素子によって直角に偏向させて前記回転体の周壁に
開口された出射部から出射させ、前記光ビームを前記回
転軸の全周にわたって偏向させる構成の光走査装置にお
いて、前記偏向素子を該偏向素子と同材質の保持部材に
よって前記回転体内に保持する構成とした。Therefore, an optical scanning device according to the invention of claim 1 holds a deflecting element in a cylindrical rotating body, and rotates the rotating body around its cylindrical axis by a motor, A light beam parallel to the rotation axis, which is incident from an incident portion opened on the axial end face of the rotating body, is deflected at a right angle by the deflecting element and is emitted from an emitting portion opened on the peripheral wall of the rotating body. In the optical scanning device configured to deflect the beam over the entire circumference of the rotation axis, the deflection element is held in the rotating body by a holding member made of the same material as the deflection element.
【0016】請求項2の発明にかかる光走査装置では、
前記回転体の外周を回転軸に略平行な面でカットしたカ
ット面に、前記出射部を開口させる構成とした。請求項
3の発明にかかる光走査装置では、前記回転体の外周壁
又は軸方向端面に形成した凹陥部において前記回転体の
不釣り合い調整を行う構成であって、前記凹陥部を前記
回転体の円筒状外周と面一とするフードを取付ける構成
とした。In the optical scanning device according to the invention of claim 2,
The emitting portion is opened on a cut surface obtained by cutting the outer periphery of the rotating body with a surface substantially parallel to the rotation axis. In the optical scanning device according to the invention of claim 3, there is provided a configuration in which imbalance adjustment of the rotating body is performed in a concave portion formed on an outer peripheral wall or an axial end surface of the rotating body, and the concave portion is formed on the rotating body. A hood that is flush with the cylindrical outer periphery is attached.
【0017】請求項4の発明にかかる光走査装置では、
前記回転体の外周に前記モータによる回転駆動によって
形成されたセルフカット面を設け、該セルフカット面を
基準として前記回転体の回転軸位置又は前記回転体のぶ
れを測定する構成とした。請求項5の発明にかかる光走
査装置では、前記モータ又は該モータの保持部に加速度
センサを設け、該加速度センサによって異常振動を検出
する構成とした。In the optical scanning device according to the invention of claim 4,
A self-cut surface formed by rotational driving by the motor is provided on the outer periphery of the rotary body, and the rotational axis position of the rotary body or the shake of the rotary body is measured with the self-cut surface as a reference. In the optical scanning device according to the invention of claim 5, an acceleration sensor is provided in the motor or a holding portion of the motor, and the acceleration sensor detects abnormal vibration.
【0018】請求項6の発明にかかる光走査装置では、
前記偏向素子と一体に集光素子を設ける構成とした。請
求項7の発明にかかる光走査装置では、前記光走査装置
の取り付け基準面と前記回転体の回転軸との間の距離を
測定し、該測定結果に基づいて前記モータを径方向で支
持する圧電素子に対する印加電圧を制御して回転体の中
心軸調整を行う構成とした。In the optical scanning device according to the invention of claim 6,
A condensing element is provided integrally with the deflecting element. In the optical scanning device according to the invention of claim 7, the distance between the mounting reference surface of the optical scanning device and the rotation axis of the rotating body is measured, and the motor is supported in the radial direction based on the measurement result. The central axis of the rotating body is adjusted by controlling the voltage applied to the piezoelectric element.
【0019】[0019]
【作用】請求項1の発明にかかる光走査装置によると、
偏向素子と同材質の保持部材、即ち、同じ熱膨張率の材
料で形成された保持部材に偏向素子を保持するから、偏
向素子に熱応力が生じることが抑止される。請求項2の
発明にかかる光走査装置によると、回転体の外周を回転
軸に略平行な面でカットし、該カット面に光ビーム出射
部を開口させる構成であるから、出射部における段差を
充分に小さくでき、また、カット面が回転体の外周面と
連なるため、風切りの発生を回避でき、もって、回転速
度ジッタを小さくできる。According to the optical scanning device of the invention of claim 1,
Since the deflection element is held by the holding member made of the same material as the deflecting element, that is, the holding member made of the material having the same coefficient of thermal expansion, it is possible to prevent thermal stress from being generated in the deflecting element. According to the optical scanning device of the second aspect of the present invention, since the outer periphery of the rotating body is cut along a plane substantially parallel to the rotation axis and the light beam emitting portion is opened on the cut surface, a step in the emitting portion is formed. It can be made sufficiently small, and since the cut surface is continuous with the outer peripheral surface of the rotating body, the occurrence of wind cutting can be avoided, and thus the rotation speed jitter can be reduced.
【0020】請求項3の発明にかかる光走査装置による
と、回転体の不釣合い調整のために形成される凹陥部に
対して、回転体の外周面と面一になるようなフードを取
り付けるから、前記凹陥部に対する重りの設置や、前記
凹陥部の大きさを調整することによる不釣合い調整を可
能としつつ、実際の光走査時には、回転体において風切
りの原因となる段差が生じず、以て、回転速度ジッタを
小さくできる。According to the optical scanning device of the third aspect of the present invention, the hood that is flush with the outer peripheral surface of the rotating body is attached to the recess formed for adjusting the imbalance of the rotating body. , It is possible to install a weight for the concave portion and to adjust the imbalance by adjusting the size of the concave portion, and at the time of actual optical scanning, there is no step difference that causes wind cutting in the rotating body. , Rotation speed jitter can be reduced.
【0021】請求項4の発明にかかる光走査装置による
と、回転体にモータに対する取り付け状態で切削して形
成したセルフカット面を設け、該セルフカット面を基準
としてぶれや回転軸位置を測定するから、回転体の歪み
や傷に影響されない測定が可能となる。請求項5の発明
にかかる光走査装置によると、モータ又は該モータの保
持部に加速度センサが設けられるから、回転体における
不釣合い量の増大やモータベアリングの摩耗などによっ
て異常振動が発生すると、かかる異常振動が前記加速度
センサで検出され、モータ駆動の停止などのフェイルセ
ーフ制御を実行できる。According to the optical scanning device of the fourth aspect of the present invention, the rotary body is provided with a self-cut surface formed by cutting in a state of being attached to the motor, and the shake and the rotational axis position are measured with the self-cut surface as a reference. Therefore, the measurement can be performed without being affected by the distortion and the scratch of the rotating body. According to the optical scanning device of the fifth aspect of the present invention, since the motor or the holding portion of the motor is provided with the acceleration sensor, when abnormal vibration occurs due to an increase in the amount of imbalance in the rotating body or wear of the motor bearing, it is possible Abnormal vibration is detected by the acceleration sensor, and fail-safe control such as stopping the motor drive can be executed.
【0022】請求項6の発明にかかる光走査装置による
と、偏向素子と集光素子とを一体として回転体内に設け
る構成としたので、加工が容易となり、また、回転体の
サイズを小型化でき、以て、装置全体のコンパクト化を
図れる。請求項7の発明にかかる光走査装置によると、
圧電素子によってモータの径方向を支持させ、基準面と
回転体の回転軸との間の距離の測定結果に基づいて前記
圧電素子の印加電圧を調整することで、モータ及び回転
体の軸を平行移動させ、以て、前記距離を基準値に調整
する。According to the optical scanning device of the sixth aspect of the present invention, since the deflecting element and the condensing element are integrally provided in the rotating body, the processing is facilitated and the size of the rotating body can be reduced. As a result, the entire device can be made compact. According to the optical scanning device of the invention of claim 7,
By supporting the radial direction of the motor with a piezoelectric element and adjusting the voltage applied to the piezoelectric element based on the measurement result of the distance between the reference plane and the rotating shaft of the rotating body, the axes of the motor and the rotating body are made parallel. Then, the distance is adjusted to the reference value.
【0023】[0023]
【実施例】以下に本発明の実施例を説明する。尚、以下
の実施例における光走査装置のシステム構成は、前記図
1に示したものと同じものとし、同一要素には同一符合
を付して説明を進める。まず、本実施例においては、図
2に示すように、回転体5内に収容される偏向素子とし
てのペンタプリズム3と集光レンズ(集光素子)4とを
予め一体とし、回転体5内に収容する構成とした。Embodiments of the present invention will be described below. The system configuration of the optical scanning device in the following embodiments is the same as that shown in FIG. 1, and the same elements are designated by the same reference numerals for the description. First, in the present embodiment, as shown in FIG. 2, the pentaprism 3 serving as a deflection element and the condenser lens (condenser element) 4 housed in the rotating body 5 are integrated in advance, and It was configured to be housed in.
【0024】かかる構成によれば、回転体5に対してペ
ンタプリズム3の出射面と集光レンズ4とを平行に回転
体5に対して取り付けるための調整作業を省略すること
ができる。また、保持機構をそれぞれに備える必要がな
くペンタプリズム3と集光レンズ4とが一体化したもの
を保持する機構を1つ備えれば良いので、回転体5の直
径を小さくすることが可能となり、これにより装置全体
をコンパクトにできる。According to this structure, it is possible to omit the adjustment work for mounting the exit surface of the pentaprism 3 and the condenser lens 4 in parallel to the rotating body 5 with respect to the rotating body 5. Further, it is not necessary to provide a holding mechanism for each, and it suffices to provide one mechanism for holding the one in which the penta prism 3 and the condenser lens 4 are integrated, so that the diameter of the rotating body 5 can be reduced. Therefore, the entire device can be made compact.
【0025】ここで、単体としてのペンタプリズム3、
或いは、集光レンズ4が一体化されたペンタプリズム3
を回転体5内に保持する保持部材15を、ペンタプリズム
3の材質と同じ材質、即ち、同じ熱膨張率の材質で形成
させてあり、ペンタプリズム3を前記保持部材15に固着
させたときの雰囲気温度に対して温度変動があっても、
ペンタプリズム3に熱応力が生じることを抑止できるよ
うにしてある。このようにしてペンタプリズム3におけ
る熱応力の発生が抑制されれば、ペンタプリズム3に歪
みが生じることを回避でき、以て、非点収差を防止でき
る。Here, the penta prism 3 as a single unit,
Alternatively, the pentaprism 3 having the condenser lens 4 integrated therein
The holding member 15 for holding the inside of the rotating body 5 is made of the same material as the material of the pentaprism 3, that is, the material of the same coefficient of thermal expansion, and when the pentaprism 3 is fixed to the holding member 15. Even if there is a temperature change with respect to the ambient temperature,
The pentaprism 3 can be prevented from being thermally stressed. If the generation of thermal stress in the pentaprism 3 is suppressed in this way, it is possible to avoid distortion in the pentaprism 3 and thus prevent astigmatism.
【0026】一方、本実施例では、前記回転体5におい
て、図3(A),(B)に示すようにして出射部12を開
口させるものとした。即ち、出射部12を回転体5の外周
面に開口させるのではなく、回転体5の円筒軸と略平行
な面でカットして落とし込まれた面(カット面)16に出
射部12を開口させてある。尚、前記カット面16は、回転
体5の外径に対して充分に大きな曲率を有する曲面とし
ても良い。On the other hand, in this embodiment, in the rotating body 5, the emitting portion 12 is opened as shown in FIGS. 3 (A) and 3 (B). That is, instead of opening the emitting portion 12 on the outer peripheral surface of the rotating body 5, the emitting portion 12 is opened on a surface (cut surface) 16 which is cut and cut by a surface substantially parallel to the cylindrical axis of the rotating body 5. I am allowed. The cut surface 16 may be a curved surface having a sufficiently large curvature with respect to the outer diameter of the rotating body 5.
【0027】かかる構成によると、前記回転体5をその
円筒軸回りに回動させるときに、出射部12における回転
方向の段差を無くすことができ、風切りの発生を抑制で
き、以て、風切りによる回転速度ジッタの悪化を防止で
きる。即ち、回転体5の外周面に出射部12を開口させる
構成とすると、回転方向において回転体5の肉厚分の段
差が生じることになり、かかる段差部において風切りが
発生することになってしまうが、図3に示すようにカッ
ト面16に出射部12を開口させる構成とすれば、回転体5
の外周面から前記カット面16が段差なく連続し、かつ、
カット面における肉厚が薄いことから、出射部12によっ
て生じる段差を充分に小さくでき、以て、風切りの発生
を抑制できるものである。風切りの発生が抑制されれ
ば、風切りに伴って回転速度ジッタが悪化することを回
避できると共に、風切り音の発生を防止できる。According to this structure, when the rotating body 5 is rotated around its cylindrical axis, it is possible to eliminate a step in the rotating direction of the emitting portion 12 and to suppress the occurrence of wind cuts. It is possible to prevent the deterioration of the rotation speed jitter. That is, when the emitting portion 12 is opened on the outer peripheral surface of the rotating body 5, a step corresponding to the wall thickness of the rotating body 5 is generated in the rotation direction, and wind-cutting occurs at the step portion. However, if the emitting portion 12 is opened in the cut surface 16 as shown in FIG.
From the outer peripheral surface of the cut surface 16 is continuous without a step, and,
Since the thickness of the cut surface is thin, the step generated by the emitting portion 12 can be made sufficiently small, so that the occurrence of wind cutting can be suppressed. If the generation of wind noise is suppressed, it is possible to prevent the rotation speed jitter from being deteriorated due to the wind noise, and to prevent the generation of wind noise.
【0028】ところで、前記回転体5に不釣合いがある
と、回転駆動されたときに振動(ぶれ)が生じることに
なってしまうので、不釣合い調整を行う必要がある。本
実施例では、図4に示すように、回転体5の外周面の軸
方向端部に、縮径部5aを形成すると共に、かかる縮径
部5aの外周に略等間隔で設けた不釣合い調整部として
の穴(或いはネジ穴)17(凹陥部)を形成し、該穴17に
重りを設置することで不釣合い調整を行うものとする。
そして、不釣合い調整後は、図5に示すように、前記縮
径部5aの段差を埋めるリング状(2分割構成であって
も良い)のフード18を取り付けることで、回転体5の外
周が不釣合い調整部によって凹凸となることなく、面一
となるようにした。By the way, if the rotating body 5 is unbalanced, vibration (vibration) will occur when it is rotationally driven, so it is necessary to adjust the unbalance. In this embodiment, as shown in FIG. 4, a reduced diameter portion 5a is formed at the axial end portion of the outer peripheral surface of the rotating body 5, and the unbalanced portions are provided on the outer periphery of the reduced diameter portion 5a at substantially equal intervals. An unbalance adjustment is performed by forming a hole (or screw hole) 17 (recessed portion) as an adjusting portion and installing a weight in the hole 17.
Then, after the unbalance adjustment, as shown in FIG. 5, by attaching a ring-shaped (may be a two-divided configuration) hood 18 that fills the step of the reduced diameter portion 5a, the outer periphery of the rotating body 5 The imbalance adjusting unit made the surface flush with each other without unevenness.
【0029】従って、不釣合い調整のための回転体5の
外周に凹陥形成される穴17を備える構成であっても、前
記穴(或いはネジ穴)17がビーム走査時には風切りを生
じる凹凸となることがなく、風切りによる回転速度ジッ
タの悪化及び風切り音の発生を回避できる。また、不釣
合い調整部としての凹陥部を、図6及び図7に示すよう
に、回転体5の軸方向端面に環状に形成した溝19として
設け、該溝19に対する重りの設置によって不釣合い調整
を行う構成であっても良く、この場合には、入射部11用
の開口を有する円板をフード20として、不釣合い調整後
に前記溝19を覆うように取り付けることで、回転体5の
軸方向端面における凹凸を無くす。この場合も、回転体
5の外面が不釣合い調整部によって凹凸となることがな
く、面一となって風切りの発生を回避できる。Therefore, even if the hole 17 is formed in the outer circumference of the rotating body 5 for adjusting the imbalance, the hole (or screw hole) 17 becomes an unevenness that causes wind cutting during beam scanning. Therefore, it is possible to avoid the deterioration of the rotation speed jitter and the generation of wind noise due to the wind noise. Further, as shown in FIG. 6 and FIG. 7, a recessed portion as an unbalanced adjustment portion is provided as an annular groove 19 formed on the axial end surface of the rotating body 5, and an unbalanced adjustment is made by installing a weight to the groove 19. In this case, a disk having an opening for the incident portion 11 is used as the hood 20, and the hood 20 is attached so as to cover the groove 19 after the unbalance adjustment. Eliminates unevenness on the end face. Also in this case, the outer surface of the rotating body 5 does not become uneven due to the imbalance adjusting unit, and it is possible to avoid the occurrence of wind cutting by making the surface flush.
【0030】尚、前記穴17又は溝19に重りを設置するこ
とで不釣合い調整を行う構成を示したが、予め回転体5
の外面に設定された修正面(凹陥部)を削り取ること
で、不釣合い調整を行う構成であっても良く、この場合
も、前記修正面を覆って回転体5の外周面と面一にでき
るフードを取り付けることで、不釣合い調整部による風
切りの発生を回避できる。Although a structure for adjusting the imbalance by installing a weight in the hole 17 or the groove 19 has been shown, the rotary member 5 is previously prepared.
The unbalance adjustment may be performed by scraping off the correction surface (recessed portion) set on the outer surface of the rotary body 5. Also in this case, the correction surface can be covered to be flush with the outer peripheral surface of the rotating body 5. By attaching the hood, it is possible to avoid the occurrence of wind cutting due to the imbalance adjusting unit.
【0031】ところで、光走査中に回転体5にぶれが生
じると画質を悪化させることになり、また、回転体5の
回転軸と感光材料1までの距離を調整して感光材料1の
中心軸に回転体5の回転軸を正しく一致させることが要
求される。従って、前記回転体5のぶれを測定したり、
又は、回転体5と感光材料面との間の距離を測定する作
業が必要になる。しかしながら、回転体5に歪みや傷が
あると、前記ぶれや距離の測定精度が悪化することにな
ってしまう。By the way, if the rotating body 5 is shaken during optical scanning, the image quality is deteriorated, and the central axis of the photosensitive material 1 is adjusted by adjusting the distance between the rotating shaft of the rotating body 5 and the photosensitive material 1. It is required that the rotation axes of the rotating body 5 are correctly aligned with each other. Therefore, the shake of the rotating body 5 can be measured,
Alternatively, it is necessary to measure the distance between the rotating body 5 and the surface of the photosensitive material. However, if the rotating body 5 is distorted or scratched, the accuracy of measuring the shake and the distance will be deteriorated.
【0032】そこで、本実施例では、回転体5をモータ
2に取り付けて回転させた状態で回転体5の外周面にバ
イトを当てることで、図8に示すように、回転体5の外
周に帯状の切削加工面(以下、セルフカット面という)
21を形成し、該セルフカット面21を基準としてぶれや回
転軸位置の測定などを行わせる構成としてある。例えば
回転体5のぶれ(面ぶれ)を測定する場合には、図9に
示すように、微小変位計のプローブ22を前記セルフカッ
ト面21に当接させて、回転体5を回転させたときの面ぶ
れを測定させる。かかる構成によれば、回転体5に歪み
や細かな傷があっても、測定の基準は前記歪み,傷の影
響を受けないセルフカット面21に基づいて行われるか
ら、高精度な測定が可能となる。In view of this, in the present embodiment, the rotating body 5 is attached to the motor 2 and is rotated, and a bit is applied to the outer peripheral surface of the rotating body 5. Band-shaped cutting surface (hereinafter referred to as self-cut surface)
21 is formed, and the shake and the rotational axis position are measured with the self-cut surface 21 as a reference. For example, when the shake (surface shake) of the rotating body 5 is measured, as shown in FIG. 9, when the probe 22 of the micro displacement gauge is brought into contact with the self-cutting surface 21 and the rotating body 5 is rotated. Measure the runout of the. According to this configuration, even if the rotating body 5 is distorted or has small scratches, the reference for measurement is based on the self-cut surface 21 that is not affected by the distortion or scratches, so that highly accurate measurement is possible. Becomes
【0033】回転体5の回転軸位置の測定を行う場合
も、前記セルフカット面21から感光材料1の形成位置ま
での距離を測定させるようにすれば、高いの測定精度を
確保でき、以て、回転軸位置の調整精度を高くできる。
ここで、上記のように回転体5の回転軸位置を測定させ
て回転体5(モータ2)の取り付け位置を調整する作業
においては、数μm以下の調整精度が要求されるので、
人手による調整では長い時間を要することになってしま
う。Even when the position of the rotary shaft of the rotary body 5 is measured, if the distance from the self-cutting surface 21 to the formation position of the photosensitive material 1 is measured, a high measurement accuracy can be secured. The accuracy of adjusting the position of the rotary shaft can be increased.
Here, in the work of measuring the rotational axis position of the rotating body 5 and adjusting the mounting position of the rotating body 5 (motor 2) as described above, adjustment accuracy of several μm or less is required.
Manual adjustment requires a long time.
【0034】そこで、本実施例では、図10に示すような
構成によって前記調整作業を行わせる構成とした。図10
において、22はモータ2の保持部材であり、モータ2を
囲むように形成されており、この保持部材22に対してモ
ータ2は、付勢部材23とピエゾ素子24(圧電素子)とを
介して非接触に保持される。Therefore, in this embodiment, the adjustment work is performed by the configuration shown in FIG. FIG.
22 is a holding member for the motor 2 and is formed so as to surround the motor 2. The holding member 22 is connected to the motor 2 via a biasing member 23 and a piezoelectric element 24 (piezoelectric element). Holds in non-contact.
【0035】付勢部材23aはモータ2を回転軸を通る図
で下向きの方向にモータ2を付勢するようになってお
り、かかる付勢部材23aと回転軸を挟んで対向する位置
ではピエゾ素子24aがモータ2を支持している。同様
に、付勢部材23b及びピエゾ素子24bは、前記付勢部材
23aとピエゾ素子24aとを結ぶ径方向に対して直角の位
置関係となるように配置されており、前記付勢部材23b
は、図で右方向にモータ2を付勢する。The urging member 23a urges the motor 2 in a downward direction in the figure passing through the rotating shaft. The piezo element is located at a position facing the urging member 23a across the rotating shaft. 24 a supports the motor 2. Similarly, the biasing member 23b and the piezo element 24b are
The biasing member 23b is arranged so as to have a positional relationship at right angles to the radial direction connecting the 23a and the piezo element 24a.
Urges the motor 2 to the right in the figure.
【0036】ここで、前記ピエゾ素子24a,24bは、印
加電圧に応じてモータ2の径方向に伸長するよう構成さ
れており、ピエゾ素子24a,24bに電圧を印加すると、
前記付勢部材23a,23bの付勢力に抗してモータ2の位
置を径方向に動かすことになる。尚、前記付勢部材23と
しては、ゴム,コイルバネ,板バネ等を用いることがで
きる。Here, the piezo elements 24a and 24b are configured to extend in the radial direction of the motor 2 according to the applied voltage, and when a voltage is applied to the piezo elements 24a and 24b,
The position of the motor 2 is moved in the radial direction against the biasing force of the biasing members 23a and 23b. As the urging member 23, rubber, coil spring, leaf spring, or the like can be used.
【0037】一方、内径測定器25によって、回転体5の
前記セルフカット面21と感光材料1が形成されるドラム
26の内面(取り付け基準面)との間の距離が、回転軸と
ドラム面26との間の距離に対応するものとして測定され
るようになっており、作業者は、前記測定器25のメモリ
によって読み取られる距離が目標値に一致するか否かに
よって、図10に示す場合では、ピエゾ素子24aの印加電
圧を調整することで、モータ2(回転軸)の図で上下方
向における位置を調整して、前記距離が目標値に一致す
るようにする。同様に、モータ2(回転軸)の図で左右
方向における位置を調整する場合にはピエゾ素子24bの
印加電圧を調整する。On the other hand, a drum on which the self-cutting surface 21 of the rotating body 5 and the photosensitive material 1 are formed by the inner diameter measuring device 25.
The distance between the inner surface (mounting reference surface) of 26 is measured as corresponding to the distance between the rotation axis and the drum surface 26, and the operator can store the memory of the measuring device 25. In the case shown in FIG. 10, the voltage applied to the piezo element 24a is adjusted to adjust the position in the vertical direction of the motor 2 (rotating shaft) depending on whether or not the distance read by the target value matches the target value. So that the distance matches the target value. Similarly, when adjusting the position of the motor 2 (rotating shaft) in the left-right direction in the figure, the voltage applied to the piezo element 24b is adjusted.
【0038】かかる構成によれば、ピエゾ素子24a,24
bに与える電圧によって微小にモータ2(回転軸)の位
置を調整できるから、人手によってモータ位置を動かす
場合に比べて高精度な位置調整を短時間に行わせること
が可能である。尚、内径測定器25の出力に基づいてピエ
ゾ素子24の印加電圧を自動調整させることも可能であ
る。According to this structure, the piezoelectric elements 24a, 24a
Since the position of the motor 2 (rotating shaft) can be finely adjusted by the voltage applied to b, it is possible to perform highly accurate position adjustment in a short time as compared with the case where the motor position is manually moved. The applied voltage of the piezo element 24 can be automatically adjusted based on the output of the inner diameter measuring device 25.
【0039】ところで、前記不釣り合い調整において設
置した重りが外れたりして、不釣り合い量が増大した
り、モータ2のベアリングが磨耗したりすると、異常振
動が発生して画質を悪化させるのみならず、回転体5が
吹き飛ぶ惧れがある。そこで、図11又は図12に示すよう
に、前記モータ2の保持部材22やモータ2自体に加速度
センサ27を取り付け、動作中に前記加速度センサ27で異
常振動が検出されたときに、直ちにモータを停止させて
使用者に警告するなどのフェイルセーフが実行されるよ
うにすると良い。By the way, when the weight installed in the imbalance adjustment is disengaged and the imbalance amount is increased or the bearing of the motor 2 is worn, abnormal vibration occurs and the image quality is deteriorated. , There is a fear that the rotating body 5 will blow away. Therefore, as shown in FIG. 11 or 12, an acceleration sensor 27 is attached to the holding member 22 of the motor 2 or the motor 2 itself, and when abnormal vibration is detected by the acceleration sensor 27 during operation, the motor is immediately turned on. It is recommended to perform a fail-safe such as stopping and warning the user.
【0040】また、加速度センサ27を取り付けてあれ
ば、回転体5の不釣合い調整を実機上で行うことができ
る。一般的に、モータの保持方法が変わると回転体5の
ぶれが変化するので、実機上で不釣合い調整が行えれ
ば、前記不釣合い調整を高精度に行えることになる。
尚、前記光走査装置は、光源(半導体レーザ)を1つだ
け備える構成としたが、複数の光源を備えて複数ライン
を同時記録する構成のものであっても良い。If the acceleration sensor 27 is attached, the unbalanced adjustment of the rotating body 5 can be performed on an actual machine. Generally, when the holding method of the motor changes, the shake of the rotating body 5 changes, so if the unbalance adjustment can be performed on an actual machine, the unbalance adjustment can be performed with high accuracy.
Although the optical scanning device is configured to include only one light source (semiconductor laser), it may be configured to include a plurality of light sources and simultaneously record a plurality of lines.
【0041】また、偏向素子としてペンタプリズムを用
いる構成に限定されるものではなく、直角プリズム等を
偏向素子とする構成であっても良いことは明らかであ
る。Further, it is clear that the deflecting element is not limited to the structure using the penta prism, and a right angle prism or the like may be used as the deflecting element.
【0042】[0042]
【発明の効果】以上説明したように、請求項1の発明に
かかる光走査装置によると、雰囲気温度の変動があって
も、偏向素子に熱応力が生じることが抑止され、以て、
偏向素子における非点収差の発生を回避して、ビーム径
を所期値に収めることができるという効果がある。As described above, according to the optical scanning device of the first aspect of the present invention, it is possible to prevent the deflection element from being thermally stressed even if the ambient temperature changes.
There is an effect that the beam diameter can be set to a desired value by avoiding the generation of astigmatism in the deflecting element.
【0043】請求項2の発明にかかる光走査装置による
と、光ビームの出射部において回転方向に段差が生じる
ことを回避でき、以て、風切りによる回転速度ジッタの
悪化や風切り音の発生を防止できるという効果がある。
請求項3の発明にかかる光走査装置によると、回転体の
不釣り合い調整にかかる凹陥部を覆って回転体の外周面
と面一になるようなフードを取り付けるので、前記凹陥
部によって風切りが発生して、回転速度ジッタの悪化や
風切り音が発生することを防止できるという効果があ
る。According to the optical scanning device of the second aspect of the present invention, it is possible to avoid the occurrence of a step in the rotation direction at the light beam emitting portion, and thus to prevent the deterioration of the rotation speed jitter and the generation of the wind noise due to the wind noise. The effect is that you can do it.
According to the optical scanning device of the third aspect of the present invention, the hood is attached so as to cover the concave portion for adjusting the unbalance of the rotating body so as to be flush with the outer peripheral surface of the rotating body. Thus, it is possible to prevent the deterioration of the rotation speed jitter and the generation of wind noise.
【0044】請求項4の発明にかかる光走査装置による
と、回転体にセルフカット面を設けることで、面ぶれの
測定や回転軸位置の測定が、回転体の歪みや傷に影響さ
れずに高精度に行えるという効果がある。請求項5の発
明にかかる光走査装置によると、異常振動の発生を検知
してフェイルセーフを実行させることができ、以て、モ
ータが破壊されるなどの最悪の事態を確実に回避できる
という効果がある。According to the optical scanning device of the fourth aspect of the present invention, by providing the rotating body with the self-cutting surface, the measurement of the surface deviation and the measurement of the rotational axis position are not affected by the distortion and the scratch of the rotating body. The effect is that it can be performed with high accuracy. According to the optical scanning device of the fifth aspect of the present invention, it is possible to detect the occurrence of abnormal vibration and execute fail-safe, and thus it is possible to reliably avoid the worst situation such as the motor being destroyed. There is.
【0045】請求項6の発明にかかる光走査装置による
と、偏向素子と集光素子とを一体として回転体内に設け
る構成としたので、加工が容易となり、また、回転体の
サイズを小型化でき、以て、装置全体のコンパクト化を
図れるという効果がある。請求項7の発明にかかる光走
査装置によると、圧電素子に対する印加電圧の調整によ
って回転軸位置の調整を行えるので、高精度な位置調整
を短時間に行わせることができるという効果がある。According to the optical scanning device of the sixth aspect of the present invention, since the deflecting element and the condensing element are integrally provided in the rotating body, processing is facilitated and the size of the rotating body can be reduced. Therefore, there is an effect that the entire apparatus can be made compact. According to the optical scanning device of the seventh aspect, the position of the rotary shaft can be adjusted by adjusting the voltage applied to the piezoelectric element, so that there is an effect that highly accurate position adjustment can be performed in a short time.
【図1】本発明にかかる光走査装置のシステム構成図。FIG. 1 is a system configuration diagram of an optical scanning device according to the present invention.
【図2】実施例における偏向素子と集光レンズとを示す
図。FIG. 2 is a diagram showing a deflecting element and a condenser lens according to an embodiment.
【図3】実施例における出射部を示す図であり、(A)
が正面斜視図、(B)は側面図。FIG. 3 is a diagram showing an emission part in the embodiment, (A)
Is a front perspective view, and (B) is a side view.
【図4】実施例における不釣り合い調整部を示す分解斜
視図。FIG. 4 is an exploded perspective view showing an imbalance adjusting unit in the embodiment.
【図5】実施例におけるフードの取り付け状態を示す斜
視図。FIG. 5 is a perspective view showing how the hood is attached in the embodiment.
【図6】実施例における不釣り合い調整部を示す分解斜
視図。FIG. 6 is an exploded perspective view showing an imbalance adjusting unit in the embodiment.
【図7】実施例におけるフードの取り付け状態を示す斜
視図。FIG. 7 is a perspective view showing how the hood is attached in the embodiment.
【図8】実施例におけるセルフカット面を示す側面図。FIG. 8 is a side view showing a self-cut surface in the example.
【図9】実施例におけるセルフカット面を用いたぶれ測
定の様子を示す斜視図。FIG. 9 is a perspective view showing a state of blur measurement using a self-cut surface in an example.
【図10】実施例における回転軸位置調整のための構成を
示す正面図。FIG. 10 is a front view showing a configuration for adjusting the rotational axis position in the embodiment.
【図11】加速度センサを備えた実施例を示す斜視図。FIG. 11 is a perspective view showing an embodiment including an acceleration sensor.
【図12】加速度センサを備えた実施例を示す斜視図。FIG. 12 is a perspective view showing an embodiment including an acceleration sensor.
【図13】従来の回転体を示す斜視図。FIG. 13 is a perspective view showing a conventional rotating body.
【図14】従来の不釣り合い調整部を示す斜視図。FIG. 14 is a perspective view showing a conventional imbalance adjusting unit.
【図15】従来の不釣り合い調整部を示す斜視図。1
感光材料 2 モータ 3 ペンタプリズム(偏向素子) 4 集光レンズ(集光素子) 5 回転体 11 入射部 12 出射部 15 保持部材 16 カット面 17 穴 18,20 フード 19 溝 21 セルフカット面 23 付勢部材 24 ピエゾ素子(圧電素子) 25 内径測定器 26 ドラム 27 加速度センサFIG. 15 is a perspective view showing a conventional unbalance adjusting unit. 1
Photosensitive material 2 Motor 3 Penta prism (deflecting element) 4 Condensing lens (condensing element) 5 Rotating body 11 Incident part 12 Emitting part 15 Holding member 16 Cut surface 17 Hole 18, 20 Hood 19 Groove 21 Self-cut surface 23 Energizing Member 24 Piezo element (Piezoelectric element) 25 Inner diameter measuring device 26 Drum 27 Accelerometer
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G03G 15/04 21/00 502 H04N 1/19 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location G03G 15/04 21/00 502 H04N 1/19
Claims (7)
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記偏向素子を該偏向素子と同材質の保持部材によって
前記回転体内に保持することを特徴とする光走査装置。1. Rotation in which a deflecting element is held in a cylindrical rotating body, and the rotating body is rotated around its cylindrical axis by a motor, and is incident from an incident portion opened at an axial end surface of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. An optical scanning device, wherein the deflection element is held in the rotating body by a holding member made of the same material as the deflection element.
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記回転体の外周を回転軸に略平行な面でカットしたカ
ット面に、前記出射部を開口させたことを特徴とする光
走査装置。2. A rotation which holds a deflection element in a cylindrical rotating body, rotates the rotating body around its cylindrical axis by a motor, and is incident from an incident portion opened on an axial end face of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. The optical scanning device is characterized in that the emitting portion is opened in a cut surface obtained by cutting the outer periphery of the rotating body with a surface substantially parallel to the rotation axis.
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記回転体の外周壁又は軸方向端面に形成した凹陥部に
おいて前記回転体の不釣り合い調整を行う構成であっ
て、前記凹陥部を前記回転体の円筒状外周と面一とする
フードを取付けたことを特徴とする光走査装置。3. A rotating member which holds a deflecting element in a cylindrical rotating body, rotates the rotating body around its cylindrical axis by a motor, and is incident from an incident portion opened on an axial end face of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. And a hood having a concave portion formed on an outer peripheral wall or an axial end surface of the rotating body for adjusting the unbalance of the rotating body, wherein a hood having the concave portion flush with the cylindrical outer periphery of the rotating body is attached. An optical scanning device characterized in that
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記回転体の外周に前記モータによる回転駆動によって
形成されたセルフカット面を設け、該セルフカット面を
基準として前記回転体の回転軸位置又は前記回転体のぶ
れを測定することを特徴とする光走査装置。4. A rotation which holds a deflection element in a cylindrical rotating body, rotates the rotating body around its cylindrical axis by a motor, and is made incident from an incident portion opened at an axial end face of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. A self-cut surface formed by rotational driving by the motor is provided on the outer circumference of the rotating body, and the rotational axis position of the rotating body or the shake of the rotating body is measured with the self-cut surface as a reference. Optical scanning device.
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記モータ又は該モータの保持部に加速度センサを設
け、該加速度センサによって異常振動を検出することを
特徴とする光走査装置。5. A rotation, in which a deflection element is held in a cylindrical rotating body, the rotating body is rotated around its cylindrical axis by a motor, and is incident from an incident portion opened on an axial end face of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. An optical scanning device, wherein an acceleration sensor is provided in the motor or a holding portion of the motor, and abnormal vibration is detected by the acceleration sensor.
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記偏向素子と一体に集光素子を設けたことを特徴とす
る光走査装置。6. Rotation in which a deflecting element is held in a cylindrical rotating body, and the rotating body is rotated around its cylindrical axis by a motor so that light is incident from an incident portion opened on an axial end face of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. An optical scanning device characterized in that a condensing element is provided integrally with the deflecting element.
共に、前記回転体をモータによってその円筒軸回りに回
転させ、前記回転体の軸方向端面に開口させた入射部か
ら入射される回転軸と平行な光ビームを前記偏向素子に
よって直角に偏向させて前記回転体の周壁に開口された
出射部から出射させ、前記光ビームを前記回転軸の全周
にわたって偏向させる構成の光走査装置において、 前記光走査装置の取り付け基準面と前記回転体の回転軸
との間の距離を測定し、該測定結果に基づいて前記モー
タを径方向で支持する圧電素子に対する印加電圧を制御
して回転体の中心軸調整を行うことを特徴とする光走査
装置。7. A rotation which holds a deflection element in a cylindrical rotating body, rotates the rotating body around its cylindrical axis by a motor, and is made incident from an incident portion opened at an axial end face of the rotating body. In an optical scanning device having a configuration in which a light beam parallel to an axis is deflected at a right angle by the deflecting element and emitted from an emission part opened in a peripheral wall of the rotating body, and the light beam is deflected over the entire circumference of the rotation axis. The distance between the mounting reference surface of the optical scanning device and the rotation axis of the rotating body is measured, and the rotating body is controlled by controlling the voltage applied to the piezoelectric element that supports the motor in the radial direction based on the measurement result. An optical scanning device characterized by adjusting the central axis of the.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6274047A JPH08136849A (en) | 1994-11-08 | 1994-11-08 | Optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6274047A JPH08136849A (en) | 1994-11-08 | 1994-11-08 | Optical scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08136849A true JPH08136849A (en) | 1996-05-31 |
Family
ID=17536234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6274047A Pending JPH08136849A (en) | 1994-11-08 | 1994-11-08 | Optical scanner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08136849A (en) |
Cited By (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6094287A (en) * | 1998-12-03 | 2000-07-25 | Eastman Kodak Company | Wobble correcting monogon scanner for a laser imaging system |
| JP2013508695A (en) * | 2009-11-20 | 2013-03-07 | ファロ テクノロジーズ インコーポレーテッド | Equipment for optically scanning and measuring the environment |
| US8625106B2 (en) | 2009-07-22 | 2014-01-07 | Faro Technologies, Inc. | Method for optically scanning and measuring an object |
| US8699007B2 (en) | 2010-07-26 | 2014-04-15 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8705012B2 (en) | 2010-07-26 | 2014-04-22 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8705016B2 (en) | 2009-11-20 | 2014-04-22 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8719474B2 (en) | 2009-02-13 | 2014-05-06 | Faro Technologies, Inc. | Interface for communication between internal and external devices |
| US8730477B2 (en) | 2010-07-26 | 2014-05-20 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8830485B2 (en) | 2012-08-17 | 2014-09-09 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8896819B2 (en) | 2009-11-20 | 2014-11-25 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
| US9009000B2 (en) | 2010-01-20 | 2015-04-14 | Faro Technologies, Inc. | Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers |
| US9074883B2 (en) | 2009-03-25 | 2015-07-07 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
| US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
| US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
| US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
| USRE45854E1 (en) | 2006-07-03 | 2016-01-19 | Faro Technologies, Inc. | Method and an apparatus for capturing three-dimensional data of an area of space |
| US9329271B2 (en) | 2010-05-10 | 2016-05-03 | Faro Technologies, Inc. | Method for optically scanning and measuring an environment |
| US9372265B2 (en) | 2012-10-05 | 2016-06-21 | Faro Technologies, Inc. | Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration |
| US9417056B2 (en) | 2012-01-25 | 2016-08-16 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
| US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
| US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
| US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
| US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
| US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
| US10175037B2 (en) | 2015-12-27 | 2019-01-08 | Faro Technologies, Inc. | 3-D measuring device with battery pack |
| US10281259B2 (en) | 2010-01-20 | 2019-05-07 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
-
1994
- 1994-11-08 JP JP6274047A patent/JPH08136849A/en active Pending
Cited By (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6094287A (en) * | 1998-12-03 | 2000-07-25 | Eastman Kodak Company | Wobble correcting monogon scanner for a laser imaging system |
| USRE45854E1 (en) | 2006-07-03 | 2016-01-19 | Faro Technologies, Inc. | Method and an apparatus for capturing three-dimensional data of an area of space |
| US8719474B2 (en) | 2009-02-13 | 2014-05-06 | Faro Technologies, Inc. | Interface for communication between internal and external devices |
| US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
| US9074883B2 (en) | 2009-03-25 | 2015-07-07 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8625106B2 (en) | 2009-07-22 | 2014-01-07 | Faro Technologies, Inc. | Method for optically scanning and measuring an object |
| US8705016B2 (en) | 2009-11-20 | 2014-04-22 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
| US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
| US9417316B2 (en) | 2009-11-20 | 2016-08-16 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8896819B2 (en) | 2009-11-20 | 2014-11-25 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| JP2013508695A (en) * | 2009-11-20 | 2013-03-07 | ファロ テクノロジーズ インコーポレーテッド | Equipment for optically scanning and measuring the environment |
| US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
| US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
| US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
| US9009000B2 (en) | 2010-01-20 | 2015-04-14 | Faro Technologies, Inc. | Method for evaluating mounting stability of articulated arm coordinate measurement machine using inclinometers |
| US10281259B2 (en) | 2010-01-20 | 2019-05-07 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
| US10060722B2 (en) | 2010-01-20 | 2018-08-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
| US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
| US9684078B2 (en) | 2010-05-10 | 2017-06-20 | Faro Technologies, Inc. | Method for optically scanning and measuring an environment |
| US9329271B2 (en) | 2010-05-10 | 2016-05-03 | Faro Technologies, Inc. | Method for optically scanning and measuring an environment |
| US8699007B2 (en) | 2010-07-26 | 2014-04-15 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8730477B2 (en) | 2010-07-26 | 2014-05-20 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8705012B2 (en) | 2010-07-26 | 2014-04-22 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
| US9417056B2 (en) | 2012-01-25 | 2016-08-16 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
| US8830485B2 (en) | 2012-08-17 | 2014-09-09 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
| US9618620B2 (en) | 2012-10-05 | 2017-04-11 | Faro Technologies, Inc. | Using depth-camera images to speed registration of three-dimensional scans |
| US9739886B2 (en) | 2012-10-05 | 2017-08-22 | Faro Technologies, Inc. | Using a two-dimensional scanner to speed registration of three-dimensional scan data |
| US9746559B2 (en) | 2012-10-05 | 2017-08-29 | Faro Technologies, Inc. | Using two-dimensional camera images to speed registration of three-dimensional scans |
| US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
| US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
| US10203413B2 (en) | 2012-10-05 | 2019-02-12 | Faro Technologies, Inc. | Using a two-dimensional scanner to speed registration of three-dimensional scan data |
| US9372265B2 (en) | 2012-10-05 | 2016-06-21 | Faro Technologies, Inc. | Intermediate two-dimensional scanning with a three-dimensional scanner to speed registration |
| US11035955B2 (en) | 2012-10-05 | 2021-06-15 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
| US11112501B2 (en) | 2012-10-05 | 2021-09-07 | Faro Technologies, Inc. | Using a two-dimensional scanner to speed registration of three-dimensional scan data |
| US10175037B2 (en) | 2015-12-27 | 2019-01-08 | Faro Technologies, Inc. | 3-D measuring device with battery pack |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH08136849A (en) | Optical scanner | |
| US4147401A (en) | Polygonal mirror holder and drive assembly | |
| US6449000B1 (en) | Deflection scanning apparatus having balance control | |
| US5903300A (en) | Deflection scanning apparatus having balance control | |
| US6574023B2 (en) | Light-beam deflecting apparatus, manufacturing method of light-beam deflecting apparatus and image-forming apparatus | |
| US7281851B2 (en) | Spindle device utilizing externally pressurized gas bearing assembly | |
| JP3227246B2 (en) | Deflection scanning device | |
| US5363231A (en) | Light deflecting device | |
| JP3462177B2 (en) | Device for detecting the position of a rotating object | |
| JPH06208075A (en) | Deflecting and scanning device | |
| EP0382221B1 (en) | Light deflecting device | |
| US7178393B2 (en) | Measuring apparatus and method for thin board | |
| JP3172655B2 (en) | Tilt sensor holding structure of disk recording / reproducing device | |
| JPS59197009A (en) | Optical scanner | |
| JPH01178392A (en) | Laser marking device | |
| US5771063A (en) | Method and apparatus for positioning a polygon on a spindle of a laser writer | |
| JP3371658B2 (en) | Rotating polygon mirror mounting structure | |
| JPH06110004A (en) | Optical deflector | |
| JPH06160754A (en) | Rotary polygon mirror fitting device | |
| JP4745796B2 (en) | Eccentricity measuring apparatus and decentration adjusting apparatus for optical deflection apparatus, and scanning optical apparatus and image forming apparatus using them | |
| JP3702678B2 (en) | Optical deflection device | |
| JPH08106039A (en) | Optical deflection scanning device | |
| JP3702676B2 (en) | Optical deflection device | |
| EP2036085B1 (en) | Devices and methods for determining a critical rotation speed of an optical data carrier, monitoring a condition of an optical data carrier, and generating a reference signal | |
| CN120821072A (en) | Laser scanner, pattern transfer system, and method for scanning laser radiation from a laser source onto a target |