JPH075684A - Alkali-developing photosensitive composition - Google Patents
Alkali-developing photosensitive compositionInfo
- Publication number
- JPH075684A JPH075684A JP3188021A JP18802191A JPH075684A JP H075684 A JPH075684 A JP H075684A JP 3188021 A JP3188021 A JP 3188021A JP 18802191 A JP18802191 A JP 18802191A JP H075684 A JPH075684 A JP H075684A
- Authority
- JP
- Japan
- Prior art keywords
- alkali
- examples
- compsn
- photosensitive
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims description 42
- 229920001577 copolymer Polymers 0.000 claims abstract description 26
- 239000000178 monomer Substances 0.000 claims abstract description 15
- -1 vinyl ether compound Chemical class 0.000 claims description 43
- 239000000126 substance Substances 0.000 claims description 10
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 abstract description 10
- 230000035945 sensitivity Effects 0.000 abstract description 9
- 239000003513 alkali Substances 0.000 abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 3
- 239000001301 oxygen Substances 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
- 239000002904 solvent Substances 0.000 abstract description 3
- 239000002585 base Substances 0.000 abstract 3
- 239000003795 chemical substances by application Substances 0.000 abstract 2
- 229960000834 vinyl ether Drugs 0.000 abstract 2
- 230000000379 polymerizing effect Effects 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 description 11
- 239000000243 solution Substances 0.000 description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 9
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 8
- 150000003839 salts Chemical class 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 239000012670 alkaline solution Substances 0.000 description 5
- 239000000975 dye Substances 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- BLLFPKZTBLMEFG-UHFFFAOYSA-N 1-(4-hydroxyphenyl)pyrrole-2,5-dione Chemical compound C1=CC(O)=CC=C1N1C(=O)C=CC1=O BLLFPKZTBLMEFG-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000004014 plasticizer Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 229910017008 AsF 6 Inorganic materials 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 229910018286 SbF 6 Inorganic materials 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical class OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- JQCXWCOOWVGKMT-UHFFFAOYSA-N diheptyl phthalate Chemical compound CCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC JQCXWCOOWVGKMT-UHFFFAOYSA-N 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- XZSZONUJSGDIFI-UHFFFAOYSA-N n-(4-hydroxyphenyl)-2-methylprop-2-enamide Chemical compound CC(=C)C(=O)NC1=CC=C(O)C=C1 XZSZONUJSGDIFI-UHFFFAOYSA-N 0.000 description 3
- 238000000016 photochemical curing Methods 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 235000011121 sodium hydroxide Nutrition 0.000 description 3
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N vinyl ethyl ether Natural products CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 3
- YSWBUABBMRVQAC-UHFFFAOYSA-N (2-nitrophenyl)methanesulfonic acid Chemical class OS(=O)(=O)CC1=CC=CC=C1[N+]([O-])=O YSWBUABBMRVQAC-UHFFFAOYSA-N 0.000 description 2
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 2
- AAUXVPAKDMCMMN-UHFFFAOYSA-N 2-[(4-ethenylphenoxy)methyl]oxirane Chemical compound C1=CC(C=C)=CC=C1OCC1OC1 AAUXVPAKDMCMMN-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- BIHDOXAXFMXYDF-UHFFFAOYSA-N 4-anilinobenzenediazonium Chemical compound C1=CC([N+]#N)=CC=C1NC1=CC=CC=C1 BIHDOXAXFMXYDF-UHFFFAOYSA-N 0.000 description 2
- VWLGQKLHWIVCCZ-UHFFFAOYSA-N 53992-33-9 Chemical class OS(=O)(=O)CC1=CC=C([N+]([O-])=O)C=C1 VWLGQKLHWIVCCZ-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- IRIAEXORFWYRCZ-UHFFFAOYSA-N Butylbenzyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCC1=CC=CC=C1 IRIAEXORFWYRCZ-UHFFFAOYSA-N 0.000 description 2
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Chemical compound CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 2
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000012190 activator Substances 0.000 description 2
- 239000002280 amphoteric surfactant Substances 0.000 description 2
- 239000003945 anionic surfactant Substances 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 238000010538 cationic polymerization reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 125000005520 diaryliodonium group Chemical group 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 description 2
- OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 description 2
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 2
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 239000003505 polymerization initiator Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 125000005409 triarylsulfonium group Chemical group 0.000 description 2
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- GCIYMCNGLUNWNR-UHFFFAOYSA-N (2,4-dinitrophenyl)methyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O GCIYMCNGLUNWNR-UHFFFAOYSA-N 0.000 description 1
- MCJPJAJHPRCILL-UHFFFAOYSA-N (2,6-dinitrophenyl)methyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=C([N+]([O-])=O)C=CC=C1[N+]([O-])=O MCJPJAJHPRCILL-UHFFFAOYSA-N 0.000 description 1
- HHQAGBQXOWLTLL-UHFFFAOYSA-N (2-hydroxy-3-phenoxypropyl) prop-2-enoate Chemical compound C=CC(=O)OCC(O)COC1=CC=CC=C1 HHQAGBQXOWLTLL-UHFFFAOYSA-N 0.000 description 1
- MCVVDMSWCQUKEV-UHFFFAOYSA-N (2-nitrophenyl)methyl 4-methylbenzenesulfonate Chemical compound C1=CC(C)=CC=C1S(=O)(=O)OCC1=CC=CC=C1[N+]([O-])=O MCVVDMSWCQUKEV-UHFFFAOYSA-N 0.000 description 1
- CUHCLROITCDERO-UHFFFAOYSA-N (4-nitrophenyl)methyl 9,10-dimethoxyanthracene-2-sulfonate Chemical compound C=1C=C2C(OC)=C3C=CC=CC3=C(OC)C2=CC=1S(=O)(=O)OCC1=CC=C([N+]([O-])=O)C=C1 CUHCLROITCDERO-UHFFFAOYSA-N 0.000 description 1
- ZORQXIQZAOLNGE-UHFFFAOYSA-N 1,1-difluorocyclohexane Chemical compound FC1(F)CCCCC1 ZORQXIQZAOLNGE-UHFFFAOYSA-N 0.000 description 1
- CDDDRVNOHLVEED-UHFFFAOYSA-N 1-cyclohexyl-3-[1-[[1-(cyclohexylcarbamoylamino)cyclohexyl]diazenyl]cyclohexyl]urea Chemical compound C1CCCCC1(N=NC1(CCCCC1)NC(=O)NC1CCCCC1)NC(=O)NC1CCCCC1 CDDDRVNOHLVEED-UHFFFAOYSA-N 0.000 description 1
- AQTYNINXYJFSHD-UHFFFAOYSA-N 1-ethoxybut-1-ene Chemical compound CCOC=CCC AQTYNINXYJFSHD-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- BVHNGWRPAFKGFP-UHFFFAOYSA-N 1-nitro-4-(4-nitrophenyl)sulfonylbenzene Chemical compound C1=CC([N+](=O)[O-])=CC=C1S(=O)(=O)C1=CC=C([N+]([O-])=O)C=C1 BVHNGWRPAFKGFP-UHFFFAOYSA-N 0.000 description 1
- 125000004206 2,2,2-trifluoroethyl group Chemical group [H]C([H])(*)C(F)(F)F 0.000 description 1
- BRRSNXCXLSVPFC-UHFFFAOYSA-N 2,3,4-Trihydroxybenzoic acid Chemical compound OC(=O)C1=CC=C(O)C(O)=C1O BRRSNXCXLSVPFC-UHFFFAOYSA-N 0.000 description 1
- NJLLALPCADBTIS-UHFFFAOYSA-N 2,5-dibutoxy-4-morpholin-4-ylbenzenediazonium Chemical compound C1=C([N+]#N)C(OCCCC)=CC(N2CCOCC2)=C1OCCCC NJLLALPCADBTIS-UHFFFAOYSA-N 0.000 description 1
- AYYLPZVERFMXNR-UHFFFAOYSA-N 2,5-diethoxy-4-(4-methoxyphenyl)sulfanylbenzenediazonium Chemical compound CCOC1=CC([N+]#N)=C(OCC)C=C1SC1=CC=C(OC)C=C1 AYYLPZVERFMXNR-UHFFFAOYSA-N 0.000 description 1
- ZIHDWZZSOZGDDK-UHFFFAOYSA-N 2-(2,3-dihydroxy-2-phenylpropanoyl)benzenesulfonic acid Chemical compound OCC(C(C=1C(=CC=CC=1)S(=O)(=O)O)=O)(O)C1=CC=CC=C1 ZIHDWZZSOZGDDK-UHFFFAOYSA-N 0.000 description 1
- NCWGZUNGBWYLMS-UHFFFAOYSA-N 2-(4-methoxyanilino)benzenediazonium Chemical compound COC1=CC=C(C=C1)NC1=C(C=CC=C1)[N+]#N NCWGZUNGBWYLMS-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- 125000001340 2-chloroethyl group Chemical group [H]C([H])(Cl)C([H])([H])* 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- XLLXMBCBJGATSP-UHFFFAOYSA-N 2-phenylethenol Chemical compound OC=CC1=CC=CC=C1 XLLXMBCBJGATSP-UHFFFAOYSA-N 0.000 description 1
- RSEBUVRVKCANEP-UHFFFAOYSA-N 2-pyrroline Chemical compound C1CC=CN1 RSEBUVRVKCANEP-UHFFFAOYSA-N 0.000 description 1
- PYSRRFNXTXNWCD-UHFFFAOYSA-N 3-(2-phenylethenyl)furan-2,5-dione Chemical compound O=C1OC(=O)C(C=CC=2C=CC=CC=2)=C1 PYSRRFNXTXNWCD-UHFFFAOYSA-N 0.000 description 1
- REEBWSYYNPPSKV-UHFFFAOYSA-N 3-[(4-formylphenoxy)methyl]thiophene-2-carbonitrile Chemical compound C1=CC(C=O)=CC=C1OCC1=C(C#N)SC=C1 REEBWSYYNPPSKV-UHFFFAOYSA-N 0.000 description 1
- ZRYCRPNCXLQHPN-UHFFFAOYSA-N 3-hydroxy-2-methylbenzaldehyde Chemical compound CC1=C(O)C=CC=C1C=O ZRYCRPNCXLQHPN-UHFFFAOYSA-N 0.000 description 1
- XZIIFPSPUDAGJM-UHFFFAOYSA-N 6-chloro-2-n,2-n-diethylpyrimidine-2,4-diamine Chemical compound CCN(CC)C1=NC(N)=CC(Cl)=N1 XZIIFPSPUDAGJM-UHFFFAOYSA-N 0.000 description 1
- CGLVZFOCZLHKOH-UHFFFAOYSA-N 8,18-dichloro-5,15-diethyl-5,15-dihydrodiindolo(3,2-b:3',2'-m)triphenodioxazine Chemical compound CCN1C2=CC=CC=C2C2=C1C=C1OC3=C(Cl)C4=NC(C=C5C6=CC=CC=C6N(C5=C5)CC)=C5OC4=C(Cl)C3=NC1=C2 CGLVZFOCZLHKOH-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- FAYVAXYICXQWOP-UHFFFAOYSA-N 9,10-dimethoxyanthracene-2-sulfonic acid Chemical compound OS(=O)(=O)C1=CC=C2C(OC)=C(C=CC=C3)C3=C(OC)C2=C1 FAYVAXYICXQWOP-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 239000004803 Di-2ethylhexylphthalate Substances 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- ZVFDTKUVRCTHQE-UHFFFAOYSA-N Diisodecyl phthalate Chemical compound CC(C)CCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC(C)C ZVFDTKUVRCTHQE-UHFFFAOYSA-N 0.000 description 1
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
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- 239000002841 Lewis acid Substances 0.000 description 1
- UEZVMMHDMIWARA-UHFFFAOYSA-N Metaphosphoric acid Chemical compound OP(=O)=O UEZVMMHDMIWARA-UHFFFAOYSA-N 0.000 description 1
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- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
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- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 1
- 229920001800 Shellac Polymers 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical class [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- HVUMOYIDDBPOLL-XWVZOOPGSA-N Sorbitan monostearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O HVUMOYIDDBPOLL-XWVZOOPGSA-N 0.000 description 1
- 229920000147 Styrene maleic anhydride Polymers 0.000 description 1
- ULUAUXLGCMPNKK-UHFFFAOYSA-N Sulfobutanedioic acid Chemical compound OC(=O)CC(C(O)=O)S(O)(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-N 0.000 description 1
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- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 125000004432 carbon atom Chemical group C* 0.000 description 1
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- 239000007810 chemical reaction solvent Substances 0.000 description 1
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- 239000012954 diazonium Substances 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
- HBGGXOJOCNVPFY-UHFFFAOYSA-N diisononyl phthalate Chemical compound CC(C)CCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC(C)C HBGGXOJOCNVPFY-UHFFFAOYSA-N 0.000 description 1
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 1
- 229940043276 diisopropanolamine Drugs 0.000 description 1
- VNGOYPQMJFJDLV-UHFFFAOYSA-N dimethyl benzene-1,3-dicarboxylate Chemical compound COC(=O)C1=CC=CC(C(=O)OC)=C1 VNGOYPQMJFJDLV-UHFFFAOYSA-N 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
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- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
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- 238000001125 extrusion Methods 0.000 description 1
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- 229930195729 fatty acid Natural products 0.000 description 1
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- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 1
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- 230000005764 inhibitory process Effects 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
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- SZNYYWIUQFZLLT-UHFFFAOYSA-N isopropylmethyl ether Natural products CC(C)COCC(C)C SZNYYWIUQFZLLT-UHFFFAOYSA-N 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- 229910003002 lithium salt Inorganic materials 0.000 description 1
- 159000000002 lithium salts Chemical class 0.000 description 1
- UEGPKNKPLBYCNK-UHFFFAOYSA-L magnesium acetate Chemical compound [Mg+2].CC([O-])=O.CC([O-])=O UEGPKNKPLBYCNK-UHFFFAOYSA-L 0.000 description 1
- 239000011654 magnesium acetate Substances 0.000 description 1
- 235000011285 magnesium acetate Nutrition 0.000 description 1
- 229940069446 magnesium acetate Drugs 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
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- 229960000907 methylthioninium chloride Drugs 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 1
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- 229920001778 nylon Polymers 0.000 description 1
- 125000000486 o-cresyl group Chemical group [H]C1=C([H])C(O*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 description 1
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- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000003854 p-chlorophenyl group Chemical group [H]C1=C([H])C(*)=C([H])C([H])=C1Cl 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 159000000001 potassium salts Chemical class 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical class OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 1
- ZVJHJDDKYZXRJI-UHFFFAOYSA-N pyrroline Natural products C1CC=NC1 ZVJHJDDKYZXRJI-UHFFFAOYSA-N 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 229940043267 rhodamine b Drugs 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
- 239000004208 shellac Substances 0.000 description 1
- ZLGIYFNHBLSMPS-ATJNOEHPSA-N shellac Chemical compound OCCCCCC(O)C(O)CCCCCCCC(O)=O.C1C23[C@H](C(O)=O)CCC2[C@](C)(CO)[C@@H]1C(C(O)=O)=C[C@@H]3O ZLGIYFNHBLSMPS-ATJNOEHPSA-N 0.000 description 1
- 229940113147 shellac Drugs 0.000 description 1
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- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- HIEHAIZHJZLEPQ-UHFFFAOYSA-M sodium;naphthalene-1-sulfonate Chemical compound [Na+].C1=CC=C2C(S(=O)(=O)[O-])=CC=CC2=C1 HIEHAIZHJZLEPQ-UHFFFAOYSA-M 0.000 description 1
- 229940035044 sorbitan monolaurate Drugs 0.000 description 1
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- 235000011069 sorbitan monooleate Nutrition 0.000 description 1
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- 239000010935 stainless steel Substances 0.000 description 1
- RXSHXLOMRZJCLB-UHFFFAOYSA-L strontium;diacetate Chemical compound [Sr+2].CC([O-])=O.CC([O-])=O RXSHXLOMRZJCLB-UHFFFAOYSA-L 0.000 description 1
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- 238000003786 synthesis reaction Methods 0.000 description 1
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- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- AMCZOMYXYYYAPT-UHFFFAOYSA-N triphenylselanium Chemical compound C1=CC=CC=C1[Se+](C=1C=CC=CC=1)C1=CC=CC=C1 AMCZOMYXYYYAPT-UHFFFAOYSA-N 0.000 description 1
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- 239000012953 triphenylsulfonium Substances 0.000 description 1
- JEVGKYBUANQAKG-UHFFFAOYSA-N victoria blue R Chemical compound [Cl-].C12=CC=CC=C2C(=[NH+]CC)C=CC1=C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 JEVGKYBUANQAKG-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
- 235000013904 zinc acetate Nutrition 0.000 description 1
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Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、平版印刷版、IC回路
あるいはフォトマスクの製造に好適に使用される、水性
アルカリで現像可能で、しかも現像安定性の優れた光硬
化型感光性組成物に関するものである。FIELD OF THE INVENTION The present invention relates to a photocurable photosensitive composition which is suitable for use in the production of lithographic printing plates, IC circuits or photomasks and which can be developed with an aqueous alkali and has excellent development stability. It is about.
【0002】[0002]
【従来の技術】光硬化型感光性組成物の一つとして光ラ
ジカル重合を利用するものが知られている。しかし、こ
のような組成物は酸素の重合阻害を受けるため、従来、
感光層作製時に例えばオーバーコート層を設ける必要性
があった。2. Description of the Related Art As one of photocurable photosensitive compositions, one utilizing photoradical polymerization is known. However, since such a composition suffers from polymerization inhibition of oxygen, it has hitherto been
It was necessary to provide, for example, an overcoat layer when producing the photosensitive layer.
【0003】最近では、光カチオン重合を利用した感光
性組成物であって、オーバーコート層などを設ける必要
がないものが多く開発されている。これらの感光性組成
物は、バインダーポリマー中にカチオン重合性モノマー
またはオリゴマーをブレンドするものと、ポリマー自身
の主鎖にカチオン重合性の感光基をもたせるものに大別
され、さらに、各々に光カチオン重合開始剤(光カチオ
ン発生剤、光酸発生剤ともいう)を含有させている。Recently, many photosensitive compositions utilizing photo-cationic polymerization have been developed which do not require an overcoat layer or the like. These photosensitive compositions are roughly classified into those in which a cationically polymerizable monomer or oligomer is blended in a binder polymer, and those in which the main chain of the polymer itself has a cationically polymerizable photosensitive group. It contains a polymerization initiator (also referred to as a photocation generator or a photoacid generator).
【0004】上記光カチオン重合開始剤としては、例え
ば、米国特許4081276号などに記載されている、
ルイス酸やプロトン酸を発生する芳香族ジアゾニウム
塩、トリアリルスルホニウム塩、チオピリリウム塩、ス
ルホキソニウム塩などを用いることができる。The above-mentioned photo-cationic polymerization initiator is described, for example, in US Pat. No. 4,081,276.
An aromatic diazonium salt, a triallyl sulfonium salt, a thiopyrylium salt, a sulfoxonium salt or the like which generates a Lewis acid or a protonic acid can be used.
【0005】また、上記感光性組成物におけるバインダ
ーポリマーあるいは光カチオン重合性ポリマーとして
は、従来から主としてエポキシポリマーが用いられてい
る。エポキシポリマーの代表的なものとしては、エポキ
シ化されたノボラックポリマー、およびエピクロルヒド
リンとビスフェノールAのような多核ジヒドロキシフェ
ノールとからなるポリエポキシドなどがある。Epoxy polymers have been mainly used as the binder polymer or the photocationically polymerizable polymer in the photosensitive composition. Representative of epoxy polymers include epoxidized novolac polymers and polyepoxides consisting of epichlorohydrin and polynuclear dihydroxyphenols such as bisphenol A.
【0006】ところが、上記の如きバインダーポリマー
や光カチオン重合性ポリマーは、いずれも水性アルカリ
溶液には不溶であるため、未露光部は主として有機溶剤
で現像除去しなければならない。しかしながら有機溶剤
は、一般に毒性および臭気があり、また火災に対する危
険性が大きいため、近年では有機溶剤を含まない現像液
による現像方法が望まれている。However, since the above-mentioned binder polymer and photocationically polymerizable polymer are insoluble in an aqueous alkaline solution, the unexposed area must be removed by development mainly with an organic solvent. However, organic solvents are generally toxic and odorous and have a high risk of fire. Therefore, in recent years, a developing method using a developer containing no organic solvent has been desired.
【0007】本発明者は先に実質上有機溶剤を含まない
水性アルカリ溶液で現像可能な光カチオン重合性感光性
組成物を提供したが、現像安定性において若干欠点を有
していた。Although the present inventor previously provided a photocationically polymerizable photosensitive composition which can be developed with an aqueous alkaline solution containing substantially no organic solvent, it had some drawbacks in development stability.
【0008】[0008]
【発明が解決しようとする課題】したがって本発明の目
的は、実質上有機溶剤を含まない水性アルカリ溶液によ
って現像することができると共に、現像安定性に優れ、
感度も向上した光カチオン重合性感光性組成物を提供す
ることにある。Therefore, the object of the present invention is to be developed by an aqueous alkaline solution containing substantially no organic solvent, and to be excellent in development stability.
It is intended to provide a cationic photopolymerizable photosensitive composition having improved sensitivity.
【0009】[0009]
【課題を解決するための手段】本発明は、(a)下記式
(I)および/または(II)で表わされるモノマーと、
下記式(111)で表わされるモノマーを含むアルカリ可溶
性共重合体、(b)光カチオン発生剤、および(c)ビ
ニルエーテル化合物を含有することを特徴とするアルカ
リ現像型感光性組成物を提供するものである。The present invention comprises (a) a monomer represented by the following formula (I) and / or (II):
An alkali-developable photosensitive composition containing an alkali-soluble copolymer containing a monomer represented by the following formula (111), (b) a photocation generator, and (c) a vinyl ether compound. Is.
【化4】 [Chemical 4]
【化5】 [Chemical 5]
【化6】 [Chemical 6]
【0010】本明細書において、「現像安定性が優れて
いる」とは、現像液中の画像の膨潤や離脱が少なく、
長時間現像しても画像の欠落が生じない(現像ラチチ
ュウドが広い)ことであり、これらを総合して現像安定
性が優れているという。In the present specification, "excellent in development stability" means that there is little swelling or separation of the image in the developer,
It is that there is no loss of images even after long-term development (the development latitude is wide), and it is said that the development stability is excellent when these are combined.
【0011】上記式(I)で表わされるモノマーの例と
しては、N−(4−ヒドロキシフェニル)マレイミドな
どが挙げられ、上記式(II)で表わされるモノマーの例
としては、N−(4−ヒドロキシフェニル)メタアクリ
ルアミド、N−(4−ヒドロキシフェニル)アクリルア
ミドなどが挙げられる。Examples of the monomer represented by the above formula (I) include N- (4-hydroxyphenyl) maleimide and the like, and examples of the monomer represented by the above formula (II) include N- (4- Examples thereof include hydroxyphenyl) methacrylamide and N- (4-hydroxyphenyl) acrylamide.
【0012】また、上記式(111)で表わされるモノマー
の例としては、グリシジルメタアクリレート、4−ビニ
ルフェニルグリシジルエーテル、エピチオプロピルメタ
アクリレートなどが挙げられる。Further, examples of the monomer represented by the above formula (111) include glycidyl methacrylate, 4-vinylphenyl glycidyl ether, and epithiopropyl methacrylate.
【0013】上記式(I)および/または(II)で表わ
されるモノマーの上記アルカリ可溶性共重合体(a)中
における含有量は、好ましくは10〜80重量%、より
好ましくは20〜70重量%である。10重量%以下で
は水性アルカリ溶液に対する溶解性が不十分であり、8
0重量%以上では光硬化後の画像がアルカリ溶液で膨潤
しやすくなり、強度の劣化につながる。The content of the monomer represented by the formula (I) and / or (II) in the alkali-soluble copolymer (a) is preferably 10 to 80% by weight, more preferably 20 to 70% by weight. Is. If it is less than 10% by weight, the solubility in an aqueous alkaline solution is insufficient, and 8
If it is 0% by weight or more, the image after photocuring tends to swell with an alkaline solution, leading to deterioration in strength.
【0014】上記式(111)で表わされるモノマーの共重
合体(a)中における含有量は、好ましくは20〜90
重量%、より好ましくは30〜80重量%である。20
重量%以下では光硬化性が悪く、感度の低下を起こす。
また、90重量%以上では、アルカリ現像できなくな
る。The content of the monomer represented by the above formula (111) in the copolymer (a) is preferably 20 to 90.
%, More preferably 30 to 80% by weight. 20
If it is less than 10% by weight, the photocurability is poor and the sensitivity is lowered.
On the other hand, if it is 90% by weight or more, alkali development cannot be performed.
【0015】本発明のアルカリ可溶性共重合体(a)
は、上記式(I)および/または(II)で表わされるモ
ノマーと上記式(111)で表わされるモノマーを含むが、
さらに他の付加重合性不飽和化合物を共重合させること
もできる。Alkali-soluble copolymer (a) of the present invention
Includes a monomer represented by the above formula (I) and / or (II) and a monomer represented by the above formula (111),
Further, another addition-polymerizable unsaturated compound can be copolymerized.
【0016】他の付加重合性不飽和化合物としては、一
般的な不飽和化合物を任意に用いることができる。その
例としては、メチル、エチル、n−プロピル、イソプロ
ピル、n−ブチル、t−ブチル、n−アミル、n−ヘキ
シル、2−エチルヘキシル、オクチル、ラウリル、ドデ
シル、シクロヘキシル、テトラヒドロフリル、ベンジ
ル、ステアリル、ジメチルアミノエチル、ジエチルアミ
ノエチル、クロルエチル、アリール(例えばフェニル、
トリル、ナフチルなど)、グリシジル類のアクリル酸エ
ステルまたはメタクリル酸エステル類、あるいはアクリ
ルニトリル、メタクリルニトリル類などが挙げられる。As the other addition-polymerizable unsaturated compound, a general unsaturated compound can be optionally used. Examples thereof include methyl, ethyl, n-propyl, isopropyl, n-butyl, t-butyl, n-amyl, n-hexyl, 2-ethylhexyl, octyl, lauryl, dodecyl, cyclohexyl, tetrahydrofuryl, benzyl, stearyl, Dimethylaminoethyl, diethylaminoethyl, chloroethyl, aryl (eg phenyl,
(Trilyl, naphthyl, etc.), acrylic acid esters or methacrylic acid esters of glycidyls, acrylonitrile, methacrylonitriles, and the like.
【0017】さらに、2−ヒドロキシエチルアクリレー
ト、2−ヒドロキシプロピルアクリレート、2−ヒドロ
キシ−3−フェノキシプロピルアクリレートなどの水酸
基をもつアクリレートまたはメタクリレート類も挙げる
ことができる。Furthermore, acrylates or methacrylates having a hydroxyl group such as 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate and 2-hydroxy-3-phenoxypropyl acrylate can be mentioned.
【0018】アルカリ可溶性共重合体(a)の含有量
は、感光層の総重量に対して好ましくは60〜98.9
重量%であり、より好ましくは70〜94.5重量%で
ある。The content of the alkali-soluble copolymer (a) is preferably 60 to 98.9 with respect to the total weight of the photosensitive layer.
%, And more preferably 70 to 94.5% by weight.
【0019】本発明の(b)成分は、光カチオン発生剤
である。その例としては、アリールジアゾニウム塩、ジ
アリールヨードニウム塩、トリアリールスルホニウム
塩、トリハロアルキルアリールスルフォン化合物、トリ
アリールセレノニウム塩、スルホン酸エステル、o−ニ
トロベンジルスルホネート、p−ニトロベンジルスルホ
ネート、鉄−アレーン化合物などが挙げられる。The component (b) of the present invention is a photocation generator. Examples thereof include aryldiazonium salts, diaryliodonium salts, triarylsulfonium salts, trihaloalkylaryl sulfone compounds, triarylselenonium salts, sulfonates, o-nitrobenzyl sulfonates, p-nitrobenzyl sulfonates, iron-arene compounds. And so on.
【0020】上記アリールジアゾニウム塩の例として
は、4−フェニルアミノベンゼンジアゾニウム、4−
(4′−メトキシフェニルアミノ)ベンゼンジアゾニウ
ム、4−N,N−ジエチルアミノベンゼンジアゾニウ
ム、4−モルホリノ−2,5−ジブトキシベンゼンジア
ゾニウム、4−(4′−メトキシフェニルチオ)−2,
5−ジエトキシベンゼンジアゾニウム、4−ピロリディ
ノ−3−メチルベンゼンジアゾニウムのPF6 - 、As
F6 - 、BF4 - 、SbF6 - 、SbCl6 - 、FeC
l4 - 塩などが挙げられる。Examples of the above-mentioned aryldiazonium salts include 4-phenylaminobenzenediazonium and 4-phenylaminobenzenediazonium.
(4'-Methoxyphenylamino) benzenediazonium, 4-N, N-diethylaminobenzenediazonium, 4-morpholino-2,5-dibutoxybenzenediazonium, 4- (4'-methoxyphenylthio) -2,
5-diethoxy benzene diazonium, 4-Piroridino-3-methyl benzene diazonium PF 6 -, As
F 6 -, BF 4 -, SbF 6 -, SbCl 6 -, FeC
l 4 - salts and the like.
【0021】上記ジアリールヨードニウム塩の例として
は、ジフェニルヨードニウムのPF6 - 、AsF6 - 、
BF4 - 、SbF6 - 塩、または9,10−ジメトキシ
アントラセン−2−スルホン酸ジフェニルヨードニウム
塩などが挙げられる。上記トリアリールスルホニウム塩
の例としては、トリフェニルスルホニウムのPF6 - 、
AsF6 - 、BF4 - 塩などが挙げられる。Examples of the diaryliodonium salt include diphenyliodonium PF 6 − , AsF 6 − ,
Examples thereof include BF 4 − , SbF 6 − salt, and diphenyliodonium salt of 9,10-dimethoxyanthracene-2-sulfonic acid. Examples of the above triarylsulfonium salt include triphenylsulfonium PF 6 − ,
Examples include AsF 6 − and BF 4 − salt.
【0022】上記トリハロアルキルアリールスルフォン
化合物の例としては、α,α,α−トリブロモメチルフ
ェニルスルフォン、α,α,α−トリブロモメチル(p
−ニトロフェニル)スルフォン、α,α,α−トリクロ
ロメチルフェニルスルフォン、α,α,α−トリクロロ
メチル(p−ニトロフェニル)スルフォン、α,α,α
−トリブロモメチルナフチルスルフォンなどが挙げられ
る。Examples of the above trihaloalkylaryl sulfone compound include α, α, α-tribromomethylphenyl sulfone, α, α, α-tribromomethyl (p
-Nitrophenyl) sulfone, α, α, α-trichloromethylphenyl sulfone, α, α, α-trichloromethyl (p-nitrophenyl) sulfone, α, α, α
-Tribromomethylnaphthyl sulfone and the like.
【0023】上記トリアリールセレノニウム塩の例とし
ては、トリフェニルセレノニウムのPF6 - 、AsF6
- 、BF4 - 、SbF6 - 塩などが挙げられる。上記ス
ルホン酸エステルの例として例えば、α−ヒドロキシメ
チルベンゾインスルホン酸エステル、Nーヒドロキシイ
ミドスルホネート、α−スルホニロキシケトンなどが挙
げられる。Examples of the above triarylselenonium salt include triphenylselenonium PF 6 − and AsF 6
-, BF 4 -, SbF 6 - salt, and the like. Examples of the sulfonic acid ester include α-hydroxymethylbenzoin sulfonic acid ester, N-hydroxyimide sulfonate, and α-sulfonyloxyketone.
【0024】上記o−ニトロベンジルスルホネートの例
としては、2−ニトロベンジルトシレート、2,4−ジ
ニトロベンジルトシレート、2,6−ジニトロベンジル
トシレートなどが挙げられる。Examples of the above o-nitrobenzyl sulfonate include 2-nitrobenzyl tosylate, 2,4-dinitrobenzyl tosylate, and 2,6-dinitrobenzyl tosylate.
【0025】上記p−ニトロベンジルスルホネートの例
としては、p−ニトロベンジル−9,10−ジメトキシ
アントラセン−2−スルホネートなどが挙げられる。上
記鉄−アレーン化合物の例としては、(η−ベンゼン)
(η−シクロペンタジェニル)鉄(II)のPF塩、(η
−ナフタレン)(η−シクロペンタジェニル)鉄(II)
のPF塩などが挙げられる。Examples of the above-mentioned p-nitrobenzyl sulfonate include p-nitrobenzyl-9,10-dimethoxyanthracene-2-sulfonate. Examples of the iron-arene compound include (η-benzene)
PF salt of (η-cyclopentaphenyl) iron (II), (η
-Naphthalene) (η-cyclopentaenyl) iron (II)
PF salt and the like.
【0026】光カチオン発生剤(b)の含有量は、感光
層の総重量に対して好ましくは0.1〜25重量%であ
り、より好ましくは0.5〜20重量%である。0.1
重量%以下では発生するカチオンが少ないため、光硬化
が十分起こらない。25重量%以上ではそれ以上感度が
上がらず、不必要に多すぎて、不経済である。The content of the photocation generator (b) is preferably 0.1 to 25% by weight, more preferably 0.5 to 20% by weight, based on the total weight of the photosensitive layer. 0.1
If the content is less than 5% by weight, the amount of cations generated is small, so that photocuring does not occur sufficiently. When it is 25% by weight or more, the sensitivity is not further improved, and it is unnecessarily too much, which is uneconomical.
【0027】本発明の(c)成分はビニルエーテル化合
物である。その例としては、アルキルビニルエーテル
類、芳香族ビニルエーテル類、ジビニルエーテル類、ト
リビニルエーテル類、α−置換ビニルエーテル類、β−
置換ビニルエーテル類などが挙げられる。The component (c) of the present invention is a vinyl ether compound. Examples thereof include alkyl vinyl ethers, aromatic vinyl ethers, divinyl ethers, trivinyl ethers, α-substituted vinyl ethers, β-
Examples thereof include substituted vinyl ethers.
【0028】上記アルキルビニルエーテル類の例として
は、そのアルキル部分がメチル、エチル、n−プロピ
ル、イソプロピル、n−ブチル、イソブチル、sec−
ブチル、t−ブチル、イソアミル、n−ヘキシル、n−
オクチル、2−エチルヘキシル、n−デシル、セチル、
オクタデシル、2−クロルエチル、2,2,2−トリフ
ルオロエチル等であるアルキルビニルエーテル化合物な
どが挙げられる。Examples of the above-mentioned alkyl vinyl ethers are those whose alkyl portion is methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, sec-.
Butyl, t-butyl, isoamyl, n-hexyl, n-
Octyl, 2-ethylhexyl, n-decyl, cetyl,
Examples thereof include alkyl vinyl ether compounds such as octadecyl, 2-chloroethyl, 2,2,2-trifluoroethyl and the like.
【0029】上記芳香族ビニルエーテル類の例として
は、その芳香族基の部分がフェニル、o−クレジル、p
−クレジル、p−クロルフェニル、α−ナフチル、β−
ナフチル等である芳香族ビニルエーテル化合物などが挙
げられる。As examples of the aromatic vinyl ethers, the aromatic group moiety is phenyl, o-cresyl or p.
-Cresyl, p-chlorophenyl, α-naphthyl, β-
Examples thereof include aromatic vinyl ether compounds such as naphthyl.
【0030】上記ジビニルエーテル類の例としては、下
記の構造式で表わされる化合物などが挙げられる。 CH2 =CHOCH=CH2 、CH2 =CHOCH2 O
CH=CH2 、CH2 =CHO(CH2 CH2 O)n C
H=CH2 (nは2または3)、CH2 =CHOCH2
CH2 OCH2 CH2 CH2 OCH2 CH2 OCH=C
H2 、Examples of the above divinyl ethers include compounds represented by the following structural formulas. CH 2 = CHOCH = CH 2 , CH 2 = CHOCH 2 O
CH = CH 2, CH 2 = CHO (CH 2 CH 2 O) n C
H = CH 2 (n is 2 or 3), CH 2 = CHOCH 2
CH 2 OCH 2 CH 2 CH 2 OCH 2 CH 2 OCH = C
H 2 ,
【化7】 [Chemical 7]
【0031】上記トリビニルエーテル類の例としては、
下記の化合物などが挙げられる。 CH3 CH2 −C(CH2 OCH2 CH2 OCH=CH
2 )3 Examples of the above trivinyl ethers include:
The following compounds may be mentioned. CH 3 CH 2 -C (CH 2 OCH 2 CH 2 OCH = CH
2 ) 3
【0032】上記α−置換ビニルエーテル類の例として
は、α−メチルビニルエチルエーテル、α−エチルビニ
ルエチルエーテル、α−フェニルビニルエチルエーテル
などが挙げられる。Examples of the above α-substituted vinyl ethers include α-methyl vinyl ethyl ether, α-ethyl vinyl ethyl ether, α-phenyl vinyl ethyl ether and the like.
【0033】上記β−置換ビニルエーテル類の例として
は、β−メチルビニルエチルエーテル、β−メチルビニ
ルイソプロピルエーテル、β−メチルビニルn−ブチル
エーテル、β−メチルビニルイソブチルエーテル、β−
メチルビニルt−ブチルエーテルなどが挙げられる。Examples of the β-substituted vinyl ethers include β-methyl vinyl ethyl ether, β-methyl vinyl isopropyl ether, β-methyl vinyl n-butyl ether, β-methyl vinyl isobutyl ether, β-
Methyl vinyl t-butyl ether and the like can be mentioned.
【0034】上記ビニルエーテル化合物(c)の含有量
は、感光層の総重量に対して、好ましくは1〜30重量
%であり、より好ましくは5〜25重量%である。1重
量%以下では現像安定性の効果が上がらず、30重量%
以上では水性アルカリ現像しずらくなる。The content of the vinyl ether compound (c) is preferably 1 to 30% by weight, more preferably 5 to 25% by weight, based on the total weight of the photosensitive layer. If it is less than 1% by weight, the effect of development stability does not increase, and 30% by weight
With the above, it becomes difficult to develop the aqueous alkali.
【0035】本発明の組成物中には、アルカリ可溶性共
重合体(a)、光カチオン発生剤(b)、およびビニル
エーテル化合物(c)の他に、さらにシェラック、フェ
ノール−ホルムアルデヒド樹脂、クレゾール−ホルムア
ルデヒド樹脂、置換フェノール−ホルムアルデヒド樹
脂、ポリヒドロキシスチレン、ハロゲン化ポリヒドロキ
シスチレン、ヒドロキシスチレンとアクリル化合物との
共重合体、スチレン−無水マレイン酸共重合体、アクリ
ル樹脂、変性アクリル共重合体などの公知のアルカリ可
溶性高分子化合物を含有させることもできる。かかるア
ルカリ可溶性高分子化合物は、全組成物の40重量%以
下の添加量で用いられる。In the composition of the present invention, in addition to the alkali-soluble copolymer (a), the photocation generator (b), and the vinyl ether compound (c), shellac, phenol-formaldehyde resin, cresol-formaldehyde are further added. Resins, substituted phenol-formaldehyde resins, polyhydroxystyrene, halogenated polyhydroxystyrene, copolymers of hydroxystyrene and acrylic compounds, styrene-maleic anhydride copolymers, acrylic resins, modified acrylic copolymers, etc. It is also possible to contain an alkali-soluble polymer compound. The alkali-soluble polymer compound is used in an amount of 40% by weight or less of the total composition.
【0036】本発明の感光性組成物には、上記の如き成
分の他にさらに染料、顔料、可塑剤、界面活性剤などの
添加剤を加えることができる。In addition to the above components, the photosensitive composition of the present invention may further contain additives such as dyes, pigments, plasticizers and surfactants.
【0037】感光性組成物の着色を目的として添加する
染料としては、クリスタルバイオレット、マラカイドグ
リーン、ビクトリアブルー、メチレンブルー、エチルバ
イオレット、ローダミンBなど、およびその誘導体であ
る塩基性油性染料を挙げることができる。Examples of dyes added for the purpose of coloring the photosensitive composition include crystal violet, malachide green, Victoria blue, methylene blue, ethyl violet, rhodamine B, and basic oil dyes which are derivatives thereof. it can.
【0038】このような染料は、ビクトリアピュアーブ
ルーBOH(保土谷化学工業(株)製)、オイルブルー
#603(オリエント化学工業(株)製)、パーマネン
トブルー#47(大同化学工業(株)製)などとして市
販されている。Such dyes include Victoria Pure Blue BOH (manufactured by Hodogaya Chemical Co., Ltd.), Oil Blue # 603 (manufactured by Orient Chemical Co., Ltd.), and Permanent Blue # 47 (manufactured by Daido Chemical Co., Ltd.). ) Etc. are commercially available.
【0039】また、顔料としては、フタロシアニンブル
ー、フタロシアニングリーン、ジオキサジンバイオレッ
ト、キナクリドンレッド、インダンスレンブルーなどを
挙げることができる。その市販品としては、ネオザボン
ブルーFLE(バーディッシュ・アニリン(社)製)、
オイルブルーBOS(オリエント化学工業(株)製)、
スピロンブルーGNH(保土谷化学工業(株)製)など
がある。Examples of pigments include phthalocyanine blue, phthalocyanine green, dioxazine violet, quinacridone red, and indanthrene blue. As the commercially available product, Neo-Zabone Blue FLE (manufactured by Birdish Aniline Co., Ltd.),
Oil blue BOS (manufactured by Orient Chemical Industry Co., Ltd.),
There is Spyron Blue GNH (manufactured by Hodogaya Chemical Co., Ltd.).
【0040】上記染料の含有量は感光層の総重量に対し
て、好ましくは約0.1〜5.0重量%であり、より好
ましくは0.5〜4.0重量%である。The content of the above-mentioned dye is preferably about 0.1 to 5.0% by weight, more preferably 0.5 to 4.0% by weight, based on the total weight of the photosensitive layer.
【0041】また上記顔料の含有量は感光層の総重量に
対して、好ましくは約1.0〜5.0重量%であり、よ
り好ましくは2.0〜4.0重量%である。The content of the above pigment is preferably about 1.0 to 5.0% by weight, more preferably 2.0 to 4.0% by weight, based on the total weight of the photosensitive layer.
【0042】感光性組成物の塗布性をよくしたり、感光
性組成物の支持体への接着性を向上させる目的で、可塑
剤や界面活性剤を加えることもできる。A plasticizer or a surfactant may be added for the purpose of improving the coatability of the photosensitive composition or improving the adhesion of the photosensitive composition to a support.
【0043】可塑剤としては、例えばジメチルフタレー
ト、ジエチルフタレート、ジブチルフタレート、ジヘプ
チルフタレート、ジ−2−エチルヘキシルフタレート、
ジ−n−オクチルフタレート、ジイソデシルフタレー
ト、ブチルベンジルフタレート、ジイソノニルフタレー
ト、エチルフタリルエチルグリコール、ジメチルイソフ
タレートなどを挙げることができる。Examples of the plasticizer include dimethyl phthalate, diethyl phthalate, dibutyl phthalate, diheptyl phthalate, di-2-ethylhexyl phthalate,
Examples thereof include di-n-octyl phthalate, diisodecyl phthalate, butylbenzyl phthalate, diisononyl phthalate, ethylphthalylethyl glycol and dimethyl isophthalate.
【0044】上記可塑剤の含有量は、感光層の総重量に
対して、好ましくは約0.5〜3.0重量%であり、よ
り好ましくは0.6〜2.0重量%である。The content of the above plasticizer is preferably about 0.5 to 3.0% by weight, more preferably 0.6 to 2.0% by weight, based on the total weight of the photosensitive layer.
【0045】界面活性剤としては、ソルビタンモノオレ
エイト、ソルビタンステアリレイト、ソルビタンモノス
テアレイト、ソルビタンセキスオレイト、ソルビタンモ
ノラウレイト、ポリオキシエチレンノニルフェニルエー
テル、ポリオキシエチレンオクチルフェニルエーテルな
どを挙げることができる。上記界面活性剤の含有量は、
感光層の総重量に対して、好ましくは約0.4〜2.0
重量%であり、より好ましくは0.6〜1.6重量%で
ある。Examples of the surfactant include sorbitan monooleate, sorbitan stearylate, sorbitan monostearate, sorbitan sequisoleate, sorbitan monolaurate, polyoxyethylene nonylphenyl ether, polyoxyethylene octylphenyl ether and the like. You can The content of the surfactant is
Preferably about 0.4 to 2.0, based on the total weight of the photosensitive layer.
%, More preferably 0.6 to 1.6% by weight.
【0046】本発明の感光性組成物は、例えば、メタノ
ール、メチレンクロライド、酢酸エチル、テトラヒドロ
フラン、N,N−ジメチルホルムアミド、エチレングリ
コールモノメチルエーテル、エチレングリコールモノエ
チルエーテル、メチルセロソルブアセテート、エチルセ
ロソルブアセテート、プロピレングリコールモノメチル
エーテル、プロピレングリコールモノメチルエーテルア
セテート、メチルエチルケトン、アセトン、乳酸メチル
などの単独溶剤あるいは2種以上の混合溶剤に溶解し
て、各種塗布機(例えばホワイラー、ロールコーター、
バーコーター、押し出し型コーターなど)を用いて支持
体上に塗布し、乾燥させることができる。The photosensitive composition of the present invention includes, for example, methanol, methylene chloride, ethyl acetate, tetrahydrofuran, N, N-dimethylformamide, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, Dissolved in a single solvent such as propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, methyl ethyl ketone, acetone, methyl lactate or a mixed solvent of two or more kinds, and then applied to various coating machines (for example, whiler, roll coater,
It can be coated on a support using a bar coater, an extrusion type coater, etc. and dried.
【0047】本発明の感光性組成物を用いて感光性平版
印刷版を製造する場合、その支持体としては、紙、プラ
スチックフイルム、あるいは銅、亜鉛、アルミニウム、
ステンレスなどの金属板、さらにこれらを2種以上組み
合わせた複合材料を用いることができる。When a photosensitive lithographic printing plate is produced using the photosensitive composition of the present invention, the support thereof is paper, plastic film, copper, zinc, aluminum,
A metal plate such as stainless steel or a composite material in which two or more of these are combined can be used.
【0048】これらのなかで、特にブラシまたはボール
研磨したアルミニウム板、ブラシ研磨したのち陽極酸化
処理を施したアルミニウム板、電解研磨したのち陽極酸
化を施したアルミニウム板、あるいはこれらを組み合わ
せた処理を施したアルミニウム板が好ましい。Among these, aluminum plates that have been brush- or ball-polished, aluminum plates that have been brush-polished and then anodized, aluminum plates that have been electrolytically-polished and then anodized, or a combination thereof. Aluminum plates are preferred.
【0049】このような前処理を施したアルミニウム板
に、さらにケイ酸アルカリ、フッ化ジルコニウム、アル
キルチタネート、トリヒドロキシ安息香酸などによる化
成処理や、ベーマイト処理あるいは酢酸ストロンチウ
ム、酢酸亜鉛、酢酸マグネシウム、安息香酸カルシウム
などの水溶液による被覆処理、ポリビニルピロリドン、
ポリアミンスルホン酸、ポリビニルホスホン酸、ポリア
クリル酸、ポリメタクリル酸、ポリ−2−ヒドロキシエ
チルアクリレートなどによる被覆処理を後処理として行
なうことができる。The aluminum plate which has been subjected to such pretreatment is further subjected to chemical conversion treatment with alkali silicate, zirconium fluoride, alkyl titanate, trihydroxybenzoic acid or the like, boehmite treatment or strontium acetate, zinc acetate, magnesium acetate, benzoic acid. Coating treatment with an aqueous solution of calcium acidate, polyvinylpyrrolidone,
A coating treatment with polyaminesulfonic acid, polyvinylphosphonic acid, polyacrylic acid, polymethacrylic acid, poly-2-hydroxyethyl acrylate or the like can be performed as a post-treatment.
【0050】本発明の感光性組成物は、支持体上に塗布
したのち、紫外線などの活性光線で露光し、水性アルカ
リ現像液で現像することにより、原画に対してネガのレ
リーフ像を得ることができる。The photosensitive composition of the present invention is coated on a support, exposed to actinic rays such as ultraviolet rays, and developed with an aqueous alkaline developer to obtain a negative relief image with respect to the original image. You can
【0051】このとき現像液として使用するアルカリ性
水溶液としては、例えば、 (1)水酸化ナトリウム、水酸化カリウム: (2)弱酸の金属塩;例えばケイ酸、メタケイ酸、オル
トケイ酸、リン酸、ピロリン酸、メタリン酸、ヘキサメ
タリン酸、炭酸、酒石酸、ホウ酸などのナトリウム塩、
リチウム塩、カリウム塩などの金属塩: (3)アンモニアおよびその誘導体;例えばアルキルア
ミン類(例えばモノメチル、ジメチル、トリメチル、モ
ノエチル、ジエチル、トリエチルなどのアミン化合
物)、アルカノールアミン類(例えばモノエタノールア
ミン、ジエタノールアミン、トリエタノールアミン、ジ
イソプロパノールアミン)、またはテトラメチルアンモ
ニウムハイドロオキサイド:などのアルカリ性化合物の
水溶液が挙げられる。Examples of the alkaline aqueous solution used as the developing solution at this time include (1) sodium hydroxide and potassium hydroxide: (2) weak acid metal salts; for example, silicic acid, metasilicic acid, orthosilicic acid, phosphoric acid, and pyrroline. Acid, metaphosphoric acid, hexametaphosphoric acid, carbonic acid, tartaric acid, sodium salts such as boric acid,
Metal salts such as lithium salts and potassium salts: (3) Ammonia and its derivatives; for example, alkylamines (for example, amine compounds such as monomethyl, dimethyl, trimethyl, monoethyl, diethyl, triethyl), alkanolamines (for example, monoethanolamine, etc.) Diethanolamine, triethanolamine, diisopropanolamine) or an aqueous solution of an alkaline compound such as tetramethylammonium hydroxide.
【0052】上記のアルカリ性水溶液中に必要に応じて
活性剤を添加することができる。活性剤としては陰イオ
ン界面活性剤あるいは両性界面活性剤を使用することが
できる。If necessary, an activator can be added to the above alkaline aqueous solution. As the activator, an anionic surfactant or an amphoteric surfactant can be used.
【0053】陰イオン界面活性剤としては、例えば炭素
数8〜22のアルコールの硫酸エステル類(例えば、ポ
リオキシエチレンアルキルサルフェートソーダ塩)、ア
ルキルアリールスルホン酸塩類(例えば、ドデシルベン
ゼンスルホン酸ソーダ、ポリオキシエチレンドデシルフ
ェニルサルフェートソーダ塩、アルキルナフタレンスル
ホン酸ソーダ、ナフタレンスルホン酸ソーダ、ナフタレ
ンスルホン酸ソーダのホルマリン縮合物)、ソジウムジ
アルキルスルホサクシネート、脂肪酸アミドスルホネー
ト、アルキルリン酸エステル、アルキルエーテルリン酸
エステルなどを用いることができる。Examples of the anionic surfactant include sulfuric acid esters of alcohols having 8 to 22 carbon atoms (for example, polyoxyethylene alkyl sulfate soda salt), alkylaryl sulfonates (for example, sodium dodecylbenzene sulfonate, poly Oxyethylene dodecylphenyl sulfate soda salt, alkyl naphthalene sulfonic acid sodium salt, naphthalene sulfonic acid sodium salt, formalin condensate of sodium naphthalene sulfonic acid), sodium dialkyl sulfosuccinate, fatty acid amide sulfonate, alkyl phosphate ester, alkyl ether phosphate ester Etc. can be used.
【0054】また両性界面活性剤としては、例えばアル
キルベタイン型、アルキルイミダゾリン型活性剤を用い
ることができる。As the amphoteric surfactant, for example, alkyl betaine type or alkyl imidazoline type surfactant can be used.
【0055】[0055]
【作用】本発明の感光性組成物は、光カチオン重合型感
光性組成物であるため、光硬化の際に酸素による阻害を
受けない。したがってオーバーコート層などを設けるよ
うな処理を必要としない。The photosensitive composition of the present invention is a cationic photopolymerization type photosensitive composition, and therefore is not inhibited by oxygen during photocuring. Therefore, there is no need for a treatment such as providing an overcoat layer.
【0056】また、画像露光後は水性アルカリ現像液で
現像可能であり、今までになく現像安定性に優れ、しか
も感度も向上している。本発明の感光性組成物を印刷版
として使用する場合には、ポジ型平版印刷版の現像液と
して公知である水性アルカリ現像液を用いても現像する
ことができる。しかも本発明の感光性組成物は、ネガ型
であるため、一種類の現像液でポジ版、ネガ版を得るこ
とができ、作業効率、設備費、配置スペースなどが著し
く改善される。Further, after image exposure, it can be developed with an aqueous alkaline developing solution, which is more excellent in development stability than ever, and the sensitivity is also improved. When the photosensitive composition of the present invention is used as a printing plate, it can be developed also by using an aqueous alkaline developing solution known as a developing solution for a positive lithographic printing plate. Moreover, since the photosensitive composition of the present invention is a negative type, it is possible to obtain a positive plate and a negative plate with one kind of developing solution, and work efficiency, equipment cost, arrangement space, etc. are remarkably improved.
【0057】[0057]
【実施例】共重合体の合成 まず、次のようにして共重合体〜を合成した。共重合体 窒素気流下で、反応溶媒としてのテトラヒドロフラン
(T.H.F)150g中に、下記組成の混合物を加
え、65℃に加温してから1,1′−アゾビス(シクロ
ヘキサン−1−カルボニトリル)0.3gを加えて、6
5℃で5時間撹拌した。反応終了後、T.H.F150
gを加え、水中に投入して共重合体を沈澱させた。その
沈澱物を真空乾燥(60℃)して共重合体を得た。 記 N−(4−ヒドロキシフェニル)マレイミド 40g グリシジルメタアクリレート 30g メチルメタクリレート 30g この共重合体の20重量%T.H.F溶液を調整し、
粘度を測定した結果、約500CPS(25℃)であっ
た。EXAMPLES Synthesis of Copolymer First, copolymers (1) to (3) were synthesized as follows. Under a nitrogen stream of a copolymer, a mixture having the following composition was added to 150 g of tetrahydrofuran (THF) as a reaction solvent, and the mixture was heated to 65 ° C. and then 1,1′-azobis (cyclohexane-1- Add 0.3 g of carbonitrile to give 6
The mixture was stirred at 5 ° C for 5 hours. After completion of the reaction, T. H. F150
g was added and poured into water to precipitate the copolymer. The precipitate was vacuum dried (60 ° C.) to obtain a copolymer. Note N- (4-hydroxyphenyl) maleimide 40 g Glycidyl methacrylate 30 g Methyl methacrylate 30 g 20% by weight of T. H. Prepare the F solution,
As a result of measuring the viscosity, it was about 500 CPS (25 ° C.).
【0058】共重合体 下記の配合からなる組成物を用いる以外は共重合体と
同様に合成した。 記 N−(4−ヒドロキシフェニル)メタクリルアミド 40g グリシジルメタアクリレート 40g メチルメタクリレート 20g Copolymer A copolymer was synthesized in the same manner as the copolymer except that a composition having the following composition was used. Note N- (4-hydroxyphenyl) methacrylamide 40 g Glycidyl methacrylate 40 g Methyl methacrylate 20 g
【0059】共重合体 下記の配合からなる組成物を用いる以外は共重合体と
同様に合成した。 記 N−(4−ヒドロキシフェニル)マレイミド 30g 4−ビニルフェニルグリシジルエーテル 50g エチルメタクリレート 20g Copolymer A copolymer was synthesized in the same manner as the copolymer except that the composition having the following composition was used. Note N- (4-hydroxyphenyl) maleimide 30 g 4-vinylphenyl glycidyl ether 50 g ethyl methacrylate 20 g
【0060】共重合体 下記の配合からなる組成物を用いる以外は共重合体と
同様に合成した。 記 N−(4−ヒドロキシフェニル)メタクリルアミド 40g エピチオプロピルメタクリレート 40g エチルメタクリレート 20g Copolymer A copolymer was synthesized in the same manner as the copolymer except that the composition having the following composition was used. Note N- (4-hydroxyphenyl) methacrylamide 40 g Epithiopropyl methacrylate 40 g Ethyl methacrylate 20 g
【0061】共重合体 下記の配合からなる組成物を用いる以外は共重合体と
同様に合成した。 記 N−(4−ヒドロキシフェニル)マレイミド 15g N−(4−ヒドロキシフェニル)メタクリルアミド 25g エチピオプロピルメタクリレート 40g メチルメタクリレート 20g Copolymer A copolymer was synthesized in the same manner as the copolymer except that a composition having the following composition was used. Note N- (4-hydroxyphenyl) maleimide 15 g N- (4-hydroxyphenyl) methacrylamide 25 g Ethipiopropyl methacrylate 40 g Methyl methacrylate 20 g
【0062】感光性平版印刷版の製造 厚さ0.24mm、幅1000mmのアルミニウム板
(材質1050)をアルカリ脱脂したのち、パーミスト
ンの水懸濁液をかけながらナイロンブラシで表面を研磨
し、その後よく水洗した。 Production of a photosensitive lithographic printing plate An aluminum plate (material 1050) having a thickness of 0.24 mm and a width of 1000 mm was alkali degreased, and then the surface was polished with a nylon brush while applying an aqueous suspension of permistone, and then thoroughly Washed with water.
【0063】次いで、70℃、20%のカセイソーダ液
を5秒間かけ流し、表面を3g/m2 エッチングしたの
ち、流水で水洗し、塩酸(35g/l)およびアルミニ
ウムイオン(5g/l)からなる電解液中25℃で30
A/dm2 の電流密度で30秒間電解研磨し、水洗し
た。Then, a caustic soda solution of 20% at 70 ° C. is flowed over for 5 seconds to etch the surface with 3 g / m 2 and then washed with running water to form hydrochloric acid (35 g / l) and aluminum ion (5 g / l). 30 at 25 ℃ in electrolyte
It was electropolished at a current density of A / dm 2 for 30 seconds and washed with water.
【0064】次いで、70℃、20%のカセイソーダ液
をかけ流して表面をエッチングし、さらに水洗を行な
い、次いで30℃の10%硫酸水溶液中で陽極酸化処理
を行なって、20g/m2 の酸化皮膜を形成させた。Then, a caustic soda solution of 70% at 20 ° C. is poured to etch the surface, followed by washing with water, followed by anodizing treatment in a 10% sulfuric acid aqueous solution at 30 ° C. to oxidize 20 g / m 2 . A film was formed.
【0065】水洗したのち、JIS3号珪酸ナトリウム
5%を含む水溶液で、70℃、10秒間浸漬処理し、水
洗乾燥した。After washing with water, it was immersed in an aqueous solution containing 5% of JIS No. 3 sodium silicate at 70 ° C. for 10 seconds, washed with water and dried.
【0066】このようにして得られたアルミニウム板に
下記表1に示す感光液をそれぞれ乾燥後の塗膜重量が
2.0g/m2 になるように塗布して感光性平版印刷版
を得た。なお、このときの溶剤はメチルエチルケトン:
テトラヒドロフラン=1:1の割合で70g使用し、着
色剤としてビクトリアピュア−ブルーBOHを0.1g
加えて調合した。The aluminum plate thus obtained was coated with each of the sensitizing solutions shown in Table 1 below so that the coating film weight after drying was 2.0 g / m 2 to obtain a photosensitive lithographic printing plate. . The solvent at this time was methyl ethyl ketone:
70 g of tetrahydrofuran = 1: 1 was used, and 0.1 g of Victoria Pure-Blue BOH was used as a colorant.
In addition, it was mixed.
【0067】[0067]
【表1】 [Table 1]
【0068】上記表1中のビニルエーテル化合物として
は、次のものを使用した。 (1)CH2 =CHOCH2 CH2 OCH2 CH2 OC
H=CH2 The following vinyl ether compounds in Table 1 were used. (1) CH 2 = CHOCH 2 CH 2 OCH 2 CH 2 OC
H = CH 2
【化8】 (3)CH3 CH2 −C(CH2 OCH2 CH2 OCH
=CH2 )3 (4)2−クロルエチルビニールエーテル[Chemical 8] (3) CH 3 CH 2 -C (CH 2 OCH 2 CH 2 OCH
= CH 2 ) 3 (4) 2-chloroethyl vinyl ether
【0069】このようにして得た感光性平版印刷版に、
ネガフィルムおよびコダック社製ステップタブレットN
o.2を真空密着し、2KW高圧水銀灯を用いて、距離
1mで30秒間紫外線を照射したのち、下記組成の現像
液を用いて標準現像(現像液温25℃、現像時間30
秒)したときのステップタブレットのベタ段数(感度の
測定になる)、ならびに長時間現像(現像液温25℃、
現像時間2分)したときの画像の安定性(現像ラチチュ
ード)を調べた。その結果を表2に示す。 記 現像液(ポジ型PS版用現像液と類似した組成) JIS3号ケイ酸ナトリウム 25g 水酸化カリウム 15g 水 1kgIn the photosensitive lithographic printing plate thus obtained,
Negative film and Kodak step tablet N
o. 2 was vacuum-adhered and irradiated with ultraviolet rays at a distance of 1 m for 30 seconds using a 2 kW high pressure mercury lamp, and then standard development was performed using a developer having the following composition (developing solution temperature 25 ° C., developing time 30
Seconds), the number of solid steps of the step tablet (measurement of sensitivity), and long-term development (developer temperature 25 ° C.,
The stability of the image (developing latitude) when the developing time was 2 minutes) was examined. The results are shown in Table 2. Note Developer (composition similar to developer for positive PS plate) JIS No. 3 sodium silicate 25 g potassium hydroxide 15 g water 1 kg
【0070】[0070]
【表2】 [Table 2]
【0071】表2中の現像ラチチュードは、標準現像し
たときのステップタブレットのベタ段数と長時間現像
(2分)したときのステップタブレットのベタ段数の差
を表示したものである。数字が小さい方が、現像ラチチ
ュードが優れていることを示す。なお、比較例1および
2の長時間現像における画像部のベタ部は膨潤してお
り、画像が傷つき易くなっていた。The development latitude in Table 2 indicates the difference between the number of solid steps of the step tablet in standard development and the number of solid steps of the step tablet in long-time development (2 minutes). The smaller the number, the better the development latitude. In addition, in Comparative Examples 1 and 2, the solid portion of the image portion in the long-time development was swollen, and the image was easily scratched.
【0072】表2の結果から明らかなように、実施例1
〜6の感光性組成物を用いた感光性印刷版は、感度と現
像ラチチュード(現像安定性)がきわめて良好であっ
た。As is clear from the results shown in Table 2, Example 1
The photosensitive printing plates using the photosensitive compositions of Nos. 6 to 6 had extremely good sensitivity and development latitude (development stability).
【0073】[0073]
【発明の効果】本発明のアルカリ現像型感光性組成物
は、ネガ型作用であるにもかかわらず、ポジPS版を現
像することのできる実質的に有機溶剤を含まない水性ア
ルカリ現像液で現像でき、臭気の問題や火災に対する危
険性を排除した現像方法が取れるなどの長所がある。INDUSTRIAL APPLICABILITY The alkali-developable photosensitive composition of the present invention develops with an aqueous alkaline developer containing substantially no organic solvent capable of developing a positive PS plate even though it has a negative action. The advantage is that the developing method can eliminate the problem of odor and the risk of fire.
【0074】また、この種の感光性組成物と比較して、
感度および現像安定性に優れた感光層を得ることができ
る。Further, in comparison with this type of photosensitive composition,
A photosensitive layer excellent in sensitivity and development stability can be obtained.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G03F 7/30 7124−2H H01L 21/027 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location G03F 7/30 7124-2H H01L 21/027
Claims (2)
I)で表わされるモノマーと、下記式(111)で表わされ
るモノマーを含むアルカリ可溶性共重合体、(b)光カ
チオン発生剤、および(c)ビニルエーテル化合物を含
有することを特徴とするアルカリ現像型感光性組成物。 【化1】 【化2】 【化3】 1. (a) The following formula (I) and / or (I)
An alkali-developable type comprising a monomer represented by I), an alkali-soluble copolymer containing a monomer represented by the following formula (111), (b) a photocation generator, and (c) a vinyl ether compound. Photosensitive composition. [Chemical 1] [Chemical 2] [Chemical 3]
総重量に対して1〜30重量%混合したことを特徴とす
る請求項(1)記載のアルカリ現像型感光性組成物。2. The alkali-developable photosensitive composition according to claim 1, wherein the vinyl ether compound (c) is mixed in an amount of 1 to 30% by weight based on the total weight of the photosensitive layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3188021A JP3045820B2 (en) | 1991-07-02 | 1991-07-02 | Alkali development type photosensitive composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3188021A JP3045820B2 (en) | 1991-07-02 | 1991-07-02 | Alkali development type photosensitive composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH075684A true JPH075684A (en) | 1995-01-10 |
| JP3045820B2 JP3045820B2 (en) | 2000-05-29 |
Family
ID=16216277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3188021A Expired - Fee Related JP3045820B2 (en) | 1991-07-02 | 1991-07-02 | Alkali development type photosensitive composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3045820B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6017676A (en) * | 1996-06-29 | 2000-01-25 | Hyundai Electronics Industries Co., Ltd. | Photoresist composition comprising a copolymer resin |
| WO2005091072A1 (en) * | 2004-03-24 | 2005-09-29 | Jsr Corporation | Negative radiation-sensitive resin composition |
| JP2009169355A (en) * | 2008-01-21 | 2009-07-30 | Fujifilm Corp | Negative resist composition and resist pattern forming method |
| JP2009258506A (en) * | 2008-04-18 | 2009-11-05 | Fujifilm Corp | Negative resist composition and resist pattern-forming method |
| WO2009154284A1 (en) | 2008-06-18 | 2009-12-23 | 日本カーバイド工業株式会社 | Multifunctional vinyl ether and resin composition containing same |
| US9348224B2 (en) * | 2012-03-27 | 2016-05-24 | Nissan Chemical Industries, Ltd. | Photosensitive resin composition |
| DE112017001257T5 (en) | 2016-04-05 | 2018-11-29 | Nidec Corporation | Waveguide device and antenna array |
| WO2020080067A1 (en) * | 2018-10-17 | 2020-04-23 | 富士フイルム株式会社 | Planographic printing plate precursor, and production method for planographic printing plate |
-
1991
- 1991-07-02 JP JP3188021A patent/JP3045820B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6017676A (en) * | 1996-06-29 | 2000-01-25 | Hyundai Electronics Industries Co., Ltd. | Photoresist composition comprising a copolymer resin |
| WO2005091072A1 (en) * | 2004-03-24 | 2005-09-29 | Jsr Corporation | Negative radiation-sensitive resin composition |
| US7482111B2 (en) | 2004-03-24 | 2009-01-27 | Jsr Corporation | Negative radiation-sensitive resin composition |
| JP2009169355A (en) * | 2008-01-21 | 2009-07-30 | Fujifilm Corp | Negative resist composition and resist pattern forming method |
| JP2009258506A (en) * | 2008-04-18 | 2009-11-05 | Fujifilm Corp | Negative resist composition and resist pattern-forming method |
| WO2009154284A1 (en) | 2008-06-18 | 2009-12-23 | 日本カーバイド工業株式会社 | Multifunctional vinyl ether and resin composition containing same |
| JPWO2009154284A1 (en) * | 2008-06-18 | 2011-12-01 | 日本カーバイド工業株式会社 | Polyfunctional vinyl ether and resin composition containing the same |
| US9348224B2 (en) * | 2012-03-27 | 2016-05-24 | Nissan Chemical Industries, Ltd. | Photosensitive resin composition |
| DE112017001257T5 (en) | 2016-04-05 | 2018-11-29 | Nidec Corporation | Waveguide device and antenna array |
| WO2020080067A1 (en) * | 2018-10-17 | 2020-04-23 | 富士フイルム株式会社 | Planographic printing plate precursor, and production method for planographic printing plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3045820B2 (en) | 2000-05-29 |
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