JPH07254176A - Magneto-optical recording medium and information reproducing method using the medium - Google Patents
Magneto-optical recording medium and information reproducing method using the mediumInfo
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- JPH07254176A JPH07254176A JP4559494A JP4559494A JPH07254176A JP H07254176 A JPH07254176 A JP H07254176A JP 4559494 A JP4559494 A JP 4559494A JP 4559494 A JP4559494 A JP 4559494A JP H07254176 A JPH07254176 A JP H07254176A
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- layer
- reproducing
- magneto
- temperature
- magnetic layer
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Abstract
(57)【要約】
【構成】 少なくとも再生層、中間層および記録層がそ
の順序で基板上に積層され、再生層が室温で面内磁化膜
であって昇温により垂直磁化膜となる性質を有し、記録
層が垂直磁化膜であり、中間層が再生層より低いキュリ
ー温度を有する光磁気記録媒体を用い、再生層および中
間層に光スポットを照射して光スポット内の一部を垂直
磁化膜とし、記録層の情報に応じた磁化方向に対して安
定な方向に配向させ、光スポットの反射光の磁気光学効
果変化により情報再生を行う。
【効果】 初期化磁石のない簡単な装置(従来の装置)
を用いて、ビームスポット系より小さい磁区の再生が可
能で、クロストークを解消することができ、線記録密度
およびトラック密度を大幅に向上させた高密度記録の達
成が可能となる。
(57) [Summary] [Structure] At least a reproducing layer, an intermediate layer and a recording layer are laminated in this order on the substrate, and the reproducing layer is an in-plane magnetized film at room temperature and becomes a perpendicular magnetized film when heated. The recording layer is a perpendicular magnetization film, and the intermediate layer has a Curie temperature lower than that of the reproducing layer. A magneto-optical recording medium is used to irradiate the reproducing layer and the intermediate layer with a light spot so that a part of the light spot becomes perpendicular. As a magnetized film, it is oriented in a stable direction with respect to the magnetization direction according to the information of the recording layer, and information is reproduced by changing the magneto-optical effect of the reflected light of the light spot. [Effect] Simple device without the initialization magnet (conventional device)
By using, the magnetic domain smaller than the beam spot system can be reproduced, crosstalk can be eliminated, and high-density recording in which the linear recording density and the track density are significantly improved can be achieved.
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁気光学効果を利用し
てレーザー光により情報の記録再生を行う光磁気記録媒
体、特に高密度化を可能とする光磁気記録媒体、さらに
光磁気再生方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium for recording / reproducing information with a laser beam by utilizing the magneto-optical effect, particularly a magneto-optical recording medium capable of achieving high density, and a magneto-optical reproducing method. Regarding
【0002】[0002]
【従来の技術】書き換え可能な高密度記録方式として、
半導体レーザーの熱エネルギーを用いて、磁性薄膜に磁
区を書き込んで情報を記録し、磁気光学効果を用いて、
その情報を読み出す光磁気記録媒体が注目されている。
また近年、この光磁気記録媒体の記録速度を高めてさら
に大容量の記録媒体とする要求が高まっている。2. Description of the Related Art As a rewritable high density recording system,
Using the thermal energy of a semiconductor laser to write magnetic domains in a magnetic thin film to record information, using the magneto-optical effect,
Attention has been paid to a magneto-optical recording medium for reading the information.
Further, in recent years, there is an increasing demand for increasing the recording speed of this magneto-optical recording medium to make it a recording medium having a larger capacity.
【0003】この光磁気記録媒体等の光ディスクの線記
録密度は、再生光学系のレーザー波長、対物レンズの開
口数に大きく依存する。すなわち、再生光学系のレーザ
ー波長λと対物レンズの開口数NAが決まるとビームウ
エストの径が決まるため、再生検出可能なマーク周期
は、λ/2NA程度が限界となってしまう。The linear recording density of an optical disk such as the magneto-optical recording medium largely depends on the laser wavelength of the reproducing optical system and the numerical aperture of the objective lens. That is, since the diameter of the beam waist is determined when the laser wavelength λ of the reproduction optical system and the numerical aperture NA of the objective lens are determined, the mark period that can be reproduced and detected is limited to about λ / 2NA.
【0004】一方、トラック密度は、主としてクロスト
ークによって制限されている。このクロストークは、主
として媒体面上でのレーザービームの分布(プロファイ
ル)で決まり、前記マーク周期と同様にλ/2NAの関
数で表わされる。On the other hand, track density is limited mainly by crosstalk. This crosstalk is mainly determined by the distribution (profile) of the laser beam on the medium surface, and is represented by a function of λ / 2NA, like the mark period.
【0005】従って、従来の光ディスクで高密度化を実
現するためには、再生光学系のレーザーの波長を短く
し、対物レンズの開口数NAを大きくする必要がある。
しかしながら、レーザーの波長を短くするのは素子の効
率、発熱などの問題で容易ではなく、また対物レンズの
開口数を大きくするとレンズとディスクの距離が近くな
りすぎて衝突などの機械的問題が発生する。このため、
記録媒体の構成や読み取り方法を工夫し、記録密度を改
善する技術が開発されている。Therefore, in order to realize high density in the conventional optical disk, it is necessary to shorten the wavelength of the laser of the reproducing optical system and increase the numerical aperture NA of the objective lens.
However, it is not easy to shorten the laser wavelength due to problems such as element efficiency and heat generation. Also, when the numerical aperture of the objective lens is increased, the distance between the lens and the disk becomes too close and mechanical problems such as collision occur. To do. For this reason,
Techniques have been developed for improving the recording density by devising the configuration of the recording medium and the reading method.
【0006】例えば、特開平3−93058号公報およ
び特開平3−255946号公報においては、再生層と
記録層からなる媒体を用いて磁気超解像により記録密度
の向上を試みている。これは基本的には再生層と記録層
を設け、特性を改善する目的で補助層、中間層を設けた
構成の媒体に前もって初期化外部磁界を用いて信号の再
生前に再生層の磁化の向きを一方向に揃えた後に、記録
層の磁区情報をマスクし、光スポットを照射して、その
際に生じる媒体の温度分布のうち、高温領域の再生層の
みが記録層の磁区情報が転写され再生できるようにし
て、再生時の符号間干渉を減少させ、光の回折限界以下
の周期の信号を再生可能とし、記録密度の向上を試みて
いる。For example, JP-A-3-93058 and JP-A-3-255946 attempt to improve the recording density by magnetic super-resolution using a medium composed of a reproducing layer and a recording layer. This is basically provided with a reproducing layer and a recording layer, and a medium having a structure in which an auxiliary layer and an intermediate layer are provided for the purpose of improving the characteristics. After aligning the orientation in one direction, mask the magnetic domain information of the recording layer and irradiate a light spot, and in the temperature distribution of the medium generated at that time, only the reproducing layer in the high temperature area transfers the magnetic domain information of the recording layer. In this way, it is attempted to improve the recording density by reducing the intersymbol interference at the time of reproduction, enabling reproduction of a signal having a period less than the diffraction limit of light, and enabling reproduction.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、前記の
特開平3−93058号公報に記載の超解像方法では、
再生のために大きな初期化磁石および再生磁界が必要で
あるため、ドライブ装置が高価になったり小型化が難し
いといった問題がある。However, in the super-resolution method described in the above-mentioned Japanese Patent Laid-Open No. 3-93058,
Since a large initialization magnet and a reproducing magnetic field are required for reproduction, there are problems that the drive device becomes expensive and it is difficult to miniaturize it.
【0008】これに対して本発明者は、先に再生磁界を
印加することなく磁気超解像が実現できる光磁気記録媒
体およびその媒体を用いた光磁気記録媒体の再生方法を
試みた。これは、図2に示すように磁化が室温では面内
方向に配向し、高温になると垂直方向に配向する磁性膜
(再生層)と、垂直磁気異方性を持つ磁性層(記録層)
とを積層した2層構造の媒体を用いて、再生時に光スポ
ットの高温部のみが垂直磁化膜となって記録層の磁化情
報を転写することにより、再生磁界を印加することな
く、磁気的超解像を実現するものである。この方法で
は、再生層の磁化を予め一方向に揃えておく等の操作を
必要とせずに、光の回折限界以下の周期の信号が再生可
能となる。On the other hand, the present inventor first tried a magneto-optical recording medium capable of realizing magnetic super-resolution without applying a reproducing magnetic field and a reproducing method of a magneto-optical recording medium using the medium. As shown in FIG. 2, a magnetic film (reproducing layer) having a magnetization oriented in-plane at room temperature and a perpendicular orientation at high temperature, and a magnetic layer having perpendicular magnetic anisotropy (recording layer).
By using a two-layered medium in which a magnetic layer and a magnetic layer are stacked, only the high temperature portion of the light spot becomes a perpendicular magnetization film during reproduction, and the magnetization information of the recording layer is transferred. It realizes resolution. According to this method, it is possible to reproduce a signal having a period equal to or shorter than the diffraction limit of light without the need to perform an operation such as previously aligning the magnetization of the reproducing layer in one direction.
【0009】しかしながら、このような面内磁化膜を用
いた2層構造の超解像光磁気記録媒体においては、室温
で面内異方性を大きくすると記録層の磁化情報を十分マ
スクできるが、再生温度において完全な垂直磁化膜とす
ることは難しい。例えば、RE(希土類)リッチの重希
土類−鉄族遷移金属合金を再生層に用いた場合、キュリ
ー温度が低下しないようにCo添加量を上げるとともに
希土類元素の割合を増やして室温でのMsを大きくし、
面内異方性を高めると、それに応じて補償温度が高くな
って、再生温度においてMsが十分小さくならず完全な
垂直磁化膜にならない。However, in a super-resolution magneto-optical recording medium having a two-layer structure using such an in-plane magnetized film, if the in-plane anisotropy is increased at room temperature, the magnetization information of the recording layer can be sufficiently masked, but the reproduction temperature However, it is difficult to obtain a perfect perpendicular magnetization film. For example, when a RE (rare earth) -rich heavy rare earth-iron group transition metal alloy is used for the regeneration layer, the amount of Co added is increased and the ratio of rare earth elements is increased to increase the Ms at room temperature so that the Curie temperature does not decrease. Then
If the in-plane anisotropy is increased, the compensation temperature will be increased accordingly, and Ms will not be sufficiently small at the reproduction temperature to form a perfect perpendicular magnetization film.
【0010】逆に、室温での面内異方性を小さくする
と、再生温度において完全な垂直磁化膜となるが、室温
では再生層と記録層の間に生じた界面磁壁は、図3のよ
うに主として再生層側に生じる。すなわち、再生層のう
ち記録層に近い部分に記録層の磁化情報にならった垂直
方向の磁化成分ができる。従って、記録層の磁化情報を
再生層で完全にマスクすることは難しい。On the contrary, if the in-plane anisotropy at room temperature is made small, a perfect perpendicular magnetization film is obtained at the reproducing temperature, but at room temperature, the interface domain wall formed between the reproducing layer and the recording layer is as shown in FIG. Occurs mainly on the reproduction layer side. That is, in the portion of the reproducing layer near the recording layer, a magnetization component in the perpendicular direction is created according to the magnetization information of the recording layer. Therefore, it is difficult to completely mask the magnetization information of the recording layer in the reproducing layer.
【0011】従って、上述の面内磁化膜を用いた2層構
造の超解像光磁気記録媒体では、記録マーク長やトラッ
ク幅を短くした場合に、良好な再生信号を得ることは容
易ではなかった。Therefore, in the two-layer super-resolution magneto-optical recording medium using the in-plane magnetized film, it is not easy to obtain a good reproduction signal when the recording mark length or track width is shortened.
【0012】そこで、本発明の目的は、上記課題に鑑
み、上述の面内磁化膜型超解像媒体をさらに改良し、室
温から再生ビームスポット内の高温部に至るまでの温度
において記録層の磁化情報をより完全にマスクし、かつ
スポットの高温部においては記録情報を十分に再生可能
とすることで、線記録密度やトラック密度の向上などの
さらなる特性向上を図ることにある。Therefore, in view of the above-mentioned problems, an object of the present invention is to further improve the above-mentioned in-plane magnetized film type super-resolution medium, so that the recording layer can be formed at a temperature from room temperature to a high temperature portion in the reproducing beam spot. By further completely masking the magnetization information and allowing the recorded information to be sufficiently reproduced in the high temperature portion of the spot, it is intended to further improve the characteristics such as the linear recording density and the track density.
【0013】[0013]
【課題を解決するための手段】本発明は、(1)少なく
とも光の入射側から第1磁性層、第3磁性層および第2
磁性層の順序で基板上に積層されて成り、第1磁性層が
室温で面内磁化膜であって室温と第3磁性層のキュリー
温度の間で垂直磁化膜となる温度を有する磁性層であ
り、第2磁性層が垂直磁化膜であり、第3磁性層のキュ
リー温度は第1磁性層および第2磁性層のいずれのキュ
リー温度よりも低く、第3磁性層の室温での面内異方性
が第1磁性層の室温での面内異方性より大きいことを特
徴とし、特に磁性層の室温での飽和磁化が第1磁性層の
室温での飽和磁化より大きい光磁気記録媒体、ならびに
(2)その光磁気記録媒体を用い、第1磁性層および第
3磁性層に光スポットを照射することによって、光スポ
ット内の一部を垂直磁化膜として、第2磁性層の情報に
応じた磁化方向に対して安定な方向に配向させ、光スポ
ットの反射光の磁気光学効果変化により情報再生を行う
情報再生方法を提供する。The present invention includes (1) at least a first magnetic layer, a third magnetic layer, and a second magnetic layer from the light incident side.
A magnetic layer formed by stacking magnetic layers in this order on the substrate, wherein the first magnetic layer is an in-plane magnetized film at room temperature and has a temperature that becomes a perpendicular magnetized film between room temperature and the Curie temperature of the third magnetic layer. The second magnetic layer is a perpendicular magnetization film, the Curie temperature of the third magnetic layer is lower than the Curie temperature of both the first magnetic layer and the second magnetic layer, and the in-plane variation of the third magnetic layer at room temperature is different. A magneto-optical recording medium, characterized in that the magnetic anisotropy is larger than the in-plane anisotropy of the first magnetic layer at room temperature, and in particular the saturation magnetization of the magnetic layer at room temperature is larger than the saturation magnetization of the first magnetic layer at room temperature, And (2) by using the magneto-optical recording medium, irradiating a light spot on the first magnetic layer and the third magnetic layer to form a part of the light spot as a perpendicularly magnetized film according to the information of the second magnetic layer. The magnetic field of the reflected light of the light spot by orienting it in a stable direction with respect to the magnetization direction. Providing information reproducing method reproducing information by Manabu effect change.
【0014】以下、図面を用いて本発明の光磁気記録媒
体およびその媒体を用いた情報記録再生方法について詳
細に説明する。以下、簡便のため、第1磁性層を再生
層、第2磁性層を記録層、第3磁性層を中間層と称して
扱う。従って、本発明の光磁気記録媒体の磁性層の基本
構成は図1に示すように、再生層、中間層および記録層
を積層してなるものである。The magneto-optical recording medium of the present invention and the information recording / reproducing method using the medium will be described below in detail with reference to the drawings. Hereinafter, for the sake of simplicity, the first magnetic layer is referred to as a reproducing layer, the second magnetic layer is referred to as a recording layer, and the third magnetic layer is referred to as an intermediate layer. Therefore, as shown in FIG. 1, the basic structure of the magnetic layer of the magneto-optical recording medium of the present invention is a lamination of a reproducing layer, an intermediate layer and a recording layer.
【0015】再生層の材料としては、例えば、GdFeCo,
GdCo, GdTbFeCo, GdDyFeCoなどの希土類−鉄族非晶質合
金が望ましい。また、再生時に十分な磁気光学効果を得
るために再生層のキュリー温度は高いことが必要で、好
ましくは250℃、より好ましくは300℃以上とす
る。また、短波長光に対する再生出力を向上させるなど
の目的で、Nd, Sm, Pr等の軽希土類元素を添加してもよ
い。As the material of the reproducing layer, for example, GdFeCo,
Rare earth-iron group amorphous alloys such as GdCo, GdTbFeCo and GdDyFeCo are desirable. Further, the Curie temperature of the reproducing layer is required to be high in order to obtain a sufficient magneto-optical effect during reproduction, and is preferably 250 ° C., more preferably 300 ° C. or higher. Further, a light rare earth element such as Nd, Sm or Pr may be added for the purpose of improving the reproduction output for short wavelength light.
【0016】中間層の材料としては、例えば、GdFeCo,
GdCo, GdTbFeCo, GdDyFeCoなどの希土類−鉄族非晶質合
金が望ましい。中間層のキュリー温度は室温以上であっ
て、望ましくは100℃以上250℃以下、より好まし
くは130℃以上210℃以下である。Examples of the material for the intermediate layer include GdFeCo,
Rare earth-iron group amorphous alloys such as GdCo, GdTbFeCo and GdDyFeCo are desirable. The Curie temperature of the intermediate layer is room temperature or higher, preferably 100 ° C. or higher and 250 ° C. or lower, and more preferably 130 ° C. or higher and 210 ° C. or lower.
【0017】記録層としては、垂直磁気異方性が大きく
安定に磁化状態を保持できるもの、例えばTbFeCo, DyFe
Co, TbDyFeCoなどの希土類−鉄族元素非晶質合金;ガー
ネット;Pt/Co, Pd/Coなどの白金族−鉄族周期構造膜;
PtCo, PdCoなどの白金族−鉄族合金などが望ましい。The recording layer has a large perpendicular magnetic anisotropy and can maintain a stable magnetization state, such as TbFeCo and DyFe.
Rare earth-iron group element amorphous alloy such as Co and TbDyFeCo; garnet; platinum group-iron group periodic structure film such as Pt / Co and Pd / Co;
Platinum group-iron group alloys such as PtCo and PdCo are preferable.
【0018】記録層は、なるべく低いレーザーパワーで
記録でき、室温および再生温度においては安定的に記録
磁区が保持できることが少なくとも必要である。このた
めには、垂直磁気異方性が大きく、キュリー温度は低い
ことが望ましいが、キュリー温度は再生温度以上としな
ければならない。It is at least necessary that the recording layer can record with a laser power as low as possible and can stably hold the recording magnetic domain at room temperature and reproducing temperature. For this purpose, it is desirable that the perpendicular magnetic anisotropy is large and the Curie temperature is low, but the Curie temperature must be higher than the reproducing temperature.
【0019】再生層は、室温で面内磁化膜であって高温
では垂直磁化膜となることが必要である。このために
は、例えば再生層にフェリ磁性である重希土類鉄族遷移
金属合金を用いて、補償温度が室温とキュリー温度の間
にあり、Msが図4に示したように室温では大きく再生
温度では小さいものを用いればよい。なお、GdFeCoを再
生層に用いた場合、Gd量は望ましくは22〜38%、よ
り望ましくは25〜35%とする。The reproducing layer must be an in-plane magnetized film at room temperature and a perpendicular magnetized film at high temperature. For this purpose, for example, a ferrimagnetic heavy rare earth iron group transition metal alloy is used for the reproducing layer, the compensation temperature is between room temperature and the Curie temperature, and Ms is large at room temperature as shown in FIG. Then you can use a smaller one. When GdFeCo is used for the reproducing layer, the Gd content is preferably 22 to 38%, more preferably 25 to 35%.
【0020】すなわち、一般に磁性薄膜の飽和磁化をM
s、垂直磁気異方性エネルギーをKuとしたとき、下記
式Iで定義される実効的垂直磁気異方性定数K⊥によ
り、磁化の主な向きが決定されることが知られている。
K⊥が正の場合は垂直磁化膜、負の場合には面内磁化膜
となり、絶対値は異方性の強さを示す。つまり、例えば
面内異方性が大きいということは、K⊥が負であってそ
の絶対値が大きいことを意味する。That is, in general, the saturation magnetization of a magnetic thin film is M
It is known that the main direction of magnetization is determined by the effective perpendicular magnetic anisotropy constant K⊥ defined by the following formula I, where s and the perpendicular magnetic anisotropy energy are Ku.
When K⊥ is positive, it is a perpendicular magnetic film, and when it is negative, it is an in-plane magnetic film, and the absolute value shows the strength of anisotropy. That is, for example, a large in-plane anisotropy means that K⊥ is negative and its absolute value is large.
【0021】[0021]
【数1】K⊥=Ku−2πMs2 ・・・(I) 図5で示したように、再生層では、温度がTth以下の低
温部においてはMsが大きいため、K⊥は負であって面
内磁化膜である。しかし、再生時には温度上昇すること
から、Msは小さくなり、その結果2πMs2は急激に
小さくなって、垂直磁気異方性エネルギーKuとの大小
関係が逆転して(逆転する温度をTrとする)、K⊥は
正となり垂直磁化膜となる。補償温度とキュリー温度の
差が大きいほどK⊥の変化量が大きくなって面内から垂
直への磁化方向の転移を急峻にすることができる。[Expression 1] K⊥ = Ku−2πMs 2 (I) As shown in FIG. 5, K⊥ is negative because Ms is large in the low temperature portion where the temperature is Tth or lower in the reproducing layer. It is an in-plane magnetized film. However, since the temperature rises during reproduction, Ms becomes smaller, and as a result, 2πMs 2 becomes sharply smaller, and the magnitude relationship with the perpendicular magnetic anisotropy energy Ku is reversed (the reversing temperature is Tr). , K⊥ becomes positive and becomes a perpendicular magnetization film. The larger the difference between the compensation temperature and the Curie temperature, the larger the amount of change in K⊥ and the steeper the transition of the magnetization direction from in-plane to perpendicular.
【0022】また、上記のKuは、他の磁性膜と積層し
た場合、見かけ上変化する。これは、積層した他の磁性
層からの交換結合力、静磁結合力等の磁気的結合力が作
用するからである。例えば、垂直磁化膜と積層した場
合、Kuは見かけ上大きくなり、面内磁化膜と積層した
場合は見かけ上小さくなる。Further, the above Ku changes apparently when laminated with another magnetic film. This is because magnetic coupling forces such as exchange coupling force and magnetostatic coupling force from other stacked magnetic layers act. For example, when it is laminated with the perpendicular magnetization film, Ku is apparently large, and when it is laminated with the in-plane magnetization film, it is apparently small.
【0023】本発明の光磁気記録媒体では、再生層と記
録層の間に中間層が設けられている。この中間層は室温
で再生層より面内磁気異方性が大きい面内磁化膜であ
り、再生温度では垂直磁気異方性を持つかあるいは面内
磁気異方性が小さい磁性膜である。In the magneto-optical recording medium of the present invention, an intermediate layer is provided between the reproducing layer and the recording layer. This intermediate layer is an in-plane magnetized film having a larger in-plane magnetic anisotropy than the reproducing layer at room temperature, and a magnetic film having perpendicular magnetic anisotropy or smaller in-plane magnetic anisotropy at the reproducing temperature.
【0024】このため室温で、再生層の見かけ上のKu
は小さくなり、また図6(a)に示したように再生層と
記録層との間に生じる界面磁壁の大部分は中間層に生じ
るため、安定的に面内磁化膜となる。よって、記録層の
磁化情報をより完全にマスクすることができる。また、
再生温度では、図6(b)に示すように、再生層は安定
的に垂直磁化膜となり記録層の磁化情報を十分に再生す
ることが可能となる。Therefore, at room temperature, the apparent Ku of the reproduction layer is
Is small, and most of the interface domain wall generated between the reproducing layer and the recording layer is generated in the intermediate layer as shown in FIG. 6A, so that the in-plane magnetized film is stably formed. Therefore, the magnetization information of the recording layer can be masked more completely. Also,
At the reproducing temperature, as shown in FIG. 6B, the reproducing layer stably becomes a perpendicular magnetization film, and it becomes possible to sufficiently reproduce the magnetization information of the recording layer.
【0025】中間層の室温での面内異方性は、再生層の
室温での面内異方性より大きい。また、面内異方性を大
きくするためには、例えば室温でのMsを大きくすると
よい。また、Coなどの面内異方性を向上させる元素を
加えるなど、垂直異方性エネルギーKuを小さくするか
もしくは負の値(面内異方性を持つ)を持たせてもよ
い。中間層をGdFeを主成分とする場合、Gdは望ましくは
35〜50%、より望ましくは40〜47%とする。The in-plane anisotropy of the intermediate layer at room temperature is larger than the in-plane anisotropy of the reproducing layer at room temperature. To increase the in-plane anisotropy, for example, Ms at room temperature may be increased. Further, the perpendicular anisotropy energy Ku may be reduced or a negative value (having in-plane anisotropy) may be given by adding an element such as Co that improves in-plane anisotropy. When the intermediate layer contains GdFe as a main component, Gd is preferably 35 to 50%, more preferably 40 to 47%.
【0026】また、中間層は磁気光学効果に寄与する必
要はないので、キュリー温度を低く設定しても再生特性
を劣化させることはない。よって、中間層の再生温度に
おける垂直磁気異方性を高めるためには、例えば中間層
のキュリー温度を再生層のキュリー温度より低くして、
再生温度において十分Msが小さくなるようにすればよ
い。Al, Si, Cuなどの非磁性元素を添加したり、Co含
有量を小さくすれば、キュリー温度を低くすることがで
きる。Since the intermediate layer does not have to contribute to the magneto-optical effect, the reproducing characteristic is not deteriorated even if the Curie temperature is set low. Therefore, in order to increase the perpendicular magnetic anisotropy at the reproducing temperature of the intermediate layer, for example, the Curie temperature of the intermediate layer is made lower than the Curie temperature of the reproducing layer,
It suffices that Ms be sufficiently small at the reproduction temperature. The Curie temperature can be lowered by adding a non-magnetic element such as Al, Si or Cu or by reducing the Co content.
【0027】中間層が再生温度においてそれ自体が垂直
磁気異方性を有しない場合でも、記録層および垂直磁気
異方性を帯びるようになった再生層からの磁気的結合力
により、中間層に垂直磁気異方性を持たせることがで
き、再生層に記録層の磁化情報を伝えることが可能であ
る。Even if the intermediate layer itself does not have perpendicular magnetic anisotropy at the reproducing temperature, the magnetic coupling force from the recording layer and the reproducing layer which has become perpendicular magnetic anisotropy causes the intermediate layer to form an intermediate layer. Perpendicular magnetic anisotropy can be imparted, and the magnetization information of the recording layer can be transmitted to the reproducing layer.
【0028】中間層の膜厚は、室温から再生温度に至る
までに面内磁化膜である再生層と垂直磁化膜である記録
層との間の磁壁部分となる程度以上の膜厚であればよ
い。一方、中間層の膜厚が大き過ぎると、磁性層の全膜
厚が大きくなり、高い記録パワーが必要となるので好ま
しくない。従って、中間層の膜厚は望ましくは20Å以
上200Å以下であり、50Å以上150Å以下がより
望ましい。The thickness of the intermediate layer is not less than the thickness of the domain wall between the reproducing layer which is the in-plane magnetized film and the recording layer which is the perpendicular magnetized film from room temperature to the reproducing temperature. Good. On the other hand, if the film thickness of the intermediate layer is too large, the total film thickness of the magnetic layer becomes large, and high recording power is required, which is not preferable. Therefore, the thickness of the intermediate layer is preferably 20 Å or more and 200 Å or less, and more preferably 50 Å or more and 150 Å or less.
【0029】本発明の光磁気記録媒体では、上述の特性
を持つ中間層を設けているため、再生層と記録層を直接
積層した場合と比較して、再生層の磁化を室温で面内に
配向させることが容易である。Since the magneto-optical recording medium of the present invention is provided with the intermediate layer having the above characteristics, the magnetization of the reproducing layer is in-plane at room temperature as compared with the case where the reproducing layer and the recording layer are directly laminated. Easy to orient.
【0030】再生層、中間層、記録層のキュリー温度を
それぞれT1、T2、T3とし、再生層の補償温度をT
complとし、再生層、中間層および記録層の飽和磁化を
M1、M 3およびM2とし、実効的垂直磁気異方性定数を
それぞれK⊥1、K⊥3およびK⊥ 2、垂直磁気異方性エ
ネルギーをKu1、Ku3およびKu2とする。ここで、
上記式IよりK⊥i(i=1,2または3)は次式II
によって表わされる。The Curie temperatures of the reproducing layer, the intermediate layer and the recording layer are
Each T1, T2, T3And the compensation temperature of the reproducing layer is T
complThe saturation magnetization of the reproducing layer, intermediate layer and recording layer.
M1, M 3And M2And the effective perpendicular magnetic anisotropy constant
K⊥ for each1, K⊥3And K⊥ 2, Perpendicular magnetic anisotropy
Ku the energy1, Ku3And Ku2And here,
From the above formula I, K⊥i(I = 1, 2 or 3) is represented by the following formula II
Represented by
【0031】[0031]
【数2】K⊥i=Kui−2πMsi 2 ・・・(II) 本発明の光磁気記録媒体においては、室温で下記式II
Iが成立している。[Number 2] K⊥ i = Ku i -2πMs in i 2 · · · (II) a magneto-optical recording medium of the present invention, the following formula II at room temperature
I is established.
【0032】[0032]
【数3】K⊥3<K⊥1<<K⊥2 ・・・(III) このような関係を満たすための条件としては例えば、室
温において下記式IVおよびVが成り立つことが挙げら
れる。[Formula 3] K⊥ 3 <K⊥ 1 << K⊥ 2 (III) As a condition for satisfying such a relationship, for example, the following formulas IV and V are satisfied at room temperature.
【0033】[0033]
【数4】Ms1<Ms3 ・・・(IV)[Equation 4] Ms 1 <Ms 3 (IV)
【0034】[0034]
【数5】Ms2<Ms3 ・・・(V) また、キュリー温度には、次式VIのような関係がある
ことが必要である。## EQU5 ## Ms 2 <Ms 3 (V) Further, it is necessary that the Curie temperature has a relationship represented by the following formula VI.
【0035】[0035]
【数6】 RT(室温)<Tc3<<Tc1 ・・・(VI) なお、本発明の光磁気記録媒体は基本的に3層の磁性層
構成を有するが、さらに特性を改善したり生産性を向上
させる目的で、他の磁性層を設けても良い。また、干渉
効果や保護性能を高めるために、誘電体層や金属層など
を設けても良い。また、熱伝導を高めるために、金属の
熱伝導体層を設けても良い。## EQU6 ## RT (room temperature) <Tc 3 << Tc 1 ... (VI) The magneto-optical recording medium of the present invention basically has a three-layer magnetic layer structure, but the characteristics are further improved. Another magnetic layer may be provided for the purpose of improving productivity. Further, a dielectric layer, a metal layer, or the like may be provided in order to enhance the interference effect and the protection performance. Further, a metal heat conductor layer may be provided to enhance heat conduction.
【0036】また、磁性層各層には、Cr, Ti, Taなどの
元素を少量加えて、耐食性を高めることもできる。Further, a small amount of elements such as Cr, Ti and Ta may be added to each layer of the magnetic layer to enhance the corrosion resistance.
【0037】以下に、本発明の再生プロセスの原理を説
明する。The principle of the regeneration process of the present invention will be described below.
【0038】まず本発明の光磁気記録媒体の記録層に、
図7に示すようにデータ信号を記録する。記録は、記録
層がキュリー温度近傍になるようなパワーのレーザー光
を照射しながら外部磁界を変調して行うか、もしくは、
磁化を初期化層や初期化磁界を用いて一方向に揃えて消
去した後、記録方向に磁界を印加しながらレーザーパワ
ーを変調してオーバーライトを行う。First, in the recording layer of the magneto-optical recording medium of the present invention,
The data signal is recorded as shown in FIG. Recording is performed by modulating an external magnetic field while irradiating a laser beam with a power such that the recording layer is near the Curie temperature, or
After the magnetization is aligned and erased in one direction using an initialization layer or an initialization magnetic field, laser power is modulated while applying a magnetic field in the recording direction to perform overwriting.
【0039】その際、光スポット内の所定領域のみが記
録層のキュリー温度近傍になるように記録媒体の線速度
を考慮してレーザー光の強度を決定すれば、光スポット
の径以下の記録磁区が形成でき、その結果、光の回折限
界以下の周期の信号を記録できる。At this time, if the intensity of the laser beam is determined in consideration of the linear velocity of the recording medium so that only a predetermined region within the light spot is near the Curie temperature of the recording layer, the recording magnetic domain not larger than the diameter of the light spot. Can be formed, and as a result, a signal having a period equal to or shorter than the diffraction limit of light can be recorded.
【0040】データ再生時には、媒体に再生レーザー光
を連続照射して、媒体からの反射光を検知する。このと
き、レーザー照射部位の温度が上昇し、媒体上の温度分
布は媒体の移動方向に延びた形状となり、光スポット内
の一部が高温となった温度分布となる。At the time of data reproduction, the medium is continuously irradiated with a reproduction laser beam to detect light reflected from the medium. At this time, the temperature of the laser irradiation portion rises, the temperature distribution on the medium has a shape extending in the moving direction of the medium, and the temperature distribution is such that a part of the light spot has a high temperature.
【0041】すなわち、再生時のレーザー光の強度を図
8(c)で示される光スポットの一部が面内磁化膜から
垂直磁化膜に転移する温度Tth以上となるように設定す
れば、図8(b)のように再生層および中間層は光スポ
ットの一部が垂直磁化膜(アパーチャー領域)となり、
他の部分は面内磁化膜(マスク領域)のままという状態
が実現する。なお、この時再生層と記録層との間に生じ
る界面磁壁の大部分は中間層に生じるため、再生層は安
定的に面内磁化膜となる。垂直磁化膜となった再生層
は、中間層を介して記録層と交換結合によって磁気的に
結合されることから、記録層の信号が再生層に転写され
る。転写された磁気信号は、再生層の磁気光学効果(カ
ー回転角あるいはファラデー回転角)によって光学信号
に変換されて検出される。That is, if the intensity of the laser beam during reproduction is set to be equal to or higher than the temperature Tth at which a part of the light spot shown in FIG. 8C is transferred from the in-plane magnetized film to the perpendicular magnetized film, As shown in 8 (b), in the reproducing layer and the intermediate layer, a part of the light spot becomes a perpendicular magnetization film (aperture region),
A state in which other portions remain as in-plane magnetized films (mask regions) is realized. At this time, most of the interface domain wall generated between the reproducing layer and the recording layer is generated in the intermediate layer, so that the reproducing layer stably becomes an in-plane magnetized film. The reproducing layer, which has become a perpendicularly magnetized film, is magnetically coupled to the recording layer through exchange coupling via the intermediate layer, so that the signal of the recording layer is transferred to the reproducing layer. The transferred magnetic signal is converted into an optical signal by the magneto-optical effect (Kerr rotation angle or Faraday rotation angle) of the reproducing layer and detected.
【0042】このように、図8(a)で示される光スポ
ットの高温部の面積は、レーザー光の設定強度によって
決定できることを考慮すれば、記録層に記録された光の
回折限界以下の周期の信号の各記録マーク単位で再生層
に転写することができ、その結果、光の回折限界以下の
周期の信号も符号間干渉なく再生できる。Thus, considering that the area of the high temperature portion of the light spot shown in FIG. 8A can be determined by the set intensity of the laser light, the period of the light recorded in the recording layer is equal to or less than the diffraction limit. It is possible to transfer the above signal to the reproducing layer in units of each recording mark, and as a result, it is possible to reproduce a signal having a period less than the diffraction limit of light without intersymbol interference.
【0043】さらに、再生に際して再生トラックと隣接
トラックとの境界での温度TtがTt<Tthとなるよう
な温度分布を持つようにしておけば、隣接トラックの再
生層が垂直磁化膜とならず、隣接トラックの記録層に記
録された信号が再生層に転写されることなく、クロスト
ークは解消され、トラック密度を向上させることができ
る。その様子を図9に示した。Further, if the temperature distribution at the boundary between the reproduction track and the adjacent track is Tt <Tth during reproduction, the reproduction layer of the adjacent track does not become a perpendicular magnetic film. Crosstalk can be eliminated and the track density can be improved without the signal recorded in the recording layer of the adjacent track being transferred to the reproducing layer. The situation is shown in FIG.
【0044】なお、上述の説明では、再生層と記録層が
交換相互作用によって磁気的に結合する場合を述べた
が、再生時に記録層と再生層が静磁結合によって磁気的
に結合されるようにしてもよい。In the above description, the case where the reproducing layer and the recording layer are magnetically coupled by the exchange interaction has been described. However, the recording layer and the reproducing layer may be magnetically coupled by magnetostatic coupling during reproduction. You may
【0045】また、媒体の熱伝導率が比較的大きい場合
には、温度プロファイルの中心は光スポットの中心に近
付き、図10のように光スポットの中心に近い部分はア
パーチャー領域となる。この場合も同様に隣接トラック
とのクロストークは解消される。Further, when the thermal conductivity of the medium is relatively high, the center of the temperature profile approaches the center of the light spot, and the portion near the center of the light spot becomes the aperture region as shown in FIG. Also in this case, the crosstalk with the adjacent track is similarly eliminated.
【0046】[0046]
【実施例】以下に実施例によって本発明をさらに具体的
に説明するが、本発明はそれら実施例により限定される
ものではない。The present invention will be described in more detail with reference to the following examples, but the present invention is not limited to these examples.
【0047】(実施例1)直流マグネトロンスパッタリ
ング装置に、Si、Gd、Tb、Fe、Coの各ターゲ
ットを取り付け、直径130mmのガラス基板およびプ
リグルーブ付きのポリカーボネート基板をターゲットか
らの距離が150mmとなる位置に設置された基板ホル
ダーに固定した後、1×10-5Pa以下の高真空になる
までチャンバー内をクライオポンプで真空排気した。Example 1 A target of Si, Gd, Tb, Fe, and Co was attached to a DC magnetron sputtering apparatus, and a glass substrate having a diameter of 130 mm and a polycarbonate substrate with a pre-groove were placed at a distance of 150 mm from the target. After fixing to the substrate holder installed at the position, the inside of the chamber was evacuated by a cryopump until a high vacuum of 1 × 10 −5 Pa or less was obtained.
【0048】真空排気をしながらArガスを0.4Pa
となるまでチャンバー内に導入した後、SiN誘電体層
を900Å、GdFeCo再生層を400Å、GdFe
中間層を100Å、TbFeCo記録層を300Å、S
iN保護層を700Å、この順に成膜して図11の構成
のサンプルを得た。各SiN層成膜時にはArガスに加
えてN2ガスを導入し、直流反応性スパッタによって成
膜し、屈折率が2.1となるようにArガスとN2ガス
の混合比を調節した。Ar gas was supplied to 0.4 Pa while evacuating.
After being introduced into the chamber, the SiN dielectric layer is 900Å, the GdFeCo reproducing layer is 400Å, and GdFe is
Intermediate layer is 100Å, TbFeCo recording layer is 300Å, S
An iN protective layer was deposited in the order of 700 Å to obtain a sample having the structure shown in FIG. At the time of forming each SiN layer, N 2 gas was introduced in addition to Ar gas, and the film was formed by direct current reactive sputtering, and the mixing ratio of Ar gas and N 2 gas was adjusted so that the refractive index was 2.1.
【0049】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化Msは160emu/cc、補償温
度は205℃、キュリー温度は300℃以上となるよう
に設定した。The composition of the GdFeCo reproducing layer is RE at room temperature.
The rich saturation magnetization Ms was set to 160 emu / cc, the compensation temperature was set to 205 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0050】GdFe中間層の組成は、室温でTMリッ
チでMsは450emu/cc、キュリー温度は205
℃となるように設定した。The composition of the GdFe intermediate layer is TM rich at room temperature, Ms is 450 emu / cc, and Curie temperature is 205.
The temperature was set to be ° C.
【0051】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化Msは200emu/cc、キュリ
ー温度は220℃となるように設定した。The composition of the TbFeCo recording layer is TM at room temperature.
The rich saturation magnetization Ms was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0052】このようにしてガラス基板上に成膜した試
料に、830nmの半導体レーザーをガラス基板側から
照射してカー回転角(θK)の外部磁界依存性を測定し
た。測定は、室温から約200℃まで試料を加熱して行
った。外部磁界ゼロの時のカー回転角(残留カー回転
角;θK R)の温度依存性を図12のグラフにおいて
(A)の曲線で示した。その図12より、室温から14
0℃付近までθK Rはゼロであり、かつ急激にθK Rが大き
くなることがわかる。The sample thus formed on the glass substrate was irradiated with a semiconductor laser of 830 nm from the glass substrate side, and the external magnetic field dependence of the Kerr rotation angle (θ K ) was measured. The measurement was performed by heating the sample from room temperature to about 200 ° C. The temperature dependence of the Kerr rotation angle (residual Kerr rotation angle; θ K R ) when the external magnetic field is zero is shown by the curve (A) in the graph of FIG. From that figure, it can be seen
It can be seen that θ K R is zero up to around 0 ° C., and θ K R rapidly increases.
【0053】次に、この光磁気記録媒体を用いて記録再
生特性を測定した。評価装置の対物レンズのN.A.は
0.55、レーザー波長は780nm、記録パワーは7
〜13mW、再生パワーは2.5〜3.5mWの範囲内
で、C/N比が最も高くなるように設定した。線速度は
9m/sとした。Next, the recording / reproducing characteristics were measured using this magneto-optical recording medium. N.V. of the objective lens of the evaluation device. A. Is 0.55, laser wavelength is 780 nm, recording power is 7
.About.13 mW and reproducing power within the range of 2.5 to 3.5 mW, and the C / N ratio was set to be the highest. The linear velocity was 9 m / s.
【0054】まず記録層に5〜15MHzのキャリア信
号を記録して、C/N比の記録マーク長依存性を調べ
た。次に、クロストークの測定を行った。クロストーク
は、マーク長1.6μmの信号を記録したランド部の再
生信号と隣接グルーブ部の再生信号との差として表わし
た。結果を表1に示した。First, a carrier signal of 5 to 15 MHz was recorded on the recording layer, and the dependency of the C / N ratio on the recording mark length was examined. Next, the crosstalk was measured. The crosstalk is expressed as the difference between the reproduction signal of the land portion in which a signal having a mark length of 1.6 μm is recorded and the reproduction signal of the adjacent groove portion. The results are shown in Table 1.
【0055】(実施例2)実施例1と同様の装置および
方法で、ポリカーボネート基板上にSiN誘電体層を9
00Å、GdFeCo再生層を400Å、GdFe中間
層を120Å、TbFeCo記録層を300Å、SiN
保護層を700Å、この順に成膜して図11の構成のサ
ンプルを得た。Example 2 Using the same apparatus and method as in Example 1, a SiN dielectric layer was formed on a polycarbonate substrate by using
00Å, GdFeCo reproducing layer 400Å, GdFe intermediate layer 120Å, TbFeCo recording layer 300Å, SiN
A protective layer of 700 Å was formed in this order to obtain a sample having the structure of FIG. 11.
【0056】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化Msは180emu/cc、補償温
度は220℃、キュリー温度は300℃以上となるよう
に設定した。The composition of the GdFeCo reproducing layer is RE at room temperature.
The rich saturation magnetization Ms was set to 180 emu / cc, the compensation temperature was set to 220 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0057】GdFe中間層の組成は、室温でREリッ
チでMsは390emu/cc、キュリー温度は210
℃となるように設定した。The composition of the GdFe intermediate layer was RE-rich at room temperature, Ms was 390 emu / cc, and Curie temperature was 210.
The temperature was set to be ° C.
【0058】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化Msは200emu/cc、キュリ
ー温度は220℃となるように設定した。The composition of the TbFeCo recording layer was TM at room temperature.
The rich saturation magnetization Ms was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0059】次に、実施例1と同様に記録再生特性を評
価した。結果を表1に示した。Next, the recording / reproducing characteristics were evaluated in the same manner as in Example 1. The results are shown in Table 1.
【0060】(実施例3)実施例1と同様の装置および
方法で、ポリカーボネート基板上にSiN誘電体層を9
00Å、GdFeCo再生層を400Å、GdFe中間
層を80Å、TbFeCo記録層を300Å、SiN保
護層を700Å、この順に成膜して図11の構成のサン
プルを得た。(Embodiment 3) A SiN dielectric layer is formed on a polycarbonate substrate by the same apparatus and method as in Embodiment 1.
00Å, 400 Å GdFeCo reproducing layer, 80 Å GdFe intermediate layer, 300 Å TbFeCo recording layer, and 700 Å SiN protective layer were deposited in this order to obtain a sample having the structure shown in FIG. 11.
【0061】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化Msは130emu/cc、補償温
度は188℃、キュリー温度は300℃以上となるよう
に設定した。The composition of the GdFeCo reproducing layer is RE at room temperature.
The rich saturation magnetization Ms was set to 130 emu / cc, the compensation temperature was set to 188 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0062】GdFe中間層の組成は、室温でREリッ
チでMsは540emu/cc、キュリー温度は200
℃となるように設定した。The composition of the GdFe intermediate layer is RE-rich at room temperature, Ms is 540 emu / cc, and Curie temperature is 200.
The temperature was set to be ° C.
【0063】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化Msは200emu/cc、キュリ
ー温度は220℃となるように設定した。The composition of the TbFeCo recording layer was TM at room temperature.
The rich saturation magnetization Ms was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0064】次に、実施例1と同様に記録再生特性を評
価した。結果を表1に示した。Next, the recording / reproducing characteristics were evaluated in the same manner as in Example 1. The results are shown in Table 1.
【0065】(実施例4)実施例1と同様の装置および
方法で、ポリカーボネート基板上にSiN誘電体層を9
00Å、GdFeCo再生層を400Å、GdFe中間
層を90Å、TbFeCo記録層を300Å、SiN保
護層を700Å、この順に成膜して図11の構成のサン
プルを得た。(Embodiment 4) A SiN dielectric layer is formed on a polycarbonate substrate by the same apparatus and method as in Embodiment 1.
A sample having the structure shown in FIG. 11 was obtained by sequentially depositing 00Å, a GdFeCo reproducing layer of 400Å, a GdFe intermediate layer of 90Å, a TbFeCo recording layer of 300Å and a SiN protective layer of 700Å.
【0066】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化Msは130emu/cc、補償温
度は188℃、キュリー温度は300℃以上となるよう
に設定した。The composition of the reproduction layer of GdFeCo is RE at room temperature.
The rich saturation magnetization Ms was set to 130 emu / cc, the compensation temperature was set to 188 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0067】GdFe中間層の組成は、室温でREリッ
チで、Msは480emu/cc、キュリー温度は21
5℃となるように設定した。The composition of the GdFe intermediate layer is RE-rich at room temperature, Ms is 480 emu / cc, and Curie temperature is 21.
The temperature was set to 5 ° C.
【0068】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化Msは200emu/cc、キュリ
ー温度は220℃となるように設定した。The composition of the TbFeCo recording layer was TM at room temperature.
The rich saturation magnetization Ms was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0069】次に、実施例1と同様に記録再生特性を評
価した。結果を表1に示した。Next, the recording / reproducing characteristics were evaluated in the same manner as in Example 1. The results are shown in Table 1.
【0070】(比較例1)実施例1と同様の装置および
方法で、ガラス基板上にSiN誘電体層を900Å、G
dFeCo再生層を400Å、TbFeCo記録層を4
00Å、SiN保護層を700Å、この順に成膜して図
13の構成の光磁気記録媒体を得た。各SiN層の屈折
率は2.1とした。(Comparative Example 1) Using the same apparatus and method as in Example 1, a SiN dielectric layer of 900 Å, G
400 Å dFeCo reproducing layer and 4 TbFeCo recording layer
00Å and a SiN protective layer of 700Å were deposited in this order to obtain a magneto-optical recording medium having the structure of FIG. The refractive index of each SiN layer was 2.1.
【0071】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化は130emu/cc、補償温度は
188℃、キュリー温度は300℃以上となるように設
定した。The composition of the reproducing layer of GdFeCo is RE at room temperature.
The rich saturation magnetization was set to 130 emu / cc, the compensation temperature was set to 188 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0072】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化は200emu/cc、キュリー温
度は220℃となるように設定した。The composition of the TbFeCo recording layer was TM at room temperature.
The saturation magnetization was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0073】この光磁気記録媒体試料について、実施例
1と同様に残留カー回転角θK Rの温度依存性を測定し
た。結果を図12のグラフの曲線(R1)で示した。For this magneto-optical recording medium sample, the temperature dependence of the residual Kerr rotation angle θ K R was measured in the same manner as in Example 1. The results are shown by the curve (R1) in the graph of FIG.
【0074】その結果を実施例1(曲線(A))と比較
すると、実施例1の光磁気記録媒体の方が、高温で垂直
磁化膜となる状態を保ちつつ、室温付近の低温部での面
内磁気異方性が改善されていることがわかる。Comparing the results with Example 1 (curve (A)), the magneto-optical recording medium of Example 1 was maintained at a low temperature near room temperature while maintaining a state of a perpendicular magnetization film at high temperature. It can be seen that the in-plane magnetic anisotropy is improved.
【0075】次にこの光磁気記録媒体を用いて、実施例
1と同様に記録再生特性を測定した。結果を表1に示
す。Next, using this magneto-optical recording medium, recording and reproducing characteristics were measured in the same manner as in Example 1. The results are shown in Table 1.
【0076】(比較例2)実施例1と同様の装置および
方法で、ポリカーボネート基板上にSiN誘電体層を9
00Å、GdFeCo再生層を400Å、TbFeCo
記録層を400Å、SiN保護層を700Å、この順に
成膜して光磁気記録媒体を得た。各SiN層の屈折率は
2.1とした。COMPARATIVE EXAMPLE 2 Using the same apparatus and method as in Example 1, 9 SiN dielectric layers were formed on a polycarbonate substrate.
00Å, GdFeCo reproduction layer 400Å, TbFeCo
A recording layer of 400 Å and a SiN protective layer of 700 Å were formed in this order to obtain a magneto-optical recording medium. The refractive index of each SiN layer was 2.1.
【0077】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化は180emu/cc、補償温度は
220℃、キュリー温度は300℃以上となるように設
定した。The composition of the GdFeCo reproducing layer is RE at room temperature.
The rich saturation magnetization was set to 180 emu / cc, the compensation temperature was set to 220 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0078】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化は200emu/cc、キュリー温
度は220℃となるように設定した。The composition of the TbFeCo recording layer was TM at room temperature.
The saturation magnetization was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0079】次にこの光磁気記録媒体を用いて、実施例
1と同様に記録再生特性を測定した。結果は表1に示し
た。Next, using this magneto-optical recording medium, recording and reproducing characteristics were measured in the same manner as in Example 1. The results are shown in Table 1.
【0080】(比較例3)実施例1と同様の装置および
方法で、ポリカーボネート基板上にSiN誘電体層を9
00Å、GdFeCo再生層を400Å、TbFeCo
記録層を400Å、SiN保護層を700Å、この順に
成膜して光磁気記録媒体を得た。各SiN層の屈折率は
2.1とした。Comparative Example 3 Using the same apparatus and method as in Example 1, 9 SiN dielectric layers were formed on a polycarbonate substrate.
00Å, GdFeCo reproduction layer 400Å, TbFeCo
A recording layer of 400 Å and a SiN protective layer of 700 Å were formed in this order to obtain a magneto-optical recording medium. The refractive index of each SiN layer was 2.1.
【0081】GdFeCo再生層の組成は、室温でRE
リッチで、飽和磁化は270emu/cc、補償温度は
280℃、キュリー温度は300℃以上となるように設
定した。The composition of the GdFeCo reproducing layer was RE at room temperature.
The rich saturation magnetization was set to 270 emu / cc, the compensation temperature was set to 280 ° C., and the Curie temperature was set to 300 ° C. or higher.
【0082】TbFeCo記録層の組成は、室温でTM
リッチで、飽和磁化は200emu/cc、キュリー温
度は220℃となるように設定した。The composition of the TbFeCo recording layer was TM at room temperature.
The saturation magnetization was set to 200 emu / cc and the Curie temperature was set to 220 ° C.
【0083】次にこの光磁気記録媒体を用いて、実施例
1と同様に記録再生特性を測定した。結果は表1に示し
た。Next, using this magneto-optical recording medium, recording and reproducing characteristics were measured in the same manner as in Example 1. The results are shown in Table 1.
【0084】[0084]
【表1】 この表1より、実施例1〜4の本発明の光磁気記録媒体
の特性と比較例1〜3の従来の光磁気記録媒体の特性と
を比較すると、本発明のものでは、短いマーク長でC/
N比およびクロストークが大幅に改善されていることが
分かる。[Table 1] From Table 1, comparing the characteristics of the magneto-optical recording media of the present invention of Examples 1 to 4 with the characteristics of the conventional magneto-optical recording media of Comparative Examples 1 to 3, it can be seen that the ones of the present invention have a short mark length. C /
It can be seen that the N ratio and crosstalk are greatly improved.
【0085】[0085]
【発明の効果】本発明の光磁気記録媒体および再生方法
を用いれば、初期化磁石のない簡単な装置(従来の装
置)を用いて、ビームスポット系より小さい磁区の再生
が可能で、クロストークを解消することができ、線記録
密度およびトラック密度を大幅に向上させた高密度記録
の達成が可能となる。By using the magneto-optical recording medium and the reproducing method of the present invention, it is possible to reproduce a magnetic domain smaller than the beam spot system by using a simple device (conventional device) without an initializing magnet, and crosstalk. Therefore, it is possible to achieve high-density recording in which the linear recording density and the track density are significantly improved.
【図1】本発明の光磁気記録媒体の磁性層の基本層構成
を示す断面図である。FIG. 1 is a sectional view showing a basic layer structure of a magnetic layer of a magneto-optical recording medium of the present invention.
【図2】面内磁化膜を用いた2層構成の光磁気記録媒体
の磁気超解像効果を示す模式図である。FIG. 2 is a schematic diagram showing a magnetic super-resolution effect of a two-layered magneto-optical recording medium using an in-plane magnetized film.
【図3】図1の記録媒体の磁化方向を詳細に示す模式図
である。FIG. 3 is a schematic diagram showing in detail the magnetization direction of the recording medium of FIG.
【図4】本発明の光磁気記録媒体の再生層のMsの温度
特性を示すグラフである。FIG. 4 is a graph showing the temperature characteristics of Ms of the reproducing layer of the magneto-optical recording medium of the present invention.
【図5】本発明の光磁気記録媒体の再生層の反磁界エネ
ルギー2πMs2、垂直磁気異方性エネルギーKuの関
係の1例を示すグラフである。FIG. 5 is a graph showing an example of the relationship between the demagnetizing field energy 2πMs 2 and the perpendicular magnetic anisotropy energy Ku of the reproducing layer of the magneto-optical recording medium of the present invention.
【図6】本発明の光磁気記録媒体の磁化方向の状態を示
す模式図であり、(a)は室温から再生温度までの状態
を示す図であり、(b)は再生温度での状態を示す図で
ある。FIG. 6 is a schematic diagram showing a state of the magnetization direction of the magneto-optical recording medium of the present invention, (a) showing a state from room temperature to a reproducing temperature, and (b) showing a state at a reproducing temperature. FIG.
【図7】本発明の光記録磁気媒体の記録層に記録を行っ
た後の室温での磁化方向の状態の1例を示す断面図であ
る。FIG. 7 is a cross-sectional view showing an example of the state of the magnetization direction at room temperature after recording on the recording layer of the optical recording magnetic medium of the present invention.
【図8】本発明の光磁気記録媒体の再生方法の1例を示
す図であり、(a)は媒体板面上の光スポット内のマス
ク領域とアパーチャー領域を示す図であり、(b)は各
層の磁化方向状態を示す図であり、(c)はトラック方
向の温度分布を示すグラフである。FIG. 8 is a diagram showing an example of a reproducing method of the magneto-optical recording medium of the present invention, FIG. 8A is a diagram showing a mask region and an aperture region in a light spot on the medium plate surface, and FIG. Is a diagram showing a magnetization direction state of each layer, and (c) is a graph showing a temperature distribution in a track direction.
【図9】本発明の光磁気記録媒体の再生時のマーク検出
状態を示す模式図である。FIG. 9 is a schematic diagram showing a mark detection state during reproduction of the magneto-optical recording medium of the present invention.
【図10】本発明の光磁気記録媒体の再生方法の別の例
を示す図であり、(a)は媒体板面上の光スポット内の
マスク領域とアパーチャー領域を示す図であり、(b)
は各層の磁化方向状態を示す図であり、(c)はトラッ
ク方向の温度分布を示すグラフである。FIG. 10 is a diagram showing another example of the reproducing method of the magneto-optical recording medium of the present invention, FIG. 10 (a) is a diagram showing a mask region and an aperture region in a light spot on the medium plate surface, and FIG. )
Is a diagram showing a magnetization direction state of each layer, and (c) is a graph showing a temperature distribution in a track direction.
【図11】実施例1〜4の本発明の光磁気記録媒体の層
構成を示す断面図である。FIG. 11 is a cross-sectional view showing the layer structure of the magneto-optical recording medium of the present invention of Examples 1 to 4.
【図12】実施例1および比較例1の残留カー回転角
(θK)の温度依存性を示すグラフである。12 is a graph showing the temperature dependence of the residual Kerr rotation angle (θ K ) in Example 1 and Comparative Example 1. FIG.
【図13】比較例1〜3の光磁気記録媒体の層構成を示
す断面図である。FIG. 13 is a cross-sectional view showing the layer structure of magneto-optical recording media of Comparative Examples 1 to 3.
Claims (3)
第3磁性層および第2磁性層の順序で基板上に積層され
て成り、第1磁性層が室温で面内磁化膜であって室温と
第3磁性層のキュリー温度の間で垂直磁化膜となる温度
を有する磁性層であり、第2磁性層が垂直磁化膜であ
り、第3磁性層のキュリー温度は第1磁性層および第2
磁性層のいずれのキュリー温度よりも低く、第3磁性層
の室温での面内異方性が第1磁性層の室温での面内異方
性より大きいことを特徴とする光磁気記録媒体。1. A first magnetic layer at least from the light incident side,
A third magnetic layer and a second magnetic layer are laminated on the substrate in this order, and the first magnetic layer is an in-plane magnetized film at room temperature and a perpendicular magnetized film between room temperature and the Curie temperature of the third magnetic layer. The second magnetic layer is a perpendicularly magnetized film, and the Curie temperature of the third magnetic layer is the first magnetic layer and the second magnetic layer.
A magneto-optical recording medium, which is lower than any Curie temperature of the magnetic layer and in which the in-plane anisotropy of the third magnetic layer at room temperature is larger than the in-plane anisotropy of the first magnetic layer at room temperature.
磁性層の室温での飽和磁化より大きいことを特徴とする
請求項1記載の光磁気記録媒体。2. The saturation magnetization of the third magnetic layer at room temperature is the first
The magneto-optical recording medium according to claim 1, wherein the saturation magnetization of the magnetic layer is larger than that at room temperature.
を用い、第1磁性層および第3磁性層に光スポットを照
射することによって、光スポット内の一部を垂直磁化膜
として、第2磁性層の情報に応じた磁化方向に対して安
定な方向に配向させ、光スポットの反射光の磁気光学効
果変化により情報再生を行う情報再生方法。3. The magneto-optical recording medium according to claim 1, wherein the first magnetic layer and the third magnetic layer are irradiated with a light spot to form a part of the light spot as a perpendicular magnetization film. (2) An information reproducing method in which information is reproduced by orienting in a stable direction with respect to the magnetization direction according to the information of the magnetic layer and changing the magneto-optical effect of the reflected light of the light spot.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4559494A JPH07254176A (en) | 1994-03-16 | 1994-03-16 | Magneto-optical recording medium and information reproducing method using the medium |
| CA002142767A CA2142767C (en) | 1994-02-21 | 1995-02-17 | Magneto-optical recording medium, and information reproducing method using the medium |
| EP95301061A EP0668586B1 (en) | 1994-02-21 | 1995-02-20 | Magneto-optical recording medium, and information reproducing method using the medium |
| DE69526532T DE69526532T2 (en) | 1994-02-21 | 1995-02-20 | Magneto-optical recording medium and information reproduction method used |
| AU12355/95A AU696024B2 (en) | 1994-02-21 | 1995-02-20 | Magneto-optical recording medium, and information reproducing method using the medium |
| KR1019950003305A KR950025656A (en) | 1994-02-21 | 1995-02-21 | Magneto-optical recording medium and information reproducing method using same |
| US08/391,563 US5830589A (en) | 1994-02-21 | 1995-02-21 | Magneto-optical recording medium, and information reproducing method using the medium |
| US09/045,682 US6307816B1 (en) | 1994-02-21 | 1998-03-23 | Magneto-optical recording medium, and information reproducing method using the medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4559494A JPH07254176A (en) | 1994-03-16 | 1994-03-16 | Magneto-optical recording medium and information reproducing method using the medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07254176A true JPH07254176A (en) | 1995-10-03 |
Family
ID=12723683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4559494A Pending JPH07254176A (en) | 1994-02-21 | 1994-03-16 | Magneto-optical recording medium and information reproducing method using the medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07254176A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07296434A (en) * | 1994-01-14 | 1995-11-10 | Fujitsu Ltd | Magneto-optical recording medium and reproducing method of information recorded on the medium |
| US5732049A (en) * | 1994-12-27 | 1998-03-24 | Canon Kabushiki Kaisha | Magneto-optical recording medium of super-resolution type using in-plane magnetic layer, and information reproducing method using the same medium |
-
1994
- 1994-03-16 JP JP4559494A patent/JPH07254176A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07296434A (en) * | 1994-01-14 | 1995-11-10 | Fujitsu Ltd | Magneto-optical recording medium and reproducing method of information recorded on the medium |
| US5732049A (en) * | 1994-12-27 | 1998-03-24 | Canon Kabushiki Kaisha | Magneto-optical recording medium of super-resolution type using in-plane magnetic layer, and information reproducing method using the same medium |
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