JPH07208913A - Calibration method for range sensor - Google Patents

Abstract

(57) [Abstract] [Purpose] In a range sensor that measures the shape of an object with laser light, it is easy to use a predetermined calibration jig.
And it can be calibrated in a short time. [Arrangement] The calibration jig has an n-polygonal pyramid shape, first the initial positions of this jig, the laser, and the camera are set, and then the trajectory of the laser light reflected by the jig is three-dimensionally measured by the camera. After the measurement, the locus and the initial position are calculated by triangulation, the positional relationship between the jig, the laser, and the camera is converted into a three-dimensional position for measurement, and the jig is moved three-dimensionally. The measurement is repeated to collect the measured values, and finally, the laser parameter and the camera parameter are obtained at the same time. Also,
It is characterized in that the locus of the scanning line of the laser beam is observed and used as information, the observation image is limited to a partial area, and the position of the flight destination of this locus is predicted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape feature extraction device, a tracking device, a path generation device, and a three-dimensional position measuring device for measuring a three-dimensional position when teaching a work robot. The present invention relates to a calibration method capable of efficiently predicting a required space and simultaneously obtaining each parameter.

[0002]

2. Description of the Related Art A range sensor device such as a range finder for irradiating an object with laser light, observing the three-dimensional position where the light hits with a camera, and measuring the three-dimensional position by distance information is widely used. Has been. (Reference books: 3
3D image measurement, Iguchi, Sato, Shokodo)

FIG. 7 shows the structure of a general range sensor device. In FIG. 7, this range sensor device uses the slit G to emit the light beam emitted by the slit light source F _S.
A light irradiation device (not shown) that scans this slit in a perpendicular direction while forming and irradiating a linear light through _S, and an observation space 72 that accommodates the observed object 71 while receiving this light.
And a TV having an image plane G _I that is scanned in synchronism with the light irradiation device while receiving the image of the light projected on the observed object 71.
An image receiving device (not shown) such as a camera (hereinafter referred to as a camera) is provided while maintaining a distance d between the devices.

Slit light source F_SInstead of a point light source
A laser light source for the laser device described below (hereinafter referred to as a laser)
F_LIf you use, a spot-like light beam with strong directivity
Therefore, slit G_SCan be omitted and instead this
Laser light source F_LTo control the laser beam to irradiate laser light.
User control surface G_LCan be set on the observation space side. Also this
Laser control surface G_LIs a laser seat where is the XY coordinate plane
Standard X_LY _LZ_LCan be defined.

[0005] imaging plane G _I is in a position to rotate the principal point F _C having camera lens in point symmetry to the center can assume the camera image plane G _C is the image plane of the temporary, the camera image plane G _C
Camera coordinate system X _C Y _C Z _C where is the XY coordinate plane
Can be defined.

The observation space 72 can define an object coordinate system based on the shape and directionality of the observed object 71. Therefore, the laser light has a laser coordinate value (x _l, y _l ) at the intersection with the laser control surface G _L, and the line of sight of the camera is the camera image plane G _C.
It has a camera coordinate value (x _c, y _c ) at the intersection point with.

FIG. 8 shows a conventional measuring method using the laser shown in FIG.
It is explanatory drawing explaining a method. 7 and 8,
This measurement method starts with a predetermined laser coordinate value (x_l, y _l)
To the laser to control the laser light source F_LFrom the
Laser light is applied to the object to be observed to perform two-dimensional scanning.

Next, a predetermined camera coordinate value (x _c, y _c ) is given to the camera, the camera image plane G _C is scanned, and a bright image is detected by using a projected image obtained by projection of laser light as an object of image processing. , The three-dimensional shape of the observed object is converted into the distance information from the known laser coordinate value (x _l, y _l ) based on the camera coordinate value (x _c, y _c ) at that time and measured.

However, the laser coordinate system, the camera coordinate system,
The observation space coordinate system is defined individually, and the unit of measurement and the directionality are not uniform, and the measurement accuracy, let alone the measurement itself, is meaningless. Reference numerals 81 and 82 indicate scanning lines on each image surface.

Therefore, prior to measurement, a camera, a laser,
Further, there is a step of obtaining a characteristic of the measurement environment based on the mutual relation and calibrating the measurement value of the range sensor with the characteristic to prepare. This preparation step consists of the distance d between the devices,
Since it takes time to measure the focal length, which is the principal point F _c , with a ruler, practically, the principle of triangulation is used, and the position and orientation of the camera and the laser and the focal length of the lens are used. A camera that is a parameter determined by
A method for obtaining (calibration) the parameter [A] and the laser parameter [B] is implemented.

This calibration method is executed through the following two steps. i) First, the camera parameter [A], which is a parameter relating to the camera, is obtained by a reference observation object serving as a reference. ii) Next, the three-dimensional position of the laser beam is measured using this camera parameter [A], and the laser parameter [B] which is a parameter relating to the laser is obtained.

[0012]

However, when the calibration method for the conventional range sensor is executed, there are the following problems. (1) Since the parameters are obtained in two stages of obtaining the camera parameters and the laser parameters, the work process is complicated and extra work time is required. (2) Further, since both parameters are obtained separately and the measurement errors cannot be uniform, the measurement accuracy of the three-dimensional position at the time of measuring the shape of the observed object deteriorates. (3) Further, in a range sensor (Japanese Patent Application No. 5-89634) that obtains a welding line, the laser beam does not scan the object to be observed regularly, but tends to irradiate in a certain direction. Therefore, if the entire camera image surface is set as the target area for image processing, unnecessary processing is too much, resulting in unnecessary processing time. In view of the above-mentioned problems, the present invention simplifies a work process,
Another object of the present invention is to provide a calibration method for a range sensor that reduces working time. By using this calibration method, it is possible to simplify the preparation for measurement, provide the instruction path in a short time, easily generate a complicated work, and provide a robot path generation device capable of efficiently teaching. This is an issue.

[0013]

[Means for Solving the Problems]

(1) A range sensor that includes a laser device that irradiates an object with a laser beam and a camera device that observes the shape of the object. In a range sensor that measures this shape, laser parameters that are measurement characteristics based on the laser device and the A calibration method in which a camera parameter, which is a measurement characteristic based on a camera device, is obtained and calibrated by a calibration jig, and the calibration jig has a shape formed in an n-polygonal pyramid shape. First, a position setting step of three-dimensionally setting a position for positioning the calibration jig and a control position for controlling the laser light, and then, a calibration jig while controlling the laser light. According to the principle of triangulation, the stage of trajectory measurement in which a camera device three-dimensionally measures the projection trajectory projected on the tool, and subsequently, the measured trajectory and each of the set positions are measured. Then, the positional relationship among the calibration jig, the laser device, and the camera device is converted into a unified three-dimensional position for measurement, and the positioning position is moved three-dimensionally, and this measurement is repeated. Then, a step of placement measurement for collecting a predetermined number of measurement values of each placement relationship, and finally, a step of parameter estimation for simultaneously estimating the laser parameter and the camera parameter based on these measurement values are provided in order. A method for calibrating a range sensor, comprising: (2) The step of measuring the trajectory includes a process of obtaining a change in the projection trajectory by displacement of the control position and predicting while limiting the measurement range to a partial region. Calibration method in the described range sensor.

[0014]

Operation: While moving a jig having an indentation of n polygonal pyramid whose shape is known in advance three-dimensionally, irradiating laser light continuously and observing the characteristics of the trajectory of the laser light, The parameters and laser parameters are determined at the same time. Further, the information for deflecting the laser beam is used to predict the post-deflection position of the laser beam observed by the camera, and the target region is limited to the partial region of the camera image plane.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. In addition, about the code | symbol in a figure, the same code | symbol is attached | subjected and shown to the same part as each part when describing the prior art, and description is abbreviate | omitted. FIG. 1 is an explanatory view for schematically explaining an embodiment of the present invention in a range sensor, for example.

In FIG. 1, the main part of this embodiment is a calibration jig 1 having an n-polygonal pyramid-shaped recess 10.
1, and a laser beam (arrow) 12 is scanned and projected on this jig, and the projected image P is captured by the line of sight (arrow) 13 of the camera and measured, and the range is set in a common measurement environment by a single jig.・
Parameter part 14 for simultaneously obtaining each parameter of the sensor
And a position prediction unit 15 that predicts the position where the projection image P exists, is a calibration method using a device. X _L Y _L Z _L is the laser coordinate system, X _P Y _P
Z _P is a measurement space coordinate system, and X _C Y _C Z _C is a camera coordinate system.

In this calibration method, the laser coordinate values (x _l, y) on the laser control surface G _L are moved while the calibration jig 11 is moved variously in the measurement environment described above.
_l ) to control the camera coordinate value in the camera image plane G _C
(x _c, y _c ) is measured, and this laser coordinate value (x _l, y _l ) is compared with a known camera coordinate value (x _c, y _c ) and a known calibration coordinate value (x _p, y _c ). _p, z _p ), and the above-mentioned laser parameter [A] and camera parameter [B] are estimated.

The n-sided pyramid of the calibration jig 11 is, for example, a quadrangular pyramid, and a spot coordinate value is set at an intersection point P between the dent 10 of the quadrangular pyramid and the optical axis of the laser beam (arrow) 12.
(x _s, y _s, z _s ), and the vertices P _S of a known shape of a quadrangular pyramid have calibration coordinate values (x _p, y _p, z _p ). Are arranged toward the laser coordinate system and the camera coordinate system.

FIG. 2 is an image of the trajectory of the laser beam in FIG.
Explanation that outlines how to obtain an image on the camera image plane
It is a figure. In FIG. 2, first, the laser beam is moved to the coordinate axis X._L
Scan parallel to the spot plane S _SAnd generate this
At the position where the flat plane and the quadrangular pyramid recess 10 intersect.
Trajectory L_sIs projected and formed.

Next, the projected image of the spot locus L _s is captured by the camera and connected to the camera image plane G _C to obtain the locus image I _L. This locus image I _L has ridge lines 21 and 2 of a quadrangular pyramid.
1 is a polygonal line having characteristic points Q1 and Q2 at the intersection of the spot locus L _s .

Subsequently, a plurality of spot planes S _S are sequentially formed at predetermined intervals along the coordinate axis Y _L , and the same number of locus images I _L corresponding to them are sequentially obtained, and the feature point Q1 is obtained.
And the camera coordinate value (x _c, y _c ) group of the feature point Q2 is obtained. Finally, an image of the vertex P _S of the quadrangular pyramid is obtained from each camera coordinate value (x _c, y _c ) group of the characteristic point Q1 and the characteristic point Q2.

FIG. 3 is an explanatory view for schematically explaining the method of obtaining the image of the vertex of the quadrangular pyramid in FIG. 2 on the camera image plane. In FIG. 3, the above-mentioned feature points Q1 and Q
The group of camera coordinate values (x _c, y _c ) is classified into 2 groups of 2 and the group of straight lines formed by approximating each group is obtained, and the camera coordinate value (x _c, y _c ) of the intersection is calculated. Ask. The obtained intersection is an image on which the vertices of the above-mentioned quadrangular pyramid are projected, and the ridge lines and vertices that are a group of these straight lines maintain a fixed positional relationship with each other in the depressions of the above quadrangular pyramids. .

This fixed positional relationship is determined by the jig 1 described above.
Each calibration coordinate value in 1 (x _p, y _p, z _p )
Already given by group. Therefore, through this known calibration coordinate value (x _p, y _p, z _p ), the laser coordinate value (x _l, y _l ) given as a control value and the required camera coordinate value (x _c, y _c ) You can formulate the equation by and.

Next, the position of the calibration jig is moved or the posture is changed, and again the new calibration coordinate values (x _p, y _p, z _p ) are changed to laser coordinate values (x _l, y _l ) and the camera coordinate value (x _c, y _c ) are obtained, and simultaneous equations are set up by each numerical value. In other words, repeat the measurement more times as many times as necessary depending on the number of conditional expressions,
It becomes possible to obtain each parameter of the laser and the camera.

The number of conditional expressions required here is at least 6 in order to allocate each component of the three-dimensional coordinate to each parameter, but the accuracy of calibration is further improved by increasing this number. be able to.

By the above method, the same number of laser coordinate values (x _l, y _l ) and camera coordinate values (x _c, y _c ) along with a predetermined number of calibration coordinate values (x _p, y _p, z _p ). Is obtained. Next, a method for calculating the laser parameter [A] and the camera parameter [B] at the same time by calculating these coordinate values will be described.

First, each coordinate value is arithmetically processed using the conversion model described above, and the number of linear simultaneous equations required to obtain each parameter is generated. However, in general, the conversion formula by the conversion model is non-linear, and similarly with the above conversion model, the arithmetic processing is very difficult as it is.

Therefore, each three-dimensional coordinate system is converted into a homogeneous coordinate system by the following equation _{1 according} to the variable to mediate, and the laser matrix [L] is obtained from each laser coordinate value (x _l, y _l ).
, The calibration matrix [P] from each calibration coordinate value (x _p, y _p, z _p ) and the camera matrix [C] from each camera coordinate value (x _c, y _c ). Set as a matrix.

[0029]

[Equation 1] [L] = [W _l * x _l , W _l * Y _l , W _l ] ^t [P] = [X _p , Y _p , Z _p , 1] ^t [C] = [W _c * x _c , W _c * Y _c , W _c ] ^t

Subsequently, the laser matrix [L] and the camera matrix [C] are associated with each other through the calibration matrix [P], and the relational expressions of the respective matrices [P], [L], and [C]. Are set as shown in Equation 2.

[0031]

[Equation 2] [L] = [A] [P] [C] = [B] [P]

FIG. 4 is a flow chart specifically showing the flow of processing in the parameter section of FIG. In FIG. 4, this parameter section is first provided with an initial setting stage in which the initial values necessary for the following measurements are set in advance in the respective registers, and the calibration jig is positioned and the laser light is controlled. It is supposed to be directed.

In this initial setting step, a calibration coordinate value (x _p, y _p, z _p ) which is a predetermined value corresponding to the i-th positioning by the above-mentioned jig is processed 401, and the j-th laser beam is used. In step 402, the Y-axis component y _l of the coordinate value on the laser control surface G _L, which is the control value corresponding to the order of the scanning line, is the control value corresponding to the k-th spot by the laser beam on this scanning line. The X-axis component x _l of the coordinate value on the control surface G _L is sequentially input and set in process 403. Hereinafter, the i-th, j-th, and k-th subscripts are shown in the upper right shoulder of each coordinate value.

Next, a step of image measurement in which a laser beam is irradiated to project the scanning line on a jig and the projected image is measured by a camera, and a characteristic extraction for extracting a characteristic shape in the projected image is performed. The step and the step are sequentially provided following the initial setting step, and the positions Q1 and Q2 at which the projection image of one scanning line is bent at each ridge line are obtained.

In the image measurement step, a process 404 for obtaining the camera coordinate value (x _c, y _c ) of the projection image of the k-th spot on the j-th scanning line in the i-th positioning by the above-mentioned image processing, and k A process 405 for determining whether or not the X-axis component x _l of the coordinate value at the th spot reaches the maximum value x _mx is provided in order, until the laser light spot finishes scanning one scanning line. Each processing 403, 405
The above procedure is repeated in sequence to sequentially obtain the projected image of each spot.

In the feature extraction step, the camera coordinate values (x) of the bending positions Q1 and Q2 on the j-th scanning line are set.
_c, y _c ) is collected, and a process 407 for determining whether or not the y _l coordinate value reaches the maximum value y _mx is sequentially provided, and the laser beam scans the entire surface of the laser control surface. The processes 402 to 407 are sequentially repeated until the end, and the projection image at each bending position is obtained.

Subsequently, the jig is positioned at a plurality of different positions, and the numerical relationship between the projected image of these vertices and the position of the spot is determined for each vertex of each positioning, and the calibration table is arranged in a predetermined calibration table. An array stage is provided following the feature extraction stage.

At the stage of this calibration table arrangement, a projection image of each ridge line is formed from each camera coordinate value (x _c, y _c ) group at the bending positions Q1 and Q2, and at the intersection of these projection image groups of each ridge line. The camera coordinate value (x _c,
y _c ), and the camera coordinate value (x _c, y _c ) of this intersection,
The laser coordinate value (x _l, y _l ) at the timing of obtaining this is i
Calibration coordinate value (x _p,
y _p, z _p ), and a process 4 of determining whether or not the number of times of positioning described above reaches a predetermined number 4
09 are provided in order. Therefore, each processing 401 to 409 is performed until the number of positioning times reaches a predetermined value.
Is repeated to obtain each coefficient of each equation.

Finally, a group of laser coordinate values (x _l, y _l ) and calibration coordinate values (x
_p, y _p, z _p ) group and the camera coordinate value (x _c, y _c ) group are made simultaneous to establish the above-mentioned laser parameter [A] and camera parameter [B]. A parameter estimation step 410 of collectively calculating and estimating is provided subsequent to the calibration table arrangement step. Incidentally, 400 indicates the start processing, 49
Reference numeral 9 indicates a termination process.

The above is a method for obtaining each parameter, and then a method for more efficiently executing this method will be described. When the laser matrix [L] is varied by δL, the variation amount δC of the corresponding camera matrix [C] also satisfies the relation of the above equation 2, so that each parameter that minimizes the measurement error in the entire measurement value is obtained. The equation is
If the inverse matrix of each parameter by the method of least squares exists,
There is a relationship according to the following formula 3 using the least-squares estimator as a coefficient.

[0041]

[Equation 3] ([A] ^t [A]) ^-1 [A] ^t [L] =
([B] ^t [B]) ^-1 [B] ^t [C]

FIG. 5 is a flow chart specifically showing the flow of processing in the position predicting section of FIG. In FIG. 5, the position predicting unit first limits the area to which the projected image of the spot moves on the camera image plane, and first provides a limited detection step of detecting this projected image. The detection time of can be shortened by predicting the destination.

The stage of the limited detection is the laser coordinate value (x _l,
camera coordinate values corresponding to small displacement δL of y _l) (x _c,
seeking a small variation δC of y _c) by calculating the number 3 above, the process 501 to be stored in a predetermined memory location, based on the small amount of change, an area on the to be detected camera image plane G _C A limiting process 502 and a determining process 503 for determining whether or not a projected image of a spot exists in this limited area are sequentially provided.

The process 502 corresponds to the minute change amount δC.
Camera coordinate value (x_c, y_c) Value (δ x _c,δ y_c) To the coefficient k
^-, K⁺Multiply by the camera image surface G_CThe detection range of
Then, the coordinates 1 and 2 of the range are calculated by the formula shown below.
The camera coordinate values (x_c, y_c)
Set.

[0045]

## EQU00004 ## Coordinates of range 1: (x _c − k ⁻ * δ x _c , y _c −
k ^- * δ y _c) coordinate range ^{_{2 :( x c + k + *}} δ x c, y c + k + * δ
y _c )

Next, when it is not possible to detect in the limited area, the step of area extension for expanding the limited area is provided subsequent to the step of limited detection, and the prediction of the movement destination is slightly enlarged to increase the detection time. It is designed to suppress

This step of region expansion is performed by the above-mentioned coefficient.
A process 504 of determining whether or not k ⁻ and k ⁺ reach an allowable maximum value, and coefficients k ⁻ and k when they have not yet reached
A process 505 for multiplying ⁺ by a predetermined number is provided. Through this process 505, the flow branches to the process 502 until the coefficients k ⁻ and k ⁺ reach the maximum value.

Finally, a step of detecting the entire area for detecting spots in the entire area of the camera image plane without limiting the detection area is provided subsequent to the step of area expansion. In this whole area detection step, processing 506 for setting the whole area as an image processing target is performed.
And a process 503 for detecting a projected image of the same spot as described above are sequentially provided.

FIG. 6 is a block diagram showing a configuration example of a range sensor incorporating the parameter section and the position predicting section in FIG. In FIG. 6, this range sensor is
A laser control device 61 that controls irradiation of laser light, a position control device 62 that obtains laser coordinate values (x _l, y _l ) on a laser control surface, and an image processing device 63 that processes a projected image to obtain distance information. A jig position control device 64 that controls the calibration jig and a three-dimensional position calculation device 65 that calculates the three-dimensional position of the jig are configured.

The laser control device 61 detects a control value consisting of a position and a posture for irradiating a laser beam and detects a laser coordinate value (x
_l, y _l ) and sends it to the position controller 62. The image processing device 63 recognizes the position of the camera and the line of sight and collates them with the laser coordinate value (x _l, y _l ) to determine the camera coordinate value (x _c, y
_c ) is sent to the three-dimensional position calculation device 65.

The jig position control device 64 is a calibration system.
Calibration coordinates from the position and orientation of the jig
Value (x_p, y_p, z_p) Is sent to the three-dimensional position calculation device 65.
It The three-dimensional position calculation device 65 uses the camera coordinate value (x_c, 
y_c) And laser coordinate value (x_l, y_l) And calibration seat
Standard value (x_p, y_p, z_p) And from laser parameters and camera
・ Each parameter is estimated and
Camera coordinate value (x_c, y _c) And laser coordinate value (x_l, y_l)
Measure the shape of the observed object.

It should be noted that the present invention is not limited to the above-described embodiment, and for example, a calibration jig has an n-polygonal pyramid in order to reduce obstruction by a shield when laser light reaches. Although it has been described as having a dent, it is possible to extract multiple features such as ridges or edges, and measure or calculate based on these feature extraction points to obtain the corresponding laser coordinate values (x _l, y _l ) and the camera. Coordinate value (x _c, y _c )
It is needless to say that the jig can be modified in various manners, such as that the unevenness of the jig does not matter as long as the jig can be obtained.

[0053]

As described above, the present invention has the following effects. (1) Since the camera parameter and the laser parameter are obtained at the same time by the same measurement, the work process is simplified, the work time is shortened, and the extra work man-hour can be reduced. (2) Further, since the measurement error for both parameters is uniform, the measurement accuracy of the three-dimensional position with respect to the shape of the observed object can be improved. (3) Further, the entire camera image plane is not set as the target area for image processing, and the target area is limited to the partial area for image processing, so that the laser light is observed like a range sensor for finding a welding line. Even if the body is not entirely scanned but tends to be irradiated in a certain direction, the unnecessary processing time can be shortened by predicting the range of image processing. As described in (1) to (3) above, by simultaneously obtaining the parameters for the camera, the work process of the calibration process can be simplified and the work time can be shortened. By using this calibration method, it is possible to simplify the preparation for measurement, provide the instruction path in a short time, easily generate a complicated work, and provide a robot path generation device capable of efficiently teaching. You will be able to do it.

[Brief description of drawings]

FIG. 1 is an explanatory view schematically explaining an embodiment of the present invention.

FIG. 2 is an explanatory diagram for schematically explaining a method for obtaining a locus of laser light in FIG.

FIG. 3 is an explanatory diagram for schematically explaining a method of obtaining apexes of the quadrangular pyramid in FIG.

4 is a flowchart specifically showing a processing flow in a parameter unit of FIG.

5 is a flow chart specifically showing a flow of processing in the position prediction unit in FIG.

FIG. 6 is a configuration diagram schematically showing a configuration example of a range sensor in FIG.

FIG. 7 is a configuration diagram showing a configuration of a conventional general range sensor device.

FIG. 8 is an explanatory diagram illustrating a conventional method of measuring using the device of FIG. 7.

[Explanation of symbols]

10 ... N-sided pyramidal depression 11 ... Calibration jig 12 ... Laser light (arrow) 13 ... Camera line of sight (arrow) 14 ... .... Parameter section 15 ...
・ ・ ・ Position prediction unit G _L・ ・ ・ ・ Laser control surface G _C・ ・ ・ ・
... camera image plane F _C ······· camera principal point F _L ····
・ ・ ・ Laser light source P ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Projected image P _S・ ・ ・
... Apex of quadrangular pyramid X _C Y _C Z _C ... Camera coordinate system X _L Y _L Z _L
... laser coordinate system X _P Y _P Z _P ··· measurement space coordinate system (x _c, y _c) ·
・ ・ ・ Camera coordinate value (x _l, y _l ) ・ ・ ・ ・ Laser coordinate value (x _s, y _s,
z _s ) ・ ・ Spot coordinate value (x _p, y _p, z _p ) ・ ・ Calibration coordinate value

Claims (2)

[Claims] 1. A range sensor for observing the shape of an object, comprising: a laser device for irradiating an object with a laser beam; and a range sensor for measuring the shape, the laser parameter being a measurement characteristic based on the laser device. And a camera parameter, which is a measurement characteristic based on the camera device, obtained by a calibration jig and calibrated, wherein the calibration jig has a shape formed in an n-polygonal pyramid. First, a position setting step for setting the position for positioning the calibration jig and a control position for controlling the laser light three-dimensionally, and then the calibration while controlling the laser light. A stage of locus measurement in which a locus of projection projected on a jig for measurement is three-dimensionally measured by a camera device, and subsequently, the locus of measurement to be measured and each of the set positions are triangulated. Calculation is performed according to the principle, the positional relationship between the calibration jig, the laser device, and the camera device is converted into a uniform three-dimensional position for measurement, and the measurement is repeated while moving the positioning position three-dimensionally. Then, a step of placement measurement for collecting a predetermined number of measurement values of each placement relationship, and finally, a step of parameter estimation for simultaneously estimating the laser parameter and the camera parameter based on these measurement values are provided. A method for calibrating a range sensor, comprising: 2. The step of measuring the trajectory includes a process of obtaining a change in the projection trajectory by displacement of the control position and predicting while limiting the measurement range to a partial region. 1. The calibration method in the range sensor according to 1.