JPH07140903A - Image display device and manufacturing method thereof - Google Patents

Abstract

(57) [Abstract] [Structure] (1) After directly laminating the rear plate and the outer frame member and / or the face plate and the outer frame member,
The periphery of the laminated portion is hermetically sealed with a sealing material, or (2) a groove is provided in a part of the joint surface of the outer frame member to form a sealing material storage portion, and the sealing material is stored in the storage portion. Then, the rear plate and / or the face plate are laminated and pressed, the sealing material is heated and baked to seal, and the internal space is evacuated to manufacture an image display device. [Effects] (1) The distance between the face plate and the rear plate can be made constant, and (2) the minute cracks at the sealing portion,
Poor sealing is reduced, yield is improved, and (3) there is no need to control the coating thickness of the sealing material, so that the manufacturing method can be simplified.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat type image display device for forming an image and a manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, a fluorescent display tube for forming an image, a plasma display, a display device using a field emission type Spindt type electron beam generator, and a display using a classical conventional surface conduction electron-emitting device. An image display device, such as a device, which excites a phosphor to perform light emission display has advantages such as being flat and bright and easy to see, and is actively applied and expected in industry.

As an example, FIG. 9 shows a conventional fluorescent display tube, and FIG.
0 shows a conventional plasma display.

As a manufacturing method, the fluorescent display tube shown in FIG. 9 and the rear plate 24, the face plate 30, and the outer frame member 21 of the plasma display shown in FIG. The face plate 30 and the outer frame member 21 are joined via the sealing material 22. Specifically, for example, a paste-like sealing material having a low melting point frit glass as a main component is applied to the joint portion of both plates by printing or spraying, and then both plates and the outer frame are laminated and added. By performing pressure and heat firing, the rear plate 24, the face plate 30,
Airtight sealing is achieved by the outer frame member 21 and the sealing material 22, and then the inside is evacuated.

[0005]

However, in the manufacturing method of the image display device such as the fluorescent display tube and the plasma display of the above-mentioned conventional example, the rear plate and the outer frame member,
Since the joining is performed with the sealing material interposed between the face plate and the outer frame member, the manufactured image display device has the following problems.

(1) Since the distance between the rear plate and the face plate varies due to uneven coating thickness of the sealing material, the shape of the light emitting portion of the face plate also varies, and the uniformity of the image deteriorates. To do. Moreover, especially the distance between the rear plate and the face plate is reduced,
Such a problem is remarkable in an extremely thin flat-panel image display device and a flat-panel image display device in which it is required to form a light emitting portion with high accuracy.

(2) Due to uneven coating thickness of the sealing material, the distance between the rear plate and the face plate varies, so that internal stress is generated in the step of pressurizing and heating the sealing material, and sealing Small cracks after attachment and slow leak due to poor sealing occur. Further, in particular, when the rear plate, the face plate or the outer frame member having a small plate thickness is used, the above-mentioned problem is remarkable.

(3) In order to reduce the uneven coating of the sealing material, it is necessary to control the viscosity of the sealing material and the manufacturing process becomes complicated.

It is an object of the present invention to provide a method of manufacturing an image display device which solves the above-mentioned drawbacks of the prior art.

[0010]

In order to achieve the above object, the present invention provides an image display device comprising an envelope in which two or more container members including a container member having an image display surface are joined. (EN) Provided are a method of manufacturing an image display device and a image display device manufactured by the method, wherein each container member has a portion in direct contact with each other and is joined in a state in which a sealing material is not substantially interposed.

That is, in the method of manufacturing an image display device of the present invention, (a) a face plate having an image display surface,
(B) A rear plate disposed so as to face the face plate, and (c) a container member such as an outer frame member interposed at a peripheral portion between the face plate and the rear plate (1) so as to be in direct contact with each other. Combined to form the skeleton of the envelope, and the outer peripheral portion of the contact portion is airtightly sealed and joined with a sealing material, or (2) a groove is formed inside a part of the joint surface of each container member. An image display device is manufactured by arranging a sealing material, and then putting together a sealing material, airtightly sealing and bonding the same, forming an envelope, and then evacuating the space inside the envelope.

The method of manufacturing the image display device of the present invention will be described in detail below with reference to the drawings.

1 and 2 show a manufacturing method 1 of the present invention.
It is a figure which shows an embodiment. FIG. 3, FIG. 7 and FIG. 8 are views showing an embodiment of the image display device produced by the manufacturing method of the present invention. 4, 5 and 6 are views showing another embodiment of the manufacturing method of the present invention.

In FIG. 2, 1 is an outer frame member, 2 is a sealing material,
Reference numeral 3 is an outer frame, 13 in FIG. 1 is a face plate, and 4 is a rear plate made of an insulating substrate on which an electron beam generator is formed.

The outer frame member 1, the face plate 13, and the rear plate 4 in the method of manufacturing the image forming apparatus of the present invention.
Is formed of a blue plate, a glass substrate such as quartz, a ceramic substrate such as Al ₂ O _3, and the like.

The sealing material accommodating portion in which the sealing material 2 is accommodated in the outer frame member 1 is formed into a desired shape by a method such as a chemical etching method or a mechanical grinding method. To do. The shape of the sealing material accommodating portion is not limited to that shown in FIG. 2, but may be one as shown in the sectional views of FIGS. 4 (a), (b) and (c).

The sealing material 2 may be made of any material as long as the rear plate 4 and the face plate 13 can be hermetically sealed via the outer frame 3.
Among them, particularly, if specific examples of the material are given, there are amorphous low melting point frit glass, crystalline low melting point frit glass, and the like, and mixing them with an organic solvent, a binder such as nitrocellulose, and the like. An organic solvent that dissolves the binder is mixed to prepare a paste, and a paste that is sticky at least at the coating operation temperature of the sealing material 2 is used. Needless to say, a sealing material prepared according to the coating method is used. Needless to say, it is preferable to select a material having a thermal expansion coefficient that is substantially the same as that of the face plate 13, the rear plate 4, the outer frame 3, and the sealing material 2.

The method of applying the sealing material 2 may be any method such as a printing method, a spray method, an injection method using a dispenser, and a desired amount of the desired sealing material can be stored in the sealing material storage portion. It suffices if only coating can be performed.

Next, as shown in FIG. 1, an outer frame 3 formed by an outer frame member 1 and a sealing material 2 is placed on a rear plate 4 on which an electron beam generator is formed, and further above it. The face plate 13 is disposed on the surface of the sealing material 2 and the low melting point frit glass used for the sealing material 2 is melted, for example, about 350 ° C.
Heat at a temperature in the range of ˜650 ° C. to weld. Further, if necessary, pressure is applied from the face plate 13 or the rear plate 4 side.

As described above, according to the manufacturing method of the present invention, as in the image display device shown in FIG. 3, the sealing material is applied to the contact surface where the rear plate 4, the face plate 13 and the outer frame member 1 are in contact with each other. Airtight sealing is performed without intervention.

As shown in FIGS. 5 and 6, at least a part of the outer frame member 1 is provided with the abutting portion 14, so that the contact surface where the rear plate 4, the face plate 13 and the outer frame member 1 contact each other is sealed. Not only can air-tight sealing be performed without the interposition of a bonding material, but also positioning can be performed by abutting the end face of the base plate of the rear plate 4 or face plate 13 and the end face of the abutting portion 14 of the outer frame 3. You can also do it.

Further, as shown in FIGS. 7 and 8, a frame 15 is provided on the outer periphery of the outer frame member 1 to form a sealing material accommodating portion, and the sealing material 2 is applied and formed in the sealing material accommodating portion. By heating and baking, the rear plate 4 and the face plate 1 are similarly formed.
It is also possible to hermetically seal the contact surface between the outer frame member 1 and the outer frame member 3 without interposing a sealing material. The sealing material storage portion may be formed on the rear plate 4 or the face plate 13.

Further, the electron beam generator formed on the rear plate 4 is classified into a fluorescent display tube using a filamentary thermoelectron source, a plasma display using discharge, and further a bulk type and a thin film type. There are cold cathode devices and the like.

For example, as an example of the bulk type, FE [W.
P. Dyke & W.D. W. Dolan, "Field
Emission ", Advance in El
electron Physics, 8, 89 (195
6)], Avalanche type or NEA type semiconductors [J. A. Burton, "Electron
Emission from silicon ", Ph
ys. Rev. , 108, 1342 (1957)] or MgO ["Tung-sol confirms".
cold cathode tube ", Electr
onics News (26. Jan. 1959)],
Besides, a photocathode and the like are known.

On the other hand, as an example of the thin film type, MIM [C.
A. Mead, "The tunnel-emissi
on amplifier, J. et al. Appl. Phy
s. , 32,646 (1961)] and Spindt type [C. A. Spindt, "Physical pro
parts of thin-film field
demise cathodes with m
lybdenum cones ”, J. Appl. P
hys. , 47, 5248 (1976)] or a surface conduction electron-emitting device [M. I. Elinson, Rad
io Eng. Electron Phys. , 10,
(1965)] and the like.

The surface conduction electron-emitting device utilizes a phenomenon that electron emission is caused by flowing a current in a thin film having a small area formed on a substrate in parallel with the film.

As the surface conduction electron-emitting device, one using a SnO ₂ (Sb) thin film developed by Elinson et al., One using an Au thin film [G. Dittm
er: "Thin Solid Films", 9, 3
17 (1972)], by an ITO thin film [M. Ha
rtwell and C.I. G. Fonstad: "I
EEE Trans. ED Conf. , 519 (1
975)], a carbon thin film [Haraki et al .: Vacuum, Vol. 26, No. 1, p. 22 (1983)] and the like.

Further, in JP-A-1-200532 and JP-A-2-56822, a surface conduction electron-emitting device in which a fine particle film is arranged between electrodes and an electron-emitting portion is provided by subjecting this to a current-carrying treatment. It is shown. Any of these electron generating devices may be used.

[0029]

【Example】

(Embodiment 1) FIGS. 1 and 2 are process diagrams showing a method of manufacturing an image display device of the present invention, and FIG. 3 is a sectional view of an image display device manufactured by the method.

1, 2 and / or 3, 1 is an outer frame member, 2 is a sealing material, 3 is an outer frame, 4 is a rear plate made of an insulating substrate, 13 is a face plate, 9 is a glass substrate, 10 is a transparent electrode, 11 is a phosphor, and 12 is a metal back. Further, in this apparatus, a known surface conduction electron-emitting device is used, and 5 is a control electrode (modulating means),
Reference numeral 6 is an insulating layer, 7 is an element electrode, and 8 is a fine particle film having an electron emitting portion (region).

The steps shown in FIGS. 1 and 2 are as follows.

(1) A soda lime glass is used as the outer frame member 1, cut into a predetermined size, and then an exhaust hole 32 is formed by grinding.
Were formed (Fig. 2a).

(2) A predetermined portion of the outer frame member 1 was ground to form a sealing material storage portion (FIG. 2b).

(3) Obtained by dissolving low melting glass (LS / 3081 manufactured by Nippon Electric Glass Co., Ltd.) and ethyl cellulose in a solvent in the sealing material storage portion of the outer frame member 1 by an injection method using a dispenser. The applied solution is applied to form an outer frame 3
(Fig. 2c).

(4) Next, soda lime glass is used as the rear plate 4, and after thoroughly washing with an organic solvent, the control electrode 5 and the insulating layer 6 are formed by the vacuum deposition technique and the photolithography technique, and then the Ni electrode is formed. Element electrode consisting of 7
Was formed. At this time, the element electrode interval L ₁ is 3 μm,
The width W _{1 of the} device electrode is 500 μm and the thickness d is 1000
Å

(5) Next, a solution containing organopalladium (manufactured by Okuno Chemical Industries Co., Ltd., ccp-4230) was applied to a predetermined portion, followed by heat treatment at 300 ° C. for 10 minutes to obtain palladium oxide (PdO). ) A fine particle film 8 made of fine particles (average particle diameter: 70Å) was formed. The width (width of the element) W is 3
The thickness was set to be 00 μm, and the element electrode 7 was arranged almost at the center. The film thickness is 100Å and the sheet resistance is 5 × 10 ⁴ Ω / □.
Met.

Incidentally, the fine particle film mentioned here is a film in which a plurality of fine particles are aggregated, and its fine structure is not only a state in which the fine particles are dispersed and arranged but also a state in which the fine particles are adjacent to each other or overlap each other (island). (Including the shape), and the particle diameter means the diameter in a state where the particle shape is recognizable in the above state.

(6) Next, a voltage is applied between the device electrodes 7 to energize (form) the fine particle film 8 to form an electron emitting portion.

Further, the surface conduction electron-emitting device used in the present invention will be described in detail. As a fine particle film containing an electron emitting material, a film of conductive fine particles having a particle size of a few dozen Å to a few μm or these is used. Examples thereof include a carbon thin film in which conductive fine particles are dispersed. Among them, Pd, Ag, Au, Ti, In, Cu, C are specifically mentioned as specific examples.
Metals such as r, Fe, Zn, Sn, Ta, W and Pb; P
Oxide conductors such as dO, SnO ₂ , In ₂ O ₃ , PbO, Sb ₂ O ₃ ; HfB ₂ , ZrB ₂ , LaB ₆ , CeB ₆ , Y
Borides such as B ₄ and GdB ₄ ; TiC, ZnC, HfC,
Carbides such as TaC, SiC, WC; TiN, ZrN,
A nitride such as HfN; a semiconductor such as Si or Ge; a carbon; AgMg; NiCu; PbSn or the like. Then, these films are formed by a vacuum vapor deposition method, a sputtering method, a chemical vapor deposition method, a dispersion coating method, a dipping method, a spinner method, or the like.

Further, as the structure of the control electrode 5, in addition to the structure which is formed on the back surface of the electron beam generating portion and is controlled as in the present embodiment, an electron passage hole is provided above the electron beam generating portion. There are a structure for arranging the control electrodes and a simple matrix structure.

(7) Next, the rear plate 4 on which the electron beam generator is formed, the outer frame 3, and the face plate 13 are arranged and laminated at predetermined positions, and a 1 kg weight is applied from above to press them in the atmosphere. Firing was performed under the conditions of a sealing heat treatment temperature of 410 ° C. and a sealing heat treatment time of 60 min to form an image display device (FIG. 3).

As described above, the image display device manufactured by the manufacturing method of the present invention can be manufactured without interposing the sealing material 2 in the joint between the rear plate 4 or the face plate 13 and the outer frame member 1. The distance between the plate 4 and the face plate 13 could be kept constant. Also,
There was no generation of minute cracks or the like due to defective sealing at the portions of the respective structures formed on the rear plate 4 and the face plate 13, and when the gas was evacuated from the exhaust hole 32 to about 1 × 10 ⁻⁶ Torr, a slow leak occurred. It was possible to form an image display device having no image.

When this image display device is driven and operated, the distance between the rear plate 4 and the face plate 13 is kept constant, so that the shape of the light emission spot on the face plate 13 is uniform. I was able to get an image.

(Embodiment 2) FIG. 4a shows a sectional view of an outer frame 3 of another example of the apparatus manufactured by the method of the present invention.

In this case, a fluorescent display tube using a filament was used for the electron beam generator. Further, an apparatus was produced in the same manner as in Example 1 except that the outer frame 3 had a structure in which grooves were provided in the outer frame member 1 as shown in this figure.

As a result, it was confirmed that the same effect as that of the first embodiment was confirmed despite the difference in the structure of the outer frame 3 and the electron beam generator formed on the rear plate 4.

(Embodiment 3) FIG. 4b shows a sectional view of an outer frame 3 of still another example of the apparatus manufactured by the method of the present invention.

Here, a plasma generator is used as the electron beam generator. Further, a device was prepared in the same manner as in Example 1 except that the outer frame 3 had a structure in which the outer frame member 1 was provided with triangular grooves as shown in FIG.

As a result, the same effects as in Example 1 were confirmed despite the difference in the structure of the outer frame 3 and the electronic device formed on the rear plate 4.

(Embodiment 4) FIG. 4c shows a sectional view of an outer frame 3 of still another example of the apparatus manufactured by the method of the present invention.

In this case, an apparatus was manufactured in the same manner as in Example 1 except that the sealing material 2 was formed in the sealing material accommodating portion having a round groove in the outer frame 3.

As a result, it was possible to confirm the same effect as in Example 1 even though the structure of the outer frame 3 was different.

(Embodiment 5) FIG. 5 shows a perspective view of an outer frame 3 having a different structure.

In this case, the face plate 13 is attached to the outer frame 3.
An apparatus was prepared in the same manner as in Example 1 except that the abutting portion 14 for aligning the outer frame 3 with the outer frame 3 was provided.

As a result, not only the same effects as in Example 1 were confirmed, but also the rear plate 4 and the face plate 13
Since the face plate 13 can be manufactured by abutting the face plate 13 against the abutting portion 14 of the outer frame 3, the rear plate 4 and the face plate 13 can be easily and accurately aligned.

(Embodiment 6) FIG. 6 is a perspective view of the outer frame 3 having a different structure.

In this case, the face plate 13 is attached to the outer frame 3.
And the outer frame 3, the rear plate 4 and the outer frame 3, and the abutting portion 14 for aligning the face plate 13 and the rear plate 4 with each other. A device was prepared in the same manner as in Example 1 except that it was provided at both ends.

As a result, the same effect as in Example 1 was confirmed, and moreover, the rear plate 4 and the face plate 13 could be more accurately aligned with each other.

(Embodiment 7) FIG. 7 shows a sectional view of another example of the image display device produced by the manufacturing method of the present invention.

As shown in the figure, the outer frame member 1 and the frame 15 for forming the sealing agent accommodating portion are first arranged on the rear plate 4 on which the electron beam generator is formed, Next, the face plate 13 is placed on the outer frame member 1,
Next, the frame 15 was arranged on the outer frame member 1 on the outer periphery of the face plate 13.

Next, the sealing material storage portion between the outer frame member 1 and the frame 15 on the rear plate 4 and the sealing material storage portion between the face plate 13 and the frame 15 on the outer frame member 1 are sealed. 2 was applied. An apparatus was prepared in the same manner as in Example 1 except for the above manufacturing steps.

As a result, the outer frame 3 (the outer frame member 1, the frame 1
5) Despite the difference in the arrangement configuration of the face plate 13 and the like, the same effects as in Example 1 were confirmed.

(Embodiment 8) FIG. 8 shows a sectional view of another example of the image display device produced by the manufacturing method of the present invention.

As shown in the figure, the outer frame member 1 is arranged on the rear plate 4 in order to form the sealing material accommodating portion on the outer frame member 1 and the end face of the base of the face plate 13, and then the rear member is placed on the outer frame member. The plate 13 is arranged, then the frame 15 is arranged on the outer periphery of the outer frame member 1, and then the sealing material 2 is placed in the sealing material storage portion between the outer frame member 1 and the end surface of the face plate 13 and the frame 15.
Was formed by coating. The height of the frame 15 is preferably not less than the height of the outer frame member 1 and less than the total height of the end face of the face plate 13 and the outer frame member 1. An apparatus was prepared in the same manner as in Example 1 except for the above steps.

As a result, the same effect as in Example 1 was confirmed.

[0066]

As described above, according to the manufacturing method of the present invention, the sealing material is not substantially interposed between the face plate or the rear plate and the outer frame member, that is, the dimension in the thickness direction is reduced. Since there is no contribution of the sealing material of
(1) The distance between the face plate and the rear plate can be made constant, (2) micro cracks and sealing defects at the sealing portion are reduced, the yield is improved, and (3) the coating thickness of the sealing material is controlled. Since there is no need to do so, there is an effect that the manufacturing method is simplified.

[Brief description of drawings]

FIG. 1 is a process drawing showing a joining process in an example of a manufacturing method of the present invention.

FIG. 2 is a process drawing showing outer frame formation in an example of the manufacturing method of the present invention.

FIG. 3 is a schematic cross-sectional view of an example of an image display device of the present invention.

FIG. 4 is a schematic cross-sectional view of an outer frame portion in another example of the image display device of the present invention, in which a, b, and c have different shapes of the sealing material storage portion.

FIG. 5 is a schematic diagram showing an example of a joined state of the image display device of the present invention.

FIG. 6 is a schematic view showing another example of a joined state of the image display device of the present invention.

FIG. 7 is a schematic cross-sectional view showing another example of the image display device of the present invention.

FIG. 8 is a schematic cross-sectional view showing another example of the image display device of the present invention.

FIG. 9 is a schematic partial sectional view of an example of a conventional image display device.

FIG. 10 is a schematic partial sectional view of another example of a conventional image display device.

[Explanation of symbols]

 1, 21 Outer frame member 2, 22 Sealing material 3 Outer frame 4, 24 Rear plate (insulating substrate) 5, 7, 23, 25, 32 Electrode 6,33 Insulating layer 8 Fine particle film 9,30 Glass substrate 10, 31 transparent conductive film 11, 26 phosphor 12 metal back 13 face plate 14 outer frame member abutting portion 15 frame 27 display portion 28 control electrode 29 filament 32 exhaust hole

Claims (10)

[Claims] 1. An image display device comprising an envelope formed by joining two or more container members including a container member having an image display surface, wherein each container member is in direct contact with and around the contact portion. An image display device characterized in that the above is hermetically sealed and joined with a sealing material. 2. An image display device comprising an envelope formed by joining two or more container members including a container member having an image display surface, wherein each container member has a sealing material on a part of the joint surface. An image display device having a groove for accommodating therein, and being in contact with each other through the sealing material and sealed and joined. 3. An image display device comprising an envelope formed by joining two or more container members including a container member having an image display surface, wherein at least one container member has a frame on the outer periphery of the joint surface. Is contacted with another container member inside the frame so as not to contact the frame, and is sealed and joined in a state where a sealing material is housed in a gap between the contact portion and the frame. An image display device characterized by being. 4. A container member constituting an envelope includes (a) a face plate having an image display surface, (b) a rear plate arranged so as to face the face plate, and (c) a face plate and a rear. The image display device according to any one of claims 1 to 3, wherein the image display device includes three types of outer frame members that are interposed in a peripheral portion between the plates. 5. A fluorescent member that emits light when excited by an electron beam and a voltage applying means are formed on the image display surface of the face plate, and at least one electron beam generation source is formed on the rear plate. 4. The image forming apparatus according to item 4. 6. A step of joining two or more container members including a container member having an image display surface to form an envelope, and a step of evacuating a space inside the envelope after the step. In the method of manufacturing an image display device comprising
A method for manufacturing an image display device, comprising directly contacting each container member, and then hermetically sealing and bonding the periphery of the contact portion with a sealing material. 7. An image comprising a step of joining two or more container members including a container member having an image display surface to form an envelope, and a step of evacuating the space inside the envelope. In the method for manufacturing a display device, the envelope is formed by forming a groove in a part of the joint surface of each container member, and inserting a sealing material inside the groove,
A method of manufacturing an image display device, which comprises contacting the respective container members with each other at their joint surfaces so that they are sealed and joined. 8. An image comprising the steps of joining two or more container members including a container member having an image display surface to form an envelope, and evacuating the space inside the envelope. In the method for manufacturing a display device, the envelope is formed by providing a frame on the outer periphery of the joint surface of at least one container member, and by using another container so that the container member is not inside the frame and is not in contact with the frame. A method for manufacturing an image display device, which comprises contacting a member, placing a sealing material in a gap between the contact portion and the frame, and then sealing and bonding. 9. A container member constituting an envelope, comprising: (a) a face plate having an image display surface, (b) a rear plate arranged to face the face plate, and (c) a face plate and a rear. 9. The method of manufacturing an image display device according to claim 6, wherein there are three kinds of outer frame members interposed in the peripheral portion between the plates. 10. A fluorescent member that emits light when excited by an electron beam and a voltage applying unit are formed on the image display surface of the face plate, and at least one electron beam generation source is formed on the rear plate. 9. The method for manufacturing an image forming apparatus according to item 9.