JPH0712907A - Optical magnetic field sensor - Google Patents
Optical magnetic field sensorInfo
- Publication number
- JPH0712907A JPH0712907A JP15898093A JP15898093A JPH0712907A JP H0712907 A JPH0712907 A JP H0712907A JP 15898093 A JP15898093 A JP 15898093A JP 15898093 A JP15898093 A JP 15898093A JP H0712907 A JPH0712907 A JP H0712907A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- light
- optical fiber
- total reflection
- reflection prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Magnetic Variables (AREA)
Abstract
(57)【要約】
【目的】 小型,軽量で製造コストも安く、且つ絶縁性
のよい落雷サージを検知する光磁界センサを提供するこ
と。
【構成】 本発明による装置は、光源1から射出された
光が光ファイバ2を通り射出した後、レンズ3,全反射
プリズム4の順に通過し、次にRIG膜5へ入射され、
当該光はRIG膜5内を磁界の強度に応じた強度変調を
受けながら通過し、更に、全反射プリズム6により変向
され、レンズ7によって光ファイバ8に集光された後、
当該光は光ファイバ8により光検出器9に導かれ光電変
換されるような構成を備えている。
(57) [Abstract] [Purpose] To provide an optical magnetic field sensor that is small and lightweight, has a low manufacturing cost, and has a good insulating property and detects a lightning surge. In the device according to the present invention, light emitted from a light source 1 passes through an optical fiber 2, then passes through a lens 3 and a total reflection prism 4 in this order, and then enters a RIG film 5.
The light passes through the RIG film 5 while undergoing an intensity modulation according to the intensity of the magnetic field, is further deflected by the total reflection prism 6, and is focused on the optical fiber 8 by the lens 7.
The light is guided to the photodetector 9 by the optical fiber 8 and photoelectrically converted.
Description
【0001】[0001]
【産業上の利用分野】本発明は、希土類−鉄ガーネット
膜のファラデー効果を用いて磁界強度の変化を測定する
光磁界センサ、特に、落雷によるサージを監視する落雷
センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical magnetic field sensor for measuring a change in magnetic field intensity by using the Faraday effect of a rare earth-iron garnet film, and more particularly to a lightning strike sensor for monitoring surge due to lightning strike.
【0002】[0002]
【従来の技術】送電線等の電力供給路への落雷は大事故
につながる虞があるため、受電変電設備には落雷に対す
る種々の保安装置が設置されている。又、上記の保安装
置の作動状況を把握するために、落雷によるサージを監
視する落雷センサが用いられている。従来の落雷センサ
には、鉄芯にコイルを巻き付けた形のものが使用されて
いる。これは、落雷による導線の電流変化によって生じ
る導体外部の磁束変化を電磁誘導により読みとる原理で
あって、落雷の事実の有無を当該センサのON−OFF
で判定するものであった。2. Description of the Related Art Since a lightning strike on a power supply line such as a power transmission line may lead to a serious accident, various power-saving devices for lightning strike are installed in a power receiving and transforming facility. Further, a lightning strike sensor for monitoring a surge caused by a lightning strike is used in order to grasp the operating condition of the above-mentioned security device. As a conventional lightning strike sensor, a coil wound around an iron core is used. This is a principle of reading a magnetic flux change outside the conductor caused by a current change of a conductor due to a lightning strike by electromagnetic induction.
It was decided by.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、上記の
ような従来の落雷センサは、容積が約20cm×20cm×20cm
と大型で、而も約10kgと大重量であるため、使いにく
く、又、製造工程でのコストも高いという問題があっ
た。更に、センサ自体が導体で構成されているため、絶
縁性が悪いという問題もあった。However, the conventional lightning strike sensor as described above has a volume of about 20 cm × 20 cm × 20 cm.
Since it is large in size and heavy at about 10 kg, it is difficult to use, and the cost in the manufacturing process is high. Further, since the sensor itself is composed of a conductor, there is a problem that the insulation is poor.
【0004】本発明は、上記のような従来技術の有する
問題点に鑑み、小型,軽量で製造コストも安く、且つ絶
縁性のよい落雷サージを検知する光磁界センサ(3300〜
100Vに適用)を提供することを目的とする。In view of the above-mentioned problems of the prior art, the present invention is an optical magnetic field sensor (3300-) which is small and lightweight, has a low manufacturing cost, and has a good insulating property.
Applies to 100V).
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明による光磁界センサは、入射側光ファイバ直
後のレンズから出射する光が全反射プリズム,希土類−
鉄ガーネット類,全反射プリズムの順に通過した後、受
光側光ファイバ直前のレンズによりその光ファイバへ導
かれるようにしたことを特徴としている。In order to achieve the above object, in the optical magnetic field sensor according to the present invention, the light emitted from the lens immediately after the incident side optical fiber is a total reflection prism, a rare earth element.
After passing through the iron garnet and the total reflection prism in this order, the light is guided to the optical fiber by a lens just before the light receiving side optical fiber.
【0006】[0006]
【作用】従って、本発明の装置では、磁性ガーネット膜
(以下、RIG膜と称す)が迷路状の磁区を有する垂直
磁化膜であるため、光がRIG膜を通過するとその直後
に回折現象を起こし、0次光,1次光,2次光・・・
・,n次光(nは自然数)と次光の次数に比例して広が
っていく(但し、磁界が0の場合は奇数次光のみ現れ
る)。これは、磁区が位相格子となるためである。この
ときのn次光の回折角度φは、磁化方向の異なる一対の
磁区の幅をdとすると 2・d・sin(φ)=n・λ ・・・(1) と表され、次光の次数が大きくなる程回折角度が大きく
なることが判る。Therefore, in the device of the present invention, since the magnetic garnet film (hereinafter referred to as RIG film) is a perpendicular magnetization film having a labyrinthine magnetic domain, when light passes through the RIG film, a diffraction phenomenon occurs immediately after that. , 0th order light, 1st order light, 2nd order light ...
., Spreads in proportion to the n-th light (n is a natural number) and the order of the next light (however, when the magnetic field is 0, only odd-order light appears). This is because the magnetic domain serves as a phase grating. At this time, the diffraction angle φ of the nth-order light is expressed as 2 · d · sin (φ) = n · λ (1), where d is the width of a pair of magnetic domains having different magnetization directions. It can be seen that the diffraction angle increases as the order increases.
【0007】又、上記式(1)より0次光の回折角度は
0であることから、光はRIG膜を通過した後も直進す
ることが判る。この0次光の強度Iと磁界Hとの関係
は、RIG膜の飽和磁界をHs,ファラデー回転角をθ
とすると I=cos2 (θ)+(H2 /Hs2 )・sin2 (θ)・・・(2) となる。従って、上記式(2)からは、光がRIG膜を
通過するだけで磁界による強度変調を受けることが判
る。但し、この現象は磁界の二乗に比例した光量となる
ため、磁界の大きさを計測する用途に用いるのには問題
があるが、上記の磁界の有無を判定するような落雷セン
サには十分使用可能である。From the above equation (1), since the diffraction angle of the 0th order light is 0, it can be seen that the light travels straight even after passing through the RIG film. The relationship between the intensity I of the 0th-order light and the magnetic field H is that the saturation magnetic field of the RIG film is Hs and the Faraday rotation angle is θ.
Then, I = cos 2 (θ) + (H 2 / Hs 2 ) · sin 2 (θ) (2) Therefore, it can be seen from the above formula (2) that light is intensity-modulated by the magnetic field only by passing through the RIG film. However, since this phenomenon produces a light quantity proportional to the square of the magnetic field, there is a problem in using it for the purpose of measuring the magnitude of the magnetic field, but it is sufficient for lightning strike sensors that judge the presence or absence of the above magnetic field. It is possible.
【0008】[0008]
【実施例】以下、図示した実施例に基づき本発明を説明
する。図1において、1は光源、2は光ファイバ、3は
レンズ、4は全反射プリズム、5はRIG膜、6は全反
射プリズム、7はレンズ、8は光ファイバ、9は光検出
器である。本発明による光磁界センサは上記のように構
成されているから、光源1から射出された光は光ファイ
バ2を通り射出した後、レンズ3,全反射プリズム4の
順に通過し、RIG膜5へ入射する。ここで、光はRI
G膜5内を磁界の強度に応じた上記式(2)で記載され
る強度変調を受けながら通過し、全反射プリズム6によ
り変向され、レンズ7によって光ファイバ8に集光され
る。その後、当該光は光ファイバ8により光検出器9に
導かれ光電変換される。尚、検出する磁界の向きはRI
G膜5を通過する光線と平行である。このように本発明
による光磁界センサの磁界検出部は、レンズ3,全反射
プリズム4,RIG膜5,全反射プリズム6及びレンズ
7から構成されており、最大の部品でもその容積はせい
ぜい5mm ×5mm ×5mm 程であるため、小型で軽量な装置
となる。The present invention will be described below based on the illustrated embodiments. In FIG. 1, 1 is a light source, 2 is an optical fiber, 3 is a lens, 4 is a total reflection prism, 5 is a RIG film, 6 is a total reflection prism, 7 is a lens, 8 is an optical fiber, and 9 is a photodetector. . Since the optical magnetic field sensor according to the present invention is configured as described above, the light emitted from the light source 1 passes through the optical fiber 2 and then passes through the lens 3 and the total reflection prism 4 in this order to the RIG film 5. Incident. Where light is RI
The light passes through the G film 5 while undergoing the intensity modulation described by the above formula (2) according to the intensity of the magnetic field, is deflected by the total reflection prism 6, and is condensed on the optical fiber 8 by the lens 7. After that, the light is guided to the photodetector 9 by the optical fiber 8 and photoelectrically converted. The direction of the magnetic field to be detected is RI
It is parallel to the light ray passing through the G film 5. As described above, the magnetic field detecting portion of the optical magnetic field sensor according to the present invention is composed of the lens 3, the total reflection prism 4, the RIG film 5, the total reflection prism 6 and the lens 7, and even the largest component has a volume of at most 5 mm. Since it is about 5mm x 5mm, it will be a small and lightweight device.
【0009】次に、上記に示した本発明の装置を実際に
製作する際、光源1には波長0.85μmの発行ダイオード
を、光ファイバ2及び8にはマルチモードファイバを、
レンズ3及び7にはセルフォックレンズを、RIG膜5
には(YbTb)5 Fe3O12を、光検出器9にはSiフォトディテ
クタを夫々用いた。尚、レンズ3,全反射プリズム4,
RIG膜5,全反射プリズム6から構成される磁界検出
部の容積は、3cm ×2cm ×1cm であり、その重量も約10
0gであった。Next, when actually manufacturing the above-mentioned device of the present invention, a light emitting diode having a wavelength of 0.85 μm is used for the light source 1, and a multimode fiber is used for the optical fibers 2 and 8.
Selfoc lenses are used for the lenses 3 and 7, and the RIG film 5 is used.
(YbTb) 5 Fe 3 O 12 was used as the photodetector, and a Si photodetector was used as the photodetector 9. The lens 3, the total reflection prism 4,
The volume of the magnetic field detection unit composed of the RIG film 5 and the total reflection prism 6 is 3 cm × 2 cm × 1 cm, and its weight is about 10
It was 0g.
【0010】更に、磁界の大きさと本発明による光磁界
センサの出力光検出器の出力との関係を調べたが、この
場合、電磁石により1500 Oe の磁界を加えたときの光検
出器9の出力を測定した。尚、磁界の大きさはガウスメ
ータを用いて測定した。その測定結果は図2に示した通
りであり、この図から光検出器の出力は式(2)に示し
たように、ほぼ磁界の二乗に比例していることが確認で
きる。約1400 Oe 以上の磁界で出力が飽和状態となるの
は、RIG膜の飽和電界が約1400 Oe であることによ
る。以上のことから、落雷の事実の有無を当該装置のO
N−OFFで判定することは十分可能であることが明ら
かとなった。Furthermore, the relationship between the magnitude of the magnetic field and the output of the output photodetector of the optical magnetic field sensor according to the present invention was examined. In this case, the output of the photodetector 9 when a magnetic field of 1500 Oe was applied by an electromagnet. Was measured. The magnitude of the magnetic field was measured using a Gauss meter. The measurement result is as shown in FIG. 2, and it can be confirmed from this figure that the output of the photodetector is almost proportional to the square of the magnetic field as shown in the equation (2). The output is saturated at a magnetic field of about 1400 Oe or more because the saturation electric field of the RIG film is about 1400 Oe. Based on the above, the presence or absence of the fact of lightning strike
It became clear that the determination by N-OFF is sufficiently possible.
【0011】又、本発明による光磁界センサを実際に落
雷センサとして用いる場合、磁界検出部は導線の近傍に
配設されるが、このときの導線をギャップ付き鉄芯で取
り囲み、当該ギャップに上記の磁界検出部を配設して磁
束密度を大きくして感度をよくすることも可能である。Further, when the optical magnetic field sensor according to the present invention is actually used as a lightning strike sensor, the magnetic field detecting portion is arranged in the vicinity of the conducting wire. At this time, the conducting wire is surrounded by an iron core with a gap, and the above-mentioned gap is provided in the gap. It is also possible to increase the magnetic flux density by arranging the magnetic field detection unit to improve the sensitivity.
【0012】[0012]
【発明の効果】上述のように、本発明による光磁界セン
サは、小型,軽量で、更に光学的に磁界を検出するため
絶縁性にも優れていることから、落雷センサに好適であ
る。又、本発明の装置では、光源及び光検出器は光ファ
イバを介して磁界検出部より十分遠方へ離しておくこと
が可能であるため電磁ノイズの影響を受けにくく、電磁
ノイズの多い測定環境の悪い場所での磁界の有無を判定
するセンサにも好適である。As described above, the optical magnetic field sensor according to the present invention is suitable for a lightning strike sensor because it is small in size and light in weight and excellent in insulation because it optically detects a magnetic field. Further, in the apparatus of the present invention, the light source and the photodetector can be kept sufficiently far away from the magnetic field detection section through the optical fiber, so that they are not easily affected by electromagnetic noise, and the measurement environment with a lot of electromagnetic noise can be used. It is also suitable for a sensor that determines the presence or absence of a magnetic field in a bad place.
【図1】本発明による光磁界センサの構成図である。FIG. 1 is a configuration diagram of an optical magnetic field sensor according to the present invention.
【図2】本発明による光磁界センサの出力と磁界との関
係図である。FIG. 2 is a relationship diagram between the output and the magnetic field of the optical magnetic field sensor according to the present invention.
1 光源 2,8 光ファイバ 3,7 レンズ 4,6 全反射プリズム 5 RIG(磁性ガーネット)膜 9 光検出器 1 light source 2,8 optical fiber 3,7 lens 4,6 total reflection prism 5 RIG (magnetic garnet) film 9 photodetector
Claims (1)
する光が全反射プリズム,希土類−鉄ガーネット類,全
反射プリズムの順に通過した後、受光側光ファイバ直前
のレンズにより該光ファイバへ導かれるようにしたこと
を特徴とする光磁界センサ。1. Light emitted from a lens immediately after an incident-side optical fiber passes through a total reflection prism, a rare earth-iron garnet, and a total reflection prism in this order, and then is guided to the optical fiber by a lens immediately before a light-receiving side optical fiber. An optical magnetic field sensor characterized in that.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15898093A JPH0712907A (en) | 1993-06-29 | 1993-06-29 | Optical magnetic field sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15898093A JPH0712907A (en) | 1993-06-29 | 1993-06-29 | Optical magnetic field sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0712907A true JPH0712907A (en) | 1995-01-17 |
Family
ID=15683588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15898093A Pending JPH0712907A (en) | 1993-06-29 | 1993-06-29 | Optical magnetic field sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0712907A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100730056B1 (en) * | 2004-12-07 | 2007-06-20 | 에이에스엠엘 네델란즈 비.브이. | Lithographic apparatus, reticle exchange unit and device manufacturing method |
-
1993
- 1993-06-29 JP JP15898093A patent/JPH0712907A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100730056B1 (en) * | 2004-12-07 | 2007-06-20 | 에이에스엠엘 네델란즈 비.브이. | Lithographic apparatus, reticle exchange unit and device manufacturing method |
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