JPH07109970B2 - Structure of twin tuning fork type piezoelectric vibrator - Google Patents
Structure of twin tuning fork type piezoelectric vibratorInfo
- Publication number
- JPH07109970B2 JPH07109970B2 JP62185036A JP18503687A JPH07109970B2 JP H07109970 B2 JPH07109970 B2 JP H07109970B2 JP 62185036 A JP62185036 A JP 62185036A JP 18503687 A JP18503687 A JP 18503687A JP H07109970 B2 JPH07109970 B2 JP H07109970B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- tuning fork
- fork type
- piezoelectric vibrator
- type piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000035945 sensitivity Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は圧力振動子，殊に圧力センサー等に用いられる
双音叉型圧電振動子の構造に関する。TECHNICAL FIELD The present invention relates to a structure of a pressure oscillator, in particular, a double tuning fork type piezoelectric oscillator used for a pressure sensor or the like.
（従来技術） 電子機器及び計測機器の小型化に伴ない実装される電子
回路部品の小型化要求が高まり圧電デバイス等の全長も
短かくせざるを得なくなっている。しかし，圧力センサ
ー等に用いられる圧電振動子，殊に気圧計又は水位計の
ように微細な圧力変化を検出するセンサーの圧電振動子
に於いては，その全長を短かくするに伴ないそのＱが低
下し，応力感度が低く且つCI値が高くなるという問題が
あり，この問題は圧電振動子のサイズが小さくなるほど
著しいという欠点があった。(Prior Art) With the miniaturization of electronic equipment and measuring equipment, there is an increasing demand for miniaturization of electronic circuit components to be mounted, and the total length of piezoelectric devices and the like is unavoidable. However, in piezoelectric vibrators used for pressure sensors, etc., especially in piezoelectric vibrators for sensors that detect minute pressure changes such as barometers or water gauges, the Q However, there is a problem that the stress sensitivity is low and the CI value is high, and this problem is more remarkable as the size of the piezoelectric vibrator becomes smaller.
（発明の目的） 本発明は上記欠点を解決するためになされたものであっ
て，微細なる圧電振動子に於いてもその自由振動を疎外
することなく，応力感度及びCI値を向上させた圧電振動
子の構造を提供せんとするものである。(Object of the Invention) The present invention has been made to solve the above-mentioned drawbacks, and even in a fine piezoelectric vibrator, it is possible to improve stress sensitivity and CI value without alienating the free vibration. It is intended to provide the structure of the oscillator.
（発明の概要） 本発明は上記目的を達成するために双音叉型圧電振動子
に於いて，該圧電振動子の保持部と振動子部との間に接
続部を設け，該接続部材の断面積を前記保持部材のそれ
より小さく且つ前記振動子部材のそれより大きくするこ
とによって微細なる圧電振動子に於いてもそのＱを維持
し，応力感度を高めるよう構成する。(Summary of the Invention) In order to achieve the above object, the present invention provides a double tuning fork type piezoelectric vibrator, in which a connecting portion is provided between a holding portion of the piezoelectric vibrator and the vibrator portion, and a disconnection of the connecting member is performed. By making the area smaller than that of the holding member and larger than that of the vibrator member, the Q is maintained and the stress sensitivity is enhanced even in a fine piezoelectric vibrator.
（発明の実施例） 以下図示した実施例に基づき本発明を詳細に説明する。(Examples of the Invention) The present invention will be described in detail based on the illustrated examples.
先づ本発明を説明する前に本発明の理解を助ける為に従
来の圧力センサーに用いられる圧電デバイスの構造につ
いて第２図を用いて簡単に説明する。Before describing the present invention, the structure of a piezoelectric device used in a conventional pressure sensor will be briefly described with reference to FIG. 2 in order to facilitate understanding of the present invention.
同図（ａ），（ｂ）は従来一般的な双音叉型圧電振動子
を表わしたもので3,3は保持部であって，夫々保持部の
間にスリット２で分割された振動子部1,1を持つ。上記
振動子の保持部3,3を支持構造体に接着材等により固定
し，該支持構造体を測定物の圧力等により可動させ前記
振動子に対し圧縮或いは引張りの力を加えることによっ
てその共振周波数を変化させ，該共振周波数を検出する
ことにより圧力を測定するものである。FIGS. 1A and 1B show a conventional general double-tuning fork type piezoelectric vibrator. Reference numerals 3 and 3 denote holders, and vibrator portions divided by slits 2 between the holders. Have 1,1. The holding portions 3, 3 of the vibrator are fixed to a support structure with an adhesive or the like, and the support structure is moved by the pressure of a measurement object or the like to apply a compressive or tensile force to the vibrator to cause its resonance. The pressure is measured by changing the frequency and detecting the resonance frequency.
しかし周知の如く，圧電振動子はその振動子部材が振動
する事により作動し，その振動素子の共振周波数決定の
要因は該振動子部の長さ及び振動振巾方向の寸法等によ
り決定され，更に該振動子の両端部に於ける固定状態に
も左右されるものである。即ち該振動子の両端部を固定
することにより該振動子の自由振動を疎外し，機械的Ｑ
を低下させるものである。However, as is well known, the piezoelectric vibrator operates by vibrating the vibrator member, and the factors for determining the resonance frequency of the vibrating element are determined by the length of the vibrator portion, the size in the vibration amplitude direction, etc. Furthermore, it depends on the fixed state at both ends of the vibrator. That is, by fixing both ends of the vibrator, the free vibration of the vibrator is isolated and the mechanical Q
Is to reduce.
上記障害は振動子の小型化につれ顕著に現われ，且つそ
の測定圧力が微細なものとなればなるほどその障害の影
響を受けるものである。The above-mentioned obstacles are more prominent as the size of the vibrator becomes smaller, and the finer the measured pressure is, the more the influence of the obstacles is affected.
上記障害を緩和するために第２図（ｃ）（ｄ）に示す如
く圧電振動子のスリット端部と保持部端部との長さｌを
長くする方法もとられる。In order to alleviate the above-mentioned obstacle, a method of increasing the length l between the slit end portion and the holding portion end portion of the piezoelectric vibrator as shown in FIGS.
しかしながら上記方法は電子回路部品の小型化に反する
ばかりでなく，負荷圧力に対する振動子の破壊強度の低
下をもたらすことになり，更に製造上の問題として強度
等の条件により歩留まりが悪く，生産性の低下を生じる
ものである。However, the above method is not only against the miniaturization of electronic circuit parts, but also brings about a decrease in the breaking strength of the vibrator against a load pressure. Further, as a manufacturing problem, the yield is poor due to the strength and other conditions, and the productivity is reduced. It causes a decrease.
この問題を解決するために本発明の双音叉型圧電振動子
は例えば第１図に示す如き構成をとる。In order to solve this problem, the double tuning fork type piezoelectric vibrator of the present invention has a structure as shown in FIG. 1, for example.
即ち，同図に示す如く振動子部1,1と保持部3,3との間に
接続部4,4を設け，該接続部材4,4の断面積を前記保持部
材3,3のそれより小さく且つ前記振動子部材1,1のそれよ
り大きくすることにより該振動子の自由振動を保持部の
固定によって疎外せず，そのＱを維持し，応力感度が良
く且つ振動もれを少なくするものである。That is, as shown in the figure, connecting portions 4 and 4 are provided between the vibrator portions 1 and 1 and the holding portions 3 and 3, and the cross-sectional area of the connecting members 4 and 4 is larger than that of the holding members 3 and 3. By making it small and larger than that of the vibrator members 1 and 1, free vibration of the vibrator is not alienated by fixing the holding portion, its Q is maintained, stress sensitivity is good and vibration leakage is reduced. Is.
更に上記形状の圧電振動子に於いてその応力感度及びCI
を良くするために，第１図（ｂ）に示したd1及びd2の関
係を d1／d2＝１ とすれば応力感度が最大となり，又l1及びＷの関係を l1/W≧３ とすればCI値が最小，即ち振動もれが最小となる。Furthermore, in the piezoelectric vibrator of the above shape, the stress sensitivity and CI
In order to improve the value, the stress sensitivity becomes maximum if the relationship between d 1 and d 2 shown in Fig. 1 (b) is set to d 1 / d 2 = 1, and the relationship between l 1 and W is l 1 / If W ≧ 3, the CI value is minimum, that is, the vibration leakage is minimum.
（発明の効果） 本発明は上述の如く構成し且つ機能するものであるか
ら，電子回路部品の小型化の要求に伴ない小型化する圧
電振動子，殊に圧力センサーに用いられる双音叉型圧電
振動子の応力感度を高め，更にＱを維持する上で著効を
奏するものである。(Advantages of the Invention) Since the present invention is configured and functions as described above, a piezoelectric vibrator that is miniaturized in accordance with the demand for miniaturization of electronic circuit components, particularly a double tuning fork type piezoelectric used for a pressure sensor. This is highly effective in increasing the stress sensitivity of the oscillator and maintaining the Q.
第１図は本発明の一実施例を示す双音叉型圧電振動子斜
視図及び平面図、第２図は従来の双音叉型圧電振動子を
示す斜視図及び平面図である。 １……振動子部、２……スリット、３……保持部、４…
…接続部FIG. 1 is a perspective view and a plan view of a double tuning fork type piezoelectric vibrator showing an embodiment of the present invention, and FIG. 2 is a perspective view and a plan view showing a conventional double tuning fork type piezoelectric vibrator. 1 ... Transducer part, 2 ... Slit, 3 ... Holding part, 4 ...
… Connection
Claims (1)
作られた振動素子からなる振動子部と保持部との間に接
続部を設け、該接続部材の断面積を前記保持部材のそれ
より小さく且つ前記振動子部材のそれより大きくした双
音叉型圧電振動子において、前記振動子部の振動素子の
幅をＷ、前記振動子部の切込みの幅を2d2、前記接続部
材の幅と前記振動子部材の幅の差を2d1、前記接続部の
長さをl1としたときに d1／d2＝１ 且つ l1/W≧３ を満たすことを特徴とする双音叉型圧電振動子。1. A connecting part is provided between a vibrator part composed of a vibrating element made by dividing a plate surface into a notch and a holding part, and a cross-sectional area of the connecting member is held by the holding part. In a double tuning fork type piezoelectric vibrator that is smaller than that of the member and larger than that of the vibrator member, the width of the vibrator element of the vibrator unit is W, the width of the notch of the vibrator unit is 2d 2 , and the connecting member is twin to the width and the resonator 2d 1 the difference between the width of the member, and satisfies the d 1 / d 2 = 1 and l 1 / W ≧ 3 when the length of the connecting portion was set to l 1 Tuning fork type piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62185036A JPH07109970B2 (en) | 1987-07-24 | 1987-07-24 | Structure of twin tuning fork type piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62185036A JPH07109970B2 (en) | 1987-07-24 | 1987-07-24 | Structure of twin tuning fork type piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6429110A JPS6429110A (en) | 1989-01-31 |
| JPH07109970B2 true JPH07109970B2 (en) | 1995-11-22 |
Family
ID=16163665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62185036A Expired - Lifetime JPH07109970B2 (en) | 1987-07-24 | 1987-07-24 | Structure of twin tuning fork type piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07109970B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7677105B2 (en) | 2005-09-26 | 2010-03-16 | Epson Toyocom Corporation | Double-ended tuning fork type piezoelectric resonator and pressure sensor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04131032U (en) * | 1991-05-27 | 1992-12-01 | 日本航空電子工業株式会社 | Torsional vibration twin tuning fork type vibrator |
| JP5998688B2 (en) | 2012-07-10 | 2016-09-28 | セイコーエプソン株式会社 | Vibrating piece, vibrator, electronic device, electronic equipment, moving object |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62141810A (en) * | 1985-12-16 | 1987-06-25 | Toyo Commun Equip Co Ltd | Structure of double beam piezoelectric resonator |
-
1987
- 1987-07-24 JP JP62185036A patent/JPH07109970B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7677105B2 (en) | 2005-09-26 | 2010-03-16 | Epson Toyocom Corporation | Double-ended tuning fork type piezoelectric resonator and pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6429110A (en) | 1989-01-31 |
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