JPH0710519Y2 - Laminating device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Outline] A green sheet laminating apparatus for laminating green sheets of unit substrates constituting a laminated circuit board made of ceramics to form a laminated body, which is laminated for accurate alignment during lamination. For the purpose of improving the positioning accuracy, a frame that is erected on the installation surface, an elevating mechanism that is provided on the frame and can ascend and descend in the vertical Z-axis direction, and a lower end portion of the elevating mechanism. A suction plate provided on the lower surface for releasably adsorbing and holding a green sheet; and a stacking table on which a green sheet provided below the suction plate so as to face the suction plate and on which the green sheet released from the suction plate can be placed and stacked A plurality of marks serving as a reference for the stacking position of the green sheets adsorbed on the adsorption plate are provided on the stacking table in a fixed position. A plurality of cameras visible from above in the vertical direction, and a position directly above a plurality of marks serving as a reference for stacking positions of the green sheets which are provided on the installation surface and support the loading table above and which are sucked by the suction plate. X can move the loading table in the horizontal XY directions to position the cameras respectively.
-Y moving mechanism and a rotating mechanism that is provided in a vertical relationship with the XY moving mechanism and is rotatable about the Z axis. The XY moving mechanism and the rotating mechanism are moved to move the camera. It is constructed such that the suction plate is lowered by the elevating mechanism and the suction state of the suction plate is opened in the state immediately above and below the mark of the green sheet and the green sheet is placed and stacked on the stacking table. .

[Industrial application field]

The present invention relates to a green sheet laminating apparatus for laminating green sheets of unit substrates constituting a laminated circuit board made of ceramics to form a laminated body, and in particular, a new arrangement for improving the positioning accuracy when laminating the green sheets. The present invention relates to a laminating device.

In a manufacturing process for manufacturing a multilayer ceramic substrate, a predetermined number of green sheets, which are unit substrates, are overlapped with each other so that the circuit patterns formed on the green sheets are accurately aligned with each other and bonded. If the green sheets are superposed in such a manner that they are accurately positioned with respect to each other, the circuit connection between the layers becomes defective.

Therefore, it is important that the green sheets are superposed and laminated by highly accurate alignment.

Recently, large-sized multilayer ceramic substrates have come to be used, and it is particularly desired that even such a green sheet be laminated with high alignment accuracy.

[Conventional technology]

The conventional structure of the stacking device for stacking green sheets is the second
It is shown in the schematic block diagram of the figure. 2A is a side view and FIG. 2B is a cross-sectional view of a main part. As shown in FIG. (A), the laminating apparatus has a lower end portion of an inverted L-shaped frame 11 mounted on a transfer mechanism 10 which is installed on an installation surface 7 and is movable in X and Y directions. This frame 11
Rotation mechanism 12 that can rotate about the Z-axis perpendicular to the upper tip of the
And a lifting mechanism 4 that can move up and down in the vertical Z-axis direction below the rotation mechanism 12, and a suction plate 1 is mounted below the lifting mechanism 4 so as to be able to move up and down.

The XY transfer mechanism 10 is configured so that it can be moved in each direction by rotating a ball screw, for example, so that a precise movement can be performed. The rotating mechanism 12 is configured to be finely rotated by a driving source such as a pulse motor, and thereby the suction plate 1 is rotated in an arbitrary required amount in the arrow θ direction.

The elevating mechanism 4 is composed of a cylinder or the like that can be driven by fluid pressure, and by advancing and retracting the adsorption plate 1, the adsorption plate 1 can be elevated and lowered by an arbitrary height in the vertical arrow Z direction.

The suction plate 1 is provided with a large number of suction holes on the lower surface, and when the air in the suction holes is sucked from the tube 14, a negative pressure is generated, whereby the green sheet 3 is sucked onto the suction surface.
Can be adsorbed and held on 1B.

Cameras 9 are vertically provided on a plurality of support bases 13 attached to the installation surface 7, and the camera 9 passes through the through holes 1A of the suction plate 1 as shown in FIG. Marks 3A, which serve as stacking position references, are formed at a plurality of predetermined positions of the green sheet 3 adsorbed to the adsorption plate 1, and in this example, fine holes can be observed and visually observed.

A stacking table on which the green sheets 3 can be placed and stacked is disposed below the suction plate 1 and on the installation surface 7.

With the above configuration, the green sheet 3 to be laminated is adsorbed and held on the lower surface of the adsorption plate 1, and the adsorption plate 1 is finely adjusted and moved on the plane by the XY transfer mechanism 10 and the rotation mechanism 12 to obtain the green sheet. The positions of the marks 3A of 3 are positioned directly below the camera 9, respectively, and it is visually confirmed through the camera 9 that the marks 3A match a predetermined reference position of the camera 9. XY transfer mechanism 10 and rotation mechanism
In this way, the position 12 is finely adjusted so that the position of the reference mark 3A of the green sheet 3 coincides with the position directly below the reference of each camera 9.

As described above, when the reference position of the camera 9 and the reference mark 3A of the green sheet 3 are aligned,
In that state, the lifting mechanism 4 is lowered in the vertical Z-axis direction.

When the green sheet 3 is lowered and reaches the stacking table 2, the suction state of the suction plate 1 is released, so that the green sheet 3 is placed on the stacking table 2. In this way, the green sheet 3 is vertically lowered and placed on the stacking table 2 without being displaced from the position aligned with the camera 9.

The positions of the marks 3A, which serve as the stacking position reference, are formed on all the green sheets 3 so as to coincide with predetermined positions. Therefore, the XY transfer mechanism 10 and the rotation mechanism 12 are moved and adjusted in a state where the green sheet 3 next placed on the stacking table 2 is adsorbed on the adsorption plate 1, and the position reference mark 3A is taken by the camera 9. Align with the reference position of and lift mechanism 4
By lowering the green sheet 3 already attached on the stacking table 2 to reach the green sheet 3 adsorbed on the adsorption plate 1 and release the adsorption state of the adsorption plate 1 to accurately position It is possible to stack the green sheet 3 on.

As described above, since the position of the mark 3A on the green sheet 3 is formed at a fixed position, the position directly below the position of the camera 9 fixedly installed on the installation surface 7 is used as a reference. The relative position is defined by aligning the mark 3A with the mark 3A, and the position of the mark 3A is aligned with the predetermined position on all the green sheets 3 regardless of the number of stacked layers, without causing the positional deviation. Stacked.
Therefore, the connection failure of the circuit pattern does not occur.

[Problems to be solved by the device]

However, according to the conventional laminating apparatus as described above, the XY transfer mechanism 10 is provided at the base of the frame 11 which has a cantilevered rotation mechanism and a lifting mechanism at the tip of the inverted L-shape.
In the configuration provided with, the slight play required for the operation of the XY transfer mechanism 10 becomes “backlash”, and the frame 11 is tilted as shown by the dotted line, causing “blur”.

Therefore, even if the green sheet 3 is standardly positioned with respect to the camera 9, the descending direction of the elevating mechanism 4 is not the correct vertical Z direction due to "blurring" and the stacking position deviates from the correct position. I have a problem.

In view of the above conventional problems, the present invention is to provide a stacking device with improved positioning accuracy in order to accurately perform positioning when stacking green sheets.

[Means for solving problems]

In order to solve the above problems, the gist of the present invention is to provide a frame that is erected on the installation surface, and an elevating mechanism that is provided on the frame and that can ascend and descend in the vertical Z-axis direction. A suction plate provided at the lower end of the lifting mechanism and capable of holding the green sheet by suction so that the green sheet can be opened.
A stacking table, which is provided below the suction plate so as to face the suction plate and on which green sheets released from the suction plate can be placed and stacked, and a green which is provided on the stacking table and is attracted to the suction plate in a fixed position. A plurality of cameras capable of visually recognizing each of a plurality of marks serving as a stacking position reference of the sheets from above in the vertical direction, and a green sheet which is provided on the installation surface and supports the stacking table above and which is sucked by the suction plate. Up and down the XY moving mechanism and the XY moving mechanism that can move the loading table in the horizontal XY directions to position the cameras directly above the plurality of marks that are the stacking position reference of And a rotation mechanism that is provided in a relationship to rotate about the Z-axis. The XY movement mechanism and the rotation mechanism are moved to move the cover. In this state, the suction plate is lowered by the elevating mechanism and the suction state of the suction plate is released to stack the green sheets on the stacking table. The above-mentioned problems can be solved by the configuration.

[Action]

According to the construction means of the present invention, since the frame provided with the lifting mechanism is erected and fixed on the installation surface, there is no intervening moving mechanism as in the prior art, so that a strong and stable posture is maintained. . Since the lifting mechanism is not supported by the rotation mechanism as in the conventional case, the suction plate can be reliably moved up and down in a stable manner.

A vertically mounted camera is fixed on the stacking table for stacking green sheets, which is provided at the lower end of the elevating mechanism and faces the lower surface of the suction plate that sucks and holds the green sheets on the lower surface. Arranged to get what.

Since the loading table can be finely adjusted to an arbitrary position in the horizontal plane by the XY moving mechanism at the bottom of the loading table and the rotating mechanism about the Z axis, the tilting due to the "backlash" of the moving mechanism does not occur. The loading table and the camera are moved and adjusted in a stable state.

In other words, align the camera on the stacking table with the mark position of the green sheet adsorbed on the suction plate, place the green sheets on the stacking table in this state, and stack them to repeat the simple operation at the same position. The number of sheets can be stacked easily and accurately.

Therefore, it is possible to stabilize the positional accuracy when stacking, and it is particularly effective for stacking large green sheets.

〔Example〕

Hereinafter, the laminating apparatus of the present invention will be described in detail with reference to the drawings based on an embodiment based on the structure. The same parts are denoted by the same reference numerals throughout the drawings.

FIG. 1 is an embodiment of a laminating apparatus of the present invention, FIG. 1 (a) is a schematic side view, and FIG. 1 (b) is a cross-sectional view of the main part thereof.
As shown in FIG. (A), an elevating mechanism 4 capable of ascending / descending in the Z direction of the vertical axis is provided in the central portion of a gate-shaped frame 8 in which both sides of the support columns are erected and fixed on an installation surface 7. Is provided,
On the lower surface of the lower end of the elevating mechanism 4, a vacuum type suction plate 1 capable of holding the green sheet 3 in an openable manner is attached.

The stacking table 2, which is provided below the suction plate 1 and on which the green sheets 3 released from the suction plate 1 can be placed and stacked, is formed on the surface of the green sheet 3 sucked by the suction plate 1. A plurality of cameras 9 capable of visually recognizing each of the plurality of marks 3A serving as a stacking position reference from above in the vertical direction are mounted on the stacking table 2 at two positions in a fixed state by the support 9A.

The stacking table 2 is provided on the lower installation surface 7 and can be moved in the horizontal XY direction by a ball screw.
The Y moving mechanism 5 and the XY moving mechanism 5 are supported in the illustrated state so as to be movable in each direction by a rotating mechanism 6 which is provided in a vertical relationship with the Y moving mechanism 5 and can be rotated around the Z axis by a pulse motor. .

Here, for example, the X direction is a horizontal direction with respect to the paper surface, the Y direction is a direction orthogonal to the paper surface, and the Z axis is a vertical direction (vertical direction) parallel to the paper surface.

The XY moving mechanism 5 and the rotating mechanism 6 move the loading table 2 in each direction to move the camera 9
Can be finely moved together with the position fixed on the stacking table 2, and by this fine movement, the position of the camera 9 is a mark serving as a stacking position reference formed on the green sheet 3 sucked by the suction plate 1. The vertical position can be matched with 3A.

With the above configuration, the green sheet 3 is conveyed and brought into close contact with the lower portion of the suction plate 1 by means not shown,
The green sheet 3 is suction-held on the suction plate 1 by sucking the air on the suction plate surface via 14. At this time, as shown in FIG. 2B, the green sheet 3 is sucked so that its mark 3A can be seen through the through hole 1A of the suction plate 1.

The position of the green sheet 3 thus sucked by the suction plate 1 is set to the raised position above the stacking table 2 and the focus position where the camera 9 can visually recognize the mark 3A.

In the state of FIG. 2B, the position of the central axis of the image pickup of the camera 9 is on the surface of the suction plate 1 which is displaced from the position of the through hole 1A of the suction plate 1. Then, the loading table 2 is moved in the direction of arrow A in the figure by driving the XY moving mechanism 5, and the through hole 1A
Mark 3A is the field of view of camera 9,
The central axis position of the visual field of the camera 9 is made to coincide with the center of 3A.
At this time, the rotation mechanism 6 is also driven to rotate about the Z-axis as needed, but the XY movement mechanism 5 is also finely moved in the XY direction, so that the marks 3A at a plurality of points are respectively moved. Match the cameras 9.

In other words, this means that the camera 9 is moved to a position directly above the mark 3A of the fixed green sheet 3 which is fixed in position.

In a state where the centers are aligned with each other, the elevating mechanism 4 is driven downward to reach the green sheet 3 on the stacking table 2, and at the same time, the suction state of the suction plate 1 is released, so that the green sheet 3 is placed on the stacking table 2. Placed on. This state is a state in which the center of the mark 3A of the green sheet 3 is aligned with the center axis of the camera 9 by descending only in the vertical Z-axis direction.

In order to stack the next green sheet 3 on the green sheet 3 placed on the stacking table 2, the next green sheet 3 is positioned on the stacking table 2 by repeating the above operation. Since such an operation is exactly the same, it means that the position of the mark 3A of the next green sheet 3 is aligned with the mark 3A of the green sheet 3 placed on the previous sheet without any difference. It is obvious without explaining again.

Therefore, when the suction state of the suction plate 1 is released and the next green sheet 3 is placed on the stacking table 2, the green sheet 3 is stacked on the previous green sheet so as to coincide with a predetermined position without causing a displacement.

In this way, a predetermined number of green sheets 3 can be accurately laminated to form a laminated body of green sheets that should be a laminated circuit board. It should be

According to the configuration of the present invention, the XY moving mechanism 5 is mounted on the installation surface 7.
The rotating table 6 and the rotating mechanism 6 are vertically arranged, and the stacking table 2 is arranged on the upper part thereof.
Since there is no backlash due to the eccentric position configuration of the transfer mechanism 10 and no "blur" in the frame 8, there is no displacement even with a large green sheet, and the position is better than in the past. It is possible to perform highly accurate lamination.

In the above embodiment, the XY moving mechanism 5 and the rotating mechanism 6 are not limited to the vertical relationship as shown in the figure, and there is no difference in action and effect even if the rotating mechanism 6 is arranged below.

In addition, the camera needs a microscopic enlargement function so that minute marks can be accurately aligned and visually recognized. For this reason also, it is preferable to be able to perform visual alignment with a monitor device that can enlarge the image pickup screen so that multiple locations can be aligned while simultaneously checking.

[Effect of device]

As described above in detail, according to the stacking apparatus of the present invention, the suction plate is attached to the frame fixedly installed on the installation surface through the elevating mechanism, and the loading table with the camera fixed in position is installed. XY placed on the plane
Since the moving mechanism is supported by the rotating mechanism which is vertically related, the camera corresponding to the movement of the stacking table is positioned immediately above the mark with respect to the mark serving as the stacking position reference of the green sheets sucked and held on the suction plate. By doing so, the vertical sheet of the lifting mechanism supported in a stable state is lowered in the Z direction to stack and stack the green sheets on the stacking table, so that the moving mechanism separates them into the optimum positions according to their respective functions. Due to the arrangement, especially X-
The "backlash" of the Y movement mechanism does not hinder the positioning accuracy of the suction plate.

Therefore, compared to the conventional case, the stacking positioning accuracy can be improved, and the practical effect of high reliability without positional deviation is extremely remarkable.

[Brief description of drawings]

FIG. 1 is an explanatory view of an embodiment according to the present invention, FIG. 1 (a) is a schematic side view, FIG. 1 (b) is a sectional view of a main part, and FIG. FIG. 1A is a schematic side view, and FIG. 1B is a cross-sectional view of a main part. In all figures, 1 is a suction plate, 2 is a loading plate,
3 is a green sheet, 4 is an elevating mechanism, 5 is an XY moving mechanism, 6 is a rotating mechanism, 7 is an installation surface, 8 is a frame, and 9 is a camera.

Claims (1)

[Scope of utility model registration request] 1. A frame which is erected on an installation surface, an elevating mechanism which is provided on the frame and can ascend and descend in a vertical Z-axis direction, and a green lower surface which is provided at a lower end portion of the elevating mechanism. An adsorption plate capable of adsorbing and holding sheets in a releasable manner, a stacking table provided below the adsorption plate so as to face the suction plate, and stacking and stacking green sheets released from the adsorption plate, and a stacking table provided on the stacking table In the fixed position, a plurality of cameras that can visually recognize each of a plurality of marks serving as a stacking position reference of the green sheets adsorbed on the adsorption plate from above in the vertical direction, and the installation surface that supports the loading table above In order to position the above-mentioned cameras directly above the plurality of marks which are the stacking position reference of the green sheets which are provided on the above-mentioned suction plate An X-Y moving mechanism capable of moving the loading table in the horizontal X-Y direction, and a rotating mechanism provided in a vertical relationship with the X-Y moving mechanism and rotatable about the Z axis. -The Y moving mechanism and the rotating mechanism are moved so that the camera is located directly above the mark on the green sheet, and in that state, the suction plate is lowered by the elevating mechanism and the suction state of the suction plate is released to release the green sheet. And a stacking device for stacking the stacks on the stacking table.