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JPH0692888B2 - X-ray CT system - Google Patents

X-ray CT system

Info

Publication number
JPH0692888B2
JPH0692888B2 JP2004258A JP425890A JPH0692888B2 JP H0692888 B2 JPH0692888 B2 JP H0692888B2 JP 2004258 A JP2004258 A JP 2004258A JP 425890 A JP425890 A JP 425890A JP H0692888 B2 JPH0692888 B2 JP H0692888B2
Authority
JP
Japan
Prior art keywords
ray
inspection object
rotation axis
angle
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004258A
Other languages
Japanese (ja)
Other versions
JPH03209119A (en
Inventor
宏尚 山地
泰昭 永田
一雄 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP2004258A priority Critical patent/JPH0692888B2/en
Publication of JPH03209119A publication Critical patent/JPH03209119A/en
Publication of JPH0692888B2 publication Critical patent/JPH0692888B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は産業用のX線CT装置、特に微細構造物の内部を
非破壊で検査するのに好適なX線CT装置に関するもので
ある。
TECHNICAL FIELD The present invention relates to an industrial X-ray CT apparatus, and more particularly to an X-ray CT apparatus suitable for nondestructively inspecting the inside of a microstructure.

〔従来の技術〕[Conventional technology]

X線CT装置は外部から人体の内部を観察することができ
るという優れた特徴故に、医療の分野において広く使用
されている。また、各種工業製品の内部を非破壊で検査
することができるので、近年産業の分野においても徐々
に普及しつつある。
The X-ray CT apparatus is widely used in the medical field because of its excellent feature that the inside of the human body can be observed from the outside. In addition, since the inside of various industrial products can be inspected nondestructively, it is gradually becoming popular in the industrial field in recent years.

産業用のX線CT装置は、通常被検査物を回転させてX線
の透過データを得る。したがって、被検査物を保持して
回転する回転装置の回転軸と被検査物の中心線とを一致
させる必要がある。
An industrial X-ray CT apparatus usually rotates an object to be inspected to obtain X-ray transmission data. Therefore, it is necessary to align the rotation axis of the rotating device that holds and rotates the inspection object with the center line of the inspection object.

従来のX線CT装置では、この被検査物の中心線を回転装
置の回転軸に合わせるための特別の装置、手段は設けら
れておらず、かかる操作は観測者の経験や技量に頼る手
作業で行っていた。
The conventional X-ray CT apparatus is not provided with any special device or means for aligning the center line of the object to be inspected with the rotation axis of the rotating device, and such an operation depends on the experience and skill of the observer. I was going there.

(発明が解決しようとする課題) ところで、被検査物の中心線と回転装置の回転軸とが一
致せず被検出物の中心線が傾ていると、回転装置の回転
に伴って被検査物は歳差運動を行う。この状態で断層像
の再構成を行っても、被検査物がX線ビームからはずれ
たり、透過データが欠如して明瞭な断層像は得られな
い。10μm程度の高い分解能が要求される産業用のX線
CT装置では、特に被検査物の中心線を厳密に回転装置の
回転軸と一致させなければ正確な形状測定はできない。
(Problems to be Solved by the Invention) By the way, when the center line of the object to be inspected and the rotation axis of the rotating device do not match and the center line of the object to be detected is inclined, the object to be inspected is accompanied by the rotation of the rotating device. Performs precession exercises. Even if the tomographic image is reconstructed in this state, a clear tomographic image cannot be obtained because the inspection object deviates from the X-ray beam or transmission data is lacking. Industrial X-ray that requires high resolution of about 10 μm
In the CT device, accurate shape measurement cannot be performed unless the center line of the object to be inspected is exactly aligned with the rotation axis of the rotation device.

しかし、従来のように手作業で被検査物の中心線を回転
装置の回転軸に会わせる方法では、通常何回かの試行錯
誤を繰り返さなければらず被検査物の設置に時間がかか
り、装置の利用効率が悪い。また、従来の方法では、中
心線と回転軸とを合わせても、その精度には限界があ
り、操作の再現性にも乏しい。
However, in the conventional method of manually aligning the center line of the object to be inspected with the rotation axis of the rotating device, it takes time to set up the object to be inspected because it usually requires repeated trial and error. Is not used efficiently. Further, in the conventional method, even if the center line and the rotation axis are aligned with each other, the accuracy is limited and the reproducibility of the operation is poor.

本発明は上記事情に基づいてなされたものであり、簡便
な手段で被検査物の中心線を回転装置の回転軸に一致さ
せることのできるX線CT装置を提供することを目的とす
るものである。
The present invention has been made based on the above circumstances, and it is an object of the present invention to provide an X-ray CT apparatus capable of aligning the center line of an object to be inspected with the rotation axis of a rotating device by a simple means. is there.

〔課題を解決するための手段〕[Means for Solving the Problems]

前記の目的を達成するために本発明に係るX線CT装置
は、扇状のX線ビームを発生するX線発生装置と、被検
査物を回転させる回転装置と、該回転装置を介して前記
X線発生装置と対向して配置され前記X線発生装置によ
り放射され前記被検査物を透過過した後のX線を検出す
るX線検出装置とを有し、前記回転装置によって前記被
検査物を微小角度づつ回転させてX線の透過データを収
集し、該透過データにより前記被検査物の断層像を再構
成して画像表示装置に表示するX線CT装置において、 各々の角度位置における前記透過データを前記画像表示
装置に順次並べて表示したときに、各透過データによる
像の中心と前記回転装置の回転軸に対応する中心軸との
距離が最大になるときの距離に基づき、前記被検査物の
中心線の前記回転軸に対する傾きの方向及びその角度を
求める傾き検出手段と、 該傾き検出手段により求めた前記被検査物の中心線の前
記回転軸に対する傾きの方向及びその角度に基づいて、
前記回転装置の回転軸の対する被検査物の角度を変化さ
せて前記中心線を前記回転軸に一致させる角度調整手段
とを設けたことを特徴とするものである。
In order to achieve the above-mentioned object, an X-ray CT apparatus according to the present invention is an X-ray generator that generates a fan-shaped X-ray beam, a rotating device that rotates an object to be inspected, and the X-ray generator through the rotating device. An X-ray detector arranged to face the X-ray generator and radiated by the X-ray generator to detect X-rays that have passed through the object to be inspected. In an X-ray CT apparatus that collects X-ray transmission data by rotating by a small angle, reconstructs a tomographic image of the inspection object based on the transmission data, and displays the image on an image display device, the transmission at each angular position When the data is sequentially arranged and displayed on the image display device, the object to be inspected is based on the distance when the distance between the center of the image by each transmission data and the central axis corresponding to the rotation axis of the rotation device becomes maximum. On the axis of rotation of the center line of And tilt detection means for determining the direction and the angle of inclination of, based on the direction and the angle of inclination with respect to the rotation axis of the center line of the inspection object as determined by the detecting means-out inclined,
Angle adjusting means for changing the angle of the object to be inspected with respect to the rotation axis of the rotating device to match the center line with the rotation axis is provided.

〔作用〕[Action]

本発明に係るX線CT装置は前記の構成によって、被検査
物を微小角度づつ回転させて被検査物にX線を放射する
ことにより得られたそれぞれの角度位置におけるX線の
透過データを用いて、被検査物のスライス画像を画像表
示装置の画面上に並べて同時に表示すると、被検査物の
回転角度の変化に応じて画面上で被検査物のスライス画
像の中心と回転装置の回転軸に対応する中心軸との距離
が変化する。傾き検出手段はこの距離が最大となるとき
の距離に基づいて、被検査物の中心線が傾いている方向
及びその角度を検出する。
The X-ray CT apparatus according to the present invention uses the X-ray transmission data at each angular position obtained by rotating the inspection object by a minute angle and irradiating the inspection object with X-rays by the above-described configuration. When the slice images of the inspection object are displayed side by side on the screen of the image display device at the same time, the center of the slice image of the inspection object and the rotation axis of the rotating device are displayed on the screen according to the change of the rotation angle of the inspection object. The distance from the corresponding central axis changes. The tilt detecting means detects the direction in which the center line of the inspection object is tilted and its angle based on the distance when the distance is maximum.

角度調整手段は、傾き検出手段によって得られた傾きの
方向及びその角度に基づいて回転装置の回転軸に対する
被検査物の角度を変化させて、被検査物の中心線を回転
装置の回転軸に一致させる。
The angle adjusting means changes the angle of the object to be inspected with respect to the rotation axis of the rotating device on the basis of the inclination direction and the angle obtained by the inclination detecting means, and sets the center line of the object to be inspected as the rotating axis of the rotating device. Match.

〔実施例〕〔Example〕

以下に本発明の一実施例について図面を参照しつつ説明
する。第1図は本発明の一実施例であるX線CT装置の配
置図である。同図に示すX線発生装置は、被検査物Aに
向けて扇状のX線ビームを発生する微小焦点のX線発生
装置1、被検査物Aを保持しその方向を任意に変えるこ
とのできる被検査物保持装置2、被検査物保持装置によ
って保持された被検査物Aを回転させる回転テーブル
3、被検査物Aを透過した後のX線を検出するX線検出
器4、及びX線検出器によって得られた多数のX線透過
データを処理しCT画像を再構成して画像表示装置5aに表
示するコンピュータ5により構成される。尚、X線発生
装置1と被検査物Aとの距離をa、被検査物AとX線検
出器4との距離をbとする。
An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a layout view of an X-ray CT apparatus which is an embodiment of the present invention. The X-ray generator shown in the figure can hold the micro-focus X-ray generator 1 that generates a fan-shaped X-ray beam toward the inspection object A and the inspection object A, and change its direction arbitrarily. Inspected object holding device 2, rotating table 3 for rotating inspected object A held by the inspected object holding device, X-ray detector 4 for detecting X-rays after passing through inspected object A, and X-ray The computer 5 is configured to process a large number of X-ray transmission data obtained by the detector, reconstruct a CT image, and display it on the image display device 5a. The distance between the X-ray generator 1 and the inspection object A is a, and the distance between the inspection object A and the X-ray detector 4 is b.

第2図は被検査物Aとこれを通過する扇状のX線ビーム
7を横から見た図であり、hは被検査物保持装置2の最
上面を基準としたX線ビーム7(スライス面)の高さ、
θは被検査物Aの中心線8と回転軸9がなす角、rはX
線ビームの面内での回転軸9と被検査物の中心線8との
距離である。したがって、第2図においては tanθ=r/h (1) の関係がある。第2図の配置で、被検査物Aのそれぞれ
の角度位置におけるX線を検出して得られた透過データ
は、数値化されてコンピュータ5内部のメモリに記憶さ
れる。
FIG. 2 is a side view of the inspection object A and a fan-shaped X-ray beam 7 passing through the inspection object A, and h is the X-ray beam 7 (slice surface) with the uppermost surface of the inspection object holding device 2 as a reference. ) Height,
θ is the angle between the center line 8 of the inspection object A and the rotation axis 9, and r is X
It is the distance between the rotation axis 9 and the center line 8 of the inspection object in the plane of the line beam. Therefore, in FIG. 2, there is a relationship of tan θ = r / h (1). The transmission data obtained by detecting the X-rays at the respective angular positions of the inspection object A in the arrangement of FIG. 2 is digitized and stored in the memory inside the computer 5.

更に、これらの透過データをコンピュータ5の画像表示
装置5aの画面上に表示するとスライス画像を並べたもの
となり、この中でX線が吸収される被検査物の部分は、
たとえば黒くなって現れる。第3図は回転テーブル3を
回転させることによって、たとえば180度の角度範囲に
わたってX線の透過データの収集をN回行い、こうして
得られるN個のスライス画像を順に一つの画面上に並べ
て同時に表示したものの一例を示す図である。
Furthermore, when these transmission data are displayed on the screen of the image display device 5a of the computer 5, slice images are arranged side by side, and the portion of the inspection object in which X-rays are absorbed is:
For example, it appears black. FIG. 3 shows that by rotating the rotary table 3, X-ray transmission data is collected N times over an angular range of 180 degrees, and N slice images obtained in this way are sequentially arranged and displayed on one screen at the same time. It is a figure which shows an example of what was done.

第3図において曲線j(同図の点線)は被検査物Aの中
心の軌跡に対応し、画面の中央の中心軸(一点鎖線)k
は回転テーブル3の回転軸に対応するよう予め設定され
ている。被検査物Aの中心線が第2図のように回転軸か
ら傾いていると、被検査物Aの中心線は回転テーブル3
の回転に伴って歳差運動を行うので、第3図におけるス
ライス画像の中心の軌跡は中心軸kから逸脱する曲線j
となる。また、第3図に示すスライス像画は、被検査物
AをX線検出器4の位置に拡大投影した像として検出さ
れるもので、曲線jの中心線kからのずれの最大値がR
であったとすると、 R=r(a+b)/a (2) という関係が成り立つ。したがって(1)式より、 θ=tab-1Ra/h(a+b) (3) が得られ、この式からθを求めることができる。次に、
第4図に示すように被検査物支持装置2上においてスラ
イス面の法線に一致する回転テーブル3の回転軸方向を
z軸、回転軸からみたX線発生装置の方向をx軸、これ
らに垂直な方向をy軸とする座標系を定義する。ここ
で、被検査物Aの中心線をx−y面に射影した直線dが
x軸となす角をφとすると、第3図の曲線jの中心軸k
からのずれが最大値Rとなるのは、回転テーブル3の回
転角度がπ/2−φとなったときである。しがって、第3
図に示すずれの最大値Rの角度位置からφを求めること
ができる。
In FIG. 3, a curve j (dotted line in the same figure) corresponds to the locus of the center of the inspection object A, and the central axis (dashed line) k at the center of the screen
Is preset so as to correspond to the rotation axis of the turntable 3. When the center line of the inspection object A is inclined from the rotation axis as shown in FIG.
Since a precession motion is performed in association with the rotation of, the locus of the center of the slice image in FIG. 3 has a curve j deviating from the central axis k.
Becomes The slice image shown in FIG. 3 is detected as an image obtained by enlarging and projecting the inspection object A at the position of the X-ray detector 4, and the maximum value of the deviation of the curve j from the center line k is R.
Then, the relation of R = r (a + b) / a (2) holds. Therefore, θ = tab −1 Ra / h (a + b) (3) is obtained from the equation (1), and θ can be obtained from this equation. next,
As shown in FIG. 4, the rotation axis direction of the rotary table 3 which coincides with the normal line of the slice surface on the inspection object supporting device 2 is the z axis, and the direction of the X-ray generator viewed from the rotation axis is the x axis. Define a coordinate system with the y-axis in the vertical direction. Here, when the angle formed by the straight line d projecting the center line of the inspection object A on the xy plane and the x axis is φ, the center axis k of the curve j in FIG.
The deviation from the maximum value R becomes when the rotation angle of the turntable 3 becomes π / 2−φ. Therefore, the third
Φ can be obtained from the angular position of the maximum deviation R shown in the figure.

更に、第4図に示す二つの角度α,βは、 α=tan-1(rcosφ/h) =tan-1(aRcosφ/h(a+b)) (4) β=tan-1(rsinφ/h) =tan-1(aRsinφ/h(a+b)) (5) で表すことができる。コンピュータ5は(4)式及び
(5)式に基づいてα及びβの値を求め、その信号を角
度調整手段(図示せず)に送る。
Further, the two angles α and β shown in FIG. 4 are α = tan −1 (rcosφ / h) = tan −1 (aRcosφ / h (a + b)) (4) β = tan −1 (rsinφ / h) = Tan −1 (aRsinφ / h (a + b)) (5) The computer 5 obtains the values of α and β based on the equations (4) and (5) and sends the signals to the angle adjusting means (not shown).

角度調整手段は、たとえばステップパルスモータによ
り、コンピュータ5からの信号を受けて被検査物保持装
置2を任意の方向に回転させることができるように構成
されている。したがって、回転テーブル3を再び第4図
に示す最初の回転角度位置に戻し、被検査物保持装置2
をz−x面内でα、y−z面内でβだけ傾けることによ
って被検査物Aの中心線8を回転テーブル3の回転軸9
に一致させることができる。
The angle adjusting means is configured to be capable of receiving the signal from the computer 5 and rotating the inspection object holding device 2 in an arbitrary direction by, for example, a step pulse motor. Therefore, the rotary table 3 is returned to the initial rotation angle position shown in FIG.
By inclining by α in the z-x plane and β in the yz-plane, the center line 8 of the inspection object A is rotated by the rotation axis 9 of the rotary table 3.
Can be matched to.

上記ステップパルスモータの代わりにゴニオメータを設
け、手動で角度の調整を行う構成とすることもできる。
A goniometer may be provided instead of the step pulse motor to manually adjust the angle.

このように、被検査物Aの中心線8と回転テーブルの回
転軸9を一致させて第3図と同様の画像を得ると、被検
査物の中心の軌跡(曲線j)は中心軸kに一致する直線
となり、それぞれの角度位置におけるスライス画像は縦
一列に並ぶ。この様な操作を行った後に収集されたX線
の透過データに基づいてCT画像を再構成すれば、明瞭な
CT画像が得られる。
In this way, when the center line 8 of the inspection object A and the rotation axis 9 of the rotary table are aligned to obtain an image similar to that of FIG. 3, the locus (curve j) of the center of the inspection object is the center axis k. The straight lines coincide with each other, and the slice images at the respective angular positions are lined up in a vertical line. If a CT image is reconstructed based on the X-ray transmission data collected after performing such an operation, a clear image can be obtained.
CT images can be obtained.

尚、本発明は、上記の実施例に限定されるものではな
く、たとえば回転テーブル3を第3図において最大値R
となる角度で停止し、被検査物Aをy−z平面内で角度
θだけ傾けて、被検査物Aの中心線8を回転テーブル3
の回転軸に一致させるようにしてもよい。
The present invention is not limited to the above-described embodiment, and for example, the rotary table 3 may have a maximum value R in FIG.
Is stopped at an angle such that the inspection object A is tilted by an angle θ in the yz plane, and the center line 8 of the inspection object A is rotated by the rotary table 3.
You may make it match with the rotation axis of.

〔発明の効果〕〔The invention's effect〕

以上説明したように本発明によれば、被検査物のX線透
過データを利用して回転装置上における被検査物の傾き
の方向及びその角度を求めることができ、この求めた角
度から被検査物の中心線が回転装置の回転軸と一致する
よう被検査物の傾きを簡単に修正することができるの
で、従来歳差運動を起こし易かった数ミリ程度の細い管
状又は棒状の材料についても、正確な断層像を得ること
のできるX線CT装置を提供することができる。
As described above, according to the present invention, the direction and the angle of the inclination of the inspection object on the rotating device can be obtained by using the X-ray transmission data of the inspection object, and the inspection angle is obtained from the obtained angle. Since the inclination of the object to be inspected can be easily corrected so that the center line of the object coincides with the rotation axis of the rotating device, even for a thin tubular or rod-shaped material of about several millimeters that was easy to cause precession in the past, An X-ray CT apparatus capable of obtaining an accurate tomographic image can be provided.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例であるX線CT装置の配置図、
第2図は被検査物とこれを通過する扇状のX線ビームを
横から見た図、第3図は回転テーブルを回転させること
により所定の角度範囲にわたって収集されたX線の透過
データのスライス画像を一つの画面上に並べて同時に表
示したものの一例を示す図、第4図は定義した座標系と
ともに示す回転テーブル、被検査物支持装置、及び被検
査物の斜視図である。 1……X線発生装置、2……被検査物支持装置、 3……回転テーブル、4……X線検出器、 5……コンピュータ、7……X線ビーム、 8……被検査物の中心線、9……回転軸、 A……被検査物。
FIG. 1 is a layout drawing of an X-ray CT apparatus which is an embodiment of the present invention,
FIG. 2 is a side view of an object to be inspected and a fan-shaped X-ray beam passing therethrough, and FIG. 3 is a slice of X-ray transmission data collected over a predetermined angle range by rotating a rotary table. FIG. 4 is a diagram showing an example in which images are displayed side by side on one screen, and FIG. 4 is a perspective view showing a rotary table, an inspection object supporting device, and an inspection object together with a defined coordinate system. DESCRIPTION OF SYMBOLS 1 ... X-ray generator, 2 ... Support device for inspected object, 3 ... Rotating table, 4 ... X-ray detector, 5 ... Computer, 7 ... X-ray beam, 8 ... Inspected object Center line, 9 ... Rotation axis, A ... Inspected object.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 林 一雄 神奈川県相模原市淵野辺5丁目10番1号 新日本製鐵株式會社エレクトロニクス研究 所内 (56)参考文献 特開 平3−46546(JP,A) 特開 平2−156931(JP,A) 特開 平2−138854(JP,A) 特開 平2−138806(JP,A) 特開 平2−91553(JP,A) 特開 平2−85747(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuo Hayashi 5-10-1, Fuchinobe, Sagamihara City, Kanagawa Pref., Electronics Research Laboratory, Nippon Steel Corp. (56) Reference JP-A-3-46546 (JP, A) JP-A-2-156931 (JP, A) JP-A-2-138854 (JP, A) JP-A-2-138806 (JP, A) JP-A-2-91553 (JP, A) JP-A-2-85747 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】扇状のX線ビームを発生するX線発生装置
と、 被検査物を回転させる回転装置と、該回転装置を介して
前記X線発生装置と対向して配置され前記X線発生装置
により放射され前記被検査物を透過した後のX線を検出
するX線検出装置とを有し、 前記回転装置によって、前記被検査物を微小角度づつ回
転させてX線の透過データを収集し、該透過データによ
り前記被検査物の断層像を再構成して画像表示装置に表
示するX線CT装置において、 各々の角度位置における前記透過データを前記画像表示
装置に順次並べて表示したときに、各透過データによる
像の中心と前記回転装置の回転軸に対応する中心軸との
距離が最大になるときの距離に基づき、前記被検査物の
中心線の前記回転軸に対する傾きの方向及びその角度を
求める傾き検出手段と、 該傾き検出手段により求めた前記被検査物の中心線の前
記回転軸に対する傾きの方向及びその角度に基づいて、
前記回転装置の回転軸に対する被検査物の角度を変化さ
せて前記中心線を前記回転軸に一致させる角度調整手段
とを設けたことを特徴とするX線CT装置。
1. An X-ray generator that generates a fan-shaped X-ray beam, a rotating device that rotates an object to be inspected, and an X-ray generator that is arranged to face the X-ray generator through the rotating device. An X-ray detection device for detecting X-rays radiated by the device and transmitted through the inspection object, wherein the inspection device rotates the inspection object by a minute angle to collect X-ray transmission data. Then, in an X-ray CT apparatus that reconstructs a tomographic image of the inspection object by the transmission data and displays it on an image display device, when the transmission data at each angular position are sequentially arranged and displayed on the image display device. A direction of inclination of the center line of the object to be inspected with respect to the rotation axis based on the distance when the distance between the center of the image based on each transmission data and the center axis corresponding to the rotation axis of the rotation device becomes maximum and Inclination to find the angle Detection means, based on the direction and the angle of inclination with respect to the rotation axis of the center line of the inspection object as determined by the detecting means-out inclined,
An X-ray CT apparatus, comprising: angle adjusting means for changing an angle of an object to be inspected with respect to a rotation axis of the rotation apparatus so that the center line coincides with the rotation axis.
JP2004258A 1990-01-10 1990-01-10 X-ray CT system Expired - Lifetime JPH0692888B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004258A JPH0692888B2 (en) 1990-01-10 1990-01-10 X-ray CT system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004258A JPH0692888B2 (en) 1990-01-10 1990-01-10 X-ray CT system

Publications (2)

Publication Number Publication Date
JPH03209119A JPH03209119A (en) 1991-09-12
JPH0692888B2 true JPH0692888B2 (en) 1994-11-16

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ID=11579516

Family Applications (1)

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