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JPH0691926B2 - Pressure fluctuation adsorption separation method - Google Patents

Pressure fluctuation adsorption separation method

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Publication number
JPH0691926B2
JPH0691926B2 JP1167307A JP16730789A JPH0691926B2 JP H0691926 B2 JPH0691926 B2 JP H0691926B2 JP 1167307 A JP1167307 A JP 1167307A JP 16730789 A JP16730789 A JP 16730789A JP H0691926 B2 JPH0691926 B2 JP H0691926B2
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JP
Japan
Prior art keywords
adsorption
pressure
cylinder
product
pressure fluctuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1167307A
Other languages
Japanese (ja)
Other versions
JPH0330812A (en
Inventor
雅人 川井
一義 木部
Original Assignee
日本酸素株式会社
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Publication of JPH0691926B2 publication Critical patent/JPH0691926B2/en
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  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、圧力変動吸着分離方法に関し、特に医療用あ
るいは小型オゾナイザーの原料酸素の供給源として使用
する小型の酸素発生装置に適した圧力変動吸着分離装置
の運転方法に関する。
Description: TECHNICAL FIELD The present invention relates to a pressure fluctuation adsorption separation method, and particularly to a pressure fluctuation suitable for a small-sized oxygen generator used as a source oxygen source for medical or small-sized ozonizers. The present invention relates to a method of operating an adsorption separation device.

〔従来の技術〕[Conventional technology]

従来から、ゼオライトを吸着剤として使用し、加圧下で
の吸着と減圧下での再生(脱着)を交互に繰返すことに
より、空気から酸素を分離できることが知られている。
この方法は、いわゆる圧力変動吸着分離法(PSA法)と
して工業分野で広く使用されている。
It is known that oxygen can be separated from air by using zeolite as an adsorbent and repeating adsorption under pressure and regeneration (desorption) under reduced pressure alternately.
This method is widely used in the industrial field as a so-called pressure swing adsorption separation method (PSA method).

上記PSA法の初期ものは、2個の吸着筒を用いて加圧吸
着工程と減圧再生工程とをそれぞれの筒で交互に繰返す
単純なものであり、製品の回収率も10〜20%程度であっ
た。そのため、特公昭51−40549号公報には、吸着工程
終了後の吸着筒の製品出口端に存在する製品品位のガス
を、原料空気の供給を断った状態で徐々に抜取る工程
(圧力均等化,並流減圧)を採用することで、それまで
の2筒式のPSA法に比べて高い製品純度と回収率の向上
が得られる方法が記載されている。
The initial PSA method is a simple one in which the pressure adsorption process and the decompression regeneration process are alternately repeated using two adsorption cylinders, and the product recovery rate is about 10 to 20%. there were. Therefore, Japanese Patent Publication No. 51-40549 discloses a process of gradually extracting the product grade gas existing at the product outlet end of the adsorption cylinder after the adsorption process with the supply of the raw material air being cut off (pressure equalization). , Parallel flow decompression) is used to obtain higher product purity and higher recovery rate than the conventional two-cylinder PSA method.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

しかしながら、上述の公報に記載されたPSA法は、たと
えば数m3/h以上の大量の酸素を製造する工業用を目的と
して開発されたものであり、経済性を高めるために回収
率を極限まで高める配慮が成されている。即ち、筒内の
ガスの濃度分布を乱すことなく製品を取出すために、比
較的ゆっくりとしたサイクルタイムを採用するととも
に、再加圧にも長時間をかけてゆっくりと加圧すること
により、筒内にシャープな濃度分布を形成するように配
慮している。
However, the PSA method described in the above-mentioned publication is developed for the purpose of industrial production of a large amount of oxygen of, for example, several m 3 / h or more, and the recovery rate is maximized in order to improve the economical efficiency. Consideration is given to increase. That is, in order to take out the product without disturbing the gas concentration distribution in the cylinder, a relatively slow cycle time is adopted, and repressurization takes a long time and slowly pressurizes the cylinder. Consideration is given to forming a sharp density distribution.

そのため、一般的なPSA法による処理ガス量と吸着剤量
及びサイクルタイムとの関係から上記方法では大量の吸
着剤を必要とすることになる。
Therefore, a large amount of adsorbent is required in the above method due to the relationship between the amount of treated gas by the general PSA method, the amount of adsorbent, and the cycle time.

即ち、下記の式, (上記式中、Wは吸着剤量[kg],Qは吸着容量[m3/k
g],θはサイクルタイム[h]を示す。) に示されるように、処理ガス量を一定とした場合、サイ
クルタイムを例えば2倍にすると吸着剤量が略2倍必要
となるために、上記のごとく長いサイクルタイムで操作
すると性能的には向上するものの、大型の吸着筒を必要
とし、装置全体もかなり大型化するとともに、各種流量
計や制御弁等を必要とし、配管も複雑化する。
That is, the following formula, (In the above formula, W is the amount of adsorbent [kg], Q is the adsorption capacity [m 3 / k
g] and θ indicate the cycle time [h]. ), When the processing gas amount is constant, if the cycle time is doubled, for example, the adsorbent amount is required to be approximately doubled. Although improved, it requires a large adsorption cylinder, considerably increases the size of the entire apparatus, requires various flow meters and control valves, and complicates piping.

一方、このPSA法が高濃度の酸素を連続的に、しかも安
価に得られるという利点を有しているため、近年、医療
用あるいは小型オゾナイザーの原料用の酸素源として注
目されている。ところが、上述のごとく、従来行われて
きたPSA法は、工業的な大型の装置が主体であって、こ
のような装置をそのまま病院内や家庭内に持込むことは
できず、またオゾナイザーに比べて酸素発生器の方がは
るかに大きいという不都合があった。またこのようなPS
A法をそのまま小形のPSA装置に適用しても所望の性能を
得ることは困難であった。
On the other hand, since the PSA method has an advantage that oxygen of high concentration can be continuously obtained at low cost, it has recently attracted attention as an oxygen source for medical use or a raw material for a small ozonizer. However, as described above, the PSA method that has been conventionally performed is mainly a large industrial device, and such a device cannot be brought into a hospital or home as it is, and compared with an ozonizer. However, the oxygen generator was much larger. Also such PS
It was difficult to obtain the desired performance even if the method A was directly applied to a small PSA device.

そこで、本発明は、医療用等として用いるのに適した小
形のPSA装置を簡単な構成で効率よく運転することので
きる圧力変動吸着分離方法を提供することを目的として
いる。
Therefore, an object of the present invention is to provide a pressure fluctuation adsorption / separation method capable of efficiently operating a small-sized PSA device suitable for medical use with a simple configuration.

〔課題を解決するための手段〕[Means for Solving the Problems]

上記した目的を達成するために、本発明の圧力変動吸着
分離方法は、吸着工程を終えた吸着筒と、再生工程を終
えた吸着筒とを両吸着筒の原料供給端で連通させて均圧
工程を行うことを特徴とし、特に、前記均圧工程の時間
をサイクルタイムの1/30乃至1/4としたことを特徴とし
ている。
In order to achieve the above-mentioned object, the pressure fluctuation adsorption separation method of the present invention is a pressure-equalizing method in which the adsorption column that has completed the adsorption step and the adsorption column that has completed the regeneration step are connected at the raw material supply ends of both adsorption columns. The present invention is characterized in that the step is performed, and in particular, the time of the pressure equalizing step is set to 1/30 to 1/4 of the cycle time.

〔作用〕[Action]

上記のごとく、両吸着筒を原料供給端で連通させて極め
て短時間で均圧操作を行うことにより、サイクルタイム
を短くでき、装置の小形化が図れる。
As described above, by connecting both adsorption cylinders at the raw material supply end and performing pressure equalizing operation in an extremely short time, the cycle time can be shortened and the apparatus can be downsized.

〔実施例〕〔Example〕

以下、本発明を図面に基づいて、さらに詳細に説明す
る。
Hereinafter, the present invention will be described in more detail with reference to the drawings.

第1図は本発明を適用した圧力変動吸着分離装置の一実
施例を示すもので、第2図はそのタイムスケジュールの
一例である。
FIG. 1 shows an embodiment of a pressure fluctuation adsorption separation device to which the present invention is applied, and FIG. 2 shows an example of the time schedule.

この圧力変動吸着分離装置1は、空気中の窒素を吸着す
る吸着剤、例えばゼオライトを充填した2基の吸着筒A,
Bと、該吸着筒A,Bに原料空気(Air)を供給する空気圧
縮機2と、生成した酸素ガス(O2)を貯留する製品槽3
と、両吸着筒A,Bの製品導出端間を接続するオリフィス
4、及び両吸着筒A,Bを吸着工程と再生工程とに切替え
るために各吸着筒A,Bにそれぞれ設けられた原料供給弁5
a,5b、製品導出弁6a,6b、排気弁7a,7bとにより構成され
ている。
This pressure fluctuation adsorption / separation device 1 includes two adsorption columns A, which are filled with an adsorbent that adsorbs nitrogen in the air, for example, zeolite.
B, an air compressor 2 for supplying raw material air (Air) to the adsorption cylinders A and B, and a product tank 3 for storing the generated oxygen gas (O 2 ).
And the orifice 4 that connects the product outlet ends of both adsorption cylinders A and B, and the raw material supply provided to each adsorption cylinder A and B to switch both adsorption cylinders A and B between the adsorption process and the regeneration process. Valve 5
a, 5b, product outlet valves 6a, 6b, and exhaust valves 7a, 7b.

以下、上記圧力変動吸着分離装置1の操作方法を、1サ
イクルタイムを72秒とした第2図に示すタイムスケジュ
ールを参照しながら説明する。
The operation method of the pressure fluctuation adsorption / separation device 1 will be described below with reference to the time schedule shown in FIG. 2 in which one cycle time is 72 seconds.

まず、初期の30秒間(工程)は、一方の吸着筒A(以
下、A筒と称する。)が吸着工程、他方の吸着筒B(以
下、B筒と称する。)が再生工程の一部である減圧パー
ジステップにある。この間、空気圧縮機2で所定圧力に
圧縮された原料空気は、原料供給弁5aを介してA筒に導
入されており、該空気中の窒素が吸着剤に吸着され、弱
吸着成分である酸素が製品導出端から導出されている。
First, in the initial 30 seconds (process), one adsorption cylinder A (hereinafter referred to as A cylinder) is the adsorption process, and the other adsorption cylinder B (hereinafter referred to as B cylinder) is a part of the regeneration process. There is a vacuum purge step. During this time, the raw material air compressed to a predetermined pressure by the air compressor 2 is introduced into the A cylinder via the raw material supply valve 5a, and the nitrogen in the air is adsorbed by the adsorbent, and oxygen which is a weakly adsorbed component is oxygen. Is derived from the product derivation end.

A筒から導出された酸素は、一部がオリフィス4を経由
してB筒の製品導出端からB筒内に導入され、残部が製
品酸素となり製品導出弁6aを介して製品槽3に貯留され
る。一方のB筒においては、排気弁7bを介して筒内のガ
スが大気に放出されて減圧されるとともに、前記オリフ
ィス4を介して導入される酸素により筒内がパージされ
る。この時、B筒の原料供給弁5bと製品導出弁6b及びA
筒の排気弁7aは閉じられている。
Part of the oxygen derived from the A cylinder is introduced into the B cylinder from the product discharge end of the B cylinder via the orifice 4, and the rest becomes product oxygen and is stored in the product tank 3 via the product discharge valve 6a. It On the other hand, in the B cylinder, the gas in the cylinder is released to the atmosphere through the exhaust valve 7b to reduce the pressure, and the cylinder interior is purged by the oxygen introduced through the orifice 4. At this time, the raw material supply valve 5b and the product discharge valve 6b of the B cylinder and A
The exhaust valve 7a of the cylinder is closed.

次の6秒間(工程)は、両筒の原料供給端を連通させ
る均圧工程である。即ち、B筒の排気弁7bが閉じられる
とともに両原料供給弁5a,5bが開かれてA筒内に所定圧
力で充圧されていたガスがA筒の原料供給弁5aを逆流し
て空気圧縮機2から供給される原料空気と共にB筒の原
料供給弁5bからB筒内に導入される。この時、A筒の製
品導出弁6aは、開あるいは閉いずれの状態でも差支えな
い。
The next 6 seconds (step) is a pressure equalization step in which the raw material supply ends of both cylinders are communicated. That is, the exhaust valve 7b of the B cylinder is closed and both raw material supply valves 5a and 5b are opened, so that the gas charged in the A cylinder at a predetermined pressure flows backward through the raw material supply valve 5a of the A cylinder to compress air. The raw material air supplied from the machine 2 is introduced into the B cylinder from the B cylinder raw material supply valve 5b. At this time, the product discharge valve 6a of the A cylinder may be open or closed.

6秒間の均圧工程を終えた後は、B筒が30秒間の吸着工
程に入り、A筒が減圧パージ工程に入る(工程)。即
ち、B筒の原料供給弁5bと製品導出弁6b及びA筒の排気
弁7aが開となり、他の弁が閉じられる。そして30秒後
に、上記同様の6秒間の均圧工程(工程)に入る。以
下順次この工程を繰返して空気中の酸素を分離して製品
酸素を得る。
After completing the pressure equalizing process for 6 seconds, the B cylinder enters the adsorption process for 30 seconds, and the A cylinder enters the depressurization purging process (process). That is, the raw material supply valve 5b and the product discharge valve 6b of the B cylinder and the exhaust valve 7a of the A cylinder are opened, and the other valves are closed. After 30 seconds, a pressure equalizing step (step) for 6 seconds similar to the above is started. Thereafter, this step is sequentially repeated to separate oxygen in the air to obtain product oxygen.

製品酸素(O2)は、前記製品槽3内の一部の酸素が製品
として所定量連続的に導出されており、いずれか一方の
吸着筒A,Bが吸着工程にあるとき(工程,)に製品
槽3内の充圧が行われ、均圧工程(工程,)にある
ときには、製品槽3内に充圧された酸素を放出する。従
って、この製品槽3は、製品酸素供給先への製品圧力及
び純度の安定のために必要なもので、上記均圧工程の間
だけ製品の流量を維持できる容積を有していれば十分で
あり、均圧工程が短時間であることから小形のものを用
いることができる。尚、供給先が適宜なバッファタンク
を備えている場合には省略することもできる。
The product oxygen (O 2 ) is obtained when a certain amount of oxygen in the product tank 3 is continuously discharged as a product in a predetermined amount, and one of the adsorption cylinders A and B is in the adsorption process (process,). When the product tank 3 is charged with the pressure, and in the pressure equalizing step (process,), the oxygen charged in the product tank 3 is released. Therefore, the product tank 3 is necessary for stabilizing the product pressure and purity to the product oxygen supply destination, and it is sufficient if it has a volume capable of maintaining the product flow rate only during the pressure equalizing step. Since the pressure equalizing step is short, a small one can be used. It may be omitted if the supply destination is provided with an appropriate buffer tank.

上記のごとく、吸着工程を終えた吸着筒と再生工程を終
えた吸着筒とを両吸着筒の原料供給端で連通させて均圧
工程を行うことにより、従来製品出口端側からゆっくり
と時間をかけて行っていた均圧工程を極めて短時間で行
うことが可能となる。加えて、均圧工程を短時間て終了
させることにより、次の減圧パージ工程の時間をサイク
ルタイムに比べて十分に長く取ることが可能となる。こ
れにより、筒内の吸着剤の再生度を高めることができ、
製品純度を高めるとともに、純度の安定性や回収率も向
上させることができる。
As described above, by performing the pressure equalization process by communicating the adsorption cylinder that has completed the adsorption process and the adsorption cylinder that has completed the regeneration process at the raw material supply ends of both adsorption cylinders, it is possible to slowly increase the time from the outlet end side of the conventional product. It is possible to perform the pressure equalization process that has been performed over an extremely short time. In addition, by finishing the pressure equalization process in a short time, it is possible to take the time of the next pressure reduction purge process sufficiently longer than the cycle time. As a result, the degree of regeneration of the adsorbent in the cylinder can be increased,
The product purity can be increased, and the purity stability and recovery rate can be improved.

この均圧工程の時間は、吸着筒の容積や操作圧力,サイ
クルタイム等、即ち所望する製品量により異なるが、通
常は、配管や弁等の抵抗を考慮しても2〜6秒間行えば
十分であり、サイクルタイムの1/30乃至1/4とすること
が好ましい。また、サイクルタイムは、吸着剤の再生時
間を考慮すると10〜60秒、好ましくは30〜40秒が適当で
あり、製品量及び所望する装置の大きさ等により適宜選
定することができる。
The time of this pressure equalizing step varies depending on the volume of the adsorption cylinder, the operating pressure, the cycle time, etc., that is, the desired product amount, but it is usually sufficient to perform it for 2 to 6 seconds even considering the resistance of the pipes and valves. And it is preferable to set the cycle time to 1/30 to 1/4. Further, the cycle time is appropriately 10 to 60 seconds, preferably 30 to 40 seconds in consideration of the regeneration time of the adsorbent, and can be appropriately selected depending on the product amount and the desired size of the apparatus.

また、吸着工程に入る際に、従来の単純なPSA法では大
気圧状態で切替えが行われ、吸着圧力が大きく変動する
ため、製品圧力を一定にして供給できるのは、0.3kg/cm
2G程度であったが、本発明のごとく均圧工程を実施す
ることにより吸着工程開始時の筒内圧力を高くできるの
で製品圧力を0.8kg/cm2G程度まで高めることができ
る。
Also, when entering the adsorption process, the conventional simple PSA method switches at atmospheric pressure, and the adsorption pressure fluctuates greatly, so the product pressure can be supplied at a constant value of 0.3 kg / cm.
Although it was about 2 G, the pressure in the cylinder at the start of the adsorption process can be increased by carrying out the pressure equalization process as in the present invention, so that the product pressure can be increased to about 0.8 kg / cm 2 G.

さらに、状態均圧工程において、原料空気の供給を継続
しながら均圧を実施することにより、原料空気の供給分
だけ筒内圧力を高めることができるが、原料空気の供給
を止めても均圧工程が短時間であるから同様の作用効果
を得ることができる。
Furthermore, in the state pressure equalizing step, by performing the pressure equalization while continuing the supply of the raw material air, the cylinder pressure can be increased by the amount of the raw material air supplied. Since the process is short in time, the same effect can be obtained.

ここで、従来の単純なPSA法と本発明のPSA法とを比較し
た実験を行った結果を説明する。圧力変動吸着分離装置
の運転条件は、吸着剤はMS−5Aを2.5kg,吸着圧力は1.5k
g/cm2G,サイクルタイムは30秒とし、本発明方法におい
てのみ、サイクルタイム内にそれぞれ3秒間の原料供給
均圧工程を実施した。その結果を次表に示す。
Here, the results of an experiment comparing the conventional simple PSA method and the PSA method of the present invention will be described. The operating conditions of the pressure fluctuation adsorption separation device are as follows: MS-5A adsorbent 2.5 kg, adsorption pressure 1.5 k
The g / cm 2 G and the cycle time were set to 30 seconds, and only in the method of the present invention, the raw material supply pressure equalizing step was performed for 3 seconds in each cycle time. The results are shown in the table below.

〔発明の効果〕 以上説明したように、本発明の圧力変動吸着分離方法
は、吸着工程を終えた吸着筒と、再生工程を終えた吸着
筒とを両吸着筒の原料供給端で連通させて短時間の均圧
工程を行うから、サイクルタイムを短くしても吸着剤を
再生するのに十分な時間を取ることが可能となる。即
ち、サイクルタイムを短くすることで、少ない吸着剤量
で従来と同等以上の製品量を得ることができ、吸着筒や
空気圧縮機等の小形化を図れ、装置全体を大幅に小形化
することができる。
[Advantages of the Invention] As described above, the pressure fluctuation adsorption separation method of the present invention allows the adsorption cylinder after the adsorption process and the adsorption cylinder after the regeneration process to communicate with each other at the raw material supply ends of both adsorption cylinders. Since the pressure equalizing step is performed for a short time, it is possible to take a sufficient time to regenerate the adsorbent even if the cycle time is shortened. That is, by shortening the cycle time, it is possible to obtain a product amount equal to or more than the conventional amount with a small amount of adsorbent, and to downsize the adsorption cylinder, air compressor, etc., and greatly downsize the entire device. You can

また均圧工程は、両吸着筒の原料供給端側の弁を開放し
て連通させることにより行うことができるので、均圧に
細かい流量調製等を必要とせず、装置を単純化すること
ができる。さらに吸着工程前の均圧工程により、吸着工
程に入る吸着筒内の圧力を高めているので製品圧力も高
くすることができる。
Further, since the pressure equalizing step can be performed by opening the valves on the raw material supply end side of both adsorption cylinders so as to communicate with each other, it is possible to simplify the apparatus without requiring fine flow rate adjustment or the like for pressure equalization. . Further, since the pressure inside the adsorption cylinder entering the adsorption step is increased by the pressure equalizing step before the adsorption step, the product pressure can be increased.

従って、本発明の方法を適用することにより、圧力変動
吸着分離装置の大幅な小形化を図ることができ、医療用
あるいは小型オゾナイザーの原料酸素の供給源として使
用する小型の酸素発生装置として適した圧力変動吸着分
離装置を提供することができる。
Therefore, by applying the method of the present invention, it is possible to significantly reduce the size of the pressure fluctuation adsorption / separation device, and it is suitable as a small oxygen generator used as a source oxygen source for medical or small ozonizers. A pressure fluctuation adsorption separation device can be provided.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明を適用した圧力変動吸着分離装置の一実
施例を示す系統図、第2図はそのタイムスケジュールで
ある。 1…圧力変動吸着分離装置、2…空気圧縮機、3…製品
槽、4…オリフィス、5a,5b…原料供給弁、6a,6b…製品
導出弁、7a,7b…排気弁、A,B…吸着筒
FIG. 1 is a system diagram showing an embodiment of a pressure fluctuation adsorption separation device to which the present invention is applied, and FIG. 2 is its time schedule. 1 ... Pressure fluctuation adsorption separation device, 2 ... Air compressor, 3 ... Product tank, 4 ... Orifice, 5a, 5b ... Raw material supply valve, 6a, 6b ... Product discharge valve, 7a, 7b ... Exhaust valve, A, B ... Adsorption cylinder

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】吸着剤を充填した少なくとも2筒の吸着筒
を、吸着工程と再生工程とに順次切替えて酸素を分離す
る圧力変動吸着分離方法において、前記吸着工程を終え
た吸着筒と、前記再生工程を終えた吸着筒とを両吸着筒
の原料供給端で連通させて均圧工程を行うことを特徴と
する圧力変動吸着分離方法。
1. A pressure fluctuation adsorption separation method in which at least two adsorption cylinders filled with an adsorbent are sequentially switched between an adsorption step and a regeneration step to separate oxygen, and an adsorption cylinder that has completed the adsorption step, and A pressure fluctuation adsorption separation method, characterized in that a pressure equalization step is performed by communicating the adsorption column after the regeneration step with the raw material supply ends of both adsorption columns.
【請求項2】前記均圧工程の時間を、サイクルタイムの
1/30乃至1/4としたことを特徴とする請求項1記載の圧
力変動吸着分離方法。
2. The time of the pressure equalizing step is set to the cycle time.
The pressure fluctuation adsorption separation method according to claim 1, wherein the pressure fluctuation adsorption separation is 1/30 to 1/4.
JP1167307A 1989-06-29 1989-06-29 Pressure fluctuation adsorption separation method Expired - Fee Related JPH0691926B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1167307A JPH0691926B2 (en) 1989-06-29 1989-06-29 Pressure fluctuation adsorption separation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1167307A JPH0691926B2 (en) 1989-06-29 1989-06-29 Pressure fluctuation adsorption separation method

Publications (2)

Publication Number Publication Date
JPH0330812A JPH0330812A (en) 1991-02-08
JPH0691926B2 true JPH0691926B2 (en) 1994-11-16

Family

ID=15847322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1167307A Expired - Fee Related JPH0691926B2 (en) 1989-06-29 1989-06-29 Pressure fluctuation adsorption separation method

Country Status (1)

Country Link
JP (1) JPH0691926B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4440548A (en) * 1982-04-19 1984-04-03 Calgon Carbon Corporation Pressure swing absorption system
JPS63103805A (en) * 1986-10-20 1988-05-09 Nippon Sanso Kk Production of nitrogen by pressure swing adsorption process

Also Published As

Publication number Publication date
JPH0330812A (en) 1991-02-08

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