JPH0689873B2 - Flexible tube fittings - Google Patents
Flexible tube fittingsInfo
- Publication number
- JPH0689873B2 JPH0689873B2 JP14272387A JP14272387A JPH0689873B2 JP H0689873 B2 JPH0689873 B2 JP H0689873B2 JP 14272387 A JP14272387 A JP 14272387A JP 14272387 A JP14272387 A JP 14272387A JP H0689873 B2 JPH0689873 B2 JP H0689873B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- tightening
- flexible tube
- movable
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Joints That Cut Off Fluids, And Hose Joints (AREA)
Description
【発明の詳細な説明】 [利用分野及び発明の概要] 本発明は、ガスコック等の被接続主体を可撓管からなる
配管端末に接続する際の継手に関するものであり、特に
継手の締付け用の筒体に係合機構を採用することによ
り、この継手と可撓管の端末との接続作業を簡便にする
ものである。TECHNICAL FIELD The present invention relates to a joint for connecting a connected main body such as a gas cock to a pipe terminal made of a flexible pipe, and particularly for tightening the joint. By adopting the engagement mechanism in the tubular body, the connection work between the joint and the end of the flexible tube is simplified.
[従来技術及びその問題点] 台所等では、ガスコックが壁面に取付けられることが多
い。そして、最近では、この壁面の構造を略化するた
め、石膏ボードが数多く利用されている。[Prior Art and Problems Thereof] In kitchens and the like, a gas cock is often attached to a wall surface. Recently, a large number of gypsum boards have been used to simplify the structure of the wall surface.
このような壁面には、従来の鋼管配管を採用し難く、最
近では、蛇腹管、すなわち、屈曲可能な可撓管をガス管
として採用している。この可撓管は管壁を一定間隔で拡
大させて管壁の軸線方向の断面を波形にするとともに、
前記大径部(26),(26)の外径を一定に設定したもの
である。この場合、可撓管それ自体に剛性がないことか
ら、ガスコックを石膏ボードに固定して、これに可撓管
を接続する構成を採用する。It is difficult to adopt a conventional steel pipe for such a wall surface, and recently, a bellows pipe, that is, a bendable flexible pipe is adopted as a gas pipe. This flexible tube expands the tube wall at regular intervals to make the axial section of the tube wall corrugated,
The outer diameters of the large diameter portions (26) and (26) are set to be constant. In this case, since the flexible tube itself has no rigidity, the gas cock is fixed to the gypsum board and the flexible tube is connected to this.
このような構成としては、具体的には第6図のようなも
のが知られている。As such a configuration, specifically, a configuration as shown in FIG. 6 is known.
この従来のものは、同図に示すように、被接続主体
(1)としてのガスコック本体のガス入口(11)から張
出させたフランジ(12)と壁板(30)の裏面に添設する
当て板(40)とをボルト(5),(5)によってネジ止
めすることにより、ガスコック本体を壁板(30)に固定
し、このガスコック本体に継手(20)を介して可撓管
(2)を接続している。As shown in the same figure, this conventional one is attached to the back surface of the wall plate (30) and the flange (12) which is extended from the gas inlet (11) of the gas cock body as the main body (1) to be connected. The gas cock body is fixed to the wall plate (30) by screwing the backing plate (40) with the bolts (5) and (5), and the flexible pipe (2) is fixed to the gas cock body through the joint (20). ) Is connected.
前記継手(20)は、筒状の主体部(22),ナット(2
3),一対のスペーサー(S),(S)及びパッキン
(P)とからなり、前記スペーサー(S),(S)の軸
線方向の断面は可撓管(2)の管壁の軸線方向の断面に
一致させ、このスペーサー(S),(S)を対向状態で
可撓管(2)に外嵌させ、これらを主体部(22)の筒部
(25)にパッキン(P)とともに内挿するようにして用
いる。The joint (20) includes a tubular main body (22) and a nut (2).
3), consisting of a pair of spacers (S), (S) and packing (P), and the cross section of the spacers (S), (S) in the axial direction is the axial direction of the pipe wall of the flexible tube (2). The spacers (S) and (S) are fitted to the flexible tube (2) so as to face each other in the cross section, and these are inserted into the tubular portion (25) of the main body portion (22) together with the packing (P). To use.
この従来のものでは、壁板(30)の開口部(30a)の周
縁部が広い範囲にわたってフランジ(12)と当て板(4
0)によって挟持されるから、ガスコック本体が確実に
壁板(30)に固定され、さらに、継手(20)によって、
固定状態にあるガスコック本体と可撓管(2)とが接続
されることとなる。In this conventional type, the peripheral edge of the opening (30a) of the wall plate (30) covers a wide range over the flange (12) and the backing plate (4).
The gas cock body is securely fixed to the wall plate (30) because it is sandwiched by (0), and further, by the joint (20),
The gas cock body in the fixed state and the flexible tube (2) are connected.
ところが、この従来のものでは、可撓管(2)と継手
(20)との接続が面倒であるという問題があった。However, this conventional device has a problem that the connection between the flexible tube (2) and the joint (20) is troublesome.
すなわち、上記従来のものでは、可撓管(2)に継手
(20)を取付けようとすると、スペーサー(S),
(S)やパッキン(P)を予めセットした状態で主体部
(22)とナット(23)を螺合しなければならないからで
ある。壁板(30)から可撓管(2)を引き出した状態で
この作業を行うガスコック取付の作業では、前記作業が
特に面倒となるとともに、スペーサー(S),(S)を
壁板(30)内に紛失した場合には、継手(20)を接続で
きなくなるという事態が生じる。That is, in the above conventional one, when the joint (20) is attached to the flexible tube (2), the spacer (S),
This is because the main body portion (22) and the nut (23) must be screwed together with (S) and the packing (P) set in advance. In the work of mounting the gas cock in which the flexible tube (2) is pulled out from the wall plate (30), the work is particularly troublesome, and the spacers (S) and (S) are attached to the wall plate (30). If it is lost inside, a situation occurs in which the joint (20) cannot be connected.
[技術的課題] 本発明は、このような、『管壁の大径部(26),(26)
が一定間隔で軸線方向に一様に連続した可撓管(2)の
端末を筒部(25)に接続するようにした可撓管用継手』
において、可撓管(2)と継手(20)の接続の作業性を
向上させるため、可撓管接続部に可撓管(2)の端部を
そのまま挿入すして可撓管(2)が主体部(22)に外周
気密状態に接続できるようにすることをその技術的課題
とする。[Technical problem] The present invention is directed to such a "large diameter portion (26), (26) of the pipe wall.
Is a joint for a flexible tube in which the ends of the flexible tube (2), which are continuous in the axial direction at regular intervals, are connected to the tubular portion (25).
In order to improve the workability of connecting the flexible tube (2) and the joint (20), the end of the flexible tube (2) is directly inserted into the flexible tube connecting portion to form the flexible tube (2). The technical problem is to be able to connect to the main body portion (22) in an airtight peripheral state.
[技術的手段] 上記技術的課題を解決するために講じた本発明の技術的
手段は『筒部(25)に収容され且可撓管(2)を内挿す
るようにした可動筒(3)と、この可動筒(3)の壁面
肉部に半径方向に出没自在に保持された複数のボールボ
ール(B),(B)と、筒部(25)に螺合し且前記可動
筒(3)を一体的に同方向に侵入させる締付け筒(4)
と、この締付け筒(4)を締め込むことによって前記ボ
ール(B),(B)を内方に押し込む押し込み手段とを
具備させた』ことである。[Technical Means] The technical means of the present invention taken to solve the above technical problem is "a movable tube (3) housed in a tube part (25) and having a flexible tube (2) inserted therein. ), And a plurality of balls (B), (B) held by the wall portion of the movable cylinder (3) so as to be retractable in the radial direction, and the movable cylinder (25) screwed into the movable cylinder (25). Tightening tube (4) that allows 3) to enter integrally in the same direction
And a pushing means for pushing the balls (B) and (B) inward by tightening the tightening cylinder (4) ".
[作用] 本発明の上記技術的手段は次のように作用する。[Operation] The above technical means of the present invention operates as follows.
継手(20)の筒部(25)に収容した可動筒(3)内に可
撓管(2)の端末を挿入してその挿入位置を所定に設定
すると、可撓管(2)の外周の谷部が前記可動筒(3)
に保持されたボール(B),(B)と一致する。When the end of the flexible tube (2) is inserted into the movable tube (3) housed in the tube portion (25) of the joint (20) and the insertion position is set to a predetermined value, the outer circumference of the flexible tube (2) is The valley is the movable cylinder (3)
And the balls (B) and (B) held by.
この状態で、締付け筒(4)を締め込むと、押し込み手
段の作用によりボール(B),(B)が内方に押し込ま
れるとともに可動筒(3)が同方向に侵入せしめられ、
これにより、ボール(B),(B)が可撓管(2)の大
径部(26)に係合してこの可撓管が締付け筒(4)のね
じ込み方向に押し込まれることとなる。In this state, when the tightening cylinder (4) is tightened, the balls (B), (B) are pushed inward by the action of the pushing means and the movable cylinder (3) is made to enter in the same direction,
As a result, the balls (B) and (B) are engaged with the large diameter portion (26) of the flexible tube (2) and the flexible tube is pushed in the screwing direction of the tightening tube (4).
この結果、可撓管(2)の先端は筒部(25)の下流端部
に配設されたシール手段に対接し、気密状態に接続され
ることとなる。そして、この状態では、可撓管(2)が
筒部(25)に抜け止め状態に連結されることとなる。As a result, the tip of the flexible tube (2) is brought into contact with the sealing means arranged at the downstream end of the tubular portion (25) and is connected in an airtight state. Then, in this state, the flexible tube (2) is coupled to the tubular portion (25) in a retaining state.
[効果] 本発明は上記構成であるから次の特有の効果を有する。[Effects] The present invention having the above-described configuration has the following unique effects.
可撓管(2)をそのまま可動筒(3)内に挿入して締付
け筒(4)をねじ込むだけで可撓管(2)と筒部(25)
とが外周気密状態に接続され、しかも、前記両者が抜け
止め状態に連結されるから、可撓管(2)の継手(20)
への取付作業が簡単になる。Simply insert the flexible tube (2) into the movable tube (3) and screw the tightening tube (4) into the flexible tube (2) and the tube section (25).
And (2) are connected to each other in an airtight state on the outer periphery, and the two are connected to each other in a retaining state, so that the joint (20) of the flexible tube (2) is
To be easily installed.
また、従来例のスペーサ(S)と同様の機能を有するボ
ール(B),(B)が可動筒(3)内に保持されるか
ら、これらを紛失する不都合も生じない。Further, since the balls (B) and (B) having the same function as the spacer (S) of the conventional example are held in the movable barrel (3), there is no inconvenience of losing them.
[実施例] 以下、本発明の実施例を第1図から第5図に基いて説明
する。[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 to 5.
第1図〜第3図に示す第1実施例は、継手(20)は、一
方に接続用の雄ネジ部(28)を具備させるとともに、他
方に筒部(25)を具備させ、この筒部(25)に内周面に
押し込み手段としてのテーパ面(27)を形成するととも
に既述の可動筒(3)と締付け筒(4)とを一体化させ
て筒状の締付けネジ(34)とし、筒部(25)の前記テー
パ面(27)より開放端側に雌ネジ部を形成し、これに前
記締付けネジ(34)を螺合させたものである。In the first embodiment shown in FIGS. 1 to 3, the joint (20) is provided with a male screw portion (28) for connection on one side and a tubular portion (25) on the other side. A tapered surface (27) is formed on the inner peripheral surface of the portion (25) as a pushing means, and the movable cylinder (3) and the tightening cylinder (4) described above are integrated to form a cylindrical tightening screw (34). The female screw portion is formed on the open end side of the tapered surface (27) of the tubular portion (25), and the tightening screw (34) is screwed into the female screw portion.
この第1実施例は、第2番目の実施態様に対応するが、
ねじ込み方向の先端側には先端筒部(35)を形成し、こ
の先端筒部(35)に形成した透孔(H),(H)内に、
この透孔形成部の肉厚より直径の大きなボール(B),
(B)を半径方向に出没自在に収容してある。また、前
記締付けネジ(34)の内径は、可撓管(2)の外形に適
合させてあり、締付けネジ(34)内には可撓管(2)が
僅かの間隙で挿入できるようになっている。This first embodiment corresponds to the second embodiment,
A tip tube portion (35) is formed on the tip side in the screwing direction, and in the through holes (H), (H) formed in the tip tube portion (35),
A ball (B) having a diameter larger than the wall thickness of the through hole forming portion,
(B) is housed so as to be retractable in the radial direction. Further, the inner diameter of the tightening screw (34) is adapted to the outer shape of the flexible tube (2), and the flexible tube (2) can be inserted into the tightening screw (34) with a slight gap. ing.
この第1実施例では、第1図,第2図のように締付けネ
ジ(34)を引き出した状態で、締付けネジ(34)内に可
撓管(2)の先端部を挿入し、その後、第3図のように
締付けネジ(34)をネジ込む。すると、ボール(B),
(B)がテーパ面(27)に一致した時点でこれらボール
(B),(B)が半径方向の内方に押し込められ、ボー
ル(B),(B)が可撓管(2)の大径部に係合する。
その後、さらに締付けネジ(34)をネジ込むと、ボール
(B),(B)と可撓管(2)の大径部(26)とが係合
したままで、可撓管(2)の先端部が筒部(25)の内方
に押し込まれ、筒部(25)の下流端部に形成したパッキ
ン(P)に圧接される。これにより、同図の如く、可撓
管(2)が筒部(25)内に抜け止め状態に保持されると
ともに、先端部との対接面のシールが確保されたものと
なる。ここで、締付けネジ(34)のねじ込みの際には、
締付けネジ(34)の外側の端部に形成したフランジ(3
6)が工具対応部となる。In this first embodiment, the tip of the flexible tube (2) is inserted into the tightening screw (34) with the tightening screw (34) pulled out as shown in FIGS. Screw in the tightening screw (34) as shown in Fig. 3. Then the ball (B),
When (B) coincides with the taper surface (27), these balls (B), (B) are pushed inward in the radial direction, and the balls (B), (B) become larger than the flexible tube (2). Engage with the diameter.
Thereafter, when the tightening screw (34) is further screwed in, the balls (B), (B) and the large diameter portion (26) of the flexible tube (2) remain engaged, and The tip portion is pushed inward of the tubular portion (25) and pressed against the packing (P) formed at the downstream end portion of the tubular portion (25). As a result, as shown in the same figure, the flexible tube (2) is retained in the tubular portion (25) in a state where it does not come off, and at the same time, the seal of the contact surface with the tip portion is secured. Here, when screwing the tightening screw (34),
Flange (3) formed on the outer end of the tightening screw (34)
6) is the tool corresponding part.
次に第4図,第5図に示す第2実施例のものは、筒部
(25)に可撓管(2)を内挿する可動筒(3)と、これ
に外嵌し且軸線方向において一定範囲相対移動可能に対
偶させた締付け筒(4)とを収容したものである。可動
筒(3)と締付け筒(4)との相対移動域を一定範囲に
限定するため、この実施例では、可動筒(3)の両端に
つば部(31),(32)を張出させ、これらつば部の間隔
を締付け筒(4)の全長よりも一定長さ長く設定してい
る。そして、この可動筒(3)の所定位置の肉厚内には
複数のボール(B),(B)が保持されている。Next, in the second embodiment shown in FIG. 4 and FIG. 5, the movable tube (3) into which the flexible tube (2) is inserted in the tube portion (25), and the externally fitted and axial direction thereof. In the above, the tightening cylinder (4) is housed so as to be relatively movable within a certain range. In order to limit the range of relative movement between the movable cylinder (3) and the tightening cylinder (4) to a certain range, in this embodiment, the flange portions (31) and (32) are extended at both ends of the movable cylinder (3). The interval between these collars is set to be a certain length longer than the entire length of the tightening cylinder (4). A plurality of balls (B), (B) are held within the wall thickness of the movable cylinder (3) at a predetermined position.
この実施例の場合、前記締付け筒(4)は、筒部(25)
の内周面に形成したネジ部に螺合する構成となってお
り、上記第1実施例と同様に可動筒(3)内に可撓管
(2)を挿入して、締付け筒(4)をねじ込むと、その
先端が可動筒(3)の肉厚の外周側に突出するボール
(B),(B)の突出部を内方に押し込み、ボール
(B),(B)が可撓管(2)の外周の山部に係合する
こととなる。その後、さらに締付け筒(4)をねじ込む
と、締付け筒(4)の先端がつば部(31)に当接してこ
の可動筒(3)が押し込まれ、これにより、第5図のよ
うに、可撓管(2)が筒部(25)の下流端部に設けたパ
ッキン(P)に圧接されることとなる。In the case of this embodiment, the tightening cylinder (4) has a cylindrical portion (25).
It is configured to be screwed into a screw portion formed on the inner peripheral surface of the flexible tube (2) is inserted into the movable tube (3) as in the first embodiment, and the tightening tube (4) is inserted. When the screw is screwed in, the tips of the balls (B), the protrusions of which protrude toward the outer peripheral side of the wall of the movable tube (3), are pushed inward, and the balls (B), (B) become flexible tubes. It will be engaged with the mountain portion on the outer periphery of (2). After that, when the tightening cylinder (4) is further screwed in, the tip of the tightening cylinder (4) contacts the flange portion (31) and the movable cylinder (3) is pushed in. As a result, as shown in FIG. The flexible tube (2) is brought into pressure contact with the packing (P) provided at the downstream end of the tubular portion (25).
この第2実施例の場合、可動筒(3)の外側の端部から
一定の範囲に亙るスリット(37)を形成し、しかも、つ
ば部(31)の突出度合を少くしてあるから、可動筒
(3)と締付け筒(4)とを嵌合させる際に、可動筒
(3)の端部の直径を強制的に縮小させて締付け筒
(4)を外嵌することにより抜け止め状態に取付けるこ
とができる。従って、可動筒(3)と締付け筒(4)の
組立てが簡単である。In the case of the second embodiment, since the slit (37) is formed over a certain range from the outer end of the movable barrel (3), and the protrusion degree of the collar (31) is small, the movable cylinder (3) is movable. When the tube (3) and the tightening tube (4) are fitted together, the diameter of the end of the movable tube (3) is forcibly reduced and the tightening tube (4) is externally fitted so that it does not come off. Can be installed. Therefore, the movable cylinder (3) and the tightening cylinder (4) can be easily assembled.
なお、上記いずれの実施例のものも、ボール(B),
(B)の保持構造としては、可動筒の構成壁面肉部に半
径方向に貫通する透孔を形成してこの透孔(H)に各別
に前記ボールを挿入する構成とし、これらボールが可動
筒の内部に脱出しないようにするため、図示のように、
可動筒の内周側の直径をボール(B)の直径よりも小さ
く設定してある。In each of the above-mentioned examples, the ball (B),
As the holding structure of (B), a through hole that penetrates in the radial direction is formed in the wall portion of the wall surface of the movable cylinder, and the balls are individually inserted into the through holes (H). In order not to escape inside the
The diameter of the inner peripheral side of the movable cylinder is set smaller than the diameter of the ball (B).
又、上記第2実施例のものでは、ボール(B),(B)
の配列を千鳥状にして、これらボールの可動筒における
軸線方向の間隔を可撓管(2)の大径部(26),(26)
相互の間隔に一致させてあるから、可撓管の軸線方向の
二箇所でボールが係合することとなり、締付け固定力が
可撓管の広い範囲に分散し、この締付け固定力が可撓管
に集中的に作用する不都合が防止できる。さらに、可撓
管の軸線方向の二箇所で係合することから、可動筒の初
期位置がズレていてもボールと大径部(26)とが係合し
やすい。In the second embodiment, the balls (B), (B)
Are arranged in a zigzag pattern, and the intervals of these balls in the axial direction in the movable cylinder are set to the large diameter portions (26), (26) of the flexible tube (2).
Since the intervals are matched with each other, the balls are engaged at two points in the axial direction of the flexible tube, and the tightening fixing force is distributed over a wide range of the flexible tube. It is possible to prevent the inconvenience of intensively acting on. Further, since the flexible tube is engaged at two positions in the axial direction, the ball and the large diameter portion (26) are easily engaged even if the initial position of the movable cylinder is displaced.
第1図は本発明の第1実施例の断面図,第2図は可撓管
接続途中の説明図,第3図は可撓管接続状態の説明図,
第4図,第5図は第2実施例の説明図,第6図は従来例
の説明図であり図中、 (2)……可撓管 (20)……継手、(25)……筒部 (3)……可動筒、(4)……締付け筒 (34)……締付けネジ (27)……テーパ面 (B),(B)……ボールFIG. 1 is a sectional view of the first embodiment of the present invention, FIG. 2 is an explanatory view of a flexible tube being connected, and FIG. 3 is an explanatory view of a flexible tube connected state,
FIGS. 4 and 5 are explanatory views of the second embodiment, and FIG. 6 is an explanatory view of the conventional example, in which (2) ... flexible tube (20) ... joint, (25) ... Cylindrical part (3) …… Movable tube, (4) …… Tightening tube (34) …… Tightening screw (27) …… Tapered surface (B), (B) …… Ball
Claims (4)
軸線方向に一様に連続した可撓管(2)の端末を筒部
(25)に接続するようにした可撓管用継手において、前
記筒部(25)に収容され且可撓管(2)を内挿するよう
にした可動筒(3)と、この可動筒(3)の壁面に半径
方向に出没自在に保持された複数のボール(B),
(B)と、筒部(25)に螺合し且前記可動筒(3)を一
体的に同方向に侵入させる締付け筒(4)と、この締付
け筒(4)を締め込むことによって前記ボール(B),
(B)を内方に押し込む押し込み手段とを具備させた可
撓管用継手。1. An end of a flexible tube (2) in which large-diameter portions (26), (26) of a tube wall are uniformly continuous in the axial direction at regular intervals is connected to a tubular section (25). In the flexible tube joint, a movable tube (3) housed in the tube portion (25) and into which the flexible tube (2) is inserted, and a wall surface of the movable tube (3) can project and retract in the radial direction. A plurality of balls (B) held by,
(B), a tightening tube (4) that is screwed into the tube portion (25) and allows the movable tube (3) to integrally enter in the same direction, and the ball is obtained by tightening the tightening tube (4). (B),
A joint for a flexible tube, comprising: (B) a pushing means for pushing inward.
成し且可動筒(3)の侵入方向に向って縮小するテーパ
面(27)とし、締付け筒(4)の螺合締付け時において
可動筒(3)と締付け筒(4)とが一体的に移動すべく
これらを係合させた特許請求の範囲第1項記載の可撓管
用継手。2. The pushing means is a tapered surface (27) formed on the inner peripheral surface of the tubular portion (25) and contracting in the direction of entry of the movable tubular member (3), and the tightening tubular member (4) is screwed. The flexible pipe joint according to claim 1, wherein the movable cylinder (3) and the tightening cylinder (4) are engaged with each other so as to move integrally during tightening.
結合した特許請求の範囲第2項記載の可撓管用継手。3. The flexible tube joint according to claim 2, wherein the movable cylinder (3) and the tightening cylinder (4) are integrally connected.
突出するボール(B),(B)の頂部に対接する締付け
筒(4)の先端部とした特許請求の範囲第1項記載の可
撓管用継手。4. A press-fitting means comprising: a tip of a tightening cylinder (4) which is in contact with the tops of the balls (B) and (B) protruding from the outer periphery of the movable cylinder (3). Flexible pipe joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14272387A JPH0689873B2 (en) | 1987-06-08 | 1987-06-08 | Flexible tube fittings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14272387A JPH0689873B2 (en) | 1987-06-08 | 1987-06-08 | Flexible tube fittings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63308293A JPS63308293A (en) | 1988-12-15 |
| JPH0689873B2 true JPH0689873B2 (en) | 1994-11-14 |
Family
ID=15322083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14272387A Expired - Lifetime JPH0689873B2 (en) | 1987-06-08 | 1987-06-08 | Flexible tube fittings |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0689873B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7605083B2 (en) | 2001-07-16 | 2009-10-20 | Applied Materials, Inc. | Formation of composite tungsten films |
-
1987
- 1987-06-08 JP JP14272387A patent/JPH0689873B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7605083B2 (en) | 2001-07-16 | 2009-10-20 | Applied Materials, Inc. | Formation of composite tungsten films |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63308293A (en) | 1988-12-15 |
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