JPH0683820B2 - Cleaning method and device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to an IC contaminated with, for example, fats and oils, flux, and the like.
The present invention relates to a cleaning method and a cleaning device for cleaning an object to be cleaned such as an electronic device and a liquid crystal panel, and more particularly to a cleaning method and a cleaning device suitable for cleaning an object to be cleaned having a bottleneck portion and a closed portion. is there.

(Prior Art) A cleaning device removes oils and fats by immersing objects to be cleaned such as integrated circuits and electronic devices contaminated with oils and fats and fluxes in a cleaning solution such as CFCs and trichloroethylene. In the conventional apparatus, as shown in FIG. 5, a warm bath 1 having a heater 1a, a cold bath 2 having an ultrasonic transducer 2a, a vapor bath 3 having a heater 3a, and a magazine 6 containing an object to be cleaned are provided. A conveyor 4 with a jig for carrying and a cooling flexible tube 5 are provided. And magazine 6 to conveyor 4
It is attached to a cleaning device and carried into a cleaning device. First, the object to be cleaned is dipped in the cleaning solution in the warm bath 1 to swell the oil and fat adhering to the object to be cleaned and partially dissolve it in the cleaning solution. Next, it is immersed in the cleaning solution in the cold bath 2 and foreign matter such as fats and oils is separated from the object to be cleaned by ultrasonic waves, and at the same time, the object to be cleaned is cooled. Then, it is carried into the vapor tank 3 and exposed to the vapor atmosphere, and the cleaning solution is condensed on the surface of the object to be cleaned and rinsed. After that, the object to be cleaned was moved to the upper part of the cooling flexible tube 5, dried and taken out.

According to the above-described conventional apparatus, for example, as shown in FIG. 4, a tubular projection 8 is provided on a part of the object to be cleaned 7, and the closed bottleneck 8a surrounded by the projection 8 is cleaned. In this case, in order to make the contaminants 9 such as fats and oils adhering to the inside of the closed bottleneck portion 8a have an oil content of 1 mg / piece or less, the objects to be washed 7 are the hot tub 1, the cold tub 2, and the vapor tub 3. Each of them had to be immersed for 15 minutes or more in each, and it took a long time for cleaning, and at least three tanks were required, which made it inevitable to enlarge the equipment.

On the other hand, the applicant of the present invention previously disclosed in JP-A-60-12187,
A compression step of compressing the cleaning solvent, and a heating step of heating the cleaning solvent compressed by the compression step to an atmospheric pressure boiling point or higher,
A cleaning method comprising a spraying step of spraying a cleaning solvent compressed and heated in a compression step and a heating step onto an object to be cleaned, and a compression step of compressing a cleaning solvent liquid according to JP-A-60-137481 and a compression step. The heating step of heating the cleaning solvent solution above the atmospheric pressure boiling point and the cleaning solvent solution compressed and heated in the compression step and the heating step are sprayed onto the object to be cleaned located in the cleaning solvent solution in the cleaning solvent solution. We proposed a cleaning method consisting of a cleaning process.

(Problems to be Solved by the Invention) According to the above-mentioned cleaning method of the present applicant, it becomes possible to clean the contaminants adhering in the minute gaps in a short time by the boiling action of the cleaning solution. However, since the entire cleaning solution to be sprayed onto the object to be cleaned is heated above the atmospheric pressure boiling point, a large amount of energy is required for cleaning, especially when cleaning the contaminants adhering to the closed bottleneck part, the energy efficiency point. From the viewpoint, it was not always satisfactory.

(Means for Solving the Problems) In view of the above problems, the present invention is directed to foreign matter attached to an object to be cleaned,
An object of the present invention is to provide a cleaning method and an apparatus capable of efficiently removing foreign matter such as oils and fats attached to a closed bottleneck of an object to be cleaned in a short time.

According to the cleaning method of the present invention which meets such an object, the object to be cleaned is heated to a temperature higher than the atmospheric pressure boiling point of the cleaning solution to be used, and then the pressurized cleaning solution is sprayed onto the object to be cleaned placed under the atmospheric pressure. That is the summary.

And, a cleaning apparatus suitable for carrying out the above-mentioned cleaning method is a heating means for heating the object to be cleaned to a temperature higher than the atmospheric pressure boiling point of the cleaning solution to be used, and the object to be cleaned placed under the atmospheric pressure. And a pump for ejecting the cleaning solution to the object to be cleaned and a pump for pressurizing and supplying the cleaning solution to the injection nozzle.

(Operation) According to the present invention, the cleaning solution is heated at a high speed by heating the object to be cleaned above the atmospheric pressure boiling point of the cleaning solution and then injecting the pressurized cleaning solution onto the heated object to be cleaned under the atmospheric pressure. When the cleaning solution rapidly depressurizes to atmospheric pressure, it boils on the surface of the object to be cleaned, and at the same time, the contaminants such as oils and fats adhering to the surface of the object to be cleaned are vaporized as nuclei. Foam is generated to separate the contaminants from the surface of the object to be cleaned.

(Example) Below, this invention is demonstrated based on drawing.

FIG. 1 is a sectional view showing an entire cleaning apparatus 10 for carrying out the method of the present invention. The cleaning device 10 has an outer shape formed by an outer frame 11 made of a heat insulating material, an inner frame 12 is attached inside the outer frame 11, and a lid 13 is attached on the upper part of the outer frame 11.
The inside of the inner frame 12 is divided into an A station for rough cleaning and a B station for finishing cleaning. On the upper left and right side walls of the outer frame 11 and the inner frame 12, an opening 16 and a magazine 15 are provided on the left and right side walls for loading the articles 7 to be cleaned stored in the magazine 15 into the cleaning device 10 by the jig conveyor 14. Conveyor 1
An opening 16 'is formed for carrying out to 4'. The lid 13 is provided with an elevating device 17 including a hydraulic cylinder, and the elevating device 17 is connected to an elevating carrier 18 in which magazine storage units 18A and 18B are vertically installed, and is vertically movable in the cleaning device 10. It is set up. Further, at the bottom of the cleaning device 10, a storage tank 20A and a storage tank 20B partitioned by a partition plate 19 that is planted on the bottom surface of the inner frame 12 are provided, and the cleaning solution can be stored therein. Further, the partition plate 19 is formed with an opening 19a for allowing the cleaning solution overflowing from the storage tank 20B to flow into the storage tank 20A. A jet nozzle, which will be described later, is arranged so as to face the bottom surface of the magazine storage section 18A, and the jet nozzle and the storage tank 20A are connected by a pipe line 21A. And pump 22A and filter 23A in the line 21A
The cleaning solution in the storage tank 20A is pressurized by the pump 22A and supplied to the injection nozzle via the filter 23A and the switching valve 24A. Similarly, the storage tank 20B and the injection nozzle are connected by the pipe line 21B, and the cleaning solution in the storage tank 20B is pressurized by the pump 22B and supplied to the injection nozzle via the filter 23B and the switching valve 24B. The switching valves 24A and 24B are for selectively switching the supply destination of the cleaning solution between the injection nozzle and the storage tanks 20A and 20B. 25 is a cooling pipe,
The cleaning solution is placed under the openings 16 and 16 ', cooled to below the dew point, condensed, and dropped, so that the cleaning solution is scattered from the openings 16 and 16' to the outside of the cleaning apparatus 10. Prevent from doing.

As shown in the enlarged view of FIG. 2, the magazine storage portion 18A has a heater 26A provided therein, and a through hole 27A is provided at the center of the bottom surface on which the magazine 15 is placed. The heater 26A is arranged so that the protrusion 8 of the article 7 to be cleaned inserted into the through hole 27A can be efficiently heated. On the other hand, the magazine 15 is composed of an upper plate 15a and a lower plate 15c having a fitting hole 15b formed therein. The article to be cleaned 7 is fitted in the fitting hole 15b and is sandwiched between the upper plate 15a and the lower plate 15c. Then, the magazine 15 is designed so that the protruding portion 8 of the article to be cleaned 7 protruding from the fitting hole 15b is inserted into the through hole 27A.
It is placed on the magazine storage section 18A. Further, a jet nozzle 28A is arranged vertically upward so as to face the through hole 27A, and is accurately positioned so that the jet nozzle 28A is inserted into the closed bottleneck portion 8a when the lift carrier 18 descends. This injection nozzle 28A has a protruding portion 8 when it is inserted into the closed bottleneck portion 8a.
The closed bottleneck 8a so that an appropriate gap is created between the inner wall and
Has a diameter smaller than the diameter of. Although not shown, the magazine storage section 18B has the same heater 26B as the magazine storage section 18A,
A through hole 27B is provided, and an injection nozzle 28B is similarly arranged.

The apparatus of this embodiment has the above-mentioned structure, and its operation will be described below.

When the lift carrier 18 is located at the position indicated by the chain double-dashed line in the figure, the magazine storage unit 18 is moved by an unloader (not shown)
The magazine 15 in B is carried out to the conveyor 14 ', and the magazine 1 in the magazine storage unit 18A is loaded by the loader (not shown).
5 is transferred to the magazine storage unit 18B and the unprocessed magazine 15 is carried into the magazine storage unit 18A from the conveyor 14.

The article to be cleaned 7 in the magazine 15 placed in the magazine storage sections 18A and 18B is preheated to a temperature equal to or higher than the atmospheric pressure boiling point of the cleaning solution by the heaters 26A and 26B.

When Freon is used as the cleaning solution, the boiling curve of Freon has a boiling point of 47.6 at atmospheric pressure as shown in Fig. 3.
C., and the boiling point under 2 atmospheres is 84.degree. Therefore, the object to be cleaned 7 is heated to, for example, about 60 ° C.

After the article to be cleaned 7 is sufficiently heated, the elevating carrier 18 is lowered to move the injection nozzles 28A and 28B to the respective closed bottleneck portions 8a of the article to be cleaned 7.
To insert. Then switch the switching valves 24A and 24B to pump
The cleaning solution pressurized by 22A and 22B is injected into the closed bottleneck portion 8a. The inside of the cleaning device 10 is under atmospheric pressure through the openings 16 and 16 ', and the obstruction bottleneck portion 8a and the injection nozzle 28 are provided.
Since there is a gap between A and 28B, it is a closed bottleneck.
The inside of 8a is also under atmospheric pressure. Therefore, when the cleaning solution pressurized at room temperature is injected into the closed bottleneck 8a at a high speed, it boils on the inner surface of the heated bottlenecked bottle portion 8a, and the contaminants 9 adhering to the bottleneck bottleneck portion 8a serve as nuclei for vapor bubbles. Occurs, and the contaminant 9 is separated from the surface of the closed bottleneck portion 8a.

After cleaning, the elevating carrier 18 is raised to the position shown by the chain double-dashed line in the figure, where the magazine 15 that has been roughly washed at the A station is transferred to the B station, and the magazine 15 that has been finally washed at the B station is placed outside the cleaning device 10. Carry out.

According to the apparatus of the present embodiment described above, it took 30 minutes or more to clean up to 1 mg / piece of contaminants in the blocked bottle portion which is conventionally 70 mg / piece, but only 2 minutes. It was possible to achieve the same or higher cleaning effect in.

In the above embodiment, two stations, A and B, are provided to perform a two-step cleaning operation of rough cleaning and finish cleaning. However, this may be one station or higher depending on the object to be cleaned. Multiple stations may be provided to achieve the cleaning effect.

(Effects of the Invention) According to the present invention, an object to be cleaned is heated to a temperature higher than the atmospheric pressure boiling point of the cleaning solution to be used, and then the pressurized cleaning solution is sprayed onto the object to be cleaned placed under the atmospheric pressure. By doing so, contaminants attached to the surface of the object to be cleaned are removed, the cleaning effect is extremely high, and the time and energy required for cleaning can be reduced.

Further, even if the object to be cleaned is fragile and may be damaged by ultrasonic cleaning, it can be cleaned without causing any damage.

Further, since the object to be cleaned is heated by the cleaning solution to a temperature above the atmospheric pressure boiling point of the cleaning solution, the dry state after cleaning becomes good, and it is possible to prevent the generation of stains and the like due to the moisture adhering during vapor cleaning as in the conventional case.

[Brief description of drawings]

FIG. 1 is a sectional view showing a cleaning apparatus for carrying out the method of the present invention, FIG. 2 is an enlarged sectional view of an essential part of the apparatus of the present embodiment, and FIG. 3 is a boiling curve diagram of a cleaning solution used in the method of the present invention. FIG. 4 is an enlarged sectional view of the object to be cleaned, and FIG. 5 is a sectional view showing a conventional device. 22A, 22B …… Pump, 26A, 26B …… (heater) heater, 28A, 28B …… Injection nozzle

Continuation of front page (56) Reference JP-A-60-87885 (JP, A) JP-A-57-127403 (JP, A) JP-A-62-260325 (JP, A) JP-A-51-135185 (JP , A) JP 58-14985 (JP, A) Actual development 59-131284 (JP, U) JP 51-31461 (JP, B2) JP 63-53873 (JP, B2) JP Heihei 2-37232 (JP, B2) JP-B 2-49794 (JP, B2) JP-B 57-43316 (JP, B2) JP-B 3-31115 (JP, B2) JP-B 3-31111 (JP, B2)

Claims (2)

[Claims] 1. A cleaning method comprising heating an object to be cleaned to a temperature higher than an atmospheric pressure boiling point of the cleaning solution to be used, and then spraying the pressurized cleaning solution onto the object to be cleaned placed under atmospheric pressure. Method. 2. A heating means for heating an object to be cleaned to a temperature higher than an atmospheric pressure boiling point of a cleaning solution to be used, and the object to be cleaned arranged to face the object to be cleaned placed under the atmospheric pressure. 1. A cleaning device, comprising: an injection nozzle for injecting a cleaning solution into; and a pump for pressurizing and supplying the cleaning solution to the injection nozzle.