JPH06315832A - Manufacture of mask holder for confocal scanning laser microscope - Google Patents

Abstract

(57) [Summary] [Purpose] To manufacture a mask holder for placing a mask or reticle and setting it on the scanner with high precision. [Structure] An aluminum material with sufficient allowance and thickness for the final external dimension is cut out so as not to be affected by the internal stress of the material cut portion. The outer peripheral contour, the upper and lower through-holes 210, etc. are finished by wire cutting to reduce residual stress in the cut portion. While measuring the dimensions of the front surface and the back surface, the cutting process is divided into rough drawing, middle drawing, fine, and finishing, and the front and back are alternately cut to finish each part.
As a portion that does not require dimensional accuracy and has little influence on the moment by driving the scanner, for example, the back surface of the outer peripheral thin portion 160 is shaved little by little to adjust the weight. Completed by anodizing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mask holder for setting a mask or reticle on a scanner in a confocal scanning laser microscope used for measuring the line width of a pattern drawn on the mask or reticle. It relates to a manufacturing method.

[0002]

2. Description of the Related Art A confocal scanning laser microscope is used as a mask or reticle or wafer dimensional inspection device to measure the line width and overlay accuracy of a pattern drawn on a mask or reticle or wafer. To be done. FIG. 2 shows a principle diagram of the confocal scanning laser microscope. Laser light 1 emitted from laser oscillator 10
The light beam 2 is reflected by the mirror 14, narrowed down by the lens 16, and passed through the pinhole 18. The laser beam 12 that has passed through the pinhole 18 passes through the beam splitter 20, is converged by the objective lens 22, and is irradiated onto the sample 24 (mask or reticle or wafer). The laser light reflected on the surface of the sample 24 is reflected by the beam splitter 20, passes through the pinhole 26, and is received and amplified by the photomultiplier tube 28.

When performing the dimension inspection, the position of the focal point F of the laser light is fixed under the pattern 30 (or above the pattern 30) as shown in FIG. Then, while the sample 24 is scanned in the X-axis direction by a high frequency by the scan controller 32, the sample 24 is slowly moved in the Y-axis direction by the X and Y stages. At this time, when the beam spot is passing under the pattern 30 as shown in (a), all the reflected light passes through the pinhole 26, and the output of the photomultiplier tube 28 becomes high. On the other hand, when the beam spot is passing over the pattern 30 as shown in (b), the reflected light is not focused at the position of the pinhole 26, and most of it is blocked, so that the photomultiplier tube 28 The output becomes smaller. Therefore, if images are sequentially drawn on the television monitor 34 with the brightness according to the output of the photomultiplier tube 28 in synchronization with the scan by the scan controller 32, the image 36 of the pattern 30 is displayed on the television monitor 34. When the operator moves the cursor to any position on the image 36, the pattern width at that position is automatically measured.

A specific example of a confocal scanning laser microscope for wafers using the above principle (SiSc manufactured by SiScan)
anIIA) will be described. FIG. 3 is a block diagram of the apparatus.
The confocal scanning laser microscope for wafer 40 is composed of an optical module 42 and a workstation 44, which are connected to each other by a signal cable 45. The optical module 42 is a base 4 supported by an air suspension.
An X, Y stage 48 is mounted on the scanner 6, and a scanner 50 is mounted thereon. The sample is attached to the scanner 50 by vacuum chucking. A focus device 52 is arranged above the scanner 50,
The laser light emitted from the laser oscillator 10 is converged by the objective lens 22 to irradiate the sample on the scanner 50.
The optical system box 9 contains the optical system shown in FIG. Further, a television camera 56 with a zoom lens is disposed downwardly adjacent to the laser oscillator 10 and is used for taking an image of a sample (wafer) near the laser irradiation position. Below the base 46, the electric circuit chassis 5
8, an indicator 60 such as a chuck vacuum, a laser power source 62, a robot controller 8 for setting the sample on the scanner 50, and removing the inspected sample from the scanner 50 are provided.

On the other hand, in the workstation 44, the operator's operation panel 64, television monitor 66, printer 6
8. A control device 70 including a CPU and the like are provided so that the optical module 42 can be operated entirely from the workstation 44. An image observed by the laser microscope, an image captured by the television camera 56, and the like are displayed on the television monitor 66.

FIG. 4 shows the system configuration of the wafer confocal scanning laser microscope 40 shown in FIG. The sample (wafer) 24 is transferred onto the scanner 50 and chucked by the wafer handling robot 72. The laser beam 12 from the laser oscillator 10 is emitted from the objective lens 22 via the optical system shown in FIG. The reflected light is received by the photodetector 28 (photomultiplier tube or the like).

Computer 7 of workstation 44
Reference numeral 6 controls each unit via the bus 77. That is, the wafer handler control unit 82 drives the robot 72 to carry out and carry in the sample 24. Further, the X, Y stage motor controller 78 drives the X, Y stage 48 to position a desired inspected portion on the sample 24 within the scanning range of the laser light 12. Further, the Z-axis focus control unit 80 moves the objective lens 22 in the vertical direction to focus on the sample 24 below or above the pattern. When the focus is achieved, the height of the objective lens 22 is fixed there.

The scan control / synchronization circuit 84 is for performing scanning waveform read and synchronization control as scan control. The line scan waveform memory 86 stores a scan waveform such as a sine wave, and reads the stored scan waveform at high speed (for example, 2 kHz) according to a command from the scan control and synchronization circuit 84. The read scan waveform is converted into an analog waveform by the D / A converter 88, and the actuator (voice coil motor, piezoelectric element, etc.) of the scanner 50 is driven through the amplifier 90 in the X-axis direction, and the laser is emitted. Scan the light irradiation position. The scanning speed is kept at the specified speed by speed feedback.

The output of the photodetector 28 is converted into a digital signal by an A / D converter 94 via an amplifier 92.
The pixel timing and synchronization circuit 96 has a correspondence relationship between the detection information of the photodetector 28 continuously obtained in each scan and the position on the X axis, and the data sequentially output from the A / D converter 94. In response to this, an address on one scan line is given and taken in the line scan pixel memory 98. The line scan distortion memory 100 corrects the spatial distortion of the scan waveform so that an accurate pattern can be taken into the memory 98.

Scanning is performed while slowly moving the Y-axis of the X, Y stage 48 at a constant speed, and at this time, the contents of the memory 98 are displayed on the video display at each scan.
The data is sequentially loaded into the memory 102, and X,
A pattern image in a desired range on the Y plane is displayed in the display area of the image monitor 104 on the television monitor. In the display area of the graphic monitor 106 on the television monitor, the photodetector detection waveform in the X-axis direction at the Y-axis position designated by the cursor on the image monitor 104 is displayed. The pattern width is a value obtained by counting the number of pixels of the pattern stored in the video display memory 102 in the range designated by the cursor on the image monitor 104 and averaging the count values at the respective positions in the Y-axis direction within the cursor. Is calculated automatically and the result is displayed as a numerical value on the TV screen.

[0011]

Since the size of a wafer is fixed (8, 6, 5 inches, etc.), the wafer can be set as it is and inspected. However, masks and reticles have various external dimensions (vertical and horizontal dimensions, thickness, etc.), weights, presence or absence of accessory parts (pellicles, etc.), and if the external dimensions are different, they cannot be set in the scanner 50 as they are. Further, if the weights are different, the behavior when set in the scanner 50 is different, which may hinder the inspection in some cases, so it is necessary to match the weights. It is also necessary to support the presence or absence of a pellicle.

Therefore, in order to solve such a problem, the applicant of the present invention has proposed to set the mask or reticle on the scanner in a state of being mounted on a jig called a mask holder. By unifying the external dimensions of the mask holder and changing the shape and weight of the placement surface of the mask or reticle according to the external dimensions and weight of the mask or reticle, prepare the mask and reticle Regardless of the external dimensions and weight, the external dimensions and weight of the entire mask holder will be unified, and the mask holders can handle them in common.

Since the manufacturing accuracy of this mask holder affects the inspection accuracy when inspecting with a scanner,
Extremely high accuracy is required. That is, if there is distortion in the vertical direction, the accuracy in the height direction deteriorates, and the distance between the mask and the objective lens cannot be maintained at a predetermined distance. If the weight accuracy is poor, the scanning speed cannot be maintained at a predetermined value.

The present invention has been made in view of the above points, and an object of the present invention is to provide a method of manufacturing a mask holder for a confocal scanning type laser microscope, which can manufacture the mask holder with high accuracy.

[0015]

According to the present invention, a mask holder material having a sufficient allowance and a thickness with respect to a final external dimension is cut out, and an outer peripheral contour and, if necessary, upper and lower surface through holes are wire-cut. While measuring the dimensions of the finish, front and back sides, the shaving process is divided into rough drawing, medium drawing, fine, and finishing, and each part is finished by alternately cutting the front and back, and dimensional accuracy is not required. The feature is that the weight is adjusted by shaving the part that has little influence.

[0016]

According to the present invention, since the mask holder material having a sufficient allowance and thickness for the final external dimension is cut out and used, it is less susceptible to the internal stress of the material cutting portion and the outer peripheral contour Further, since the upper and lower through holes are finished by wire cutting as required, residual stress can be reduced. Then, while measuring the dimensions of the front and back surfaces, the shaving process is divided into rough drawing, medium drawing, fine, and finishing, and each part is finished by alternately cutting the front and back, so the accuracy in the height direction is secured and the dimensional accuracy is improved. Weight accuracy is ensured because the weight is adjusted by cutting away the part that is not required and has little effect on the moment driven by the scanner. As a result, a highly accurate mask holder can be obtained, and highly accurate inspection can be performed.

[0017]

An embodiment of the present invention will be described below. First, FIG. 5 shows a situation in which a mask is inspected with a laser microscope using a mask holder. The mask (or reticle) 122 to be inspected is inspected while being mounted on the mask holder 124. The mask holder 124 is prepared for each outer dimension and thickness of the mask 122,
Hold the mask 122 in place. Mask holder 1
The outer dimensions of 24 are unified, and common handling can be performed regardless of the mask type.

When the mask holder 124 is manually carried in or placed on the pre-alignment device 126 by a robot or the like, the pre-alignment device 126 causes the master holder 124 to move.
Is automatically positioned at a predetermined pre-alignment position. When the positioning is completed, the mask handler 128 scoops up the mask holder 124 from the pre-alignment device 126 and places it on the scanner 50 in a predetermined process, and the inspection is performed. When the inspection is completed, the mask handler 128 scoops up the mask holder 124 from the scanner 50 in the reverse process, and the pre-alignment apparatus 12
Return to 6. In this way, the inspection of one mask 122 is completed.

A specific example (optical module portion) of the laser microscope 120 of FIG. 5 is shown in FIG. The same parts as those in FIG. 3 are designated by the same reference numerals. The laser microscope 120 is entirely covered with a housing 139. Pre-alignment device 12
6 is arranged at a position facing the front of the housing 139,
The lid 146 is opened and the mask holder 124 is loaded and unloaded. A mask handler 128 is arranged behind the pre-alignment device 126. Further, the reference position of the scanner 50 is arranged at a position rotated leftward by 90 ° in the horizontal direction from the position of the pre-alignment device 126 about the rotation axis 146 of the mask handler 128.

The pre-alignment device 126 has a plate-shaped portion 130 on which the mask holder 124 is placed. The mask holder 124 is manually carried in by a robot or a robot and is roughly placed on the plate-shaped portion 130. A suction groove 131 for vacuum-sucking the mask holder 124 is formed on the surface of the plate-shaped portion 130. The mask 122 itself is firmly vacuum-adsorbed to the mask holder 124 by utilizing the suction force of the suction groove 131.

The plate-shaped portion 130 can be tilted toward the front side (mask holder loading direction) about the tilting shaft 132. The plate-shaped portion 130 is normally in a horizontal state, but when pre-alignment is performed, the plate-shaped portion 130 tilts and slides the mask holder 124 so that the two edges 133 and 134 are raised.
Lock with. As a result, the center position of the mask holder 124 coincides with the pre-alignment center position 135 of the pre-alignment device 126, and the pre-alignment is performed.

The mask handler 128 moves up and down,
It has three drive shafts for horizontal rotation and horizontal expansion / contraction, and inserts the mask hand 136 at the tip into the notch 140 of the plate-like portion 130 of the pre-alignment device 126 to vacuum-suck the mask holder 124 and scoop it up. And
The scanner 5 with the mask holder 124 vacuum-adsorbed
0, the mask hand 136 is inserted into the notch 51 (see FIG. 12) of the scanner 50, and the mask holder 124 is handed over to the scanner 50. Scanner 50
Performs inspection by chucking the delivered mask holder 124 by vacuum suction.

A photoelectric or TV camera type mask height detector is arranged at a position facing the pre-alignment device 126, and detects the height of the mask placed on the plate-like portion 130. By this height detection, a mistake in the combination of the mask holder and the mask is automatically detected, and the collision between the objective lens 22 and the mask 122 at the time of inspection is prevented.

A series of inspection steps by the laser microscope of FIG. 6 will be described with reference to FIG. Mask 12 for inspection
The mask holder 124 to which 2 is attached is roughly placed on the plate-shaped portion 130 of the pre-alignment device 126 manually or by a robot. When the inspection start button is turned on (P
1), the plate-shaped portion 130 of the pre-alignment device 126 performs vacuum suction to detect the pressure, and whether the mask holder 124 is placed on the plate-shaped portion 130 is detected (P2).
P3). That is, when the pressure does not drop below the predetermined value, it is determined that the mask holder 124 is not set, vacuum suction is stopped (P4), and the inspection start command is canceled (P5).

When the pressure is lower than the predetermined value, it is judged that the mask holder 124 is set and the suction is stopped (P6). Then, the plate-shaped portion 130 of the pre-alignment device 126 is tilted by a predetermined amount to perform pre-alignment (P7). After tilting, suction is started again (P8),
The plate portion 130 is returned to the horizontal position (P9).

Next, the mask hand 136 of the mask handler 128 is inserted into the notch 140 of the plate-shaped portion 130 in a non-contact manner, and the mask hand 136 is slightly raised so that the surface of the mask hand 136 becomes the surface of the plate-shaped portion 130. After positioning at the same height (P10) and starting suction of the mask hand 136 (P11), suction of the plate-shaped portion 130 is stopped (P12). Then, the mask hand 136 is raised to pull up the mask holder 124 from the plate-shaped portion 130 (P13).

After pulling up, the mask hand 136 is moved to 90
Rotate horizontally to the left, extend the arms 142 and 144, and put the mask hand 136 on the notch 51 of the scanner 50.
It is inserted into (Fig. 12) without contact (P14). At this time, the X, Y stage 48 is positioned at a reference position such as the origin. Then, the mask hand 136 is lowered to position the surface of the mask hand 136 at the same height as the chuck surface of the scanner 50 (P15). After positioning, after starting the suction of the scanner 50 (P1
6), suction of the mask hand 136 is stopped (P1
7). The mask holder 124 is now in the scanner 50.
It will be in a state of being chucked.

Thereafter, the mask hand 136 is slightly lowered to contract the arms 142 and 144, and the mask hand 13
6 is pulled out from the notch 51 of the scanner 50 without contact (P18). Then, the inspection is started (P19). In the inspection, as in the conventional apparatus, the X and Y stages 48 are moved to position a desired inspected portion on the mask 122 immediately below the objective lens 22, and the mask holder 12 is moved by the scanner 50.
This is performed by gradually moving the Y-axis stage while scanning 4 in the X-axis direction at high speed.

After the inspection is completed (P20), the mask holder 124 is returned to the plate-shaped portion 130 of the pre-alignment device 126 in the reverse process of carrying-in (P21). Plate-shaped part 13
The mask holder 124 returned to 0 is taken out manually or by a robot.

According to the above-described series of inspection steps, the human or robot pre-aligns the mask holder 128 in front of the housing 139 of the optical module.
It is not necessary to insert an arm into the inside of the housing 139 because it can be placed on the inside of the housing 139, and since the scanner 139 is arranged in the central portion of the housing 139, dust will enter the inspection place. Can be prevented.

FIG. 8 shows the vacuum suction period of each device in the above series of inspection steps. According to this, after the mask holder 124 is pre-aligned, the vacuum suction period is always overlapped and sequentially transferred to be chucked by the scanner 50. Therefore, the mask holder 124 should be properly chucked on the scanner 50 at the correct position. You can

The above inspection process is executed by a command from the controller 70 of the workstation 44 (FIG. 3) and a command given via the controller 150 of the optical module 120.

Next, an embodiment of the mask holder 124 is shown in FIGS. The mask holder 124 is made by processing an aluminum material. The mask holder 124 has an outer peripheral thin portion 160 formed in a substantially quadrilateral shape. Ribs 162 are formed on the lower surface of the outer peripheral thin portion 160 for reinforcement. Further, a through hole 210 is formed in the outer peripheral thin portion 160 for weight adjustment. An aluminum adjustment weight 166 for adjusting the weight depending on the presence or absence of a stainless steel mask stopper 164 and a pellicle is screwed to the upper surface of the outer peripheral thin portion 160.

A suction surface 168 is formed on a step inside the outer peripheral thin portion 160 on the upper surface of the mask holder 124, and the peripheral surface of the mask or reticle is suctioned by this surface. Suction grooves 170, 171, 172 are formed on the suction surface 168. A concave portion 174 is formed inside the suction surface 168,
The central portion of the mask is prevented from coming into contact with the mask holder 124. The recess 174 is formed sufficiently deep so that the pellicle does not come into contact with the mask holder 124 even in a mask with a pellicle.

The central portion 17 of the lower surface of the mask holder 124
Reference numeral 6 constitutes a chuck surface of the scanner 50. Therefore, this surface 176 is formed with extremely high flatness. Near the four corners of the chuck surface 176, lower suction holes 188 of suction passages 184, 186 communicating with the suction holes 180, 182 of the suction grooves 170, 171 on the surface are formed. The suction hole 188 is provided in the pre-alignment device 126.
And used for suction by the scanner 50. Also,
At the center of the chuck surface 176, the lower suction hole 19 of the suction passage 192 communicating with the suction hole 190 of the suction groove 172 on the surface.
4 are formed. The suction hole 194 is used for suction by the mask handler 128. By sucking through the suction holes 188 or 194, the mask 122 is attracted to the mask holder 124 and the mask holder 12
The 4 itself is also attracted to the pre-alignment device 126, the mask handler 128, the scanner 50, and the like.

FIG. 11 shows a state in which the mask 122 with a pellicle is mounted on the mask holder 124 shown in FIGS. 9 and 10.
The mask 122 is placed and supported on the suction surface 168 near the peripheral portion of the lower surface. In addition, the side surface is a mask stopper 164.
It is supported by the convex portion 200 in point contact and is held so as not to move. The point contact prevents the generation and contamination of particles. Although the pellicle 204 is provided on the upper and lower surfaces, since the recess 174 is deep, the pellicle 204 can hold the mask holder 124 without contacting the mask holder 124. Since the weight of the mask 122 is increased due to the presence of the pellicle 204, the adjustment weight 1
A predetermined weight is maintained by removing 66 (FIG. 9). Adjustment weight 166 for masks without pellicle
Install and adjust to the specified weight.

Since the thickness varies depending on the mask,
The height of the suction surface 168 is individually designed according to the thickness of the mask 122 used so that the height from the chuck surface 176 to the surface of the mask 122 is always constant. Further, if the weight and the center of gravity of the mask holder 124 + mask 122 are different, the behavior when driven by the scanner 50 may change, which may interfere with the inspection. The weight and the position of the center of gravity of the mask holder 124 are individually designed according to the weight of the mask 122 to be used so as to be always constant. However, the external dimensions (vertical and horizontal dimensions) of the mask holder 124 are unified so that they can be commonly handled.

By the way, the manufacturing accuracy of the mask holder 124 affects the inspection accuracy when the mask holder 124 is inspected by a scanner, and therefore extremely high accuracy is required. In particular, the weight, the moment with respect to the scanner drive shaft (that is, the position of the center of gravity), the flatness of the chuck surface 176 in contact with the scanner, the thickness accuracy, and the external dimension accuracy become severe. These requirements are specifically summarized below.

(A) In the normal dimension, the JIS tolerance of the shaving size of 12 is usually required, and in some important dimensions, the tolerance of 1/4 or less is required. (B) A flatness of about 10 μm is required. (C) A permissible value of not more than 2% by weight is required. (D) Require 2% or less of the moment error.

In order to satisfy these requirements, the mask holder 124 is required to be machined into a complicated shape. An embodiment of the present invention, which is an example of a manufacturing process therefor, will be described with reference to FIG.

An aluminum material having a sufficient allowance and thickness for the final external dimension is cut out so as not to be affected by the internal stress of the material cut portion. The outer peripheral contour, the upper and lower through-holes 210, etc. are finished by wire cutting to reduce residual stress in the cut portion. For the front surface and the back surface, while measuring the dimensions, the shaving process is divided into rough drawing, middle drawing, fine, and finishing, and the front and back are alternately cut, and each part (outer peripheral thin part 160, suction surface 16
8, the recess 174, the chuck surface 176, the rib 162, etc.) are finished. Also, the suction paths 184, 1 for vacuuming
86 and 192 are machined from the bottom and the side with a drill.
The unnecessary openings on the bottom surface and side surfaces formed at this time are later closed with blind plugs.

As a portion that does not require dimensional accuracy and has little influence on the moment driven by the scanner,
For example, the back surface of the outer peripheral thin portion 160 is shaved little by little to adjust the weight. Completed by anodizing.

Next, an embodiment of the scanner 50 is shown in FIG.
Shown in. The base plate 260 of the scanner 50 is X,
It is mounted on the Y stage 48 (FIG. 6). One ends of the leaf springs 262 and 264 are horizontally fixed on the base plate 260, and the chuck member 266 is oscillated in the X-axis direction at the tip portions of the leaf springs 262 and 264.
It is supported in a state of floating from 60.

The upper surface of the chuck member 266 is the chuck surface 2.
70 is formed and is formed with high flatness. A suction groove 272 is formed on the chuck surface 270, and suction is performed from the suction hole 274. When the mask holder 124 is placed, the chuck surface 270 comes into close contact with the chuck surface 176 on the lower surface of the mask holder 124, and the suction groove 272 communicates with the suction hole 188 on the lower surface of the mask holder 124. As a result, when sucked through the suction holes 274, the mask 122 is sucked by the mask holder 124 and the mask holder 124 is sucked by the chuck member 266. Therefore, even if the scanning operation is performed, the mask holder 124 and the mask 122 are not displaced with respect to the chuck member 266.

A voice coil motor 268 is attached to the left side of the chuck member 266, and a driving signal is supplied to the voice coil motor 268 to cause the chuck member 266 to vibrate in the X-axis direction for scanning. At this time, the total weight of the chuck member 266, the mask holder 124, and the mask 122 is always constant, and the chuck member 266 is designed such that the center of gravity of the entire chuck member 266 coincides with the scanner drive shaft 270. , The moment is small, and the vibration of the chuck member 266 becomes the mode only in the X-axis direction, and the vertical vibration disappears (the focus cannot be adjusted when the vertical vibration occurs), so that observation can be performed under favorable conditions. A coil type speed sensor is attached to the right side of the chuck member 266 and is used for feedback control of the scanning speed.

A counter balance scanner 280 is attached to the lower surface of the base plate 260. The counter balance scanner 280 reduces vibration of the entire system by vibrating in the opposite direction to the driving of the scanner 50.

The counter balance scanner 280 is
The counterbalance 282 is attached to the left and right leaf springs 284, 28.
6. The voice coil motor 28 on the left side is supported so that it can vibrate.
8 drives the scanner 270 in the opposite direction. At this time, the speed sensor 290 on the right side detects the speed and uses it for speed feedback. The weight of the counter balance 282 is set equal to the total weight of the chuck member 266, the mask holder 124, and the mask 122.

FIG. 13 shows an embodiment of the driving device of the scanner 50. Information such as a sine waveform read from the waveform memory 86 is converted into an analog signal by the D / A converter 88, and the scanner 50 is driven via the amplifier 90.
At this time, the scan speed is maintained at the specified speed by speed feedback. Further, the drive signal is an amplifier 90 '.
The counter balance scanner 280 is vibrated in the opposite direction via the. The speed at this time is also maintained at the specified speed by speed feedback. In this way, scanning is performed with the vibration of the entire system suppressed to a close level.

[0049]

As described above, according to the present invention, since the mask holder material having a sufficient allowance and thickness with respect to the final external dimension is cut out and used, the influence of the internal stress at the material cut portion is prevented. It is hard to receive, and since the outer peripheral contour and, if necessary, the upper and lower through holes are finished by wire cutting, residual stress can be reduced. Then, while measuring the dimensions of the front and back surfaces, the shaving process is divided into rough drawing, medium drawing, fine, and finishing, and each part is finished by alternately cutting the front and back, so the accuracy in the height direction is secured and the dimensional accuracy is improved. Weight accuracy is ensured because the weight is adjusted by cutting away the part that is not required and has little effect on the moment driven by the scanner. As a result, a highly accurate mask holder can be obtained, and highly accurate inspection can be performed.

[Brief description of drawings]

FIG. 1 is a process drawing showing an embodiment of the present invention.

FIG. 2 is a principle diagram of a confocal scanning laser microscope.

FIG. 3 is a device configuration diagram of a confocal scanning laser microscope.

4 is a block diagram showing the system configuration of the confocal scanning laser microscope 40 of FIG.

FIG. 5 is a block diagram showing an outline of inspection using a mask holder.

6 is a diagram showing a specific configuration of the laser microscope of FIG.

7 is a flowchart showing a series of inspection steps by the apparatus of FIG.

8 is a time chart showing a vacuum suction period of each device in the inspection process of FIG.

FIG. 9 is a diagram showing an example of a mask holder.

FIG. 10 is a cross-sectional view of the mask holder of FIG.

11 is a diagram showing a state in which a mask is attached to the mask holder of FIG.

FIG. 12 is a diagram showing an example of a scanner.

13 is a block diagram of a driving device of the scanner of FIG.

[Explanation of symbols]

50 Scanner 120 Confocal Laser Microscope for Mask or Reticle 122 Mask or Reticle 124 Mask Holder

Claims (1)

[Claims] 1. A mask holder material having a sufficient allowance and thickness with respect to the final outer dimension is cut out, and the outer peripheral contour and, if necessary, the upper and lower through holes are finished by wire cutting. While measuring, the shaving process is divided into rough drawing, medium drawing, fine, and finishing, and the parts are machined by alternately cutting the front and back, and dimensional accuracy is not required.
A method for manufacturing a mask holder for a confocal scanning type laser microscope, characterized by shaving a portion that has little influence on a moment driven by a scanner and adjusting the weight.