JPH06300706A - Image processing apparatus - Google Patents

Abstract

(57) [Summary] [Object] To provide an image processing apparatus capable of detecting only a constant abnormality in a shape inspection. [Structure] The image input means 10 captures an image of a sample 12 and generates actual image data. The first storage means 30,
32 stores the actual image data generated by the image input means 10. The second storage unit 28 stores the reference image data. The third storage unit 34 stores combined real image data which is a logical product of a plurality of real image data. The comparison means 38 compares the reference image data with the combined actual image data. The control unit 38 generates the actual image data of the plurality of specimens 12 via the image input unit 10 to generate the first storage unit 3.
0, 32, and synthetic real image data, which is the logical product of a plurality of real image data, is generated and stored in the third storage means 34, the reference image data and the synthetic real image data are compared, and the difference is obtained. If there is a point, it is judged to be abnormal.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image processing apparatus, and more particularly to an image processing apparatus for inspecting a sample shape by pattern matching.

[0002]

2. Description of the Related Art For example, an image processing technique is used for inspecting the shape of an inner lead of a lead frame (sample).
A conventional inner lead inspection method will be described with reference to FIG. Reference numeral 100 is a reference image, which is an image of the lead frame 102a sampled in advance. Reference image 1
Image data that is binary data that configures 00 is stored in advance as reference image data. Reference numeral 104 is an actual image, which is an image of the lead frame 102b to be inspected. The real image 104 is captured by the CCD camera every time the inspection is performed, and the real image data which is the binary or multi-valued data forming the real image 104 is generated. The actual image data is stored each time it is generated.

The shape inspection is performed by pattern matching. That is, the actual image data and the reference image data are compared via the comparison means. In the case of the example of FIG. 3, the reference image 1
In No. 00, the burr 106a is formed on the lead frame 102a. On the other hand, in the actual image 104, burrs 106b are formed on the inner leads 108a of the lead frame 102b, and dust 110a is attached. Further, dust 110b is attached to the inner leads 108b. Furthermore, in the reference image 100, the inner lead 1
Although the through hole 112 is formed in 08c, the actual image 104
The inner lead 108b has no through hole. Therefore, the difference between the actual image data and the reference image data is illustrated as a comparison image 114. The binary data forming the comparative image 114 is the comparative image data, and the control unit determines that the shape of the lead frame 102b is abnormal when the comparative image data is sent from the comparing unit. In the case of FIG. 3, since the inner lead 108b is not provided with a through hole, it is a defective product. Furthermore, the inner lead 10
It is also possible to detect a defect in the punch of the press die device for forming the through hole in 8b.

[0004]

However, the shape inspection using the above-mentioned conventional image processing technique has the following problems. When the real image 104 and the reference image 100 are compared, as shown in the comparison image 114, the burr 106a,
106b, dusts 110a and 110b, and the through hole 112 are detected as differences between the two 100 and 104. However,
Regarding the burrs 106a and 106b and the dusts 110a and 110b, there is no particular problem in terms of abnormality of the manufacturing apparatus in the manufacturing process of the lead frame 102b. The problem is the loss of the through hole in the inner lead 108b. The first cause of the defect of the through hole is the defect of the punch of the press die device. If the manufacturing of the lead frame is continued with the punch missing, a large number of defective products will be manufactured, which will result in significant financial loss. Therefore, a permanent abnormality such as a defect in the through hole of the inner lead 108b must be detected early.

However, in the conventional inspection method using pattern matching, burrs 106a and 106b and dust 110 are formed.
It is difficult to judge whether the detected abnormality is a constant abnormality or an accidental abnormality, because an abnormality such as a and 110b that does not occur by accident happens to be a problem. is there. As a result, when an abnormality is detected,
There is a problem that it is necessary to investigate the cause of the abnormal occurrence each time, which hinders the improvement of productivity. Therefore, an object of the present invention is to provide an image processing apparatus capable of detecting only a constant abnormality in a shape inspection.

[0006]

In order to solve the above problems, the present invention has the following constitution. That is, the first configuration is
An image input unit that captures an image of the sample and generates real image data that is binary data representing the image, a first storage unit that stores the real image data generated by the image input unit, and A second storage unit for storing reference image data, which is binary data indicating an image of a determined reference sample, and a synthetic real image that is a logical product of a plurality of real image data of a plurality of samples. Third storage means for storing data, comparison means for comparing the reference image data and synthetic real image data, and real image data for each of a plurality of samples via the image input means Stored in the first storage means, synthetic real image data that is a logical product of a plurality of real image data stored in the first storage means is generated, and stored in the third storage means, The comparison means Control for comparing the reference image data stored in the second storage unit with the combined actual image data stored in the third storage unit through the above, and determining that there is an abnormality if there is a difference. And means. In particular, the reference image data may be synthetic image data that is a logical product of a plurality of real image data of a plurality of sampled samples.

The second configuration is to store an image of a sample, image input means for generating real image data which is multivalued data showing the image, and the real image data generated by the image input means. First storage means, second storage means for storing reference image data, which is multi-valued data indicating an image of a specimen serving as a predetermined reference, and a plurality of real image data relating to a plurality of specimens. Compare each other, for each pixel,
Third storage means for storing combined actual image data composed of a value indicating the minimum value of the compared multi-valued data, and comparison for comparing the reference image data with the combined actual image data Means and the image inputting means to generate real image data for each of a plurality of specimens to generate the first image data.
Of the plurality of real image data stored in the first storage means to generate the combined real image data, store the composite real image data in the third storage means, and store the composite real image data in the third storage means. Control means for comparing the reference image data stored in the second storage means with the combined actual image data stored in the third storage means, and judging that there is an abnormality if there is a difference. It is characterized by doing. In particular, the reference image data is synthetic image data configured by comparing a plurality of real image data of a plurality of sampled samples, and for each pixel, a value indicating the minimum value of the compared multivalued data. Good. Further, in the first configuration and the second configuration, when the control means determines that there is an abnormality, an output means may be provided for notifying the fact.

[0008]

[Operation] The operation will be described. In the first configuration,
The control means generates real image data for each of the plurality of samples via the image input means, stores the real image data in the first storage means, and obtains a logical product of the plurality of real image data stored in the first storage means. To generate synthetic real image data that is
Of the reference image data stored in the second storage means and the combined actual image data stored in the third storage means through the comparison means, and if there is a difference, Judge as abnormal. At that time, since the combined actual image data is a logical product of a plurality of actual image data, it is the image data showing only the shape that is constantly generated. It can be removed from the image data. Therefore, the image data to be compared with the reference image data can be image data showing only the shape that is constantly generated.

In the second configuration, real image data is generated for each of a plurality of specimens via the image input means and stored in the first storage means, and the plurality of real images stored in the first storage means. Synthetic real image data is generated from the data and stored in the third storage means, and the reference image data stored in the second storage means and the synthetic real image stored in the third storage means via the comparing means. The image data is compared, and if there is a difference, it is determined that there is an abnormality. At that time, since the combined real image data is data that is obtained by comparing a plurality of real image data with each other, it is the image data that shows only the shape that is constantly generated. Can be removed from the combined real image data. Therefore, the image data to be compared with the reference image data can be image data showing only the shape that is constantly generated.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will now be described in detail with reference to the accompanying drawings. FIG. 1 is a block diagram of an image processing apparatus for shape inspection of a lead frame (an example of a sample) which is an embodiment.

Reference numeral 10 denotes a CCD camera which is an image input means and is fixed above the base 16. The CCD camera 10 incorporates a large number of CCD elements that convert the image of the lead frame 12 located immediately below the measurement position into voltage data for each pixel. The CCD camera 10 generates real image data that is binary data based on the voltage data. Reference numeral 14 is an inspection table, which is provided above the base 16. The inspection table 14 is made of a transparent material and can hold the lead frame 12 on its upper surface. Reference numeral 18 denotes a light source, and for example, a halogen lighting device is used. The light source 18 is provided in the base unit 16. Irradiation light 20 is emitted upward from the light source 18. Irradiation light 20
Can pass through the transparent inspection table 14 and irradiate the lead frame 12. Therefore, the CCD camera 1
0 is the lead frame 1 that receives the transmitted light from the light source 18.
2 image data is generated.

Reference numeral 22 is a RAM, which has a first memory area.
Memory 24, second memory 26, third memory 28,
Fourth memory 30, fifth memory 32, sixth memory 3
It is divided into 4, ... In the first memory 24,
The actual image data generated by the CCD camera 10 and the actual image data of the first sample lead frame (described later) for creating the reference image data is stored. Second memory 2
6 stores actual image data generated by the CCD camera 10 and actual image data of a second sample lead frame (described later) for creating the reference image data.

The third memory 28 stores, as a second storage means, reference image data which is binary data indicating an image of a specimen serving as a predetermined reference. The reference image data of this embodiment is composite image data represented by a logical product of both real image data stored in the first memory 24 and the second memory 26. The reference image data may be set based on design data (CAD data) instead of being set by sampling. The fourth memory 30, as the first storage means, stores actual image data generated by the CCD camera 10 and actual image data of a first lead frame (described later) which is a sample. Fifth memory 3
2 is actual image data generated by the CCD camera 10 as the first storage means, and actual image data of a second lead frame (described later) which is a sample is stored therein.

The sixth memory 34, as a third storage means, stores combined real image data of real image data relating to the first lead frame and the second lead frame. The combined actual image data is combined image data represented by a logical product of both actual image data stored in the fourth memory 30 and the fifth memory 32. In addition, the RAM 22 temporarily stores commands and data input by an operator, data processed by a microprocessor described later, and the like.
It is also possible to use an external memory such as an IC card instead of the RAM 22. Reference numeral 36 denotes a ROM in which an operating system of a microprocessor, a control program of the image processing apparatus, control data, and the like, which will be described later, are stored in advance. If the reference image data is preset regardless of sampling, R
It may be stored in the OM 36.

Reference numeral 38 is a microprocessor (MPU) having the functions of comparing means and control means. MPU38
As a comparison means, the reference image data stored in the third memory 28 is compared with the combined actual image data stored in the sixth memory 34 to detect a difference. Also,
The MPU 38 will be described later in detail, but as a control means,
Real image data of the first sample lead frame and the second sample lead frame is generated via the CCD camera 10 and stored in the first memory 24 and the second memory 26, respectively. The MPU 38 creates composite image data represented by the logical product of the actual image data stored in the first memory 24 and the second memory 26, and stores the composite image data in the third memory 28 as reference image data.

At the time of inspection, the MPU 38 generates real image data of the first lead frame and the second lead frame, which are specimens, through the CCD camera 10 and stores them in the fourth memory 30 and the fifth memory 32, respectively. Let MPU
38 creates composite real image data represented by the logical product of the real image data stored in the fourth memory 30 and the fifth memory 32, and stores it in the sixth memory 34. Subsequently, the MPU 38 uses the function as the comparison means to perform the third operation.
Of the reference image data stored in the memory 28 and the combined actual image data stored in the sixth memory 34, and if there is a difference, or the difference amount is set in advance within an allowable range. If it exceeds, it is judged as abnormal,
This is displayed on the display (described later). Other, MP
U38 controls the operation of each unit of the image processing apparatus according to a control program or the like.

Reference numeral 40 is an input device (for example, a keyboard) for inputting commands and data to the MPU 38. In addition,
The input device 42 is not limited to the keyboard. 42
Is a display which is an example of an output means,
When 8 determines that there is an abnormality, it notifies the operator of the occurrence of the abnormality. The output means is not limited to the display 44, and an acoustic device such as a buzzer can be adopted.
The display 42 also displays other commands and data input from the input device 40, information processed by the MPU 38, and the like.

Next, the operation of the image processing apparatus will be described with further reference to FIG. First, the creation of reference image data will be described. When the press die device is in a stable operation state, the image 50a of the first sample lead frame 12a is captured via the CCD camera 10 to generate actual image data. The MPU 38 stores the actual image data of the first sample lead frame 12a in the first memory 24. Subsequently, the image 50b of the second sample lead frame 12b is captured via the CCD camera 10 to generate actual image data. The MPU 38 stores the actual image data relating to the second sample lead frame 12b in the second memory 26.
Memorize to

When the actual image data of the first sample lead frame 12a and the second sample lead frame 12b are generated, the MPU 38 compares the actual image data stored in the first memory 24 and the actual image data of the second memory 26 with each other. The composite image data represented by the logical product of is created and stored in the third memory 28 as reference image data. The first sample lead frame 12a is formed with an accidental burr 52a as shown in the image 50a, and the second sample lead frame 12b is formed with an accidental burr 52b as shown in the image 50b. Has been done. However, since the reference image data is represented by the logical product of the actual image data of the first sample lead frame 12a and the second sample lead frame 12b, the image 50c based on the reference image data is obtained.
Burrs 52a and 52b are not shown on the reference lead frame 12c.

When inspecting the lead frame, MPU3
Reference numeral 8 captures an image 50d of the first lead frame 12d, which is a sample, via the CCD camera 10 to generate actual image data. The MPU 38 includes the first lead frame 12
The actual image data related to d is stored in the fourth memory 30.
Then, the image 50e of the second lead frame 12e is captured via the CCD camera 10 to generate actual image data. The MPU 38 stores the actual image data relating to the second lead frame 12e in the fifth memory 32.

When the actual image data of the first lead frame 12d and the second lead frame 12e is generated, MP
U38 creates combined real image data represented by the logical product of the real image data stored in the fourth memory 30 and the fifth memory 32, and stores it in the sixth memory 34. The first lead frame 12d shows burrs 52c and dust 54a that are accidentally generated as shown in the image 50d, and the second lead frame 12e is burrs 52d that is accidentally generated as shown in the image 50e. 52e and dust 54b are shown. However, since the combined actual image data is represented by the logical product of the actual image data of the first lead frame 12d and the second lead frame 12e, the lead frame 12f of the image 50f based on the combined actual image data has a burr 5.
2c, 52d, 52e and dust 54a, 54b are not shown.

When the reference image data and the combined actual image data are created, the MPU 38 is stored in the third memory 28 and the reference image data stored in the third memory 28 by using the function as a comparison means. The difference is detected by comparing with the synthetic real image data. Image 5 showing the detected differences
It shows in 0 g. In the case of the example shown in FIG. 2, a through hole 58, which is originally necessary, is formed in the inner lead 56a of the reference lead frame 12c. However, the inner lead 56b of the first lead frame 12d and the inner lead 56c of the second lead frame 12e, which have been inspected, have no through holes. The reason for this is presumed to be due to a serious failure such as punch defect of the press die device. If lead frames are mass-produced in this state, defective products will be mass-produced, resulting in a large economical loss. Since the through holes are not formed in the inner leads 56b and 56c, the image 5 based on the combined actual image data is displayed.
The inner lead 56d of the 0f lead frame 12f also has no through hole. Therefore, the difference shown in the image 50g is the presence or absence of the through hole 58.

The MPU 38 differs from the image 50g in FIG.
In the example, if the through hole 58) is detected, or if the size, area, etc. of the difference point exceeds a preset allowable range, it is determined that there is an abnormality, and that fact is displayed on the display 42. By displaying the abnormality on the display 42, the operator can stop the press die apparatus and immediately perform inspection and maintenance.

In the above embodiment, each data representing an image is binary data, but the real image data and the reference image data are multi-valued data, and the composite image data is a plurality of real image data of a plurality of specimens. Alternatively, each pixel may be configured to have a value indicating the minimum value of the compared multi-valued data. In that case, the control unit generates real image data for each of the plurality of specimens via the image input unit, stores the real image data in the first storage unit, and extracts the real image data from the plurality of real image data stored in the first storage unit. The synthetic real image data is generated and stored in the third storage means, and the reference image data stored in the second storage means and the synthetic real image data stored in the third storage means via the comparing means. And are compared, and if there is a difference, it is determined that there is an abnormality. In addition, the reference image data may also be synthetic image data configured by comparing a plurality of real image data of a plurality of sampled samples and showing, for each pixel, a value indicating the minimum value of the compared multi-valued data. Good.

Even in the case of handling multi-valued data, since the composite real image data is data obtained by comparing a plurality of real image data with each other, it is the image data showing only the shape that is constantly generated, and therefore burr, dust, etc. The abnormal shape that occurs by accident can be removed from the combined real image data. Therefore, the image data to be compared with the reference image data can be image data showing only the shape that is constantly generated. Although various embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments. For example, the number of sample lead frames sampled to create reference image data, and Needless to say, many modifications can be made without departing from the spirit of the invention, for example, the number of lead frames sampled to create the composite real image data may be three or more.

[0026]

When the image processing apparatus according to the present invention is used,
According to the configuration of claim 1, the control means generates real image data for each of the plurality of specimens via the image input means, stores the real image data in the first storage means, and stores the plurality of real images stored in the first storage means. Synthetic actual image data, which is a logical product of image data, is generated and stored in the third storage means, and is stored in the third storage means and the reference image data stored in the second storage means via the comparison means. The stored combined actual image data is compared, and if there is a difference, it is determined that there is an abnormality. that time,
Since the composite real image data is the logical product of multiple real image data, it is the image data showing only the shape that constantly occurs. It can be removed.

Similarly, in the structure of claim 3, the control means generates actual image data for each of the plurality of specimens via the image input means, stores the image data in the first storage means, and stores the actual image data in the first storage means. The composite real image data is generated from the plurality of real image data stored in the third storage means, and is stored in the third storage means via the comparison means and the reference image data stored in the second storage means. The stored combined actual image data is compared, and if there is a difference, it is determined that there is an abnormality. At that time, since the combined real image data is data that is obtained by comparing a plurality of real image data with each other, it is the image data that shows only the shape that is constantly generated. Can be removed from the combined real image data.

Therefore, in the structure according to the first or third aspect, the image data to be compared with the reference image data can be image data showing only a shape that is constantly generated. Since it is possible to remove the abnormal shape that does not cause a problem from the synthetic real image data for comparison, it is possible to detect only the permanent abnormality that is a problem. As a result, it suffices to investigate the cause only when a true inspection is really required, so that a remarkable effect such as productivity can be improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of an image processing apparatus according to the present invention.

FIG. 2 is an explanatory diagram showing a shape inspection procedure in the image processing apparatus of the embodiment.

FIG. 3 is an explanatory diagram showing a procedure of shape inspection in a conventional image processing apparatus.

[Explanation of symbols]

 10 CCD camera 12, 12a to 12f Lead frame 28 Third memory 30 Fourth memory 32 Fifth memory 34 Sixth memory 36 ROM 38 MPU 42 Display 50a to 50f Image

Claims (5)

[Claims] 1. An image of a specimen is captured and the image is displayed. 2
Image input means for generating real image data that is value data, first storage means for storing the real image data generated by the image input means, and an image of a specimen serving as a predetermined reference are shown. Second storage means for storing reference image data that is binary data, and third storage means for storing combined real image data that is a logical product of a plurality of real image data of a plurality of samples. And comparing means for comparing the reference image data and the combined actual image data, and generating actual image data for each of a plurality of specimens via the image input means and storing the actual image data in the first storage means,
The composite real image data, which is a logical product of a plurality of real image data stored in the first storage means, is generated to generate the third real image data.
In the storage means, and compares the reference image data stored in the second storage means with the synthetic real image data stored in the third storage means via the comparison means, An image processing apparatus comprising: a control unit that determines that there is an abnormality if there is a difference. 2. The reference image data is synthetic image data which is a logical product of a plurality of real image data of a plurality of sampled samples.
The image processing device described. 3. An image input means for capturing an image of a sample and generating real image data which is multi-valued data showing the image, and a first for storing the real image data generated by the image input means. A storage means, a second storage means for storing reference image data which is multi-valued data showing an image of a specimen serving as a predetermined reference, and a plurality of real image data relating to a plurality of specimens are compared with each other. A third storage unit for storing, for each pixel, synthetic real image data composed of a value indicating the smallest value among the compared multivalued data; and the reference image data and the synthetic real image data. Comparing means for comparing and actual image data for each of a plurality of samples via the image input means, and stores the actual image data in the first storage means,
The composite real image data is generated from a plurality of real image data stored in the first storage means, stored in the third storage means, and stored in the second storage means via the comparison means. Comparing the reference image data and the combined actual image data stored in the third storage means,
An image processing apparatus comprising: a control unit that determines that there is an abnormality if there is a difference. 4. The reference image data is composed by comparing a plurality of sampled real image data of a plurality of specimens, and for each pixel, a value indicating the minimum value of the compared multi-valued data. The image processing apparatus according to claim 3, wherein the image processing apparatus is image data. 5. The image processing apparatus according to claim 1, wherein the control means includes an output means for notifying that there is an abnormality when it is determined that there is an abnormality.