JPH06300535A - Shape detector - Google Patents

Abstract

PURPOSE:To detect the profile of mirror surface deformation highly accurately and finely in non-contact state by adjusting a focal point to the light emission end of a linear illuminant, and photographing the image of the end for operating a mirror surface profile. CONSTITUTION:The open end (f) of an optical fiber bundle 11 is laid like an array in the breadthwise direction of a mirror surface strip material 1, and faced thereto at a certain angle. An image pickup means 13 is positioned at the opposite side of the bundle 11 at an angle about a normal line G to the surface of the material 1. Also, the image of the open end (f) of the bundle 11 in an optical fiber linear illuminant T, or the image of the light emission end is focused in the image pickup means 13. In this case, when the position of the material 1 is dislocated as shown by a dotted line, the open end (f) of the bundle 11 is imaged on the point b' of an image pickup element 15 via the point (b) of the material 1. In other words, the displacement of an object material can be grasped as a change in an imaging spot position on the element 15, and the displacement of the material 1 can be detected on the basis of a signal change therefor.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for detecting the shape of a mirror surface that deforms in a certain direction.

[0002]

2. Description of the Related Art FIG. 10 is a plan view of a conventional shape detecting device, and FIG. 11 is a side view of the detecting device seen from the side. In FIGS. 10 and 11, reference numeral 1 is a mirror-like strip in which the surface of a galvanized metal strip or the like is a mirror surface and is deformed in the width direction, and 2 is a distance sensor.

Next, the operation of this conventional example will be described.
A plurality of distance sensors 2 are linearly arranged in the width direction of the mirror-like strip 1, the distances to the mirror-like strip 1 at respective positions are measured by these distance sensors 2, and the measured distance data is used to obtain the mirror surface. The deformed state of the strip 1 in the width direction, that is, the width direction profile is detected.

[0004]

Since the conventional shape detecting device is constructed as described above, in order to improve the accuracy of the profile in the width direction of the mirror-like strip 1, the number of distance sensors 2 is greatly increased. However, there are problems in terms of manufacturing cost and restrictions on physical arrangement. Further, when the surface of the band-shaped body is a mirror surface, it is not possible to use a laser type distance sensor or the like that applies light diffusivity, and an overcurrent type distance sensor has a large detection distance from the object. There was a problem that it could not be used depending on the installation environment condition.

The present invention has been made to solve the above problems, and an object of the present invention is to obtain a shape detecting device capable of detecting a profile of deformation of a mirror surface with high precision and in a non-contact manner.

[0006]

A shape detecting apparatus according to a first aspect of the present invention is a linear light source for projecting a linear light beam extending in the deformation direction of a mirror surface at a constant angle with respect to the normal line of the mirror surface. And, with the normal line as an axis, is arranged symmetrically with the projection angle of the linear light beam, and is focused on the light projection surface of the linear light source through the mirror surface, and the light projection surface And an image reconstructing means for computing a profile of a mirror surface from the image of the light projection aperture surface imaged by the image capturing means.

A shape detecting apparatus according to a second aspect of the invention uses a one-dimensional image capturing apparatus in place of the image capturing apparatus according to the first aspect of the invention, scan timing generating means for scanning the field of view of the one-dimensional image capturing means, and the timing. An image pickup signal reading means for reading the signal of the one-dimensional image pickup means in synchronism with the above, a peak position detecting means for detecting a peak point of the read signal, and a position correcting means for collating the peak position data with the mirror surface position. And a shape restoring means for obtaining the profile of the mirror surface from the result of the position correcting means.

[0008]

In the shape detecting apparatus according to the first aspect of the present invention, the light projecting surface of the linear light source is focused, and the image of the light projecting surface is picked up by the image pickup means. The profile of the mirror surface is calculated and the shape is restored and detected.

In the shape detecting apparatus according to the second aspect of the invention, the signal of the one-dimensional image pickup means is read in synchronization with the timing of the scanning timing generating means for scanning the visual field of the one-dimensional image pickup means, and the peak point of the read signal is detected. Then, the peak position data is compared with the mirror surface position by the position correcting means, and the profile of the mirror surface is obtained from the result of the position correcting means.

[0010]

【Example】

Example 1. Embodiment 1 of the present invention will be described below with reference to the drawings. In FIG. 1, 11 is an optical fiber bundle in which the optical fiber openings are arrayed in the width direction of the mirror-like strip 1 and 12 is a light source for making light incident on the rear end of the optical fiber bundle. A light source T. Reference numeral 13 is an image pickup means, and 31 is a shape restoration means. In FIG. 2, 14 is a light receiving lens in the image pickup means 13, and 15 is an image pickup element.

That is, the shape detecting apparatus according to the first embodiment is
A fiber linear light source T for projecting a linear ray 11a extending in the width direction of the mirror surface belt 1, that is, in the deformation direction of the mirror surface at a constant angle θ1 with respect to the normal line G of the mirror surface.
And with the normal line G as an axis, they are arranged so as to have the same normal line angle θ1 as the projection angle of the linear light beam 11a, and as an opening face f of the linear light source T via the mirror surface. Image pickup means 13 for focusing only on the image of the light projection opening surface, and a profile of the mirror surface is calculated from the image of the light projection opening surface picked up by the image pickup means 13. The shape restoring means 31 for restoring is provided.

Next, the operation of the apparatus according to the first embodiment will be described. In FIG. 1, the opening surface f of the optical fiber bundle 11 is arranged in an array shape in the width direction of the specular band member 1 and faces the specular band member 1 at an angle. The image pickup means 13 is arranged at an angle from the normal line G perpendicular to the surface of the mirror-like strip 1 to the normal line G and the side opposite to the optical fiber bundle. In this state, the image pickup means 13 has an opening face f in the optical fiber bundle 11 of the optical fiber linear light source T.
Image, that is, the image of the light projection surface is formed.

Here, paying attention to the point a of the mirror-like strip 1, the point of the opening surface f of the optical fiber bundle 11 is the mirror surface a.
An image is formed on the point a ′ of the image sensor 15 by the light receiving lens 14 via the point. Here, the focal point of the image pickup means 13 is brought into alignment with the point f of the opening surface of the optical fiber bundle 11 via the point a of the specular band 1. Next, assuming that the position of the mirror-shaped strip 1 is displaced as shown by the dotted line, the point f of the opening surface of the optical fiber bundle 11 is imaged at the point b ′ of the image sensor 15 via the point b. That is, the displacement of the target object can be regarded as a change in the image forming spot position on the image sensor 15, and the displacement of the specular band 1 can be detected by this signal change. Figure 2
, The imaging angle θ1 at the point a is the angle θ2 at the point b, and in any state, the imaging angle formed by the point f of the opening surface of the optical fiber bundle 11 and the imaging means 13 is the same as that of the specular band 1. It is composed of a regular reflection system. The end face image of the optical fiber linear light source T obtained by the image pickup means 13 is subjected to processing such as thinning by the shape restoration means 31, and then the profile of the specular band 1 is restored. The thinning process will be described later.

Example 2. Next, a second embodiment of the present invention will be described with reference to the drawings. In FIG. 3, 17 is a one-dimensional image pickup means used in place of the image pickup means 13 of FIG.
As shown in, the rotating mirror 16 is positioned in the one-dimensional image pickup means 17. The output of the one-dimensional image pickup means 17 is processed by the processing unit shown in FIG. In FIG. 5, 21 is an imaging signal reading means, 22 is a peak position detecting means, 23 is a position correcting means, 24 is a shape restoring means, and 25 is a visual field scanning timing generating means. The field of view in the plane of the specular band 1 when the one-dimensional imaging means 17 is used is as shown in FIG.

In the above configuration, the one-dimensional image pickup means 17
The field of view has a narrow shape with a width of 1 mm in the direction perpendicular to the end surface 11b of the optical fiber linear light source T, as indicated by d2 in FIG. In this state, if the field of view of the one-dimensional image pickup means 17 is scanned in the width direction of the mirror surface strip 1, the field of view is d1, d.
Move like 2, d3. As a result, as shown in FIG. 6, the field of view d2 of the one-dimensional imaging means 17 is formed over the entire width of the mirror-like strip 1 as indicated by the dotted line.

Next, the operation of the apparatus according to the second embodiment will be described with reference to FIG. In FIG. 4, the optical fiber bundle 11
The solid line shows a state in which the point f of the opening surface is imaged on the one-dimensional image pickup device 18 via the point d1 (θ) of the mirror-like strip 1. At this time, when the rotating mirror 16 is slightly rotated clockwise, the image forming field of the one-dimensional image pickup device 18 moves to d2 (θ). When it is further rotated, it moves to d3 (θ).
That is, by rotating the rotating mirror 16, the field of view of the one-dimensional image pickup means 17 in the mirror surface strip 1 continuously moves in the width direction. The one-dimensional image pickup means 17 can cover the field of view of the one-dimensional image pickup means 17 with respect to the entire width of the mirror surface strip 1 and the displacement of the mirror surface strip 1, that is, the full width of the profile can be detected.

Generally, when obtaining surface information, a two-dimensional image pickup means is used, but when the profile displacement amount is extremely small with respect to the width of the specular band 1, for example, 100:
If it is 1, if the entire width is imaged by the two-dimensional image pickup device, the displacement resolution of the mirror-shaped strip 1 becomes 100 times worse, and it is not possible to obtain practical displacement accuracy.

In detecting the shape, as shown in FIG. 6, in the course of scanning the visual field of the one-dimensional image pickup means 17, the signal output from the one-dimensional image pickup means 17 is synchronized with the visual field scanning timing generation means 25 to obtain a mirror surface. The displacement data at any position in the width direction of the strip 1 is sequentially read by the imaging signal reading means 21. That is, when the scanning visual field comes to arbitrary positions d1, d2 and d3, the image is read, and the read position d
1, d2 and d3 are recorded, and the profile becomes the profile associated with the subsequent restoration information. Next, the one-time data of the one-dimensional image pickup means 17 is the opening surface f of the optical fiber bundle 11 as shown in FIG.
The analog signal has a peak light intensity. The peak position detection means 22 (FIG. 5) for calculating the peak position M of this signal from the bit position information of the one-dimensional image pickup device 18 makes it possible to know the displacement amount of the specular band 1 at that time from the read signal for each scan. . Then, from the timing signal of the visual field scanning timing generating means 25, the absolute position in the width direction of the specular band 1 is calculated by the position correcting means 23, and the displacement amount at an arbitrary width position is obtained. From the correlation of the displacement amount data for each arbitrary width position of the mirror-like strip 1, the width-direction profile of the mirror-like strip 1 is restored by the shape restoring means 24 for thinning. That is, recording at each position d1, d2, d3 shown in FIG.
The profile is restored by detecting the peak positions 11, 12, and 13 shown in (b) and correcting the scanning positions at those times shown in FIG. 8 (c). At this time, the mirror-like strip 1
It is possible to sequentially detect the widthwise profile of the mirror-like strip 1 by making the visual field scanning period sufficiently fast even when is moving in the length direction.

There are various kinds of thinning methods, but generally, the method of obtaining the peak position M of the luminance distribution is used as described above (FIG. 9 (a),
(See (b)). If the luminance distribution is saturated, as shown in FIG. 9C, binarization is performed, and the center of the width of the binarized binarized image is calculated.

[0020]

As described above, according to the first aspect of the invention, an image pickup means for picking up an image of the light projection opening surface by focusing on the light projection opening surface of the linear light source, and the image pickup means. Since it is provided with the shape restoring means for calculating the profile of the mirror surface from the image of the light projection aperture surface imaged in, it does not require a large number of sensors, has a simple configuration with no restriction on physical arrangement, and is of low cost. There is an effect that the device can be obtained.

According to the second invention, it has a one-dimensional visual field,
One-dimensional image pickup means having a function of scanning the visual field in a direction perpendicular to the visual field, peak position detection means for detecting a peak point of the read signal of the one-dimensional image pickup means, and matching of the peak position data with the mirror surface position. Since the position correcting means and the shape restoring means for obtaining the profile of the mirror surface from the result of the position correcting means are provided, the restoration can be performed with high accuracy and high resolution by detecting the profile using the peak position. effective.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a shape detection device showing a first embodiment of the present invention.

FIG. 2 is a diagram of a specular reflection optical system in the device of the first embodiment.

FIG. 3 is a configuration diagram of a shape detection device showing a second embodiment of the present invention.

FIG. 4 is a diagram showing an example of a visual field scanning method in the apparatus according to the second embodiment of the present invention.

FIG. 5 is a signal processing block diagram in an apparatus according to a second embodiment of the present invention.

FIG. 6 is a front view of a field of view of an apparatus according to a second embodiment of the present invention.

FIG. 7 is a diagram illustrating peak position detection in the device according to the second embodiment of the present invention.

FIG. 8 is a diagram illustrating a method of profile correction in the device according to the second embodiment of the present invention.

FIG. 9 is a diagram for explaining a thinning method in the device according to the second embodiment of the present invention.

FIG. 10 is a plan view showing a conventional shape detection device.

FIG. 11 is a side view showing a conventional shape detection device.

[Explanation of symbols]

 11 optical fiber bundle 12 light source 13 image pickup means 14 light receiving lens 15 image pickup element 21 image pickup signal reading means 22 peak position detection means 23 position correction means 24 shape restoration means 25 visual field scanning timing generation means

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Katsuya Ueki 1-2-2 Wadazaki-cho, Hyogo-ku, Kobe Sanryo Electric Co., Ltd. Control Works (72) Inventor Kazuo Takashima 8-1-1 Tsukaguchihonmachi, Amagasaki No. 1 Mitsubishi Electric Corporation Industrial Systems Research Center

Claims (2)

[Claims] 1. A shape detecting device for detecting a deformation of a mirror surface which is deformed in a constant direction, wherein a linear ray extending in the deformation direction of the mirror surface is projected at a constant angle with respect to a normal line of the mirror surface. With a linear light source and the normal line as the axis,
An image pickup unit that is arranged symmetrically with the projection angle of the linear light beam, and is focused on the light projection aperture surface of the linear light source via the mirror surface, and captures an image of the light projection aperture surface. A shape detecting device comprising: a shape restoring unit that calculates and restores a profile of a mirror surface from the image of the light projection aperture surface imaged by the image pickup unit. 2. A shape detecting device for detecting a deformation of a mirror surface which is deformed in a constant direction, wherein a linear ray extending in the deformation direction of the mirror surface is projected at a constant angle with respect to a normal line of the mirror surface. With a linear light source and the normal line as the axis,
The line is arranged symmetrically with the projection angle of the linear light beam, and is focused on the light projection aperture surface of the linear light source via the mirror surface to capture an image of the light projection aperture surface and the line. -Dimensional imaging means having a one-dimensional visual field extending in the direction perpendicular to the circular rays and having a function of scanning the visual field in the direction perpendicular to the visual field, scanning timing generating means for scanning the visual field, and synchronization with the timing. An image pickup signal reading means for reading the signal of the one-dimensional image pickup means, a peak position detecting means for detecting a peak point of the read signal, and a position correcting means for collating the peak position data with the mirror surface position. A shape detecting device, comprising: shape restoring means for calculating and restoring the profile of the mirror surface from the result of the position correcting means.