JPH06226473A - Laser marking method - Google Patents

Abstract

(57) [Summary] [Purpose] Laser marking can be easily and quickly performed on the top and side surfaces of the workpiece simultaneously with just one set. [Structure] The laser light passing through the peripheral portion of the fθ lens 5 is reflected by a reflection mirror 6 and then radiated to the side surface of the work 10. Similarly, the laser light passing through the center of the work 10 directly passes through the work.
The top surface of 10 is illuminated and markings are made on each location. Here, the optical path length when the laser light passing through the peripheral portion of the fθ lens 5 irradiates the side surface of the work 10 via the reflection mirror 6 is the same as that of the laser light, but the same laser light is virtually on the extension surface of the upper surface of the work 10. It is necessary to position the reflection mirror 6 so that it becomes equal to the optical path length when irradiating the light. This method is generally suitable when the side surface of the work has a small inclination angle with respect to the upper surface and the marking position on the side surface of the work is close to the upper surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention, when marking the upper surface and the side surface of a work, respectively, irradiates the upper surface and the side surface of the work with a laser beam oscillated by a deflecting mirror to position the work. The present invention relates to a laser marking method that can be easily and quickly performed without changing the attitude determination.

[0002]

2. Description of the Related Art A conventional example will be described with reference to the block diagram of FIG. In the drawing, the upper surface and the side surface of the work 9 are marked respectively. YAG
The laser light emitted from the laser oscillator 1 for laser is
Swung at right angles to each other by a pair of deflection mirrors 2u and 2v,
The work 9 is irradiated through the fθ lens 5. That is,
The irradiation point of laser light is changed by each deflection mirror 2u, 2v.
The surface of the work 9 is scanned, and the portion of this scanning locus is shallowly engraved and marked by the thermal action of the laser light. Therefore, first, when marking the upper surface of the work 9, the work 9 has an upper surface of fθ as shown by the solid line.
The lens is positioned and oriented so as to face the lens 5.
Next, when the side surface of the work 9 is marked, the positioning and orientation of the work 9 are changed so that the side surface of the work 9 faces the fθ lens 5 as indicated by the alternate long and short dash line.

The angular positions of the deflection mirrors 2u and 2v are controlled by the control unit 4 via the actuators 3u and 3v, respectively. The rotation axis of the deflection mirror 2u passes through the central portion and is perpendicular to the paper surface, and the rotation axis of the deflection mirror 2v is
It is included in the mirror plane and runs parallel to the plane of the paper through its center. Therefore, the laser light emitted from the laser oscillator 1 is swayed in the lateral direction of the figure on the surface of the work 9 by the deflection mirror 2u, and is deflected by the deflection mirror 2v.
Will be shaken at right angles to the paper surface.

Further, the fθ lens 5 is a special condenser lens, and the laser light oscillated by the deflection mirrors 2u and 2v and incident at a relatively large incident angle is represented by fθ of its name.
Position deviated from the center of the work in proportion to the incident angle (= f
θ, f: focal length), that is, the work surface can be focused as the focal plane. Therefore, each deflection mirror 2u, 2
The setting calculation of the shake angle of v is easy, and the focusing point is located on the focal plane even if the incident angle θ becomes large, so the marking quality is good. On the other hand, in a normal condenser lens, the position of the condenser from the work center is proportional to the tangent of the incident angle of the laser light, and in that sense, it is called an ftan θ lens. In this case, the setting calculation of the deflection angles of the deflection mirrors 2u and 2v for accurately drawing the marking figure becomes complicated, and the converging point deviates from the focal plane as the incident angle θ increases, so The sharpness of the marking process becomes dull and the quality deteriorates.

[0005]

The conventional example has the following drawbacks. In other words, when it is desired to mark the top surface and the side surface of the work respectively, it is necessary to change the positioning and orientation of the work each time, which facilitates marking.
Promptness is impeded. An object of the present invention is to solve the above problems of the conventional technique, and to irradiate the upper and side surfaces of a work with laser light oscillated by a deflecting mirror through the fθ lens to change the positioning and orientation of the work. It is an object of the present invention to provide a laser marking method for marking the upper surface and the side surface of a work respectively easily and quickly without performing the above.

[0006]

According to a first aspect of the present invention, there is provided a laser marking method capable of focusing and irradiating a laser beam oscillated by a deflecting mirror on a deviation point on a plane according to an incident angle. A method of irradiating the upper surface and the side surface of the work respectively through them and marking them, wherein the laser light passing through any part of the entire area of the fθ lens is reflected on a reflection mirror and then irradiated to the side surface of the work. And f
The upper surface of the work is directly irradiated with the laser light passing through any part of the entire area of the θ lens.

A laser marking method according to claim 2 is
A laser beam oscillated by a deflecting mirror is focused on a deviation point on one plane according to an incident angle, and is irradiated onto the upper surface and side surface of a work through an fθ lens capable of irradiation, and marking is performed there. Laser light passing through any part of the entire area of the fθ lens is reflected by the first reflecting mirror and then radiated to the side surface of the work, and the laser light passing through any part of the entire area of the fθ lens. The light is reflected on the second plurality of reflection mirrors and then radiated on the upper surface of the work.

[0008]

In the laser marking method according to the first aspect, f
Laser light passing through any part of the entire area of the θ lens is reflected by the reflection mirror and then irradiated to the side surface of the work, and laser light passing through any part of the entire area of the fθ lens is directly reflected. It is irradiated on the upper surface of the work.

In the laser marking method according to the second aspect of the present invention, the laser light passing through any part of the entire area of the fθ lens is reflected by the first reflecting mirror and then radiated to the side surface of the work, and the fθ lens is irradiated. Of the laser light passing through any part of the whole area of (1) is reflected on the second plurality of reflecting mirrors and then is irradiated on the upper surface of the work.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An application example of the laser marking method according to the present invention will be described below with reference to the drawings. FIG. 1 is a side view of a laser marking device (hereinafter referred to as a first device) as a first application example. In the figure, the first device is different from the conventional example in that the work 10 is different from that in the conventional example, the side surface is inclined with respect to the upper surface, and a reflection mirror 6 is additionally installed for irradiation of the side surface. It is a point.
The other members are the same as those in the conventional example and are designated by the same reference numerals.

Therefore, the laser light passing through any part of the entire area of the fθ lens 5 (in this case, the peripheral portion) is reflected by the reflecting mirror 6, and then the work 10 is processed.
Of the fθ lens 5 and passes through any part of the entire area of the fθ lens 5 (in this case, it passes through the central portion).
Laser light is directly applied to the upper surface of the work 10 to mark each position. Here, the optical path length when the laser light passing through the peripheral portion of the fθ lens 5 irradiates the side surface of the work 10 via the reflection mirror 6 is the same laser light directly on the extension surface of the upper surface of the work 10. It must be equal to the optical path length when virtually illuminating. That is, the reflection mirror 6 must be positioned so that the condition is satisfied. In other words, the sharpness of the marking process becomes dull depending on the error with respect to the condition, and the quality deteriorates. Generally, the first device is
This is suitable when the work side surface has a small inclination angle with respect to the top surface and the marking position on the work side surface is close to the top surface.

FIG. 2 is a side view of a laser marking apparatus (hereinafter referred to as a second apparatus) which is a second application example. In the figure, the second device is different from the first device in that a pair of reflection mirrors 7A and 7B are additionally installed for irradiation of the upper surface. By each of the reflection mirrors 7A and 7B, a part of the entire area of the fθ lens 5 is irradiated through the reflection mirror 6 to the side surface of the workpiece through any part (in this case, the peripheral edge portion) of the fθ lens 5, and the entire area of the same area It is adjusted so that a position passing through any one of the positions (in this case, the central portion) and irradiating the work upper surface is located on a common focal plane. Note that the work 9 in the case of the second device has a side surface substantially perpendicular to the top surface, unlike the case of the first device.

In the second device, one of the laser beams passing through any part (in this case, the peripheral part) of the entire area of the fθ lens 5 is reflected through the reflecting mirror 6 corresponding to the side surface of the work 9. The laser light of the other side, which is emitted to the side surface of the work and passes through any part (in this case, the central part) of the entire area of the fθ lens 5, is reflected by the pair of reflection mirrors 7A and 7B and is reflected on the top surface of the work. Is irradiated. Moreover, fθ lens 5
Of the whole area of (1) in which the side surface of the work is irradiated via the reflection mirror 6 through any one of the areas (in this case, the peripheral edge),
Similarly, the position where the upper surface of the work is irradiated through any one of the entire area (in this case, the central part) and via each of the reflection mirrors 7A and 7B is located on the common focal plane. Laser light is accurately focused on both the side and top surfaces for good quality marking. Moreover, unlike the first device, there is no restriction on the inclination angle of the side surface of the work with respect to the upper surface and the marking position. By the way, the reflection mirrors corresponding to the upper surface of the work 9 are not limited to a pair as in the second device, but are generally plural.

[0014]

In the laser marking method according to the first aspect of the present invention, the laser light passing through any part of the entire area of the f.theta. The laser light passing through any one of the entire areas is directly irradiated on the upper surface of the work. Therefore, when marking the upper surface and the side surface of the work respectively, it is possible to perform the setting only once without changing the positioning and orientation of the work, and the operation can be performed easily and quickly. In particular, there are a position where the laser light passing through any part of the entire area of the fθ lens irradiates the side surface of the work and a part where the laser light passing through any part of the same area irradiates the work upper surface. When they are located on a common focal plane, only one reflecting mirror needs to be installed,
The structure is simplified while maintaining the marking quality,
Moreover, the number of adjustment man-hours is small, and the cost can be reduced. Generally, it is suitable when the work side surface has a small inclination angle with respect to the top surface and the marking position on the work side surface is close to the top surface.

In the laser marking method according to the second aspect, the laser light passing through any part of the entire area of the fθ lens is reflected on the first reflecting mirror and then radiated to the side surface of the work, and the fθ lens. Of the laser light passing through any part of the whole area of (1) is reflected on the second plurality of reflecting mirrors and then is irradiated on the upper surface of the work. Therefore, in addition to the same effect as in the preceding paragraph, the laser beam passing through any part of the entire area of the fθ lens irradiates the side surface of the work through the first reflecting mirror, and also within any of the whole area. It is possible to adjust so that the laser beam passing through the point of irradiates the upper surface of the work through the second plurality of reflection mirrors and is accurately located on the common focal plane, so that high-quality marking is possible. Is obtained. Moreover, since there is no restriction on the inclination angle of the side surface of the work with respect to the upper surface and the marking position, it is possible to give flexibility to the work shape and marking.

[Brief description of drawings]

FIG. 1 is a side view of a laser marking device according to a first application example of the invention.

FIG. 2 is a side view of a laser marking device as a second application example.

FIG. 3 is a side view of a conventional example.

[Explanation of symbols]

 1 Laser Oscillator 2u, 2v Deflection Mirror 3u, 3v Actuator 4 Control Unit 5 fθ Lens 6 Reflection Mirror 7A, 7B Reflection Mirror 9,10 Work

Claims (2)

[Claims] 1. A laser beam oscillated by a deflection mirror,
A method of irradiating the upper surface and the side surface of a work respectively through a fθ lens capable of focusing and irradiating a deviation point on one plane according to an incident angle, and marking there, which is one of all areas of the fθ lens The laser beam passing through any one of the points is reflected by a reflection mirror and then radiated to the side surface of the work, and the laser beam passing through any one of the entire area of the fθ lens is directly radiated to the upper surface of the work. Laser marking method. 2. A laser beam oscillated by a deflection mirror,
A method of irradiating the upper surface and the side surface of a work respectively through a fθ lens capable of focusing and irradiating a deviation point on one plane according to an incident angle, and marking there, which is one of all areas of the fθ lens The laser light passing through that point is reflected on the first reflecting mirror and then radiated to the side surface of the work,
A laser marking method, characterized in that a laser beam passing through any part of the entire area of the fθ lens is reflected on a second plurality of reflecting mirrors and then is irradiated onto the upper surface of the work.