JPH06204106A - Table apparatus, demagnifying projection aligner and electron-beam lithography apparatus - Google Patents

Abstract

(57) [Summary] [Object] It is an object of the present invention to provide a table apparatus capable of simultaneously achieving a high degree of freedom in positioning and high throughput in a lithographic apparatus. [Structure] A moving table 3, a sample table 1 provided on the moving table 3 via a buffer section 2, a sliding section 8 provided on the moving table 3 via an elastic connecting section 4, and a sliding section 8 And a movable table 3 and a fine movement actuator 7, a damper 7 provided between the sliding part 8 and the movable table 3, and a direct motion for integrally driving the movable table 3 and the sliding part 8. The actuator 6 constitutes a table device. In addition, the heat dissipation device and the heat dissipation device are incorporated into the table device. [Effect] All actuators except one coarse movement actuator can directly drive the moving base, and the number of plate materials to be stacked is reduced, so that the weight can be reduced. At the same time, the influence of the heat of the actuator can be reduced, so that the speed can be increased.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reduction projection exposure apparatus used in a semiconductor lithography process, etc., for simultaneously attaining a high degree of freedom in positioning and high throughput, and a reduction projection exposure apparatus using the same. And an electron beam drawing apparatus.

[0002]

2. Description of the Related Art Since a highly detailed pattern is formed in a semiconductor lithography process, a demand for a device for positioning a sample such as a wafer tends to be stricter year by year. Here, in order to reduce the chip cost, high throughput is required, and at the same time, high precision positioning is required that corresponds not only to the translational direction in the sample surface but also to the space 6 degrees of freedom. Japanese Laid-Open Patent Publication No. 64-58441 is known as a conventional technique for coping with such a positioning device having multiple degrees of freedom and high accuracy. As shown in FIG. 20, this has a plurality of lever mechanisms 40 that can be driven on the X table 10 by the movement of the moving table 30, so that the table 20 for mounting a sample such as a wafer can be moved in the Z axis direction and the X axis direction. The mechanism is such that it can be finely moved in the rotating direction around and the rotating direction around the Y axis. Where the X axis,
The Y axis is the coordinate axis in the direction parallel to the sample surface such as the wafer, and Z
The axes are coordinate axes in the direction perpendicular to them. Further, a mechanism having a θ table 70 driven by a θ driving mechanism 60 on an XY stage 50 and having a degree of freedom of rotation around the Z axis as described in JP-A-64-58442 shown in FIG. Is also known. It should be noted that a positioning mechanism corresponding to the six degrees of freedom in space, which is a combination of these techniques, can be easily conceived. That is, JP-A-64-5844
On the table shown in Japanese Patent Laid-Open No.
A space 6-degree-of-freedom positioning mechanism can be realized by stacking the mechanism systems shown in Japanese Patent No. 8442.

[0003]

However, in the case where the table device capable of positioning the space 6 degrees of freedom of the laminated structure is constructed by combining the conventional techniques as described above, the number of plate materials stacked in parallel to the XY plane and Since the number of actuators increases and the mass of the movable part increases, it becomes difficult to increase the speed of the table device. Further, when the speed of the table device is increased, the amount of heat generated from the actuator increases, and the thermal deformation of the members forming the device adversely affects the positioning accuracy.

The object of the present invention is to solve the above problems,
High-precision 6-DOF positioning of a sample by constructing a mechanism system that can perform space 6-DOF positioning and is lightweight, and that heat generation from the actuator that increases with speed increases does not affect the positioning accuracy of the sample. (EN) Provided is a table device capable of performing high speed operation, a reduction projection exposure apparatus and an electron beam drawing apparatus using the table apparatus.

[0005]

According to the present invention, there is provided a sample table on which a sample is placed, a movable table for supporting the sample table, and a linear motion for holding the movable table and driving the movable table in at least one direction. An actuator, a fine movement actuator coupled to the movement base and interlocking with the movement base, and finely moving the movement base via the coupling portion, and a support for supporting the linear movement actuator and slidably supporting the fine movement actuator. Department,
(Claim 1).

The present invention further includes a sample table on which a sample is placed,
A movable table that supports the sample table via a buffer, a linear actuator that holds the movable table and drives the movable table in at least one direction, and is coupled to the movable table and interlocks with the movable table. A fine movement actuator that includes a damper having at least a part of which has a damper function for absorbing vibration and finely moves the moving table through a coupling portion, and supports the linear movement actuator and slides the fine movement actuator in the one direction. And a support portion that supports the support member (claim 2).

The present invention further includes a sample table on which a sample is placed,
A movable table that supports the sample table, a linear actuator that holds both ends of the movable table and drives the movable table in one direction or in rotation, and is elastically connected to the movable table to interlock with the movable table. One-way fine movement actuators for finely moving the moving table in a direction orthogonal to the one direction through elastic connecting portions, and fine movements of the moving table in up and down and tilt directions by respectively coupled to at least three places of the moving table and vibration absorption. An upper and lower fine movement actuator having a damper function, and a support portion for integrally slidably supporting the one-way fine movement actuator and the vertical fine movement actuator in the one direction (claim 3).

The present invention further includes a sample table on which a sample is placed,
A moving table that supports the sample table via a buffer section, a linear actuator that holds both ends of the moving table and drives the moving table in one direction or rotationally, and a moving table that is elastically connected to the moving table. A one-way fine movement actuator that interlocks with the movable base and finely moves the movable base in a direction orthogonal to the one direction via the elastic connection portion, and connects the movable base to at least three places of the movable base in the vertical and tilt directions. It comprises a vertical fine movement actuator having a fine movement and a damper function for absorbing vibration, and a support portion for integrally slidably supporting the one-way fine movement actuator and the vertical fine movement actuator in the one direction (claim 4). .

The present invention further includes a sample table on which a sample is placed,
A movable table that supports the sample table, a one-way fine movement actuator that holds the movable table and finely moves the movable table in one direction and a direction orthogonal thereto, and a movable table that is coupled to at least three positions of the movable table. A vertical fine movement actuator that finely moves in the vertical and tilt directions, and a support portion that supports each of the fine movement actuators.
3).

The present invention further includes a sample table on which a sample is placed,
A movable table that supports the sample table via a buffer section, a one-way fine movement actuator that holds the movable table and finely moves the movable table in at least one direction and a direction orthogonal thereto, and at least three positions of the movable table. It comprises an up-and-down fine movement actuator that is respectively coupled to each other and finely moves the moving table in the up and down and tilt directions, and a support portion that supports each of the fine movement actuators (claim 24). Furthermore, in the present invention, a heat insulating material is provided on the moving table, the linear motion actuator or the fine motion actuator, and a heat discharging device is provided between the moving table and the sliding portion.

[0011]

In the table device, all the actuators except one coarse motion actuator directly drive the moving base, so that it is possible to reduce the number of plate materials to be stacked in parallel with the XY plane, and the weight of the table device is reduced. Can be realized. Further, since the deformation of the moving table is less likely to be transmitted to the sample table due to the function of the buffer section, the rigidity of the moving table and the sample table can be made lower than before, and the weight of the table device can be reduced. Further, the heat generated from the actuator is dissipated into the air or is exhausted to a member such as a coarse movement table that may absorb the heat, and thermal deformation of the sample table is suppressed. As a result, it is possible to obtain a table device capable of highly accurate positioning in space 6 degrees of freedom and capable of speeding up.

[0012]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is an exploded perspective view showing an embodiment of the table device of the present invention. The sample table 1 is provided on the moving table 3 via the buffer section 2. A displacement measuring square 11 is provided on the sample table 1, and laser length measuring devices 12-a and 12-b are provided.
Thus, the displacements of the sample table 1 in the X, Y and θ directions are measured. The movable table 3 is driven by the linear actuators 6-a and 6-b via the two drivers 5-a and 5-b. The movable table 3 is driven by the linear motion actuators 6-a and 6-b in the Y direction, which is one direction, and in the θ direction, which is the rotation direction, by the differential of the actuators. The one-way fine movement actuator (X) 13 finely moves the moving table 3 in the X direction orthogonal to the one direction. Further, the moving table 3 is connected to the sliding portion 8 via the elastic connecting portion 4. The sliding portion 8 is a linear movement guide 80 that moves in the Y direction on the coarse movement table 9 that is a support portion.
It is composed of one or three sliders 803, and a support plate 802 for connecting the linear motion guide 801 and each slider 803.
Vertical fine movement actuators 7-a, 7-b, and 7-c with dampers are provided on the respective sliders 803, and the movable table 3 is moved in the Z direction which is the vertical direction, and the α direction and the β direction which are the inclination directions. Drive to. With these configurations, the moving table 3
Is driven directly by the six actuators with respect to the coarse movement table 9, so that the weight can be reduced. The coarse movement table 9 is driven on the base 10 in the X direction.

A voice coil motor is suitable for the fine movement actuator (X) 13 and the fine movement actuators 7-a, 7-b and 7-c with dampers, but other actuators such as piezoelectric elements may be used in the present invention. The effect is not impaired. In addition, the linear actuators 6-a and 6-b
Although a linear motor such as a multi-pole type voice coil motor is suitable for this, the effect of the present invention is not impaired even if a method of driving with a ball screw or the like using a rotary actuator is adopted. . Further, a ball screw or the like may be used to drive the coarse movement table 9. In this embodiment, 2
The linear motion actuators 6-a, 6-b and the single fine motion actuator (X) 13 cause the movable table 3 to move to X, Y and θ.
However, even if one linear motion actuator and two fine motion actuators are used, the movable table 3 is moved in X and Y directions.
It is obvious that the drive can be performed in the and θ directions.

FIG. 2 is an exploded perspective view of an essential part showing an embodiment of the buffer part 2. Steel balls 204 each forming a point contact element are placed on three lower pedestals 203 provided on the movable table 3 at intervals of 120 degrees on the circumference. The steel ball 204 supports the sample table 1 via the upper pedestal 201 provided on the lower surface of the sample table 1 (FIG. 1). In addition, the movable table 3 has an approximate circumference of 120
The annular leaf spring 202 is fixed via three fixing portions 205 provided at intervals. Lower pedestal 203 and fixed part 205
Are arranged on substantially the same circumference but at intervals of about 60 degrees. On the other hand, the annular leaf spring 202 has the upper pedestal 20.
It is fixed to the sample table 1 via 1. With such a configuration, it is possible to reduce the deformation of the sample table 1 caused by the deformation of the moving table 3 while securing the mechanical system rigidity in the X, Y, Z, α, β and θ directions. Here, the plate thickness or the number of the annular leaf springs 202 may be increased to increase the rigidity in the XY plane direction, and the diameter of the steel ball 204 may be increased to increase the rigidity in the Z direction. Further, in the annular leaf spring 202, in order to generate a restoring force in the direction in which the sample table 1 and the moving table 3 approach each other,
The initial displacement may be given. Here, the steel ball 204 as the point contact element does not necessarily have to be spherical, and the upper pedestal 20
1 and the lower pedestal 203, the contact area may be kept small. For example, only the contact portion may be replaced with a columnar one having a spherical surface or another curved surface. Further upper pedestal 2
The arrangement and relative positional relationship of 01, the lower pedestal 203, and the fixed portion 205 are not limited to the above.

FIG. 3 is a cross-sectional view of essential parts showing a second embodiment of the buffer section 2. The annular leaf spring 202 includes a heat insulating material 207,
It is attached to the moving table 3 with a bolt 206 via 208. Thereby, the linear actuators 6-a, 6-
-B, it is possible to prevent the heat conducted from the fine movement actuator (X) 13 (Fig. 1) or the like to the moving table 3 from being transmitted to the sample table 1 (Fig. 1) via the annular leaf spring 202. Insulation 20
Polymer materials such as polycarbonate and bakelite, glass fiber reinforced plastics, and ceramics are suitable for 7, 208.

FIG. 4 is a cross-sectional view of essential parts showing a third embodiment of the buffer section 2. Upper pedestal 201, sample pedestal 1, lower pedestal 20
Insulating materials 209 and 210 are provided between the mobile station 3 and the movable table 3, respectively. Due to the synergistic effect of the functions of these heat insulating materials and the fact that the supporting points of the steel balls 204 have a small contact area and a large thermal resistance, the amount of heat transfer due to heat conduction from the moving table 3 to the sample table 1 is suppressed, and the sample table 1 The thermal deformation of can be suppressed. Needless to say, the same effect can be obtained by removing either one of the heat insulating materials 209 and 210. When it is desired to suppress the amount of heat transfer from the moving table 3 to the sample table 1, a layer (not shown) of a material having a small absorptivity may be provided on the lower surface of the sample table 1. For example, a vapor deposition layer of a metal such as aluminum or gold may be provided.

FIG. 5 is a perspective view showing a fourth embodiment of the buffer section 2. A viscoelastic member 211 is provided between the sample table 1 and the movable table 3 as the buffer section 2, and deformation of the sample table 1 due to deformation of the movable table 3 can be reduced. For the viscoelastic member 211, for example, rubber or the like may be used.

FIGS. 6 and 7 (a), (b) show a fifth embodiment of the buffer section 2, and FIG. 6 is an exploded perspective view of a coupling component forming the buffer section 2, FIG. 7 (a), FIG. 7B is a plan view and a side view of the arrangement of the coupling component shown in FIG. 6. The coordinate system in FIG. 6 is independent of the coordinate systems in other drawings. The upper frame 212 is fixed to the sample table 1 (FIG. 1). A shaft 213 is provided on the upper frame 212 and is connected to the intermediate frame 215 via a bush 217. At this time, the upper frame 212 and the intermediate frame 215 are paired with each other in a slipping manner and can relatively move in the Y direction and the β direction. Further intermediate frame 2
15 through the bearing 218 and the shaft 219 to the lower frame 2
14, 216 are connected. At this time, the intermediate frame 21
5 and the lower frames 214 and 216 are paired around each other and are relatively movable in the α direction. Lower frame 214, 2
16 is fixed to a movable table (FIG. 1). As described above, according to the set of coupling components shown in FIG. 6, the sample stage 1 and the movable stage 3 can freely move relative to each other in directions other than the X direction, the Z direction, and the θ direction.

Now, the above-mentioned coupling parts 220, 221,
222 are arranged at three positions while paying attention to the direction of the A axis as shown in FIGS. With such a configuration, even when the moving table 3 is deformed, the sample table 1 is hardly deformed. For example, when the movable table 3 expands / contracts in the X-axis direction, the sliding pair portion of the coupling component 220 slides, so that the sample table 1 does not expand / contract in the X-axis direction. Also,
When the movable table 3 expands and contracts in the Y-axis direction, the connecting part 22
Since the sliding pair portions of Nos. 1 and 222 slide, the sample table 1 does not expand and contract in the Y-axis direction. Further, a leaf spring 223 may be provided to secure the rigidity of the sample table 3 in the θ direction. The leaf spring 223 is coupled to the sample table 1 by the upper pedestal 224, and is coupled to the movable table 3 by the lower pedestals 225 and 226. The upper pedestal 224 is connected to the connecting parts 220, 221, 2
It is desirable to place it at the intersection of the center lines of the 22 axes. The connection parts 220, 221, 222 are arranged as shown in FIG.
It is not limited to (a) and (b). For example, the same effect can be obtained by arranging the respective A-axis directions so that they rotate in the θ direction by the same angle. Even in the case of the buffer unit 2 of this embodiment, the moving table 3 and the sample table 1 of the table device are also included.
A heat insulating material may be provided between the two.

FIG. 8 is an exploded perspective view showing an embodiment of the elastic connecting portion 4. Upper frame 40 through leaf spring 401
2 is connected to the movable table 3 (FIG. 1) while having elasticity in the Y direction. A shaft 403 is provided on the upper frame 402 and is connected to the cross joint 405 via a bush 404. At this time, the cruciform joint 405 and the upper frame 402 form a pair of sliding pairs, and are relatively movable in the Z direction and the θ direction. Further, the bush 40 is attached to the cross joint 405.
6, the lower frame 408 is connected via the shaft 407.
At this time, the cruciform joint 405 and the lower frame 408 form a slipping pair and are relatively movable in the X direction and the α direction. A shaft 409 is provided on the lower frame 408 and is connected to the sliding portion 8 (FIG. 1) via a bearing 410 that is a combination of a thrust bearing and a radial bearing. At this time, the lower frame 408 and the sliding portion 8 are relatively movable in the β direction. With the above configuration, the sliding portion 8 and the movable table 3 are only connected while having elasticity in the Y direction, and can freely move relative to movements other than the Y direction. With such a configuration, the movable table 3 can be finely moved to an arbitrary position and posture with respect to the sliding portion 8. Further, when the movable table 3 is driven in the Y direction over a long distance, the sliding portion 8 is also driven in the Y direction via the elastic connecting portion 4. It is obvious that the effect of the present invention is not impaired even if the elastic connecting portion 4 is formed of a leaf spring, a coil spring, or the like.

FIG. 9 shows a fine movement actuator 7 with a damper.
It is sectional drawing which shows one Example of-a, 7-b, 7-c.
A coil 701 is provided on a slider 803 that slides on the coarse motion table 9 (FIG. 1). On the other hand, a magnetic circuit is configured by the center yoke 702, the permanent magnet 704, and the outer yoke 703 provided on the moving table 3, and by energizing the coil 701 in the magnetic flux in the gap between the outer yoke 703 and the center yoke 702, The moving table 3 is driven in the Z direction with respect to the coarse moving table 9. A fluid 705 is filled in the recess 804 of the slider 803, and a viscous damping force acts between the center yoke 702 and the slider 803. Silicon oil is suitable for the fluid 705, but is not limited thereto.

Further, the slider 803 is provided with a self-weight compensating mechanism 806 for compensating for the weight of the members above the movable table 3. As a result, it is sufficient to supply the actuator with the energy required to give the necessary displacement from the neutral point, and the amount of heat generation is reduced. It is also possible to easily adjust the neutral point by providing an auxiliary spring 706 and an adjusting screw 707 outside the actuator.

In this embodiment, the damper and the actuator are integrated to simplify the mechanism.
It is obvious that the effect of the present invention is not impaired even if a damper and an actuator are separately provided between the movable table 3 and the movable table 3. Further, it is desirable to provide a sliding member 805 on the slider 803 to stabilize the friction between the coarse motion table 9 and the slider 803. For the sliding member 805, for example, a metal material containing fluorine resin or molybdenum disulfide is suitable. Of course, the material of the slider 803 itself may be a wear resistant material.

FIG. 10 is a sectional view showing a second embodiment of the fine movement actuators 7-a, 7-b and 7-c with dampers. In this embodiment, Peltier elements 709 and 710 are provided on the lower surface of the slider 803. Thereby, the heat generated by the coil 701 can be exhausted to the coarse motion table 9 (FIG. 1) via the sliding member 805, and the temperature change of the moving table 3 can be suppressed. The slider 803 and the sliding member 805 are coupled by using heat insulating materials 708 and 711, which prevents shear stress from being applied to the Peltier elements 710 and 711.

FIG. 11 is an exploded perspective view showing an embodiment of the sample table 1. The sample mounting surface 101 is directly processed on the sample table 1, and the displacement measuring square 11 is vacuum-adsorbed or glass-bonded thereto. Quartz glass, crystallized glass (for example, product name Cristron) or the like is desirable as the material of the sample table 1 and the squarer 11. With the above configuration, it is possible to make a sample stand that is lightweight and has small thermal deformation.

FIG. 12 is a sectional view showing an embodiment of a method of mounting the sample table 1. The sample table 1 is provided on the upper pedestal 201 of the buffer unit 2 (FIG. 1) via the heat insulating material 105, and is fixed to the upper pedestal 201 by the bolt 102 via the heat insulating material 104 and the spring 103. With such a configuration, even if a brittle material having a small thermal expansion coefficient is used for the sample table 1, the upper pedestal 2
01 can be stably fixed. A disc spring is suitable for the spring 103, but a wave washer, a coil spring, or the like may be used. Further, when the heat input to the upper pedestal 201 is small, the heat insulating materials 104 and 105 may be removed.

FIG. 13 is a perspective view showing an embodiment of the driver elements 5-a and 5-b. The driver element 5 is provided with a Peltier element 501 and a radiator 502, and is attached to the moving table 3 via a heat insulating section 503. With this configuration,
Linear actuators 6-a, 6- provided on the driver 5
The heat generated from b (FIG. 1) is forcibly sent to the radiator 502 by the Peltier element 501, and the amount of heat transfer to the moving table 3 is suppressed. The linear actuator 6-
When the heat generation amounts of a and 6-b are small, any or all of the Peltier element 501, the radiator 502, and the heat insulating unit 503 may be removed.

FIG. 14 is a sectional view showing an embodiment of the heat dissipation device for the movable table 3. The Peltier element 30 is mounted on the moving table 3.
A heat radiator 302 is provided via 1. Coarse table 9
The heat receiver 303 is provided in the. Since the radiator 302 and the heat receiver 303 have rectangular wave-shaped cross-sections, the radiator 302
Therefore, the heat transfer area of the heat receiver 303 becomes large, and the heat of the moving table 3 can be effectively transferred to the coarse motion table 9. As a result, it is possible to dissipate heat from the moving table 3. here,
The radiator 302 and the heat receiver 303 may have a cross-sectional shape that allows a large contact area, and may have a triangular wave shape, a sine wave shape, or the like. Further, the Peltier element 301 and the radiator 302 are composed of the fine movement actuators 7-a and 7-a with dampers.
Obviously, it may be provided directly on b, 7-c (FIG. 1).

FIG. 15 is a block diagram showing an embodiment of a driving method of the Peltier element 501. The electric power supplied to the linear actuator 6 is detected and output to the calculation unit 506. The calculation unit 506 outputs the current target value to the amplifier 507, which drives the Peltier element 501.
The detection unit 505 may detect the power supplied to the linear actuator 6 by using any one of the output current, the output voltage, the output current target value, and the like of the controller 504 that controls the linear actuator 6. An example of the formula of the calculation content of the calculation unit 506 is shown below. (Output) = (Constant) × (Input) The formula of the second embodiment of the calculation content of the calculation unit 506 is shown below. (Output) = (Constant 1) + ((Constant 2) × (Input)) Of course, the calculation content of the calculation unit 506 is not limited to the above equation. For example, a value proportional to the integral value of the electric power supplied to the actuator 6 may be calculated. Also,
If the required accuracy of temperature control is low, the Peltier element 5
A constant current may be supplied to 01. Further, even if the temperature of the linear motion actuator 6 is detected and the Peltier element 501 is closed-loop controlled so as to be constant, the effect of the present invention is not impaired. Although the present embodiment relates to the driving method of the Peltier element 501, the Peltier elements 710, 711, 30
Of course, the present embodiment may be applied to the first and the like.

FIG. 16 is a perspective view showing a second embodiment of the table device of the present invention, and the same portions as those in FIG. 1 are designated by the same reference numerals. In this embodiment, the movable table 3 is the drive frame 1
The actuators are driven in the X and Y directions by linear actuators 14-a and 14-b via 5-a and 15-b, respectively.
According to the present embodiment, the coarse movement table 9 (FIG. 1) is unnecessary, so that the weight of the table device can be further reduced. A method of driving the movable table 3 via the drive frames 15-a and 15-b is disclosed in, for example, Japanese Patent Laid-Open No. 56-1734.
It is disclosed in Japanese Patent Publication No. 1 No. 1 and it is possible to further reduce the weight of the table device. A method of driving the movable table via this drive frame is disclosed in Japanese Patent Application Laid-Open No. 56-17341 and the like, and is well known, so it will not be described in detail here.
Even if the moving table 3 is driven by using a two-dimensional linear motor disclosed in Japanese Patent Laid-Open No. 3-293586 instead of the linear actuators 14-a and 14-b, the effect of the present invention is obtained. Of course, it is not impaired.

FIG. 17 is an exploded perspective view showing a third embodiment of the table device of the present invention, and the same parts as those in FIG. 1 are designated by the same reference numerals. In this embodiment, one-way fine movement actuators 6'-a and 6'-b are used instead of the linear movement actuators 6-a and 6-b in FIG. 1, and the coarse movement table 9'is set to XY.
It's a table. The coarse movement table 9 ′ integrally drives the moving table 3, the sample table 1, and the fine movement actuators 6′-a and 6′-b.

FIG. 18 is a schematic view showing an embodiment of a reduction projection exposure apparatus using the table device of the present invention. The light emitted from the illumination system 1801 passes through the reticle 1803 on which a circuit pattern is drawn and is reduced by the reduction lens 1804, so that an image of the circuit pattern is formed near the sample stage 1 of the table device (FIG. 1). A wafer (not shown) is placed on the sample table 1, and the exposure is performed by accurately aligning the position of the wafer to be exposed with the position of the image of the circuit pattern. Since several tens or more chips are formed on one wafer, exposure and step movement of the wafer are repeated to complete printing of one circuit pattern. At this time, since the area in which the circuit pattern is imaged sufficiently clearly is a small area in the Z-axis direction, the wafer is not only positioned in the Z-axis direction, but also the unevenness of the wafer and the running accuracy of the table device. The wafer is positioned while correcting the rolling and pitching caused by the above. Further, in the XY plane, it is not enough to align the center of the exposed region of the wafer with the center of the image of the circuit pattern. This is because when the yawing occurs due to the running accuracy of the table device, the tip end portion is not sufficiently aligned. Therefore, not only the wafer is positioned in the X-axis direction and the Y-axis direction, but also the wafer is positioned while correcting the yawing. According to the reduction projection exposure apparatus, the wafer can be positioned in six degrees of freedom in the space, the mass of the movable portion of the table device is small, and the heat generated from the fine movement actuator or the like does not adversely affect the positioning accuracy. Therefore, high throughput of the semiconductor exposure process can be achieved.

FIG. 19 is a schematic view showing an embodiment of an electron beam drawing apparatus using the table device of the present invention. An electron beam emitted from the electron gun 1901 passes through a variable beam diameter optical system 1902 and a blanking system 1903 and is deflected by a converging / deflecting system 1904 and the like, and this table device (FIG. 1).
The circuit pattern is directly drawn on the wafer of the sample table 1 of FIG. As in the case of the reduction projection exposure apparatus described above, the drawing of one circuit pattern is completed by repeating the drawing of the circuit pattern and the step movement of the wafer. Further, the need for positioning the wafer in terms of space 6 degrees of freedom is the same as in the reduction projection exposure apparatus. According to the present electron beam drawing apparatus, it is possible to position the wafer in six space degrees of freedom, and the mass of the movable portion of the table device is small.
In addition, since the heat generated from the actuator or the like is unlikely to adversely affect the positioning accuracy, the throughput of the semiconductor exposure process can be increased.

[0034]

As described above in detail, according to the present invention, since the weight reduction and the low thermal deformation of the mechanism are achieved, a table device capable of high-speed and multi-degree-of-freedom positioning is provided.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a table device of the present invention.

FIG. 2 is an exploded perspective view of an essential part showing an embodiment of a cushioning part of the present invention.

FIG. 3 is a cross-sectional view of essential parts showing a second embodiment of the cushioning part of the present invention.

FIG. 4 is a cross-sectional view of essential parts showing a third embodiment of the buffer section of the present invention.

FIG. 5 is a perspective view showing a fourth embodiment of the buffer section of the present invention.

FIG. 6 is an exploded perspective view of a connecting component showing a fifth embodiment of the cushioning unit of the present invention.

FIG. 7 is an arrangement plane view and a side view of a coupling component showing a fifth embodiment of the cushioning portion of the present invention.

FIG. 8 is an exploded perspective view showing an embodiment of the elastic connecting portion of the present invention.

FIG. 9 is a sectional view showing an embodiment of a fine movement actuator with a damper according to the present invention.

FIG. 10 is a cross-sectional view showing a second embodiment of the fine movement actuator with damper of the present invention.

FIG. 11 is an exploded perspective view showing an embodiment of the sample table of the present invention.

FIG. 12 is a cross-sectional view showing an embodiment of a mounting method of the sample table of the present invention.

FIG. 13 is a perspective view showing an embodiment of a driver element of the present invention.

FIG. 14 is a cross-sectional view showing an example of a heat dissipation device for a moving table of the present invention.

FIG. 15 is a block diagram showing an embodiment of a method of driving a Peltier element of the present invention.

FIG. 16 is a perspective view showing a second embodiment of the table device of the present invention.

FIG. 17 is an exploded perspective view showing a third embodiment of the table device of the present invention.

FIG. 18 is a schematic view showing one embodiment of a reduction projection exposure apparatus using the table device of the present invention.

FIG. 19 is a schematic view showing an embodiment of an electron beam drawing apparatus using the table device of the present invention.

FIG. 20 is an exploded perspective view showing an example of a conventional table device.

FIG. 21 is an exploded perspective view showing another example of the conventional table device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Sample stage 2 Buffer part 3 Moving stage 4 Elastic connection part 5-a, 5-b Driver 6-a, 6-b Linear motion actuator 6'-a, 6'-b Fine motion actuator (X) 7-a, 7-b, 7-c Fine-motion actuator with damper 8 Sliding part 9 Coarse-motion table 9'Coarse-motion table 10 Base 11 Scoer 12-a, 12-b Laser length measuring machine 13 Fine-motion actuator (X) 14-a , 14-b Linear motion actuator 15-a, 15-b Drive frame 16 Fine motion actuator (Y)

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location 8831-4M H01L 21/30 341 L

Claims (29)

[Claims] 1. A sample table on which a sample is placed, a movable table supporting the sample table, a linear actuator that holds the movable table and drives the movable table in at least one direction, and is coupled to the movable table. The table device includes a fine movement actuator that interlocks with the movement base and finely moves the movement base via the coupling portion, and a support portion that supports the linear movement actuator and slidably supports the fine movement actuator. 2. A sample table on which a sample is placed, a movable table supporting the sample table via a buffer section, and a linear actuator that holds the movable table and drives the movable table in at least one direction. A fine movement actuator including a damper that is coupled to the movement base to interlock with the movement base, finely moves the movement base via the coupling portion, and at least a part of which has a damper function for absorbing vibration, and the linear motion actuator. And a support unit that supports the fine movement actuator so as to be slidable in the one direction. 3. A sample table on which a sample is placed, a moving table for supporting the sample table, and a linear actuator that holds both ends of the moving table to drive the moving table in at least one direction or rotationally. A one-way fine-movement actuator that elastically connects to the movable table and interlocks with the movable table and that finely moves the movable table in the direction orthogonal to the one direction via the elastic connection portion, and couples to at least three locations of the movable table. To finely move the movable table in the vertical and tilt directions and to support the fine vertical actuator having a damper function for absorbing vibration, the one-way fine actuator and the vertical fine actuator integrally slidably in the one direction. A table device including a support portion. 4. A sample table on which a sample is placed, a movable table supporting the sample table via a buffer section, and both ends of the movable table are held to drive the movable table in at least one direction or rotation. At least one of the linear motion actuator, the one-way fine motion actuator that is elastically connected to the movable base and interlocks with the movable base, and that finely moves the movable base in the direction orthogonal to the one direction via the elastic connection portion; A vertical fine movement actuator having a damper function for absorbing vibrations while finely moving the movable table vertically and in an inclined direction by being respectively coupled to three places, the one-way fine movement actuator and the vertical fine movement actuator in the one-way fine movement actuator. And a support device that supports the support unit slidably in one direction. 5. The table device according to claim 2 or 4, wherein the buffer portion is constituted by an annular leaf spring that connects the sample table and the movable table, and a point contact element provided between the sample table and the movable table. . 6. The table device according to claim 5, wherein a heat insulating material is provided between the movable table and the sample table. 7. The table device according to claim 2, wherein the buffer portion is a viscoelastic member. 8. The table device according to claim 2, wherein the buffer portion is configured by arranging a combination of a two-degree-of-freedom bearing and a one-degree-of-freedom bearing at three positions. 9. The table device according to claim 3, wherein the elastic connecting portion is configured by a combination of two two-degree-of-freedom bearings and one one-degree-of-freedom bearing. 10. The fine movement actuator is a voice coil motor, and the linear movement actuator is a multi-pole type voice coil motor.
Table device according to item. 11. The table device according to claim 1, wherein a damper is arranged inside the vertical fine movement actuator. 12. The table device according to claim 1, wherein the vertical fine movement actuator has a self-weight compensation mechanism. 13. The table device according to claim 1, wherein the sample table is made of glass, and the sample mounting surface is processed into the sample table. 14. The table device according to claim 1, wherein the square is vacuum-adsorbed on the sample table. 15. The table device according to claim 1, wherein the moving table, the linear motion actuator, or the fine motion actuator has a heat dissipation device. 16. The heat exhausting device is provided between the movable table and the slidable portion.
Table device according to item. 17. The table device according to claim 1, further comprising a heat insulating section between the linear motion actuator or the fine motion actuator and the moving table. 18. The table device according to claim 15, wherein the heat dissipation device or the heat dissipation device uses a Peltier element. 19. The heat dissipation device or the heat dissipation device is configured by using a Peltier element, and a detection unit for detecting electric power supplied to the table device, and an output of the detection unit as an input signal to obtain a required calculation result. The table device according to claim 15 or 16, further comprising: an arithmetic unit for outputting, and an amplifier for amplifying an output of the arithmetic unit and inputting it to a Peltier element. 20. The table device according to claim 1, wherein the linear motion actuator drives the movable table via a drive frame. 21. The table device according to claim 1, wherein the linear motion actuator is a two-dimensional linear motor. 22. The table device according to claim 1, wherein the support portion comprises a coarse movement table movable in a direction orthogonal to the one direction. 23. A sample table on which a sample is placed, a movable table supporting the sample table, and a one-way fine movement actuator that holds the movable table and finely moves the movable table in at least one direction and a direction orthogonal thereto. A table device comprising: a vertical fine movement actuator that is respectively coupled to at least three places of the movable base to finely move the movable base in vertical and tilt directions; and a support portion that supports the fine movement actuators. 24. A sample table on which a sample is placed, a movable table supporting the sample table via a buffer, and a movable table that holds the movable table and finely moves the movable table in at least one direction and a direction orthogonal thereto. A table device comprising a one-way fine movement actuator, a vertical fine movement actuator which is coupled to at least three positions of the movement base to finely move the movement base in vertical and tilt directions, and a support portion which supports the respective fine movement actuators. 25. The table device according to claim 2, wherein the connecting point of the one-way fine movement actuator connected to the moving table is the central portion of the moving table. 26. A fine movement actuator with a damper having a damper function for absorbing vibration, wherein the fine movement actuator for finely moving the moving table in the vertical and tilt directions comprises a fine movement actuator with a damper.
The table device according to any one of claims 3 to 25. 27. The table device according to claim 23, wherein the support portion is a coarse movement table movable in the one direction and a direction orthogonal thereto. 28. Any one of claims 1 to 27.
A reduction projection exposure apparatus using the table device according to the item. 29. Any one of claims 1 to 27.
An electron beam drawing apparatus using the table device according to the item.