JPH06172886A - Ti-ni-cu shape memory alloy - Google Patents
Ti-ni-cu shape memory alloyInfo
- Publication number
- JPH06172886A JPH06172886A JP17071291A JP17071291A JPH06172886A JP H06172886 A JPH06172886 A JP H06172886A JP 17071291 A JP17071291 A JP 17071291A JP 17071291 A JP17071291 A JP 17071291A JP H06172886 A JPH06172886 A JP H06172886A
- Authority
- JP
- Japan
- Prior art keywords
- shape memory
- alloy
- memory alloy
- transformation
- molten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001285 shape-memory alloy Inorganic materials 0.000 title claims abstract description 43
- 229910018054 Ni-Cu Inorganic materials 0.000 claims abstract description 35
- 229910018481 Ni—Cu Inorganic materials 0.000 claims abstract description 35
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 21
- 239000000956 alloy Substances 0.000 claims abstract description 21
- 238000001816 cooling Methods 0.000 claims abstract description 18
- 229910018106 Ni—C Inorganic materials 0.000 claims description 6
- 238000010791 quenching Methods 0.000 claims description 6
- 230000000171 quenching effect Effects 0.000 claims description 5
- 229910011208 Ti—N Inorganic materials 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 13
- 238000007712 rapid solidification Methods 0.000 abstract description 10
- 230000007797 corrosion Effects 0.000 abstract description 7
- 238000005260 corrosion Methods 0.000 abstract description 7
- 230000006866 deterioration Effects 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 5
- 230000003446 memory effect Effects 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 230000009466 transformation Effects 0.000 description 57
- 239000010949 copper Substances 0.000 description 40
- 239000000463 material Substances 0.000 description 32
- 238000000034 method Methods 0.000 description 23
- 239000013078 crystal Substances 0.000 description 21
- 239000002184 metal Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 238000002844 melting Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 238000011084 recovery Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000000930 thermomechanical effect Effects 0.000 description 4
- 229910004337 Ti-Ni Inorganic materials 0.000 description 3
- 229910011209 Ti—Ni Inorganic materials 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- KHYBPSFKEHXSLX-UHFFFAOYSA-N iminotitanium Chemical compound [Ti]=N KHYBPSFKEHXSLX-UHFFFAOYSA-N 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 238000009987 spinning Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229910000734 martensite Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910010380 TiNi Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 210000001787 dendrite Anatomy 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 239000008207 working material Substances 0.000 description 1
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、急冷凝固法により作
製したTi−Ni−Cu系形状記憶合金に関するもので
あり、特にCu含有量および急冷速度を最適に調整した
Ti−Ni−Cu系形状記憶合金に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Ti-Ni-Cu-based shape memory alloy produced by a rapid solidification method, and in particular, a Ti-Ni-Cu based shape alloy having an optimally adjusted Cu content and quenching rate. It concerns memory alloys.
【0002】[0002]
【従来の技術】従来、Ti−Ni−Cu形状記憶合金
は、溶解・熱間加工プロセスにより最終形状の製品素材
を得るのが一般的であった。この溶解・熱間加工プロセ
スによれば、高周波真空溶解、又はプラズマ溶解法等に
よって作られた鋳塊をプレス、圧延、鍛造等の熱間加工
手段により所要の形状に加工して用いるものであった。2. Description of the Related Art Conventionally, Ti-Ni-Cu shape memory alloys have generally been obtained by a melting / hot working process to obtain a final shape product material. According to this melting / hot working process, an ingot made by high-frequency vacuum melting or plasma melting is processed into a desired shape by hot working means such as pressing, rolling, or forging. It was
【0003】[0003]
【発明が解決しようとする課題】しかし、この溶解・熱
間加工プロセスによりTi−Ni−Cu系形状記憶合金
を得る場合には、Ti−Ni合金は難加工性ゆえに、熱
応答性の良い薄板製品を得るのは困難であり、特にCu
=10at%以上になると脆化し、極めて難加工性にな
るため薄板最終製品を得るのは不可能であった。また、
溶解加工材料は、それを構成する多結晶方位が図10に
示すようにランダムのため、材料全体にわたる変態時期
が場所によりずれて、その結果、変態ひずみ〜温度ヒス
テリシス曲線の温度幅(ΔT=Af−Mf)が大きく、
またループ変態点近傍での屈曲が丸くなり、温度変化に
伴う形状記憶合金の応答性が鈍く、熱エンジンの出力効
率やロボットアクチュエーターの高速応答に悪い影響が
でる。However, when a Ti--Ni--Cu type shape memory alloy is obtained by this melting / hot working process, the Ti--Ni alloy is a difficult-to-work material and therefore a thin plate having a good thermal response. It is difficult to obtain products, especially Cu
= 10 at% or more, it becomes brittle and extremely difficult to work, so that it is impossible to obtain a thin plate final product. Also,
In the melt-processed material, the polycrystal orientations constituting the material are random, as shown in FIG. 10, so the transformation time throughout the material is shifted depending on the location, and as a result, transformation strain-temperature width of temperature hysteresis curve (ΔT = Af -Mf) is large,
In addition, the bending near the loop transformation point becomes round, and the response of the shape memory alloy due to temperature change is slow, which adversely affects the output efficiency of the heat engine and the high-speed response of the robot actuator.
【0004】さらに、変態結晶組織の不連続性から無駄
な変態過程でのロスが生じ、熱→機械エネルギー変換効
率は数%以下で、エネルギー開発材料および熱機械アク
チュエーターとしての普及が押さえられていた。しか
も、結晶組織が粗粒で、基地の転移密度が小さいため
に、降伏応力が低く、繰り返し使用中に記憶効果の低下
(記憶ボケ)が起こり、SMAの応用範囲を狭めてい
た。Further, the discontinuity of the transformed crystal structure causes a loss in the useless transformation process, and the heat-to-mechanical energy conversion efficiency is several percent or less, and its spread as an energy development material and a thermomechanical actuator has been suppressed. . In addition, since the crystal structure is coarse and the matrix dislocation density is small, the yield stress is low and the memory effect is reduced (memory blur) during repeated use, thus narrowing the range of application of SMA.
【0005】また、耐食性についても、本来、TiNi
系は良いのであるが、加工材料の粗結晶粒や表面不均質
のため極く強い酸性・アルカリ性極限環境下での長期使
用には問題が残されていた。従って、この発明は以上の
従来のTi−Ni−Cu系形状記憶合金の有する問題を
解消し、薄板最終製品を容易に得ることができ、温度変
化に伴う応答性が鋭く、また熱・機械エネルギー変換効
率が良好で、さらには繰り返し使用中に記憶効果の低下
(記憶ボケ)生じるようなことはなく、しかも極く強い
酸性・アルカリ性極限環境下での長期使用が可能なTi
−Ni−Cu系形状記憶合金を提供することを目的とす
る。Also, as for the corrosion resistance, TiNi is originally
Although the system is good, there are still problems in long-term use under extremely strong acidic / alkaline extreme environments due to coarse crystal grains of the processed material and surface non-uniformity. Therefore, the present invention solves the above problems of the conventional Ti-Ni-Cu-based shape memory alloys, can easily obtain a thin plate final product, has a sharp responsiveness with a temperature change, and has a high thermal / mechanical energy. Ti, which has good conversion efficiency, does not cause deterioration of memory effect (memory blur) during repeated use, and can be used for a long period of time under extremely acidic and alkaline extreme environments
An object of the present invention is to provide a -Ni-Cu-based shape memory alloy.
【0006】[0006]
【課題を解決するための手段】従来の溶解加工形状記憶
合金(主としてTi−Ni系)の欠点をできるだけ少な
くするためには、その材料組織自体の改善が必要なこと
が解る。即ち、変態歪〜温度ヒステリシス曲線を狭く、
シャープにして、かつエネルギー変換性能を向上させ、
実使用上重要な疲労劣化を強度を上げつつ抑えるために
は、Ti−Ni系合金組織を均質・微細・かつ結晶方位を
できるだけ揃えて、材料全体が同時に熱弾性マルテンサ
イト変態を起こすように仕向ければ良い。また、材料形
状も熱応答性を上げ、俊敏な形状記憶現象を得るために
は、より薄くして比表面積を増やし、冷却時の熱拡散を
促進させる必要がある。It is understood that the material structure itself must be improved in order to reduce the defects of the conventional melt-processed shape memory alloy (mainly Ti-Ni type) as much as possible. That is, the transformation strain-temperature hysteresis curve is narrowed,
Sharpen and improve energy conversion performance,
In order to suppress fatigue deterioration, which is important for practical use, while increasing the strength, the Ti-Ni alloy structure should be homogenous, fine, and have the crystal orientations aligned as much as possible so that the entire material undergoes thermoelastic martensitic transformation at the same time. Just go. Further, in order to improve the thermal responsiveness of the material shape and to obtain an agile shape memory phenomenon, it is necessary to make the material thinner to increase the specific surface area and promote heat diffusion during cooling.
【0007】以上の諸条件を充たす新素材開発のため
に、本発明者らはTiNiCu溶湯をノズルから直接C
u冷却ロールに射出して、最終TiNiCu薄板(約2
0〜300ミクロン厚さ)を得る回転急冷凝固法(Me
lt−spinning Technique)を採用
し試みた。その結果、かかる回転急冷凝固法による急冷
効果により、均質で極く微細な異方性(数ミクロン以下
の柱状結晶)組織を得ることができ、さらに、下部組織
は高転移密度となっているため、降伏による塑性歪が生
じ難く、相変態以外のエネルギーロスがないために、熱
・機械エネルギー変換性能の向上および形状記憶疲労劣
化も抑制され、耐食性の向上もはかられることを知見
し、本発明をなすに至った。In order to develop a new material satisfying the above various conditions, the inventors of the present invention directly supplied TiNiCu molten metal directly from a nozzle with C
Injected into u chill roll, final TiNiCu thin plate (about 2
Rotational rapid solidification method (Me 0-300 microns thickness)
lt-spinning Technology) was adopted. As a result, a homogeneous and extremely fine anisotropic (columnar crystal of a few microns or less) structure can be obtained by the rapid cooling effect of the rotary rapid solidification method, and the lower structure has a high dislocation density. It was found that plastic strain due to yield is unlikely to occur and there is no energy loss other than phase transformation, so that the improvement of heat-mechanical energy conversion performance and the suppression of shape memory fatigue are suppressed, and the corrosion resistance is also improved. Invented.
【0008】すなわちこの発明によれば、Ti(50±
y,y≦±2at%)−Ni(50−y−x)−Cu
(xat%)系合金溶湯を急冷凝固させて得られるTi
−Ni−Cu系形状記憶合金が提供される。That is, according to the present invention, Ti (50 ±
y, y ≦ ± 2 at%)-Ni (50-y-x) -Cu
Ti obtained by rapidly solidifying molten alloy of (xat%) type
A -Ni-Cu based shape memory alloy is provided.
【0009】またこの発明によれば、Ti(50±y,
y≦±2at%)−Ni(50−y−x)−Cu(xa
t%)系合金溶湯を急冷凝固させると共にCuの含有量
xが10at%<x≦20at%であるTi−Ni−C
u系形状記憶合金が提供される。Further, according to the present invention, Ti (50 ± y,
y ≦ ± 2 at%)-Ni (50-y-x) -Cu (xa
t%)-based alloy melt is rapidly solidified and the Cu content x is 10 at% <x <20 at% Ti-Ni-C
A u-based shape memory alloy is provided.
【0010】さらにこの発明によれば、Ti(50±
y,y≦±2at%)−Ni(50−y−x)−Cu
(xat%)系合金溶湯を急冷凝固させると共にCuの
含有量xが11.0〜16.0at%であるTi−Ni
−Cu系形状記憶合金が提供される。Further according to the present invention, Ti (50 ±
y, y ≦ ± 2 at%)-Ni (50-y-x) -Cu
Ti-Ni in which the (xat%)-based molten alloy is rapidly solidified and the Cu content x is 11.0 to 16.0 at%
A Cu-based shape memory alloy is provided.
【0011】加えてこの発明によれば、Ti(50±
y,y≦±2at%)−Ni(50−y−x)−Cu
(xat%)系合金溶湯を急冷凝固させると共にCuの
含有量xが3.0〜7.0at%であるTi−Ni−C
u系形状記憶合金が提供される。In addition, according to the present invention, Ti (50 ±
y, y ≦ ± 2 at%)-Ni (50-y-x) -Cu
Ti-Ni-C in which the (xat%)-based alloy melt is rapidly solidified and the Cu content x is 3.0 to 7.0 at%
A u-based shape memory alloy is provided.
【0012】またさらにこの発明によれば、Ti(50
±y,y≦±2at%)−Ni(50−y−x)−Cu
(xat%)系合金溶湯を回転ロールにより急冷凝固さ
せるにあたりその冷却速度を20〜50m/secとす
るTi−Ni−Cu系形状記憶合金が提供される。Further, according to the present invention, Ti (50
± y, y ≦ ± 2 at%)-Ni (50-y-x) -Cu
Provided is a Ti-Ni-Cu-based shape memory alloy having a cooling rate of 20 to 50 m / sec when rapidly cooling and solidifying a (xat%)-based alloy molten metal with a rotating roll.
【0013】この発明において用いられる急冷凝固法と
しては例えば溶湯を直接Cu冷却板などに吹き付け急冷
し小試験片を作成するガン法、連続薄板作成用の回転ロ
ール(単、双ロール)法、細線作製に適する回転液中紡
糸法、急冷粉末を作るスプレー法がある。Examples of the rapid solidification method used in the present invention include, for example, a gun method in which a molten metal is directly sprayed onto a Cu cooling plate or the like to be rapidly cooled to produce a small test piece, a rotary roll (single or twin roll) method for producing a continuous thin plate, and a thin wire. There are a spinning submerged spinning method suitable for production and a spray method for producing a quenched powder.
【0014】以上の各急冷法の中で、回転ロール法(単
ロール)によって急冷凝固を行うときには、その冷却速
度は20〜50m/secとするのが良い。冷却速度が
20m/sec未満である場合には急冷金属組織(特
に、結晶粒径)が粗大化し、かつランダム方位化し形状
記憶変態のみだれを生じ、多結晶の様に形状記憶効果、
耐疲労劣化性、耐腐食性が低下してしまう。逆に冷却速
度が50m/secである場合には金属組織は非晶質化
(アモルファス)して結晶変態に基づく形状記憶現象は
現れなくなり好ましくない。Among the above quenching methods, when the rapid solidification is performed by the rotating roll method (single roll), the cooling rate is preferably 20 to 50 m / sec. When the cooling rate is less than 20 m / sec, the quenched metal structure (particularly, the crystal grain size) becomes coarse, and the orientation becomes random, and only the shape memory transformation occurs.
Fatigue deterioration resistance and corrosion resistance will decrease. On the contrary, when the cooling rate is 50 m / sec, the metal structure becomes amorphous and the shape memory phenomenon based on the crystal transformation does not appear, which is not preferable.
【0015】この発明において、Cuの含有量xは10
at%<x≦20at%とするのが良い。この領域は通
常の溶解・加工プロセスでは材質脆化(粒界脆化など)
が起こり、大きな圧延加工は困難となる。xが10at
%未満では変態ひずみΔεSM Eは大きいものの、その変
態温度幅ΔTは大きくなり実用上好ましくない。In the present invention, the Cu content x is 10
It is preferable that at% <x ≦ 20 at%. This area is embrittled by normal melting and processing processes (eg grain boundary embrittlement)
Occurs, and large rolling becomes difficult. x is 10 at
Although the transformation strain [Delta] [epsilon] SM E is less than% greater, its transformation temperature range ΔT is increased and is not preferable for practical use.
【0016】またこの発明のうち、熱・機械的エネルギ
ー変換効率ηに関しては、Cu含有量xが11.0〜1
6.0at%とするのが良く、好ましくは12.0〜1
4.0at%とするのが良い。xが11.0at%未満
では変態ひずみは大きくなるが、変態温度差ΔTが大き
くなり、逆にxが16.0at%を越えると、変態温度
幅ΔTは小さいが変態ひずみが急減し、実用上好ましく
ない。また、xが12.0at%未満または14.0a
t%を越える範囲では熱エネルギー変換性能を示すパラ
メーターηが低下し、閉鎖系での使用に不都合となるの
で好ましくない。Further, in the present invention, regarding the thermal / mechanical energy conversion efficiency η, the Cu content x is 11.0 to 1
It is better to set it to 6.0 at%, preferably 12.0-1.
It is better to set it to 4.0 at%. When x is less than 11.0 at%, the transformation strain becomes large, but the transformation temperature difference ΔT becomes large. On the contrary, when x exceeds 16.0 at%, the transformation temperature width ΔT is small but the transformation strain sharply decreases. Not preferable. Further, x is less than 12.0 at% or 14.0a.
If it exceeds t%, the parameter η showing the thermal energy conversion performance decreases, which is not preferable because it is inconvenient for use in a closed system.
【0017】さらにこの発明において、Cuの含有量x
は3.0〜7.0at%とするのが良い。すなわち、自
然解放系熱源(放棄されて未開発の低品位熱源、例えば
温泉、工場温排水など)からの熱エネルギーの回収を図
る場合は、このxが3.0〜7.0at%の領域で、そ
の回収性能パラメーターμが最も大きく、有利となるか
らである。Cuの含有量xが3.0at%未満では変態
温度幅ΔTが大きくなりすぎて(30℃以上)応用範囲
とその実用性が狭まる。一方、Xが7.0at%を越え
るとΔTは急激に小さくなるが、変態ひずみとμが急激
に低下して熱エネルギー回収性能が低下してしまうので
不都合となる。Further, in the present invention, the Cu content x
Is preferably 3.0 to 7.0 at%. That is, when recovering thermal energy from a natural release system heat source (abandoned and undeveloped low-grade heat source, for example, hot springs, factory hot drainage, etc.), this x is in the range of 3.0 to 7.0 at%. This is because the recovery performance parameter μ is the largest and is advantageous. If the Cu content x is less than 3.0 at%, the transformation temperature width ΔT becomes too large (30 ° C. or more), and the application range and its practicality are narrowed. On the other hand, when X exceeds 7.0 at%, ΔT sharply decreases, but the transformation strain and μ sharply decrease and the thermal energy recovery performance deteriorates, which is disadvantageous.
【0018】[0018]
【作用】一般に溶湯急冷凝固法により金属溶湯を急冷凝
固させる場合、冷却速度(ロール回転速度)を早くする
に従って、金属組織はデンドライト相から微細結晶化さ
れ、等軸柱状結晶をへて超急冷速度(1×106℃/s
ec以上)でアモルファスに変化する。Ti−Ni−C
u溶湯の急冷速度を例えば40m/s(1×106℃/
sec)とすると、金属組織は図9に示される様な板厚
方向に結晶軸が揃った微細柱状晶(結晶粒径=2〜3ミ
クロン)となる。この点につきX線結晶構造解析を行っ
ても結晶方向がそろっていることが確認される。従って
この急冷速度で冷却したTi−Ni−Cu系形状記憶合
金は、このような金属組織を有することから、次のよう
な機能上の有するに至る。[Function] Generally, when a molten metal is rapidly solidified by the molten metal quench solidification method, the metal structure is finely crystallized from the dendrite phase as the cooling speed (roll rotation speed) is increased, and the equiaxed columnar crystal is formed to form a super rapid cooling rate. (1 x 10 6 ° C / s
ec or more) changes to amorphous. Ti-Ni-C
For example, the quenching rate of the molten metal is 40 m / s (1 × 10 6 ° C /
sec), the metal structure becomes fine columnar crystals (crystal grain size = 2 to 3 μm) in which crystal axes are aligned in the plate thickness direction as shown in FIG. Even if X-ray crystal structure analysis is performed on this point, it is confirmed that the crystal directions are aligned. Therefore, the Ti-Ni-Cu-based shape memory alloy cooled at this quenching rate has such a metal structure, and thus has the following functional properties.
【0019】柱状晶形成により、結晶方位がそろってい
るために、かかるTi−Ni−Cu系形状記憶合金で
は、全体として同時に均一な変態が生じる。従って、急
冷凝固法により、形状記憶変態ひずみの大きい結晶方位
を材料の長手方向にそろえるようにすれば、材料全体と
して変態ひずみを大きくすることができる。また、微細
柱状結晶のため、素材全体として変態が同時に起こり、
その結果、変態温度幅ΔTは小さくなり、またヒステリ
シスはシャープになる。また微細結晶組織であるため、
材料降伏応力が高くなり、負荷応力安定性が向上する。Since the crystal orientations are aligned due to the formation of columnar crystals, the Ti-Ni-Cu-based shape memory alloy simultaneously undergoes uniform transformation as a whole. Therefore, if the crystal orientation with a large shape memory transformation strain is aligned with the longitudinal direction of the material by the rapid solidification method, the transformation strain can be increased as a whole material. Also, because of the fine columnar crystals, transformation occurs at the same time for the entire material,
As a result, the transformation temperature width ΔT becomes small and the hysteresis becomes sharp. Since it has a fine crystal structure,
The material yield stress is high and the load stress stability is improved.
【0020】さらに微細結晶で降伏応力が高く、かつ結
晶方位がそろっている結果として、繰り返し使用に対し
て、塑性歪・転移が導入されにくく、機能疲労劣化(記
憶ボケ)しにくくなる。この発明のTi(50±y,y
≦±2at%)−Ni(50−y−x)−Cu(xat
%)系合金で、Cuの添加量xを5at%とすると、冷
却過程における変態経路は立方晶から単斜晶という経路
をたどる。この変態機構は1段階の変態機構であり、大
きな変態ひずみは得られるものの、そのためには外界か
らの大きな熱源が必要となるため変態温度幅は大きい。Further, as a result of fine crystals having high yield stress and uniform crystal orientation, plastic strain / transition is less likely to be introduced and functional fatigue deterioration (memory blurring) is less likely to occur during repeated use. Ti (50 ± y, y of this invention
≦ ± 2 at%)-Ni (50-y-x) -Cu (xat
%) Type alloy, if the addition amount x of Cu is 5 at%, the transformation route in the cooling process follows the route from cubic to monoclinic. This transformation mechanism is a one-step transformation mechanism, and although a large transformation strain can be obtained, a large heat source from the outside is required for that, so the transformation temperature width is large.
【0021】一方、この発明のTi(50±y,y≦±
2at%)−Ni(50−y−x)−Cu(xat%)
系合金で、Cuの添加量xを15at%程度とすると、
その付近では立方晶から斜方晶、さらに単斜晶という経
路をたどる。この場合、変態ひずみは小さくなるが、順
次、変態過程での結晶核生成や成長が抑えられるために
変態履歴すなわち変態温度幅は小さく、また、スムーズ
な変態過程をたどり、その結果として、エネルギー変換
性能が良好になるものと推測される。On the other hand, Ti (50 ± y, y ≦ ± of the present invention
2 at%)-Ni (50-y-x) -Cu (xat%)
In a system alloy, if the addition amount x of Cu is about 15 at%,
In the vicinity, the route from cubic to orthorhombic and then to monoclinic is followed. In this case, the transformation strain is small, but the transformation history, that is, the transformation temperature width is small because the crystal nucleation and growth in the transformation process are suppressed in sequence, and the smooth transformation process is followed, resulting in energy conversion. It is presumed that the performance will be good.
【0022】[0022]
【実施例】以下にこの発明の実施例を説明する。図1に
示す回転急冷凝固装置を用い、Ar雰囲気中でTiNi
Cuインゴット素材をアーク溶解して得た表1に示す組
成のTi−Ni−Cu合金溶湯を、高純度Ar雰囲気中
で、試料誘導加熱用コイル1が巻回された石英ノズル2
から直接回転銅ロール3に溶射して、溶湯接触部4にお
いて急速に冷却凝固させて急冷凝固リボン5を得た。そ
の際、冷却速度を1×104〜1×106℃/secに設
定し、ロール速度を20〜40m/sec、冷却用銅ロ
ール(直径=200mm)回転速度を2000〜400
0rpmとした。得られたTi−Ni−Cu系形状記憶
合金リボンの寸法は、板厚が0.03mm、幅が2.0
mm、長さが200mmであった。かかる合金リボンに
つき表2に示す諸特性を評価した。Embodiments of the present invention will be described below. Using the rotary rapid solidification equipment shown in FIG.
A Ti-Ni-Cu alloy melt having the composition shown in Table 1 obtained by arc-melting a Cu ingot material is used in a high-purity Ar atmosphere, and a quartz nozzle 2 around which a sample induction heating coil 1 is wound.
Directly onto the rotating copper roll 3 and rapidly cooled and solidified at the molten metal contact portion 4 to obtain a rapidly solidified ribbon 5. At that time, the cooling speed was set to 1 × 10 4 to 1 × 10 6 ° C./sec, the roll speed was 20 to 40 m / sec, and the cooling copper roll (diameter = 200 mm) rotation speed was 2000 to 400.
It was set to 0 rpm. The Ti-Ni-Cu-based shape memory alloy ribbon thus obtained has a thickness of 0.03 mm and a width of 2.0.
mm, and the length was 200 mm. The properties shown in Table 2 were evaluated for the alloy ribbon.
【0023】[0023]
【表1】(合金化学組成) [Table 1] (Alloy chemical composition)
【0024】[0024]
【表2】(評価特性および評価条件または評価法) [Table 2] (Evaluation characteristics and evaluation conditions or evaluation methods)
【0025】以上の諸特性の評価結果につき、図2〜図
8に示す。図2から図7までの変態ひずみ〜温度ヒステ
リシス曲線は実際の使用条件を想定して、外部からの負
荷応力σ=65MPa条件下で得られた結果である。な
お比較例として、実施例と同一の成分のTi−Ni−C
u溶解加工材料につき、実施例と同様にして諸特性を評
価した結果を示す。The evaluation results of the above various characteristics are shown in FIGS. The transformation strain-temperature hysteresis curves of FIGS. 2 to 7 are results obtained under the condition of actual load conditions σ = 65 MPa. As a comparative example, Ti-Ni-C having the same composition as that of the example is used.
The results of evaluating various characteristics of the u-melt processed material in the same manner as in the examples are shown.
【0026】図2、3のヒステリシスループに示される
ように、As、Ar、Ms、Mr点は図3に示す溶解加工材
では丸くなっているのに対し、図2に示す実施例のTi
−Ni−Cu系形状記憶合金ではそれらは鋭角で、変態
温度幅ΔT(=Af−Mf)は小さい。また図4は負荷
応力を変化させた場合の変態ひずみ〜温度ヒステリシス
曲線を示す。図に示されるように、応力増加に対して、
急冷材料のヒステリシス曲線は安定で、溶解加工材料の
ヒステリシスループに比べ実施例のTi−Ni−Cu系
形状記憶合金のヒステリシスループは、狭くシャープで
ありかつ変態温度差ΔTも小さく保たれ、外部負荷応力
に対しての特性・機能の安定性が高いといえる。As shown in the hysteresis loops of FIGS. 2 and 3, the points A s , A r , M s , and M r are rounded in the melt-processed material shown in FIG. Example Ti
In the -Ni-Cu-based shape memory alloy, they have an acute angle and the transformation temperature width ΔT (= Af-Mf) is small. Further, FIG. 4 shows a transformation strain-temperature hysteresis curve when the load stress is changed. As shown in the figure,
The hysteresis curve of the quenched material is stable, and the hysteresis loop of the Ti—Ni—Cu-based shape memory alloy of the embodiment is narrow and sharp as compared with the hysteresis loop of the melt-processed material, and the transformation temperature difference ΔT is kept small. It can be said that the stability of characteristics and functions against stress is high.
【0027】次に図5から図7にTi−Ni−Cu系形
状記憶合金のCu添加量を0〜20at%に変化させた
ときの、ヒステリシスループ、熱エネルギー変換・回収
性能とΔT変化等についての評価結果を示す。Next, FIGS. 5 to 7 show the hysteresis loop, the thermal energy conversion / recovery performance and the ΔT change when the Cu addition amount of the Ti—Ni—Cu type shape memory alloy is changed to 0 to 20 at%. The evaluation results of are shown.
【0028】図6中、熱エネルギー回収性能(自然熱エ
ネルギー開放系での性能)パラメーターμは(1)式で
示される。 μ=σ・ε/2・・・・・(1) σ:負荷応力 ε:変態ひずみ幅(ここでは、逆変態過程、AsからA
fの間で定義したもの)In FIG. 6, the heat energy recovery performance (performance in a natural heat energy release system) parameter μ is expressed by the equation (1). μ = σ · ε / 2 (1) σ: applied stress ε: transformation strain width (here, reverse transformation process, As to A
defined between f)
【0029】また図6中熱エネルギー変換性能(閉鎖系
で外部より熱を導入して機械エネルギーを取り出す性
能)パラメーターηは(2)式で定義される。 η=(σ・ε)/Δq・・・・・・・(2) Δq:変態時に単位質量当たり吸収される熱量(DSC
より測定) 図5、6に示されるように、変態ひずみΔεはCu5%
で最大になり、また変態温度差ΔTはCu10at%以
上で10℃以下となり、Cu=15〜17at%で最小
値6℃を示すに至った。Further, the heat energy conversion performance (performance in which heat is introduced from the outside to extract mechanical energy in a closed system) parameter η in FIG. 6 is defined by the equation (2). η = (σ ・ ε) / Δq ・ ・ ・ ・ ・ ・ (2) Δq: Heat absorbed per unit mass during transformation (DSC
As shown in FIGS. 5 and 6, the transformation strain Δε is Cu 5%.
, The transformation temperature difference ΔT was 10 ° C. or less when Cu was 10 at% or more, and the minimum value was 6 ° C. when Cu was 15 to 17 at%.
【0030】また、図6に示されるように熱エネルギー
回収性能パラメーターμはCu5%前後で最大となり、
一方熱エネルギー変換性能パラメーターηはCu13a
t%前後で最大値を示し、図中下部に○として記載され
ている溶解加工材に比べて、Cu=0.10at%では
2〜3倍、さらにCu=13at%付近の狭い化学組成
域では、最高5〜6倍程度の大幅な向上が認められる。
従って、図6中斜線部がこの発明の実施例の急冷凝固材
の特性優位域で有るということができる。さらに図7に
示されるように、各変態点はCu13%前後で313K
と、最も低くなる。このデータからTi(50±y,y
≦±2at%)−Ni(50−y−x)−Cu(xat
%)系合金でy成分の調整若しくは第4元素(Co、F
eなど)の添加効果により、さらに室温以下の低温度レ
ベルまで変態点の調整が可能となれば、常温付近の温度
差で駆動できる形状記憶熱エンジンが可能となる。Further, as shown in FIG. 6, the thermal energy recovery performance parameter μ is maximum at around Cu 5%,
On the other hand, the heat energy conversion performance parameter η is Cu13a.
It shows the maximum value around t%, and is 2 to 3 times as large as that of the melt-processed material indicated by ○ in the lower part of the figure at Cu = 0.10 at%, and further in a narrow chemical composition region near Cu = 13 at%. A significant improvement of up to 5 to 6 times is recognized.
Therefore, it can be said that the shaded portion in FIG. 6 is the characteristic superior region of the rapidly solidified material of the embodiment of the present invention. Further, as shown in FIG. 7, each transformation point is 313K at around Cu 13%.
And the lowest. From this data, Ti (50 ± y, y
≦ ± 2 at%)-Ni (50-y-x) -Cu (xat
%)-Based alloy for adjusting the y component or the fourth element (Co, F
If the transformation point can be adjusted to a low temperature level below room temperature by the addition effect of e), a shape memory heat engine that can be driven at a temperature difference near room temperature becomes possible.
【0031】図8は本実施例のTi−Ni−Cu系形状
記憶合金につき、塩酸(1N/HCl)中での分局曲線
を測定したものである。図に示されるように各分曲曲線
の最下点、いわゆる自然電極電位レベルで比較しても従
来の溶解加工材に比べて、耐食性は100倍から1万倍
程度の大幅な向上が可能なことがわかる。FIG. 8 shows the measurement of the division curve in the hydrochloric acid (1N / HCl) for the Ti—Ni—Cu type shape memory alloy of this embodiment. As shown in the figure, even if the lowest point of each bending curve, that is, the so-called natural electrode potential level is compared, the corrosion resistance can be greatly improved by 100 times to 10,000 times compared with the conventional melt processed material. I understand.
【0032】[0032]
【発明の効果】以上のようにこの発明のTi−Ni−C
u系形状記憶合金によれば、次のような優れた効果が奏
される。 1.変態時の単位体積当たりの吸収熱を機械仕事に変換
する性能が向上され、低温度差熱資源媒体からの熱エネ
ルギー回収性能が2〜3倍(Cu=13at%で最大5
〜6倍)向上される。 2.通常の溶解加工材料より変態温度幅が狭く、この変
態温度幅ΔTはCu=15〜17at%付近で最小6℃
を示し、温度変化に対し敏感であり、急激な変態ひずみ
伸縮機能を有するとともに、変態ひずみも溶解加工材料
よりも大きい。 3.繰り返し使用に伴う機能劣化(記憶ボケ)が大幅に
減少(1/10程度)される。 4.酸化雰囲気(1N−Hcl)塩酸中での耐食性が大
幅に向上(100〜1万倍)される。As described above, the Ti-Ni-C of the present invention is used.
The u-based shape memory alloy has the following excellent effects. 1. The performance of converting the absorbed heat per unit volume during transformation into mechanical work is improved, and the heat energy recovery performance from the low temperature difference heat resource medium is 2-3 times higher (up to 5 at Cu = 13 at%).
~ 6 times) improved. 2. The transformation temperature width is narrower than that of ordinary melt-processed materials, and the transformation temperature width ΔT is at least 6 ° C near Cu = 15 to 17 at%.
It is sensitive to temperature changes, has a rapid transformation strain expansion / contraction function, and has a transformation strain larger than that of the melt-processed material. 3. Functional deterioration (memory blur) due to repeated use is greatly reduced (about 1/10). 4. Corrosion resistance in oxidizing atmosphere (1N-Hcl) hydrochloric acid is significantly improved (100 to 10,000 times).
【0033】この発明のTi−Ni−Cu系形状記憶合
金は以上のような優れた機能を有することから、以下の
ような適用が可能となる。 (1)熱機械的応用 温度センサと駆動素子とを兼ね備えた形状記憶合金をサ
ーマルアクチュエーター(熱機械駆動素子)として用い
て、サーモスタット、火災報知機、温室窓自動開閉、電
気回路保護用スイッチ、パイプ継ぎ手、さらにはロボッ
ト用の人筋肉(通電抵抗加熱・冷却による超小型サーマ
ルアクチュエータ)等として使用する場合、前述の特徴
は有利に働く。即ち、例えば、温度センサとしては非常
に狭い温度範囲で変態が終了する(Cu=13at%付
近ではAs→Af点、Ms→Mf点は1℃以内)こと、
及び変態温度幅も10℃以内(10at%以上、最小=
6℃、Cu=13at%)なので、外界の温度変化に極
めて敏感に反応することが可能となる。さらに、繰り返
し記憶ボケも大幅に抑制される(溶解加工材料の1/1
0程度)ので、長期の繰り返し使用とその信頼性が増す
ことになる。また強酸性環境下でも耐食性が大幅に向上
(最高1万倍)しているので、極悪な環境下でも使用で
きる熱機械素子となりえることも解る。Since the Ti-Ni-Cu-based shape memory alloy of the present invention has the excellent functions as described above, it can be applied as follows. (1) Thermo-mechanical application Using a shape memory alloy that has both a temperature sensor and a driving element as a thermal actuator (thermo-mechanical driving element), a thermostat, a fire alarm, automatic opening and closing of greenhouse windows, switches for protecting electric circuits, pipes When used as a joint, and further as a human muscle for a robot (ultra-small thermal actuator by heating / cooling electric resistance), the above-mentioned characteristics work advantageously. That is, for example, as a temperature sensor, the transformation is completed within a very narrow temperature range (at Cu = 13 at%, As → Af point and Ms → Mf point are within 1 ° C.),
And the transformation temperature range is within 10 ° C (10 at% or more, minimum =
Since 6 ° C. and Cu = 13 at%), it becomes possible to react extremely sensitively to changes in the external temperature. In addition, repeated memory blurring is greatly suppressed (1/1 of melt processed material)
(0), so that long-term repeated use and its reliability will increase. Moreover, since the corrosion resistance is greatly improved (up to 10,000 times) even in a strongly acidic environment, it can be understood that it can be a thermomechanical element that can be used even in an extremely harsh environment.
【0034】さらに、熱を機械エネルギーに変換する効
率が従来材に比べ3倍程度良いために、従来よりも小さ
な熱源(加熱電力消費)でロボットアクチュエーターの
駆動が可能になり、省エネルギーが可能になる。また、
この発明のTi−Ni−Cu系形状記憶合金は、溶解加
工では不可能な、極めて薄い帯板(20〜300ミクロ
ン)が作成できるので、冷却時に表面からの熱拡散がさ
れやすく、変態サイクルでのアクチュエータの応答性を
大幅に改善することができる。Further, since the efficiency of converting heat into mechanical energy is about three times better than that of the conventional material, the robot actuator can be driven by a heat source (heating power consumption) smaller than that of the conventional material, and energy can be saved. . Also,
The Ti-Ni-Cu-based shape memory alloy of the present invention can form an extremely thin strip (20 to 300 μm) which is impossible by melting processing, so that heat is easily diffused from the surface during cooling, which causes a transformation cycle. The responsiveness of the actuator can be greatly improved.
【0035】(2)熱エネルギー変換材料的応用例 この発明のTi−Ni−Cu系形状記憶合金の熱弾性マ
ルテンサイト変態を応用して、工場排水、発電プラン
ト、温泉などからの、いわゆる低温度差熱エネルギーか
ら機械的エネルギーを抽出することができる。この発明
のTi−Ni−Cu系形状記憶合金の諸特性から、従来
の溶解・加工材料に比べて狭い温度幅(10℃以下)で
変態サイクルが終了するために、従来よりも極めて狭い
温度差熱源からのエネルギー回収が可能となり、しかも
疲労劣化も押さえられるので長時間の使用に耐えること
ができる。また、大きな変態ひずみを得ることができる
ので、解放系熱源からの大きなエネルギー回収率が可能
となる。(2) Application example of thermal energy conversion material By applying the thermoelastic martensitic transformation of the Ti-Ni-Cu type shape memory alloy of the present invention, so-called low temperature from factory wastewater, power plant, hot spring, etc. Mechanical energy can be extracted from the differential heat energy. Due to the characteristics of the Ti-Ni-Cu-based shape memory alloy of the present invention, the transformation cycle is completed within a narrower temperature range (10 ° C or less) than the conventional melting / working material, so that the temperature difference is much narrower than the conventional one. Energy can be recovered from the heat source, and fatigue deterioration can be suppressed, so it can withstand long-term use. Further, since a large transformation strain can be obtained, a large energy recovery rate from the open system heat source becomes possible.
【図1】 この発明のTi−Ni−Cu系形状記憶合金
を得るために用いられる急冷凝固装置の模式図である。FIG. 1 is a schematic diagram of a rapid solidification apparatus used to obtain a Ti—Ni—Cu-based shape memory alloy of the present invention.
【図2】 この発明のTi−Ni−Cu系形状記憶合金
のヒステリシスループを示す図である。FIG. 2 is a diagram showing a hysteresis loop of a Ti—Ni—Cu-based shape memory alloy of the present invention.
【図3】 従来材のヒステリシスループを示す図であ
る。FIG. 3 is a diagram showing a hysteresis loop of a conventional material.
【図4】 この発明のTi−Ni−Cu系形状記憶合金
と従来材のヒステリシスループの各変態点の状態を比較
して示す図である。FIG. 4 is a diagram comparing and comparing states of respective transformation points of a hysteresis loop of a Ti—Ni—Cu-based shape memory alloy of the present invention and a conventional material.
【図5】 この発明の実施例のTi−Ni−Cu系形状
記憶合金でCu添加量を0〜20%に変化させたときの
ヒステリシスループの変化を示す図である。FIG. 5 is a diagram showing changes in the hysteresis loop when the Cu addition amount is changed to 0 to 20% in the Ti—Ni—Cu type shape memory alloy of the example of the present invention.
【図6】 この発明の実施例のTi−Ni−Cu系形状
記憶合金でCu添加量を0〜20%に変化させたときの
熱エネルギー回収性能μ、熱エネルギー変換性能η、変
態温度差ΔTの変化を総合的に示す図である。FIG. 6 is a graph showing a Ti—Ni—Cu shape memory alloy according to an embodiment of the present invention in which the amount of Cu added is changed to 0 to 20%, the heat energy recovery performance μ, the heat energy conversion performance η, and the transformation temperature difference ΔT. It is a figure which shows the change of.
【図7】 この発明の実施例のTi−Ni−Cu系形状
記憶合金でCu添加量を0〜20%に変化させたときの
各変態温度の変化を総合的に示す図である。FIG. 7 is a diagram comprehensively showing changes in respective transformation temperatures when the Cu addition amount is changed to 0 to 20% in the Ti—Ni—Cu type shape memory alloy of the example of the present invention.
【図8】 この発明の実施例のTi−Ni−Cu系形状
記憶合金の塩酸(1N/HCl)中での分極曲線を示す
図である。FIG. 8 is a diagram showing a polarization curve of a Ti—Ni—Cu-based shape memory alloy of Example of the present invention in hydrochloric acid (1N / HCl).
【図9】 この発明のTi−Ni−Cu系形状記憶合金
の組織を示す図である。FIG. 9 is a diagram showing a structure of a Ti—Ni—Cu-based shape memory alloy of the present invention.
【図10】 この発明のTi−Ni−Cu系形状記憶合
金の組織を示す図である。FIG. 10 is a view showing a structure of a Ti—Ni—Cu-based shape memory alloy of the present invention.
1 試料誘導加熱用コイル 2 石英ノズル 3 回転Cuロール 4 溶湯接触部 5 急冷凝固リボン 1 Sample induction heating coil 2 Quartz nozzle 3 Rotating Cu roll 4 Molten metal contact part 5 Rapid solidification ribbon
─────────────────────────────────────────────────────
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【手続補正書】[Procedure amendment]
【提出日】平成5年9月30日[Submission date] September 30, 1993
【手続補正3】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図9[Correction target item name] Figure 9
【補正方法】削除[Correction method] Delete
【手続補正4】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図10[Name of item to be corrected] Fig. 10
【補正方法】削除[Correction method] Delete
Claims (5)
i(50−y−x)−Cu(xat%)系合金溶湯を急
冷凝固させて得られることを特徴とするTi−Ni−C
u系形状記憶合金。1. Ti (50 ± y, y ≦ ± 2 at%)-N
Ti (Ni-C), characterized by being obtained by quenching and solidifying an i (50-y-x) -Cu (xat%) alloy melt.
u-based shape memory alloy.
at%である請求項1に記載したTi−Ni−Cu系形
状記憶合金。2. The Cu content x is 10 at% <x ≦ 20.
The Ti-Ni-Cu-based shape memory alloy according to claim 1, which is at%.
t%である請求項1または請求項2に記載したTi−N
i−Cu系形状記憶合金。3. The Cu content x is 11.0 to 16.0a.
Ti-N according to claim 1 or 2, which is t%.
i-Cu type shape memory alloy.
である請求項1に記載したTi−Ni−Cu系形状記憶
合金。4. The Cu content x is 3.0 to 7.0 at%.
The Ti-Ni-Cu-based shape memory alloy according to claim 1.
ルにより急冷凝固させるにあたりその冷却速度を20〜
50m/secとする請求項1または請求項2または請
求項3または請求項4に記載したTi−Ni−Cu系形
状記憶合金。5. When the molten Ti—Ni—Cu alloy is rapidly solidified by a rotating roll, the cooling rate is 20 to 20.
The Ti-Ni-Cu-based shape memory alloy according to claim 1, claim 2, claim 3, or claim 4 having a speed of 50 m / sec.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17071291A JPH06172886A (en) | 1991-06-15 | 1991-06-15 | Ti-ni-cu shape memory alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17071291A JPH06172886A (en) | 1991-06-15 | 1991-06-15 | Ti-ni-cu shape memory alloy |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06172886A true JPH06172886A (en) | 1994-06-21 |
Family
ID=15910004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17071291A Pending JPH06172886A (en) | 1991-06-15 | 1991-06-15 | Ti-ni-cu shape memory alloy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06172886A (en) |
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