JPH06176994A - Manufacturing-rule check system - Google Patents

Abstract

PURPOSE:To check a huge and complicated process flow at high speed. CONSTITUTION:A process flow which has been formed is preserved in a recording medium as information for a computer. Before the rule of the preserved process flow is checked, a pattern dividing operation by division information on a flow when a division exists is performed by a division-information generation system 2. A mask-information control table 9 which controls in which part on the surface of a product a resist is to be applied on the basis of dimensional information on a mask pattern in a lithographic process and on the basis of resist information is formed by a layer-information generation system 6. By using several tables 53, 59 which have been prepared in the recording medium in advance and by using tables 13 to 49 which are formed during a check operation, the process flow is checked in individual check parts 11 to 47. Thereby, the title system can be utilized simply by everybody as a common knowledge, and a check error is reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process in a multi-product variable production line which has a plurality of manufacturing processes and simultaneously manufactures and processes a large number of objects to be produced having different process sequences and processing (manufacturing) conditions. The present invention relates to a manufacturing rule checking system for checking a flow (manufacturing rule / hereinafter referred to as a process flow).

[0002]

2. Description of the Related Art A process flow created by an engineer / researcher or a computer is not always correct.
For example, in the process flow shown in FIG. 39, if the lithographic process of process number 5 is true, there should be no inspection process. Further, after the aluminum sputter process of process number 3, there is a mistake that SH processing cannot be specified.

Conventionally, the flow of these processes has been performed by a person skilled in the process / device.
However, the number of technicians / researchers who have created process flows and the number of process flows are insufficient for the number of skilled workers who perform checking, and the skilled workers spend a lot of time per day in checking. The current situation is (about 3
It takes about 30 minutes to check the process flow of the 00 process).

Further, it becomes necessary to have many years of process / device experience and knowledge in order to become an expert in checking, and it is not possible to easily increase the number of people who check the process flow. Furthermore, it is difficult for the expert's knowledge, experience, and know-how to be passed on accurately, and it is the current situation that the expert owns it. Furthermore, the flow of processing tends to become longer and longer in the future, and it is expected that even an expert can easily make a mistake in checking.

Further, the process flow can be calculated by passing information to a process simulator, a device simulator or a shape simulator by using a conversion means. However, the design information (mask information) of the lithography process was insufficient in the process flow, so the technician selected only the information of the layer (layer) to be calculated before and after the transfer of the process flow, and performed the calculation. . That is,
The calculation in the simulator was able to automatically transfer only one dimension.

In addition, when engineers and researchers form a process flow, there are many cases where the same manufacturing process is performed under different conditions in the completed process flow. When checking the process flow, each product had information for the number of products, and each product was checked individually. That is, if the number of products under different conditions is 24, information for 24 products must be stored. As a result, when performing the check, the check must be performed while managing the dividing process each time, so the check system becomes complicated and the check speed becomes slow.

Further, when there are a plurality of products processed under the same condition, it is necessary to check each of them as well, which results in a considerable check time. Further, if one piece of information used when performing the check becomes large, there is a possibility that a problem of running out of memory may occur. Therefore, when the mask information is taken in, the product for performing the check 1
One piece of information became even larger, and the system ran out of memory, making it impossible to execute.

[0008]

As described above, humans are not always free from mistakes when checking the process flow. In addition, it takes a lot of time to check. In addition, the number of steps in the process flow will increase, and it is expected that the limits of human beings will surely disappear in the near future.

Further, since the process flow does not include design information (mask information), the process / device shape simulator can handle only one dimension of the process flow and perform two-dimensional and three-dimensional simulations. There wasn't.

An object of the present invention is to solve such problems and to provide a manufacturing rule check system capable of checking a long and complicated process flow at a higher speed.

The present invention also provides a manufacturing rule check system capable of generating process flow information for a two-dimensional or three-dimensional process / device / shape simulator by adding design information to the process flow. The purpose is to

A further object of the present invention is to provide a manufacturing rule check system capable of efficiently checking the process flow for a multi-product variable production line.

[0013]

In order to achieve the above object, the present invention is a system for checking a production rule in a multi-product variable production line having a plurality of production steps and having different process sequences and production conditions. There is a means for fetching the manufacturing rule information stored in the external storage device into the main memory, and the fetched manufacturing rule information checks whether or not there is a dividing step for dividing the product, When there is a dividing step, the manufacturing rule information is classified for each product number to generate the dividing information, and after the dividing information for each product number is generated, the divided information is generated for the same processed product as a unit. , The mask information management table that summarizes the dimension information and resist information of the mask pattern used in the lithography process is loaded into the main memory, and the layer information is read from the loaded information. And Leia information generating means for generating,
A film structure management table for two-dimensionally managing the film structure deposited on the front surface or the back surface of the product based on the layer information generated by the layer information generation means, and an etching step of manufacturing rule information using this film structure management table. Summarize the steps that can and cannot be done depending on the film structure checking means that checks whether the structure of the film to be shaved written on the product is the same as the structure of the film actually deposited on the product, and the film exposed on the product surface. The surface condition management table, the surface condition check means for checking using this surface condition management table, and the steps that can be performed by the film exposed on the back surface of the product,
A backside state management table that summarizes the processes that cannot be performed, a backside state checking means that checks using this backside state management table, and a base state management that summarizes the processes that can and cannot be performed depending on the film that exists on the surface of the product. A table, a ground condition check means for checking using this ground condition management table, a rank classification according to the contamination degree of the diffusion furnace, and a diffusion condition management table summarizing the ranks, and this diffusion condition management table are used for checking. Diffusion state check means, package management table that summarizes the processes that can be performed and processes that cannot be performed within a range from a certain process to a certain process, package check means that checks using this package management table, and specified manufacturing process A process sequence management table that summarizes the sequence and this process sequence management table Routine out-of-routine process control table that summarizes the process order check means for checking using a tool, the process that should not be performed, and the process that should not be performed after a certain process, and the routine that is checked using this non-routine process control table The external process check means, the test product management table that summarizes the insertion position, the withdrawal position, and the type of the test product, the test product check means that checks using this test product management table, and the continuous process pattern An integrated continuous process control table, a continuous process check means for checking using this continuous process control table, an error code management table that summarizes error messages, and an error message that creates an error message using this error code management table Checking by the creating means and the checking means It is composed of a check management table that summarizes whether or not to perform a check, a check determination means that selects a check means to perform a check before performing a check using this check management table, and an output means that outputs a check result. .

The film structure checking means, the surface condition checking means, the back surface condition checking means, and the base condition checking means simulate the process of producing a product,
The film structure checking means and the manufacturing rule information associated with the product are used for checking, and the film structure checking means, the surface condition checking means, and the ground condition checking means are controlled by the layer information generating means. It is characterized by using the generated layer information to check a plurality of layer states of the product at once.

The layer information generating means is composed of a mask information fetching section, a mask information management table, a layer information generating section, a function selecting section, a layer information passing section, and a mask information generating section, and CAD. The feature is that layer information for each design drawing is generated from the length of the design drawing and the resist presence / absence information obtained from the system.

Further, according to the present invention, the layer information generated by the layer information generating means is converted into a two-dimensional, three-dimensional structure such as a process / device / shape simulator in semiconductor manufacturing.
It is characterized by being used for dimension calculation.

Further, the division information generating means has means for counting how many division steps are included in the manufacturing rule information, and means for taking in the number of divisions, the number of divisions, and the division product numbers included in the division step. It is characterized by that.

[0018]

By the above means, in the present invention, the created process flow is stored in a recording medium represented by a floppy disk or a hard disk as computer information. Next, before the check is performed on the stored process flow, the division information generating means performs pattern division by the division information of the flow when the division exists, and the CAD is performed.
Layer information is generated by the layer information generation means based on the mask information generated by the system and added to the process flow information.

After that, while using some tables prepared in advance on a recording medium of a computer, for example, a hard disk, and some tables created during the check, the process flow check to which the layer information is added is performed for each check described above. By means.

[0020]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a functional block diagram of an embodiment relating to a manufacturing rule check (hereinafter referred to as process flow rule check) system of the present invention.

The process flow check system shown in FIG. 1 is mainly composed of a process flow acquisition unit 1, a division information generation system 2, a layer information generation system 6 and a check system 10. The division information generation system 2
The division information acquisition unit 3 and the division information management table 5 are included, and the layer information generation system 6 includes a mask information acquisition unit 7 and a mask information management table 9.

The check system 10 is composed of the management tables 13 to 53, the check units 11 to 47, the error message creation unit 51, the result output unit 55, the check determination unit 57, and the check management table 59. .

The process flow capturing unit 1 is information associated with the flow of the semiconductor manufacturing process by the processing conditions (recipe) of each process (process flow information), for example, a code representing the semiconductor manufacturing process and associated with each process. It has a function of taking in process flow information represented by a variable and a parameter (value of the variable) substituted for the variable from a storage device (for example, a hard disk) onto the main memory of the computer.

The division information generation system 2 has a function of checking whether or not there is a division step in the process flow information to be checked, and a function of creating a division information management table 5 described later. .

When there are division steps, the division process flow information to be used for each product is classified based on the number of divisions written therein, the number of products in each division, and the product number information, and further the same. Grouping is performed for each product processed in the process flow. It also has a function of creating the division information management table 5 based on the result and creating new process flow information not including the division process.

The division information management table 5 is a table for managing which division process flow information is used in the division process for each product number. Here, the term “dividing process” means that a plurality of products in a semiconductor manufacturing process are collectively stored in a box called a lot for processing.

For this reason, when it is desired to manufacture some of a plurality of products in a lot with different process flow information, the products in the lot may be manufactured separately. It is used when this lot is divided and a certain processing condition is divided into a plurality of conditions.

For example, in the process flow information, when the product number = (1,2,3) is processed by the original process flow information and the product number = (4,5,6) is processed by division, this information is used. Is described in the division information management table 5. However, this function can be applied to the case where the product is divided and the processing is performed when the number of products is one.

The layer information generating system 6, which will be described in detail later, has a function of fetching mask information previously fetched in the storage device and a function of generating layer information from the mask information to be described later. The mask information is, for example, pattern dimension information given by a mask designing CAD or the like, resist information as to whether or not a resist remains.

Further, the layer information generating system 6 has a function of storing the layer information created on the basis of the mask information in the mask information management table 9. The number of the divided layers is used in the film structure management table 13 described later.

Each of the check units 11 to 47 in FIG. 1 has a function of checking the process flow information. These check units 11 to 47 can instruct whether the check function is added in the check determination unit 57. The check units 11 to 47, the management tables 13 to 53, the check determination unit 57, and the check management table 59 will be described below.

In the film structure check unit 11, the film structure for calculating the film cutting time described in the film cutting step of the process flow information is equal to the film structure deposited on the actual product. It has a function to check whether or not. The film deposited on the product is managed in the film structure management table 13.

For example, the process flow information shown in FIG.
That is, in the step of removing the aluminum film and the oxide film, the film structure to be etched is the aluminum film and the oxide film, but in reality, only the aluminum film is deposited on the product. Table 13
It can be obtained more, and since the film structure in the etching process and the film deposited on the wafer are different, it is checked that they are NG.

The film structure management table 13 includes the wafer surface,
It is a table for managing the film deposited on the back surface. For example, when a wafer with nothing deposited is oxidized, an oxide film is deposited on the front and back surfaces of the wafer.
An oxide film is added to the film structure management table 13.

The film structure management table 13 stores data according to the number of layers divided by the layer information generation system 6. In the example shown in FIG. 4, the layer is an oxide film and the number of layers is one.

The surface condition check unit 15 has a function of checking, by using the film structure management table 13, processes that can be processed and processes that cannot be processed depending on the film exposed on the surface of the product. The rules regarding this check are managed in the surface state management table 17.

In the surface state management table 17 shown in FIG. 5, the upper horizontal axis is the name of a film that may exist on the product surface, and the left vertical axis is the name of a process that may be performed. Is filled in.

For example, considering the case where the treatment a and the treatment b are performed in the state where the film A is exposed on the surface of the product shown in FIG. 6, the surface state management table 17 shown in FIG. Thus, it can be checked that when the treatment a is performed and the treatment b is performed in the state where the film A is exposed on the surface of the product, it is NG.

Further, as shown in FIG. 7, the films A and B are formed on the surface of the product.
Even if the result is shown, it can be checked in the surface state management table 17 shown in FIG. 5 that it is NG to perform the processing a in a state where the film B is exposed on the product surface.

The back surface state checking unit 19 has a function of checking, by using the film structure management table 13, processes that can be processed and processes that cannot be processed depending on the film exposed on the back surface of the product. Also, the rules for this check are
It is managed in the back surface state management table 21.

In the back surface state management table 21 shown in FIG. 8, the upper horizontal axis is the name of the film that may exist on the back surface of the product, and the left vertical axis is the process that may be performed. The name is entered.

For example, considering the case where the processing a and the processing b are performed with the film C exposed on the back surface of the product shown in FIG. 9, the back surface state management table 21 shown in FIG. It can be checked that if the treatment a comes later in the state where the film C is exposed, it is OK, but if the treatment b comes later, it is NG.

The underlayer state checking unit 23 has a function of checking, by using the film structure management table 13, processes that can be processed and processes that cannot be processed depending on the film deposited on the wafer. Also, the rules for this check are
It is managed in the background state management table 25.

The background condition management table 25 shown in FIG.
In the above, in the upper horizontal axis, the name of the film in which the underlying layer may exist, and in the left vertical axis, the process name that may be performed are entered.

For example, the film A on the product shown in FIG.
Considering the case where the processing b is performed in the state where B and C are deposited, the processing b will be performed later by the underlying state management table 25 shown in FIG. You can check that you are NG.

The diffusion state check unit 27 has a function of performing a check to prevent a product that has entered a contaminated diffusion furnace from entering a clean diffusion furnace, that is, to prevent contamination of the diffusion furnace. Also, the rules for this check are
It is managed in the diffusion state management table 29.

In the diffusion state management table shown in FIG. 12, the horizontal axis on the top shows the name of the diffusion furnace in which the product has just entered, and the vertical axis on the left shows the name of the diffusion furnace to be entered. It is filled in.

For example, the product shown in FIG. 13 is a diffusion furnace D.
Although it is a product that has entered the diffusion furnace, if the product enters the diffusion furnace E or the diffusion furnace F next time, the product that has entered the diffusion furnace D is determined by the diffusion state management table 29 shown in FIG. It can be checked that entering E is OK, but entering diffusion furnace F is NG.

The package check unit 31 includes a process (A) and a process (B) as one package, and a process that must be present in the package (between A and B) and a process that must not be present. When a certain process exists, it has a function of checking that another process must exist. The rules regarding this check are managed in the package management table 33.

The package management table 3 shown in FIG.
In 3, the upper horizontal axis is the name of the process that is the base of the package, the process name that must exist in the package, the process name that must not exist in the package, and if it exists in the package The process name and error code that must be performed are entered.

Considering, for example, the process flow information shown in FIG. 15, that is, the case where a thermal oxidation step exists between the lithography step and the resist stripping step, the package management table 33 shown in FIG. It can be checked that it is unsuccessful to put it in the oxidation furnace while the photoresist is coated on it.

Considering the process flow information shown in FIG. 16, that is, the case where there is no resist stripping step between the lithography steps, the resist stripping step is determined by the package management table 33 shown in FIG. You can check that it is NG because it does not exist.

The process order check unit 35 exists before a certain process, must exist after the certain process, must not exist before the certain process, and must exist after the certain process. It has a function to check the steps that should not be performed. The rules regarding this check are managed in the process order management table 37.

The process sequence management table 37 shown in FIG.
In the above, in the upper horizontal axis, the process name that is the search source, the process name that is the search target, the position of the process name that is the search target, and the process of the search target must or must not exist. , The error code is filled in.

Considering, for example, the process flow information shown in FIG. 18, that is, when the cleaning process does not exist before the thermal oxidation process, the process sequence management table 37 shown in FIG. The fact that there is no cleaning process in 1 is checked to be NG.

The out-of-routine check unit 39 has a function of checking the process flow information for the process requiring the operator's permission to perform the process. Also,
The rule regarding this check is managed in the out-of-routine management table 41.

Out-of-routine management table 4 shown in FIG.
In FIG. 1, the process name as the search source, the process name as the search destination, and the error code are entered on the upper horizontal axis. For example, considering the process flow information shown in FIG. 20, that is, the case where there is a step of measuring the resistivity of wiring,
With the out-of-routine management table 41 shown in FIG.
Since the process of measuring the resistivity of the wiring is a process that requires permission, it is checked that it is NG.

In the test piece check section 43, the insertion position of the test piece (TP / test product) for measuring the film thickness when a film is deposited on the product and the resistivity of the product when ion implantation is performed, It has a function to check the type of TP. The rules regarding this check are managed in the test piece management table 45.

On the abscissa of the test piece management table 45 shown in FIG. 21, the process name requiring the TP, the position to insert the TP, the type of the TP, and the error code are entered.

For example, in the process flow information shown in FIG. 22, that is, in the pre-cleaning process, the process of depositing an aluminum film, and the process of measuring the film thickness, TP is originally inserted in the pre-cleaning process and the film thickness is measured. However, in this case, TP is inserted in the step of depositing the aluminum film and extracted in the step of measuring the film thickness. Therefore, the test piece management table 45 shown in FIG. The fact that they are different means that they are NG.

The type of TP is also checked by the test piece management table 45 shown in FIG. That is, in the process flow information shown in FIG. 22, the TP for measuring the film thickness of the aluminum film should originally be a dedicated TP, but since the recovered TP is used, the test piece management shown in FIG. The table 45 checks that it is NG.

The continuous process check unit 47 has a function of checking whether the description method of the continuous process (process which should not be in the waiting state) described in the process flow information is correct. The rules regarding this check are managed in the continuous process management table 49.

The continuous process management table 49 shown in FIG.
On the horizontal axis above, the name of the process considered as a continuous process and the error code are entered.

For example, in the process flow information shown in FIG. 24, that is, in the continuous start, pre-cleaning process, oxidation process, film thickness measurement, pre-cleaning process, aluminum film deposition process, film thickness measurement, and continuous end process, The pre-cleaning process in the continuous process is necessary only at the beginning and not after the process shown in FIG.
In the process flow information shown in FIG. 4, since the pre-cleaning process is present after the process of depositing the aluminum film, that is, NG is checked by the continuous process control table 49 shown in FIG. .

The error message creating section 51 has a function of creating an error message corresponding to the NG when an NG is found after performing various checks. Information regarding error messages is managed in the error code management table 53.

Error code management table 5 shown in FIG.
In 3, the error number and error message are entered on the horizontal axis.

For example, in the process flow information shown in FIG. 26, that is, when there is no pre-cleaning process before the step of depositing the aluminum film, the pre-cleaning process is originally required before the step of depositing the aluminum film. Since it does not exist in this case, the process order check unit 35 checks that the process order management table 37 is NG,
At the same time, in the error code management table 53 shown in FIG. 25 for the NG, an error message corresponding to the error code (“008” in this case) corresponding to the above NG, “There is no cleaning process before the film deposition process”. Is created.

After the above-mentioned check, the result output unit 55 has a function of creating an error file (a file including error messages) if there is an error and a CAM file if there is no error. Have

The check judgment unit 57 has a function of managing whether or not to perform the above-mentioned check. The information on whether or not to check is managed in the check management table 59.

Check management table 59 shown in FIG.
Indicates the name of the check item and the information on whether or not to check. For example, the table shown in FIG. 27 indicates that the steps other than the background state check are performed. This makes it possible to omit unnecessary checks.

Next, the specific means for realizing the present invention will be described.
The description will be continued with reference to FIG. 1 again. Flow intake unit 1,
The division information acquisition unit 3, the mask information acquisition unit 7, the check units 11 to 47, and the error message creation unit 51 are CPUs.
It is realized by the main memory attached to.

The management tables 5 to 53 are stored in a recording medium such as a hard disk or a floppy disk. For example, the management tables 5 to 53 stored in the storage medium are called into the main memory at the start of the check, and the check units 11 to 47 and the error message creation unit 51 perform time control under software control by the CPU. Through the above, it is sequentially realized by referring to the check judgment unit 57 and the check management table 59 in the main memory attached to the CPU.

As for the check result, if an error occurs during the check, an error file is output to the printer or the storage medium by the error message creating section 51 and the error code management table 53.

Next, the operation of the manufacturing rule checking system according to the present invention will be described.

The flow fetching unit 1 fetches the process flow information created in advance in a storage device such as a hard disk or a floppy disk by a screen editor or the like into the main memory of the computer. FIG. 28 shows an example of the process flow information. In the figure, code groups are described in the order of processing steps. One line of the process flow data corresponds to one process.

Next, in the division information generation system 2,
The process flow information fetched in the main memory is checked to see if there is a lot division process.
When there is a lot division process, it is classified according to which product uses which division process flow information according to the number of divisions, the number of each division, and the division product number written in the lot division process, and further processes in the same process flow. The product numbers are grouped in units of the products to be processed.

The result, that is, which product uses which divided process flow information, is managed in the divided information management table 5. By doing this work,
Since the process flow information that does not include the division process can be created and this process flow information is used for the check, the process flow check system can be greatly simplified.

In the layer information generation system 6, the dimension data of the mask pattern used in the lithography process of the process flow and the resist information as to whether or not the resist remains in the lithography process are obtained for all the mask patterns used in the process flow. The layer information management table 9 is newly created by grouping the portions where the patterns are overlapped and the portions where the patterns are not overlapped. The number of layers of the layer information is used in the film structure management table 13.

Next, the process flow information newly created by the division information generation system 2 is checked by each check unit 11.
~ 47 and each management table 13-49. Here, consider a case where the fifth step of the process flow information shown in FIG. 28 is checked.

First, the film structure check unit 11 checks whether or not the structure of the film to be cut written in the etching process and the structure of the film deposited on the product managed by the film structure management table 13 are the same. To do. However, since there is no etching step in the process flow information shown in FIG. 28, the check is omitted.

In the surface state checking unit 15, the film existing on the surface of the product from the film structure management table 13 and the information of the fifth step are fetched from the process flow, and the fifth step depends on the film existing on the surface of the product. Whether or not it is possible is checked by using the surface state management table 17.

In the back surface state check unit 19, from the film structure management table 13, the film existing on the back surface of the product and
Information on the second step is fetched from the process flow, and it is checked using the back surface state management table 21 whether the fifth step can be performed by the film present on the back surface of the product.

In the base condition check unit 23, all the films existing on the product from the film structure management table 13
And the information of the 5th process is taken in from the process flow,
The fifth step is the film present on the surface of the product
A check is made using the background state management table 25 as to whether or not it is possible.

In the spread state check unit 27, the number 5
The diffusion state control table 29 is used to compare the diffusion furnace used in No. 16 with the diffusion furnace used in No. 16 and to prevent the product from entering a clean diffusion furnace from a contaminated diffusion furnace.
Using.

The package check unit 31 checks whether or not the fifth process exists in the package of a certain process using a package management table 33.

The process order check unit 35 uses the process order management table 37 to check whether or not there is a specified process before and after the fifth process, or whether there is a process that should not exist. To do.

The out-of-routine check unit 39 uses the out-of-routine management table 41 to check whether the fifth step is a step that should not be performed.

Using the test piece management table 45, it is checked whether or not the test peach used in the fifth step in the test piece check unit 43 is correct, and whether the steps for inserting and removing the test piece are correct. .

Finally, in the continuous process check section 47,
The continuous process management table 49 is used to check whether or not the sequence of processes is correct while being surrounded by continuous start and continuous end.

If all of these checks are judged to be NG, the error message creating section 51
A message is created by referring to the error code management table 53, and is output from the result output unit 55 to the external storage device. If no NG exists, the result output unit 55 outputs the CAM file to the external storage device.

Further, the check judgment section 57 and the check management table 59 can be used to select whether or not the check described above is performed.

As described above, in the manufacturing rule checking system of the present invention, the process flows described in the order of steps can be checked at high speed by using the management tables 13 to 49. For example, it takes about 30 minutes for a human to check the processing flow of 300 steps, but with this checking device, it can be checked with about 1/10 or less. Also, these checks can be omitted. However, the system administrator can set it.

Next, the division information generating system 2 in FIG. 1 described above will be described in detail below.

FIG. 29 is a functional block diagram of this division information generation system 2. The processing system shown in the figure includes a division process number counting unit 63, a lot division number counting unit 65,
For each product division process case division unit 67, grouping unit 69,
The flow generation unit 71 and the division information management table 5 are included.

The dividing step number counting section 63 counts the number of steps when a lot dividing step exists in the process flow. For example, in the process flow shown in FIG. 30, there are two lot dividing steps, so in this case, 2 is counted. Further, FIG. 31 shows a schematic diagram of the flow of the lot in FIG.

The lot division number counting unit 65 has a function of loading the lot division number written in the division process into the memory. The process flow shown in FIG. 30 shows that the main body is divided into three in the first dividing step, and the main body is divided into two in the second dividing step.

Product-by-Product Dividing Process In the case dividing unit 67, the product number is further divided by the product number from the information written in the lot dividing process.
Case division is performed depending on which division step is used. Figure 3
In the process flow shown in 0, the product numbers 1 and 2 are used in the first division, the product numbers 3 and 4 are divided, and the product numbers 5 and 6 are divided. In the second division, the product numbers 1, 3, 5 use the main body, and the product numbers 2, 4, 6 use the division process flow. A summary of this is shown in FIG.

The grouping unit 69 performs grouping with the same process flow information based on the information obtained by the product dividing process case dividing unit 67. The division information management table 5 is created based on the result of grouping. FIG. 33
In the division information management table shown in FIG. 32, since the same information does not exist in FIG. 32, the division patterns are a, b,
It can be seen that it is divided into 6 types, c, d, e and f.

The grouping unit 69 uses the division information table 5 to create process flow information for each product. As shown in FIG. 34, the steps from the input to the first division are A, the first division is B, the division is C, the division is D, the first division is joined, and the second division is performed. Is E, the main body is F in the second division, G is the division, and H is the second division to the payout.
From the division information management table No. 3, the flow generation unit 71 generates a process flow that does not include a division process.
For example, product number 1 is A + B + E + F as shown in FIG.
It becomes + H.

Next, this system realizing means will be described with reference to FIG. Division process number counting unit 6
3, the lot division number counting unit 65, the product dividing process case dividing unit 67, the grouping unit 69, and the flow generating unit 71 are realized by a main memory attached to the CPU.

The division information management table 5 is stored in a recording medium such as a hard disk or a floppy disk.

For example, the division process number counting unit 63, the lot division number counting unit 65, the product division process dividing unit 67, and the grouping unit 69 are realized over time on the main memory attached to the CPU. The result is output to the division information management table 5, and the flow generation unit 71 refers to the division management table 5 to output the process flow not including the division process to the storage medium.

Next, the operation of this division information generation system will be described.

First, in the dividing step number counting section 63, it is checked whether or not a lot dividing step exists in the process flow information taken into the main memory by the flow taking section 1. If there are lot division processes, the number of lot division processes is counted. Here, if there is no division process, the work performed by this division information acquisition unit ends.

Next, the lot division number counting section 65 counts the number of product divisions in each division process.

Then, according to the breakdown of the lot division (each division number, division product number) written in the lot division process, classification is performed according to which product uses the process flow information of which division, and the grouping unit 69. Group product numbers in units of the same process flow information.

The result of this grouping is stored in the division information management table 5.

Next, the flow generation section uses the division information management table 5 to create a process flow that does not include a division step depending on which product uses which division process flow information. This process flow information is used for checking.

That is, if this division information management system is used, even if there are division steps in the process flow, it is possible to make a computer judgment as if the division steps do not exist. As a result, when checking the process flow, it is not necessary to consider division, so the check system can be greatly simplified.

The details of the layer information generation system 6 in FIG. 1 described above will be described below.

FIG. 36 is a functional block diagram of the layer information generating system 6.

The layer information generation system 6 includes a mask information acquisition unit 7, a mask information management table 9, a layer information generation unit 101, a function selection unit 103, and a layer information transfer unit 1.
It is composed of 05. The mask information generation system 6 includes a mask information generation unit 107 and a CAD system 10.
9, the check system 10, the simulation system 111, and the other system 113 are connected.

The CAD system 109 is a layout design system that is generally commercially available or is developed by each company, and its peculiarity does not matter. This CAD system 10
At 9, information such as the length and area of the mask information is generated. For example, taking a mask layout in semiconductor manufacturing as an example, a design drawing as shown in FIG. 37A can be created.

In the example of FIG. 37 (a), the mask 1 shows one line, the mask 2 shows two lines, and the mask 3 shows two holes.

As described above, in the case of semiconductor manufacturing, there are a plurality of pieces of this mask information, and the shapes and lengths of the figures are various.
Further, in the case of semiconductor manufacturing, information on whether or not the resist remains is attached to the black-painted portion shown in FIG. That is, taking semiconductor manufacturing as an example, the CAD system 109 generates mask information such as “length” and “presence / absence of resist”. However, this information may be the area of the design drawing or the like.

The mask information generation section 107 is a section for processing the information generated by the CAD system 109 to transfer it to the next functional section. For example, taking the above example of semiconductor manufacturing, the mask “length” information and “resist presence / absence” information generated by the CAD system 109 are converted into alphanumeric characters by the mask information generation unit 107.

Referring to FIGS. 37 (a) and 37 (b), CAD
Graphic information in the system 109, for example, 1 with mask 1
The “length” information of the mask of the dimensional portion (dotted line in FIG. 37A) is expressed as “a1, a2, a3”, while
“Registration presence / absence” information is “1” for registration “presence”,
When “none” is “0”, it is represented by “0, 1, 0”.
That is, the mask information generation unit 107 uses the CAD system 1
"Length" information and "resist presence / absence" information of the mask from the location designated by 09, "a1, a2, a3 / 0, 1, 0"
Has the function of generating.

FIG. 37 (b) shows an image of these information converted from FIG. 37 (a). Mask information generator 1
07 performs the conversion from FIG. 37 (a) to (b). Here, the designation of the part you want to collect the mask information is
For example, it can be designated by using an input medium such as a mouse. By moving the mouse to an arbitrary point with a mask shape and clicking it, information on the same position of all masks can be obtained. Referring to the example of FIG. 37,
Information on the same position of the masks 2, 3, ... Can be collected by clicking any part of the one-dot broken line of the mask 1.

In the above example, the mask information corresponds to one dimension, but it can also correspond to two dimensions by adopting the following method.

When designating the location of the "length" information of the mask and the "presence / absence of resist" information, one point on the mask was designated, but this designation method is shifted from an arbitrary origin by an arbitrary step. It is possible to specify pseudo two-dimensional "length" information and "resist presence / absence" information.

Specifically, as shown in FIG. 38 (a), the origin O is arbitrarily designated, and the step is also arbitrarily designated, whereby the "length" information is "a1, a2, a3", " b1, b
2, b3 ”and“ c1, c2, c3 ”can be deviated. These pieces of information can be generated in the mask information generation unit 107 as a matrix as shown in FIG. 38 (b), for example.

"Length" of the mask generated as described above
The information and the “registration presence / absence” information are stored in a recording medium in the layer information generation system 6.

The mask information fetching section 7 fetches the information of the mask information generating section 107 from the recording medium, expands it in the mask information management table 9, and then the layer information generating section 10
It is the part to pass to 1.

The layer information generating section 101 is a section for generating information called "layer information" from the information generated by the mask information generating section 107. Specifically, FIG.
This layer information generation unit 101 is referred to with reference to (b) and (c).
I will explain.

The information generated by the mask information generation unit 107, that is, the information on the mask 1 in FIG.
In FIG. 37C, it can be divided into three parts (a1 to a3). Each of these parts is information called a layer, and when there is one mask, the mask information and layer information are the same. By the way, the layer information for one mask is 3 layers, and the length and resist presence / absence information are "a1, a2, a3 / 0, 1, 0", respectively.

Next, when the mask 2 is overlaid on the mask 1, the layers are 5 layers (b1 to b1) as shown in FIG.
5). Further, when the masks 3 are superposed, the number of layers becomes nine layers. At this time, the length is Leia (1) ″
Is c1, but the layer (2) ″ is (b1-c1), the layer (3) ″ is ((c1 + c2) −b1), and the resist presence / absence information is also “0, 1, 1, ... It will be.

In this way, the layer information generating unit 101
This is a part for converting the mask information passed from the mask information generation unit 107 into layer information as shown in the above example. At this time, any number of masks may be used. That is, the layer information generation unit 101 has a function of converting the information in FIG. 30B into the information in FIG.

The function selecting section 103 is the layer information generating section 1
It has a selection function for transferring the information generated in 01 to the check system 10, the simulation system 111, or the other system 113 shown in FIG.

The layer information transfer section 105 is a section for transferring the layer information to one of the systems selected by the function selection section 103.

The simulation system 111
Is a simulation system represented by a process / device / shape simulator. Other system 113
Is a system that requires layer information other than the above systems.

[0132]

As described above, in the manufacturing rule checking system according to the present invention, the process flow information can be automatically checked by the computer. This makes it easy for everyone to use as common knowledge, and reduces mistakes in checking.

Further, according to the manufacturing rule checking system of the present invention, since the mask information is added to the process flow information, it is possible to automatically transfer the two-dimensional and three-dimensional information to the process / device / shape simulator. .

[Brief description of drawings]

FIG. 1 is a hardware configuration of a manufacturing rule check system according to an embodiment of the present invention.

FIG. 2 is process flow information for explaining a film structure check unit.

FIG. 3 is a membrane structure management table.

FIG. 4 is a membrane structure management table.

FIG. 5 is a surface state management table.

FIG. 6 is a conceptual diagram when processing a and processing b are performed when a film A is deposited on the surface of a product.

FIG. 7 is a conceptual diagram when processing a and processing b are performed when films A and B are deposited on the surface of a product.

FIG. 8 is a back surface state management table.

FIG. 9 is a conceptual diagram when processing a and processing b are performed when the film C is deposited on the back surface of the product.

FIG. 10 is a background state management table.

FIG. 11 is a conceptual diagram when the treatment b is performed when the films A, B, and C are deposited on the product surface.

FIG. 12 is a diffusion status management table.

FIG. 13 is a conceptual diagram when a product that has entered the diffusion furnace D enters the diffusion furnaces E and F.

FIG. 14 is a package management table.

FIG. 15 is process flow information for explaining a package check unit.

FIG. 16 is process flow information for explaining a package check unit.

FIG. 17 is a process order management table.

FIG. 18 is process flow information for explaining a process order check unit.

FIG. 19 is a non-routine management table.

FIG. 20 is process flow information for explaining an out-of-routine check unit.

FIG. 21 is a test piece management table.

FIG. 22 is process flow information for explaining the test piece check unit.

FIG. 23 is a continuous process management table.

FIG. 24 is process flow information for explaining a continuous process check unit.

FIG. 25 is an error code management table.

FIG. 26 is process flow information for explaining an error message creation unit.

FIG. 27 is a check management table.

FIG. 28: Process flow information created manually.

FIG. 29 is a hardware configuration of the division information generation system shown in FIG. 1.

FIG. 30 is process flow information including a lot division process.

FIG. 31 is a schematic diagram showing the flow of lots in FIG. 30.

FIG. 32 is a conceptual diagram for managing which division process is used for each product number.

FIG. 33 is a conceptual diagram for managing the result of pattern division of FIG. 32 using the same division information.

FIG. 34 is a schematic diagram in which the process flow is divided into patterns.

FIG. 35 is a schematic diagram of a process flow that does not include a division step of product number 1.

FIG. 36 is a detailed functional block diagram of the layer information generation system shown in FIG. 1.

FIG. 37 is an image diagram of generation of mask information to layer information by the layer information generation system.

FIG. 38 is an image diagram of generation from mask information to two-dimensional layer information by the layer information generation system.

FIG. 39 shows an example of a conventionally used process flow.

[Explanation of symbols]

 1 Process Flow Acquisition Unit 2 Division Information Generation System 3 Division Information Acquisition Unit 5 Division Information Management Table 6 Layer Information Generation System 7 Mask Information Acquisition Unit 9 Mask Information Management Table 10 Check System 11 Membrane Structure Checking Unit 13 Membrane Structure Management Table 15 Surface State check unit 17 Front side state management table 19 Back side state check unit 21 Back side state management table 23 Base state check unit 25 Base state management table 27 Spread state check unit 29 Spread state management table 31 Package check unit 33 Package management table 35 Process sequence check Part 37 Process order management table 39 Non-routine check part 41 Non-routine management table 43 Test piece check part 45 Test piece management table 47 Continuous process check part 49 Continuous Process management table 51 Error message creation unit 55 Result output unit 57 Check judgment unit 59 Check management table 63 Divided process counting unit 65 Lot division number counting unit 67 Product-wise divided process case dividing unit 69 Grouping unit 71 Flow generation unit 101 Layer information generation Unit 103 Function selecting unit 105 Layer information passing unit 107 Mask information generating unit

Claims (10)

[Claims] 1. A system for checking a production rule in a multi-product variable production line having a plurality of production steps and having different process orders and production conditions, wherein the production rule information stored in an external storage device is mainly used. Means to take in the memory and whether or not there is a division process for dividing the product in the production rule information that has been taken in. If there is a division process, the production rule information is classified by product number. The division information generating means for performing the division information and the mask information management table that summarizes the dimension information and the resist presence / absence information of the mask pattern used in the lithography process are loaded into the main memory, and the layer information is loaded from the loaded information. Layer information generating means, a film structure management table for managing the film structure deposited on the front and back surfaces of the product, and this film structure management The film structure checking means that checks whether the structure of the film to be cut written in the etching process of the manufacturing rule information using the cable and the structure of the film actually deposited on the product are the same, and the film exposed on the product surface The surface condition management table that summarizes the processes that can be performed and the processes that cannot be performed, the surface condition check means that checks using this surface condition management table, and the processes that can and cannot be performed depending on the film exposed on the back surface of the product. A backside state management table that is summarized, a backside state checking unit that checks using this backside state management table, a backside state management table that summarizes the processes that can and cannot be performed depending on the film existing on the surface of the product, Ranks are classified according to the degree of contamination of the diffusion furnace and the means for checking the state of the ground using the ground state management table. There, a diffusion status management table summarizing it, a diffusion status check means for checking with the diffusion state management table, step enables Among ranging process from a certain step,
A package management table that summarizes the processes that cannot be performed, a package check means that checks using this package management table, a process sequence management table that summarizes the prescribed manufacturing process sequence, and a check that uses this process sequence management table A process sequence check means, a non-routine process control table that summarizes processes that should not be performed and processes that should not be performed after a certain process, and non-routine process check means that checks using this non-routine process control table Test product management table that summarizes the insertion position, removal position, and type of test product, test product check means that checks using this test product management table, and continuous process management table that summarizes continuous process patterns And check using this continuous process control table A continuous process check means, an error code management table that summarizes error messages, an error message creation means that creates an error message using this error code management table, and a summary of whether or not each check means performs a check. A manufacturing rule check system comprising: a check management table; a check judgment means for judging whether to perform a check using the check management table; and an output means for outputting a check result. 2. The manufacturing rule check system according to claim 1, wherein the division information generation means performs grouping on the basis of products that are processed the same after creating division information for each product number. 3. The division information generating means includes means for counting how many division steps are included in the manufacturing rule information, and means for taking in the number of divisions, the number of divisions, and the division product numbers included in the division step. Claim 1 characterized by having.
Manufacturing rule check system described. 4. The film structure checking means, the surface condition checking means, the back surface condition checking means, and the substrate condition checking means simulate the process of producing a product, and the film structure checking means and manufacturing associated with the product. The manufacturing rule checking system according to claim 1, wherein the checking is performed using the rule information. 5. The film structure checking means, the surface state checking means, and the base state checking means use the layer information generated by the layer information generating means to check a plurality of layer states of a product at a time. The manufacturing rule checking system according to claim 1, wherein: 6. The manufacturing rule check system according to claim 1, wherein the check determination means selects a check means to perform a check before performing the check. 7. The layer information generating means comprises a mask information fetching unit, a mask information management table, a layer information generating unit, a function selecting unit, a layer information passing unit, and a mask information generating unit. The manufacturing rule checking system according to claim 1, which is characterized in that. 8. The manufacturing rule according to claim 1, wherein the layer information generating means generates layer information for each design drawing from the length of the design drawing and the resist presence / absence information obtained from the CAD system. Check system. 9. The manufacturing rule checking system according to claim 1, wherein the layer information generated by said layer information generating means is stored two-dimensionally in said film structure management table. 10. The manufacturing rule check according to claim 1, wherein the layer information generated by the layer information generating means is used for two-dimensional and three-dimensional calculation of a process / device / shape simulator in semiconductor manufacturing. system.