JPH06176976A - Etching method of aluminum foil for electrolytic capacitor - Google Patents
Etching method of aluminum foil for electrolytic capacitorInfo
- Publication number
- JPH06176976A JPH06176976A JP35080892A JP35080892A JPH06176976A JP H06176976 A JPH06176976 A JP H06176976A JP 35080892 A JP35080892 A JP 35080892A JP 35080892 A JP35080892 A JP 35080892A JP H06176976 A JPH06176976 A JP H06176976A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum foil
- etching
- electrolytic capacitor
- aqueous solution
- pits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title claims abstract description 40
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 36
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 239000011888 foil Substances 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000003990 capacitor Substances 0.000 title claims abstract description 19
- 239000007864 aqueous solution Substances 0.000 claims abstract description 21
- -1 chlorine ions Chemical class 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 7
- 239000000460 chlorine Substances 0.000 claims abstract description 7
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 13
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 14
- 238000004090 dissolution Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N hydrochloric acid Substances Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- 230000004807 localization Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000008719 thickening Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FLDCSPABIQBYKP-UHFFFAOYSA-N 5-chloro-1,2-dimethylbenzimidazole Chemical compound ClC1=CC=C2N(C)C(C)=NC2=C1 FLDCSPABIQBYKP-UHFFFAOYSA-N 0.000 description 1
- 239000001741 Ammonium adipate Substances 0.000 description 1
- 235000019293 ammonium adipate Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、電解コンデンサ用アル
ミニウム箔のエッチング方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for etching aluminum foil for electrolytic capacitors.
【0002】[0002]
【従来の技術】一般に、電解コンデンサにおける静電容
量の増大手段として、アルミニウム箔を電気的もしくは
化学的にエッチング処理しアルミニウム箔の実効表面積
を拡大するようにしている。2. Description of the Related Art Generally, as a means for increasing the electrostatic capacity of an electrolytic capacitor, an aluminum foil is electrically or chemically etched to increase the effective surface area of the aluminum foil.
【0003】この実効表面積の拡大率を上げるために、
エッチングピット密度を高くする研究が種々行われ実用
化を迎えている。In order to increase the expansion rate of this effective surface area,
Various researches have been carried out to increase the etching pit density, and they have been put to practical use.
【0004】しかして、実効表面積の拡大率を上げる技
術として、例えば特開平3−108711号公報に開示
されたものがある。As a technique for increasing the effective surface area enlargement ratio, for example, there is one disclosed in Japanese Patent Laid-Open No. 3-108711.
【0005】この公報に開示された技術は、初めにフッ
素イオンを含む水溶液中で化学的にエッチングすること
により、アルミニウム箔表面の皮膜を均一に溶解し、次
に行う硫酸イオンを含む水溶液中にて行う電気的なエッ
チング及び塩酸イオンを含む水溶液中にて行う電気的又
は化学的なエッチングでピット形成を均一に高密度に行
うようにしたものである。The technique disclosed in this publication uniformly dissolves the film on the surface of the aluminum foil by first chemically etching it in an aqueous solution containing fluorine ions, and then in a subsequent aqueous solution containing sulfate ions. The pits are uniformly and densely formed by electrical etching performed by the above and electrical or chemical etching performed in an aqueous solution containing hydrochloric acid ions.
【0006】しかしながら、この技術によれば、電気化
学的エッチングの進行に従いアルミニウム箔表面の溶解
が進み、ある時点からは、均一化する前と同様にピット
密度増化とともにエッチングピットの局在化が起こり、
かえって静電容量の損失を招く要因を抱える結果となっ
ていた。However, according to this technique, the surface of the aluminum foil is melted as the electrochemical etching progresses, and from a certain point, the pit density is increased and the etching pits are localized in the same manner as before the homogenization. Happened,
On the contrary, the result is that there is a factor that causes a loss of capacitance.
【0007】[0007]
【発明が解決しようとする課題】以上述べたように、従
来の電解コンデンサ用アルミニウム箔のエッチング方法
では、エッチングピットの均一な分散、高密度化のため
にエッチング前に電気化学的或いは化学的な処理を行っ
ているが、この方法ではエッチングの進行とともにアル
ミニウム箔表面の溶解も進み、ある時点以降から未処理
の前と同じようにエッチングピットの不均一な分散、エ
ッチングピットの局在化が起こり、エッチングピットの
重なり合いから静電容量を損うという問題点があり実用
上解決すべき課題をもっていた。As described above, in the conventional method for etching an aluminum foil for an electrolytic capacitor, in order to uniformly disperse the etching pits and increase the density, an electrochemical or chemical method is used before etching. Although processing is performed, in this method, as the etching progresses, the aluminum foil surface also dissolves, and from a certain point onwards, uneven distribution of etching pits and localization of etching pits occur as in the untreated case. However, there is a problem that the electrostatic capacity is lost due to the overlapping of the etching pits, and there was a problem to be solved in practice.
【0008】本発明は、上記の問題を解決するために成
されたもので、その目的はエッチングピットの均一な分
散を促すことによって、アルミニウム箔表面の表面積を
拡大し、静電容量低下のない電解コンデンサ用アルミニ
ウム箔のエッチング方法を提供することを目的とするも
のである。The present invention has been made to solve the above problems, and its purpose is to promote uniform distribution of etching pits, thereby increasing the surface area of the surface of an aluminum foil without causing a decrease in capacitance. It is an object of the present invention to provide a method for etching an aluminum foil for electrolytic capacitors.
【0009】[0009]
【課題を解決するための手段】本発明による電解コンデ
ンサ用アルミニウム箔の製造方法は、少なくとも塩素イ
オンと硫酸イオンを含む水溶液中において直流電流にて
電気化学的にエッチングする第1の工程後、少なくとも
硫酸イオンを含む水溶液中にて化学的にエッチングする
第2の工程を経てなる電解コンデンサ用アルミニウム箔
のエッチング方法において、前記第1の工程の途中にて
熱処理を施すことを特徴とするものである。The method for producing an aluminum foil for electrolytic capacitors according to the present invention comprises at least a first step of electrochemically etching with a direct current in an aqueous solution containing at least chlorine ions and sulfate ions, In the method for etching an aluminum foil for an electrolytic capacitor, which comprises a second step of chemically etching in an aqueous solution containing sulfate ions, a heat treatment is performed during the first step. .
【0010】また、この場合、熱処理を温度250〜4
50℃、時間30秒〜3分で行うことを特徴とするもの
である。In this case, the heat treatment is performed at a temperature of 250-4.
It is characterized in that it is carried out at 50 ° C. for 30 seconds to 3 minutes.
【0011】[0011]
【作用】以上のような構成になる電解コンデンサ用アル
ミニウム箔のエッチング方法によれば、第1の工程でア
ルミニウム箔を塩酸、硫酸を含む水溶液で直流エッチン
グすることから、硫酸による皮膜生成作用と塩酸イオン
のピッティング作用により表面作用を抑えながらピット
を生成する。According to the method of etching an aluminum foil for an electrolytic capacitor having the above-described structure, the aluminum foil is DC-etched with an aqueous solution containing hydrochloric acid and sulfuric acid in the first step. A pit is generated while suppressing the surface effect by the ion pitting effect.
【0012】そして、第1の工程中行われる硫酸による
表面溶解抑制作用自体は弱いことから、次第にアルミニ
ウム箔表面が溶解するが、第1の工程途中で行われる熱
処理によって、アルミニウム箔表面に熱酸化皮膜が新た
に形成され、第1の工程後半でのピットの局在化を抑
え、均一な分散をもたらす。Since the surface dissolution suppressing effect by sulfuric acid, which is carried out during the first step, is weak, the aluminum foil surface is gradually dissolved. However, the heat treatment carried out during the first step causes a thermal oxide film on the aluminum foil surface. Are newly formed, which suppresses the localization of pits in the latter half of the first step and brings about uniform dispersion.
【0013】そして、第2の工程では、硫酸イオンを含
む水溶液中で化学的にエッチングすることによって第1
の工程で生成された密度が高く、径の小さいピットが、
ピット内壁に沿って太くなる。Then, in the second step, the first step is performed by chemically etching in an aqueous solution containing sulfate ions.
The pits with high density and small diameter generated in the process of
It becomes thicker along the inner wall of the pit.
【0014】[0014]
【実施例】以下、本発明の実施例について説明する。す
なわち、第1の工程として、高純度アルミニウム箔を、
まず、少なくとも塩素イオン2〜9w/v%,硫酸イオ
ン23〜32w/v%を含む水溶液中で、液温70〜9
0℃とし、0.1〜0.4A/cm2 の電流密度で2〜
6分間行う。EXAMPLES Examples of the present invention will be described below. That is, in the first step, a high-purity aluminum foil is
First, in an aqueous solution containing at least 2 to 9 w / v% of chlorine ions and 23 to 32 w / v% of sulfate ions, a liquid temperature of 70 to 9
2 at a current density of 0.1 to 0.4 A / cm 2 at 0 ° C.
Do it for 6 minutes.
【0015】そして、この第1の工程の中間処理として
エッチング時間の1/2のところで、前記アルミニウム
箔を一度水洗いし、その後温度250〜450℃、時間
30秒〜3分間の範囲内で熱処理を行い、しかる後、第
2の工程として少なくとも硫酸10〜20w/v%を含
む水溶液中で、液温85〜100℃、時間5〜15分間
の範囲内で化学的エッチングを行うようにしてなるもの
である。Then, as an intermediate treatment of the first step, the aluminum foil is once washed with water at a half of the etching time, and then heat-treated at a temperature of 250 to 450 ° C. for a time of 30 seconds to 3 minutes. After that, as a second step, chemical etching is performed in an aqueous solution containing at least 10 to 20 w / v% of sulfuric acid at a liquid temperature of 85 to 100 ° C. for a time of 5 to 15 minutes. Is.
【0016】なお、第1の工程において、水溶液中の塩
素イオン及び硫酸イオンの添加量を上記の範囲とし、水
溶液の液温、電流密度及びエッチング条件を上記のよう
にするのは、まず、塩素イオン添加量として2w/v%
に満たない場合、局部的に溶解が進むためピットの形成
が正常に行われず、9w/v%を越えると、ピットの形
成と同時に表面の溶解が進み容量を減少させることによ
るもので、硫酸イオン添加量として23w/v%に満た
ない場合、ピットが貫通してしまい、アルミニウム箔強
度を悪化させるためで、32w/v%を越えると、ピッ
トの長さが短くなり、高い容量が得られなくなることに
よるもので、液温として70℃未満では、ピットが貫通
し、アルミニウム箔強度を低下させ、90℃を越える
と、ピットが長さ方向に成長せず、高い容量が得られな
いことによるものである。In the first step, the chlorine ion and the sulfate ion in the aqueous solution are added in the above ranges, and the solution temperature, current density and etching conditions of the aqueous solution are set as described above. 2w / v% as ion addition amount
If it is less than the above value, the pits are not formed normally because the dissolution locally progresses. If it exceeds 9 w / v%, the dissolution of the surface progresses simultaneously with the formation of the pits and the capacity is reduced. If the added amount is less than 23 w / v%, the pits will penetrate and deteriorate the strength of the aluminum foil. If it exceeds 32 w / v%, the pit length will be shortened and a high capacity cannot be obtained. When the liquid temperature is lower than 70 ° C, the pits penetrate and the strength of the aluminum foil is lowered, and when the liquid temperature is higher than 90 ° C, the pits do not grow in the length direction and a high capacity cannot be obtained. Is.
【0017】また、熱処理として上記のような条件とす
るのは、上記条件に満たない場合は、十分な熱酸化皮膜
が得られず、上記条件を越えた場合は、熱酸化故皮膜が
必要以上に強固となり、次のエッチングでのピット形成
を阻害することによるものである。Further, the heat treatment is performed under the above-mentioned conditions. If the above conditions are not satisfied, a sufficient thermal oxide film cannot be obtained. This is due to the fact that the pit formation in the next etching becomes difficult and the formation of pits in the next etching is hindered.
【0018】更に、第2の工程において、水溶液中の硫
酸の添加量を上記の範囲とし、水溶液の液温及びエッチ
ング時間を上記のようにするのは、硫酸添加量として1
0w/v%に満たない場合、ピット径を太くする溶解が
十分に行われず、20w/v%を越えると、ピット径を
太くする溶解が急激に進みピット径のコントロールが困
難である等の理由に基づくものである。Further, in the second step, the amount of sulfuric acid added to the aqueous solution is set within the above range, and the solution temperature and the etching time of the aqueous solution are set to the above ranges when the added amount of sulfuric acid is 1
When it is less than 0 w / v%, the dissolution for thickening the pit diameter is not sufficiently performed, and when it exceeds 20 w / v%, the dissolution for thickening the pit diameter progresses rapidly and it is difficult to control the pit diameter. It is based on.
【0019】以上のような構成になる電解コンデンサ用
アルミニウム箔のエッチング方法によれば、第1の工程
で硫酸による皮膜生成作用と塩素イオンのピッティング
作用によりアルミニウム箔の表面溶解を抑えながらピッ
トを生成するが、この表面抑制作用はそれ程強くなく、
次第に表面が溶解するのを、この第1の工程の途中で行
う熱処理によって、表面に熱酸化皮膜を新たに形成する
結果、第1の工程後半でのピットの局在化を抑えピット
の均一な分散をもたらし、密度の高いピットが得られ
る。According to the method for etching an aluminum foil for an electrolytic capacitor having the above-mentioned structure, the pits are formed while suppressing the surface dissolution of the aluminum foil due to the film forming action of sulfuric acid and the pitting action of chlorine ions in the first step. However, this surface suppression effect is not so strong,
As the surface is gradually dissolved, a new thermal oxide film is formed on the surface by the heat treatment performed in the middle of the first step. As a result, localization of the pits in the latter half of the first step is suppressed and the pits are uniformly formed. It results in dispersion, resulting in dense pits.
【0020】しかし、この第1の工程で得られるピット
は径が小さいが、第2の工程によってピット内壁に沿っ
て太いピットが得られ、電解コンデンサ用アルミニウム
箔に適した表面積拡大効果が得られると同時に機械的強
度の高い電解コンデンサ用アルミニウム箔の形成に大き
く貢献する。However, although the pit obtained in the first step has a small diameter, a thick pit is obtained along the inner wall of the pit in the second step, and a surface area increasing effect suitable for the aluminum foil for electrolytic capacitors can be obtained. At the same time, it greatly contributes to the formation of aluminum foil for electrolytic capacitors, which has high mechanical strength.
【0021】次に、本発明の電解コンデンサ用アルミニ
ウム箔のエッチング方法を従来例と比較して説明する。Next, an etching method of the aluminum foil for electrolytic capacitors of the present invention will be described in comparison with a conventional example.
【0022】(実施例)厚さ104μm,O材,4N,
(100)面占有率90%のアルミニウム箔を塩素イオ
ン3w/v%,硫酸イオン26w/v%を含む水溶液中
で、0.2A/cm2 、120秒間直流エッチングした
後、直ちに水洗いし、300℃2分間熱処理し、その後
再び前記塩素イオン3w/v%,硫酸イオン26w/v
%を含む水溶液中で、0.2A/cm2 、120秒間直
流エッチングし、しかる後、硫酸イオン16w/v%を
含む水溶液で95℃8分間化学エッチングする。(Example) Thickness of 104 μm, O material, 4N,
An aluminum foil having a (100) plane occupancy rate of 90% was subjected to direct current etching for 0.2 seconds at 0.2 A / cm 2 in an aqueous solution containing 3 w / v% of chlorine ions and 26 w / v% of sulfate ions, and then immediately washed with water to give 300 Heat treatment at ℃ 2 minutes, then again chlorine ion 3w / v%, sulfate ion 26w / v
% In an aqueous solution containing 0.2% A / cm 2 for 120 seconds, and then chemically etched in an aqueous solution containing 16 w / v% of sulfate ions at 95 ° C. for 8 minutes.
【0023】(従来例)厚さ104μm,O材,4N,
(100)面占有率90%のアルミニウム箔を塩素イオ
ンw/v3%,硫酸イオン26w/v%を含む水溶液中
で、0.2A/cm2 、240秒間直流エッチングした
後、硫酸イオン16w/v%を含む水溶液で95℃8分
間化学エッチングする。(Conventional example) Thickness 104 μm, O material, 4N,
Aluminum foil having a (100) plane occupancy of 90% was subjected to direct current etching at 0.2 A / cm 2 for 240 seconds in an aqueous solution containing chlorine ions w / v 3% and sulfate ions 26 w / v%, and then sulfate ions 16 w / v Chemical etching is carried out for 8 minutes at 95.degree.
【0024】しかして、上記実施例及び従来例でエッチ
ングしたアルミニウム箔それぞれをアジピン酸アンモニ
ウム溶液中で330V化成し、その静電容量と折曲強度
を測定した結果、表1に示すようになった。Then, the aluminum foils etched in the above-mentioned examples and the conventional examples were subjected to 330 V chemical conversion in an ammonium adipate solution, and their electrostatic capacity and bending strength were measured. The results are shown in Table 1. .
【0025】[0025]
【表1】 [Table 1]
【0026】表1から明らかなように、実施例のものは
従来例によるものと比較して静電容量及び折曲強度とも
優れており、本発明の優れた効果を実証した。As is clear from Table 1, the examples are superior in capacitance and bending strength as compared with the conventional examples, demonstrating the excellent effect of the present invention.
【0027】[0027]
【発明の効果】本発明によれば、径の太いピットが均一
に分散され、表面積拡大、更には機械的強度の高い電解
コンデンサ用アルミニウム箔形成に大きく貢献する電解
コンデンサ用アルミニウム箔のエッチング方法を得るこ
とができる。According to the present invention, a method for etching an aluminum foil for an electrolytic capacitor, in which pits having a large diameter are uniformly dispersed, which greatly contributes to the expansion of the surface area and the formation of an aluminum foil for an electrolytic capacitor having high mechanical strength, is provided. Obtainable.
Claims (2)
む水溶液中において直流電流にて電気化学的にエッチン
グする第1の工程後、少なくとも硫酸イオンを含む水溶
液中にて化学的にエッチングする第2の工程を経てなる
電解コンデンサ用アルミニウム箔のエッチング方法にお
いて、前記第1の工程の途中にて熱処理を施すことを特
徴とする電解コンデンサ用アルミニウム箔のエッチング
方法。1. A second step of electrochemically etching in an aqueous solution containing at least sulfate ions after a first step of electrochemically etching with a direct current in an aqueous solution containing chlorine ions and sulfate ions. In the method for etching an aluminum foil for an electrolytic capacitor, the heat treatment is performed during the first step in the method for etching an aluminum foil for an electrolytic capacitor.
30秒〜3分で行うことを特徴とする請求項1記載の電
解コンデンサ用アルミニウム箔のエッチング方法。2. The method for etching an aluminum foil for an electrolytic capacitor according to claim 1, wherein the heat treatment is performed at a temperature of 250 to 450 ° C. for a time of 30 seconds to 3 minutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35080892A JPH06176976A (en) | 1992-12-04 | 1992-12-04 | Etching method of aluminum foil for electrolytic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35080892A JPH06176976A (en) | 1992-12-04 | 1992-12-04 | Etching method of aluminum foil for electrolytic capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06176976A true JPH06176976A (en) | 1994-06-24 |
Family
ID=18413017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35080892A Pending JPH06176976A (en) | 1992-12-04 | 1992-12-04 | Etching method of aluminum foil for electrolytic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06176976A (en) |
-
1992
- 1992-12-04 JP JP35080892A patent/JPH06176976A/en active Pending
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