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JPH0616145B2 - Optical A / D converter - Google Patents

Optical A / D converter

Info

Publication number
JPH0616145B2
JPH0616145B2 JP58143044A JP14304483A JPH0616145B2 JP H0616145 B2 JPH0616145 B2 JP H0616145B2 JP 58143044 A JP58143044 A JP 58143044A JP 14304483 A JP14304483 A JP 14304483A JP H0616145 B2 JPH0616145 B2 JP H0616145B2
Authority
JP
Japan
Prior art keywords
optical
waveguide
optical waveguide
compound semiconductor
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58143044A
Other languages
Japanese (ja)
Other versions
JPS6033539A (en
Inventor
晧元 芹澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58143044A priority Critical patent/JPH0616145B2/en
Publication of JPS6033539A publication Critical patent/JPS6033539A/en
Publication of JPH0616145B2 publication Critical patent/JPH0616145B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F7/00Optical analogue/digital converters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 急速に発展している光関連技術において今後光回路の集
積化が望まれている。本発明は、その将来的な光回路の
集積化への発展が可能な単体光薄膜回路素子の中で光ア
ナログ/ディジタル(A/D)変換素子に関するもので
ある。本発明はマッハツェンダー干渉計の分岐部を積層
導波路で構成するため小型化,低挿入損失化が可能で、
更に平面電極構成を変えるだけで多ビット化が容易とな
る。
DETAILED DESCRIPTION OF THE INVENTION Industrial Application Field In the rapidly developing optical-related technology, integration of optical circuits is desired. The present invention relates to an optical analog / digital (A / D) conversion element in a single optical thin film circuit element that can be developed for future integration of optical circuits. According to the present invention, since the branch portion of the Mach-Zehnder interferometer is configured by the laminated waveguide, it is possible to reduce the size and the insertion loss,
Furthermore, it is easy to increase the number of bits simply by changing the planar electrode structure.

これらの特長は、近年のコンピュータの発展とともに信
号のディジタル化,高速化が進行していく技術の流れの
中で各種の機器およびシステムへの適用が可能となり、
情報,医療,防災,防犯,交通,通信などあらゆる巾広
い産業分野に利用されるものである。
These features can be applied to various devices and systems in the technological flow in which the digitization and speeding up of signals are progressing with the development of computers in recent years.
It is used in a wide range of industrial fields such as information, medical care, disaster prevention, crime prevention, transportation, and communication.

従来例の構成とその問題点 位相変調器を用いた光A/D変換素子は原理的には既に
提案されている。しかし、実験的にはほんど試みられて
おらず、わずかにLiNbO3結晶において2ビットのA/D
変換器が試作されているにすぎない。ここで将来光IC
化が進むにつれこのような素子の小型化,動作電圧の低
減化ならびに他の光素子とのモノリシック化は不可避な
ものとなると考えられるが、従来からの構造のものでは
それらの諸性能の改善は困難なものと考えられる。
Configuration of Conventional Example and Problems Thereof In principle, an optical A / D conversion element using a phase modulator has already been proposed. However, it has not been experimentally attempted, and it is only possible to obtain 2-bit A / D in LiNbO 3 crystal.
The converter is only being prototyped. Here future optical IC
It is considered that miniaturization of such elements, reduction of operating voltage, and monolithicization with other optical elements will be unavoidable as the number of optical elements increases. Considered difficult.

発明の目的 上記で述べた問題点を解決すべく本発明は小型,高性能
の光A/D変換装置の実現を目的とする。
OBJECT OF THE INVENTION In order to solve the problems described above, the present invention aims to realize a compact and high-performance optical A / D converter.

発明の構成 本発明は、化合物半導体基板上に低屈折率クラッド層で
はさまれた第1の光導波路を有し、前記第1の光導波路
上に前記クラッド層の一部を共有して第2の光導波路を
構成し、前記第1の光導波路、前記第2の光導波路はク
ラッド層とは組成の異なる化合物半導体で形成され、前
記第2の光導波路上に、この導波路とは反対導電型の化
合物半導体層を形成し、前記化合物半導体層に電圧を印
加する電極を設けて光位相変調部を構成し、積層型の光
分岐部、前記位相変調部、光結合部とを一体として構成
することを特徴とするマッハツェンダ干渉計型の光A/
D変換装置である。
According to the present invention, a first optical waveguide sandwiched by a low refractive index clad layer is provided on a compound semiconductor substrate, and a second optical waveguide is formed by sharing a part of the clad layer on the first optical waveguide. The first optical waveguide and the second optical waveguide are formed of a compound semiconductor having a composition different from that of the clad layer, and the second optical waveguide and the second optical waveguide have opposite conductivity to the second optical waveguide. Type compound semiconductor layer is formed, an electrode for applying a voltage to the compound semiconductor layer is provided to form an optical phase modulation unit, and the laminated optical branching unit, the phase modulation unit, and the optical coupling unit are integrally configured. Mach-Zehnder interferometer type optical A / characterized by
It is a D converter.

すなわち、本発明は光A/D変換素子として半導体レー
ザ,受光素子との一体化を可能にする素子として期待で
き、積層導波路構造ので分岐部、位相変化部および結合
部によって構成される。
That is, the present invention can be expected as an element that enables integration with a semiconductor laser and a light receiving element as an optical A / D conversion element, and is composed of a branch portion, a phase changing portion, and a coupling portion in a laminated waveguide structure.

実施例の説明 まず、本発明における基本原理を第1図に示す。Description of Embodiments First, the basic principle of the present invention is shown in FIG.

第1図はマッハツェンダー干渉計を示し、入射光線1は
ビームスプリッタ2で2分割される。分割された光線の
1つは反射ミラー3で反射され、位相変換部6を通る。
一方、分割された他の光線は結合ミラー4で位相変換部
を通った光と干渉し出力光線7は位相変換部で位相変調
された量に対応して出力強度変化として現われる。
FIG. 1 shows a Mach-Zehnder interferometer in which an incident light beam 1 is split into two by a beam splitter 2. One of the divided light rays is reflected by the reflection mirror 3 and passes through the phase conversion unit 6.
On the other hand, the other split light beams interfere with the light that has passed through the phase conversion unit by the coupling mirror 4, and the output light beam 7 appears as a change in output intensity corresponding to the amount of the phase modulated by the phase conversion unit.

ここで、光入力Poと出力Pnとの間には位相変化部6によ
る位相変化量△φによって Pn/Po∝〔1+cos(△φ)〕……(1) なる関係が成り立つ。また立方晶系化合物半導体は外部
からの電圧印加に対してポッケルス効果を生じ電圧に応
じた屈折率変化を起す。その変化に基づく位相変化量は で表わされる。ここで、λ:媒質中での光の波長,n:
媒質の屈折率,γ41:ポッケルス定数,E:印加電圧,
l:結晶の長さである。
Here, the relationship of Pn / Po∝ [1 + cos (Δφ)] (1) is established between the optical input Po and the output Pn depending on the amount of phase change Δφ by the phase changing unit 6. Further, the cubic compound semiconductor causes a Pockels effect when a voltage is applied from the outside, and causes a change in the refractive index according to the voltage. The amount of phase change based on that change is It is represented by. Here, λ: wavelength of light in the medium, n:
Refractive index of medium, γ 41 : Pockels constant, E: applied voltage,
l: Crystal length.

従って、出力PnはCOS(△φ)で振動することにな
る。つまり出力Pnは電圧Eと結晶の長さ外部印加電圧
Eに対してcos(△φ)で光出力は振動し、その周期
は結晶の長さlによって変化する。
Therefore, the output Pn oscillates at COS (Δφ). That is, the output Pn oscillates at the voltage E and the crystal length cos (Δφ) with respect to the externally applied voltage E, and its period changes depending on the crystal length l.

本発明に用いる素子の構成の断面図を第2図に示す。A cross-sectional view of the structure of the device used in the present invention is shown in FIG.

基体16上に光導波路12,14がクラッド層11,1
3,15を介して積層上に構成されている。10,8は
光分岐あるいは結合用電極であり、9は位相変調用電
極、17は共通電極を示す。今、光導波路14に入射し
た光liは電極10,17間に印加される電圧によって
光導波路12及び14にl1,lとして分岐される。分
岐された光のうち導波路12あるいは14いずれか一方
を進行する光が電極9,17間に印加された電圧によっ
て位相変調を受ける。変調を受けた光は電極8,17間
の電圧によって再度光導波路14に結合されて強度変化
を有する出力光lとして出射される。
The optical waveguides 12 and 14 are provided on the substrate 16 with the cladding layers 11 and 1.
It is configured on the laminated body through 3,15. Reference numerals 10 and 8 are light branching or coupling electrodes, 9 is a phase modulation electrode, and 17 is a common electrode. Now, the light li that has entered the optical waveguide 14 is branched into the optical waveguides 12 and 14 as l 1 and l 2 by the voltage applied between the electrodes 10 and 17. Of the branched light, the light traveling in either the waveguide 12 or 14 is phase-modulated by the voltage applied between the electrodes 9 and 17. The modulated light is coupled again to the optical waveguide 14 by the voltage between the electrodes 8 and 17, and is emitted as output light l 0 having intensity change.

第3図は本発明の一実施例として4ビットの光A/D変
換器を化合物半導体で構成した例を示す。n型InP基体
26上にn型InPクラッド層25、n型In−Ga−As−P光
導波層24、n型InPクラッド層23、n型In−Ga−As
−P光導波層22、p型InPクラッド層21を順次エピタ
キシャル成長させる。更にその上に光分岐あるいは結合
用電極20,18を各ビットに対応して形成し、位相変
調部電極19はその長さが各ビット毎に順次半分の長さ
になるように形成されている。電極27は共通電極を示
す。28,29,30,31は各電極下の光導波路を示
す。導波層24に入射された光は第2図に示された原理
によって各電極19下で変調されて光導波路28〜31
に出力強度の変化された光を出力する。各電極19に同
一の電圧が印加されたときに生ずる出力変化を第4図に
示す。第4図a,b,c,dは各光導波路31,30,
29,28の出力光に対応している。
FIG. 3 shows an example in which a 4-bit optical A / D converter is composed of a compound semiconductor as an embodiment of the present invention. On the n-type InP substrate 26, the n-type InP clad layer 25, the n-type In-Ga-As-P optical waveguide layer 24, the n-type InP clad layer 23, and the n-type In-Ga-As.
The -P optical waveguide layer 22 and the p-type InP cladding layer 21 are sequentially epitaxially grown. Further, optical branching or coupling electrodes 20 and 18 are formed thereon corresponding to each bit, and the phase modulation section electrode 19 is formed so that the length of each bit sequentially becomes half. . The electrode 27 is a common electrode. Reference numerals 28, 29, 30, and 31 denote optical waveguides below each electrode. The light incident on the waveguide layer 24 is modulated under each electrode 19 according to the principle shown in FIG.
The light whose output intensity is changed is output to. FIG. 4 shows the output change that occurs when the same voltage is applied to each electrode 19. 4A, 4B, 4C and 4D show the optical waveguides 31, 30,
It corresponds to the output light of 29, 28.

第4図において破線を原点とし原点以上の光出力を1、
破線以下の光出力を0とすると、各電極19に引火され
る電圧に応じて16階調のディジタル信号として検出さ
れる。このように簡単なデベイス構成で電気的アナログ
信号をディジタル信号に変換が可能となる。電極18お
よび20は積層方向性結合器部の膜厚,長さ,屈折率
(組成)を適当に選択することによって、3dB分岐,結
合器の構成が可能となるので、構成条件により省くこと
もできる。光導波路22と24は電極18および20以
外部分では互に結合し合うことのないように、膜厚,組
成,屈折率を選択する必要があるとともに、電極19に
電圧引火したときに導波路22あるいは24の一方のみ
に電界が集中するように構成することが必要であり、前
記のp型,n型を逆のタイプの配置で構成することも可
能である。また、電極18,20と電極19との間は必
要に応じて電気的分離層を配置することが必要となる。
In FIG. 4, the light output above the origin is 1, with the broken line as the origin,
When the light output below the broken line is set to 0, it is detected as a digital signal of 16 gradations according to the voltage ignited by each electrode 19. In this way, it is possible to convert an electrical analog signal into a digital signal with a simple device structure. The electrodes 18 and 20 can be configured to have a 3 dB branch and a coupler by appropriately selecting the film thickness, length, and refractive index (composition) of the stacking directional coupler portion. it can. It is necessary to select the film thickness, composition and refractive index so that the optical waveguides 22 and 24 are not coupled to each other except for the electrodes 18 and 20, and the waveguide 22 when the electrode 19 is ignited by voltage. Alternatively, it is necessary to configure the electric field to concentrate on only one of 24, and it is also possible to configure the p-type and the n-type in the opposite type arrangement. In addition, it is necessary to dispose an electrical isolation layer between the electrodes 18 and 20 and the electrode 19 as required.

入力光分岐用としての電極20群は可干渉性の位相のそ
ろった光を光導波路20および24に入射するために置
かれているものであり、光源として22,24の層に同
時に光を入射できる場合は必ずしも配置する必要はな
い。更に、本発明の実施例としてInP/In−Ga−As−P系
材料にて説明を加えたがGaAs/In−Ga−As−P,GaAs/A
l−Ga−As,その他II−VI化合物半導体など他の化合物
半導体材料についても同様な効果をもたらすことができ
る。また、本発明は光源であるレーザや受光素子と一体
化することも可能となる。
The group of electrodes 20 for splitting the input light is arranged to make coherent and coherent light beams enter the optical waveguides 20 and 24. If possible, it is not necessary to arrange them. Further, the InP / In-Ga-As-P-based material has been described as an example of the present invention. However, GaAs / In-Ga-As-P, GaAs / A
Similar effects can be obtained with other compound semiconductor materials such as l-Ga-As and other II-VI compound semiconductors. Further, the present invention can be integrated with a laser as a light source or a light receiving element.

発明の効果 (1) 積層形の導波路を採用することで、分岐部,結合
部,位相変調部が同時に一体化されて構成できる。
EFFECTS OF THE INVENTION (1) By adopting a laminated waveguide, the branching portion, the coupling portion, and the phase modulating portion can be integrated at the same time.

(2) 化合物半導体で構成するためにp−n接合を形成
することによって積層状導波路であるながら片方の導波
路のみ電界印加が可能となり、片側導波路のみの位相変
調,分岐,結合の微調が可能となる。
(2) By forming a pn junction to form a compound semiconductor, it is possible to apply an electric field to only one of the waveguides even though it is a laminated waveguide, and fine-tune phase modulation, branching, and coupling of only one waveguide. Is possible.

(3) 各素子間の結合を一度空間のどの外部にとり出す
ことをしないので挿入損失を小さくすることができる。
(3) The insertion loss can be reduced because the coupling between each element is not taken out once outside of the space.

(4) 平面電極数を変えるだけで多ビット化が可能であ
る。
(4) Multiple bits can be achieved by simply changing the number of planar electrodes.

(5) 光源,受光素子との一体化が可能となり高速で小
型なA/D変換器が作製可能となる。
(5) A light source and a light receiving element can be integrated, and a high-speed and compact A / D converter can be manufactured.

【図面の簡単な説明】[Brief description of drawings]

第1図は光A/D変換器の基本原理図、第2図は本発明
に用いる光A/D変換器の構成断面図、第3図は本発明
の一実施例の光A/D変換器の構成概観図、第4図a〜
dは本発明の光A/D変換器の光出力特性図である。 22,24……光導波路、21,23……クラッド層、
26……InP基体、18,20……結合用電極、19…
…位相変調部電極。
FIG. 1 is a diagram showing the basic principle of an optical A / D converter, FIG. 2 is a sectional view showing the configuration of an optical A / D converter used in the present invention, and FIG. 3 is an optical A / D converter according to an embodiment of the present invention. Fig. 4a-
FIG. 3d is a light output characteristic diagram of the optical A / D converter of the present invention. 22, 24 ... Optical waveguides 21, 23 ... Cladding layers,
26 ... InP substrate, 18, 20 ... Coupling electrode, 19 ...
... Phase modulator electrode.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】化合物半導体基板上に低屈折率クラッド層
ではさまれた第1の光導波路を有し、前記第1の光導波
路上に前記クラッド層の一部を共有して第2の光導波路
を構成し、前記第1の光導波路、前記第2の光導波路は
クラッド層とは組成の異なる化合物半導体で形成され、
前記第2の光導波路上に、この導波路とは反対導電型の
化合物半導体層を形成し、前記化合物半導体層に電圧を
印加する電極を設けて光位相変調部を構成し、積層型の
光分岐部、前記位相変調部、光結合部とを一体として構
成することを特徴とするマッハツェンダ干渉計型の光A
/D変換装置。
1. A first optical waveguide sandwiched by a low-refractive-index cladding layer on a compound semiconductor substrate, and a second optical waveguide sharing a part of the cladding layer on the first optical waveguide. Forming a waveguide, the first optical waveguide and the second optical waveguide are formed of a compound semiconductor having a composition different from that of the clad layer,
A compound semiconductor layer having a conductivity type opposite to that of the waveguide is formed on the second optical waveguide, and an electrode for applying a voltage is provided to the compound semiconductor layer to form an optical phase modulation unit. A Mach-Zehnder interferometer type optical A in which the branching section, the phase modulating section, and the optical coupling section are integrally formed.
/ D converter.
JP58143044A 1983-08-03 1983-08-03 Optical A / D converter Expired - Lifetime JPH0616145B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58143044A JPH0616145B2 (en) 1983-08-03 1983-08-03 Optical A / D converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58143044A JPH0616145B2 (en) 1983-08-03 1983-08-03 Optical A / D converter

Publications (2)

Publication Number Publication Date
JPS6033539A JPS6033539A (en) 1985-02-20
JPH0616145B2 true JPH0616145B2 (en) 1994-03-02

Family

ID=15329595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58143044A Expired - Lifetime JPH0616145B2 (en) 1983-08-03 1983-08-03 Optical A / D converter

Country Status (1)

Country Link
JP (1) JPH0616145B2 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924452A (en) * 1972-06-28 1974-03-04
DE3025073A1 (en) * 1980-07-02 1982-01-21 Siemens AG, 1000 Berlin und 8000 München FAST ELECTROOPTIC ANALOG / DIGITAL OR DIGITAL / ANALOG CONVERTER
JPS57168234A (en) * 1981-04-09 1982-10-16 Nec Corp Optical analog-to-digital converter
FR2508659A1 (en) * 1981-06-26 1982-12-31 Thomson Csf METHOD AND OPTICAL DIGESTION FOR ANALOG-DIGITAL CONVERSION

Also Published As

Publication number Publication date
JPS6033539A (en) 1985-02-20

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