JPH06167B2 - Oil removal device - Google Patents

Description

The present invention relates to an apparatus for removing oil such as oil mist and oil vapor from a gas stream containing oil mist and oil vapor.

At present, in the gas that is generally used, oil mist and oil vapor mixed from its compression and manufacturing processes, and oil components such as oil mist and oil vapor mixed from valps in the piping system that uses the gas are included. It is included. These oil components not only contaminate pipes, instrumentation devices, gas purification devices, etc. through which the oil-containing gas flows, but sometimes cause malfunction or malfunction of the devices. Furthermore, it contaminates products produced using such gases, which causes deterioration of quality and yield. Therefore, there is a strong demand for complete removal of oil, and particularly in the semiconductor manufacturing department, electronic device manufacturing department, food manufacturing department, etc., there is a strong demand.

Conventionally, a cylinder filled with an adsorbent such as activated carbon has been used as a method for removing oil vapor, but this is effective only for oil vapor, and in the coexistence of oil mist, oil mist Not only was the removal rate low, but oil vapor was again generated from the oil mist that was not removed. Also, as a method of removing oil mist, there is an inertial collision method, but this is effective only for coarse oil mist,
The effect on fine oil mist was weak. Further, as a method for removing fine oil mist, an excessive method has been widely used, but when the overspeed becomes a little large, the oil mist once trapped in the excessive body is pushed out of the excessive body by the gas flow and is again gas. However, the oil mist removal time is short and the removal rate is extremely low.

The present inventors have improved these drawbacks of the prior art and provide an oil removal device capable of completely removing oil content such as oil vapor and fine oil mist contained in a gas stream at high speed and for a long time. As a result of earnest research to obtain the present invention, the present invention has been reached.

That is, the present invention is an apparatus for completely removing these oil components from a gas flow containing a trace amount of oil mist and oil vapor as impurities, and a main body container having an inlet pipe having a gas outlet and a gas outlet pipe, A filtration membrane provided on the gas outlet side of the main body container, having a volume resistivity value of 10
Non-conductivity of ⁵ (Ω · cm ² ) or more and average pore size of 0.01-10μ
Has a large number of m pores and has a Gurley air permeability of 2 to 100 s
A filter membrane composed of a synthetic resin porous membrane or a synthetic or natural fiber laminated membrane of ec / 100 ml, and a support provided on the downstream side of the filter membrane in contact with the filter membrane and having a volume resistivity value of 10 ^A granular oil-absorbing material made of a non-conductive synthetic resin of ⁵ (Ω · cm ² ) or more and having a large number of through holes, and an oil-absorbing agent layer provided on the downstream side of the filtration-membrane supporting body. And an oil absorbing agent layer filled with an agent.
One or a plurality of outlets are provided, the ratio b / a of the effective filtration area b to the total area a of the outlets is 1 to 200, and for each outlet, the axis of the outlet is included and the filtration membrane surface The angle α between a straight line A formed by intersecting a plane perpendicular to the plane and the surface of the filtration membrane and a straight line B connecting the end of the filtration membrane in the gas blowing direction and the center of the outlet on the straight line A is 0 to 20 °. And an angle β between a straight line C passing through the center of the blow hole and parallel to the straight line A and an axis D of the containing hole is 0 to 20 °. .

The filtration membrane used in the present invention has a volume resistivity value of 10 ⁵ (Ω · c
m ² ) or more non-conductive material, and the average pore size determined by the mercury porosimeter method is 0.01 to 10 μm, and the ratio of the film thickness to the average pore size is 1 or more, preferably 10 or more. Alternatively, synthetic or natural fiber laminated membranes are used as filtration membranes. The air permeability of these filtration membranes is 2 to 100 sec / 100 ml in terms of Gurley air permeability. Examples of the filtration membrane having such properties include fluororesin porous membranes,
There are polyethylene fiber laminated membrane, polypropylene porous membrane, nylon fiber laminated membrane, paper and the like. For example, Fluoropore (Sumitomo Electric Co., Ltd.), Tyvek (Dyupon, USA), NF sheet (Tokuyama Soda) and chemical analysis paper 5C (Toyo). Commercially available products such as paper) are preferable. The shape of the perimembrane is not particularly limited, but examples thereof include a planar shape such as a circle, an ellipse, a rectangle, a square, and a polygon, or a tubular shape such as a cylinder and a polygonal cylinder.

Further, these filtration membranes are provided together with a filtration membrane support (hereinafter referred to as a membrane support) that is in contact with the filtration membrane in order to prevent deformation and damage due to a gas flow. The membrane support is not particularly limited as long as it can support the overmembrane without deforming it and has a large number of through holes through which gas can freely pass. Examples thereof include a flat plate shape such as a circular shape, an elliptical shape, a rectangular shape, a square shape, and other polygonal shapes, or a cylindrical shape such as a cylindrical shape and a polygonal cylindrical shape. Also, 10 ⁵
A synthetic resin having a volume resistivity value of Ω · cm or more is used, and for example, an acrylic resin plate, a fluorine resin plate, a nylon resin plate, a polypropylene plate and the like are preferably used.

Examples of the oil absorbing agent used in the present invention include those known per se, such as silica gel, alumina gel, molecular sieve, diatomaceous earth, perlite, activated carbon and activated clay. Preferred are alumina gels, silica gels, molecular sieves and diatomaceous earth, which are organic.

The non-conductive oil-absorbing agent layer is provided at least within several cm from the membrane, preferably in contact with the membrane or the membrane support. When using an oil absorbing agent such as activated carbon which itself has conductivity, the above-mentioned non-conductive adsorbent layer or glass fiber is provided between the membrane and the support so as not to come into direct contact with the membrane or support. A non-conductive fiber layer such as the above is sandwiched or filled with a distance of about 1 to 5 cm from the overmembrane.

Further, in the device of the present invention, the filling amount of the oil absorbing agent differs depending on the type and amount of the oil component contained in the gas flow, the type and size of the oil absorbing agent, the desired removable time, etc., but cannot be specified unconditionally. , For example, when using an oil absorbing agent having an average particle size of about 0.5 mm and the oil content is about 0.01 g / m ^3, 2
~ 5000 ml. Further, in the case where an oil absorbing agent that generates powder dust is used, a dust trapping overcoat is provided on the downstream side of the oil absorbing agent layer in order to prevent the dust from being mixed into the gas flow.

In the apparatus of the present invention, the number of the oil-containing gas blowout holes may be one or plural. The shape of the air outlet, which is the open end of the air outlet, is not particularly limited, but is, for example, circular, elliptical, or polygonal.

In the apparatus of the present invention, when the total area of the outlets is a and the total area of the through holes of the membrane support is the effective filtration area b of the filtration membrane, the ratio b / a of b to a is 1 to 200. If the ratio of b to a is smaller than 1 or larger than 200, the oil mist may not be completely removed.

A straight line including the axis of the blowout hole and intersecting the plane perpendicular to the hypermembrane surface and the hypermembrane surface is defined as A, and the hypermembrane end portion and the outlet on the straight line A in the gas blowing direction. When the straight line connecting the center of B is B, the angle α formed by the straight line A and the straight line B is 0 to 20 °. Further, when a straight line that passes through the center of the outlet and is parallel to the straight line A is C and the axis of the outlet is D, the angle β between the straight line C and the axis D of the outlet is 0.
It is said to be ~ 20 °.

When a plurality of outlets are provided, the angle α and the angle β are 0 to 20 ° for all the outlets.
When each of the angle α and the angle β is larger than 20 °,
Oil mist may not be completely removed.

It goes without saying that the straight lines A, B and C and the axis D of the blowout hole are on the same plane.

The flow velocity of the oil-containing gas supplied in the apparatus of the present invention is not particularly limited, and for example, even if the overspeed obtained by dividing the fluid mass velocity by the effective excess area exceeds 0.1 g / cm ² · sec. , Oil mist and oil vapor are removed with a very high removal rate.

Next, the present invention will be described more specifically with reference to the drawings.

1 to 3 are cross-sectional views of the oil content remover of the present invention having different modes.

In FIG. 1, an oil-containing gas inlet pipe 1 having a closed tip is fixed to the upper surface 3 by penetrating a central portion of the upper surface 3 of a rigid cylindrical main body container 2. A plurality of blow-out holes 4, ..., 4 are formed in the side wall slightly above the lower end of the inlet pipe 1, and the blow-out holes 4 ,. ……, it is opened as 5. A disc-shaped membrane support 7 having a large number of through holes 6, ..., 6 is fixed to the inner wall of the main body container 2 below the inlet pipe 1, and a circular permeation membrane 8 is provided on the membrane support 7. Is attached. Further, below the membrane support 7, an oil absorbent layer 9 is provided in contact with the membrane support 7.

In this device, the total area of the outlets 5, ..., 5 is a, and the total area of the through holes 6, ..., 6 of the membrane support 7 is the effective excess area b. Further, a straight line A that is formed by intersecting a plane that includes the axis of the blow hole with respect to each of the blow holes and is perpendicular to the overfilm 8 and the surface of the overfilm 8 and the overfilm end portion 11 in the gas blowing direction on the straight line A And the straight line B connecting the center of the outlet 5
And the angle between the straight line C passing through the center of the outlet 5 and parallel to the straight line A and the axis D of the blowout hole is β.

The oil-containing gas is blown into the main body container 2 from the inlet pipe 1 through the blow-in holes 4, ..., 4 and the blow-out ports 5, ..., 5 and passes through the permeation membrane 8 and penetrates the membrane support 7. Hole 6, ...,
6 and the oil absorbing agent layer 9 are sequentially passed to remove the oil component, and the gas substantially containing no oil component is discharged from the outlet pipe 10.

In FIG. 2, an oil-containing gas inlet pipe 12 is provided on an upper portion of a side wall of a rectangular parallelepiped main body container 13, and the inlet pipe 12 is opened on the side wall to form a blow hole 14, and a blow hole 14 is formed.
The open end of the main body container 13 is defined as the air outlet 15. A rectangular plate-shaped membrane support 17 having a large number of through holes 16, ..., 16 is fixed to the inner wall of the main body container 13 on the inner wall of the main body container 13 and slightly above the center thereof. Membrane 18 is attached. Further, below the membrane support 17, an oil absorbent layer 19 is provided in contact with the membrane support 17.

In this device, the area of the air outlet 15 is a, and the total area of the through holes 16, ..., 16 of the membrane support 17 is the effective excess area b. Further, a straight line A formed by intersecting a plane including the axis of the blowout hole and perpendicular to the overfilm 18 and the surface of the overfilm 18 and the overfilm end portion 21 on the straight line A in the gas inclusion direction.
The angle between the straight line B connecting the inside of the blower outlet 15 and α is α, and the straight line C passing through the center of the blower outlet 15 and parallel to the straight line A
The angle formed by the axis D of the blowout hole is β.

The oil-containing gas blown into the main body container 13 from the blow-out port 15 through the inlet pipe 12 and the blow-out hole 14 is over-filmed.
, 16 through the membrane support 17 and the oil absorbing agent layer 19 in order to remove the oil content, and the gas substantially free of the oil content is discharged from the outlet pipe 20.

In FIG. 3, an oil-containing gas inlet pipe 22 (the left end in the drawing) and a cylindrical outer cylinder portion 23 are provided at the center of one bottom surface.
A cylindrical membrane 26 is attached to a cylindrical membrane support 25 extending from the inlet pipe 22 side to the other bottom surface and concentrically provided with the outer cylinder portion 23 inside the main body container 24 having .
A large number of through holes 27, ..., around the side surface of the membrane support 25.
27 is provided, and the inside of the cylinder of the membrane support 25 is filled with an oil absorbing agent to form an oil absorbing agent layer 28.

In this device, the end on the inlet pipe 22 side of the gap between the inner surface of the outer tubular portion 23 and the outer surface of the overmembrane 26 is used as the air outlet 29.
The area of the air outlet 29 is a, and the total area of the through holes 27, ..., 27 of the membrane support 25 is the effective excess area b.
Further, each circumferential point located in the center between the inner circumference and the outer circumference of the blowout port 29 is the center 30 of the blowout port 29, and is parallel to the common long axis of the outer tubular portion 23 and the overcoat 26. The straight line passing through the center 30 of the air outlet 29 is the axis D of the air outlet.
It is said that A straight line A formed by intersecting a plane including the axis D of the blowout hole and the common long axis with the surface of the hypermembrane 26, and a straight line B connecting the outlet side end 31 of the hypermembrane on the straight line A and the center 30. The angle formed by is α. Further, the straight line C passing through the center 30 and parallel to the straight line A and the axis D of the blowout hole are coincident with each other, and the angle β formed between them is zero.

The oil-containing gas is blown into the gap between the inner surface of the outer tubular portion 23 and the outer surface of the cylindrical overmembrane 26 concentrically provided through the inlet pipe 22 and the outlet 29, and Through the through holes 27, ..., 27 of the membrane support 25.
Then, the oil content is removed through the oil-absorbing agent layer 28 in sequence, and the gas containing substantially no oil content is discharged from the outlet pipe 32.

The oil removing device of the present invention can remove oil such as oil vapor and fine oil mist contained in a gas stream at high speed continuously and for a long time almost completely.

Next, the present invention will be described more specifically by way of examples.
In addition, the oil removal ability in Examples and Comparative Examples was evaluated by the following method.

That is, using high-purity nitrogen gas and petroleum paraffin-based oil having 30 ± 5 carbon atoms, 0.01 g / m ^{3 of} oil mist distributed in a mist diameter of 0.5 to 100 μm using an evaporative condensation mist generator. Gas containing 13 ppb (calculated from vapor pressure) containing oil vapor is continuously generated, and this gas is introduced into an oil removal device, and an oil mist is used for the outlet gas thereof.
The presence or absence of oil vapor and odor was examined. The oil mist is ejected from the nozzle at a flow rate of 100 m / sec by adjusting the diameter of the nozzle, and is sprayed 83 onto a mirror 5 cm away from the nozzle, and the oil mist adhering to the mirror is mirrored with a 100x microscope. Everything within 2 cm from the center of the was observed. In addition, the oil vapor is a hydrogen flame ionization detector (detection lower limit 2
ppb) was used for analysis.

Example 1 In a device similar to that shown in FIG. 1, six through holes each having a diameter of 1.7 mm are radially provided as blow-out holes, and a volume resistivity of the film support is 10 ⁹ [Ω · cm], A membrane support was used in which an acrylic plate having a diameter of 6 cm was provided with 80 through-holes having a diameter of 4 mm so as to be almost uniform throughout, and a blow-out port and a hypermembrane were arranged so that α was 15 °. Note that β was set to 0 °.
The outlet gas of the apparatus was evaluated by the above method while flowing the oil-containing gas at a rate of 6.3 kg / h for each of the types and combinations of the permeation film and the oil absorbing agent which were changed.

As a result, as shown in Table 1, no oil mist was detected in the apparatus outlet gas for 100 hours or more, no oil vapor was detected, no oily odor, and sufficient oil content was obtained for any combination. I knew it had been removed.

Example 2 In an apparatus similar to that shown in FIG. 2, the air outlet was 2 mm ×
A 30 mm rectangular blowout hole is provided, and the volume resistivity is 10 ¹⁸ [Ω · cm] as an overmembrane, the average pore diameter is 5 μm, the thickness is 100 μm, and the Gurley air permeability is 4.4 sec / 100 ml.
The volume resistivity value is 10
^Use a membrane support consisting of a rectangular fluorocarbon resin plate of ¹⁸ [Ω · cm] with a diameter of 30 mm × 100 mm and 80 through holes with a diameter of 4 mm almost uniformly over the entire surface. The overmembrane was placed. As an oil absorbent, 90% alumina, 1 silica
An alumina / silica ball of 0% with an average particle size of 0.65 mm is filled with a layer length of about 150 ml, and the axis of the blowout hole at the blowout port is β = 10 with the blowout hole facing upward or downward.
The oil removal capacity was examined in the same manner as in Example 1 by mounting the same. As a result, both are 1
No oil mist was observed over 00 hours, no oil vapor was detected, and no odor was generated.

Example 3 In an apparatus similar to that shown in FIG. 3, the inner diameter of the outer cylinder portion of the main body container was 20 mm, and the volume specific resistance value was 10 ¹⁷ [Ω].
・ Cm] made of fluorine-based resin, 13 mm in outer diameter, 10 mm in inner diameter, and 50 mm in length.
A membrane support provided with 32 through holes of cm ² substantially uniformly was used. The volume resistivity of the overcoat is 10 ¹⁸ [Ω ・ c
m], an average pore diameter of 1 μm, a film thickness of 400 μm and a Gurley air permeability of 8.5 seconds / 100 ml of a cylindrical fluororesin outer porous membrane. Further, as the oil absorbing agent, about 5 ml of the same alumina / silica ball as that used in Example 2 was filled inside the cylinder of the membrane support. Here, α is 2.5 ° and β is 0 °. In such an apparatus, when a gas was flowed under the same conditions as in Example 1 to examine the oil removal performance, no oil mist was found,
No oil vapor was detected and no odor persisted for more than 20 hours.

Comparative Example 1 In Test No. 1 of Example 1, the oil removing ability was examined in the same manner except that α = 65 ° was set, but no odor was found, but a large amount of oil mist was detected.

Comparative Example 2 In the apparatus used in Example 3, the oil removal ability was examined in the same manner as in Example 3 except that a metal membrane support was used instead of the fluorine resin, and the odor was found. A large amount of oil mist was observed.

Comparative Example 3 In the apparatus used in Example 3, the oil removal performance was examined in the same manner as in Example 3 except that the oil absorbent was not filled. Atta is 1
A large amount of oil mist was also observed after time.

[Brief description of drawings]

1 to 3 are cross-sectional views of the oil removing device of the present invention having different modes. In the drawings, 1 ... Inlet pipe 2 ... Main body container 3 ... Upper surface 4 ... Blowing hole 5
... Blowout port 6 ... Through hole 7 ... Membrane support 8 ... Overmembrane 9
... Oil absorbing agent layer 10 ... Outlet pipe 11 ... Hypermembrane end portion 12 ... Inlet pipe 13 ... Main body container 1
4 ... Outlet hole 15 ... Outlet port 16 ... Through hole 17 ... Membrane support 18 ... Overmembrane 19 ... Oil absorbent layer 20 ... Outlet pipe 21 ... Overmembrane end 2
2 ... Inlet pipe 23 ... Outer cylinder part 24 ... Main body container 25 ... Membrane support 26 ... Overmembrane 27 ... Through hole 28 ... Oil absorbent layer 29 ... Blowout port 30 ...
Center 31 ... peripheral membrane end 32 ... outlet tube A ... straight line B
… Straight line C… Straight line and D… Outlet hole axis

Claims (1)

[Claims] A device for completely removing these oil components from a gas stream containing a trace amount of oil mist and oil vapor as impurities, comprising a main body container having an inlet pipe having a gas outlet and a gas outlet, and a gas of the main body container. A filtration membrane provided on the outlet side, having a volume specific resistance value of 10 ⁵ (Ω · cm ² or more non-conductive and having a large number of fine pores with an average pore diameter of 0.01 to 10 μm,
And a filtration membrane comprising a synthetic resin porous membrane or synthetic or natural fiber laminated membrane having a Gurley air permeability of 2 to 100 sec / 100 ml, and a support provided on the downstream side of the filtration membrane in contact with the filtration membrane. Having a volume resistivity of 10 ⁵ (Ω · cm ² ) or more and made of a non-conductive synthetic resin and having a large number of through holes, and an oil absorbing agent provided on the downstream side of the filtration membrane support. A layer and an oil absorbing agent layer filled with a granular oil absorbing agent, wherein the blowout port is provided with one or a plurality of blowout holes, and a ratio of the effective filtration area b to the total area a of the blowout port is provided. b / a is set to 1 to 200, a straight line A including the axis of the blow hole and a plane perpendicular to the filter membrane surface intersecting with the filter membrane surface, and gas on the straight line A, for each blow hole. A straight line B connecting the end of the filtration membrane in the blowing direction and the center of the outlet
The angle α formed by and is 0 to 20 °, and the angle β formed by the straight line C passing through the center of the blow hole and parallel to the straight line A and the straight line D of the blow hole is 0 to 20 °. Oil removal device characterized by.