JPH06159835A - Interlocking cryopump device - Google Patents

Abstract

PURPOSE:To eliminate the adverse effect of vibration by reciprocating operation of a cryopump device on working space of a precision working device. CONSTITUTION:A working space 400 is evacuated by expansion cooling of a pressurized refrigerant 101 while reciprocating respective displacers 106, 108 of a plurality of refrigerating parts 500A, 500B into respective cylinders 105, 107. Detected outputs S1, S2 wherein the processes of respective reciprocating operations of respective refrigerating parts 500A, 500B are detected by a detection respective processes detecting portion 135 is provided to a control portion 300, so as to control respective electric motors 102 for driving respective displacers 106, 108. Respective electric motors 102 are driven by positioning the phase in a process position of reciprocating operation of the displacers 106, 108 of the refrigerating part 500A and that of a refrigerating part 500B so as to be able to shift the phase to that distributed by a plurality of driving machines. The vibration caused by reciprocating operation of the displacers can be alleviated by averaging and offsetting the reaction by motional inertia when the reciprocating process of the displacers of respective refrigerant portion is reversed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryopump device using a Gifode-McMahon cycle refrigeration system or a Stirling cycle refrigeration system used for cryogenic refrigeration, in which a plurality of units are linked in order to increase the cooling capacity. The present invention relates to an interlocking type cryopump device.

[0002]

2. Description of the Related Art As this type of cryopump device, a single-unit cryopump device as shown in FIG. 6 is well known. In the cryopump device 500 of FIG. 6, the electric motor 102 drives the crank mechanism 103, and the crank mechanism 1
Reference numeral 03 drives the opening / closing operation of the air supply valve 104 / exhaust valve 111 and the reciprocating operation of the reciprocating rod 109 back and forth with a required stroke phase difference.

The air supply valve 104 and the exhaust valve 111 are rod-shaped valve bodies, and an opening part is formed at a portion of the valve body where the diameter is reduced in the middle, so as to resist the helical spring provided on the inner side of the valve chamber. Move back and forth.

The reciprocating rod 109 has a first displacer 1
06 and the second displacer 108 are connected to each other, and the first displacer 106 and the second displacer 108 are in the first cylinder 105 and the second cylinder 1, respectively.
It reciprocates in 07 with the same stroke phase.

The first displacer 106 and the second displacer 108 perform an expansion cooling process near the end point of the stroke moving to the lower side of the figure, and perform an exhaust stroke in the stroke moving to the upper side of the figure, and near the end point thereof. Perform an intake compression stroke.

In the intake compression stroke, the pressurized refrigerant 101A such as helium compressed by the refrigerant compression section (not shown) enters the first cylinder 105 from the refrigerant supply pipe 101 through the air supply valve 104, and 1 through the vent hole 201 of the displacer 106, through the regenerator material 202 and the vent hole 203,
Enter the first expansion chamber 205 side.

The pressurized refrigerant in the first expansion chamber 205 flows in the expansion cooling process in the opposite direction to the flow of the refrigerant in the intake compression process, is discharged through the exhaust valve 111, and is expanded at the same time. Accumulates cooling heat capacity.

During the same process as the first expansion cooling process, the refrigerant in the first expansion chamber 205 passes from the ventilation hole 206 of the second displacer 108 through the regenerator material 207 to the second expansion chamber 20.
9 and then flows in the opposite direction and is discharged from the exhaust valve 111 and at the same time expands to perform the second expansion cooling.
The cooling heat capacity is accumulated in 07.

In the exhaust stroke, the inside of the second expansion chamber 209 and the first expansion chamber 209
The refrigerant whose pressure has been reduced after the expansion and cooling in the expansion chamber 205 passes through the inside of the second displacer 108 and the inside of the first displacer 106 through the route opposite to that during the expansion and adsorption action.
Through the exhaust valve 111, through the crank chamber 103A of the crank mechanism 103, then through the hole D in the bearing portion of the electric motor 102 and through the electric motor chamber 102A, the refrigerant discharge pipe 11
The refrigerant is discharged as the step-down refrigerant 112A from the No. 2 and returns to the refrigerant compression unit (not shown), and is compressed again to become the pressurized refrigerant 101, and the circulation operation is repeated.

Below, at the stroke positions of the first cylinder 105 and the second cylinder 107, the position point corresponding to the end point of the upward stroke of the drawing and the starting point of the downward stroke of the drawing is the top dead center. That is, the end point of the stroke toward the lower side of the figure and the position point corresponding to the start point of the stroke toward the upper side of the figure are called the bottom dead center.

The crank mechanism 103 has a structure in which a plurality of circular eccentric cams are arranged on a crank shaft in a required phase, is connected to the shaft of the electric motor 102, and is cross-hatched with a cross mark in the drawing. Use ball bearings for the parts,
The bearing and the sliding wheel of the eccentric cam are formed.

The fitting position of the reciprocating rod 109 and the ball bearing of the crankshaft is formed in a parallel groove having a horizontal surface perpendicular to the plane of the drawing, and the reciprocating rod 109 is only for vertical movement. And the terminal portion F of the reciprocating rod 109 is
The wall is held by the pothole 103D of the crank chamber 103A, which also serves as a guide.

Looking at the opening sections of the intake valve 104 and the exhaust valve 111 in terms of the rotation angle of the crank mechanism 103 in the plane perpendicular to the plane of the drawing, the intake valve opening section X and the exhaust valve opening section Y are shown. Is, for example, as shown in FIG.
45 ° from about 30 ° to top dead center and bottom dead center
In a certain section, that is, in a hatched section, both the intake valve 104 and the exhaust valve 111 are closed.

The inner shield cover 116 is the first cylinder 105.
From the first stage 115 portion on the top dead center side of the
The second vacuum chamber 117 is covered so as to cover the entire cylinder 107.
From the opening end side of the second vacuum chamber 117, an adsorbed gas 410 is introduced from a device that constitutes the working space 400 partitioned into small chambers, for example, as a place for performing precision processing.

On the opening end side of the second vacuum chamber 117, a first cooled plate 120 having a shutter-like air passage is arranged, and a portion of the second stage 118 provided on the top dead center side of the second cylinder 107. Is provided with a second cooled plate 119 having a shutter-like air passage, and the cooling heat capacity generated in the first stage 115 and the second stage 118 is calculated by the respective surfaces of the first cooled plate 120.
The gas to be adsorbed 410 is supplied through each surface of the second cooled plate 119, etc., so that the required adsorption is performed.

The outer shield cover 113 has a first cylinder 105.
The first vacuum chamber 114 is formed by covering the outside from the bottom dead center side to the opening end side of the second vacuum chamber 117.
14, the outer surface of the first cylinder 105 and the second vacuum chamber 1
The outer surface of 17 is shielded from the external environment to prevent heat loss of cooling heat capacity.

In the present invention, the portion of the cryopump device 500 excluding the electric motor 102, the outer shield cover 113, and the inner shield cover 116 is called a refrigeration unit.

Further, as a device structure having a reciprocating engine having a cylinder and a crank similar to the cryopump device, there are a reciprocating engine having a displacer portion as a piston, that is, a reciprocating piston type internal combustion engine and a reciprocating pump type compressor. In the device, in order to increase the capacity and smooth the recoil, a plurality of reciprocating engines are used, and a multi-phase operation type that operates by shifting the stroke phase of the reciprocating stroke of each reciprocating engine is well known. is there.

[0019]

In a processing apparatus for performing precision processing, for example, a semiconductor manufacturing apparatus, it is necessary to perform processing in a dust-free and organic-free chamber, and a cryostat having such chamber as a working space 400. A pump device is often used.

When the working space 400 is large, a large cryopump device having a suitable capacity is used.
As described above, the cryopump device is a reciprocating engine in which the working gas, for example, helium gas is sucked and exhausted by the displacers 106 and 108. Therefore, the reaction due to the motion inertia at the time of reversing the reciprocating stroke is mainly caused by the outer shield 113. Since it is transmitted to the working space 400 via the above, there arises an inconvenience of vibrating the precision machining portion of the above-mentioned machining apparatus and obstructing the precision machining.

Therefore, by using the same structure as the multiphase operation in the reciprocating piston type internal combustion engine and the reciprocating pump compressor,
It is conceivable to operate a plurality of cryopump devices in an interlocking manner, but there is a problem how to embody such a configuration to obtain a rational configuration.

[0022]

SUMMARY OF THE INVENTION The present invention relates to an interlocking cryopump device for operating a plurality of refrigerating units which perform a cooling operation by reciprocating the above displacer in a cylinder. The individual electric motor means for operating the reciprocating operation by each individual electric motor, the stroke position detecting means for detecting each stroke position of the reciprocating operation of each refrigerating section to obtain each detection output, and the operation of each electric motor By controlling on the basis of the detection output, each stroke position of each refrigerating section is provided with a motor control means for positioning the stroke position by shifting the reciprocating operation according to the number of operating refrigerating sections. The displacer is reciprocated in the cylinder by the first interlocking cryopump device and the crank mechanism, and the plate to be cooled provided in the vacuum chamber surrounding the cylinder is used for adsorption operation. In an interlocking cryopump device that operates a plurality of refrigerating units that perform the above-mentioned operation, an electric motor unit that drives each crank mechanism of each refrigerating unit by one electric motor and the above-mentioned each crank mechanism of the reciprocating operation of each refrigerating unit. A second interlocking cryopump device provided with crank mechanism means for arranging each stroke position at a rotational position shifted by a phase distributed by the number of the plurality of units and cylinder arranging means for arranging each cylinder in one vacuum chamber. By providing a precision processing apparatus for vacuuming the inside of a chamber for performing precision processing by the first or second interlocking cryopump device, the above problems can be solved.

[0023]

In the first interlocking cryopump device, the operation of each electric motor, the phase of the stroke position of each reciprocating operation of each refrigeration unit,
Since the control is performed to shift the phase distributed by the number of operating multiple units, it is possible to average or cancel the reaction due to the motion inertia at the time of reversing the reciprocating stroke of the displacer of each refrigeration unit to reduce the vibration. Act on.

Further, in the second interlocking cryopump device, the reciprocating operation of each refrigerating section is shifted by each crank mechanism into each phase distributed by the number of operating units, and each cylinder is provided with one vacuum. Since the work space and each refrigeration unit are connected by one vacuum chamber by arranging in the room, the reaction due to the motion inertia when reversing the reciprocating stroke of the displacer of each refrigeration unit is averaged within the members of the vacuum chamber. It acts to reduce or cancel the vibrations and reduce the vibration.

[0025]

EXAMPLES Examples will be described below with reference to FIGS.
1 to 5, parts indicated by the same reference numerals as those in FIGS. 6 and 7 are the same functional parts as those explained in FIGS. 6 and 7, and / C is added to the portion at the end of the reference numerals. The attached part is a part commonly configured for each freezing part.

[First interlocking cryopump device] FIG. 1
Is interlocked with a plurality of refrigerating units that perform the cooling operation by reciprocating the above displacers 106 and 108 in the cylinders 105 and 107, for example, interlocking the first side refrigerating unit 500A and the second side refrigerating unit 500B. In the interlocking cryopump device that is operated in the following manner, the individual electric motor means for operating the reciprocating operation of each refrigerating section 500A / 500B by each individual electric motor 102 and the stroke position of the reciprocating operation of each refrigerating section 500A / 500B are For example, by the stroke detection unit 135,
The stroke position detecting means for detecting and obtaining the detection outputs S1 and S2 and the operation of the electric motors 102 are controlled based on the detection outputs S1 and S2, thereby operating the stroke positions of the refrigerating units. The first interlocking cryopump device 600 is provided with a motor control means for positioning the phase in which the reciprocating operation is distributed by the number of the refrigerating units, for example, the phase is shifted by a phase corresponding to a half section of the reciprocating operation. The first interlocking cryopump device 60 will be described below.
The configuration of 0 will be specifically described.

In FIG. 1, each of the cylinders 105 and the electric motor 10 of the first side freezing section 500A and the second side freezing section 500B.
2. The respective axis centers of the crank mechanism 103 are aligned in a straight line direction corresponding to the plane of the drawing, and each first cylinder 1
05 are arranged with a space allowing the adsorbed gas to flow therethrough.

Outer shield cover (common) 113 / C, vacuum chamber (common) 114 / C, inner shield cover (common) 116 / C
Second vacuum chamber (common) 117 / C, second cooled plate (common)
119 / C / first cooled plate (common) 120 / C is the first
The cylinders 105 and 107 of the side freezing part 500A and the second side freezing part 500B are formed as a common one, and each member is assembled with the bottom of the outer shielding cover (common) 113 / C as the substrate 130. It is fixed.

A portion of the working space (common) 400 / C fixed to the opening side of the outer shield cover (common) 113 / C is connected to the inside of a chamber (not shown) for performing precision machining of the precision machining apparatus. , Fixing to the foundation floor is done at the foundation part of the precision processing equipment side.

In the stroke detecting unit 135, the terminal portion F of the reciprocating rod 109 moves in the vertical direction in the figure according to the reciprocating movement of the cylinders 105 and 107 in the pot hole 103D, and at the position of the bottom dead center,
It is for detecting that the terminal portion F has reached almost the lowermost end position. For example, the outer wall portion of the pot hole 103D is made of a non-magnetic material, and the end portion F is made of a magnetic material. The pulse signal output obtained by detecting the proximity of the terminal portion F by forming 135 by a magnetic coil or a Hall effect element is used as the first-side freezing unit 500A.
Is output as the detection output S1 in the stroke detection unit 135, and the detection output S1 is output in the stroke detection unit 135 of the second side freezing unit 500B.
2 is output.

Based on the detection output S1 and the detection output S2, the control unit 300 determines the phase of each stroke position of the reciprocating operation of the first side refrigerating section 500A and the reciprocating operation of the second side refrigerating section as shown in FIG. [2 interlocking operation] As described above, when the reciprocating operation is distributed by the number of operating refrigeration units, the phase shifts, that is, the rotational position of the crank mechanism 103 is 360 °.
Is a part for controlling the electric motor 102 so as to be at a position shifted by a phase corresponding to a 1/2 section corresponding to a phase of 180 ° divided by the number 2 of the number of the refrigerating units operating the reciprocating operation. And a counter circuit that obtains an interval signal S31 corresponding to the above-mentioned 1/2 interval by counting 1/2 of the number of pulses required for one rotation of the crank mechanism 103 and differentially shape the detection outputs S1 and S2. The waveform shaping circuit that obtains the narrow comparison pulses S11 and S12 and the synchronization circuit that performs start-stop synchronization between the comparison pulses S11 and S12 are the interval signal S31.

As shown in FIG. 1, the two freezing sections 500A / 5
In the case of a configuration in which 00B is linked, an outer shield cover (common)
113 / C, vacuum chamber (common) 114 / C, inner shield cover (common) 116 / C, second vacuum chamber (common) 117 / C,
The second cooled plate (common) 119 / C and the first cooled plate (common) 120 / C are formed in an oval shape that surrounds each cylinder 105/107, as in [2. There is. Here, the crank mechanism (first side) 10 of FIG.
3. Crank mechanism (second side) 103. Electric motor (common) 1
02 / C / refrigerant supply pipe (first side) 101 / refrigerant supply pipe (second side) 101 / refrigerant discharge pipe (common) 112 / C is a configuration in the case of a second interlocking cryopump device described later. Is shown.

Three freezing sections 500A, 500B, 500
When C is arranged and interlocked, the axes of the cylinders 105, the electric motor 102, and the crank mechanism 103 of each refrigeration unit are arranged from the bottom surface side of FIG. 1 as shown in [3 interlocking structure bottom surface] of FIG. Arranged on a radial line at equal angular intervals θ equally divided by the number 3 of interlocking units in the horizontal plane, to the extent that the center arrangement radius R of each cylinder 105/107 does not obstruct the adjacent cylinders 105/107. Select and place the outer shield cover (common) 113 / C / vacuum chamber (common) 1
14 / C, inner shield cover (common) 116 / C, second vacuum chamber (common) 117 / C, second cooled plate (common) 119 / C
The first cooled plate (common) 120 / C is provided in each of the cylinders 105 and 107 as in [2.
It is formed in a circle that surrounds.

Then, the control unit 300 controls the stroke positions of the reciprocating motions of the three refrigerating units 500A, 500B, and 500C so that each stroke position performs the reciprocating motions as shown in FIG. It is configured so that the control operation is performed such that the sections are distributed by the number 3 of operating vehicles, that is, the phases are shifted by 1/3 section.

When four or more refrigerating units are arranged and interlocked with each other, the equal angle interval θ and the disposition radius R in [3 interlocking structure bottom face] of FIG. 5 are made to correspond to the disposition number. At the same time, the control unit 300 is configured to perform control such that the phases are shifted by the sections distributed according to the number of units.

[Second interlocking cryopump device] FIG.
Is configured to reciprocate the displacers 106 and 108 in the cylinders 105 and 107 by the crank mechanism 103 as described above, and to enclose the cylinders 105 and 107.
An interlocking cryopump that interlocks a plurality of refrigerating units that perform adsorption by the cooled plates 119 and 120 provided in the vacuum chamber 114, for example, operates the first side refrigerating unit 500A and the second side refrigerating unit 500B in an interlocking manner. In the apparatus 600, electric motor means for operating each crank mechanism 103 of each refrigerating section 500A / 500B by one electric motor 102, and each crank mechanism 103, each stroke position of the reciprocating operation of each refrigerating section 500A / 500B is set to the above-mentioned plural. Crank mechanism means positioned at rotational positions shifted by the phase distributed by the number of units, for example, a phase corresponding to a half section of reciprocating operation, and a cylinder arrangement for arranging each cylinder 105/107 in one first vacuum chamber 114 And a second interlocking cryopump device 600, which will be described below. 600 the structure of, specifically described.

In FIG. 2, each of the cylinders 105 and the electric motor 10 of the first side freezing section 500A and the second side freezing section 500B.
2. The respective axis centers of the crank mechanism 103 are aligned in a straight line direction corresponding to the plane of the drawing, and each first cylinder 1
05, the space is provided to allow the gas to be adsorbed to flow therethrough.

Outer shield cover (common) 113 / C, vacuum chamber (common) 114 / C, inner shield cover (common) 116 / C
Second vacuum chamber (common) 117 / C, second cooled plate (common)
119 / C / first cooled plate (common) 120 / C is the first
It is formed as a common one for each of the cylinders 105 and 107 of the side freezing part 500A and the second side freezing part 500B. Assembling and fixing of each member, working space (common) 400 / C and precision machining device The connection with the inside of the chamber (not shown) for precision processing, the fixing to the foundation floor, and the like are the same as in the case of the first interlocking cryopump device 600 described in FIG.

The crank mechanism of the first freezing section 500A (first
Side) 103 and the crank mechanism (second side) 103 of the second freezing unit 500B are integrally connected to the shaft of one electric motor (common) 102 / C, and the first freezing unit 5 is connected by one electric motor.
00A and the second freezing unit 500B are configured to perform each reciprocating operation.

In the crank mechanism (first side) 103 and the crank mechanism (second side) 103, the phase at each stroke position between the reciprocating operation of the first side refrigerating section 500A and the reciprocating operation of the second side refrigerating section is as follows. As shown in [2 interlocking operation] in Fig. 4, for example, each rotation in which the eccentric position of the circular eccentric cam is shifted so that the position is shifted by a phase in which the reciprocating operation is distributed by the number of interlocking refrigeration units. It is located in position.

The intermediate bearing 136 is used for each crank mechanism 103.
Is a part that supports the bending of the connecting part of. In addition, the refrigerant supply pipe (first side) 101 for the first-side freezing unit 500A
And the refrigerant supply pipe 101 of the second side freezing part 500B are provided separately, but the hole E of the wall part for holding the intermediate bearing 136 is provided as a path for discharging the step-down refrigerant from the second freezing part 500B. After passing through the crank chamber of the first side freezing section 500A, the refrigerant is discharged from both the freezing sections 500A and 500B by the refrigerant discharge pipe (common) 112 / C.

The refrigerant is discharged through the refrigerant discharge pipe (common) 112 /
Since the suction is performed by the suction side of the refrigerant compressor (not shown) connected to C, each pressure-reduced refrigerant from the exhaust valve 111 of each refrigeration unit 500A / 500B interferes with the pressure to adversely affect the expansion action of the refrigerant. There is no such thing.

In the configuration of FIG. 2, the refrigerant supply pipe (second side) 101 of the second side freezing section 500B is the same as the second side freezing section 500B.
Since it is provided from the left toward the outside in the figure, it is an obstacle when interlocking three units.

Therefore, as shown in FIG. 3, the refrigerant supply pipe (second
Side 101 is provided toward the rear side of the drawing sheet or toward the rear side of the drawing sheet, and an air supply valve 104 and an exhaust valve 111 for the reciprocating rod 109 of the second side freezing unit 500B. Are arranged in the same positional relationship as the positions of the air supply valve 104 and the exhaust valve 111 in the first side refrigeration unit 500A, so that the required number of refrigeration units having the same configuration can be sequentially arranged. it can.

As shown in FIG. 2 or 3, in the structure in which the crank mechanisms of a plurality of refrigerating units 500A and 500B are connected in series and interlocked, the outer shield cover (common) 113 / C and the vacuum chamber (common) 114 / C / Inner shield cover (common) 116 / C
-Second vacuum chamber (common) 117 / C-Second cooled plate (common) 119 / C-First cooled plate (common) 120 / C
As in [2 interlocking structure bottom face] of FIG. 5, it is formed in an oval shape surrounding each of the cylinders 105 and 107. In FIG. 5, the refrigerant supply pipe (second side) 101 shows the case of FIG. 3, and in the case of FIG. 2, it is at the position shown by the dotted line, and the arrangement interval P is set to the respective refrigerating sections 500A and 500B. When the number of interlocking arrangements is three or more, the cylinders 105 and 107 are arranged at the center positions of the cylinders 105 and 107.

[Modified Implementation] The present invention can be modified and implemented as follows.

(1) Instead of the second plate to be cooled (common) 119 / C, each plate to be cooled as shown in FIG. 6 is provided for each second stage 118.

(2) In the first interlocking cryopump device, the electric motor 102 is changed to an induction motor, and the control unit 300 controls the count value SC obtained by counting the section from the detection output S1 to the next detection output S1 with the clock pulse. Seeking
In the next counting, control is performed so that the position of the detection output S2 coincides with the position of the count value SC so as to perform start / stop synchronization.

(3) The control unit 300 in the first interlocking cryopump device is constructed by control processing by the microcomputer. Further, the control processing by the microcomputer is configured to also serve as a microcomputer for performing control processing of other functional portions of each refrigeration unit or a microcomputer for performing control processing of processing function portions of the precision processing device.

(4) The arrangement of each refrigerating section in the first interlocking cryopump device is not arranged on each radial line as shown in FIG. It is arranged on a line corresponding to each side.

(5) The vibration of each refrigeration unit causes the substrate 130
Of the substrate 130 so as not to form the self-surrounding vibration frequency of
The thickness and the arrangement position of each refrigeration unit are selected and configured.

(6) The stroke detector 130 is installed in the pot 103D.
The rotation detection mechanism connected to the end of the shaft of the electric motor 102 or the end of the shaft of the crank mechanism, for example, a detection mechanism that faces the slit plate and the Hall effect element, is used to detect the rotation of the electric field. In addition, the stroke position of the reciprocating motion to be detected is set to a position where the moving speed of the reciprocating motion is high, for example, an intermediate position between the top dead center and the bottom dead center, so that the accuracy of the detection position is improved.

(7) The first interlocking cryopump device is
A configuration in which a plurality of required refrigeration units are selected from a plurality of arranged refrigeration units in response to fluctuations in load to operate, for example, 500A / 500B in [3 interlocking configuration bottom face] in FIG.
It is configured such that only 500A and 500B can be selected and operated from among 500C, and the operation control of each electric motor 102 by the control unit 300 is a phase in which a section of reciprocating operation is distributed by the number of currently operating units. The control is performed so that the stroke position is shifted by each.

(8) In the configuration of (7) above, the even-numbered refrigerating sections are arranged, and the refrigerating section to be selected and operated is on the opposite radial line of the above-mentioned radial lines on which the respective refrigerating sections are arranged. Vibrations of the freezing unit relative to the substrate 130 are caused by selecting a plurality of units arranged on the parallel side of each side of the above-mentioned polygon of each refrigeration unit and operating the plurality of units. Configure so that they are easily offset.

(9) In the first interlocking cryopump device or the second interlocking cryopump device, the shaft of the electric motor 102 and the shaft of the crank mechanism 103 of each refrigeration unit are made separately, and each shaft is appropriately made. It is configured by connecting with a joint, or each shaft of each crank mechanism 103 is made separately, and each shaft is configured by interlocking with an appropriate joint.

[0056]

According to the present invention, as described above, the first
In the interlocking cryopump device 600 of FIG.
Based on the detection output of 0, the phase of each electric motor 102 is shifted from the phase of the stroke position of each reciprocating operation of each refrigeration unit, for example, 500A, 500B, and 500C, to the phase distributed by the number of operating units. In order to control
Since it is possible to average or cancel the reaction due to the motion inertia at the time of reversing the reciprocating stroke of each displacer 106/108 of each refrigeration unit, it is possible to reduce the vibration to the working space 400 side.

Further, the second interlocking cryopump device 60
At 0, each refrigeration unit, for example, 500A, 500B, 50
The rotational position of each crank mechanism 103 is shifted so that the stroke position of the reciprocating motion of 0C is shifted to each phase in which the reciprocating motion is distributed by the number of operating units. Since it is placed in the vacuum chamber,
Work space 400 and each freezing part 500A, 500B, 500
Since C and C can be connected to each other by the wall portion of one first vacuum chamber 114, the displacer 1 of each refrigerating unit is provided at the bottom portion / wall portion of the vacuum chamber.
It is possible to average or cancel the reaction due to the motion inertia at the time of reversing the reciprocating stroke of 06.108, and reduce the vibration with respect to the work space 400.

Further, in the precision processing apparatus in which the chamber portion for performing precision processing is evacuated by the first or second cryopump device, each refrigeration unit, for example, 500A / 500B.
-It has features such as being able to eliminate processing obstruction caused by vibration at 500C.

[Brief description of drawings]

1 to 5 show an embodiment of the present invention, and FIGS. 6 and 7 show a prior art. The contents of each drawing are as follows.

FIG. 1 is a vertical cross-sectional view of the device configuration.

FIG. 2 is a vertical cross-sectional view of the device configuration.

FIG. 3 is a vertical cross-sectional view of the device configuration.

[Fig. 4] Operation configuration diagram

[Fig. 5] Bottom view of the device configuration

FIG. 6 is a vertical cross-sectional view of the device configuration.

[Fig. 7] Operation configuration diagram

[Explanation of symbols]

 101 Refrigerant Supply Pipe 101A Pressurized Refrigerant 102 Electric Motor 103 Crank Mechanism 104 Air Supply Valve 105 First Cylinder 106 First Displacer 107 Second Cylinder 108 Second Displacer 109 Reciprocating Rod 111 Exhaust Valve 112 Refrigerant Discharge Pipe 112A Step Down Refrigerant 113 Outer Shielding Cover 114 first vacuum chamber 115 first stage 116 inner shielding cover 117 second vacuum chamber 118 second stage 119 second cooled plate 120 first cooled plate 130 substrate 135 stroke detection unit 136 intermediate bearing 201 vent hole 202 cold storage material 203 Vent hole 205 1st expansion chamber 206 Vent hole 207 Regenerator material 208 Vent hole 209 2nd expansion chamber 300 Control part 400 Working space 410 Adsorbed gas 500 Cryopump device 500A Freezing part 500B Freezing part 500C Freezing part 600 Lio pump device

Claims (3)

[Claims] 1. An interlocking cryopump device for operating a plurality of refrigerating sections for performing a cooling operation by reciprocating a displacer in a cylinder, wherein the reciprocating operation of each refrigerating section is performed by each individual electric motor. Each individual electric motor means to be operated, stroke position detecting means for detecting each stroke position of the reciprocating operation of each refrigerating section to obtain each detection output, and controlling the operation of each electric motor based on each detection output. Accordingly, there is provided an interlocking cryostat for positioning each stroke position of each refrigerating section at a position shifted by a phase in which a reciprocating operation is distributed by the number of operating refrigerating sections. Pump device. 2. An interlocking cryopump device in which a displacer is reciprocated in a cylinder by a crank mechanism, and a plurality of refrigerating units for adsorbing a cooled plate provided in a vacuum chamber surrounding the cylinder are operated in conjunction with each other. And a motor means for operating each crank mechanism of each refrigeration section by one electric motor, and each crank mechanism for each phase in which each stroke position of the reciprocating operation of each refrigeration section is distributed by the number of the plurality of units. An interlocking cryopump device comprising: crank mechanism means positioned at a shifted rotational position; and fixing and cylinder arranging means for arranging each cylinder of each of the refrigerating sections in one vacuum chamber. 3. A precision machining apparatus, wherein the interior of a chamber for precision machining is evacuated by the interlocking cryopump device according to claim 1 or 2.